CN117310211A - Heat reflection imaging system based on near field scanning optical fiber probe - Google Patents
Heat reflection imaging system based on near field scanning optical fiber probe Download PDFInfo
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- CN117310211A CN117310211A CN202311232354.4A CN202311232354A CN117310211A CN 117310211 A CN117310211 A CN 117310211A CN 202311232354 A CN202311232354 A CN 202311232354A CN 117310211 A CN117310211 A CN 117310211A
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- 239000000523 sample Substances 0.000 title claims abstract description 174
- 239000013307 optical fiber Substances 0.000 title claims abstract description 98
- 238000003384 imaging method Methods 0.000 title claims abstract description 33
- 238000001514 detection method Methods 0.000 claims abstract description 43
- 238000006073 displacement reaction Methods 0.000 claims abstract description 20
- 230000003321 amplification Effects 0.000 claims abstract description 17
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 17
- 238000005259 measurement Methods 0.000 claims abstract description 11
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
- 230000001629 suppression Effects 0.000 claims abstract description 7
- 239000000835 fiber Substances 0.000 claims description 16
- 238000013459 approach Methods 0.000 claims description 15
- 238000005086 pumping Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 10
- 238000011896 sensitive detection Methods 0.000 claims description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 230000007797 corrosion Effects 0.000 claims description 2
- 238000005260 corrosion Methods 0.000 claims description 2
- 238000002360 preparation method Methods 0.000 claims description 2
- 238000009529 body temperature measurement Methods 0.000 description 16
- 230000008859 change Effects 0.000 description 9
- 239000002121 nanofiber Substances 0.000 description 6
- 238000004861 thermometry Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000010146 3D printing Methods 0.000 description 3
- 238000001069 Raman spectroscopy Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
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- 238000012545 processing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
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- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/58—SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes
Abstract
The invention discloses a thermal reflection imaging system based on a near-field scanning optical fiber probe, which comprises a detection light source module consisting of a laser and an optical fiber coupler; the sensing module consists of an optical fiber probe and a tuning fork; the feedback control module consists of a three-dimensional displacement table and a tuning fork feedback type atomic force control system; the noise suppression module is composed of a balanced photoelectric detection system and a lock-in amplification system; a pump light source module composed of modulated light sources; the system uses a sensing module to scan a sample in combination with a feedback control module to finish temperature imaging, and uses a noise suppression module to reduce noise of received reflected light to improve the signal-to-noise ratio of a thermal reflection signal; and finally, a pump light source module is used for heating the sample and combining the locking amplification system, so that the signal to noise ratio is further improved. The invention can finish the measurement of the instantaneous temperature of the chip when the electronic chip is in operation, and can measure the temperatures of different micro areas of the chip.
Description
Technical Field
The invention belongs to the technical field of optical fiber sensing temperature measurement, and particularly relates to a thermal reflection imaging system based on a near-field scanning optical fiber probe.
Background
With the continuous development of electronic chips, people have increasingly separated devices formed by the chips in daily life, and any electronic device has corresponding working conditions, and exceeding the working conditions can affect the performance of the device and thus affect the use, so that the research on the performance of the electronic device is of great importance. Temperature is a key indicator affecting the performance of electronic devices, and efficiency of the devices is greatly reduced when the devices are operated at high temperature, and even chips are burned. Considering that the temperature rise of the device is mainly generated by the device in a working state, the real-time temperature measurement of the device in working can be more in line with the actual situation under the condition that no experimental condition is applied, and more accurate temperature rise information of the device can be obtained, so that a researcher is required to perform in-situ detection on the device.
At present, the mode of measuring the temperature of an electronic chip is mainly divided into two modes of contact type temperature measurement and non-contact type temperature measurement, wherein the contact type temperature measurement mode is to measure the temperature by contacting with a sample, and the heat conduction with a temperature measuring device can influence the result of temperature measurement, so that the non-contact type temperature measurement is adopted. The infrared temperature measurement method is the most commonly used non-contact measurement mode at present, but because the detected thermal radiation belongs to infrared light, the wavelength is longer, the corresponding spatial resolution is insufficient, and the infrared light can penetrate through an electronic device, so that when the surface temperature of the device is measured, the infrared light in the environment and the infrared light radiated inside the device can both influence the measurement result. Micro-area raman thermometry is also a commonly used non-contact measurement, but because raman thermometry is single point thermometry, it takes a certain amount of time. Meanwhile, the raman thermometry cannot measure the metal temperature, so the temperature of the metal portion in the semiconductor device cannot be obtained. Thermal reflectance imaging thermometry, which is based on temperature changes in the sample resulting in a linear change in reflectance with temperature, can also be used to measure the temperature of a semiconductor device. The variation thereof approximately satisfies the following formula:
where R denotes reflectance, T denotes temperature, CTR denotes thermal reflectance. However, the thermal reflection imaging thermometry is based on optical imaging, which is affected by diffraction limit, resulting in that the temperature of the micro-area cannot be measured.
The Chinese patent publication No. CN116380280A discloses a temperature measuring sensor and a micro-area temperature field detection system and method suitable for the same. The temperature measurement sensing device includes: the front end part of the micro-nano fiber grating probe is prepared based on three-dimensional printing, and the micro-nano fiber grating probe is suitable for measuring the surface and surrounding temperature sensing information of a sample; the tuning fork sensor is attached to the micro-nano fiber grating probe and is suitable for outputting tuning fork signals to the micro-nano fiber grating probe; and a feedback driving module connected to the tuning fork sensor and adapted to demodulate the tuning fork signal. According to the temperature measurement sensing device and the micro-region temperature field detection system and method applicable to the same, temperature sensing measurement is carried out by applying the micro-nano fiber bragg grating probe prepared by three-dimensional printing, and non-damage high-spatial resolution temperature distribution imaging is realized. The micro-nano fiber grating probe prepared by the three-dimensional printing method mainly obtains temperature distribution imaging. However, this temperature measurement method depends on the spectral resolution of the fiber bragg grating and the bandwidth of the measurement device (such as a photodetector and an oscilloscope), and the spectral resolution of the fiber bragg grating is typically 10pm/°c, which results in that the temperature resolution of the probe is not high, and the temperature of 1 ℃ or even lower cannot be measured. The thermal reflection temperature measurement mode does not need to rely on spectrum change, so that the temperature resolution can be very high and reaches 0.1 ℃.
Disclosure of Invention
In order to solve the problems, the invention aims to provide a heat reflection imaging system based on a near-field scanning optical fiber probe.
In order to achieve the above purpose, the present invention adopts the following technical scheme: a near field scanning fiber optic probe based thermal reflection imaging system comprising:
the detection light source module consists of a laser and an optical fiber coupler;
the sensing module consists of an optical fiber probe and a tuning fork;
the feedback control module consists of a three-dimensional displacement table and a tuning fork feedback type atomic force control system;
the noise suppression module is composed of a balanced photoelectric detection system and a lock-in amplification system;
a pump light source module composed of modulated light sources;
the system uses a sensing module to scan a sample in combination with a feedback control module to finish temperature imaging, and uses a noise suppression module to reduce noise of received reflected light to improve the signal-to-noise ratio of a thermal reflection signal; and finally, a pump light source module is used for heating the sample and combining the locking amplification system, so that the signal to noise ratio is further improved.
The light source emitted by the laser is visible light or near infrared light monochromatic light, the optical fiber coupler is a 1 multiplied by 2 optical fiber coupler, the output end of the laser is connected with the input end of the optical fiber coupler, the first output end of the optical fiber coupler is connected with the input end of the balanced photoelectric detection system, the output end of the balanced photoelectric detection system is connected with the input end of the lock-in amplifying system, and the second output end of the optical fiber coupler is connected with the circulator.
The circulator is provided with three interfaces, namely an I port, an II port and an III port, and the second output end of the optical fiber coupler is connected to the I port of the circulator and outputs laser to the optical fiber probe through the II port of the circulator.
The optical fiber probe is a conical optical fiber probe, the optical fiber probe is stuck on one arm of the tuning fork, and a metal film is plated on the surface of the probe, wherein the preparation mode of the optical fiber probe comprises but is not limited to a tapering method and a hydrofluoric acid corrosion method.
Placing a sample on a three-dimensional displacement table, controlling tuning fork vibration by a tuning fork feedback type atomic force control system, driving an optical fiber probe to approach the sample, and scanning and imaging.
Approaches to the sample for fiber optic probes include, but are not limited to: the optical fiber probe is motionless, and the three-dimensional displacement table drives the sample to approach the optical fiber probe; the three-dimensional displacement table is motionless, and the optical fiber probe approaches the sample; the optical fiber probe and the three-dimensional displacement table move simultaneously to finish the approach of the optical fiber probe to the sample;
the scanning mode of the optical fiber probe on the sample includes but is not limited to: the optical fiber probe is motionless, and the three-dimensional displacement table drives the sample (5) to move; the three-dimensional displacement table is motionless, and the scanning of the sample is completed by moving the optical fiber probe; and the three-dimensional displacement table and the optical fiber probe move simultaneously to finish scanning the sample.
The input laser emitted by the detection light source module irradiates the sample after passing through the optical fiber probe, and the reflected light of the sample enters the II port of the circulator after passing through the optical fiber probe, and is emitted from the III port of the circulator to enter the input end of the balanced photoelectric detection system.
The first output end of the optical fiber coupler inputs light into the reference end of the balanced photoelectric detection system to serve as a reference signal, the III port of the circulator outputs reflected light of a sample to enter the signal input end of the balanced photoelectric detection system to serve as an input signal, and the balanced photoelectric detection system performs difference on the two signals to obtain a signal for eliminating common mode noise.
The balanced photodetection system includes, but is not limited to: receiving a reference signal and an input signal using a balanced photodetector or a self-balanced photodetector; and two photoelectric detectors are used, one of which receives a reference signal and the other of which receives an input signal, and data acquisition equipment is used for differential measurement after photoelectric conversion to complete data acquisition.
The pumping light source module emits laser by a pulse laser with heavy frequency and modulates the laser by an external modulator to obtain a pumping light source; external modulators include, but are not limited to, choppers, electro-optic modulators, or acousto-optic modulators; the pumping light source is divided into two paths, one path is used for heating a sample, and the other path is combined with the balance photoelectric detection system to serve as a reference signal and is input into the lock-in amplifying system;
the signals after common mode noise is eliminated by the balanced photoelectric detection system are input into the lock-in amplification system and used as input signals of the lock-in amplification system, the pumping light source is input into the lock-in amplification system and used as reference signals of the lock-in amplification system, and finally the lock-in amplification system eliminates signals of other frequencies except the same-frequency signals of the pumping light source in a phase-sensitive detection mode, so that the signal-to-noise ratio is improved.
Compared with the prior art, the invention has the following advantages:
1. the prepared conical optical fiber probe is combined with the tuning fork feedback type atomic force control system to finish approaching and scanning the surface of the sample to be measured, meanwhile, the conical optical fiber probe is used for receiving reflected light of the surface of the sample, processing and analyzing the reflected light, and the system for measuring the temperature of the sample is finished by combining with a thermal reflection imaging technology. The system can finish the temperature measurement of the sample under the condition that noise interference exists in the reflected signal, and meanwhile, the reflected signal is hot and weak.
2. The invention uses the balance detection system and the lock-in amplification system to reduce noise of the received reflected light, thereby improving the signal-to-noise ratio of the measured heat reflected signal. The pump light source adjusting module is combined with the lock-in amplifying system, signals of other frequencies except the same-frequency signals of the pump light source are eliminated through a phase-sensitive detection mode of the lock-in amplifying system, and further improvement of signal to noise ratio is achieved.
3. The invention can finish the measurement of the instantaneous temperature of the chip when the electronic chip is in operation, and can measure the temperatures of different micro areas of the chip.
Drawings
In order to more clearly illustrate the technical solutions of specific embodiments of the present invention, the drawings that are needed in the description of the embodiments will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort to a person of ordinary skill in the art.
FIG. 1 is a schematic diagram of a thermal reflection imaging system based on a near field scanning fiber probe in the present invention;
in the figure, a 1-laser; a 2-fiber coupler; 3-circulator; 4-optical fiber probe; 5-sample; 6-a three-dimensional displacement table; 7-tuning fork; 8-tuning fork feedback type atomic force control system; 9-balancing a photoelectric detection system; a 10-lock-in amplification system; 11-pump light source.
Detailed Description
The present invention will be further described with reference to the drawings and the specific embodiments, but it should not be construed that the scope of the subject matter of the present invention is limited to the following embodiments, and various modifications, substitutions and alterations made according to the ordinary skill and familiar means of the art to which this invention pertains are included within the scope of the present invention without departing from the above technical idea of the invention.
Referring to fig. 1, the invention provides a system for completing the approach and scanning of the surface of a sample 5 to be measured by combining a prepared optical fiber probe 4 with a tuning fork feedback type atomic force control system 8, simultaneously receiving the reflected light of the surface of the sample 5 by using the conical optical fiber probe 4, processing and analyzing the reflected light, and completing the measurement of the temperature of the sample by combining a thermal reflection imaging technology. The system can finish the temperature measurement of the sample under the condition that noise interference exists in the reflected signal, and meanwhile, the reflected signal is hot and weak.
The technical scheme adopted by the invention is as follows: the system is mainly divided into five modules: a detection light source module composed of a continuous laser 1, a multimode fiber and a 1×2 fiber coupler 2; a sensing module combined with a tuning fork 7 by a tapered optical fiber probe 4; the feedback control module is composed of a three-dimensional displacement table 6 and a tuning fork feedback type atomic force control system 8; a pump light source module composed of modulated light sources; a noise suppression module composed of a balanced photoelectric detection system 9 and a lock-in amplification system 10.
Wherein the laser light emitted by the continuous laser 1 may be monochromatic light of visible light or near infrared light. The laser emitted by the laser 1 is divided into two paths of laser through a 1×2 optical fiber coupler, one path of laser is directly used as reference light of the balance photoelectric detection system 9, the other path of laser directly irradiates the surface of the sample 5 after passing through the circulator 3 and the optical fiber probe 4, reflected light on the surface of the sample 5 enters the balance photoelectric detection system 9 through the optical fiber probe 4 and the circulator 3 and is used as input light of the system, the received reflected light changes and temperature changes are in a linear relation according to a thermal reflection temperature measurement principle, and the temperature changes can be obtained by measuring the reflected light changes.
A tuning fork feedback atomic force control system 8 controls the approach of the fiber probe 4 to the scanned sample 5. The tuning fork feedback type atomic force control system 8 controls the vibration of the tuning fork 7, and the optical fiber probe 4 is driven to approach the sample 5 and scan and image through the change of the atomic force between the feedback optical fiber probe 4 and the sample 5. The balanced photoelectric detection system 9 can be a balanced photoelectric detector, a self-balanced photoelectric detector or two photoelectric detectors and a data acquisition module. The output signal of the balanced photoelectric detection system 9 is used as the input signal of the lock-in amplifying system 10, the same-frequency signal of the pumping light source 11 is used as the reference signal of the lock-in amplifying system 10, the lock-in amplifying system 10 can obtain a heat reflection signal with high signal-to-noise ratio through a phase-sensitive detection technology, and finally the heat reflection signal is processed into a temperature map through data processing. The pump light source 10 can be composed of a continuous light source combined with a chopper, an electro-optic modulator or an acousto-optic modulator and other external modulators; or may be composed of a pulse signal having a repetition frequency in combination with a photodetector.
In general, a single color light is applied to a sample in a thermal reflection measurement, and reflected light of the single color light is collected by using an objective lens, and the reflected light collected by the objective lens is transmitted to a camera, and then imaged by using the camera to obtain a temperature map of the sample. However, the imaging mode is limited by the influence of diffraction limit, that is, the light spot irradiated to the sample by the monochromatic light source is about in micrometer scale due to the influence of diffraction, and the sample in submicron scale or even in nanometer scale cannot be imaged. The reflected light is received at the near field location of the sample using a fiber optic probe instead of an objective lens, thereby bringing the imaging dimensions of the sample to the submicron order. Because the tip size of the fiber optic probe is small, on the order of submicron or nanometer, this can make the received reflected light weak, making the signal to noise ratio of the measured thermal reflected signal low, ultimately resulting in inaccurate temperature of the temperature image.
The received reflected light is thus noise reduced using the balanced detection system 9 in combination with the lock-in amplification system 10, thereby improving the signal-to-noise ratio of the measured thermal reflection signal. The sample 5 is scanned using the fiber optic probe 4 in combination with a feedback control module to complete the temperature imaging.
Examples: the invention provides a heat reflection imaging system based on a near-field scanning optical fiber probe,
the system comprises a detection light source emitted by a laser 1, wherein the detection light source is a narrow-band light source with a center wavelength of 532 nm; the balanced photodetector system 9 is constituted by a balanced photodetector, and the lock-in amplifier system 10 is constituted by a lock-in amplifier.
The fiber coupler 2 divides the detection light source into two beams, one for the reference light of the balanced photodetector and one for illuminating the sample (5), and the fiber coupler 2 uses 99: a coupler of 1 split ratio; the circulator 3 makes the detection light source input to the sample 5 and the reflected light of the sample 5 not be in the same optical path, and the circulator 3 uses a multimode optical fiber circulator because the detection light source emitted by the laser is a 532nm narrow-band light source; the circulator 3 is provided with three interfaces, namely an I port, an II port and an III port; the optical fiber probe 4 is used for emitting detection light and receiving reflected light of the sample 5, the size of the tip of the optical fiber probe 4 is between 50nm and 100nm, and the optical fiber probe 4 is stuck on one arm of the tuning fork 7; the tuning fork 7 is combined with a tuning fork feedback type atomic force control system 8 to control the approach of the optical fiber probe 4 and the scanning of the sample, and the distance between the optical fiber probe 4 and the sample 5 is between 20nm and 50 nm; the tuning fork feedback type atomic force control system 8 consists of a three-dimensional micrometer stage, a three-dimensional nanometer stage and a feedback loop; the balanced photoelectric detector and the lock-in amplifier are used for reducing noise of the heat reflection signal; the pumping light source 11 is used for heating a sample, the high-power laser with 980nm of the pumping light source emits laser light and is obtained under the modulation of the acousto-optic modulator, and the same-frequency signal with the modulation frequency is used as a reference signal of the lock-in amplifier.
The laser 1 outputs 532nm continuous laser light, which passes through 99: the optical fiber coupler 2 of the optical fiber circulator 3 outputs laser to the optical fiber probe 4, and the optical fiber probe 4 inputs the laser to the surface of the sample 5. The tuning fork feedback type atomic force control system 8 controls the optical fiber probe 4 to approach and scan the sample 5 on the three-dimensional displacement table 6 through the tuning fork 7, and reflected light of the sample 5 is received by the optical fiber probe 4 and output to the input end of the balance photoelectric detector through the III port of the optical fiber circulator 3. The balanced photoelectric detector reference optical fiber coupler 2 is input into the low power part of the balanced photoelectric detector and performs difference, common mode noise of the heat reflection signal is eliminated, the heat reflection signal after noise reduction is input into the input end of the lock-in amplifier,
the high-power laser emits 980nm laser, and the pumping light source 11 obtained after modulation of the acousto-optic modulator acts on the surface of the sample 5 to periodically heat the sample, and the reflected light of the surface of the sample also periodically changes due to the periodic change of the temperature of the sample 5, so that a heat reflection signal is generated. The acousto-optic modulator modulates the synchronous signal of the pumping light source 11 as the reference signal of the lock-in amplifier, and finally the lock-in amplifier eliminates the signals of other frequencies except the temperature change frequency to improve the signal-to-noise ratio.
The principle of the whole system is that probe light is irradiated on the surface of a sample 5 to be detected, reflected light on the surface of the sample is obtained by a conical optical fiber probe 4 and is input into a balance photoelectric detection system 9 to eliminate common mode noise and obtain a thermal reflection signal, and according to the thermal reflection temperature measurement principle, the change of reflectivity and the temperature change have a linear relation, so that the change of the temperature of a corresponding point can be measured by measuring the change of reflected light of different points of the sample, in addition, the conical optical fiber probe 4 is combined with a tuning fork feedback type atomic force control system 8, the probe 4 can be enabled to penetrate into the near field of the sample 5 by controlling the approaching probe 4, and a sample image can be obtained by controlling the scanning sample 5, so that the obtained image has nanoscale spatial resolution. Finally, the phase-sensitive detection technology of combining the modulated light source heating sample with the lock-in amplification system can further improve the signal to noise ratio and obtain the time resolution of hundred microseconds.
The above description is provided for a heat reflection imaging system based on a near field scanning optical fiber probe, and specific examples are applied to illustrate the structure and working principle of the present invention, and the above description of the embodiments is only used to help understand the method and core idea of the present invention. It should be noted that it will be apparent to those skilled in the art that various improvements and modifications can be made to the present invention without departing from the principles of the invention, and such improvements and modifications fall within the scope of the appended claims.
Claims (10)
1. A near field scanning fiber optic probe based thermal reflection imaging system comprising:
a detection light source module composed of a laser (1) and an optical fiber coupler (2);
a sensing module composed of an optical fiber probe (4) and a tuning fork (7);
the feedback control module consists of a three-dimensional displacement table (6) and a tuning fork feedback type atomic force control system (8);
the noise suppression module consists of a balanced photoelectric detection system (9) and a lock-in amplification system (10);
a pump light source module composed of modulated light sources;
the system uses a sensing module to scan a sample (5) to finish temperature imaging in combination with a feedback control module, and uses a noise suppression module to reduce noise of received reflected light and improve the signal-to-noise ratio of a thermal reflection signal; and finally, a pump light source module is used for heating the sample (5) and combining with the lock-in amplifying system, so that the signal to noise ratio is further improved.
2. The near field scanning optical fiber probe based thermal reflection imaging system according to claim 1, wherein: the light source emitted by the laser (1) is monochromatic light of visible light or near infrared light, the optical fiber coupler (2) is a 1 multiplied by 2 optical fiber coupler, the output end of the laser (1) is connected with the input end of the optical fiber coupler (2), the first output end of the optical fiber coupler (2) is connected with the input end of the balanced photoelectric detection system (9), the output end of the balanced photoelectric detection system (9) is connected with the input end of the lock-in amplification system (10), and the second output end of the optical fiber coupler (2) is connected with the circulator (3).
3. The near field scanning optical fiber probe based thermal reflection imaging system according to claim 2, wherein: the circulator (3) is provided with three interfaces, namely an I port, an II port and an III port, the second output end of the optical fiber coupler (2) is connected to the I port of the circulator (3), and laser is output to the optical fiber probe (4) through the II port of the circulator (3).
4. The near field scanning optical fiber probe based thermal reflection imaging system according to claim 1, wherein: the optical fiber probe (4) is a conical optical fiber probe, the optical fiber probe (4) is stuck on one arm of the tuning fork (7), and a metal film is plated on the surface of the probe, wherein the preparation mode of the optical fiber probe (4) comprises but is not limited to a tapering method and a hydrofluoric acid corrosion method.
5. The near field scanning optical fiber probe based thermal reflection imaging system according to claim 1, wherein: placing a sample (5) on a three-dimensional displacement table (6), controlling the tuning fork (7) to vibrate by a tuning fork feedback type atomic force control system (8), driving the optical fiber probe (4) to approach the sample (5) and scanning and imaging.
6. The near field scanning optical fiber probe based thermal reflection imaging system according to claim 5, wherein: the approach of the fiber probe (4) to the sample (5) includes, but is not limited to: the optical fiber probe (4) is motionless, and the three-dimensional displacement table (6) drives the sample (5) to approach the optical fiber probe (4); the three-dimensional displacement table (6) is motionless, and the optical fiber probe (4) approaches the sample (5); the optical fiber probe (4) and the three-dimensional displacement table (6) move simultaneously to finish the approach of the optical fiber probe (4) to the sample (5);
the scanning mode of the optical fiber probe (4) on the sample (5) comprises but is not limited to: the optical fiber probe (4) is fixed, and the three-dimensional displacement table (6) drives the sample (5) to move; the three-dimensional displacement table (6) is fixed, and the scanning of the sample (5) is completed by moving the optical fiber probe (4); the three-dimensional displacement table (6) and the optical fiber probe (4) move simultaneously to finish scanning the sample (5).
7. The near field scanning optical fiber probe based thermal reflection imaging system according to claim 1, wherein: the input laser emitted by the detection light source module irradiates the sample (5) after passing through the optical fiber probe (4), and the reflected light of the sample (5) enters the II port of the circulator (3) after passing through the optical fiber probe (4) and is emitted from the III port of the circulator (3) to enter the input end of the balanced photoelectric detection system (9).
8. The near field scanning optical fiber probe based thermal reflection imaging system according to claim 2 or 7, wherein: the first output end of the optical fiber coupler (2) inputs light into the reference end of the balanced photoelectric detection system (9) to serve as a reference signal, the III port of the circulator (3) outputs reflected light of the sample (5) to enter the signal input end of the balanced photoelectric detection system (9) to serve as an input signal, and the balanced photoelectric detection system (9) performs difference on the two signals to obtain a signal for eliminating common mode noise.
9. The near field scanning optical fiber probe based thermal reflection imaging system according to claim 1, wherein: the balanced photodetection system (9) includes, but is not limited to: receiving a reference signal and an input signal using a balanced photodetector or a self-balanced photodetector; and two photoelectric detectors are used, one of which receives a reference signal and the other of which receives an input signal, and data acquisition equipment is used for differential measurement after photoelectric conversion to complete data acquisition.
10. The near field scanning optical fiber probe based thermal reflection imaging system according to claim 1, wherein: the pumping light source module emits laser by a pulse laser with heavy frequency and modulates the laser by an external modulator to obtain a pumping light source (11); external modulators include, but are not limited to, choppers, electro-optic modulators, or acousto-optic modulators; the pumping light source (11) is divided into two paths, one path is used for heating the sample (5), and the other path is combined with the balance photoelectric detection system (9) to serve as a reference signal and is input into the lock-in amplification system (10);
the signals after common mode noise is eliminated by the balanced photoelectric detection system (9) are input into the lock-in amplifying system (10), the signals are used as input signals of the lock-in amplifying system (10), the pumping light source (11) is input into the lock-in amplifying system (10) and used as reference signals of the lock-in amplifying system (10), and finally the lock-in amplifying system (10) eliminates signals with other frequencies except the same frequency signals as the pumping light source (11) in a phase-sensitive detection mode, so that the signal-to-noise ratio is improved.
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| CN202311232354.4A CN117310211A (en) | 2023-09-22 | 2023-09-22 | Heat reflection imaging system based on near field scanning optical fiber probe |
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| CN202311232354.4A CN117310211A (en) | 2023-09-22 | 2023-09-22 | Heat reflection imaging system based on near field scanning optical fiber probe |
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