CN117373976B - Stroke limiting unlocking device for wafer box transport vehicle - Google Patents
Stroke limiting unlocking device for wafer box transport vehicle Download PDFInfo
- Publication number
- CN117373976B CN117373976B CN202311669792.7A CN202311669792A CN117373976B CN 117373976 B CN117373976 B CN 117373976B CN 202311669792 A CN202311669792 A CN 202311669792A CN 117373976 B CN117373976 B CN 117373976B
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- guide post
- unlocking device
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- 230000006835 compression Effects 0.000 claims description 11
- 238000007906 compression Methods 0.000 claims description 11
- 230000001681 protective effect Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 23
- 210000001503 joint Anatomy 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Handcart (AREA)
Abstract
The invention discloses a travel limit unlocking device for a wafer box transport vehicle, and relates to the technical field of semiconductor processing. The device comprises: the vertical plate, vertical plate front surface upper end is provided with the upper cover plate, the upper cover plate upper surface is connected with the button guide post, button guide post upper end is connected with the button, and the button lower extreme is connected with the telescopic link, and the spliced pole side passes through first coupling of higher screw at the fly leaf side, is provided with the keysets in the middle of the fly leaf, riser front surface lower extreme right side is connected with the slider keysets, slider keysets right-hand member is connected with the slider, slider internal connection has linear guide, linear guide front end is connected with end cover one, the linear guide rear end is connected with end cover two, be connected with spacing keysets between end cover one and the end cover two, spacing keysets upper surface rear end is connected with stopper one, and spacing keysets upper surface front end is connected with stopper two. The device has simple structure, small occupied space and adjustable limiting stroke.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to a travel limiting unlocking device for a wafer box transport vehicle.
Background
At present, in the field of semiconductor processing, the production of wafers needs to be processed at different work stations, and in the transportation process of each work station, the wafers need to be placed in the wafer boxes, and the wafer box transport vehicle is a common wafer box transport device. The wafer box is usually placed on a wafer loader, a wafer box transport vehicle is moved to the position right in front of the wafer loader and is in butt joint through a standard interface, the wafer box transport vehicle needs to act at a front station and a rear station respectively, and the wafer box is taken down from the wafer loader for transferring; in the process, when the picking and placing device of the wafer box transport vehicle needs to be guaranteed to carry out picking and placing actions at front and rear stations, the equipment is in a relatively stable state, and the picking and placing stability is guaranteed. The current equipment scheme does not have position device, needs the manual work to assist when getting and putting the wafer box and fixes getting and putting the device, gets again the wafer box and puts the action, gets to put the job site stability relatively worse, needs many times location side to accomplish the action.
Disclosure of Invention
In order to solve the technical problems, the invention provides a travel limiting unlocking device for a wafer box transport vehicle.
The specific technical scheme is as follows:
a travel limit unlocking device for a wafer cassette transport vehicle, comprising: the upper end of the front surface of the vertical plate is provided with an upper cover plate, the left end of the upper surface of the upper cover plate is inserted and connected with a button guide post, a limiting cavity is arranged in the top end of the button guide post, a cylindrical pin is arranged at the top end of the limiting cavity of the button guide post, the cylindrical pin is of a cylindrical structure, an opening at the upper end is provided with an outer convex edge, an opening at the lower end is provided with an inner convex edge, the upper end is inserted and connected with a button, the lower end of the button is connected with a telescopic rod, the outer side of the upper end of the telescopic rod is sleeved with the cylindrical pin, a compression spring is arranged between the cylindrical pin and the telescopic rod, the lower end of the compression spring is abutted with the inner convex edge of the cylindrical pin, the upper end of the compression spring is abutted with the button, the lower end of the telescopic rod is connected with a connecting post after passing through the button guide post and the upper cover plate, the side of the connecting post is in the side of the movable plate through a high-grade screw, the middle of the movable plate is provided with an adapter plate, the adapter plate is fixedly connected with the vertical plate, the movable plate is rotationally connected with the adapter plate through a rotating shaft, the right side of the lower end of the front surface of the vertical plate is connected with a sliding block adapter plate, the right end of the sliding block adapter plate is connected with a sliding block, a linear guide rail is inserted and connected inside the sliding block and slides in the sliding block, the front end of the linear guide rail is connected with a first end cover, the rear end of the linear guide rail is connected with a second end cover, an L-shaped limiting adapter plate is connected between the first end cover and the second end cover, the rear end of the upper surface of the limiting adapter plate is connected with a first limiting block, the front end of the upper surface of the limiting adapter plate is connected with a second limiting block, the right end of the movable plate is rotationally connected with a roller through a second high-grade screw, the roller is positioned at the rear end of the first limiting block, the front end of the lower surface of the sliding block adapter plate is connected with a buffer connecting plate, the left end of the lower surface of the buffer connecting plate is connected with a first oil buffer, the right end of the lower surface of the buffer connecting plate is connected with a second oil buffer, the right end of the rear surface of the first end cover is connected with a first limit column corresponding to the first oil buffer, and the right end of the front surface of the second end cover is connected with a second limit column corresponding to the second oil buffer.
The junction of button surface and button guide post upper surface is provided with the uide bushing, telescopic link and upper cover plate upper end junction are provided with the bush.
The telescopic rod is characterized in that a first clamping spring is arranged on the outer side of the telescopic rod and is clamped with the bottom end of the limiting cavity of the button guide post, and a second clamping spring is arranged at the joint of the outer surface of the telescopic rod and the lower end surface of the upper cover plate.
The surface of the roller is provided with a rubber protective sleeve.
And a bearing is arranged on the outer side of the rotating shaft.
Compared with the prior art, the invention has the following beneficial technical effects:
the invention solves the problems that the existing equipment scheme has no positioning device, the taking and placing device is required to be fixed by manual assistance when the wafer box is taken and placed, the stability of the taking and placing work position is relatively poor, and the action can be completed by a plurality of positioning methods. This a spacing unlocking device of stroke for wafer box transport vechicle simple structure, occupation space is little, and spacing stroke is adjustable, with equipment restriction in the limit station of stroke, makes equipment have higher reliability, gets in limit station and puts the action and can steadily go on.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a cross-sectional view of the present invention;
FIG. 3 is a right side view of the present invention;
fig. 4 is a view showing the working state of the present invention.
In the figure: 1. a button; 2. a guide sleeve; 3. a button guide post; 4. an upper cover plate; 5. a vertical plate; 6. a telescopic rod; 7. a connecting column; 8. a first higher screw; 9. a movable plate; 10. a rotating shaft; 11. an adapter plate; 12. a first limiting block; 13. a first hydraulic buffer; 14. a buffer connection plate; 15. a second hydraulic buffer; 16. a limit adapter plate; 17. a second limiting block; 18. an end cover I; 19. a linear guide rail; 20. a slide block; 21. an end cover II; 22. a slider adapter plate; 23. a roller; 24. a second higher screw; 25 cylindrical pins; 26. a compression spring; 27. a clamp spring I; 28. a bushing; 29. a second clamp spring; 30. a first limit column; 31. and a second limiting column.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings, but the scope of the present invention is not limited by the accompanying drawings.
Referring to fig. 1-4, the present invention provides a technical solution: a travel limit unlocking device for a wafer cassette transport vehicle, comprising: the vertical plate 5, the upper end of the front surface of the vertical plate 5 is provided with an upper cover plate 4, the left end of the upper surface of the upper cover plate 4 is inserted and connected with a button guide post 3, a limiting cavity is arranged inside the top end of the button guide post 3, a cylindrical pin 25 is arranged at the top end of the limiting cavity of the button guide post 3, the cylindrical pin 25 is of a cylindrical structure, an opening at the upper end is provided with an outer convex edge, an opening at the lower end is provided with an inner convex edge, the upper end is inserted and connected with a button 1, the lower end of the button 1 is connected with a telescopic rod 6, the outer side of the upper end of the telescopic rod 6 is sleeved and connected with the cylindrical pin 25, a compression spring 26 is arranged between the cylindrical pin 25 and the telescopic rod 6, the lower end of the compression spring 26 is in butt joint with the inner convex edge of the cylindrical pin 25, the upper end of the compression spring 26 is in butt joint with the button 1, the lower end of the telescopic rod 6 passes through the button guide post 3 and the upper cover plate 4 and then is connected with a connecting post 7, the side of the connecting column 7 is connected with the side of the movable plate 9 through a first higher screw 8 in a shaft way, an adapter plate 11 is arranged in the middle of the movable plate 9, the adapter plate 11 is fixedly connected with the vertical plate 5, the movable plate 9 and the adapter plate 11 are in rotary connection through a rotary shaft 10, the right side of the lower end of the front surface of the vertical plate 5 is connected with a sliding block adapter plate 22, the right end of the sliding block adapter plate 22 is connected with a sliding block 20, a linear guide 19 is inserted and connected in the sliding block 20, the linear guide 19 slides in the sliding block 20, the front end of the linear guide 19 is connected with a first end cover 18, the rear end of the linear guide 19 is connected with a second end cover 21, a limiting plate 16 which is L-shaped is connected between the first end cover 18 and the second end cover 21, the rear end of the upper surface of the limiting plate 16 is connected with a first limiting block 12, the front end of the upper surface of the limiting plate 16 is connected with a second limiting block 17, the right end of the movable plate 9 is rotationally connected with a roller 23 through a second higher screw 24, the roller 23 is positioned at the rear end of the first limiting block 12, the front end of the lower surface of the sliding block adapter plate 22 is connected with a buffer connecting plate 14, the left end of the lower surface of the buffer connecting plate 14 is connected with a first oil pressure buffer 13, the right end of the lower surface of the buffer connecting plate 14 is connected with a second oil pressure buffer 15, the right end of the rear surface of the first end cover 18 is connected with a first limiting column 30 corresponding to the first oil pressure buffer 13, and the right end of the front surface of the second end cover 21 is connected with a second limiting column 31 corresponding to the second oil pressure buffer 15. This a spacing unlocking device of stroke for wafer box transport vechicle simple structure, occupation space is little, and spacing stroke is adjustable, need not to be the amount for providing power, restricts equipment at the limit station of stroke, makes equipment have higher reliability, gets in limit station and puts the action and can steadily go on.
As shown in fig. 1-2, the embodiment of the present invention provides an implementation manner, based on the above implementation manner, a guide sleeve 2 is disposed at a connection position between an outer surface of the button 1 and an upper surface of the button guide post 3, and a bushing 28 is disposed at a connection position between the telescopic rod 6 and an upper end of the upper cover plate 4.
By analyzing the above structure, the guide sleeve 2 and the bushing 28 can ensure the axial direction of the up-and-down movement of the telescopic rod 6.
1-2, an embodiment of the present invention provides an implementation manner, based on the above implementation manner, a first clamping spring 27 is provided on the outer side of the telescopic rod 6, the first clamping spring 27 is clamped with the bottom end of the limiting cavity of the button guide post 3, and a second clamping spring 29 is provided at the connection position between the outer surface of the telescopic rod 6 and the lower end surface of the upper cover plate 4.
As can be seen from an analysis of the above structure, the first snap spring 27 can limit the downward pressing depth of the telescopic rod 6, and the second snap spring 29 can limit the upward height of the telescopic rod 6.
As shown in fig. 1-2, the embodiment of the present invention provides an implementation manner, based on the above implementation manner, the connection post 7 is connected with the movable plate 9 through the first higher screw 8, and the roller 23 is connected with the movable plate 9 through the second higher screw 24. The first higher screw 8 and the second higher screw 24 can play a role in rotating connection, and meanwhile abrasion of the connection positions of the connecting column 7 and the movable plate 9 and the connection positions of the roller 23 and the movable plate 9 are reduced.
As shown in fig. 1-2, the embodiment of the present invention provides an implementation manner, and based on the above implementation manner, a rubber protection sleeve is disposed on the periphery of the outer surface of the roller 23. The rubber protective sleeve prevents the second limiting block 17, the first limiting block 12 and the roller 23 from being worn due to collision, and the second limiting block 17 and the first limiting block 12 are wedge-shaped blocks and are provided with inclined planes and straight planes.
As shown in fig. 1 to 4, the embodiment of the present invention provides an implementation manner, and based on the above implementation manner, a bearing is disposed on the outer side of the rotating shaft 10.
By analyzing the above structure, the lubricity between the rotary shaft 10 and the adapter plate 11 can be improved, and the friction can be reduced.
When the telescopic device is used, in a normal state, under the drive of the compression spring 26, the telescopic rod 6 is positioned at the upper limit position defined by the second clamp spring 29, the left end of the movable plate 9 is pulled by the telescopic rod 6 to be positioned at a high position, and the right end of the movable plate 9 is positioned at a low position; when the linear guide rail 19 is positioned at the rear limit position, the roller 23 arranged at the right end of the movable plate 9 is contacted with the vertical surface at the rear end of the first limiting block 12, so that the device is limited at the current position and cannot move; when the device is required to move, the button 1 is pressed, so that the telescopic rod 6 is positioned at the lower limit position defined by the first clamping spring 27, the left end of the movable plate 9 is pulled to be positioned at the low position, the right end of the movable plate 9 is positioned at the high position, the roller 23 arranged at the right end of the movable plate 9 is higher than the first limiting block 12, the unlocking stroke is limited, and the device can normally move; when approaching the second limit block 17 of the device, the top of the piston rod of the second hydraulic buffer 15 is contacted with the first limit post 30, the piston rod of the second hydraulic buffer 15 is contracted, the kinetic energy of the forward movement of the device is absorbed, the device is decelerated, the roller 23 rolls along the inclined plane of the second limit block 17, the right end of the movable plate 9 is lifted, when the device reaches the set limit of the second hydraulic buffer 15, the roller 23 passes over the upper surface of the second limit block 17, the right end of the movable plate 9 falls down, and the roller 23 is clamped with the second limit block 17, so that the device is limited at the second limit block 17; when the device is required to return to the first limit block 12 after finishing the action at the second limit block 17, the button 1 is pressed, the left end of the movable plate 9 is lowered, the right end drives the roller 23 to lift, the unlocking stroke is limited, the device can move backwards, when the device reaches the first limit block 12, the top of the piston rod of the first hydraulic buffer 13 is contacted with the second limit post 31, the piston rod of the first hydraulic buffer 13 is contracted, the kinetic energy of the forward movement of the device is absorbed, the device is decelerated, the roller 23 rolls along the inclined plane of the first limit block 12, the left end of the movable plate 9 is lifted, when the device reaches the limit of the set first hydraulic buffer 13, the roller 23 passes over the upper surface of the first limit block 12, the right end of the movable plate 9 falls down, and the roller 23 is clamped with the first limit block 12, so that the device is limited at the first limit block 12.
Claims (5)
1. A spacing unlocking device of stroke for wafer box transport vechicle, characterized in that includes: riser (5), riser (5) front surface upper end is provided with upper cover plate (4), upper cover plate (4) upper surface left end insert connection has button guide post (3), and button guide post (3) top inside is equipped with spacing chamber, installs cylindric lock (25) on the top of the spacing chamber of button guide post (3), cylindric lock (25) are tubular structure, and upper end opening is equipped with the evagination edge, and the lower extreme opening is equipped with interior protruding edge, and the upper end is pegged graft and is had button (1), button (1) lower extreme is connected with telescopic link (6), telescopic link (6) upper end outside has cup jointed cylindric lock (25), is equipped with compression spring (26) between cylindric lock (25) and telescopic link (6), compression spring (26) cup joint at telescopic link (6), the interior protruding edge butt of cylindric lock (25) lower extreme and cylindric lock (25), compression spring (26) upper end and button (1) butt, telescopic link (6) lower extreme pass button guide post (3) and upper cover plate (4) rear connection post (7) and connecting plate (9) are connected at side face (11) movable connection, riser (9) and the like, and side face (9) are connected, the movable plate (9) is rotationally connected with the adapter plate (11) through a rotating shaft (10), the right side of the lower end of the front surface of the vertical plate (5) is connected with a sliding block adapter plate (22), the right end of the sliding block adapter plate (22) is connected with a sliding block (20), a linear guide rail (19) is inserted and connected inside the sliding block (20), the linear guide rail (19) slides in the sliding block (20), the front end of the linear guide rail (19) is connected with a first end cover (18), the rear end of the linear guide rail (19) is connected with a second end cover (21), a limiting adapter plate (16) which is L-shaped is connected between the first end cover (18) and the second end cover (21), the rear end of the upper surface of the limiting adapter plate (16) is connected with a first limiting block (12), the front end of the upper surface of the limiting adapter plate (16) is connected with a second limiting block (17), the right end of the movable plate (9) is rotationally connected with a roller (23) through a second high-grade screw (24), the roller (23) is positioned at the rear end of the limiting block (12), the lower surface of the sliding block plate (22) is connected with a second end of an oil buffer (14), the lower surface of the lower end of the oil buffer (14) is connected with a buffer plate (14), the right end of the rear surface of the first end cover (18) is connected with a first limit column (30) corresponding to the first oil buffer (13), and the right end of the front surface of the second end cover (21) is connected with a second limit column (31) corresponding to the second oil buffer (15).
2. The stroke limiting and unlocking device for a wafer cassette transport cart of claim 1, wherein: the connecting part of the outer surface of the button (1) and the upper surface of the button guide post (3) is provided with a guide sleeve (2), and the connecting part of the telescopic rod (6) and the upper end of the upper cover plate (4) is provided with a bushing (28).
3. The stroke limiting and unlocking device for a wafer cassette transport cart of claim 1, wherein: the telescopic rod (6) outside is equipped with jump ring one (27), jump ring one (27) and the spacing chamber bottom joint of button guide post (3), telescopic rod (6) surface and upper cover plate (4) lower terminal surface junction are provided with jump ring two (29).
4. The stroke limiting and unlocking device for a wafer cassette transport cart of claim 1, wherein: the outer surface of the roller (23) is provided with a rubber protective sleeve.
5. The stroke limiting and unlocking device for a wafer cassette transport cart of claim 1, wherein: and a bearing is arranged on the outer side of the rotating shaft (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311669792.7A CN117373976B (en) | 2023-12-07 | 2023-12-07 | Stroke limiting unlocking device for wafer box transport vehicle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311669792.7A CN117373976B (en) | 2023-12-07 | 2023-12-07 | Stroke limiting unlocking device for wafer box transport vehicle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117373976A CN117373976A (en) | 2024-01-09 |
| CN117373976B true CN117373976B (en) | 2024-02-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311669792.7A Active CN117373976B (en) | 2023-12-07 | 2023-12-07 | Stroke limiting unlocking device for wafer box transport vehicle |
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| Country | Link |
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| CN (1) | CN117373976B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003068830A (en) * | 2001-08-23 | 2003-03-07 | Advantest Corp | Positioning and fixing device for wafer transport |
| CN214428612U (en) * | 2021-04-16 | 2021-10-19 | 江苏集萃有机光电技术研究所有限公司 | Liftable wafer box |
| CN214732439U (en) * | 2021-03-31 | 2021-11-16 | 无锡先导智能装备股份有限公司 | Connection equipment and connection system |
| CN217945264U (en) * | 2022-08-31 | 2022-12-02 | 昆山梦显电子科技有限公司 | Wafer box transfer trolley |
| CN218730842U (en) * | 2022-10-20 | 2023-03-24 | 威奥博仕机器人（昆山）有限公司 | Mobile robot for carrying wafer box |
| CN116281188A (en) * | 2023-03-24 | 2023-06-23 | 江苏睿新库智能科技有限公司 | Self-propelled direction-changing device, wafer box conveying device and conveying method |
| CN116968491A (en) * | 2023-08-23 | 2023-10-31 | 捷螺智能设备(苏州)有限公司 | AMR multi-slot wafer box carrying trolley |
| CN220096413U (en) * | 2023-06-07 | 2023-11-28 | 成都海威华芯科技有限公司 | Anti-shake trolley for wafer box transmission |
-
2023
- 2023-12-07 CN CN202311669792.7A patent/CN117373976B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003068830A (en) * | 2001-08-23 | 2003-03-07 | Advantest Corp | Positioning and fixing device for wafer transport |
| CN214732439U (en) * | 2021-03-31 | 2021-11-16 | 无锡先导智能装备股份有限公司 | Connection equipment and connection system |
| CN214428612U (en) * | 2021-04-16 | 2021-10-19 | 江苏集萃有机光电技术研究所有限公司 | Liftable wafer box |
| CN217945264U (en) * | 2022-08-31 | 2022-12-02 | 昆山梦显电子科技有限公司 | Wafer box transfer trolley |
| CN218730842U (en) * | 2022-10-20 | 2023-03-24 | 威奥博仕机器人（昆山）有限公司 | Mobile robot for carrying wafer box |
| CN116281188A (en) * | 2023-03-24 | 2023-06-23 | 江苏睿新库智能科技有限公司 | Self-propelled direction-changing device, wafer box conveying device and conveying method |
| CN220096413U (en) * | 2023-06-07 | 2023-11-28 | 成都海威华芯科技有限公司 | Anti-shake trolley for wafer box transmission |
| CN116968491A (en) * | 2023-08-23 | 2023-10-31 | 捷螺智能设备(苏州)有限公司 | AMR multi-slot wafer box carrying trolley |
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| Publication number | Publication date |
|---|---|
| CN117373976A (en) | 2024-01-09 |
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