CN117387915A - Parameter measuring method and parameter measuring device for lens end of lens optical fiber - Google Patents

Parameter measuring method and parameter measuring device for lens end of lens optical fiber Download PDF

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Publication number
CN117387915A
CN117387915A CN202311588518.7A CN202311588518A CN117387915A CN 117387915 A CN117387915 A CN 117387915A CN 202311588518 A CN202311588518 A CN 202311588518A CN 117387915 A CN117387915 A CN 117387915A
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China
Prior art keywords
axis
lens
lens end
optical fiber
parallel
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Inventor
胡爱玲
何起训
黎单驰
周孟欣
李喆
马书豪
张浩容
李立彤
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Changfei Wuhan Photosystem Co ltd
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Changfei Wuhan Photosystem Co ltd
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Priority to CN202311588518.7A priority Critical patent/CN117387915A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for

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  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

The invention discloses a parameter measurement method of a lens end of a lens optical fiber, which comprises the following steps: 1) Enabling the center line of the lens end to be parallel to the Z axis, and enabling the lens end to emit laser to the detection surface to form a light spot; 2) The lens end rotates around the central line of the lens end to minimize the elliptical value of the light spot, and a lens end image is obtained through a CCD microscope; 3) Moving the lens end along a straight line parallel to the X axis and the Y axis to enable the center of the light spot to coincide with the center of the cross line on the detection surface; 4) The lens end is moved along the Z axis by a distance D, and the lens end is rotated around a straight line parallel to the X axis by an angle theta X And a linear rotation angle θ about a line parallel to the Y-axis Y The center of the light spot is overlapped with the center of the cross line on the detection surface again, and theta is calculated X And theta Y The fast axis misalignment and the slow axis misalignment of the emitted laser are respectively recorded. The invention has the advantages of automatic control by using relative position measurement, high test tolerance and precision while saving test costThe degree is high.

Description

Parameter measuring method and parameter measuring device for lens end of lens optical fiber
Technical Field
The invention belongs to the technical field of lensed fiber detection, and particularly relates to a parameter measurement method and a parameter measurement device for a lensed end of a lensed fiber.
Background
The semiconductor laser has small volume, light weight and high electro-optic conversion efficiency, and has wide application in EDFA, fiber optic gyroscope, laser radar and other fields. As a laser core component, the fine processing of the lens optical fiber and the accurate detection of the optical index determine the coupling efficiency of the lens optical fiber and the chip.
After the lens optical fiber is processed, the detection of the geometric dimension is firstly involved, and is mainly used for checking whether the grinding angle and the related dimension meet the requirements of clients or not, and meanwhile, the angle debugging degree of the back feeding grinding equipment is one of main indexes of the lens optical fiber detection. And secondly, detecting the divergence angle of the optical fiber output light spot of the lens, and generally taking the angle corresponding to the position of the peak intensity of the half-width of the light beam as the divergence angle, and matching the divergence angle of the chip in the semiconductor laser by using the value, namely matching the light spot mode field, so that higher coupling efficiency can be achieved. In addition, in the actual processing of the lensed fiber, the situation of asymmetric wedge surface/conical grinding may occur, and after the lensed fiber is manufactured, the fiber core is not located at the center of the lensed fiber, so that the central axis of the laser output by the lensed fiber and the central axis of the lensed fiber deviate, and the angle formed by the two axes is the off-axis degree. When the lensed fiber is coupled to the semiconductor laser, the position of the lensed fiber needs to be adjusted so that the optical axis of the lensed fiber coincides with the optical axis of the chip of the semiconductor laser to achieve maximum coupling efficiency. If the lens optical fiber is large in off-axis degree, it is difficult to quickly adjust the lens optical fiber to an optimal coupling position, so that the final coupling efficiency is affected.
By detecting the geometric dimension, the light spot off-axis degree and the divergence angle of the lens optical fiber, the defect of lens optical fiber processing can be fed back, and a product with better quality can be obtained. At present, for geometric dimension indexes, manufacturers basically control on a grinding platform, and do not all make factory detection confirmation, and for certain special lens optical fiber products, such as wedge-shaped lens optical fibers, the product dimension can be accurately fed back only by pitching a certain angle test when detecting the included angle of wedge surfaces, and the factory detection confirmation is difficult to realize on the grinding platform. The detection of the light spot off-axis degree and the divergence angle is divided into two cases, firstly, different equipment is adopted for testing, each equipment needs to be respectively adjusted to an optimal position, and then each equipment is respectively tested, such as parameters of geometric dimension, off-axis degree, divergence angle and the like, the single index testing process is complex, the testing efficiency is low, and the batch manufacturing cost is increased; secondly, the same equipment is tested, the optical fiber position is fixed, and the off-axis degree and the divergence angle are calculated according to the absolute position of the lens optical fiber from the center position of the detector, so that certain deviation exists between the two index test results.
Disclosure of Invention
Aiming at the defects or improvement demands of the prior art, the invention provides a parameter measurement method and a parameter measurement device for a lens end of a lens optical fiber, which can measure the geometric parameters of the lens optical fiber by adjusting the posture of the optical fiber with high precision, test links are looped, and the relative position measurement is utilized to calculate the light spot off-axis degree and the divergence angle.
In order to achieve the above object, according to the present invention, there is provided a method for measuring parameters of a lensed end of a lensed fiber, comprising the steps of:
1) The central line of the lens end of the lens optical fiber is parallel to the Z axis, and the tail fiber of the lens optical fiber is connected with a laser, so that the lens end emits laser to the detection surface of the detector of the beam quality analyzer to form a light spot; wherein the Z axis is perpendicular to the detection surface of the detector;
2) The lens end rotates around the central line of the lens end to enable the ellipse value of a light spot to be minimum, then an image of the lens end is obtained through a CCD microscope, and then the geometric dimension of the lens end is obtained through image processing, wherein the ellipse value of the light spot = the maximum value of the length of the light spot parallel to an X axis/the maximum value of the length of the light spot parallel to a Y axis, a horizontal line of a cross line on a detection surface is taken as the X axis, a vertical line of the cross line on the detection surface is taken as the Y axis, and the X axis, the Y axis and the Z axis are three coordinate axes of a Cartesian coordinate system;
3) Moving the lens end along a straight line parallel to the X axis and along a straight line parallel to the Y axis so that the center of the light spot coincides with the center of the cross line on the detection surface;
4) The lens end is moved along the Z axis by a distance D, and the lens end is rotated around a straight line parallel to the X axis by an angle theta X And a linear rotation angle θ about a line parallel to the Y-axis Y The center of the light spot is overlapped with the center of the cross line on the detection surface again, and theta is calculated X And theta Y The fast axis off-axis degree and the slow axis off-axis degree of the emergent laser light of the lens end are respectively recorded, wherein the slow axis is parallel to the X axis, and the fast axis is parallel to the Y axis.
Preferably, the method further comprises the following steps:
5) Selecting a measuring mode of a divergence angle on a beam quality analyzer, wherein the selected measuring mode takes an angle corresponding to the position of the peak intensity of the half-width of the beam as the divergence angle;
6) In step 3), after the center of the spot coincides with the center of the reticle on the detection surface, the coordinates (X 'of the position of the peak intensity of the light beam displayed on the light beam quality analyzer at this time are recorded' 1 ，Y’ 1 )；
In step 4), after the center of the spot coincides again with the center of the reticle on the detection surface, the coordinates (X 'of the position of the peak intensity of the light beam displayed on the light beam mass analyzer at this time are recorded' 2 ，Y’ 2 )；
7) Obtain the divergence angle alpha of the slow axis direction:
a divergence angle beta of the fast axis direction is obtained:
preferably, the two CCD microscopes are respectively a first CCD microscope and a second CCD microscope, the central line of the lens of the first CCD microscope and the central line of the lens of the second CCD microscope are respectively parallel to the Y axis and the X axis, the Y axis and the Z axis are three coordinate axes of a Cartesian coordinate system;
any two central lines among the central lines of the lens end, the central line of the lens of the first CCD microscope and the central line of the lens of the second CCD microscope are coplanar.
Preferably, in step 1), the lens end of the lensed fiber is held by the optical fiber rotation jig, and after the lens end is initially held by the optical fiber rotation jig, the center line of the lens end is made parallel to the Z axis and the center line of the lens end is made coaxial with the rotation center line of the optical fiber rotation jig.
Preferably, the lens end rotates around the central line of the lens end in a stepping mode to minimize the elliptical value of the light spot;
and/or the number of the groups of groups,
the lens end of the lensed fiber is moved along a straight line parallel to the X axis and along a straight line parallel to the Y axis in a stepping manner;
and/or the number of the groups of groups,
the lens end of the lensed fiber is rotated by an angle theta about a line parallel to the X-axis in a stepwise manner X And a linear rotation angle θ about a line parallel to the Y-axis Y 。
Preferably, a five-dimensional adjustment frame is used to move the lensed end of the lensed fiber along a line parallel to the X-axis, the Y-axis, and the Z-axis, and to rotate the lensed end of the lensed fiber by an angle θ about a line parallel to the X-axis X And a linear rotation angle θ about a line parallel to the Y-axis Y 。
Preferably, the beam quality analyzer is a slit beam quality analyzer and employs a germanium photodiode detector.
Preferably, the laser is a semiconductor laser, and the tail fiber of the lens optical fiber is connected with the laser through an adapter.
According to another aspect of the present invention, there is also provided a parameter measurement apparatus for implementing the parameter measurement method of the lensed end of the lensed fiber, characterized by comprising a mount, and a five-dimensional adjustment frame, a beam quality analyzer, a first CCD microscope, and a second CCD microscope mounted together on the mount, wherein:
the five-dimensional adjusting frame is provided with an optical fiber rotating clamp for driving the optical fiber rotating clamp to move along a straight line parallel to an X axis, a Y axis and a Z axis, rotate around the straight line parallel to the X axis and rotate around the straight line parallel to the Y axis;
the optical fiber rotating clamp is used for clamping the lens end of the lens optical fiber so as to enable the central line of the lens end to be parallel to the Z axis and enable the central line of the lens end to be coaxial with the rotating central line of the optical fiber rotating clamp in the initial stage, thereby facilitating the optical fiber rotating clamp to drive the lens end to rotate around a straight line parallel to the Z axis;
the detection surface of the detector of the beam quality analyzer is vertical to the Z axis, so that laser emitted from the lens end of the lens optical fiber forms a light spot on the detection surface of the detector;
the center line of the lens of the first CCD microscope is parallel to the Y axis, and the center line of the lens of the second CCD microscope is parallel to the X axis, so as to obtain microscopic images of the lens end of the lens optical fiber.
Preferably, the optical fiber rotating clamp is provided with a first motor for driving the lens end of the lens optical fiber to rotate around a straight line parallel to the Z axis;
a plurality of second motors are arranged on the five-dimensional adjusting frame and used for driving the optical fiber rotating clamp to move along a straight line parallel to an X axis, a Y axis and a Z axis, and each second motor is respectively provided with an encoder for obtaining the moving stroke of the optical fiber rotating clamp;
furthermore:
the five-dimensional adjusting frame is provided with a plurality of angle scales for obtaining angles of the optical fiber rotating clamp rotating around a straight line parallel to an X axis and rotating around a straight line parallel to a Y axis;
alternatively, a plurality of third motors are mounted on the five-dimensional adjustment frame for driving the optical fiber rotation jig to rotate around a straight line parallel to the X axis and around a straight line parallel to the Y axis, and encoders are respectively mounted on each of the third motors for obtaining angles of rotation of the optical fiber rotation jig around the straight line parallel to the X axis and around the straight line parallel to the Y axis.
In general, the above technical solutions conceived by the present invention, compared with the prior art, enable the following beneficial effects to be obtained:
1) According to the parameter measurement method for the lens end of the lens optical fiber, the attitude of the lens end of the lens optical fiber is regulated through the parameter measurement device, the geometric dimension and the off-axis degree of the lens optical fiber can be sequentially detected, the test links are in loop-to-loop connection, the off-axis degree is directly measured by utilizing the accurate debugging process in geometric test, the debugging and calibration of the geometric test process and the off-axis degree test process are not needed, the off-axis degree of laser is calculated by utilizing the relative position test, the process is automatically controllable, the debugging program is saved, the test efficiency is improved, the measurement tolerance is high, the precision is high, the production cost can be reduced, and the problems of inaccurate test and the like can be solved.
2) The invention skillfully combines the sequence of three tests, and the sequence is as follows: the method comprises the steps of geometric test, off-axis degree test and divergence angle test, wherein the direction of a lens end is adjusted to meet the requirements of the off-axis degree and divergence angle test when geometric parameters are tested, so that the off-axis degree and divergence angle test is more accurate. In the preferred scheme, during the divergence angle test, parameters obtained during the eccentricity test are utilized, so that the program is saved and the test efficiency is improved relative to the method for respectively carrying out the eccentricity test and the divergence angle test.
3) According to the parameter measuring device for the lens end of the lens optical fiber, the five-dimensional adjusting frame can drive the optical fiber rotating clamp and the lens end of the lens optical fiber clamped on the optical fiber rotating clamp to move in five directions, the optical fiber rotating clamp can rotate to drive the lens end to rotate, when the elliptical value of a light spot on a detection surface is minimum, the optimal detection position of the lens end can be obtained, at the moment, microscopic images can be obtained through the first CCD microscope and the second CCD microscope, the geometric dimension can be further obtained, and in the subsequent measurement of the off-axis degree and the divergence angle, the off-axis degree and the divergence angle can be obtained through the adjustment of the pose of the lens end by the five-dimensional adjusting frame, so that the geometric dimension, the off-axis degree and the divergence angle of the lens end can be obtained through multiple adjustment on one device.
Drawings
FIG. 1 is a schematic view of a parameter measurement device of the lensed end of a lensed fiber of the invention;
FIG. 2 is a schematic view of the lens end in an initial horizontal state emitting oblique laser light onto the detection surface;
fig. 3 is a schematic view of the lens end in an adjusted position tilted state emitting horizontal laser light onto the detection surface.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Referring to fig. 1, a method for measuring parameters of a lensed end of a lensed fiber includes the steps of:
1) Clamping the lens end 71 of the lens fiber, enabling the central line of the lens end 71 of the lens fiber to be parallel to the Z axis, connecting the tail fiber of the lens fiber with a laser through an adapter, wherein the laser is a semiconductor laser, and enabling the lens end 71 of the lens fiber to emit laser to the detection surface 411 of the detector of the beam quality analyzer 41 to form a light spot; the beam quality analyzer 41 is preferably a slit beam quality analyzer 41 and adopts a germanium photodiode detector to perform quality analysis on the light spot output by the lens optical fiber; wherein the Z axis is perpendicular to the detection face 411 of the detector;
2) By rotating the lens end 71 around the center line of the lens end 71, the orientation of the lens end 71 of the lensed fiber is adjusted to an orientation corresponding to the position when the elliptical value of the light spot is minimum (the orientation of the light spot is also adjusted), the imaging quality is optimal in this orientation, and the subsequent measurement of the decentration and divergence angle is facilitated. The laser is then turned off and the lens end 71 pauses the lasing out. The image of the lens end 71 of the lensed fiber is obtained by a CCD microscope, and then the geometry of the lens end 71 of the lensed fiber is obtained by image processing, wherein the elliptical value of the spot = the maximum value of the length of the edge of the spot parallel to the X-axis (also the maximum value of the chord parallel to the X-axis; there is a lot of length between two points parallel to the X-axis on the edge of the spot in each orientation of the spot), the maximum value of the length of the edge of the spot parallel to the Y-axis (also the maximum value of the chord parallel to the Y-axis; there is a lot of length between two points parallel to the Y-axis on the edge of the spot in each orientation of the spot), the horizontal line of the cross on the detection plane is taken as the X-axis, the vertical line of the cross on the detection plane is taken as the Y-axis, and the X-axis, Y-axis and Z-axis are the three coordinate axes of the cartesian coordinate system.
The initial orientation of the spot emitted from the lens end is random, and the rotation of the lens end 71 in step 2) can align the orientation of the spot, and adjust the major axis and the minor axis of the optical shift to be parallel to the X axis and the Y axis, respectively. And (3) injection: for the "ellipticity value" of the spot, the "ellipticity value" is displayed as "ellipticity" in the system of many existing beam quality analyzers 41, and thus, the "ellipticity value" can be obtained directly from the value of "ellipticity" displayed by the system.
3) The current position of the lensed end 71 of the lensed fiber is noted as the first position;
allowing the lens end 71 of the lensed fiber to move in a straight line parallel to the X-axis and in a straight line parallel to the Y-axis such that the center of the spot coincides with the center of the reticle on the detection surface 411;
4) The lens end 71 of the lensed fiber is moved along the Z axis by a set distance D, the new position of the lens end 71 of the lensed fiber after being moved along the Z axis by the set distance D is recorded as a second position, and the lens end 71 of the lensed fiber is rotated by an angle theta around a straight line parallel to the X axis X And angle of rotation about a line parallel to the Y-axisθ Y The center of the spot is overlapped with the center of the reticle again, and at this time, the central axis of the laser beam output from the lens end 71 is parallel to the Z axis, and θ is set X And theta Y The directions of the fast axis and the slow axis (the fast axis and the slow axis described in the present invention, which are selected to be parallel to the X axis (parallel to the short axis of the spot) and the Y axis (parallel to the long axis of the spot) of the outgoing laser beam at the lens end 71 are respectively referred to as the slow axis directions.
Further, the method also comprises the following steps:
5) Selecting a divergence angle measurement mode (FWHM mode) on the beam quality analyzer 41, wherein the selected divergence angle measurement mode is to take an angle corresponding to the light beam at the half-width peak intensity as a divergence angle;
6) In step 3), after the center of the spot coincides with the center of the reticle on the detection surface 411, the coordinates (X 'of the position of the peak intensity of the light beam displayed on the light beam mass analyzer 41 at this time are recorded' 1 ，Y’ 1 )；
In step 4), after the center of the spot coincides again with the center of the reticle on the detection surface 411, the coordinates (X 'of the position of the peak intensity of the light beam displayed on the light beam mass analyzer 41 at this time are recorded' 2 ，Y’ 2 )；
(X’ 1 ，Y’ 1 ) And (X' 2 ，Y’ 2 ) The existing beam quality analysis 41 can do this for the coordinates of the beam peak intensity location displayed by the system of beam quality analysis 41.
7) Obtain the divergence angle alpha of the slow axis direction:
a divergence angle beta of the fast axis direction is obtained:
further, the two CCD microscopes are respectively a first CCD microscope 33 and a second CCD microscope 51, the center line of the lens of the first CCD microscope 33 and the center line of the lens of the second CCD microscope 51 are respectively parallel to the Y-axis and the X-axis, the Y-axis and the Z-axis are three coordinate axes of a cartesian coordinate system;
any two center lines among the three center lines of the center line of the lens end 71, the center line of the lens of the first CCD microscope, and the center line of the lens of the second CCD microscope are coplanar.
Further, in step 1), the lens end 71 of the lensed fiber is held by the optical fiber rotation jig 22 such that after the lens end 71 is initially held by the optical fiber rotation jig 22, the center line of the lens end 71 is parallel to the Z axis and the center line of the lens end 71 is coaxial with the rotation center line of the optical fiber rotation jig 22. The rotation center line of the optical fiber rotation jig 22 is also the rotation center line of the lens end 71 itself, and is parallel to the Z axis.
Further, the lens end 71 rotates around the center line of the lens end in a stepping mode to minimize the elliptical value of the light spot;
and/or the number of the groups of groups,
the lens end 71 of the lensed fiber is moved in a stepwise fashion along a line parallel to the X-axis and along a line parallel to the Y-axis.
And/or the number of the groups of groups,
the lens end 71 of the lensed fiber is rotated by an angle θ about a line parallel to the X-axis in a stepwise manner X And a linear rotation angle θ about a line parallel to the Y-axis Y 。
The position of the light spot is adjusted by adopting a stepping mode, so that the position of the light spot is adjusted by using a fixed variable quantity, the off-axis degree and the divergence angle are accurately calculated, the posture adjustment step is saved, and meanwhile, the test is more accurate.
Further, the five-dimensional adjustment frame 21 is employed to move the lens end 71 of the lensed fiber along a straight line parallel to the X-axis, the Y-axis, and the Z-axis, and to rotate the lens end 71 of the lensed fiber by an angle θ about the straight line parallel to the X-axis X And a linear rotation angle θ about a line parallel to the Y-axis Y . The optical fiber rotation jig 22 may be mounted on the five-dimensional adjustment frame 21, with the rotation center line of the optical fiber rotation jig 22 parallel to the Z-axis.
According to another aspect of the present invention, there is also provided a parameter measurement apparatus for implementing a parameter measurement method of a lens end of a lensed fiber, comprising a mount, and a five-dimensional adjustment frame 21, a beam quality analyzer 41, a first CCD microscope 33, and a second CCD microscope 51 commonly mounted on the mount, wherein:
the five-dimensional adjusting frame 21 is provided with an optical fiber rotating clamp 22 for driving the optical fiber rotating clamp 22 to move along a straight line parallel to an X axis, a Y axis and a Z axis, rotate around the straight line parallel to the X axis and rotate around the straight line parallel to the Y axis, wherein the X axis, the Y axis and the Z axis are respectively a first CCD microscope and a second CCD microscope, the central line of a lens of the first CCD microscope and the central line of a lens of the second CCD microscope are respectively parallel to the Y axis and the Z axis, and the X axis, the Y axis and the Z axis are three coordinate axes of a Cartesian coordinate system; the five-dimensional adjusting frame 21 (five-dimensional adjusting frame) has an existing structure, and the five-dimensional adjusting frame has the function of realizing the adjustment of XYZ triaxial movement, pitch angle and deflection angle, and compared with a conventional six-dimensional adjusting frame, the five-dimensional adjusting frame has the function of canceling one degree of freedom of rotating around the Z axis. Referring to fig. 1, the x axis extends in the front-rear direction, the Y axis extends in the up-down direction, and the Z axis extends in the left-right direction.
The optical fiber rotating jig 22 is used for clamping the lens end 71 of the lensed optical fiber, so that when the lens end 71 is initially mounted on the optical fiber rotating jig 22, the center line of the lens end 71 is parallel to the Z axis and the center line of the lens end 71 is coaxial with the rotation center line of the optical fiber rotating jig 22, thereby facilitating the optical fiber rotating jig 22 to drive the lens end 71 of the lensed optical fiber to rotate around a straight line parallel to the Z axis. The optical fiber rotating jig 22 is provided with a mounting position for fixing the lens end 71 so that the initial mounting of the lens end satisfies the above-mentioned mounting conditions, and preferably, the optical fiber rotating jig 22 is provided with a V-shaped groove for catching the lens end 71 of the lensed optical fiber, which facilitates the fixing of the lens end 71 to the optical fiber rotating jig 22. The lens end 71 of the lensed fiber held by the fiber rotating jig 22 has a certain length, is linear, is initially held horizontally and parallel to the Z-axis by the fiber rotating jig 2, and at this time, the center line 72 of the laser beam output from the lens end 71 is inclined with respect to the Z-axis, and the angle of inclination with respect to the lens end 71 is referred to as the off-axis degree as shown in fig. 2, and can be obtained by measurement later.
The detection surface 411 of the detector of the beam quality analyzer 41 is perpendicular to the Z axis, so that the laser light emitted from the lens end 71 of the lens fiber forms a light spot on the detection surface 411 of the detector, that is, the detection surface 411 is parallel to the XY plane, and the light spot formed on the detection surface 411 is generally elliptical.
The center line of the lens of the first CCD microscope 33 is parallel to the Y-axis and the center line of the lens of the second CCD microscope 51 is parallel to the X-axis, so as to obtain a microscopic image of the lens end 71 of the lensed fiber.
Any two central lines among the central lines of the lens end 71, the central line of the lens of the first CCD microscope 33 and the central line of the lens of the second CCD microscope 51 are coplanar, so that microscopic imaging of the first CCD microscope 33 and the second CCD microscope 51 is facilitated, orthographic projection is obtained, and the geometric dimension of the lens end 71 is facilitated to be obtained through subsequent image processing.
Further, the mounting base includes a base plate 1, a first support base 31, a second support base 42, a third support base 53, a first lens barrel fixing frame 32 and a second lens barrel fixing frame 52, the first support base 31, the second support base 42 and the third support base 53 are mounted on the base plate 1, the first lens barrel fixing frame 32 and the second lens barrel fixing frame 52 are mounted on the first support base 31 and the third support base 53 respectively, the beam quality analyzer 41 is mounted on the second support base 42, the first CCD microscope 33 and the second CCD microscope 51 are mounted on the first lens barrel fixing frame 32 and the second lens barrel fixing frame 52 respectively, and the five-dimensional adjusting frame 21 is mounted on the base plate 1. With these structures described above, the beam quality analyzer 41, the first CCD microscope 33, the second CCD microscope 51, and the like can be easily installed.
Further, the mounting base further comprises an optical fiber tray 62 mounted on the bottom plate 1 and used for placing the tail fiber of the lens optical fiber, and a flange 61 is mounted on the optical fiber tray 62, so that the first optical fiber connector on the tail fiber and the second optical fiber connector on the jumper wire of the semiconductor laser are connected together. The pigtail is the non-lensed end of the lensed fiber, and the intermediate portion of the lensed fiber may be spun onto the fiber tray 62.
Further, the lateral distance between the optical fiber tray 62 and the optical fiber rotating jig 22 is 5cm to 10cm, so as to prevent the lens end 71 of the lens optical fiber from being squeezed to affect the measurement accuracy.
Further, a first motor is mounted on the optical fiber rotating clamp 22 for driving the lens end 71 of the lensed fiber to rotate around a straight line parallel to the Z axis, and the optical fiber rotating clamp 22 can be automatically rotated by the first motor. If the encoder is arranged on the first motor, the first motor is matched with the encoder, so that the rotation angle can be accurately controlled.
The five-dimensional adjusting frame 21 is provided with a plurality of second motors for driving the optical fiber rotating clamp 22 to move along a straight line parallel to the X axis, the Y axis and the Z axis, and each second motor is provided with an encoder for obtaining the moving stroke of the optical fiber rotating clamp 22, so that the moving stroke can be automatically and accurately obtained.
Furthermore:
the five-dimensional adjusting frame 21 is provided with a plurality of angle scales for obtaining angles of rotation of the optical fiber rotating jig 22 around a straight line parallel to the X axis and around a straight line parallel to the Y axis; the rotation angle can be obtained by observing the angle scale manually.
Alternatively, a plurality of third motors are mounted on the five-dimensional adjustment frame 21 for driving the optical fiber rotation jig 22 to rotate about a straight line parallel to the X axis and to rotate about a straight line parallel to the Y axis, and encoders are respectively mounted on each of the third motors for obtaining angles of rotation of the optical fiber rotation jig about a straight line parallel to the X axis and about a straight line parallel to the Y axis.
Specifically, the method for measuring the parameters of the lens end of the lensed fiber by adopting the parameter measuring device comprises the following steps:
1) The lens end 71 of the lensed fiber is held by the optical fiber rotating jig 22, the center line of the lens end 71 of the lensed fiber is parallel to the Z axis and the center line of the lens end 71 is coaxial with the rotation center line of the optical fiber rotating jig 22, and the lens end 71 of the lensed fiber is extended out of the optical fiber rotating jig 22, then the pigtail of the lensed fiber (the lensed fiber has two ends, one end is the lens end 71 and the other end is the pigtail) is connected with the semiconductor laser through the adapter, so that the lens end 71 of the lensed fiber emits laser light to the detection surface 411 of the detector of the beam quality analyzer 41 to form a light spot.
2) The optical fiber rotating clamp 22 drives the lens end 71 of the lens optical fiber to rotate, so that the elliptical value of the light spot on the light beam quality analyzer 41 also changes; the lens end 71 of the lensed fiber is adjusted to an orientation corresponding to the position at which the elliptical value of the spot is minimum by rotation of the optical fiber rotation jig 22, the position is the optimum position for rotation of the lens end, then the semiconductor laser is turned off, an image of the lens end 71 of the lensed fiber is obtained by the first CCD microscope 33 and the second CCD microscope 51, microscopic image information is uploaded to the image processing device by the first CCD microscope 33 and the second CCD microscope 51, and then the geometric dimension of the lens end 71 of the lensed fiber is obtained by image processing. Any two of the center lines of the center line of the lens end 71, the center line of the lens of the first CCD microscope 33 and the center line of the lens of the second CCD microscope 51 are coplanar, so that the observed lines can be reduced, and orthographic projection is formed, thereby facilitating image recognition and processing.
Through the steps 1) to 3), the lens end can be subjected to orthographic projection and image processing by utilizing a CCD microscope, and the appearance size of the lens end is obtained.
3) The current position of the lensed end 71 of the lensed fiber is noted as the first position;
the five-dimensional adjustment frame 21 is adjusted, and the lens end 71 of the lens optical fiber is moved in a straight line parallel to the X-axis and in a straight line parallel to the Y-axis, so that the center of the spot on the detection face 411 of the detector of the beam quality analyzer 41 coincides with the center of the reticle on the detection face 411 of the detector of the beam quality analyzer 41;
4) The five-dimensional adjustment frame 21 is adjusted so that the lens end 71 of the lensed fiber moves a set distance D along the Z axis, preferably in a direction away from the beam quality analyzer 41, and the new position of the lens end 71 of the lensed fiber after the set distance D along the Z axis is recorded as the second position; after the lens end 71 is moved to the second position, the center of the spot is offset from the center of the reticle, i.e. in the second position the center of the spot does not coincide with the center of the reticle.
The five-dimensional adjusting frame 21 is then adjusted to rotate the lens end 71 of the lensed fiber by an angle θ about a line parallel to the X-axis X And a linear rotation angle θ about a line parallel to the Y-axis Y The center of the spot is again overlapped with the center of the reticle, and after such adjustment, the center line 72 of the laser light output from the lens end 71 is parallel to the Z axis, and the center line of the lens end 71 is inclined with respect to the Z axis, see fig. 3.θ X And theta Y The directions of the fast axis and the slow axis (the fast axis and the slow axis described in the present invention, which are parallel to the X axis (parallel to the short axis of the spot) are selected as the slow axis directions, and the directions of the Y axis (parallel to the long axis of the spot) are selected as the fast axis directions, respectively, of the fast axis and the slow axis of the outgoing laser beam of the lensed fiber. The parameter can be directly fed back from the horizontal deflection and vertical pitching data of the five-dimensional adjusting frame 21, and the numerical accuracy is high.
5) Selecting a divergence angle measurement mode on the beam quality analyzer 41, wherein the selected divergence angle measurement mode is to take an angle corresponding to the position of the beam at the half-width peak intensity as a divergence angle (FWHM measurement mode);
6) In step 3), after the center of the spot coincides with the center of the reticle on the detection surface 411, the coordinates (X 'of the position of the peak intensity of the light beam displayed on the light beam mass analyzer 41 at this time are recorded' 1 ，Y’ 1 )；
In step 4), after the center of the spot coincides with the center of the reticle on the detection surface 411, the coordinates (X 'of the position of the peak intensity of the light beam displayed on the light beam mass analyzer 41 at this time are recorded' 2 ，Y’ 2 )；
The coordinates (X 'of the position of the peak intensity of the light beam' 1 ，Y’ 1 ) And coordinates (X' 2 ，Y’ 2 ) The index is displayed on the conventional beam quality analyzer 41 as a coordinate value in the system coordinate system of the beam quality analyzer 41.
7) A divergence angle α of the slow axis direction (direction parallel to the X axis) is obtained:
a divergence angle β of the fast axis direction (direction parallel to the X axis) is obtained:
the divergence angle is measured by a relative position calculation method, and the measurement result is more accurate than the conventional fixed-point test result.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.

Claims (10)

1. The method for measuring the parameters of the lens end of the lens optical fiber is characterized by comprising the following steps:
1) The central line of the lens end of the lens optical fiber is parallel to the Z axis, and the tail fiber of the lens optical fiber is connected with a laser, so that the lens end emits laser to the detection surface of the detector of the beam quality analyzer to form a light spot; wherein the Z axis is perpendicular to the detection surface of the detector;
2) The lens end rotates around the central line of the lens end to enable the ellipse value of a light spot to be minimum, then an image of the lens end is obtained through a CCD microscope, and then the geometric dimension of the lens end is obtained through image processing, wherein the ellipse value of the light spot = the maximum value of the length of the light spot parallel to an X axis/the maximum value of the length of the light spot parallel to a Y axis, a horizontal line of a cross line on a detection surface is taken as the X axis, a vertical line of the cross line on the detection surface is taken as the Y axis, and the X axis, the Y axis and the Z axis are three coordinate axes of a Cartesian coordinate system;
3) Moving the lens end along a straight line parallel to the X axis and along a straight line parallel to the Y axis so that the center of the light spot coincides with the center of the cross line on the detection surface;
4) The lens end is moved along the Z axis by a distance D, and the lens end is rotated around a straight line parallel to the X axis by an angle theta X And a linear rotation angle θ about a line parallel to the Y-axis Y The center of the light spot is overlapped with the center of the cross line on the detection surface again, and theta is calculated X And theta Y The fast axis off-axis degree and the slow axis off-axis degree of the emergent laser light of the lens end are respectively recorded, wherein the slow axis is parallel to the X axis, and the fast axis is parallel to the Y axis.
2. The method for measuring parameters of a lensed end of a lensed fiber of claim 1, further comprising the steps of:
5) Selecting a measuring mode of a divergence angle on a beam quality analyzer, wherein the selected measuring mode takes an angle corresponding to the position of the peak intensity of the half-width of the beam as the divergence angle;
6) In step 3), after the center of the spot coincides with the center of the reticle on the detection surface, the coordinates (X 'of the position of the peak intensity of the light beam displayed on the light beam quality analyzer at this time are recorded' 1 ，Y’ 1 )；
In step 4), after the center of the spot coincides again with the center of the reticle on the detection surface, the coordinates (X 'of the position of the peak intensity of the light beam displayed on the light beam mass analyzer at this time are recorded' 2 ，Y’ 2 )；
7) Obtain the divergence angle alpha of the slow axis direction:
a divergence angle beta of the fast axis direction is obtained:
3. the method for measuring parameters of a lens end of a lensed fiber according to claim 1, wherein the number of the CCD microscopes is two, namely a first CCD microscope and a second CCD microscope, the center line of the lens of the first CCD microscope and the center line of the lens of the second CCD microscope are parallel to the Y-axis and the X-axis, respectively, and the X-axis, the Y-axis and the Z-axis are three coordinate axes of a cartesian coordinate system;
any two central lines among the central lines of the lens end, the central line of the lens of the first CCD microscope and the central line of the lens of the second CCD microscope are coplanar.
4. The method of claim 1, wherein in step 1), the lens end of the lensed fiber is held by the optical fiber rotating jig, and after the lens end is initially held by the optical fiber rotating jig, the center line of the lens end is made parallel to the Z axis and the center line of the lens end is made coaxial with the rotation center line of the optical fiber rotating jig.
5. The method for measuring parameters of a lensed end of a lensed fiber of claim 1, wherein the step-wise rotation of the lensed end about its centerline minimizes the elliptical value of the spot;
and/or the number of the groups of groups,
the lens end of the lensed fiber is moved along a straight line parallel to the X axis and along a straight line parallel to the Y axis in a stepping manner;
and/or the number of the groups of groups,
the lens end of the lensed fiber is rotated by an angle theta about a line parallel to the X-axis in a stepwise manner X And a linear rotation angle θ about a line parallel to the Y-axis Y 。
6. The method for measuring parameters of a lensed end of a lensed fiber of claim 1, wherein a five-dimensional adjustment frame is used to move the lensed end of the lensed fiber along a line parallel to the X-axis, the Y-axis, and the Z-axis, and to rotate the lensed end of the lensed fiber by an angle θ about the line parallel to the X-axis X And a linear rotation angle θ about a line parallel to the Y-axis Y 。
7. The method of claim 1, wherein the beam quality analyzer is a slit beam quality analyzer and a germanium photodiode detector is used.
8. The method for measuring parameters of a lensed end of a lensed fiber of claim 1, wherein the laser is a semiconductor laser and the pigtail of the lensed fiber is connected to the laser by an adapter.
9. A parameter measurement apparatus for implementing the parameter measurement method of the lensed end of the lensed fiber according to any one of claims 1 to 8, characterized by comprising a mount, and a five-dimensional adjustment frame, a beam quality analyzer, a first CCD microscope, and a second CCD microscope mounted together on the mount, wherein:
the five-dimensional adjusting frame is provided with an optical fiber rotating clamp for driving the optical fiber rotating clamp to move along a straight line parallel to an X axis, a Y axis and a Z axis, rotate around the straight line parallel to the X axis and rotate around the straight line parallel to the Y axis;
the optical fiber rotating clamp is used for clamping the lens end of the lens optical fiber so as to enable the central line of the lens end to be parallel to the Z axis and enable the central line of the lens end to be coaxial with the rotating central line of the optical fiber rotating clamp in the initial stage, thereby facilitating the optical fiber rotating clamp to drive the lens end to rotate around a straight line parallel to the Z axis;
the detection surface of the detector of the beam quality analyzer is vertical to the Z axis, so that laser emitted from the lens end of the lens optical fiber forms a light spot on the detection surface of the detector;
the center line of the lens of the first CCD microscope is parallel to the Y axis, and the center line of the lens of the second CCD microscope is parallel to the X axis, so as to obtain microscopic images of the lens end of the lens optical fiber.
10. The parameter measurement device of claim 9, wherein the fiber rotation clamp is provided with a first motor for driving the lens end of the lensed fiber to rotate about a line parallel to the Z-axis;
a plurality of second motors are arranged on the five-dimensional adjusting frame and used for driving the optical fiber rotating clamp to move along a straight line parallel to an X axis, a Y axis and a Z axis, and each second motor is respectively provided with an encoder for obtaining the moving stroke of the optical fiber rotating clamp;
furthermore:
the five-dimensional adjusting frame is provided with a plurality of angle scales for obtaining angles of the optical fiber rotating clamp rotating around a straight line parallel to an X axis and rotating around a straight line parallel to a Y axis;
alternatively, a plurality of third motors are mounted on the five-dimensional adjustment frame for driving the optical fiber rotation jig to rotate around a straight line parallel to the X axis and around a straight line parallel to the Y axis, and encoders are respectively mounted on each of the third motors for obtaining angles of rotation of the optical fiber rotation jig around the straight line parallel to the X axis and around the straight line parallel to the Y axis.
CN202311588518.7A 2023-11-27 2023-11-27 Parameter measuring method and parameter measuring device for lens end of lens optical fiber Pending CN117387915A (en)

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