CN117335204A - Connector and coating equipment - Google Patents

Abstract

The application relates to a connector and coating equipment for with coating equipment's heating device cooperation, the connector includes: a first splice; the second splice piece is detachably connected with the first splice piece, at least one of the first splice piece and the second splice piece is provided with a splice groove, after the first splice piece is connected with the second splice piece, the splice groove is formed into a wiring hole, and the wiring harness penetrates through the wiring hole. When needing to fix the pencil, can be earlier with first splice and second splice mutually separating to make the splice groove be in open state, the pencil can be very light from the open entering splice inslot of splice groove, later link to each other first splice and second splice, splice groove and first splice concatenation formation wiring hole this moment, and the pencil that is located the splice inslot is located the wiring hole directly, need not to spend a large amount of time and is used for passing the wiring hole with the pencil.

Description

Connector and coating equipment

Technical Field

The present application relates to the field of semiconductor technology, and in particular, to a connector and a plating apparatus.

Background

In the existing semiconductor film plating equipment, a wafer is arranged on a heating element in a reaction cavity, so that the wafer is heated by the heating element, the wafer reacts with process gas in the reaction cavity, and finally a film is deposited on the surface of the wafer. The heating piece is not only used for heating the wafer, but also provided with various sensors, such as a thermometer and the like, so as to detect various indexes of the wafer in the reaction process, thereby ensuring that the wafer can react normally.

For this purpose, a large number of power supply lines are usually connected to the heating element below in order to supply power to the heating element or to transmit data from the individual sensors, and for this purpose, connectors are required on the coating device for integrating all the power supply lines, via which the heating element is electrically connected to the power supply lines. In the process of connecting the power wire harness into the connector, the power wire harness is required to pass through the wiring hole of the connector manually, so that the power wire harness is electrically connected with the connector, but the diameter of the wiring hole is usually smaller, so that a great deal of time is required to pass the wire harness through the wiring hole when the coating equipment is installed, the installation difficulty is increased, and the wire harness is inconvenient to replace and maintain in the later period.

Disclosure of Invention

Based on this, it is necessary to provide a connector and a plating apparatus for the problem that it takes a lot of time to pass the wire harness through the wire hole when the plating apparatus is mounted.

A connector for mating with a heating device of a coating apparatus, the connector comprising:

a first splice; and

the second splice piece, with but first splice piece detachable ground is connected, first splice piece with at least one of second splice piece is provided with the splice groove, works as first splice piece with after the second splice piece links to each other, the splice groove forms the wiring hole, heating device's pencil wears to locate the wiring hole.

In one embodiment, the first splicing element and the second splicing element are provided with splicing grooves, and when the second splicing element is connected with the first splicing element, the two splicing grooves are spliced to form a wiring hole.

In one embodiment, the connector includes a plurality of second splice members, the plurality of second splice members are disposed along a circumferential direction of the first splice member, and each of the second splice members is capable of being spliced with the first splice member to form a wiring hole.

In one embodiment, the connector includes two second splicing elements, and the two second splicing elements are respectively disposed on two opposite sides of the first splicing element;

the connector further comprises fixing blocks which are respectively connected with the same sides of the two second splicing pieces.

In one embodiment, the second splice further includes a wire slot, and when the second splice is connected to the first splice, the wire slot is in communication with the wire hole.

In one embodiment, the connector further comprises a wire block mounted in the wire slot.

In one embodiment, at least two splicing grooves are formed in one of the first splicing piece and the second splicing piece, and after the first splicing piece and the second splicing piece are spliced, at least one wiring hole and at least one pin hole are formed;

the connector further comprises a base and a bolt, wherein the base is provided with a bolt hole, and the bolt penetrates through the bolt hole and the bolt hole.

In one embodiment, the base is provided with a fixing hole, and the first splicing piece and the second splicing piece are both inserted into the fixing hole.

In one embodiment, the base is provided with a penetrating hole in a penetrating manner, the first splicing piece is provided with a temperature measuring hole in a penetrating manner, and the temperature measuring hole is communicated with the penetrating hole;

the heating device further comprises a temperature measuring piece, and the temperature measuring piece is arranged in the through hole and the temperature measuring hole in a penetrating mode.

In one embodiment, the base is further provided with a wire inlet hole, the wire inlet hole penetrates through the fixing hole, and the wire harness penetrates through the wire inlet hole.

In one embodiment, the connector further includes a third splice and a fourth splice, the third splice being disposed on the base, the fourth splice being detachably connected to the third splice;

one of the third splicing piece and the fourth splicing piece is provided with a wire inlet groove, the other one of the third splicing piece and the fourth splicing piece is spliced with the wire inlet groove to form a connecting hole, and the connecting hole is communicated with the wire inlet hole.

In one embodiment, the connector further comprises a socket and a binding post, the socket comprises a jack, one end of the binding post penetrates through the jack, the other end of the binding post penetrates through the wiring hole, and the binding post is electrically connected with the wire harness in the wiring hole.

In one embodiment, the socket is provided with a through groove, the first splicing member is provided with a temperature measuring hole, and the temperature measuring hole is communicated with the through groove.

A coating apparatus comprising a heating device and a connector as claimed in any one of the preceding claims.

Above-mentioned connector, when the installation pencil, earlier with first splice and second splice mutually separate the back for the splice groove is in open state, the pencil can be very light from the open entering splice inslot of splice groove, later link to each other first splice and second splice, splice groove and first splice concatenation piece concatenation formation wiring hole this moment, and the pencil that is located the splice inslot is located the wiring hole directly, need not to spend a large amount of time and be used for passing the wiring hole with the pencil, even need change or maintain the pencil, also only need separate first splice and second splice, can take off the pencil from the connector, the change and the maintenance of pencil have been made things convenient for greatly. The problem that the wire harness cannot pass smoothly due to high self rigidity of the wire harness when the wire harness is threaded is effectively solved, meanwhile, the problem that the wire harness is not easy to bend and is high in assembly difficulty due to high rigidity of the wire harness in the assembly process of the coating equipment is solved, and insulating parts in the wire harness are extremely easy to damage, so that the design structure is optimized, and the assembly difficulty is reduced.

Drawings

Fig. 1 is a schematic structural view of a heating device and a connector according to some embodiments of the present application.

Fig. 2 is a schematic structural diagram of the connector in the embodiment of fig. 1.

Fig. 3 is a schematic structural view of the base in the embodiment of fig. 2.

Fig. 4 is a schematic structural view of the base in another view of the embodiment of fig. 2.

Reference numerals illustrate:

a connector 100; a wire harness 110; a temperature measuring member 120; a heating member 130;

a first splice 10; splice grooves 11; a fixed block 12; pin holes 13; a temperature measuring hole 14; a mounting hole 15;

a second splice 20; a wiring hole 21; a wiring groove 22; a wire pressing block 23; a threaded hole 24; a boss 25;

a base 30; a fixed space 31; a plug 32; a penetration hole 33; a wire inlet hole 34; a wire groove 35; bolt holes 36;

a third splice 40; a fourth splice 41; a wire inlet slot 42; a connection hole 43;

a socket 50; a post 51; avoidance groove 52; a receptacle 53.

Detailed Description

In order to make the above objects, features and advantages of the present application more comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. This application is, however, susceptible of embodiment in many other forms than those described herein and similar modifications can be made by those skilled in the art without departing from the spirit of the application, and therefore the application is not to be limited to the specific embodiments disclosed below.

In the description of the present application, it should be understood that, if there are terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., these terms refer to the orientation or positional relationship based on the drawings, which are merely for convenience of description and simplification of description, and do not indicate or imply that the apparatus or element referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present application.

Furthermore, the terms "first," "second," and the like, if any, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the terms "plurality" and "a plurality" if any, mean at least two, such as two, three, etc., unless specifically defined otherwise.

In this application, unless explicitly stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly. For example, the two parts can be fixedly connected, detachably connected or integrated; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.

In this application, unless expressly stated or limited otherwise, the meaning of a first feature being "on" or "off" a second feature, and the like, is that the first and second features are either in direct contact or in indirect contact through an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that if an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. If an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein, if any, are for descriptive purposes only and do not represent a unique embodiment.

Referring to fig. 1 and fig. 2, the coating apparatus provided in an embodiment of the present application includes a heating device and a connector 100, where the heating device includes a heating element 130 and a wire harness 110 connected to the heating element 130, so as to connect the heating element 130 with a power supply and a control board of the coating apparatus through the wire harness 110, thereby supplying power to the heating element 130, and meanwhile, transmitting data of various sensors disposed on the heating element 130 to the control board through the wire harness 110, so as to detect various indexes of a wafer in a reaction process through various sensors, thereby ensuring that the wafer can react normally.

The connector 100 is fixed on a rack of the coating apparatus for being matched with a heating device of the coating apparatus, wherein the matching means that the connector 100 can play different roles on the heating device according to actual use requirements, for example, the connector 100 can be used as a socket of the heating device or can be used as a supporting component for fixing the heating device. Wherein, through connector 100 can also avoid harness 110 to produce the removal in the coating equipment course of working, cause trouble such as short circuit to influence the normal operating of coating equipment. Wherein, the connector 100 includes a first splicing element 10 and a second splicing element 20, the second splicing element 20 is detachably connected with the first splicing element 10, and a splicing groove 11 is provided on the second splicing element 20, when the first splicing element 10 and the second splicing element 20 are connected, the splicing groove 11 can be spliced with the first splicing element 10 to form a wiring hole 21, and the wire harness 110 is arranged in the wiring hole 21 in a penetrating manner.

In actual use, when the wire harness 110 is installed, the first splicing element 10 and the second splicing element 20 are separated from each other, so that the splicing groove 11 is in an open state, the wire harness 110 can conveniently enter the splicing groove 11, then the first splicing element 10 and the second splicing element 20 are connected, at the moment, the splicing groove 11 and the first splicing element 10 are combined to form the wiring hole 21, the wire harness 110 positioned in the splicing groove 11 is directly positioned in the wiring hole 21, a great deal of time is not required to be spent for penetrating the wire harness 110 through the wiring hole 21, and even if the wire harness 110 needs to be replaced or maintained, the wire harness 110 can be removed from the connector 100 only by separating the first splicing element 10 and the second splicing element 20, and the replacement and the maintenance of the wire harness 110 are greatly facilitated. The problem that the wire harness 100 cannot pass smoothly due to the fact that the wire harness 100 is high in rigidity when the wire harness 100 is threaded is effectively solved, meanwhile, the problem that insulating parts in the wire harness 100 are extremely easy to damage due to the fact that the wire harness 100 is high in rigidity and difficult to bend in the assembly process of coating equipment is solved, the design structure is optimized, and the assembly difficulty is reduced.

It should be noted that, in other embodiments, the first splicing element 10 may be provided with the splicing groove 11, and the splicing groove 11 and the second splicing element 20 may be spliced to form the wiring hole 21 when the first splicing element 10 and the second splicing element 20 are connected. In still other embodiments, the first splicing element 10 and the second splicing element 20 may be provided with splicing grooves 11, as shown in the embodiment of fig. 2, so that when the second splicing element 20 is connected to the first splicing element 10, the two splicing grooves 11 can be spliced with each other to form the wiring hole 21. In this way, the first splicing member 10 and the second splicing member 20 are separated from each other, and the wire harness 110 can be put into either one of the two wire connection holes 21, effectively improving the flexibility of the coil put into the connector 100.

In some embodiments of the present application, the connector 100 includes a plurality of second splice members 20, where the plurality of second splice members 20 are disposed along a circumference of the first splice member 10, and each second splice member 20 is capable of being spliced with the first splice member 10 to form a wiring hole 21, so that the first splice member 10 and the plurality of second splice members 20 are capable of being spliced to form a plurality of wiring holes 21. Wherein, the wire harness 110 includes a plurality of power wires, each of which is penetrated through at least one wire connection hole 21 to accommodate and fix the plurality of power wires through the plurality of wire connection holes 21.

In some embodiments, in order to cooperate with the second splice pieces 20, a plurality of splice grooves 11 are provided at circumferential intervals in the first splice piece 10, each second splice piece 20 is provided with a splice groove 11, and the splice groove 11 on each second splice piece 20 corresponds to one of the splice grooves 11 on the first splice piece 10, and when the second splice piece 20 is spliced with the first splice piece 10, the splice grooves 11 on the second splice piece 20 and the corresponding splice grooves 11 on the first splice piece 10 are spliced with each other to form the wiring hole 21.

In particular, in the embodiment of fig. 2, the connector 100 includes two second splicing elements 20, the two second splicing elements 20 are respectively disposed on two opposite sides of the first splicing element 10, the connector 100 further includes a fixing block 12, and the fixing block 12 is respectively connected to the same side of the two second splicing elements 20, so that the two second splicing elements 20 are connected through the fixing block 12, and the first splicing element 10 is fixed between the two second splicing elements 20, so that the first splicing element 10 and the two second splicing elements 20 form a whole, so that the formed whole is fixed and mounted on a rack of the coating apparatus.

Optionally, the connector 100 further includes a bolt, the second splicing element 20 is provided with a threaded hole 24, the fixing block 12 is provided with a mounting hole 15, and the bolt is threaded through the mounting hole 15 and the threaded hole 24, so as to connect the fixing block 12 with the second splicing element 20.

In the embodiment of the application, since the wire harness 110 includes a plurality of power wires, different power wires need to be arranged in different wiring holes 21 in a penetrating manner, some power wires are close to the corresponding wiring holes 21 and can directly penetrate, and other power wires are far away from the corresponding wiring holes 21, so that the power wires of the part are exposed outside. For this purpose, the second splicing element 20 is provided with a wiring groove 22, and when the second splicing element 20 is connected with the first splicing element 10, the wiring groove 22 is connected with the wiring hole 21.

In the embodiment of fig. 2, the wire harness 110 includes four power wires, wherein two power wires directly penetrate through two wiring holes 21 near the fixed block 12, and the other two power wires enter into two wiring holes 21 far away from the fixed block 12 after passing through the wiring grooves 22 of two second splicing members 20 respectively, so that the parts of the power wires are stored and arranged through the wiring grooves 22, and the power wires are prevented from being exposed.

In some embodiments, if the wire harness 110 is directly located in the wire slot 22, the wire slot 22 has less constraint on the wire harness 110, and the wire harness 110 is easy to displace in the wire slot 22 when in use, so that the wire harness 110 is easy to fall off from the wire slot 22, for this reason, the connector 100 further includes a wire pressing block 23, and the wire pressing block 23 is installed in the wire slot 22 to fix the wire harness 110 in the wire slot 22 through the wire pressing block 23, so as to avoid the wire harness 110 falling off from the wire slot 22.

In some embodiments of the present application, referring to fig. 2, 3 and 4, in order to facilitate installation of the first splicing element 10 and the second splicing element 20, the connector 100 further includes a base 30, a fixing space 31 is concavely formed on a surface of the base 30, and the first splicing element 10 and the second splicing element 20 are inserted into the fixing space 31, that is, the fixing space 31 is used for fixing the first splicing element 10 and the second splicing element 20. The wire pressing block 23 is also located in the fixed space 31, so that the wire pressing block 23 is limited by the inner wall of the fixed space 31, and the wire pressing block 23 is prevented from falling off from the wire groove 22. Note that, the pressing blocks 23 may be located entirely in the fixing space 31, or may be located only at the bottom in the fixing space 31, which is not limited herein.

In some embodiments, one of the first and second splice pieces 10, 20 is provided with at least two splice grooves 11, and the other splice piece can be spliced with a part of the splice grooves 11 therein to form a wire connection hole 21, and spliced with the other part of the splice grooves 11 to form a pin hole 13. Thus, after the first splicing element 10 and the second splicing element 20 are spliced, at least one wiring hole 21 and at least one pin hole 13 can be formed, the pin hole 13 is formed in the same mode as the wiring hole 21, and one splicing groove 11 can be spliced with the first splicing element 10 or the second splicing element 20, or two splicing grooves 11 can be spliced.

In the embodiment of fig. 2, the connector 100 includes two second splicing elements 20, the two second splicing elements 20 are respectively disposed on two opposite sides of the first splicing element 10, three splicing grooves 11 are formed on the side surface of each second splicing element 20 abutted against the first splicing element 10, and three splicing grooves 11 are also formed on the side surface of each first splicing element 10 abutted against each second splicing element 20, so that after the first splicing element 20 is spliced with the first splicing elements 10 on two sides, two wiring holes 21 and one pin hole 13 can be formed on one side of the first splicing element 10, and the pin hole 13 is located between the two wiring holes 21.

The connector 100 further includes two pins 32, two pin holes 36 are formed in the base 30, and each pin 32 is disposed through one of the pin holes 36 and one of the pin holes 13, so that the installation of the first splicing element 10 and the second splicing element 20 is limited and fixed by the pins 32. Specifically, taking the connector 100 in the embodiment of fig. 2 as an example, after the first splicing element 10, the second splicing element 20, and the fixing block 12 are mutually spliced to form a whole, the spliced whole is mounted on the base 30, and then the bolt 32 passes through the bolt hole 36 and the bolt hole 13, so that the components such as the first splicing element 10 and the second splicing element 20 are fixed and limited on the base 30 by the bolt. Further, the pin 32 can also be used to connect with other components in the connector 100, such as a socket 50 described below, where one end of the pin 32 passes through the pin hole 36 and the pin 32, and then is screwed with the socket 50, and the other end can be fixed on the base by a nut or the like, so that the pin 32 has a fixing and limiting function on the socket 50.

In some embodiments, the base 30 is provided with a through hole 33, the first splicing element 10 is provided with a temperature measuring hole 14, and the temperature measuring hole 14 is communicated with the through hole 33. The heating device further comprises a temperature measuring piece 120, wherein the temperature measuring piece 120 is arranged in the penetrating hole 33 and the temperature measuring hole 14 in a penetrating mode, so that one end of the temperature measuring piece 120 can penetrate through the penetrating hole 33 and the temperature measuring hole 14 to be arranged on the heating piece 130, and therefore the temperature on the heating piece 130 is measured through the temperature measuring piece 120, and the heating effect of the wafer is monitored.

In some embodiments, a wire inlet 34 is further disposed on a side of the base 30 facing away from the fixed space 31, the wire inlet 34 penetrates into the fixed space 31, the wire harness 110 penetrates through the wire inlet 34, so that the wire harness 110 enters into the fixed space 31 through the wire inlet 34, the wire harness 110 is divided into four power wires in the fixed space 31, two power wires directly enter into two wire connection holes 21 close to the wire inlet 34, and the other two power wires enter into the other two wire connection holes 21 after passing through the wire grooves 22.

Wherein, the bottom of fixed block 12 also sets up in fixed space 31 to carry out spacingly through fixed space 31 to the installation of fixed block 12, so that fixed block 12 and second splice 20 are connected, and in order to avoid fixed block 12 to the shielding of entrance hole 34, lead wire groove 35 has been seted up to the bottom of fixed block 12, lead wire groove 35 intercommunication entrance hole 34 and fixed space 31, so pencil 110 enters into in the lead wire groove 35 from entrance hole 34, enters into fixed space 31 from lead wire groove 35 again, finally enters into wiring groove 22 and wiring hole 21.

In particular, in some embodiments, the connector 100 further includes a third splicing element 40 and a fourth splicing element 41, where the third splicing element 40 is disposed at an end of the base 30 facing away from the fixing space 31, and the fourth splicing element 41 is detachably connected to the third splicing element 40. One of the third splicing element 40 and the fourth splicing element 41 is provided with a wire inlet groove 42, and the other splicing element can be spliced with the wire inlet groove 42 to form a connecting hole 43, and the connecting hole 43 is communicated with the wire inlet hole 34.

Thus, the wire harness 110 can pass through the connecting hole 43 before entering the connecting hole 43 when penetrating into the wiring hole 21, and the wire harness 110 is guided by the third splicing element 40 and the fourth splicing element 41, so that the wire harness 110 can accurately enter into the connecting hole 43, and meanwhile, the part of the wire harness 110 can be placed and stored by the third splicing element 40 and the fourth splicing element 41.

Specifically, by detachably connecting the third splicing element 40 and the fourth splicing element 41, when the wire harness 110 needs to pass through the connecting hole 43, the third splicing element 40 and the fourth splicing element 41 can be separated from each other, so that the wire harness 110 can be conveniently installed in the wire inlet slot 42, and after the third splicing element 40 and the fourth splicing element 41 are connected, the wire harness 110 is installed in the connecting hole 43.

Note that, like the first splicing member 10 and the second splicing member 20, the wire inlet groove 42 may be formed in one of the third splicing member 40 and the fourth splicing member 41, or the wire inlet groove 42 may be formed in both of the third splicing member 40 and the fourth splicing member 41. Further, the third splicing element 40 is also provided with a threaded hole 24, the fourth splicing element 41 is also provided with a mounting hole 15, and a bolt is arranged through the mounting hole 15 and is in threaded connection with the threaded hole 24, so that the third splicing element 40 and the fourth splicing element 41 are connected.

In some embodiments of the present application, to facilitate electrically connecting the heating element 130 with the wire harness 110 in the connector 100, the connector 100 further includes a socket 50 and a terminal 51, the socket 50 includes a jack 53, one end of the terminal 51 is disposed through the jack 53, the other end is disposed through the wire hole 21, and the terminal 51 is electrically connected with the wire harness 110 in the wire hole 21.

Wherein, be provided with the plug on the heating element 130, the plug is pegged graft in jack 53 to with terminal 51 electricity connection, wiring harness 110 links to each other with the plug through terminal 51 so for being used for supplying power to heating element 130. In addition, the heating element 130 is inserted into the connector 100 by means of a plug, so that the step of electrically connecting the heating element 130 with the wire harness 110 can be omitted, and the dismounting time of the heating element 130 can be saved. In other embodiments, the connector 100 may be directly electrically connected to the heating element 130 of the heating device after the wire harness 110 is fixed by the connector without providing the socket 50 and the post 51.

In some embodiments, since the connector 100 is provided with the temperature measuring member 120 in addition to the wire harness 110, in order to avoid the interference between the temperature measuring member 120 and the socket 50, the socket 50 is provided with the avoidance groove 52 in a penetrating manner, and the avoidance groove 52 is communicated with the temperature measuring hole 14 on the first splicing member 10, so that the temperature measuring member 120 passes through the temperature measuring hole 14 and then enters into the avoidance groove 52, and the temperature measuring member 120 can be connected with the heating member 130 through the socket 50 by the avoidance groove 52.

The socket 50 can also be in threaded connection with one end of the plug 32, so that the socket holder 50 and the first splicing element 10 and the second splicing element 20 are mutually fixed by the plug 32. Meanwhile, after the first splicing element 10 and the second splicing element 20 are combined, a boss 25 is formed on the surface connected with the plug socket 50, a groove matched with the boss 25 in shape is formed at the bottom of the plug socket 50, and after the plug socket 50 is connected with the first splicing element 10 and the second splicing element 20, the plug socket 50 can play a limiting role on the first splicing element 10 and the second splicing element 20 based on the shape matching of the boss 25 and the groove.

The process of the connector 100 fixing the wire harness 110 and the temperature measuring member 120 in some embodiments of the present application will be described with reference to fig. 2:

first, the first splicing element 10, the second splicing element 20, the wire pressing block 23, the base 30, the fixing block 12, the third splicing block 40 and the fourth splicing element 41 are separated from each other, the wire harness 110 sequentially passes through the wire inlet slot 42 and the wire inlet hole 34 and then enters the fixing space 31, two power wires of the four power wires of the wire harness 110 respectively directly enter two wire connecting holes 21 close to the wire inlet hole 34 in the fixing space 31 (at this time, the first splicing element 10 and the second splicing element 20 are combined to form the wire connecting holes 21), and the other two power wires pass through the wire inlet slot 22 and enter the other two wire connecting holes 21 respectively.

After the wire pressing block 23 is installed in the wire groove 22 on the second splicing element 20, the first splicing element 10 and the second splicing element 20 are installed on the base 30, and then the fixing block 12 is connected with the two second splicing elements 20, so that the fixing of the first splicing element 10 and the second splicing element 20 is completed. The wire harness 110 penetrating from the wiring hole 21 is electrically connected to the lower end of the terminal post 51, the lower end of the terminal post 51 is inserted into the wiring hole 21, and the other end of the terminal post 51 is inserted into the insertion hole 53 of the socket 50.

Finally, the bolt 32 passes through the bolt hole 36 and the pin hole 13 and is in threaded connection with the plug socket 50, so that the plug socket 50 is fixed on the first splicing element 10 and the second splicing element 20, and finally, the third splicing element 40 and the fourth splicing element 41 are connected, and the installation of the wire harness 110 is completed.

For the installation of the temperature measuring member 120, the temperature measuring member 120 can directly pass through the insertion hole 33 of the base 30, the temperature measuring hole 14 of the first splicing member 10 and the avoiding groove 52 of the plugging seat 50 in sequence, so that the temperature measuring member 120 is connected with the heating member 130, and the installation of the temperature measuring member 120 is completed.

After the connector 100 is mounted, the heating element 130 is mounted above the connector 100, and after the power connection of the heating element is connected to the jack 53 of the connector 100, the power supply can be realized, and the heating can be realized.

The connector 100 has at least the following advantages:

when the wire harness is installed, after the first splicing element 10 and the second splicing element 20 are mutually separated, the splicing groove 11 can be in an open state, the wire harness 110 can be conveniently introduced into the splicing groove 11, then the first splicing element 10 and the second splicing element 20 are combined to form the wiring hole 21, the wire harness 110 positioned in the splicing groove 11 is directly positioned in the wiring hole 21, a great deal of time is not required to be spent for penetrating the wire harness 110 through the wiring hole 21, and even if the wire harness 110 needs to be replaced or maintained, the wire harness 110 can be taken down from the connector 100 only by separating the first splicing element 10 and the second splicing element 20, and the replacement and the maintenance of the wire harness 110 are greatly facilitated. The problem that the wire harness 100 cannot pass smoothly due to the fact that the wire harness 100 is high in rigidity when the wire harness 100 is threaded is effectively solved, meanwhile, the problem that insulating parts in the wire harness 100 are extremely easy to damage due to the fact that the wire harness 100 is high in rigidity and difficult to bend in the assembly process of coating equipment is solved, the design structure is optimized, and the assembly difficulty is reduced.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples only represent a few embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the claims. It should be noted that it would be apparent to those skilled in the art that various modifications and improvements could be made without departing from the spirit of the present application, which would be within the scope of the present application. Accordingly, the scope of protection of the present application is to be determined by the claims appended hereto.

Claims (14)

1. A connector for mating with a heating device of a coating apparatus, the connector comprising:

a first splice (10); and

the second splice piece (20), with but first splice piece (10) ground of dismantling is connected, first splice piece (10) with at least one of second splice piece (20) is provided with splice groove (11), works as first splice piece (10) with after second splice piece (20) link to each other, splice groove (11) forms wiring hole (21), heating device's pencil (110) wear to locate wiring hole (21).

2. Connector according to claim 1, characterized in that the first splicing element (10) and the second splicing element (20) are provided with splicing grooves (11), and when the second splicing element (20) is connected with the first splicing element (10), the two splicing grooves (11) are spliced to form a wiring hole (21).

3. The connector according to claim 1, characterized in that the connector comprises a plurality of the second splice members (20), the plurality of second splice members (20) being arranged along the circumference of the first splice member (10), and each of the second splice members (20) being capable of being spliced with the first splice member (10) to form a wiring hole (21).

4. A connector according to claim 3, characterized in that it comprises two said second splices (20), the two said second splices (20) being arranged on opposite sides of the first splice (10), respectively;

the connector further comprises a fixing block (12), and the fixing block (12) is respectively connected with the same sides of the two second splicing pieces (20).

5. The connector according to claim 1, wherein the second splice member (20) further comprises a wiring groove (22), the wiring groove (22) being in communication with the wiring hole (21) when the second splice member (20) is connected to the first splice member (10).

6. The connector of claim 5, further comprising a wire block (23), the wire block (23) being mounted within the wire slot (22).

7. Connector according to claim 1, characterized in that at least two of the splice grooves (11) are provided on one of the first (10) and second (20) splice pieces, which first (10) and second (20) splice pieces, forming at least one wire connection hole (21) and at least one pin hole (13);

the connector further comprises a base (30) and a bolt (32), wherein the base (30) is provided with a bolt hole (35), and the bolt (32) is arranged in the bolt hole (35) and the bolt hole (13) in a penetrating mode.

8. The connector according to claim 7, wherein the base (30) is provided with a fixing hole (31), and the first splicing element (10) and the second splicing element (20) are both inserted into the fixing hole (31).

9. The connector according to claim 8, wherein a penetration hole (33) is formed in the base (30) in a penetrating manner, a temperature measuring hole (14) is formed in the first splicing member (10) in a penetrating manner, and the temperature measuring hole (14) is communicated with the penetration hole (33);

the heating device further comprises a temperature measuring piece (120), and the temperature measuring piece (120) is arranged in the penetrating hole (33) and the temperature measuring hole (14) in a penetrating mode.

10. The connector according to claim 8, wherein the base (30) is further provided with a wire inlet hole (34), the wire inlet hole (34) penetrates to the fixing hole (31), and the wire harness (110) penetrates through the wire inlet hole (34).

11. The connector according to claim 10, further comprising a third splice (40) and a fourth splice (41), the third splice (40) being disposed on the base (30), the fourth splice (41) being detachably connected to the third splice (40);

one of the third splicing piece (40) and the fourth splicing piece (41) is provided with a wire inlet groove (42), the other one of the third splicing piece and the fourth splicing piece is spliced with the wire inlet groove (42) to form a connecting hole (43), and the connecting hole (43) is communicated with the wire inlet hole (34).

12. The connector according to claim 1, further comprising a socket (50) and a post (51), the socket (50) comprising a jack (53), one end of the post (51) being provided through the jack (53) and the other end being provided through the wire hole (21), the post (51) being electrically connected to the wire harness (110) in the wire hole (21).

13. The connector according to claim 12, wherein the socket (50) is provided with a through-going groove (52), the first splicing member (10) is provided with a temperature measuring hole (14) in a through-going manner, and the temperature measuring hole (14) is communicated with the through-going groove (52).

14. A coating apparatus comprising a heating device and a connector (100) according to any one of claims 1-13.