CN117367396A - Detection phase shift suppression system for small-frequency-difference MEMS gyroscope - Google Patents
Detection phase shift suppression system for small-frequency-difference MEMS gyroscope Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
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Abstract
The invention discloses a small-frequency-difference MEMS gyroscope detection phase shift suppression system which consists of an MEMS gyroscope, a driving loop, an angular velocity demodulation module and a parameter suppression loop. The invention focuses on the electrostatic correction of the amplitude-phase frequency response of the detection resonator by applying a parameter suppression signal to the detection resonator, suppressing the detection phase shift in a small frequency difference mode and improving the shock resistance characteristic of the detection resonator. The detection resonant loop is embedded in the parameter suppression loop, so that the detection resonator generates stable-amplitude self-oscillation, a band-pass phase shifter is used for generating a parameter suppression signal twice the detection frequency from the detection amplitude multiplier, the phase shift 90 degrees meet parameter suppression phase conditions and then act on a parameter suppression electrode, the detection phase shift is suppressed, the amplitude of a resonance peak at the detection natural frequency is suppressed, and the shock resistance is improved while the mechanical sensitivity of the MEMS gyroscope is not lost.
Description
Technical Field
The invention belongs to the technical field of micro-electromechanical systems and micro-inertial measurement, and particularly relates to a small-frequency-difference MEMS gyroscope detection phase shift suppression system.
Background
The MEMS gyroscope is an angular velocity sensor processed by using an MEMS technology based on the Gong's principle, has the characteristics of small volume, light weight, low cost, low power consumption and mass production, is widely applied to the fields of consumer electronics, smart cities, industrial control, aerospace and the like, and has a huge market prospect of 0.1-1 DEG/h zero bias stability. Reducing the frequency difference is an effective means for improving the mechanical sensitivity, but detecting the phase shift of the resonator under a small frequency difference is not ideal, so that quadrature leakage is caused, zero noise is deteriorated, and the improvement of the precision of the MEMS gyroscope is restricted.
The MEMS gyroscope is limited by the technical level, has machining errors such as irregular comb teeth, asymmetric supporting beams and the like, generates orthogonal coupling errors, forms 90 DEG phase with useful signals, can reach 10-1000 DEG/s, and is easy to be interfered by environmental temperature. Currently, the measuring range of the MEMS gyroscope is about +/-400 degrees/s, the existence of the quadrature coupling error seriously affects the measuring range and zero output of the gyroscope, and effective means must be adopted for correction. Phase-sensitive demodulation is a common means of suppressing quadrature errors, which uses the phase relationship of the quadrature error and the useful signal to filter out the quadrature signal, but needs to ensure the strict phase relationship of the driving mode and the detection mode. Under the condition of 100Hz frequency difference, the driving mode and the detecting mode of the modal separation MEMS gyroscope can have about 0.5-degree phase error, the quadrature residual quantity in the zero signal can reach dps magnitude, and meanwhile, the modal separation MEMS gyroscope is sensitive to temperature change, so that zero noise is deteriorated, and the accuracy of the gyroscope is influenced. In addition, methods such as force feedback correction and quadrature coupled stiffness correction are commonly used quadrature correction techniques to effectively cancel quadrature errors through corrective electrodes and auxiliary closed loop circuits. But the system is complex, the power consumption is high, the noise interference is obvious, and the further improvement of the precision of the MEMS gyroscope is restricted. Therefore, a simple and efficient small-frequency-difference MEMS gyroscope detection phase shift suppression technology is needed, and the method has important significance for reducing quadrature residual quantity and improving MEMS gyroscope precision.
The detection phase shift can be restrained by improving the detection Q value, but when the detection Q value of the MEMS gyroscope reaches tens of thousands, the detection axis can resonate due to external impact input, the detection axis is difficult to restrain by a circuit filter in a small frequency difference mode, the recovery time can reach more than 1s, and the normal use of the MEMS gyroscope is greatly influenced. Therefore, a technique for reducing the detection Q value of the MEMS gyroscope is required to improve its impact resistance; at the same time, it is necessary to ensure that the detection phase shift is not increased so as to ensure the low quadrature leakage characteristic of the MEMS gyroscope.
Disclosure of Invention
The invention aims to provide a small-frequency-difference MEMS gyroscope detection phase shift suppression system, which is used for performing electrostatic correction on amplitude-phase frequency response of a detection resonator by applying a parameter suppression signal to the detection resonator, suppressing detection phase shift in a small-frequency-difference mode and improving shock resistance.
The technical solution for realizing the purpose of the invention is as follows:
a small frequency difference MEMS gyroscope detection phase shift suppression system, comprising:
a driving loop for converting a pair of differential driving displacement current signals output by the MEMS gyroscope into a first voltage signal V DS And generates a driving signal to act on the driving comb teeth to maintain the working frequency of the MEMS gyroscope driving mode to be the driving frequency omega d Is fixed in amplitude and oscillating;
the parameter suppression loop is used for generating a parameter suppression signal to act on the parameter suppression comb teeth;
a detection resonance loop embedded in the parameter suppression loop for converting a pair of differential detection displacement current signals output by the MEMS gyroscope into a second voltage signal V S And generating a detection driving signal to maintain the working frequency of the MEMS gyroscope detection mode to be the detection frequency omega s Is fixed in amplitude and oscillating;
the angular velocity demodulation module is used for extracting the input angular velocity information of the MEMS gyroscope from the detection mode;
compared with the prior art, the invention has the remarkable advantages that:
(1) Aiming at the problem that the detection phase shift of the MEMS gyroscope with small frequency difference is not ideal, by applying a restraining signal with twice the detection frequency to the detection mode of the MEMS gyroscope, the interval of the detection phase response curve which is kept at 0 DEG before the detection frequency is longer, the frequency interval of the detection phase shift of the MEMS gyroscope at 0 DEG is widened, and the detection phase shift is restrained while the original angular velocity detection function of the MEMS gyroscope is not influenced.
(2) The method has the additional effect of inhibiting the detection resonance peak while carrying out detection phase shift correction, does not influence the amplitude response of the detection mode at the driving frequency, and achieves the effects of reducing the detection Q value and improving the shock resistance of the MEMS gyroscope;
(3) Aiming at the link how to generate the parameter suppression signal, the voltage-controlled oscillator and the phase synchronization link are omitted, the parameter suppression signal is directly generated from the detection resonant loop, the operation is simple, and the implementation is easy;
(4) And an ADC and a DAC are not needed, so that the method is simple and convenient to realize.
Drawings
FIG. 1 is a schematic diagram of a small frequency difference MEMS gyroscope detection phase shift suppression system;
FIG. 2 is a schematic diagram of the components of the interface circuit portion of the present invention;
FIG. 3 is a diagram of an example MEMS gyroscope used;
FIG. 4 is a graph of the phase of the suppression signal versus the detected amplitude response gain;
FIG. 5 is a graph of detected amplitude response gain versus frequency difference for an example MEMS gyroscope;
FIG. 6 is a graph of detected phase shift as a function of frequency difference for an example MEMS gyroscope.
Detailed Description
The invention is further described with reference to the drawings and specific embodiments.
The MEMS gyroscope 2 for which the invention is aimed consists of a driving detection comb tooth 2A, a mass block 2B, a detection driving comb tooth 2C, a detection comb tooth 2D, a parameter inhibition comb tooth 2E and a driving comb tooth 2F; the drive detection comb teeth 2A are used for outputting a pair of differential drive displacement current signals i of the MEMS gyroscope ds A (+); the potential of the mass block 2B is input by the external DC bias voltage V M Determining; the detection driving comb teeth 2C are used for receiving detection mode driving voltage signals V input from the outside SD Enabling a detection mode of the MEMS gyroscope to generate motion; detecting comb teeth 2D for outputting MEMS gyroscopeA pair of differential detection displacement current signals i of screw instrument s A (+); the parameter suppression comb teeth 2E are of variable-spacing comb tooth structures and are used for receiving a double-frequency parameter suppression signal V generated by a parameter suppression loop P The phase shift detection and the phase shift detection reach the parameter inhibition effect after the displacement modulation is detected, and the phase shift detection are carried out; the driving comb teeth 2F are used for receiving a driving voltage signal V input from the outside D And (3) the driving mode of the MEMS gyroscope is enabled to generate motion.
Referring to fig. 1, the small-frequency-difference MEMS gyroscope detection phase shift suppression system of the invention is composed of a driving loop 1, an angular velocity demodulation module 3 and a parameter suppression loop 4.
The driving loop 1 consists of a driving interface circuit 1A and an amplitude control circuit 1B; the driving interface circuit 1A is used for driving the MEMS gyroscope 2 to detect a pair of differential driving displacement current signals i of the comb teeth ds After being amplified into voltage signals, the voltage signals are subjected to differential processing, and one path of voltage signals V are output DS The method comprises the steps of carrying out a first treatment on the surface of the The amplitude control circuit 1B is used for controlling V DS The amplitude of the signal is kept at a specific value, and 90 DEG phase shift is carried out to meet the phase condition of the self-oscillation loop, so as to generate a driving signal V D The +/-acts on the driving comb teeth 2F to enable the driving mode of the MEMS gyroscope to maintain stable amplitude oscillation motion, and the working frequency of the MEMS gyroscope is the driving frequency omega d 。
The parameter suppression loop 4 consists of an embedded detection resonance loop 4A and a band-pass phase shifter 4B; the detection resonant loop 4A consists of a detection interface circuit 4Aa, a detection drive multiplier 4Ab, a detection amplitude multiplier 4Ac, a PI module 4Ad and a low-pass filter 4 Ae; the detection interface circuit 4Aa is configured to output a pair of differential detection displacement current signals i from the MEMS gyroscope 2 s Amplifying into voltage signals, performing differential processing, performing 90-degree phase shift to meet the phase condition of the self-oscillation loop, and outputting a voltage signal V S The method comprises the steps of carrying out a first treatment on the surface of the The detection amplitude multiplier 4Ac is used to multiply V S Self-multiplying the signals; the low pass filter 4Ae is used for extracting V S Amplitude information of the signal; reference DC voltage V ref The output of the low pass filter is subtracted and input into a PI module 4Ad, the output of which is equal to V S The signal passes through the detection drive multiplier 4Ab to generate a detection drive signal V SD For maintaining the operating frequency of the detection mode of the MEMS gyroscope 2 at the detection frequency omega s By setting a reference DC voltage V ref The resonance amplitude is far greater than the detection amplitude generated by the input angular velocity; the band-pass phase shifter 4B has an adjustable filter gain, and is configured to generate a parameter suppression signal twice the detection frequency from the detection amplitude multiplier 4Ac, and apply the phase shifted 90 ° to the parameter suppression comb teeth 2E of the detection resonator after the phase shift meets the parameter suppression phase condition.
The angular velocity demodulation module 3 consists of a low-pass filter 3A and a multiplier 3B; multiplier 3B is used to divide V S And V is equal to DS Multiplying; the low-pass filter 3A is used for extracting V S And V is equal to DS The dc component resulting from multiplication, i.e. from V S Amplitude information of the driving frequency component is extracted, so that the aim of acquiring input angular velocity information of the MEMS gyroscope is fulfilled.
Referring to fig. 2, the driving interface circuit 1A is composed of a group-crossing amplifier 5 and a differential amplifier 6; the transimpedance amplifier 5 will input i ds Amplifying the + -current signal into a voltage signal; the differential amplifier 6 performs differential processing on the two voltage signals to suppress common mode interference and outputs a voltage signal V DS 。
The detection interface circuit 4Aa consists of a group-crossing amplifier 7, a differential amplifier 8 and a band-pass phase shifter 9; the transimpedance amplifier 7 will input i s Amplifying the + -current signal into a voltage signal; the differential amplifier 8 carries out differential processing on the two paths of voltage signals to inhibit common-mode interference; the band-pass phase shifter 9 is mainly used for 90-degree phase shifting to meet the loop phase condition of self-oscillation, enables the phase shift at the working frequency to be 90 degrees through reasonable parameters, further inhibits low-frequency interference signals and outputs a voltage signal V S 。
With reference to FIG. 3, an example MEMS resonator used in the present invention has a detection mode natural frequency ω s The detection mass is m s Damping of b s Rigidity of k s All comb teeth have a DC potential difference of V M Detecting the driving voltage as V SD ＝V sd cos(ωt)，V sd To detect the amplitude of the driving voltage, ω is the detection drivingThe frequency of the voltage, t is time; the parameter restraining voltage is V P ＝V p cos(2ωt+Φ)，V p The phase is the phase of the parameter restraining voltage; defining the upward motion y of the detection displacement as positive, and the motion equation is
Wherein K is p For excitation coefficient, K sd To detect the drive factor. Let the expression of the detection displacement be
y＝y i cos(ωt+θ i ) (2)
Wherein y is i To detect the displacement amplitude, θ i To detect phase shift. The cosine square term is converted into a frequency multiplication term, integrated sum-difference conversion is carried out, and the high-frequency component is filtered out to obtain
For ease of analysis, record
Q in the above s To detect the initial figure of merit omega s To detect modal natural frequencies. The amplitude response and the phase response are respectively
To exclude the frequency difference Δf= (ω - ω) s ) Amplitude response change caused by/2 pi reduction, and only direct current voltage is considered to exist on the parameter inhibition comb teeth 2DI.e. a and C are unchanged, b=0, the amplitude response gain due to the suppression voltage is
When ω=ω s At the time, the equivalent quality factor Q of the detection mode p Is that
An example of a MEMS gyroscope of the type used in connection with FIG. 4, having an amplitude response gain G i Along with the change relation of the phase phi of the restraining voltage, the parameter restraining effect can be realized at 90 degrees.
In connection with FIG. 5, an example of the amplitude response gain G of the present invention i The variation relation of the frequency difference has the effect of parameter inhibition at the position of delta f=0, and the equivalent quality factor Q p The smaller the detection resonance peak, the more obvious the inhibition effect is, and the maximum inhibition can be about 50%.
In connection with FIG. 6, an example of the present invention is shown that detects a phase shift θ i Variation relation with frequency difference, equivalent quality factor Q p The smaller the detection phase shift is, the more the detection phase shift changes in the vicinity of the detection frequency, and the longer the detection phase shift interval is before the detection frequency, so that the purpose of correcting the detection phase shift of the MEMS gyroscope is achieved.
Claims (6)
1. A small frequency difference MEMS gyroscope detection phase shift suppression system, comprising:
a driving loop for converting a pair of differential driving displacement current signals output by the MEMS gyroscope into a first voltage signal V DS And generates a driving signal to act on the driving comb teeth to maintain the working frequency of the MEMS gyroscope driving mode to be the driving frequency omega d Is fixed in amplitude and oscillating;
the parameter suppression loop is used for generating a parameter suppression signal to act on the parameter suppression comb teeth;
a detection resonance loop embedded in the parameter suppression loop for electrically detecting a pair of differential detection displacements outputted by the MEMS gyroscopeConversion of the flow signal into a second voltage signal V S And generating a detection driving signal to maintain the working frequency of the MEMS gyroscope detection mode to be the detection frequency omega s Is fixed in amplitude and oscillating;
and the angular velocity demodulation module is used for extracting the input angular velocity information of the MEMS gyroscope from the detection mode.
2. The small frequency differential MEMS gyroscope detection phase shift suppression system of claim 1, wherein the drive loop comprises:
a drive interface circuit for outputting a pair of differential drive displacement current signals i from the MEMS gyroscope ds After being amplified into voltage signals, the voltage signals are subjected to differential processing, and a path of first voltage signals V are output DS ；
An amplitude control circuit for controlling the first voltage signal V DS And 90 deg. phase shift to meet the phase condition of self-oscillating loop, and to produce driving signal to act on the driving comb teeth.
3. The small frequency differential MEMS gyroscope detection phase shift suppression system of claim 1, wherein the parametric suppression loop comprises:
a detection interface circuit for outputting a pair of differential detection displacement current signals i from the MEMS gyroscope s Amplifying into voltage signal, differential processing, 90 deg. phase shifting to meet self-oscillation loop phase condition, outputting second voltage signal V S ；
A detection amplitude multiplier for multiplying the second voltage signal V S Self-multiplying;
a low-pass filter for extracting the second voltage signal V S Amplitude information of (a);
the PI module is used for subtracting the output of the low-pass filter from the reference direct-current voltage;
a detection drive multiplier for outputting the PI module and the second voltage signal V S Multiplication generates a detection drive signal V SD For maintaining the operating frequency of the MEMS gyroscope detection mode at the detection frequency omega s Is fixed in amplitude and oscillating;
and the band-pass phase shifter is used for generating a parameter suppression signal twice the detection frequency from the detection amplitude multiplier, and the phase-shifted 90 DEG phase-shifted parameter suppression comb teeth act on the detection resonator after meeting parameter suppression phase conditions.
4. The small frequency differential MEMS gyroscope detection phase shift suppression system of claim 1, wherein the angular velocity demodulation module comprises:
multiplier for multiplying the second voltage signal V S And a first voltage signal V DS Multiplying;
a low-pass filter for extracting the second voltage signal V S And a first voltage signal V DS The dc component resulting from multiplication, i.e. from the second voltage signal V S Amplitude information of the driving frequency component is extracted to obtain input angular velocity information of the MEMS gyroscope.
5. The small frequency differential MEMS gyroscope detection phase shift suppression system of claim 2, wherein the drive interface circuit comprises:
a transimpedance amplifier for amplifying an input current signal into a voltage signal;
a differential amplifier for performing differential processing on the two voltage signals to suppress common mode interference and outputting a first voltage signal V DS 。
6. The small frequency differential MEMS gyroscope detection phase shift suppression system of claim 3, wherein the detection interface circuit comprises:
a transimpedance amplifier for amplifying an input current signal into a voltage signal;
the differential amplifier is used for carrying out differential processing on the two paths of voltage signals and inhibiting common-mode interference;
the band-pass phase shifter is used for 90-degree phase shifting to meet the loop phase condition of self-oscillation and output a path of second voltage signal V S 。
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