CN117369126B - Simulation method of crosstalk stripes in interference detection - Google Patents
Simulation method of crosstalk stripes in interference detection Download PDFInfo
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- CN117369126B CN117369126B CN202311659260.5A CN202311659260A CN117369126B CN 117369126 B CN117369126 B CN 117369126B CN 202311659260 A CN202311659260 A CN 202311659260A CN 117369126 B CN117369126 B CN 117369126B
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- 238000001514 detection method Methods 0.000 title claims abstract description 90
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- 238000000034 method Methods 0.000 title claims abstract description 18
- 230000003287 optical effect Effects 0.000 claims abstract description 27
- 238000009826 distribution Methods 0.000 claims abstract description 8
- 238000013461 design Methods 0.000 claims abstract description 6
- 238000012216 screening Methods 0.000 claims abstract description 4
- 230000006870 function Effects 0.000 claims description 7
- 238000005457 optimization Methods 0.000 abstract description 4
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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Abstract
The invention relates to the technical field of interference detection, in particular to a simulation method of crosstalk stripes in interference detection, which comprises the following steps: s1, simulating an interference detection light path by using Lighttools software, and screening out a stray light path larger than an intensity power threshold; s2, simulating the screened stray light paths one by using a sequence mode of Zemax software, and performing ray tracing on the light paths to obtain coordinate and phase information of the light on a reference surface; s3, simulating amplitude information according to the coordinate information of the light in Matlab software, obtaining complex amplitude information of the light by combining the phase information, and simulating interference detection stripes and crosstalk stripes according to complex amplitude distribution of the reference light, the detection light and the stray light. According to the simulation interference detection stripe and the simulation crosstalk stripe result, iterative optimization can be carried out on the optical design result in the follow-up process, the influence of the simulation interference detection stripe on the interference detection is restrained, and therefore the accuracy of the interference detection is improved.
Description
Technical Field
The invention relates to the technical field of interference detection, in particular to a simulation method of crosstalk stripes in interference detection.
Background
Compared with the spherical optical element, the aspherical optical element has the advantages of enlarging the field of view, improving the dynamic transfer function and imaging quality of the system and the like in the optical system, and the aspherical optical element has higher design freedom than the spherical optical element, thereby simplifying the structure of the optical system, reducing the weight of the system and the like. The precision requirement of the current optical system on the aspheric optical element is higher and higher, so that the improvement of the surface shape processing precision and the detection precision of the aspheric optical element is very important.
Interference detection is an important means for detecting an aspheric optical element with high precision, however, crosstalk fringes caused by stray light in interference detection are important factors causing the detection precision to be reduced, and even interference detection cannot be performed when the crosstalk fringes are serious. The stray light in the interference detection refers to light which is reflected and transmitted between optical elements for multiple times in an interference detection light path, and crosstalk fringes formed by the interference of the stray light, the reference light and the detection light can be overlapped on the interference detection fringes, so that the interference detection accuracy is reduced.
The conventional method for analyzing the stray light of the optical system aims at incoherent stray light analysis in the optical system, is not suitable for analyzing the coherent stray light in an interference compensation detection light path, and does not have simulation software for detecting the coherent stray light aiming at interference compensation.
And the interference fringes formed by the coherent stray light in the interference detection have less research at home and abroad. For coherent stray light in interference detection, a method for simulating by means of a non-sequence tracking mode of optical analysis software Zemax is proposed, but the simulation method has less fringe information, and cannot obtain intensity contrast and accurate position information of interference detection fringes and crosstalk fringes.
Disclosure of Invention
In view of the problem that the detection accuracy is reduced due to the fact that crosstalk fringes formed by stray light, reference light and detection light are overlapped on the interference detection fringes in interference detection, the invention provides a method for simulating the crosstalk fringes in interference detection by using Zemax and Matlab, the intensity contrast and accurate position information of the interference detection fringes and the crosstalk fringes can be obtained, and the crosstalk fringes can be processed according to simulation results, so that the interference detection accuracy is improved.
The invention provides a simulation method of crosstalk stripes in interference detection, which comprises the following steps:
s1: simulating an interference detection light path by using Lighttools software, and screening a stray light path which is larger than an intensity power threshold value of 1/10000;
s2: simulating the screened stray light paths one by using a sequence mode of Zemax software, and performing ray tracing on the light paths to obtain coordinate and phase information of the light on a reference surface;
s3: and simulating amplitude information according to the coordinate information of the light rays in Matlab software, obtaining complex amplitude information of the light rays by combining the phase information, and simulating interference detection stripes and crosstalk stripes according to complex amplitude distribution of reference light, detection light and stray light.
Preferably, in step S2, programming is performed by using a macro language function of Zemax software, each stray light optical path is traced according to each trace, each trace is traced according to a set step length, a total optical path of the light is obtained through simulation, and a phase of each beam of light is obtained through calculation according to the total optical path of the light; and programming by using macro language functions of Zemax software, and tracking coordinates of light reaching the reference surface.
Preferably, in step S3, the coordinate difference between the light rays is obtained according to the coordinates of the light rays on the reference plane, the amplitude is represented by the inverse of the coordinate difference, and the complex amplitude information of the light rays is obtained by combining the phase calculation of the light rays.
Preferably, the complex amplitude distribution of the reference light, the detection light, and each stray light is as follows:
；
wherein,complex amplitudes of reference light, detection light, stray light, respectively, +.>Amplitude of reference light, detection light, stray light, +.>The phases of the reference light, the detection light and the stray light are respectively,iplural (i.e. add/drop)>For angular frequency +.>Is time.
Compared with the prior art, the simulation method can obtain the intensity contrast and the accurate position information of the interference detection stripes and the crosstalk stripes, and can perform iterative optimization on the optical design result according to the simulated interference detection stripes and the simulated crosstalk stripe results, and inhibit the influence of the crosstalk stripes on the interference detection, so that the accuracy of the interference detection is improved.
Drawings
FIG. 1 is a schematic diagram of an interference detection light path provided according to an embodiment of the present invention;
FIG. 2 is a flow chart of a simulation method of crosstalk fringes in interference detection according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of simulation results of interference detection fringes and crosstalk fringes provided according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of the final interference result provided in accordance with an embodiment of the present invention.
Reference numerals: interferometer 1, hindle Shell compensator 2, mirror under test 3.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, like modules are denoted by like reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, a detailed description thereof will not be repeated.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limiting the invention.
Fig. 1 shows a structure of an interference detection optical path provided according to an embodiment of the present invention.
As shown in FIG. 1, the interference detection light path provided by the embodiment of the invention comprises an interferometer 1, a Hindle Shell compensator 2 and a mirror to be detected 3, wherein the mirror to be detected 3 is a hyperboloid convex mirror, and the interference detection light path is aimed at the high-precision manufacturing requirement of the hyperboloid convex mirror, so that a Hindle Shell interference detection scheme without a aberration point is designed. In fig. 1, light is emitted from an interferometer, is reflected by the mirror surface of the mirror 3 to be measured after passing through the Hindle Shell compensator 2, is incident to the mirror 3 to be measured after being reflected by the Hindle Shell compensator 2, and finally returns to the interferometer 1 after being reflected by the mirror surface of the mirror 3 to be measured and passing through the Hindle Shell compensator 2.
Taking the aberration-free Hindle Shell detection scheme of interference test as an example, the simulation method provided by the invention is developed and described.
Fig. 2 shows a flow of a simulation method of crosstalk fringes in interference detection according to an embodiment of the present invention.
As shown in fig. 2, the simulation method for crosstalk fringes in interference detection provided by the embodiment of the invention includes the following steps:
s1: and simulating the interference detection light path by using the Lighttools software, and screening out a stray light path which is larger than the intensity power threshold value of 1/10000.
According to the interference detection light path, the light path is simulated by using Lighttools, the light ray tracing parameters are input, more light rays are traced as much as possible, the light ray path of the tracing result is analyzed, an intensity power threshold value of 1/10000 is set according to the interference detection light path, stray light paths larger than the intensity power threshold value of 1/10000 are screened, the stray light paths are considered to have influence on interference detection fringes, and the stray light paths larger than the intensity power threshold value are only simulated by using Zemax software.
S2: and simulating the screened stray light paths one by using a sequence mode of Zemax software, and performing ray tracing on the light paths to obtain coordinate and phase information of the light on the reference surface.
And (5) carrying out simulation one by using the stray light paths screened by the sequence mode of Zemax software. Programming by utilizing macro language (Zemax Programming Language (ZPL)) function in Zemax, tracking light rays on each stray light path according to each piece of surface, setting the px and py values of step length px and py and edge light rays, tracking light rays on each piece of step length, simulating to obtain the total distance of the light rays emitted from the light source, which returns to the coordinates of the reference surface after passing through the set light path (stray light path or detection light path), and obtaining the coordinates and phase information of the light rays on the reference surface.
The simulation can be obtained by Zemax: (1) the optical path from each face to the previous face is obtained, so that the total optical path of the light is obtainedTotal optical distance +.>Substituting into the phase calculation formula to obtain the phase +.>，/>The method comprises the steps of carrying out a first treatment on the surface of the (2) The coordinates of the light reaching the reference surface are obtained.
S3: and simulating amplitude information according to the coordinate information of the light rays in Matlab software, obtaining complex amplitude information of the light rays by combining the phase information, and simulating interference detection stripes and crosstalk stripes according to complex amplitude distribution of reference light, detection light and stray light.
Obtaining coordinate difference between the light rays according to the coordinates of the light rays on the reference surface, obtaining light ray density according to the coordinate difference, using the inverse of the light ray density to represent amplitude, and combining the phases of the light raysCalculating to obtain complex amplitude information of the light rays, thereby obtaining complex amplitude distribution of the reference light, the detection light and the stray light:
；
wherein,complex amplitudes of reference light, detection light, stray light, respectively, +.>Amplitude of reference light, detection light, stray light, +.>The phases of the reference light, the detection light and the stray light are respectively,iplural (i.e. add/drop)>For angular frequency +.>Is time.
The derivation of the multi-path interference formula is as follows:
。
the results of interference detection fringes and crosstalk fringes simulated from the complex amplitude distribution of the reference light, the detection light, and the stray light are shown in fig. 3, where (a) in fig. 3 is the amplitude portion of the interference detection fringes, (b) in fig. 3 is the phase portion of the interference detection fringes, (c) in fig. 3 is the interference detection fringe pattern (minimum maximum normalization processing has been performed), (d) in fig. 3 is the amplitude portion of the crosstalk fringes, (e) in fig. 3 is the phase portion of the crosstalk fringes, and (f) in fig. 4 is the crosstalk fringe pattern.
The final interference result is shown in fig. 4. Because the optical path optimization residual error is small, the interference detection stripe is approximately zero stripe, the bright spot in fig. 4 is the crosstalk stripe caused by stray light, the position is the exact center of the detection stripe, the diameter is 1.39mm, and the intensity is 2.55 times of the detection stripe.
According to the simulated interference detection stripes and crosstalk stripe results, iterative optimization can be performed on the optical design results in the follow-up process, and the influence of the crosstalk stripes on interference detection is restrained, so that the accuracy of interference detection is improved.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present disclosure may be performed in parallel, sequentially, or in a different order, provided that the desired results of the technical solutions of the present disclosure are achieved, and are not limited herein.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (2)
1. A simulation method of crosstalk stripes in interference detection is characterized by comprising the following steps:
s1: simulating an interference detection light path by using Lighttools software, and screening a stray light path which is larger than an intensity power threshold value of 1/10000;
the interference detection light path comprises an interferometer, a Hindle Shell compensator and a mirror to be detected, wherein the mirror to be detected is a hyperboloid convex mirror, the interference detection light path designs a Hindle Shell interference detection method without an image difference point, light rays are emitted from the interferometer, reflected by the mirror surface of the mirror to be detected after passing through the Hindle Shell compensator, then are incident to the mirror to be detected after being reflected by the Hindle Shell compensator, and finally are returned to the interferometer after being reflected by the mirror surface of the mirror to be detected through the Hindle Shell compensator;
s2: simulating the screened stray light paths one by using a sequence mode of Zemax software, and performing ray tracing on the light paths to obtain coordinate and phase information of the light on a reference surface;
programming by utilizing a macro language function of Zemax software, tracking the light rays one by one for each stray light path, tracking the light rays one by one according to a set step length, simulating to obtain the total optical path of the light rays, and calculating to obtain the phase of each light ray according to the total optical path of the light rays; programming by utilizing macro language function of Zemax software, and tracking coordinates of light reaching a reference surface;
s3: in Matlab software, amplitude information is simulated according to the coordinate information of light rays, coordinate differences between the light rays are obtained according to the coordinates of the light rays on a reference plane, the amplitudes are represented by the inverse of the coordinate differences, complex amplitude information of the light rays is obtained by combining phase information, and simulation of interference detection fringes and crosstalk fringes is carried out according to the complex amplitude distribution of reference light, detection light and stray light.
2. The simulation method of crosstalk fringes in interference detection according to claim 1, wherein complex amplitude distributions of reference light, detection light and each beam of stray light are as follows:
；
wherein,complex amplitudes of reference light, detection light, stray light, respectively, +.>Amplitude of reference light, detection light, stray light, +.>The phases of the reference light, the detection light and the stray light are respectively,iplural (i.e. add/drop)>For angular frequency +.>Is time.
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| WO2010010121A1 (en) * | 2008-07-22 | 2010-01-28 | Centre National De La Recherche Scientifique (Cnrs) | Method for reducing interference and crosstalk in double optical tweezers using a single laser source, and apparatus using the same |
| JP2012117858A (en) * | 2010-11-30 | 2012-06-21 | Toray Eng Co Ltd | Crosstalk correction coefficient calculation method, crosstalk correction coefficient calculation device, and three-dimensional surface shape measuring device using the same |
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| CN108061514A (en) * | 2016-11-07 | 2018-05-22 | 南京理工大学 | It is a kind of that aspherical dynamic modelling method is detected using axial scan optical interferometry |
| CN113865480A (en) * | 2021-09-18 | 2021-12-31 | 桂林电子科技大学 | Heterodyne grating interferometer reading head system signal analysis method based on ZEMAX simulation |
| CN114322834A (en) * | 2021-12-29 | 2022-04-12 | 杭州晶耐科光电技术有限公司 | Free-form surface zero interference detection device and design method of computer generated hologram |
| CN114972083A (en) * | 2022-05-12 | 2022-08-30 | 浙江大学 | Image restoration method based on measured data under complex optical imaging condition |
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- 2023-12-06 CN CN202311659260.5A patent/CN117369126B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010010121A1 (en) * | 2008-07-22 | 2010-01-28 | Centre National De La Recherche Scientifique (Cnrs) | Method for reducing interference and crosstalk in double optical tweezers using a single laser source, and apparatus using the same |
| JP2012117858A (en) * | 2010-11-30 | 2012-06-21 | Toray Eng Co Ltd | Crosstalk correction coefficient calculation method, crosstalk correction coefficient calculation device, and three-dimensional surface shape measuring device using the same |
| CN106289107A (en) * | 2016-09-29 | 2017-01-04 | 西安交通大学 | A kind of LC SLM error compensating method and aspheric surface face type detection method thereof |
| CN108061514A (en) * | 2016-11-07 | 2018-05-22 | 南京理工大学 | It is a kind of that aspherical dynamic modelling method is detected using axial scan optical interferometry |
| CN113865480A (en) * | 2021-09-18 | 2021-12-31 | 桂林电子科技大学 | Heterodyne grating interferometer reading head system signal analysis method based on ZEMAX simulation |
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| CN114972083A (en) * | 2022-05-12 | 2022-08-30 | 浙江大学 | Image restoration method based on measured data under complex optical imaging condition |
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