CN117327543A - Probe card cleaning solution - Google Patents
Probe card cleaning solution Download PDFInfo
- Publication number
- CN117327543A CN117327543A CN202311039940.7A CN202311039940A CN117327543A CN 117327543 A CN117327543 A CN 117327543A CN 202311039940 A CN202311039940 A CN 202311039940A CN 117327543 A CN117327543 A CN 117327543A
- Authority
- CN
- China
- Prior art keywords
- probe card
- cleaning solution
- mems
- mems probe
- dust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 title claims abstract description 46
- 238000004140 cleaning Methods 0.000 title claims abstract description 29
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims abstract description 24
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 claims abstract description 22
- BBMCTIGTTCKYKF-UHFFFAOYSA-N 1-heptanol Chemical compound CCCCCCCO BBMCTIGTTCKYKF-UHFFFAOYSA-N 0.000 claims abstract description 20
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 20
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 claims abstract description 16
- -1 extremely fine dirt Substances 0.000 abstract description 13
- 239000002184 metal Substances 0.000 abstract description 11
- 239000000428 dust Substances 0.000 abstract description 9
- 239000000126 substance Substances 0.000 abstract description 9
- 239000002904 solvent Substances 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 8
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000002994 raw material Substances 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- PUSKHXMZPOMNTQ-UHFFFAOYSA-N ethyl 2,1,3-benzoselenadiazole-5-carboxylate Chemical compound CCOC(=O)C1=CC=C2N=[Se]=NC2=C1 PUSKHXMZPOMNTQ-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/24—Hydrocarbons
- C11D7/241—Hydrocarbons linear
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/261—Alcohols; Phenols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/264—Aldehydes; Ketones; Acetals or ketals
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5022—Organic solvents containing oxygen
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- General Chemical & Material Sciences (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a probe card cleaning solution, which comprises the following components in percentage by weight: 20-30% of pentane, 25-35% of heptanol, 35-40% of n-propanol, 1-3% of methyl ethyl ketone and 6-15% of ethanol. The probe card cleaning solution is reasonably provided with the use amount of each effective component and the solvent, can effectively clean substances such as extremely fine dirt, dust, oxide, metal residues and the like attached to the MEMS probe card, ensures that the performance and quality of the MEMS probe card are not affected by the adhesion problem of the extremely fine dirt, dust, oxide, metal residues and the like on the MEMS probe card, has small harm to human bodies and the MEMS probe card, is safe to use, can be recycled for the second time, and reduces the use cost.
Description
Technical Field
The invention relates to the technical field of semiconductor industry, in particular to a probe card cleaning solution.
Background
The probe card is an important testing device in the manufacturing process of semiconductors, is mainly applied to online circuit testing, functional testing and the like of components on the surface of a wafer, and in the manufacturing process, substances such as extremely fine dirt, dust, oxide, metal residues and the like are inevitably attached to the probe card and a probe, so that the overall testing performance of the probe card is affected, and the probe card cleaning solution is a chemical cleaning solvent used for cleaning the components in the manufacturing process of microelectronics.
At present, the conventional cleaning solution for the probe card has the problem that extremely fine dirt, dust, oxide, metal residues and other substances on the MEMS probe card cannot be perfectly removed, so that a technician using the probe card for testing hopes to have a cleaning solvent special for the MEMS probe card, can effectively and perfectly remove the extremely fine dirt, dust, oxide, metal residues and other substances attached on the MEMS probe card, and can also ensure that the performance and quality of the MEMS probe card are not affected.
Disclosure of Invention
Aiming at the defect that the cleaning solution for the traditional probe card has unsatisfactory adhesion effect of substances such as extremely fine dirt, dust, oxide, metal residue and the like on the MEMS probe card, the invention provides the probe card cleaning solution which can effectively and perfectly remove the substances such as extremely fine dirt, dust, oxide, metal residue and the like on the MEMS probe card and can also ensure that the performance and quality of the MEMS probe card are not affected.
A probe card cleaning solution comprising the following components in weight percent:
20-30% of pentane;
25-35% of heptanol;
35-40% of n-propanol;
1 to 3 percent of methyl ethyl ketone;
ethanol 6-15%.
Further, the weight percentage of the ethanol is 6-8%.
Further, the weight percentage of the pentane is 24-30%.
Further, the weight percentage of the heptanol is 25-28% or 28-35%.
The pentane selected by the invention is aliphatic hydrocarbon solvent, has excellent penetrating power and can accelerate the bonding of resin
The probe card cleaning solution disclosed by the invention is reasonably provided with each effective component and the using amount of each solvent, and each component is mutually synergistic, so that the effective cleaning can be carried out on extremely fine dirt, dust, oxide, metal residues and other substances attached to the MEMS probe card at room temperature, the performance and quality of the MEMS probe card are ensured not to be influenced by the problem of the attachment of extremely fine dirt, dust, oxide, metal residues and other substances on the MEMS probe card, and the special cleaning solution has relatively small harm to human bodies and the MEMS probe card, is safe to use, can be recycled for the second time, reduces the use cost, and can be applied to the plate surface cleaning in the fields of the MEMS probe card, the PCB industry and the like, thus having wide application prospect.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. It is evident that the figures in the following description are only some embodiments of the invention, from which other figures can be obtained without inventive effort for a person skilled in the art. In the drawings:
fig. 1 is a photograph of a MEMS probe card substrate before cleaning.
Fig. 2 is a photograph showing the effect of the MEMS probe card substrate cleaned by the present invention.
Detailed Description
The technical scheme of the invention is described in detail below with reference to specific embodiments.
The products of examples 1, 2 and 3 of the present invention were colorless transparent liquids with a slight odor. Comparative example 1, comparative example 2, and inventive examples 1, 2, and 3 were used to soak MEMS probe card substrates at 20-23 ℃ respectively, with the following results:
comparative example 1:
the raw materials and mass backup ratios used in comparative example 1 are as follows: 13% of pentane, 42% of heptanol, 18% of n-propanol, 5% of methyl ethyl ketone and 22% of ethanol.
The comparative example 1 was immersed for 20 minutes, the probe and the substrate were not corroded, resin residues were visible to the naked eye on the surface of the probe, and the substrate was not thoroughly cleaned.
Comparative example 2:
the raw materials and mass backup ratios used in comparative example 2 are as follows: 35% of pentane, 27% of heptanol, 23% of n-propanol, 4% of methyl ethyl ketone and 11% of ethanol.
The comparative example 2 was immersed for 20 minutes, the probe and the substrate were not corroded, the substrate was stained and cleaned, resin residues were visible to the naked eye on the surface of the probe, and the cleaning was not complete.
Example 1:
in the probe card cleaning solution example 1 of the present invention, the raw materials and the mass backup ratio are as follows: 24% of pentane, 28% of heptanol, 37% of n-propanol, 3% of methyl ethyl ketone and 8% of ethanol.
In the embodiment 1 of the invention, the probe and the substrate are soaked for 20 minutes, no corrosion is caused, no resin and no stains are caused on the surface, and the cleaning is thorough.
Example 2:
in the probe card cleaning solution example 2 of the present invention, the raw materials and the mass backup ratio are as follows: 20% of pentane, 35% of heptanol, 38% of n-propanol, 1% of methyl ethyl ketone and 6% of ethanol.
In the embodiment 2 of the invention, the probe and the substrate are soaked for 20 minutes, no corrosion is caused, no resin and no stains are caused on the surface, and the cleaning is thorough.
Example 3:
in example 3 of the probe card cleaning solution of the present invention, the raw materials and mass backup ratios used are as follows: pentane 30%, heptanol 25%, n-propanol 35%, methyl ethyl ketone 3%, ethanol 7%.
In the embodiment 3 of the invention, the probe and the substrate are soaked for 20 minutes, no corrosion is caused, no resin and no stains are caused on the surface, and the cleaning is thorough.
Referring to fig. 1-2, it can be seen that the metal residue at a, the metal residue at B, the stain at C, and the stain at D originally circled in fig. 1, which were thoroughly washed out in the product of fig. 2 after washing, were washed out by example 1 of the present invention.
It should be noted that the present invention is not limited to the above embodiments, and those skilled in the art can make other changes according to the inventive spirit of the present invention, and these changes according to the inventive spirit of the present invention should be included in the scope of the present invention as claimed.
Claims (4)
1. The probe card cleaning solution is characterized by comprising the following components in percentage by weight:
20-30% of pentane;
25-35% of heptanol;
35-40% of n-propanol;
1 to 3 percent of methyl ethyl ketone;
ethanol 6-15%.
2. The card cleaning solution of claim 1, wherein the ethanol is present in an amount of 6 to 8% by weight.
3. The card cleaning solution of claim 1, wherein the pentane is 24 to 30 weight percent.
4. The card cleaning solution of claim 1 wherein the heptanol is 25 to 28% or 28% to 35% by weight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311039940.7A CN117327543A (en) | 2023-08-17 | 2023-08-17 | Probe card cleaning solution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311039940.7A CN117327543A (en) | 2023-08-17 | 2023-08-17 | Probe card cleaning solution |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117327543A true CN117327543A (en) | 2024-01-02 |
Family
ID=89274453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311039940.7A Pending CN117327543A (en) | 2023-08-17 | 2023-08-17 | Probe card cleaning solution |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117327543A (en) |
-
2023
- 2023-08-17 CN CN202311039940.7A patent/CN117327543A/en active Pending
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |