CN117403196B - Magnet surface sputtering film forming device - Google Patents
Magnet surface sputtering film forming device Download PDFInfo
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- CN117403196B CN117403196B CN202311722834.9A CN202311722834A CN117403196B CN 117403196 B CN117403196 B CN 117403196B CN 202311722834 A CN202311722834 A CN 202311722834A CN 117403196 B CN117403196 B CN 117403196B
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- reciprocating
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- 238000004544 sputter deposition Methods 0.000 title claims abstract description 20
- 230000007246 mechanism Effects 0.000 claims abstract description 49
- 230000005540 biological transmission Effects 0.000 claims abstract description 21
- 230000001105 regulatory effect Effects 0.000 claims abstract description 17
- 239000013077 target material Substances 0.000 claims abstract description 17
- 230000033001 locomotion Effects 0.000 claims abstract description 10
- 230000001360 synchronised effect Effects 0.000 claims description 51
- 238000009434 installation Methods 0.000 claims description 25
- 210000001503 joint Anatomy 0.000 claims description 9
- 230000000712 assembly Effects 0.000 claims description 2
- 238000000429 assembly Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 3
- 229910001172 neodymium magnet Inorganic materials 0.000 description 5
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 229910052761 rare earth metal Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Transmission Devices (AREA)
Abstract
A magnet surface sputtering film forming device belongs to the technical field of permanent magnet sputtering. Including installing conveyor in the frame, reciprocal drive mechanism and mounting bracket, the mounting bracket slidable installs in the frame, and the mounting bracket interval sets up in conveyor's upside, and reciprocal drive mechanism sets up between conveyor and mounting bracket, makes the mounting bracket follow conveyor's direction reciprocating motion, and the mounting bracket is provided with a plurality of side by side, all is provided with reciprocal drive mechanism between each mounting bracket and the conveyor. The reciprocating transmission mechanism of the sputtering film forming device on the surface of the magnet drives the mounting frame to reciprocate, so that the target material reciprocates in the conveying direction of the conveying device, the edge of the target material is fully used, the utilization rate of the target material is greatly improved, the reciprocating transmission mechanism is arranged between the conveying device and the mounting frame, the speed of the target material reciprocating motion is synchronously regulated along with the conveying speed of the magnet, and the sputtering effect on the magnet is guaranteed to be good.
Description
Technical Field
A magnet surface sputtering film forming device belongs to the technical field of permanent magnet sputtering.
Background
The rare earth neodymium iron boron permanent magnet material is widely focused on the excellent magnetic performance and high cost performance, plays an important role in various fields of national economy, but the neodymium iron boron is a multiphase structure, and the electrochemical positions of the phases are different, so that the neodymium iron boron is extremely easy to corrode in an acidic, salt fog environment and moist air. The adoption of surface protection is an effective method for improving the corrosion performance of the NdFeB permanent magnet material.
The magnetron sputtering is an effective film preparation method, a heavy rare earth film is deposited on the surface of a magnet, and the heavy rare earth element is permeated into the magnet along a molten crystal boundary channel under the high temperature condition, so that a protective film is deposited on the surface of the neodymium-iron-boron magnet.
The Chinese patent application CN114334425A discloses a production process of an R-T-B permanent magnet, wherein the magnet passes through the lower side of a target material, so that the sputtering coating on the surface of the magnet is realized, and the following problems exist in the implementation process of the technical scheme: because the track of the sputtering region of the PVD target is aligned with the middle part of the target, the target is only fully utilized in the middle part, but the edge part of the target cannot be utilized, so that the utilization rate of the target is low, and the waste of the target is caused.
Disclosure of Invention
The invention aims to solve the technical problems that: overcomes the defects of the prior art, and provides a magnet surface sputtering film forming device which can realize the reciprocating motion of the target material and further improve the utilization rate of the target material.
The technical scheme adopted for solving the technical problems is as follows: the magnet surface sputtering film forming device is characterized in that: including installing conveyor in the frame, reciprocal drive mechanism and mounting bracket, the mounting bracket slidable installs in the frame, and the mounting bracket interval sets up in conveyor's upside, and reciprocal drive mechanism sets up between conveyor and mounting bracket, makes the mounting bracket follow conveyor's direction reciprocating motion, and the mounting bracket is provided with a plurality of side by side, all is provided with reciprocal drive mechanism between each mounting bracket and the conveyor.
Preferably, the reciprocating transmission mechanism comprises a reciprocating frame, an installation shaft and a part of gears, wherein the reciprocating frame is fixedly connected with the installation frame, the installation shaft is rotatably installed on the frame, one end of the installation shaft is connected with the conveying device through a synchronous belt, the other end of the installation shaft is provided with the part of gears, grooves are formed in the reciprocating frame, upper meshing teeth are formed in the upper portions of the grooves, lower meshing teeth are formed in the lower portions of the grooves, the part of gears are arranged in the grooves, and the teeth of the part of gears are alternately meshed with the lower meshing teeth and the upper meshing teeth.
Preferably, the reciprocating transmission mechanism further comprises an elastic butt joint assembly, the elastic butt joint assembly is arranged in the groove, and the elastic butt joint assemblies are arranged on two sides of the upper meshing teeth and two sides of the lower meshing teeth.
Preferably, the elastic butt joint assembly comprises movable teeth, a supporting spring and a guide shaft, wherein the guide shaft is arranged in the groove, the movable teeth are slidably connected with the guide shaft, and the supporting spring is connected with the movable teeth and pushes the movable teeth to move in a direction close to the upper meshing teeth or the lower meshing teeth.
Preferably, the inner wall of the groove is provided with a guide groove, the movable teeth are fixedly provided with guide blocks, the guide blocks are slidably arranged in the guide groove, the guide shaft is also arranged in the guide groove, the guide blocks are slidably connected with the guide shaft, and the supporting spring is sleeved outside the guide shaft.
Preferably, the device further comprises a speed regulating mechanism, wherein the speed regulating mechanism is arranged between the mounting shaft and the synchronous belt.
Preferably, the speed regulating mechanism comprises a rotary table, a driving gear, driven gears and driven synchronous pulleys, wherein the rotary table is rotatably sleeved outside the installation shaft, the driven gears are installed on the installation shaft and synchronously rotate with the installation shaft, the driven synchronous pulleys are rotatably installed on the rotary table, a plurality of driven synchronous pulleys are arranged around the installation shaft at intervals, the driven synchronous pulleys are coaxially and fixedly connected with the driving gears, the driving gears are meshed with the driven gears, and the driven synchronous pulleys are alternately meshed with the synchronous belt.
Preferably, the speed regulating mechanism further comprises a supporting synchronous pulley rotatably arranged on the frame, the supporting synchronous pulley is symmetrically arranged on two sides of the turntable, and two sides of the synchronous belt are respectively positioned on the outer sides of the supporting synchronous pulleys on the corresponding sides.
Preferably, a locking mechanism is arranged between the turntable and the frame.
Preferably, the locking mechanism comprises an elastic bolt arranged on the frame and locking holes arranged on the rotary table, a plurality of locking holes are arranged around the rotary table at intervals, and locking parts inserted into the locking holes are arranged on the elastic bolt.
Compared with the prior art, the invention has the following beneficial effects:
The reciprocating transmission mechanism of the sputtering film forming device on the surface of the magnet drives the mounting frame to reciprocate, so that the target material reciprocates in the conveying direction of the conveying device, the edge of the target material is fully used, the utilization rate of the target material is greatly improved, the reciprocating transmission mechanism is arranged between the conveying device and the mounting frame, the speed of the target material reciprocating motion is synchronously regulated along with the conveying speed of the magnet, and the sputtering effect on the magnet is guaranteed to be good.
Drawings
FIG. 1 is a schematic front view of a sputtering film forming apparatus for a magnet surface in example 1;
FIG. 2 is a schematic view in partial cross-section of the reciprocating drive mechanism of example 1;
FIG. 3 is an enlarged view of a portion of FIG. 2 at A;
FIG. 4 is a schematic front view of the speed adjusting mechanism in the embodiment 2;
FIG. 5 is a schematic top view of the speed governor mechanism of example 2;
FIG. 6 is a schematic front view of the turntable in example 2;
FIG. 7 is a schematic front cross-sectional view of the elastic plug of example 2;
Fig. 8 is a partial enlarged view at B in fig. 7.
In the figure: 1. a frame; 2. a conveyor belt; 3. a synchronous belt; 4. a driving synchronous pulley; 5. a passive synchronous pulley; 6. a track; 7. a mounting frame; 8. a mounting shaft; 9. a reciprocating frame; 901. a groove; 902. a lower meshing tooth; 903. upper meshing teeth; 904. a guide groove; 10. a partial gear; 11. a movable tooth; 1101. a guide block; 12. a guide shaft; 13. a support spring; 14. a turntable; 1401. a middle shaft hole; 1402. a side shaft hole; 1403. a locking hole; 15. supporting a synchronous belt pulley; 16. a driven gear; 17. a drive gear; 18. an elastic bolt; 1801. an outer cylinder; 1802. a pressing plate; 1803. a rod; 1804. a return spring; 1805. an annular table.
Detailed Description
The present application will be further described with reference to specific embodiments, however, it will be appreciated by those skilled in the art that the detailed description herein with reference to the accompanying drawings is for better illustration, and that the application is not necessarily limited to such embodiments, but rather is intended to cover various equivalent alternatives or modifications, as may be readily apparent to those skilled in the art.
Fig. 1 to 3 are preferred embodiments of the present invention, and the present invention is further described with reference to fig. 1 to 8.
The utility model provides a magnet surface sputtering film forming device, including installing conveyor, reciprocal drive mechanism and the mounting bracket 7 on frame 1, mounting bracket 7 slidable installs on frame 1, and the mounting bracket 7 interval sets up in conveyor's upside, and reciprocal drive mechanism sets up between conveyor and mounting bracket 7, makes mounting bracket 7 follow conveyor's direction reciprocating motion, and mounting bracket 7 is provided with a plurality of side by side, all is provided with reciprocal drive mechanism between each mounting bracket 7 and the conveyor. The reciprocating transmission mechanism of the sputtering film forming device on the surface of the magnet drives the mounting frame 7 to reciprocate, so that the target material reciprocates in the conveying direction of the conveying device, the edge of the target material is fully used, the utilization rate of the target material is greatly improved, the reciprocating transmission mechanism is arranged between the conveying device and the mounting frame 7, the speed of the target material reciprocating motion is synchronously regulated along with the conveying speed of the magnet, and the sputtering effect on the magnet is guaranteed to be good.
Example 1
As shown in fig. 1-3: the conveying device is installed in the middle of the frame 1, in the embodiment, the conveying device is a conveying belt 2, conveying rollers are rotatably installed on the left side and the right side of the frame 1, two ends of the conveying belt 2 are connected with the conveying rollers, a conveying motor is installed on the frame 1, an output shaft of the conveying motor is connected with any conveying roller and drives the conveying roller to rotate, and then the conveying belt 2 is moved, so that the conveying of a magnet is realized.
The track 6 is all installed to the top both sides of frame 1, and slidable installs respectively on the track 6 of corresponding side in the both sides of mounting bracket 7, and mounting bracket 7 is provided with two at least along conveyor belt 2's direction of delivery interval, and in this embodiment, mounting bracket 7 is provided with two along conveyor belt 2's direction of delivery interval, all installs the target on each mounting bracket 7. And a reciprocating transmission mechanism is arranged between each mounting frame 7 and the corresponding side conveying roller.
The conveying belt 2 conveys the magnet, and meanwhile, each conveying roller is connected with the mounting frame 7 on the corresponding side through the reciprocating transmission mechanism and drives the mounting frame 7 to reciprocate, so that the mounting frame 7 reciprocates along the conveying direction of the conveying belt 2, and the reciprocating speed of the mounting frame 7 is synchronously adjusted along with the conveying speed of the conveying belt 2.
The reciprocating transmission mechanism comprises a reciprocating frame 9, a part of gear 10 and a mounting shaft 8, wherein the reciprocating frame 9 is fixedly connected with the mounting frame 7 at the corresponding side and drives the mounting frame 7 to reciprocate. The reciprocating frame 9 is provided with a groove 901, a plurality of upper meshing teeth 903 are arranged on the upper side of the groove 901 side by side, a plurality of lower meshing teeth 902 are arranged on the lower side of the groove 901 side by side and at intervals, the mounting shaft 8 is rotatably mounted on the frame 1, the partial gear 10 is coaxially mounted at one end of the mounting shaft 8 and synchronously rotates along with the mounting shaft 8, and the teeth of the partial gear 10 are alternately meshed with the upper meshing teeth 903 and the lower meshing teeth 902.
The other end of the installation shaft 8 is coaxially provided with a passive synchronous pulley 5, and the passive synchronous pulley 5 rotates synchronously with the installation shaft 8. The end parts of the conveying rollers are coaxially provided with a driving synchronous pulley 4, the driving synchronous pulley 4 is connected with a driven synchronous pulley 5 through a synchronous belt 3, so that an installation shaft 8 synchronously rotates along with the rotation of the conveying rollers, the installation shaft 8 drives a part of gears 10 to rotate, the part of gears 10 are alternately meshed with an upper meshing tooth 903 and a lower meshing tooth 902, and then the reciprocating frame 9 is driven to reciprocate, and the installation frame 7 synchronously moves along with the reciprocating frame 9.
The reciprocating transmission mechanism further comprises an elastic abutting component, the elastic abutting component is mounted on the inner wall of the groove 901, in this embodiment, elastic abutting components are arranged on two sides of the upper meshing teeth 903 and two sides of the lower meshing teeth 902, the elastic abutting component can avoid rigid load between the part of gear 10 and the upper meshing teeth 903 or the lower meshing teeth 902, damage to equipment is caused, and stable meshing between the upper meshing teeth 903 or the lower meshing teeth 902 and the part of gear 10 can be ensured.
The elastic butt joint assembly comprises movable teeth 11, supporting springs 13 and a guide shaft 12, wherein guide grooves 904 are formed in the inner walls of grooves 901, guide blocks 1101 are arranged on the movable teeth 11, the guide blocks 1101 are slidably arranged in the guide grooves 904, the guide shaft 12 is installed in the guide grooves 904, the guide blocks 1101 are slidably connected with the guide shaft 12, the supporting springs 13 are sleeved outside the guide shaft 12, the supporting springs 13 are in a compressed state, the supporting springs 13 are located on one side, away from the upper meshing teeth 903 or the lower meshing teeth 902, of the guide blocks 1101, one ends of the supporting springs 13 are supported on the inner walls of the guide grooves 904, and the other ends of the supporting springs 13 are supported on the guide blocks 1101.
When the partial gear 10 is engaged with the movable teeth 11, the movable teeth 11 can realize buffering, avoid generating rigid load, and also ensure that the engagement teeth 11 and the upper engagement teeth 903 or the lower engagement teeth 902 can stably finish abutting.
The conveying motor drives the conveying rollers to rotate, the two conveying rollers synchronously rotate under the action of the conveying belt 2, and the magnet is conveyed by the conveying belt 2. Meanwhile, the conveying roller drives the mounting shaft 8 to rotate through the synchronous belt 3, so that the partial gear 10 is driven to rotate, the teeth of the partial gear 10 are alternately meshed with the upper meshing teeth 903 and the lower meshing teeth 902, and then the reciprocating frame 9 is driven to reciprocate, and the mounting frame 7 is driven to reciprocate.
Example 2
As shown in fig. 4-8: the magnet surface sputtering film forming device also comprises a speed regulating mechanism, wherein the speed regulating mechanism is arranged between the synchronous belt 3 and the installation shaft 8, so that the transmission ratio between the installation shaft 8 and the conveying roller is regulated, and the speed of the reciprocating motion of the installation frame 7 is conveniently regulated according to different requirements.
The speed regulating mechanism comprises a rotary table 14, a driving gear 17, a driven gear 16 and a supporting synchronous pulley 15.
The turntable 14 is coaxially arranged outside the mounting shaft 8, and the turntable 14 and the mounting shaft 8 can rotate relatively. The middle part of carousel 14 is provided with middle part shaft hole 1401, and carousel 14 is outside installation axle 8 through middle part shaft hole 1401 rotatable cover. The turntable 14 is provided with side shaft holes 1402, the side shaft holes 1402 are uniformly distributed around the middle shaft hole 1401 at intervals, and in this embodiment, the side shaft holes 1402 are uniformly distributed around the middle shaft hole 1401 at intervals of four. Each side shaft hole 1401 is rotatable with a rotation shaft, and the rotation shaft and the turntable 14 can rotate relatively. The rotating shaft is used for installing the passive synchronous pulley 5 and the driving gear 17.
All fixedly connected with passive synchronous pulley 5 and driving gear 17 in each pivot, fixedly connected with passive gear 16 on the installation axle 8, the diameter of each passive synchronous pulley 5 is different, carousel 14 drives passive synchronous pulley 5 and driving gear 17 and rotates around passive gear 16, make each passive synchronous pulley 5 mesh with the hold-in range 3 one by one, simultaneously driving gear 17 meshes with passive gear 16, and then make installation axle 8 follow the synchronous rotation of passive gear 16, and then can adjust the rotational speed of installation axle 8 through rotating carousel 14, in order to realize the regulation to the reciprocating speed of mounting bracket 7.
The supporting synchronous pulleys 15 are symmetrically arranged on two sides of the turntable 14, the supporting synchronous pulleys 15 are rotatably arranged on the frame 1, two sides of the synchronous belt 3 are respectively positioned on the outer sides of the supporting synchronous pulleys 15 on the corresponding sides, so that mutual interference between the synchronous belt 3 and the turntable 14 is avoided, and the synchronous belt 3 is meshed with the driven synchronous pulley 5 which rotates to the top along with the turntable 14.
A locking mechanism is arranged between the turntable 14 and the frame 1, and can lock the turntable 14 to ensure the position determination of the turntable 14.
The locking mechanism includes an elastic latch 18 mounted on the frame 1 and locking holes 1403 provided on the turntable 14, the locking holes 1403 being in one-to-one correspondence with the side shaft holes 1402 and being provided outside the corresponding side shaft holes 1402. The elastic latch 18 is provided with a locking portion that can be inserted into the locking hole 1403.
The resilient latch 18 includes an outer barrel 1801, a plunger 1803, and a return spring 1804.
The outer cylinder 1801 is a cylinder with a closed upper end, the outer cylinder 1801 is fixedly arranged on the frame 1, an outward flange is arranged at the open end of the outer cylinder 1801, a pressing plate 1802 is arranged on the frame 1, and the pressing plate 1802 fixedly installs the outer cylinder 1801 on the frame 1 through the outward flange. The lower end of the plunger 1803 slidably extends downwardly through the closed end of the outer barrel 1801 and the pressure plate 1802 in turn, and forms a locking portion at the lower end of the plunger 1803. An outer convex annular table 1805 is arranged around the outer wall of the plunger 1803, the annular table 1805 is arranged in the outer barrel 1801, a return spring 1804 is arranged in the outer barrel 1801, the return spring 1804 is sleeved outside the plunger 1803, the return spring 1804 is in a compressed state, the upper end of the return spring 1804 is supported at the closed end of the outer barrel 1801, the lower end of the return spring is supported on the annular table 1805, and the plunger 1803 is pushed to move downwards through the annular table 1805 so that the lower end of the plunger 1803 stretches into the locking hole 1403.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the invention in any way, and any person skilled in the art may make modifications or alterations to the disclosed technical content to the equivalent embodiments. However, any simple modification, equivalent variation and variation of the above embodiments according to the technical substance of the present invention still fall within the protection scope of the technical solution of the present invention.
Claims (1)
1. A magnet surface sputtering film forming device is characterized in that: the device comprises a conveying device, a reciprocating transmission mechanism and a mounting frame (7), wherein the conveying device, the reciprocating transmission mechanism and the mounting frame (7) are arranged on a frame (1), the mounting frame (7) is slidably arranged on the frame (1), the mounting frame (7) is arranged on the upper side of the conveying device at intervals, the reciprocating transmission mechanism is arranged between the conveying device and the mounting frame (7), the mounting frame (7) is made to reciprocate along the conveying direction of the conveying device, the mounting frames (7) are arranged in a plurality, and the reciprocating transmission mechanisms are arranged between the mounting frames (7) and the conveying device;
The reciprocating transmission mechanism is arranged between the conveying device and the mounting frame (7), so that the speed of the reciprocating motion of the target material is synchronously regulated along with the conveying speed of the magnet;
The conveying device is a conveying belt (2), conveying rollers are rotatably arranged on the left side and the right side of the frame (1), two ends of the conveying belt (2) are connected with the conveying rollers, a conveying motor is arranged on the frame (1), an output shaft of the conveying motor is connected with any conveying roller and drives the conveying motor to rotate, and further movement of the conveying belt (2) is achieved, and conveying of a magnet is achieved;
The two sides of the top of the frame (1) are respectively provided with a track (6), two sides of the mounting frame (7) are respectively and slidably arranged on the tracks (6) on the corresponding sides, the mounting frames (7) are provided with at least two at intervals along the conveying direction of the conveying belt (2), each mounting frame (7) is provided with a target material, and a reciprocating transmission mechanism is arranged between each mounting frame (7) and the corresponding side conveying roller;
The reciprocating transmission mechanism comprises a reciprocating frame (9), a mounting shaft (8) and a part of gear (10), wherein the reciprocating frame (9) is fixedly connected with the mounting frame (7), the mounting shaft (8) is rotatably mounted on the frame (1), one end of the mounting shaft (8) is connected with the conveying device through a synchronous belt (3), the other end of the mounting shaft is provided with the part of gear (10), a groove (901) is formed in the reciprocating frame (9), an upper meshing tooth (903) is formed in the upper portion of the groove (901), a lower meshing tooth (902) is formed in the lower portion of the groove (901), the part of gear (10) is arranged in the groove (901), and the teeth of the part of gear (10) are alternately meshed with the lower meshing tooth (902) and the upper meshing tooth (903);
the reciprocating transmission mechanism further comprises an elastic butt joint assembly, the elastic butt joint assembly is arranged in the groove (901), and the elastic butt joint assemblies are arranged on both sides of the upper meshing teeth (903) and both sides of the lower meshing teeth (902);
The elastic butt joint assembly comprises movable teeth (11), a supporting spring (13) and a guide shaft (12), wherein the guide shaft (12) is arranged in the groove (901), the movable teeth (11) are slidably connected with the guide shaft (12), and the supporting spring (13) is connected with the movable teeth (11) and pushes the movable teeth to move in a direction approaching to the upper meshing teeth (903) or the lower meshing teeth (902); the supporting spring (13) is sleeved outside the guide shaft (12), the supporting spring (13) is in a compressed state, the supporting spring (13) is positioned on one side of the guide block (1101) far away from the upper meshing teeth (903) or the lower meshing teeth (902), one end of the supporting spring (13) is supported on the inner wall of the guide groove (904), and the other end of the supporting spring is supported on the guide block (1101);
the device also comprises a speed regulating mechanism, wherein the speed regulating mechanism is arranged between the mounting shaft (8) and the synchronous belt (3);
The speed regulating mechanism comprises a rotary table (14), a driving gear (17), driven gears (16) and driven synchronous pulleys (5), wherein the rotary table (14) is rotatably sleeved outside the installation shaft (8), the driven gears (16) are installed on the installation shaft (8) and synchronously rotate with the installation shaft, the driven synchronous pulleys (5) are rotatably installed on the rotary table (14), a plurality of driven synchronous pulleys (5) are arranged at intervals around the installation shaft (8), the driven synchronous pulleys (5) are coaxial and fixedly connected with the driving gears (17), the driving gears (17) are meshed with the driven gears (16), and the driven synchronous pulleys (5) are alternately meshed with the synchronous belt (3);
The inner wall of the groove (901) is provided with a guide groove (904), a guide block (1101) is fixedly arranged on the movable tooth (11), the guide block (1101) is slidably arranged in the guide groove (904), a guide shaft (12) is also arranged in the guide groove (904), and the guide block (1101) is slidably connected with the guide shaft (12);
The speed regulating mechanism further comprises a supporting synchronous pulley (15), the supporting synchronous pulley (15) is rotatably arranged on the frame (1), the supporting synchronous pulley (15) is symmetrically arranged on two sides of the turntable (14), and two sides of the synchronous belt (3) are respectively positioned on the outer sides of the supporting synchronous pulley (15) on the corresponding side;
A locking mechanism is arranged between the turntable (14) and the frame (1);
The locking mechanism comprises an elastic bolt (18) arranged on the frame (1) and locking holes (1403) arranged on the rotary table (14), a plurality of locking holes (1403) are formed in the rotary table (14) at intervals, and locking parts inserted into the locking holes (1403) are arranged on the elastic bolt (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311722834.9A CN117403196B (en) | 2023-12-15 | 2023-12-15 | Magnet surface sputtering film forming device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311722834.9A CN117403196B (en) | 2023-12-15 | 2023-12-15 | Magnet surface sputtering film forming device |
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| Publication Number | Publication Date |
|---|---|
| CN117403196A CN117403196A (en) | 2024-01-16 |
| CN117403196B true CN117403196B (en) | 2024-04-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202311722834.9A Active CN117403196B (en) | 2023-12-15 | 2023-12-15 | Magnet surface sputtering film forming device |
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| CN (1) | CN117403196B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3128590A (en) * | 1961-06-14 | 1964-04-14 | Roberto Escursell Prat | Automatic thread joiner for continuous spinning machines |
| CN200975454Y (en) * | 2006-11-24 | 2007-11-14 | 浙江理工大学 | Straight-line reciprocating drive and reversion mechanism |
| CN108220899A (en) * | 2018-01-02 | 2018-06-29 | 京东方科技集团股份有限公司 | A kind of sputtering equipment |
| CN215364034U (en) * | 2021-07-14 | 2021-12-31 | 太仓瑞易得塑胶制造有限公司 | Sealing rubber strip winding speed adjusting machine |
-
2023
- 2023-12-15 CN CN202311722834.9A patent/CN117403196B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3128590A (en) * | 1961-06-14 | 1964-04-14 | Roberto Escursell Prat | Automatic thread joiner for continuous spinning machines |
| CN200975454Y (en) * | 2006-11-24 | 2007-11-14 | 浙江理工大学 | Straight-line reciprocating drive and reversion mechanism |
| CN108220899A (en) * | 2018-01-02 | 2018-06-29 | 京东方科技集团股份有限公司 | A kind of sputtering equipment |
| CN215364034U (en) * | 2021-07-14 | 2021-12-31 | 太仓瑞易得塑胶制造有限公司 | Sealing rubber strip winding speed adjusting machine |
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| CN117403196A (en) | 2024-01-16 |
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