CN116968491A - An AMR multi-slot wafer box transport trolley - Google Patents
An AMR multi-slot wafer box transport trolley Download PDFInfo
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- CN116968491A CN116968491A CN202311061371.6A CN202311061371A CN116968491A CN 116968491 A CN116968491 A CN 116968491A CN 202311061371 A CN202311061371 A CN 202311061371A CN 116968491 A CN116968491 A CN 116968491A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60G—VEHICLE SUSPENSION ARRANGEMENTS
- B60G13/00—Resilient suspensions characterised by arrangement, location or type of vibration dampers
- B60G13/02—Resilient suspensions characterised by arrangement, location or type of vibration dampers having dampers dissipating energy, e.g. frictionally
- B60G13/06—Resilient suspensions characterised by arrangement, location or type of vibration dampers having dampers dissipating energy, e.g. frictionally of fluid type
- B60G13/10—Resilient suspensions characterised by arrangement, location or type of vibration dampers having dampers dissipating energy, e.g. frictionally of fluid type pneumatic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60G—VEHICLE SUSPENSION ARRANGEMENTS
- B60G13/00—Resilient suspensions characterised by arrangement, location or type of vibration dampers
- B60G13/02—Resilient suspensions characterised by arrangement, location or type of vibration dampers having dampers dissipating energy, e.g. frictionally
- B60G13/04—Resilient suspensions characterised by arrangement, location or type of vibration dampers having dampers dissipating energy, e.g. frictionally mechanically, e.g. having frictionally-engaging springs as damping elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62D—MOTOR VEHICLES; TRAILERS
- B62D63/00—Motor vehicles or trailers not otherwise provided for
- B62D63/02—Motor vehicles
- B62D63/04—Component parts or accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60G—VEHICLE SUSPENSION ARRANGEMENTS
- B60G2202/00—Indexing codes relating to the type of spring, damper or actuator
- B60G2202/20—Type of damper
- B60G2202/23—Friction Damper
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60G—VEHICLE SUSPENSION ARRANGEMENTS
- B60G2202/00—Indexing codes relating to the type of spring, damper or actuator
- B60G2202/20—Type of damper
- B60G2202/24—Fluid damper
- B60G2202/242—Pneumatic damper
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- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Transportation (AREA)
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Abstract
The utility model discloses an AMR multi-slot wafer box carrying trolley, and relates to the technical field of wafer box carrying. An AMR multi-slot wafer box carrying trolley comprises a walking base and universal wheels rotatably connected in the walking base; a bearing table and clamping jaws matched with the bearing table; the sliding block is connected in the sliding frame in a sliding way, a round hole is formed in the sliding block, a driven shaft is connected in the round hole in a rotating way, and the diameter of the round hole is larger than that of the driven shaft; a universal coupling is connected between the driving shaft and the driven shaft; the mounting plate is fixedly connected in the walking base, the bottom of the mounting plate is provided with a damping cylinder, and a connecting block fixedly connected with the sliding block is connected in a sliding manner in the damping cylinder; the vertical plate is fixedly connected to the bottom of the mounting plate, and a supporting shock-absorbing piece is arranged between the vertical plate and the sliding block; the utility model has better damping effect, can generate effective supporting effect, can ensure that the trolley can perform good damping when walking on rugged road, and protect the wafer on the trolley from damage.
Description
Technical Field
The utility model belongs to the technical field of wafer box conveying, and particularly relates to an AMR multi-slot wafer box conveying trolley.
Background
The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the wafer is circular in shape, in order to ensure safe storage, transportation and carrying of the wafer, a wafer storage box is widely used as a carrying tool for the wafer, when the wafer storage box needs transportation and transfer, a special carrying robot is mostly adopted at present, the existing carrying robot is a special wafer box carrying table and a mechanical arm which are carried on a self-propelled vehicle for carrying, but in the walking process of the existing carrying robot, conditions such as jolt and vibration often occur due to the influence of field environment factors, the self-propelled vehicle is unstable, and the carried goods are fallen off and damaged if the vibration amplitude is too large.
The utility model patent with publication number of CN218778318U and publication date of 2023-03-31 discloses a wafer box transfer robot, which comprises: the walking base is internally provided with a plurality of groups of universal wheels; the wafer box carrying platform comprises a lower layer carrying platform and an upper layer carrying platform, wherein the lower layer carrying platform and the upper layer carrying platform both comprise two groups of bottom plates, each group of bottom plates is provided with two groups of objective tables, and the upper layer is arranged in a lower layer in a shrinking way; the conveying mechanical arm is installed through an installation seat, the installation seat is fixedly arranged on the walking base, and clamping jaws are further arranged on the conveying mechanical arm; the detection device comprises a wafer box detection device and an environment detection device, wherein the wafer box detection device comprises a first detection mechanism arranged on a wafer box carrying platform and a second detection mechanism arranged on a clamping jaw, and the environment detection device comprises a third detection mechanism arranged on a walking base. The wafer box is convenient to carry by arranging the upper and lower bearing tables which are retracted, the multidirectional movement can be met by the universal wheels, and the omnibearing protection can be realized by arranging the detection device;
however, in the above patent, the damping-related structure is relatively conventional, and the damping effect is greatly reduced when the damping-related structure encounters a rugged road surface, which is not beneficial to the normal transportation of the wafer.
Disclosure of Invention
The technical problem to be solved by the present utility model is to overcome the deficiencies of the prior art and provide an AMR multi-slot wafer cassette carrier capable of overcoming the above-mentioned problems or at least partially solving the above-mentioned problems.
In order to solve the technical problems, the utility model adopts the basic conception of the technical scheme that: an AMR multi-slot wafer cassette handling cart comprising:
a walking base and universal wheels rotatably connected in the walking base;
a bearing table and clamping jaws matched with the bearing table;
the sliding frame is fixedly connected in the walking base;
the sliding block is connected in the sliding frame in a sliding way, a round hole is formed in the sliding block, a driven shaft is connected in a rotary way in the round hole, the diameter of the round hole is larger than that of the driven shaft, and the driven shaft is connected with the universal wheel;
the driving shaft is rotatably connected in the walking base, and a universal coupling is connected between the driving shaft and the driven shaft;
the mounting plate is fixedly connected in the walking base, a shock absorption cylinder is arranged at the bottom of the mounting plate, and a connecting block fixedly connected with the sliding block is connected in a sliding manner in the shock absorption cylinder;
the riser, fixed connection is in the bottom of mounting panel, just be equipped with between riser and the slider and support shock attenuation piece.
Preferably, the sliding connection has the slide in the shock-absorbing cylinder, the slide is fixed to link to each other with the connecting block, the shock-absorbing cylinder is connected with first spring, first spring sets up between the bottom of slide and mounting panel, the lateral wall of mounting panel is equipped with the curb plate.
In order to make the driven shaft connection more stable, further, be equipped with the cavity in the slider, sliding connection has the piston board in the cavity, be equipped with the push rod on the piston board, the one end that the round hole was arranged in to the push rod is equipped with the circular arc board, the cover is equipped with the bearing spare on the outer wall of driven shaft, the circular arc board offsets with the bearing spare.
In order to enable the driven shaft to be connected more stably, further, fine holes communicated with the cavity are formed in the sliding block, the connecting block and the sliding plate, an air inlet is formed in the outer wall of the damping cylinder, one-way valves are arranged on the air inlet and the fine holes, a damping rod is arranged between the inner wall of the cavity and the piston plate, a second spring is sleeved on the outer wall of the damping rod, the second spring is arranged between the inner wall of the cavity and the outer wall of the piston plate, and an air leakage hole is formed in the cavity.
In order to achieve the supporting effect, preferably, the supporting shock absorbing member comprises two first connecting rods rotatably connected to the sliding block and two second connecting rods rotatably connected to the vertical plate, one end, away from the sliding block, of each first connecting rod is fixedly connected with a first fixing plate, one end, away from the vertical plate, of each second connecting rod is fixedly connected with a second fixing plate, and a telescopic rod is connected between the first fixing plate and the second fixing plate.
In order to further achieve the effects of shock absorption and support, further, the first fixing plate and the second fixing plate are fixedly connected with supporting rods, two limiting blocks are fixedly connected to the supporting rods, sleeves are arranged on the outer walls of the limiting blocks, the limiting blocks are slidably connected in the sleeves, and a third spring is arranged between the limiting blocks.
In order to enable the first connecting rod and the second connecting rod to rotate conveniently, further, the outer wall of the vertical plate is provided with a first supporting lug, the second connecting rod is connected to the first supporting lug in a rotating mode, the outer wall of the sliding block is provided with a second supporting lug, the first connecting rod is connected to the second supporting lug in a rotating mode, the sliding frame is provided with a sliding groove, and the second supporting lug is connected to the sliding groove in a sliding mode.
In order to enable the universal wheels to rotate and enable the trolley to move conveniently, preferably, a first gear is arranged on the driving shaft, a stepping motor is arranged on the walking base, the output end of the stepping motor is connected with a second gear, and the second gear is meshed with the first gear.
In order to be more convenient for take the wafer box, preferably, be equipped with horizontal mount pad on the walking base, the intermediate position of horizontal mount pad is equipped with vertical mount pad, the top outer wall of vertical mount pad is equipped with the connecting seat, be equipped with the arm on the connecting seat, the clamping jaw sets up the one end of keeping away from the connecting seat at the arm.
In order to enable the wafer box to be placed more conveniently, further, bearing plates are arranged on the outer walls of the two sides of the vertical mounting seat, bearing tables are arranged on the horizontal mounting seat and the bearing plates, and anti-collision bars are arranged on the outer walls of the bottoms of the walking bases.
After the technical scheme is adopted, compared with the prior art, the utility model has the following beneficial effects: in the utility model, when the carrying trolley runs on a rugged road surface, the universal wheels move up and down due to the form of the universal wheels on the road surface, and then the driven shaft utility model is driven to move, so that the driven shaft utility model moves in a round hole on the sliding block utility model, and the round hole is larger, the driven shaft utility model does not generate limit in the round hole, so that the movement of the universal wheels utility model can avoid the bad shaking of the trolley body, the shock absorption effect is improved, the shock absorption is carried out again under the action of the supporting shock absorption piece, the supporting shock absorption piece can support the position of the sliding block utility model, the shock absorption effect of the utility model is better, meanwhile, the effective supporting effect can be generated, the trolley can be ensured to carry out good shock absorption when running on the rugged road surface, the wafer on the trolley is protected, and the damage of the trolley is avoided.
The following describes the embodiments of the present utility model in further detail with reference to the accompanying drawings.
Drawings
In the drawings:
FIG. 1 is a schematic diagram of an AMR multi-slot wafer cassette handling cart according to the present utility model;
FIG. 2 is a schematic diagram of a handling trolley for AMR multi-slot wafer cassettes according to the present utility model;
FIG. 3 is a front view of an AMR multi-slot wafer cassette handling cart according to the present utility model;
FIG. 4 is a schematic view of a partial enlarged structure of the AMR multi-slot wafer cassette handling cart of FIG. 3 according to the present utility model;
FIG. 5 is a side view cross section of a traveling base in an AMR multi-slot wafer cassette transport cart in accordance with the present utility model;
FIG. 6 is a cross-sectional view of a middle slide frame in an AMR multi-slot wafer cassette handling cart in accordance with the present utility model;
fig. 7 is a schematic structural diagram of the number of carriers in embodiment 5 according to the present utility model.
In the figure: 1. a walking base; 101. a bumper strip; 102. a horizontal mounting base; 103. a vertical mounting base; 104. a carrying plate; 105. a carrying platform; 106. a connecting seat; 107. a mechanical arm; 108. a clamping jaw; 2. a universal wheel; 201. a driven shaft; 202. a bearing member; 203. a universal coupling; 204. a driving shaft; 205. a first gear; 206. a stepping motor; 207. a second gear; 3. a mounting plate; 301. a side plate; 302. a riser; 303. a first support ear; 4. a sliding frame; 401. a chute; 402. a slide block; 403. a connecting block; 404. a slide plate; 405. a second support ear; 406. fine pores; 5. a shock absorbing cylinder; 501. a first spring; 502. an air inlet; 6. a cavity; 601. a piston plate; 602. a second spring; 603. a shock-absorbing rod; 604. a vent hole; 605. a push rod; 606. an arc plate; 7. a first link; 701. a first fixing plate; 702. a second link; 703. a second fixing plate; 704. a telescopic rod; 705. a support rod; 706. a sleeve; 707. a limiting block; 708. and a third spring.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions in the embodiments will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present utility model, and the following embodiments are used to illustrate the present utility model, but are not intended to limit the scope of the present utility model.
Examples
Referring to fig. 1 to 6, an AMR multi-slot wafer box carrier comprises a traveling base 1 and a universal wheel 2 rotatably connected in the traveling base 1; a carrying table 105 and a clamping jaw 108 matched with the carrying table 105; the sliding frame 4 is fixedly connected in the walking base 1; the sliding block 402 is in sliding connection in the sliding frame 4, a round hole is formed in the sliding block 402, a driven shaft 201 is connected in a rotary mode in the round hole, the diameter of the round hole is larger than that of the driven shaft 201, and the driven shaft 201 is connected with the universal wheel 2; the driving shaft 204 is rotatably connected in the walking base 1, and a universal coupling 203 is connected between the driving shaft 204 and the driven shaft 201; the mounting plate 3 is fixedly connected in the walking base 1, a shock absorption cylinder 5 is arranged at the bottom of the mounting plate 3, and a connecting block 403 fixedly connected with the sliding block 402 is connected in a sliding manner in the shock absorption cylinder 5; the vertical plate 302 is fixedly connected to the bottom of the mounting plate 3, and a supporting shock absorber is arranged between the vertical plate 302 and the sliding block 402.
According to the utility model, when the carrying trolley runs on a rugged road, the universal wheels 2 shake up and down or float, the universal wheels 2 drive the driven shaft 201 to move, so that the driven shaft 201 moves in a round hole on the sliding block 402, and because the round hole is arranged larger, the driven shaft 201 does not limit in the round hole, the universal wheels 2 can move to avoid the vehicle body from shaking, the damping effect is improved, the sliding block 402 can move up and down in the sliding frame 4 under the movement of the driven shaft 201, the connecting block 403 is pushed to move, the sliding plate 404 is driven to move in the damping cylinder 5, meanwhile, the damping piece is supported to absorb shock again under the action of the damping piece, and the position of the sliding block 402 is supported by the damping piece, so that the damping effect is better, meanwhile, an effective supporting effect can be generated, the good damping effect can be ensured when the trolley runs on the rugged road, and the wafer on the trolley is protected from being damaged.
Examples
Referring to fig. 1 to 6, an AMR multi-slot wafer box carrier comprises a traveling base 1 and a universal wheel 2 rotatably connected in the traveling base 1; a carrying table 105 and a clamping jaw 108 matched with the carrying table 105; the sliding frame 4 is fixedly connected in the walking base 1; the sliding block 402 is in sliding connection in the sliding frame 4, a round hole is formed in the sliding block 402, a driven shaft 201 is connected in a rotary mode in the round hole, the diameter of the round hole is larger than that of the driven shaft 201, and the driven shaft 201 is connected with the universal wheel 2; the driving shaft 204 is rotatably connected in the walking base 1, and a universal coupling 203 is connected between the driving shaft 204 and the driven shaft 201; the mounting plate 3 is fixedly connected in the walking base 1, a shock absorption cylinder 5 is arranged at the bottom of the mounting plate 3, and a connecting block 403 fixedly connected with the sliding block 402 is connected in a sliding manner in the shock absorption cylinder 5; the vertical plate 302 is fixedly connected to the bottom of the mounting plate 3, and a supporting shock absorber is arranged between the vertical plate 302 and the sliding block 402.
The sliding connection has slide 404 in damper 5, and slide 404 links to each other with the connecting block 403 is fixed, and damper 5 internal connection has first spring 501, and first spring 501 sets up between slide 404 and the bottom of mounting panel 3, and the lateral wall of mounting panel 3 is equipped with curb plate 301, and curb plate 301 links to each other with walking base 1's outer wall is fixed to can make mounting panel 3 fixed connection in walking base 1.
The sliding block 402 is internally provided with a cavity 6, a piston plate 601 is connected in the cavity 6 in a sliding way, a push rod 605 is arranged on the piston plate 601, one end of the push rod 605 in the round hole is provided with an arc plate 606, the outer wall of the driven shaft 201 is sleeved with a bearing piece 202, and the arc plate 606 is propped against the bearing piece 202.
The slide block 402, the connecting block 403 and the slide plate 404 are all provided with a pore 406 communicated with the cavity 6, the outer wall of the damper cylinder 5 is provided with an air inlet 502, the air inlet 502 and the pore 406 are both provided with one-way valves, a damper rod 603 is arranged between the inner wall of the cavity 6 and the piston plate 601, the outer wall of the damper rod 603 is sleeved with a second spring 602, the second spring 602 is arranged between the inner wall of the cavity 6 and the outer wall of the piston plate 601, and an air leakage hole 604 is arranged in the cavity 6.
In the utility model, when the carrying trolley runs on a rugged road, the universal wheel 2 can shake or float up and down, the universal wheel 2 can drive the driven shaft 201 to move, so that the driven shaft 201 moves in the round hole on the sliding block 402, and the driven shaft 201 cannot limit in the round hole because the round hole is arranged larger, the universal wheel 2 can move, the vehicle body is prevented from shaking, and the shock absorption effect is improved.
The sliding block 402 can move up and down in the sliding frame 4 under the movement of the driven shaft 201, so that the sliding plate 404 can be driven by the connecting block 403 to move up and down in the damping cylinder 5, the damping cylinder 5 is arranged into a sealed cylinder body, gas is arranged in the damping cylinder 5, the sliding plate 404 can compress the gas in the damping cylinder 5 when moving upwards in the damping cylinder 5, so that the gas enters the fine holes 406 and then enters the cavity 6, the gas entering the cavity 6 can push the piston plate 601 to move, and the pushing rod 605 and the circular arc plate 606 are driven to move, so that the circular arc plate 606 props against the bearing piece 202, the driven shaft 201 is limited, the connection of the driven shaft is more stable, and the stable operation of the trolley is ensured; when the sliding plate 404 moves downwards in the damper 5, gas is pumped through the gas inlet 502, so that the gas enters the damper 5 in a period, and when the sliding plate 404 moves upwards again, the gas is conveyed into the cavity 6 again, so that the fixing effect on the driven shaft 201 is better.
It should be noted that, the air inlet 502 and the fine holes 406 are both provided with the check valve, so that the air inlet 502 can only realize air inlet operation, the air in the damper 5 cannot flow out from the air inlet 502, the air in the cavity 6 cannot flow back through the fine holes 406, when the air in the cavity 6 is more, the air is decompressed through the air release holes 604, thereby avoiding affecting the normal use of the driven shaft 201, and the air release holes 604 are provided with the decompression valve, and the air release operation can be performed only after the cavity 6 reaches a certain pressure.
Examples
Referring to fig. 1 to 6, an AMR multi-slot wafer box carrier comprises a traveling base 1 and a universal wheel 2 rotatably connected in the traveling base 1; a carrying table 105 and a clamping jaw 108 matched with the carrying table 105; the sliding frame 4 is fixedly connected in the walking base 1; the sliding block 402 is in sliding connection in the sliding frame 4, a round hole is formed in the sliding block 402, a driven shaft 201 is connected in a rotary mode in the round hole, the diameter of the round hole is larger than that of the driven shaft 201, and the driven shaft 201 is connected with the universal wheel 2; the driving shaft 204 is rotatably connected in the walking base 1, and a universal coupling 203 is connected between the driving shaft 204 and the driven shaft 201; the mounting plate 3 is fixedly connected in the walking base 1, a shock absorption cylinder 5 is arranged at the bottom of the mounting plate 3, and a connecting block 403 fixedly connected with the sliding block 402 is connected in a sliding manner in the shock absorption cylinder 5; the vertical plate 302 is fixedly connected to the bottom of the mounting plate 3, and a supporting shock absorber is arranged between the vertical plate 302 and the sliding block 402.
The supporting shock absorber comprises two first connecting rods 7 which are rotatably connected to the sliding block 402 and two second connecting rods 702 which are rotatably connected to the vertical plate 302, wherein one end, away from the sliding block 402, of each first connecting rod 7 is fixedly connected with a first fixing plate 701, one end, away from the vertical plate 302, of each second connecting rod 702 is fixedly connected with a second fixing plate 703, and a telescopic rod 704 is connected between each first fixing plate 701 and each second fixing plate 703.
The first fixed plate 701 and the second fixed plate 703 are fixedly connected with support rods 705, the two support rods 705 are fixedly connected with limiting blocks 707, the outer wall of each limiting block 707 is provided with a sleeve 706, the two limiting blocks 707 are slidably connected in the sleeve 706, and a third spring 708 is arranged between the two limiting blocks 707.
The outer wall of riser 302 is equipped with first supporting ear 303, and second connecting rod 702 rotates to be connected on first supporting ear 303, and the outer wall of slider 402 is equipped with second supporting ear 405, and first connecting rod 7 rotates to be connected on second supporting ear 405, is equipped with spout 401 on the sliding frame 4, and second supporting ear 405 sliding connection is in spout 401.
In the utility model, when the driven shaft 201 drives the sliding block 402 to move, the sliding block 402 drives the first connecting rod 7 to move, the first connecting rod 7 drives the first fixing plate 701 to move, the supporting rod 705 drives the limiting block 707 to move, the limiting block 707 moves in the sleeve 706, the limiting block is supported while the sliding block 402 moves through the structure of the limiting block, the limiting block 707 compresses the third spring 708 while moving, and meanwhile, the damping operation can be performed again, so that the damping effect is better, the first connecting rod 7 and the second connecting rod 702 are respectively connected with the sliding block 402 and the vertical plate 302 in a rotating way, the movement is facilitated, and the set telescopic rod 704 can limit again, so that the connection is more stable.
Examples
Referring to fig. 1 to 6, an AMR multi-slot wafer box carrier comprises a traveling base 1 and a universal wheel 2 rotatably connected in the traveling base 1; a carrying table 105 and a clamping jaw 108 matched with the carrying table 105; the sliding frame 4 is fixedly connected in the walking base 1; the sliding block 402 is in sliding connection in the sliding frame 4, a round hole is formed in the sliding block 402, a driven shaft 201 is connected in a rotary mode in the round hole, the diameter of the round hole is larger than that of the driven shaft 201, and the driven shaft 201 is connected with the universal wheel 2; the driving shaft 204 is rotatably connected in the walking base 1, and a universal coupling 203 is connected between the driving shaft 204 and the driven shaft 201; the mounting plate 3 is fixedly connected in the walking base 1, a shock absorption cylinder 5 is arranged at the bottom of the mounting plate 3, and a connecting block 403 fixedly connected with the sliding block 402 is connected in a sliding manner in the shock absorption cylinder 5; the riser 302, fixed connection is in the bottom of mounting panel 3, and is equipped with the support shock absorber between riser 302 and the slider 402, is equipped with first gear 205 on the driving shaft 204, is equipped with step motor 206 on the walking base 1, and step motor 206's output is connected with second gear 207, and second gear 207 meshes with first gear 205.
The walking base 1 is provided with a horizontal installation seat 102, a vertical installation seat 103 is arranged in the middle of the horizontal installation seat 102, a connecting seat 106 is arranged on the outer wall of the top of the vertical installation seat 103, a mechanical arm 107 is arranged on the connecting seat 106, and a clamping jaw 108 is arranged at one end, far away from the connecting seat 106, of the mechanical arm 107.
The outer walls of the two sides of the vertical installation seat 103 are respectively provided with a bearing plate 104, the horizontal installation seat 102 and the bearing plates 104 are respectively provided with a bearing table 105, and the outer wall of the bottom of the walking base 1 is provided with an anti-collision strip 101, so that the impact force generated by the car collision can be reduced.
In the utility model, when in use, the wafer box is firstly placed on the bearing table 105, the first positioning mechanism for fixing the wafer box is arranged on the bearing table 105, the wafer box can be positioned, then the wafer box is taken through the mechanical arm 107 and the clamping jaw 108, the use is convenient, and the second positioning mechanism for taking the wafer box is also arranged on the clamping jaw 108, so that the fixing effect in taking is better.
In this embodiment, eight carrying tables 105 are provided, so that wafer cassettes in eight areas can be placed simultaneously, and efficiency is improved, that is, two carrying tables 105 are placed on the horizontal mounting seats 102 located on two sides of the vertical mounting seat 103, and two carrying tables 105 are also placed on the two carrying plates 104 respectively.
Examples
Referring to fig. 7, an AMR multi-slot wafer box carrier comprises a walking base 1 and a horizontal mounting seat 102 connected to the walking base 1, wherein a vertical mounting seat 103 is arranged at the middle position of the horizontal mounting seat 102, two bearing plates 104 are arranged on the vertical mounting seat 103, a connecting seat 106 is arranged on the vertical mounting seat 103, a mechanical arm 107 is arranged on the connecting seat 106, a clamping jaw 108 is arranged on the mechanical arm 107, bearing platforms 105 are arranged at positions, which are positioned on two sides of the vertical mounting seat 103, on the horizontal mounting seat 102, and each bearing plate 104 is also provided with a bearing platform 105, as shown in fig. 7, four bearing platforms 105 can be simultaneously borne, and the mechanical arm 107 and the clamping jaw 108 can be more conveniently operated.
The above description is only of the preferred embodiments of the present utility model, and is not intended to limit the present utility model in any way, although the present utility model has been described in the preferred embodiments, and is not limited thereto.
Claims (10)
1. An AMR multi-slot wafer cassette carrier comprising:
the walking base (1) and the universal wheel (2) which is rotatably connected in the walking base (1);
a carrying table (105) and clamping jaws (108) matched with the carrying table (105);
the sliding frame (4) is fixedly connected in the walking base (1);
the sliding block (402) is in sliding connection with the sliding frame (4), a round hole is formed in the sliding block (402), a driven shaft (201) is connected with the round hole in a rotating mode, the diameter of the round hole is larger than that of the driven shaft (201), and the driven shaft (201) is connected with the universal wheel (2);
the driving shaft (204) is rotationally connected in the walking base (1), and a universal coupling (203) is connected between the driving shaft (204) and the driven shaft (201);
the mounting plate (3) is fixedly connected in the walking base (1), a shock absorption cylinder (5) is arranged at the bottom of the mounting plate (3), and a connecting block (403) fixedly connected with the sliding block (402) is connected in a sliding manner in the shock absorption cylinder (5);
the vertical plate (302) is fixedly connected to the bottom of the mounting plate (3), and a supporting shock absorber is arranged between the vertical plate (302) and the sliding block (402).
2. The AMR multi-slot wafer box carrier of claim 1, wherein a sliding plate (404) is slidably connected to the damper cylinder (5), the sliding plate (404) is fixedly connected to the connecting block (403), a first spring (501) is connected to the damper cylinder (5), the first spring (501) is disposed between the sliding plate (404) and the bottom of the mounting plate (3), and a side plate (301) is disposed on a side wall of the mounting plate (3).
3. The AMR multi-slot wafer box carrier of claim 2, wherein a cavity (6) is provided in the slider (402), a piston plate (601) is slidably connected in the cavity (6), a push rod (605) is provided on the piston plate (601), one end of the push rod (605) in the round hole is provided with an arc plate (606), a bearing member (202) is sleeved on the outer wall of the driven shaft (201), and the arc plate (606) is abutted against the bearing member (202).
4. The AMR multi-slot wafer box carrier of claim 3, wherein the fine holes (406) communicated with the cavity (6) are formed in the sliding block (402), the connecting block (403) and the sliding plate (404), the air inlet (502) is formed in the outer wall of the damper cylinder (5), the check valve is formed in the air inlet (502) and the fine holes (406), the damper rod (603) is arranged between the inner wall of the cavity (6) and the piston plate (601), the second spring (602) is sleeved on the outer wall of the damper rod (603), the second spring (602) is arranged between the inner wall of the cavity (6) and the outer wall of the piston plate (601), and the air leakage hole (604) is formed in the cavity (6).
5. The AMR multi-slot wafer cassette carrier of claim 1, wherein the supporting shock absorbing member comprises two first links (7) rotatably connected to the slider (402) and two second links (702) rotatably connected to the riser (302), one end of the first links (7) away from the slider (402) is fixedly connected with a first fixed plate (701), one end of the second links (702) away from the riser (302) is fixedly connected with a second fixed plate (703), and a telescopic link (704) is connected between the first fixed plate (701) and the second fixed plate (703).
6. The AMR multi-slot wafer box carrier of claim 5, wherein the first fixing plate (701) and the second fixing plate (703) are fixedly connected with supporting rods (705), two supporting rods (705) are fixedly connected with limiting blocks (707), a sleeve (706) is arranged on the outer wall of each limiting block (707), two limiting blocks (707) are slidably connected in the sleeve (706), and a third spring (708) is arranged between the two limiting blocks (707).
7. The AMR multi-slot wafer cassette carrier of claim 5, wherein a first supporting ear (303) is disposed on an outer wall of the riser (302), a second connecting rod (702) is rotatably connected to the first supporting ear (303), a second supporting ear (405) is disposed on an outer wall of the slider (402), the first connecting rod (7) is rotatably connected to the second supporting ear (405), a sliding groove (401) is disposed on the sliding frame (4), and the second supporting ear (405) is slidably connected to the sliding groove (401).
8. The AMR multi-slot wafer cassette carrier of claim 1, wherein a first gear (205) is provided on the drive shaft (204), a stepper motor (206) is provided on the walking base (1), an output end of the stepper motor (206) is connected with a second gear (207), and the second gear (207) is meshed with the first gear (205).
9. The AMR multi-slot wafer box carrier of claim 1, wherein a horizontal mounting seat (102) is provided on the walking base (1), a vertical mounting seat (103) is provided at a middle position of the horizontal mounting seat (102), a connecting seat (106) is provided on an outer wall of a top of the vertical mounting seat (103), a mechanical arm (107) is provided on the connecting seat (106), and the clamping jaw (108) is provided at one end of the mechanical arm (107) far away from the connecting seat (106).
10. The AMR multi-slot wafer box carrier of claim 9, wherein the outer walls of the two sides of the vertical mounting seat (103) are provided with bearing plates (104), the horizontal mounting seat (102) and the bearing plates (104) are provided with bearing platforms (105), and the outer wall of the bottom of the walking base (1) is provided with anti-collision bars (101).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311061371.6A CN116968491A (en) | 2023-08-23 | 2023-08-23 | An AMR multi-slot wafer box transport trolley |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311061371.6A CN116968491A (en) | 2023-08-23 | 2023-08-23 | An AMR multi-slot wafer box transport trolley |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117276163A (en) * | 2023-11-22 | 2023-12-22 | 泓浒(苏州)半导体科技有限公司 | A wafer box handling device for ultra-clean environment |
| CN117373976A (en) * | 2023-12-07 | 2024-01-09 | 沈阳富创精密设备股份有限公司 | A stroke limit unlocking device for wafer box transport vehicles |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19908607A1 (en) * | 1999-02-27 | 2000-09-07 | Daimler Chrysler Ag | Air suspension strut for motor vehicle wheel suspensions |
| CN2423140Y (en) * | 2000-05-30 | 2001-03-14 | 丁建新 | Motor vehicle vibration damper |
| CN108081892A (en) * | 2017-12-18 | 2018-05-29 | 徐州松惠机电有限公司 | A kind of large span gate-type carries rear axle |
| CN210760141U (en) * | 2019-11-01 | 2020-06-16 | 青岛天鸿动力传动设备有限公司 | A vehicle axle that is easy to slow down the impact of gravity |
| CN214874094U (en) * | 2021-05-25 | 2021-11-26 | 青岛述诚机械设备有限公司 | Connecting structure of suspension cross beam assembly and fixing plate |
| CN114523812A (en) * | 2022-02-15 | 2022-05-24 | 刘丽娟 | New energy automobile is with shock attenuation suspension device |
| CN218778318U (en) * | 2022-10-21 | 2023-03-31 | 捷螺智能设备(苏州)有限公司 | Wafer box transfer robot |
-
2023
- 2023-08-23 CN CN202311061371.6A patent/CN116968491A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19908607A1 (en) * | 1999-02-27 | 2000-09-07 | Daimler Chrysler Ag | Air suspension strut for motor vehicle wheel suspensions |
| CN2423140Y (en) * | 2000-05-30 | 2001-03-14 | 丁建新 | Motor vehicle vibration damper |
| CN108081892A (en) * | 2017-12-18 | 2018-05-29 | 徐州松惠机电有限公司 | A kind of large span gate-type carries rear axle |
| CN210760141U (en) * | 2019-11-01 | 2020-06-16 | 青岛天鸿动力传动设备有限公司 | A vehicle axle that is easy to slow down the impact of gravity |
| CN214874094U (en) * | 2021-05-25 | 2021-11-26 | 青岛述诚机械设备有限公司 | Connecting structure of suspension cross beam assembly and fixing plate |
| CN114523812A (en) * | 2022-02-15 | 2022-05-24 | 刘丽娟 | New energy automobile is with shock attenuation suspension device |
| CN218778318U (en) * | 2022-10-21 | 2023-03-31 | 捷螺智能设备(苏州)有限公司 | Wafer box transfer robot |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117276163A (en) * | 2023-11-22 | 2023-12-22 | 泓浒(苏州)半导体科技有限公司 | A wafer box handling device for ultra-clean environment |
| CN117276163B (en) * | 2023-11-22 | 2024-01-30 | 泓浒(苏州)半导体科技有限公司 | Wafer box carrying device for ultra-clean environment |
| CN117373976A (en) * | 2023-12-07 | 2024-01-09 | 沈阳富创精密设备股份有限公司 | A stroke limit unlocking device for wafer box transport vehicles |
| CN117373976B (en) * | 2023-12-07 | 2024-02-02 | 沈阳富创精密设备股份有限公司 | A stroke limit unlocking device for wafer box transport vehicles |
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