CN117377222A - Etching device for integrated circuit processing and operation method thereof - Google Patents

Abstract

The invention belongs to the technical field of etching processing of circuit boards, in particular to an etching device for integrated circuit processing and an operation method thereof; the device comprises an etching pool, wherein a feeding table and a discharging table are fixedly connected to two sides of the etching pool respectively, a mounting frame is fixedly connected to the top of the etching pool, limiting rods are fixedly connected to two sides of the bottom of the mounting frame respectively, the limiting rods are track-shaped, the limiting rods are in sliding connection with a fixing seat through limiting components, the limiting components are fixed on a first conveyor belt, the first conveyor belt is fixedly arranged at the bottom of the mounting frame, and a clamping tool is arranged on the fixing seat; according to the invention, the gear set is driven to rotate by the motor II, so that the transmission directions of the upper and lower conveying belts II are opposite, and further the cleaning assemblies on the two conveying belts II can reversely clean the surface of the etched circuit board, so that the residual etching liquid on the surface of the circuit board is prevented from being brought out of the etching tank, and the processing quality and performance of the subsequent circuit board are influenced.

Description

Etching device for integrated circuit processing and operation method thereof

Technical Field

The invention belongs to the technical field of etching processing of circuit boards, and particularly relates to an etching device for integrated circuit processing and an operation method thereof.

Background

Etching of integrated circuit boards is one of the most important processes in PCB fabrication, jian Shandian being the wet PCB etching process that controls corrosion. At present, a typical process for processing a printed circuit board adopts a pattern plating method; the method comprises the steps of pre-plating a lead-tin corrosion-resistant layer on a copper foil part needing to be reserved on the outer layer of the circuit board, namely a pattern part of a circuit, and then chemically corroding the rest copper foil, wherein the processing mode is called etching. The etching process can not only enable the surface of the circuit board to be smoother and pollution-free, but also improve the abrasion resistance and corrosion resistance of the circuit board, strengthen the stability of the circuit board and ensure the service life of the circuit board.

In the prior art, most of etching liquid used in wet etching is ferric trichloride solution, the etching liquid is acidic solution with corrosiveness, after the circuit board is immersed in the etching liquid to finish etching operation and taken out, water stains of the etching liquid generally remain on the surface of the circuit board, if the water stains cannot be cleaned timely, the quality and performance of the circuit board can be affected, corrosion damage can be caused to subsequent equipment, and the conventional etching device mostly needs workers to manually clean the surface of the circuit board after the etching of the circuit board is finished, so that on one hand, the probability of contact between the workers and the etching liquid is improved, potential safety hazards can occur, and on the other hand, the working strength is also increased.

To this end, the present invention provides an etching apparatus for integrated circuit processing and a method of operating the same.

Disclosure of Invention

In order to overcome the defects of the prior art, the etching solution used in wet etching is mostly ferric trichloride solution, the etching solution is acidic solution with corrosiveness, after the circuit board is immersed in the etching solution to finish etching operation and taken out, water stains of the etching solution generally remain on the surface of the circuit board, if the water stains cannot be cleaned timely, the quality and performance of the circuit board can be affected, corrosion damage can be caused to subsequent equipment, and the existing etching device mostly needs staff to manually clean the surface of the circuit board after the circuit board is etched.

The technical scheme for solving the technical problems is as follows: the invention discloses an etching device for integrated circuit processing, which comprises an etching tank, wherein two sides of the etching tank are fixedly connected with a feeding table and a discharging table respectively, the top of the etching tank is fixedly connected with a mounting frame, two sides of the bottom of the mounting frame are fixedly connected with limiting rods, the limiting rods are in a runway shape, the limiting rods are in sliding connection with a fixed seat through limiting components, the limiting components are fixed on a first conveyor belt, the first conveyor belt is fixedly arranged at the bottom of the mounting frame, a clamping tool is arranged on the fixed seat, a fixed plate is fixedly connected on the mounting frame on one side of the discharging table, the other end of the fixed plate is fixedly connected with a drying fixing frame, a second motor is fixedly arranged on the outer wall of the drying fixing frame, the output end of the second motor is fixedly connected with a gear set, the gear set is formed by mutually meshed four spur gears, two conveyor belts are symmetrically arranged on the inner sides of the drying fixing frame, the two conveyor belts are respectively in sliding connection with two spur gears on the outermost sides, a plurality of groups of wiping components are respectively arranged on the two conveyor belts, two guide rails are symmetrically fixedly connected on the inner walls of the drying fixing frame, and the two guide rails are in sliding connection with the wiping components.

Preferably, the wiping component comprises a sleeve, an elastic telescopic rod and cleaning cotton, a plurality of groups of sleeves are uniformly fixedly connected on the second conveyor belt, the elastic telescopic rod is connected to the sleeve in a sliding mode, the outer end of the elastic telescopic rod is fixedly connected with the cleaning cotton, a guide rod is fixedly connected to the side wall of the inner side end of the elastic telescopic rod, and the other end of the guide rod extends out of the sleeve and is in sliding connection with the guide rail.

Preferably, the spacing subassembly includes extension board, arc support, stopper and guide block, even sliding connection has the multiunit stopper on the gag lever post, the multiunit the equal rigid coupling in top of stopper has the guide block, and is equipped with the opening on the inside wall of stopper, the bottom rigid coupling of stopper has the extension board, the bilateral symmetry rigid coupling of extension board has slider one, even rigid coupling has multiunit arc support on the conveyer belt one, slider one and arc support sliding connection, the rigid coupling has spring one between the inner wall of slider one and arc support, the bottom and the top rigid coupling of fixing base of extension board, the bottom four sides of mounting bracket all are the cambered surface, the guide way has been seted up on the bottom cambered surface of mounting bracket, guide block and guide way sliding connection, guide way and gag lever post looks adaptation, and the guide way is located the part of feed table and ejection of compact platform by two symmetrical distribution's helicla flute and a transverse groove constitution, two the rotation angle of helicla flute is ninety degrees, and two helicla flute distributes at the both ends of transverse groove.

Preferably, the clamping tool comprises a motor I, a bidirectional threaded rod, a threaded connecting rod and a clamp, wherein the motor I is fixedly arranged on the outer wall of the fixed seat, the output end of the motor I is fixedly connected with the bidirectional threaded rod, the other end of the bidirectional threaded rod is rotationally connected with the inner wall of the fixed seat, the symmetrical threaded connection on the bidirectional threaded rod is provided with the threaded connecting rod, the bottom end of the threaded connecting rod extends to the lower side of the fixed seat and is fixedly connected with the clamp, the clamp is in a U-shaped frame shape, and wedge plates are fixedly connected on opposite sides of the two clamps.

Preferably, two one side of the second conveyor belt is provided with an arc cleaning plate, the arc cleaning plate is fixedly connected with the inner side wall of the drying fixing frame, a plurality of groups of extrusion blocks are uniformly fixedly connected on the inner wall of the arc cleaning plate, and toothed protrusions are arranged on the extrusion blocks.

Preferably, the bottom of the arc-shaped cleaning plate is fixedly connected with a waste liquid tank, the outer wall of the drying fixing frame is fixedly connected with a waste liquid tank, and the waste liquid tank is communicated with the waste liquid tank through a connecting pipe.

Preferably, the baffle is fixedly connected to the center of the bottom of the inner cavity of the etching tank, a plurality of groups of rebound assemblies are fixedly connected to the baffle, a plurality of groups of rotating rods are uniformly connected to the inner walls of the two sides of the etching tank in a rotating mode, a baffle is fixedly connected to the top of one end, close to the baffle, of each rotating rod, the baffle is matched with the clamp, the baffle is in sliding connection with the rebound assemblies, and an auger sheet is fixedly connected to the rotating rods.

Preferably, the rebound assembly comprises an arc plate and a second spring, a plurality of groups of arc plates are uniformly fixedly connected on the partition plate, a second slider is connected on the arc plate in a sliding mode, the second slider is fixedly connected with the baffle, and the second spring is fixedly connected between the second slider and the inner wall of the arc plate.

Preferably, a plurality of groups of pulp plates are uniformly fixedly connected on the rotating rod, and the pulp plates are distributed among the auger sheets and are not contacted with the auger sheets.

A method of operating an etching apparatus for integrated circuit processing, the method being suitable for use in an etching apparatus for integrated circuit processing as described above, the method comprising the steps of:

s1: placing an unetched circuit board on a feeding table, driving a fixed seat and a clamping tool to move to the feeding table by a limiting block which can enable a limiting rod to slide through a conveyor belt I to clamp the circuit board, and immersing the circuit board in etching liquid to finish etching after clamping the circuit board;

s2: in the etching process, the movable clamping tool drives the baffle to rotate, so that the rotating rod can drive the auger sheet and the slurry plate to rotate, stirring of etching liquid is completed, and etching effect is enhanced;

s3: during the ejection of compact, be equipped with two conveyer belts two and multiunit clearance cotton in the drying fixing frame and can clean the upper and lower surface of the circuit board of accomplishing the etching, avoid the residual of etching solution, the rethread ejection of compact platform conveys the circuit board after the etching out after accomplishing the clearance.

The beneficial effects of the invention are as follows:

1. according to the etching device for processing the integrated circuit and the operation method thereof, the gear sets are driven to rotate by the motor II, so that the transmission directions of the upper conveyor belt II and the lower conveyor belt II are opposite, further, the cleaning assemblies on the two conveyor belts II can reversely clean the surface of the etched circuit board, the residual etching liquid on the surface of the circuit board is prevented from being brought out of the etching tank, the influence on the processing quality and performance of the subsequent circuit board is avoided, the contact probability of staff and the etching liquid is reduced, and the complicated process of manually cleaning the circuit board by the staff is avoided.

2. According to the etching device for integrated circuit processing and the operation method thereof, the cleaning cotton can be extruded through the extrusion block, water stains in the cleaning cotton are discharged, the cleaning cotton is convenient to recycle, and the surfaces of the cleaning cotton can be scraped through the toothed protrusions arranged on the extrusion block, so that impurities are prevented from adhering to the surfaces of the cleaning cotton.

Drawings

The invention is further described below with reference to the accompanying drawings.

FIG. 1 is a perspective view of the present invention;

FIG. 2 is a partial schematic view of the mounting of the present invention;

FIG. 3 is an enlarged view of a portion of FIG. 2 at A;

FIG. 4 is a partial cross-sectional view of the mounting bracket of the present invention;

FIG. 5 is a schematic view of the fixing base and clamping fixture of the present invention;

FIG. 6 is a cross-sectional view of a mounting bracket of the present invention;

FIG. 7 is a perspective view of a dry mount of the present invention;

FIG. 8 is a schematic view showing the internal structure of the drying rack according to the present invention;

FIG. 9 is an enlarged view of a portion of FIG. 8 at B;

FIG. 10 is a side view of a wiping assembly of the present invention;

FIG. 11 is an exploded view of the wiper assembly and guide rail of the present invention;

FIG. 12 is an exploded view of the rebound assembly and the rotary lever of the present invention;

FIG. 13 is a flow chart of a method of operation of the present invention;

in the figure: 1. an etching pool; 2. a partition plate; 3. a feed table; 4. a discharging table; 5. a mounting frame; 6. a first conveyor belt; 7. a fixing seat; 8. a support plate; 9. an arc-shaped bracket; 10. a first sliding block; 11. a first spring; 12. a limiting block; 13. a guide block; 14. a limit rod; 15. a guide groove; 16. a first motor; 17. a two-way threaded rod; 18. a threaded connecting rod; 19. a clamp; 20. an arc-shaped plate; 21. a second spring; 22. a rotating lever; 23. a baffle; 24. a second slide block; 25. auger sheets; 26. a pulp board; 27. drying the fixing frame; 28. a fixing plate; 29. a second motor; 30. a gear set; 31. a second conveyor belt; 32. a sleeve; 33. an elastic telescopic rod; 34. cleaning cotton; 35. a guide rod; 36. a guide rail; 37. an arc-shaped cleaning plate; 38. a waste liquid tank; 39. extruding a block; 40. tooth-like projections; 41. a waste liquid tank.

Detailed Description

The invention is further described in connection with the following detailed description in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the invention easy to understand.

As shown in fig. 1-12, the etching device for integrated circuit processing according to the embodiment of the invention comprises an etching tank 1, wherein two sides of the etching tank 1 are fixedly connected with a feeding table 3 and a discharging table 4 respectively, the top of the etching tank 1 is fixedly connected with a mounting frame 5, two sides of the bottom of the mounting frame 5 are fixedly connected with a limiting rod 14, the limiting rod 14 is in a runway shape, the limiting rod 14 is in sliding connection with a fixed seat 7 through a limiting component, the limiting component is fixed on a first conveyor belt 6, the first conveyor belt 6 is fixedly arranged at the bottom of the mounting frame 5, a clamping tool is arranged on the fixed seat 7, a fixed plate 28 is fixedly connected on the mounting frame 5 at one side of the discharging table 4, the other end of the fixed plate 28 is fixedly connected with a drying fixed frame 27, a motor two 29 is fixedly arranged on the outer wall of the drying fixed frame 27, the output end of the motor two 29 is fixedly connected with a gear set 30, the gear set 30 is mutually meshed by four spur gears, two conveyor belts two 31 are symmetrically arranged on the inner sides of the drying fixed frame 27, two wiping components are symmetrically arranged on the two inner sides of the two conveyor belts 31 respectively, and are fixedly connected with a plurality of groups of guide rails 36 respectively arranged on the two driving components which are symmetrically arranged on the two guide rails 36; during operation, the unetched circuit board is conveyed through the feeding table 3, the fixing seat 7 and the clamp 19 tool can be driven to convey among the feeding table 3, the etching pool 1 and the discharging table 4 through the first conveyer belt 6 matched with the limit rod 14, the circuit board on the feeding table 3 can be clamped and fixed through the clamp 19 tool, the circuit board is loosened when the clamp 19 tool is driven to the discharging table 4, the etched circuit board is led out through the discharging table 4, when the clamp 19 tool drives the circuit board to move to the drying fixing frame 27 after driving a large half circle in the etching pool 1, the gear set 30 is driven to rotate through the second motor 29, the driving directions of the upper conveyer belt 31 and the lower conveyer belt 31 are opposite, further cleaning components on the two conveyer belts 31 can reversely clean the surface of the etched circuit board, residual etching liquid on the surface of the circuit board is prevented from being taken out of the etching pool 1, the influence on the processing quality and performance of the subsequent circuit board is avoided, the contact probability of workers and the etching liquid is reduced, and the tedious process of manually cleaning the circuit board by workers is avoided.

The wiping component comprises a sleeve 32, an elastic telescopic rod 33 and cleaning cotton 34, wherein a plurality of groups of sleeves 32 are uniformly and fixedly connected to the second conveyor belt 31, the elastic telescopic rod 33 is connected to the sleeve 32 in a sliding manner, the outer end of the elastic telescopic rod 33 is fixedly connected with the cleaning cotton 34, a guide rod 35 is fixedly connected to the side wall of the inner side end of the elastic telescopic rod 33, and the other end of the guide rod 35 extends out of the sleeve 32 and is in sliding connection with a guide rail 36; during operation, through the sliding fit between the guide rod 35 and the guide rail 36, when the circuit board moves into the drying fixing frame 27, the elastic telescopic rod 33 drives the cleaning cotton 34 to slide out of the sleeve 32 and attach to the surface of the circuit board, and cleaning of the etching liquid water stains on the upper surface and the lower surface of the circuit board is completed.

The limiting assembly comprises a support plate 8, an arc-shaped support 9, limiting blocks 12 and guide blocks 13, wherein a plurality of groups of limiting blocks 12 are uniformly and slidably connected on a limiting rod 14, the top ends of a plurality of groups of limiting blocks 12 are fixedly connected with the guide blocks 13, openings are formed in the inner side walls of the limiting blocks 12, the support plate 8 is fixedly connected with the bottom end of the limiting block 12, two sides of the support plate 8 are symmetrically and fixedly connected with a first sliding block 10, a plurality of groups of arc-shaped supports 9 are uniformly and fixedly connected on a first conveying belt 6, the first sliding block 10 is slidably connected with the arc-shaped supports 9, a first spring 11 is fixedly connected between the first sliding block 10 and the inner wall of the arc-shaped supports 9, the bottom end of the support plate 8 is fixedly connected with the top end of a fixed seat 7, four sides of the bottom of the mounting frame 5 are cambered surfaces, guide grooves 15 are formed in the bottom cambered surfaces of the mounting frame 5, the guide blocks 13 are slidably connected with the guide grooves 15 are matched with the limiting rod 14, the guide grooves 15 are positioned on the two sides of a feeding table 3 and a discharging table 4, the parts of the feeding table 4 are composed of two symmetrically distributed spiral grooves and one transverse groove, the two spiral grooves are distributed at the two transverse grooves, and the two spiral angles are distributed at the two transverse grooves are mutually opposite transverse directions; when the feeding device is in operation, when the limiting block 12 slides to a position corresponding to the feeding table 3 under the drive of the first conveyor belt 6, the guide block 13 slides into the transverse groove through a section of spiral groove, in the process, because the rotation angle of the spiral groove is ninety degrees and the rotation center is on the limiting rod 14, the limiting block 12 rotates ninety degrees around the limiting rod 14, further, the support plate 8 drives the fixing seat 7 and the clamping fixture to rotate ninety degrees, the vertical state is converted into the horizontal state, the clamping fixture is convenient to fix the circuit board on the feeding table 3, after the clamping fixture is used for taking the circuit board out of the feeding table 3, the guide block 13 slides into the spiral groove from the transverse groove and finally slides out, in the process, the limiting block 12 rotates ninety degrees around the limiting rod 14 again, the fixing seat 7 and the clamping fixture are converted into the vertical state from the horizontal state, the circuit board is convenient to finish etching in the etching liquid, the discharging mode is the same as the feeding, and the drying fixture 27 is arranged on a path through which the fixing seat 7 and the clamping fixture can horizontally slide in the discharging process.

The clamping tool comprises a motor I16, a bidirectional threaded rod 17, a threaded connecting rod 18 and a clamp 19, wherein the motor I16 is fixedly arranged on the outer wall of the fixed seat 7, the output end of the motor I16 is fixedly connected with the bidirectional threaded rod 17, the other end of the bidirectional threaded rod 17 is rotationally connected with the inner wall of the fixed seat 7, the threaded connecting rod 18 is symmetrically connected with threads on the bidirectional threaded rod 17, the bottom end of the threaded connecting rod 18 extends to the lower side of the fixed seat 7 and is fixedly connected with the clamp 19, the clamp 19 is in a U-shaped frame shape, and wedge plates are fixedly connected on opposite sides of the two clamps 19; when the fixed seat 7 moves to the upper part of the feeding table 3, the motor one 16 rotates positively to drive the bidirectional threaded rod 17 to rotate, so that the two threaded connecting rods 18 drive the two clamps 19 to slide relatively to clamp and fix the circuit board on the feeding table 3, and when the fixed seat 7 moves to the upper part of the discharging table 4, the motor one 16 rotates reversely, the two clamps 19 move reversely to release the fixation of the circuit board, and the etched circuit board is led out through the discharging table 4.

An arc cleaning plate 37 is arranged on one side of each of the two conveyor belts 31, the arc cleaning plates 37 are fixedly connected with the inner side walls of the drying fixing frames 27, a plurality of groups of extrusion blocks 39 are uniformly and fixedly connected on the inner walls of the arc cleaning plates 37, and tooth-shaped protrusions 40 are arranged on the extrusion blocks 39; during operation, through setting up an arc clearance board 37 in the one side of the top conveyer belt two 31 of keeping away from ejection of compact platform 4 to and set up another arc clearance board 37 in the one side of the below conveyer belt two 31 that is close to ejection of compact platform 4, make clearance cotton 34 after accomplishing the wiping to the circuit board when passing through arc clearance board 37, extrusion piece 39 can extrude clearance cotton 34, discharge the water stain in the clearance cotton 34, can scrape the surface of clearance cotton 34 through the dentate bulge 40 that is equipped with on the extrusion piece 39, avoid the surface adhesion of clearance cotton 34 to have the impurity.

The bottom of the arc-shaped cleaning plate 37 is fixedly connected with a waste liquid tank 38, the outer wall of the drying fixing frame 27 is fixedly connected with a waste liquid tank 41, and the waste liquid tank 38 is communicated with the waste liquid tank 41 through a connecting pipe; during operation, through being equipped with waste liquid groove 38 in the bottom of arc clearance board 37 for the water stain that clearance cotton 34 extruded can follow inflow waste liquid groove 38 in, reentrant waste liquid case 41, make things convenient for the staff to carry out centralized processing, through the shape design to guide rail 36, make clearance cotton 34 can not take place to touch when waste liquid groove 38, pop out again with arc clearance board 37 laminating after the waste liquid groove 38 is slided to clearance cotton 34, accomplish the extrusion of follow-up extrusion piece 39 to clearance cotton 34, effectually avoided clearance cotton 34 to take place to contact with other objects before contact extrusion piece 39 and lead to the water stain to be extruded, and then cause the unable condition of retrieving by waste liquid groove 38 of water stain.

The center of the bottom of the inner cavity of the etching pool 1 is fixedly connected with a baffle plate 2, a plurality of groups of rebound assemblies are fixedly connected on the baffle plate 2, a plurality of groups of rotating rods 22 are uniformly and rotatably connected on the inner walls of the two sides of the etching pool 1, a baffle plate 23 is fixedly connected to the top of one end of each rotating rod 22, which is close to the baffle plate 2, the baffle plate 23 is matched with a clamp 19, the baffle plate 23 is in sliding connection with the rebound assemblies, and an auger sheet 25 is fixedly connected on each rotating rod 22; during operation, when anchor clamps 19 can drive baffle 23 rotation when baffle 23 for dwang 22 rotates along with it, and then makes auger piece 25 on the dwang 22 rotatory, and after anchor clamps 19 breaks away from with baffle 23, under the effect of resilience subassembly, dwang 22 drives auger piece 25 gyration, so reciprocatingly, realize carrying out axial reciprocal stirring to the etching solution in etching pond 1 along dwang 22, not only strengthened the mobility of etching solution, promote the etching effect of etching solution to the circuit board, avoid the etching solution to stand for a long time in addition and appear depositing, can avoid the etching solution of etching pond 1 both sides to appear convection current when flowing through baffle 2, influence stirring effect.

The rebound assembly comprises an arc plate 20 and a second spring 21, wherein a plurality of groups of arc plates 20 are uniformly and fixedly connected on the partition plate 2, a second slide block 24 is connected on the arc plates 20 in a sliding manner, the second slide block 24 is fixedly connected with a baffle plate 23, and the second spring 21 is fixedly connected between the second slide block 24 and the inner wall of the arc plate 20; when the baffle 23 drives the second slider 24 to slide in the arc-shaped plate 20, the second spring 21 is extruded, and when the baffle 23 is separated from the clamp 19, the second slider 24 returns to the original position under the action of the compressed second spring 21, so that the rotating rod 22 rotates.

A plurality of groups of pulp plates 26 are uniformly and fixedly connected on the rotating rod 22, and the pulp plates 26 are distributed among the auger sheets 25 and are not contacted with the auger sheets 25; in operation, the stirring effect of the etching liquid during the rotation of the rotating rod 22 can be further enhanced by the slurry plate 26 arranged on the rotating rod 22, so that the etching liquid can flow in a direction perpendicular to the rotating rod 22.

As shown in fig. 13, a method of operating an etching apparatus for integrated circuit processing, the method of operating being applicable to the etching apparatus for integrated circuit processing described above, the method of operating comprising the steps of:

s1: the unetched circuit board is placed on the feeding table 3, a limiting block 12 which can enable a limiting rod 14 to slide is arranged on a first conveyor belt 6 to drive a fixing seat 7 and a clamping tool to move to the feeding table 3 to clamp the circuit board, and the circuit board is immersed into etching liquid to finish etching after being clamped;

s2: in the etching process, the baffle plate 23 is driven to rotate through the movable clamping tool, so that the rotating rod 22 can drive the auger sheet 25 and the slurry plate 26 to rotate, stirring of etching liquid is completed, and etching effect is enhanced;

s3: during discharging, the upper surface and the lower surface of the etched circuit board can be cleaned by the two conveyor belts II 31 and the plurality of groups of cleaning cotton 34 arranged in the drying fixing frame 27, so that the residual etching liquid is avoided, and the etched circuit board is conveyed and guided out through the discharging table 4 after cleaning.

According to the working principle, an unetched circuit board is conveyed by a feeding table 3, a fixing seat 7 and a clamp 19 tool can be driven to convey among the feeding table 3, an etching tank 1 and a discharging table 4 by a first conveyer belt 6 matched with a limit rod 14, the circuit board on the feeding table 3 can be clamped and fixed by the clamp 19 tool, the circuit board is loosened when the clamp 19 tool is driven to the discharging table 4, the etched circuit board is led out by the discharging table 4, when the clamp 19 tool drives the circuit board to move to a drying fixing frame 27 after driving a majority of circles in the etching tank 1, a gear set 30 is driven to rotate by a second motor 29, the driving directions of an upper conveyer belt 31 and a lower conveyer belt 31 are opposite, cleaning components on the two conveyer belts 31 can reversely clean the surface of the etched circuit board, and etching liquid remained on the surface of the circuit board is prevented from being carried out of the etching tank 1, the processing quality and performance of the subsequent circuit board are affected, the contact probability of staff and etching liquid is reduced, the complicated process of manually cleaning the circuit board by the staff is avoided, through the sliding fit between the guide rod 35 and the guide rail 36, when the circuit board moves into the drying fixing frame 27, the elastic telescopic rod 33 drives the cleaning cotton 34 to slide out of the sleeve 32 and be attached to the surface of the circuit board, the cleaning of the etching liquid water stains on the upper surface and the lower surface of the circuit board is completed, when the limiting block 12 slides to the position corresponding to the feeding table 3 under the driving of the first conveyor belt 6, the guide block 13 slides into the transverse groove through a section of spiral groove, in the process, because the rotation angle of the spiral groove is ninety degrees, and the rotation center is on the limiting rod 14, the limiting block 12 rotates ninety degrees around the limiting rod 14, and the supporting plate 8 drives the fixing seat 7 and the clamping tool to rotate ninety degrees, the vertical state is converted into the horizontal state, the clamping fixture is convenient to fix the circuit board on the feeding table 3, after the clamping fixture is used for taking the circuit board and sliding out of the feeding table 3, the guide block 13 slides into the spiral groove from the transverse groove and finally slides out, in the process, the limiting block 12 rotates ninety degrees around the limiting rod 14 again, the fixing seat 7 and the clamping fixture are converted into the vertical state from the horizontal state, the circuit board is convenient to be immersed into etching liquid to finish etching, the discharging mode is the same as feeding, the drying fixing frame 27 is arranged on a path of the fixing seat 7 and the clamping fixture which can horizontally slide in the discharging process, when the fixing seat 7 moves to the upper part of the feeding table 3, the motor one 16 positively rotates to drive the bidirectional threaded rod 17 to rotate, the two threaded connecting rods 18 drive the two clamps 19 to relatively slide to clamp and fix the circuit board on the feeding table 3, when the fixing seat 7 moves to the upper part of the discharging table 4, the motor I16 is reversed, the two clamps 19 are moved reversely to release the fixation of the circuit board, the etched circuit board is led out through the discharging table 4, one arc cleaning plate 37 is arranged on one side of the upper conveying belt II 31 far away from the discharging table 4, the other arc cleaning plate 37 is arranged on one side of the lower conveying belt II 31 close to the discharging table 4, when the cleaning cotton 34 passes through the arc cleaning plate 37 after the circuit board is wiped, the cleaning cotton 34 can be extruded by the extrusion block 39, the water stain in the cleaning cotton 34 is discharged, the surface of the cleaning cotton 34 can be scraped through the toothed protrusions 40 arranged on the extrusion block 39, the impurities are prevented from adhering to the surface of the cleaning cotton 34, the waste liquid tank 38 is arranged at the bottom of the arc cleaning plate 37, the water stain extruded by the cleaning cotton 34 can flow into the waste liquid tank 38, and then in the waste liquid box 41, make things convenient for the staff to carry out centralized processing, through the shape design to guide rail 36, make clean cotton 34 can not take place to touch when passing through waste liquid groove 38, clean cotton 34 pops out again and the laminating of arc clearance board 37 after the waste liquid groove 38 is slided, accomplish the extrusion of follow-up extrusion piece 39 to clean cotton 34, the effectual clean cotton 34 that has avoided takes place to contact with other objects before contact extrusion piece 39 and has led to the water stain to be extruded, and then cause the condition that the water stain can't be retrieved by waste liquid groove 38, can drive baffle 23 rotation when anchor clamps 19 are through baffle 23, make dwang 22 rotate along with it, and then make the auger piece 25 on the dwang 22 rotate, after anchor clamps 19 breaks away from with baffle 23, under rebound assembly's effect, dwang 22 drives auger piece 25 gyration, so reciprocatingly, realize carrying out the reciprocal stirring of axial to the etching solution in etching bath 1 along dwang 22, the etching effect of etching solution to the circuit board has not only been strengthened, moreover, avoid the etching solution to keep still to appear settling for a long time, can flow when etching solution flows in both sides of etching solution through baffle 2.

The front, rear, left, right, up and down are all based on fig. 1 in the drawings of the specification, the face of the device facing the observer is defined as front, the left side of the observer is defined as left, and so on, according to the viewing angle of the person.

In the description of the present invention, it should be understood that the terms "center," "longitudinal," "lateral," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the scope of the present invention.

The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (10)

1. An etching device for integrated circuit processing, characterized in that: the device comprises an etching pool (1), a feeding table (3) and a discharging table (4) are fixedly connected to two sides of the etching pool (1) respectively, a mounting frame (5) is fixedly connected to the top of the etching pool (1), a limiting rod (14) is fixedly connected to two sides of the bottom of the mounting frame (5), the limiting rod (14) is in a runway shape, the limiting rod (14) is in sliding connection with a fixing seat (7) through a limiting component, the limiting component is fixed to a first conveyor belt (6), the first conveyor belt (6) is fixedly arranged at the bottom of the mounting frame (5), a clamping tool is arranged on the fixing seat (7), a fixing plate (28) is fixedly connected to the mounting frame (5) on one side of the discharging table (4), a second motor (29) is fixedly arranged on the outer wall of the drying fixing frame (27), the output end of the second motor (29) is fixedly connected with a gear set (30), the gear set (30) is formed by meshing four straight gears, two symmetrical upper and lower conveyor belts (31) of the inner side (27) are respectively provided with two groups of two conveyor belts (31), two guide rails (36) are symmetrically and fixedly connected to the inner wall of the drying fixing frame (27), and the wiping component is in sliding connection with the guide rails (36).

2. An etching apparatus for integrated circuit processing as recited in claim 1, wherein: the cleaning assembly comprises a sleeve (32), an elastic telescopic rod (33) and cleaning cotton (34), wherein a plurality of groups of sleeves (32) are uniformly fixedly connected to the second conveying belt (31), the elastic telescopic rod (33) is connected to the sleeve (32) in a sliding mode, the outer end of the elastic telescopic rod (33) is fixedly connected with the cleaning cotton (34), a guide rod (35) is fixedly connected to the side wall of the inner side end of the elastic telescopic rod (33), and the other end of the guide rod (35) extends to the outside of the sleeve (32) to be in sliding connection with a guide rail (36).

3. An etching apparatus for integrated circuit processing according to claim 2, wherein: the limiting component comprises a support plate (8), an arc-shaped support (9), limiting blocks (12) and guide blocks (13), wherein a plurality of groups of limiting blocks (12) are uniformly and slidably connected on a limiting rod (14), the top ends of the limiting blocks (12) are fixedly connected with the guide blocks (13), openings are formed in the inner side walls of the limiting blocks (12), the bottom ends of the limiting blocks (12) are fixedly connected with the support plate (8), two sides of the support plate (8) are symmetrically fixedly connected with a first sliding block (10), a plurality of groups of arc-shaped support (9) are uniformly and fixedly connected on a conveyor belt (6), the first sliding block (10) is in sliding connection with the arc-shaped support (9), a first spring (11) is fixedly connected between the first sliding block (10) and the inner wall of the arc-shaped support (9), the bottom ends of the support plate (8) are fixedly connected with the top ends of a fixed seat (7), four sides of the bottom cambered surfaces of the mounting frame (5), guide grooves (15) are formed in the bottom cambered surfaces of the mounting frame (5), the guide blocks (13) are slidably connected with the guide grooves (15), the guide grooves (15) are in sliding connection with the guide grooves (15), the two spiral grooves (15) and the two spiral grooves (15) are positioned on the bottom surfaces of the bottom surface of the mounting frame (5), and the bottom surface of the mounting frame, the spiral table (4), and the spiral grooves (15) and the spiral feeding station, and two spiral grooves are distributed at two ends of the transverse groove.

4. An etching apparatus for integrated circuit processing according to claim 3, wherein: the clamping tool comprises a motor I (16), a bidirectional threaded rod (17), a threaded connecting rod (18) and a clamp (19), wherein the motor I (16) is fixedly installed on the outer wall of the fixed seat (7), the output end of the motor I (16) is fixedly connected with the bidirectional threaded rod (17), the other end of the bidirectional threaded rod (17) is rotationally connected with the inner wall of the fixed seat (7), the threaded connecting rod (18) is symmetrically connected with threads on the bidirectional threaded rod (17), the bottom end of the threaded connecting rod (18) extends to the lower portion of the fixed seat (7) and is fixedly connected with the clamp (19), the clamp (19) is in a U-shaped frame shape, and wedge plates are fixedly connected on opposite sides of the two clamps (19).

5. The etching apparatus for integrated circuit processing according to claim 4, wherein: one side of the two conveying belts II (31) is provided with an arc cleaning plate (37), the arc cleaning plate (37) is fixedly connected with the inner side wall of the drying fixing frame (27), a plurality of groups of extrusion blocks (39) are uniformly fixedly connected on the inner wall of the arc cleaning plate (37), and tooth-shaped protrusions (40) are arranged on the extrusion blocks (39).

6. An etching apparatus for integrated circuit processing as recited in claim 5, wherein: the bottom of the arc cleaning plate (37) is fixedly connected with a waste liquid tank (38), the outer wall of the drying fixing frame (27) is fixedly connected with a waste liquid tank (41), and the waste liquid tank (38) is communicated with the waste liquid tank (41) through a connecting pipe.

7. The etching apparatus for integrated circuit processing according to claim 6, wherein: the inner chamber bottom center department rigid coupling of etching pond (1) has baffle (2), the rigid coupling has multiunit rebound subassembly on baffle (2), even rotation is connected with multiunit dwang (22) on the both sides inner wall of etching pond (1), the one end top rigid coupling that dwang (22) is close to baffle (2) has baffle (23), baffle (23) and anchor clamps (19) looks adaptation, baffle (23) and rebound subassembly sliding connection, the rigid coupling has auger piece (25) on dwang (22).

8. The etching apparatus for integrated circuit processing according to claim 7, wherein: the rebound assembly comprises an arc plate (20) and a second spring (21), wherein a plurality of groups of arc plates (20) are uniformly fixedly connected to the partition plate (2), a second slider (24) is connected to the arc plate (20) in a sliding mode, the second slider (24) is fixedly connected with the baffle plate (23), and the second spring (21) is fixedly connected between the second slider (24) and the inner wall of the arc plate (20).

9. The etching apparatus for integrated circuit processing according to claim 8, wherein: a plurality of groups of pulp plates (26) are uniformly fixedly connected to the rotating rod (22), and the pulp plates (26) are distributed between the auger sheets (25) and are not contacted with the auger sheets (25).

10. A method of operating an etching apparatus for integrated circuit processing, comprising: the operation method is applicable to an etching apparatus for integrated circuit processing as claimed in any one of claims 1 to 9, and comprises the steps of:

s1: the unetched circuit board is placed on a feeding table (3), a limiting block (12) which can enable a limiting rod (14) to slide through a first conveyor belt (6) drives a fixing seat (7) and a clamping tool to move to the feeding table (3) to clamp the circuit board, and the circuit board is immersed into etching liquid to finish etching after being clamped;

s2: in the etching process, the baffle (23) is driven to rotate through the movable clamping tool, so that the rotating rod (22) can drive the auger sheet (25) and the slurry plate (26) to rotate, stirring of etching liquid is completed, and etching effect is enhanced;

s3: during discharging, the upper surface and the lower surface of the etched circuit board can be cleaned by the aid of the two conveyor belts (31) and the plurality of groups of cleaning cotton (34) arranged in the drying fixing frame (27), residues of etching liquid are avoided, and the etched circuit board is conveyed and guided out through the discharging table (4) after cleaning.