CN117309329A - Full-space detection device and method for optical element - Google Patents
Full-space detection device and method for optical element Download PDFInfo
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- CN117309329A CN117309329A CN202311256166.5A CN202311256166A CN117309329A CN 117309329 A CN117309329 A CN 117309329A CN 202311256166 A CN202311256166 A CN 202311256166A CN 117309329 A CN117309329 A CN 117309329A
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- 238000001514 detection method Methods 0.000 title claims abstract description 113
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- 238000005259 measurement Methods 0.000 abstract description 5
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0278—Detecting defects of the object to be tested, e.g. scratches or dust
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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Abstract
The invention provides a full-space detection device and method for an optical element, belonging to the field of optical element detection, wherein the device comprises an optical path unit and a mechanical unit, wherein: the light source component of the light path unit is used for providing incident light; the reflection detection component is arranged on the reflection side of the optical element to be detected; the transmission detection component is arranged on the transmission side of the optical element to be detected; the sample motion platform of the mechanical unit is used for fixing the optical element to be tested and driving the optical element to move; the light source moving platform is used for driving the light source assembly to rotate; the hemispherical detector motion platform is used for synchronously driving the reflection detection assembly and the transmission detection assembly to move in respective hemispheres. The invention can effectively improve the detection accuracy by adding one information source, and can realize the full-space detection of the reflected light and the transmitted light by arranging the mechanical unit, thereby obtaining more light intensity information and further improving the detection accuracy and the measurement efficiency.
Description
Technical Field
The invention belongs to the field of optical element detection, and particularly relates to an optical element full-space detection device and method.
Background
Optical elements represented by fused quartz and monocrystalline silicon are increasingly widely applied, and in the processing process of the optical elements, the introduced surface/subsurface defects can influence the defect sensitivity of the optical elements simultaneously from three aspects of light field enhancement caused by interference, laser absorption capacity enhancement of optical materials by crack impurities and material mechanical property reduction, thereby causing macroscopic defects of the optical elements and reducing the performance of the optical elements.
At present, a light scattering method is generally adopted to carry out nondestructive testing on an optical element, namely, a laser scattering technology is adopted to measure defects and surface pollutants, and polarization technology is adopted to realize differentiation of defects, particle pollutants and surface roughness. However, the detector in the prior art is fixed, only can measure scattered light, and cannot realize light intensity distribution detection of the whole space, so that the problems of poor detection precision and low efficiency are caused.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a full-space optical element detection device and a full-space optical element detection method, and aims to solve the problem that the existing light scattering detection device cannot realize detection of the whole space light intensity distribution.
To achieve the above object, according to an aspect of the present invention, there is provided an optical element total space detection apparatus including an optical path unit and a mechanical unit, wherein:
the light path unit comprises a light source assembly, a reflection detection assembly and a transmission detection assembly, wherein the light source assembly is used for providing incident light for an optical element to be detected so as to generate reflected light and transmitted light; the reflection detection component is arranged on the reflection side of the optical element to be detected and is used for collecting the light intensity information of the reflected light; the transmission detection component is arranged on the transmission side of the optical element to be detected and is used for collecting the light intensity information of the transmitted light;
the mechanical unit comprises a sample motion platform, a light source motion platform and a detector hemispherical motion platform, wherein the sample motion platform is used for fixing an optical element to be detected and driving the optical element to move; the light source moving platform is arranged in front of the sample moving platform and is connected with the light source assembly so as to drive the light source assembly to rotate; the hemispherical motion platform of the detector is arranged at the rear of the sample motion platform and is connected with the reflection detection assembly and the transmission detection assembly so as to synchronously drive the reflection detection assembly and the transmission detection assembly to move in respective hemispheres, thereby realizing the full-space detection of reflected light and transmitted light.
As a further preferred feature, the optical element full space detection device further includes a darkroom cover disposed outside the optical path unit and the mechanical unit for forming a darkroom environment, and an inner wall of the darkroom cover is provided with a light absorbing structure for absorbing stray light.
As a further preferred aspect, the light source assembly includes a laser and a spot adjusting structure connected in sequence, the laser being configured to generate a laser spot, and the spot adjusting structure being configured to adjust the laser spot to form incident light.
As a further preferred feature, the spot adjusting structure comprises a polarizer, a filter, a collimator mirror and an entrance diaphragm connected in sequence along the direction of light propagation.
As a further preferred feature, the reflection detection assembly comprises a first analyzer, a first diaphragm and a first photomultiplier tube connected in sequence along the direction of light propagation.
As a further preferred feature, the transmission detection assembly comprises a second analyzer, a second diaphragm and a second photomultiplier tube connected in sequence along the direction of light propagation.
As a further preferred aspect, the sample motion platform includes a sample holder and a sample XY axis moving structure, wherein the sample holder is used for placing an optical element to be measured, and the sample XY axis moving structure is connected with the sample holder to drive the optical element to be measured to move along the directions of the X axis and the Y axis, so as to change the irradiation position of the incident light.
As a further preferred aspect, the light source moving platform includes a first support rod and a light source C-axis rotating structure, wherein the first support rod is vertically disposed, an upper end of the first support rod is connected with the light source assembly, and a lower end of the first support rod is connected with the light source C-axis rotating structure; the light source C-axis rotating structure is fixed on the bottom surface and is used for driving the light source assembly to rotate around the Z axis.
As a further preferred aspect, the hemispherical motion platform of the detector comprises a second supporting rod, an L-shaped connecting rod, a rotating structure of a B axis of the detector, a rotating structure of a C axis of the detector and a cross rod, wherein the second supporting rod is vertically fixed on the bottom surface; one end of the L-shaped connecting rod is connected with the second supporting rod through a detector B shaft rotating structure, and the other end of the L-shaped connecting rod is connected with the cross rod through a detector C shaft rotating structure; one end of the cross rod is connected with the inclined reflection detection component, and the other end of the cross rod is connected with the transmission detection component.
According to another aspect of the present invention, there is provided a method for detecting the total space of an optical element, the method employing the above-mentioned optical element total space detecting device, specifically comprising the steps of:
s1, starting a light source assembly, placing an optical element to be detected, and then starting a reflection detection assembly and a transmission detection assembly;
s2, the light source moving platform is utilized to drive the light source assembly to rotate so as to adjust the incident angle of incident light, and the detector hemispherical moving platform is utilized to drive the reflection detection assembly and the transmission detection assembly to rotate by the same angle so as to collect light intensity information of the reflected light and the transmitted light
S3, repeating the step S2 until the incident angle covers the set range, so as to finish the detection of the current light spot;
s4, driving the optical element to be detected to move a preset distance to the position of the next light spot by using the sample motion platform, and repeating the steps S2 and S3 until the incident light covers the optical element to be detected, and obtaining the surface defect and the pollutant of the optical element to be detected according to the collected light intensity information.
In general, the above technical solutions conceived by the present invention have the following beneficial effects compared with the prior art:
1. the invention can realize the synchronous detection of reflected light and transmitted light by arranging the reflection detection component and the transmission detection component, increases an information source compared with the single measurement of the reflected light, and can effectively improve the accuracy of detecting surface defects and pollutants;
2. particularly, the invention can effectively absorb stray light in the space and reduce the influence of a stray light detection light path by arranging the darkroom cover and arranging the light absorption structure on the inner wall of the darkroom cover;
3. meanwhile, the structure of the light source component, the reflection detection component and the transmission detection component is optimized, so that the detection accuracy can be further improved;
4. in addition, the structure of the sample motion platform, the light source motion platform and the detector hemispherical motion platform is optimized, so that the cooperative motion of the optical element to be detected, the light source assembly, the reflection detection piece and the transmission detection assembly can be realized, the problem of unbalance during rotation is solved, the detection precision is improved, the detection time is further reduced, and the detection efficiency is effectively improved.
Drawings
FIG. 1 is a schematic diagram of an optical element full-space detection device according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an optical path of an optical element full-space detection device according to an embodiment of the present invention;
FIG. 3 shows an inner wall structure of a darkroom cover in an optical element full-space detection device according to an embodiment of the present invention;
FIG. 4 is a flowchart of a method for detecting the total space of an optical element according to an embodiment of the present invention;
fig. 5 is a schematic diagram of a light intensity acquisition scheme in the optical element full-space detection method according to the embodiment of the invention.
The same reference numbers are used throughout the drawings to reference like elements or structures, wherein:
101-light source C-axis rotating structure, 102-first supporting rod, 103-second supporting rod, 104-sample fixture, 105-detector C-axis rotating structure, 106-detector B-axis rotating structure, 107-sample XY-axis moving structure, 108-L-shaped connecting rod, 109-cross rod, 200-optical element to be tested, 300-light spot adjusting structure, 301-laser, 302-polarizer, 303-filter, 304-collimating mirror, 305-incident diaphragm, 310-reflection detecting component, 311-first photomultiplier, 312-first diaphragm, 313-first analyzer, 320-transmission detecting component, 321-second photomultiplier, 322-second diaphragm, 323-second analyzer, 400-darkroom cover, 401-light absorbing structure.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
As shown in fig. 1 and 2, according to an aspect of the present invention, there is provided an optical element full-space detection apparatus including an optical path unit and a mechanical unit, wherein:
the light path unit includes a light source assembly, a reflection detection assembly 310 and a transmission detection assembly 320, wherein the light source assembly is used for generating collimated parallel light rays for defect detection, namely incident light, so as to irradiate the surface of the optical element 200 to be detected, and after passing through a rough surface and a defect, the polarization state of the incident light is changed, and reflected light and transmitted light are generated, so that the surface roughness and the defect are distinguished; the reflection detecting component 310 is disposed on the reflection side of the optical element 200 to be detected, and is used for collecting the light intensity information of the reflected light and identifying the roughness signal and the defect signal; the transmission detection component 320 is disposed on the transmission side of the optical element 200 to be detected, and is used for collecting the light intensity information of the transmitted light and identifying the roughness signal and the defect signal;
the method comprises the steps that a fixed plane of a mechanical unit is taken as an XY horizontal plane, the direction of a reflection detection assembly 310 pointing to a transmission detection assembly 320 is taken as a Y axis, an XYZ axis coordinate system is established, the mechanical unit comprises a sample motion platform, a light source motion platform and a detector hemispherical motion platform, the sample motion platform comprises a sample clamp 104 and a sample XY axis moving structure 107, the sample clamp 104 is used for placing an optical element 200 to be detected, the sample XY axis moving structure 107 is connected with the sample clamp 104 so as to drive the optical element 200 to be detected to move along the directions of an X axis and a Y axis, and therefore the irradiation position of incident light is changed; the sample XY axis moving structure 107 can adopt a manual sliding table, and the optical element 200 to be measured is driven to move by using a manual adjustment mode;
the light source moving platform is arranged in front of the sample moving platform and is connected with the light source assembly, and comprises a first supporting rod 102 and a light source C-axis rotating structure 101, wherein the first supporting rod 102 is vertically arranged, the upper end of the first supporting rod is connected with the light source assembly, and the lower end of the first supporting rod is connected with the light source C-axis rotating structure 101; the light source C-axis rotating structure 101 is fixed on the bottom surface and is used for driving the light source assembly to rotate around the Z axis, so that the incident angle of the incident light is changed under the condition that the incident radius of the incident light is unchanged;
the detector hemisphere motion platform is arranged at the rear of the sample motion platform and is connected with the reflection detection component 310 and the transmission detection component 320, and comprises a second supporting rod 103, an L-shaped connecting rod 108, a detector B-axis rotation structure 106, a detector C-axis rotation structure 105 and a cross rod 109, wherein the second supporting rod 103 is vertically fixed on the bottom surface; one end of the L-shaped connecting rod 108 is connected with the second supporting rod 103 through the detector B-axis rotating structure 106, so that the L-shaped connecting rod 108 rotates around the Y-axis under the drive of the detector B-axis rotating structure 106, and the other end of the L-shaped connecting rod is connected with the cross rod 109 through the detector C-axis rotating structure 105, so that the cross rod 109 is driven to rotate around the Z-axis by the detector C-axis rotating structure 105; one end of the cross rod 109 is connected with the inclined reflection detection component 310, and the other end is connected with the transmission detection component 320, so that under the combined action of the detector B-axis rotating structure 106 and the detector C-axis rotating structure 105, the reflection detection component 310 and the transmission detection component 320 are synchronously driven to move in respective hemispheres to realize full-space detection of reflected light and transmitted light; the axis of the reflection detection component 310 forms a certain included angle with the axis of the incident light, so that the influence on the incident light in the detection process of the reflection detection component 310 is avoided.
Further, as shown in fig. 3, the optical element full-space detection device further includes a darkroom cover 400, and the darkroom cover 400 is disposed outside the optical path unit and the mechanical unit for forming a darkroom environment. The inner wall of the darkroom cover 400 is provided with a light absorption structure 401, and the surface of the light absorption structure 401 is coated with a light absorption black coating, so that stray light is absorbed by means of multiple reflection of the light absorption structure 401 and the light absorption black coating, noise generated by stray light reflection is avoided, and therefore the influence of stray light on a measurement result is reduced. Preferably, the light absorbing structure 401 takes the form of an isosceles triangle microstructure.
Further, the light source assembly comprises a laser 301 and a light spot adjusting structure 300 which are sequentially connected, and the light source assembly is used for generating incident light with different light spot radiuses and polarization states, wherein the laser 301 is used for generating a laser light spot with a specific wavelength, preferably 532nm filtered laser is adopted, and the power range can be adjusted within the range of 0-100 mW; the light spot adjusting structure 300 is used for adjusting a laser light spot to form incident light, and the light spot adjusting structure 300 comprises a polarizer 302, a filter 303, a collimating mirror 304 and an incident diaphragm 305 which are sequentially connected along the light propagation direction, wherein the polarizer 302 is used for generating S or P polarized light, the collimating mirror 304 and the incident diaphragm 305 are matched to realize the incidence of polarized parallel light, the roughness of the optical element 200 to be measured can be removed, and the polarization state is changed after the defect scattering is detected by using the analyzer. The polarizer 302 is mainly used for avoiding the influence of surface roughness on defect detection; the filter 303 is used for generating uniform laser and avoiding the influence of the incidence of laser with other wavelengths on the measurement result; the collimating mirror 304 is used for collimating the light path to reduce the problem of scattered light caused by uneven light distribution of the light source, and improve the detection accuracy; the incident diaphragm 305 is used to adjust the size of the laser spot illuminating the surface of the optical element 200 to be measured, so as to adapt to different optical element sizes.
Further, the reflection detecting section 310 includes a first analyzer 313, a first diaphragm 312, and a first photomultiplier 311, which are sequentially connected in the light propagation direction, and the transmission detecting section 320 includes a second analyzer 323, a second diaphragm 322, and a second photomultiplier 321, which are sequentially connected in the light propagation direction. The first analyzer 313 and the second analyzer 323 interact with the polarizer 302 to detect a specific scattering signal, so that the polarization state of incident light can be removed, and the removal of the surface roughness signal can be realized; the distribution state of the scattered light intensity caused by the defect is directly detected by the first photomultiplier 311 and the second photomultiplier 321, and the size of the detection spot is adjusted by the first diaphragm 312 and the second diaphragm 322. In order to avoid the problem that the first photomultiplier 311 and the second photomultiplier 321 directly detect reflected light and transmitted light and cause defects due to excessive light intensity, a photomultiplier protection program and a circuit design may be correspondingly set. Meanwhile, in order to reduce the influence of stray light on photomultiplier, the lengths of the light receiving ports of the first photomultiplier 311 and the second photomultiplier 321 can be prolonged, and black conductive coatings are coated on the surfaces and inner surfaces of the whole photomultipliers, so that stray light absorption and electromagnetic shielding effects are realized. The light signals detected by the first photomultiplier 311 and the second photomultiplier 321 acquire light intensity signals by means of a data acquisition device, and acquire light scattering signals by means of weak signal processing means.
In the test, the incident light irradiates the surface of the optical element 200 to be tested, a part of the surface is reflected, and a part of the incident light is transmitted through the optical element 200 to be tested, wherein the surface roughness of the optical element 200 to be tested has no influence on the polarization state of the incident light, but the defects and the surface contaminants cause the light scattering state to be changed, the same polarization state as the incident light is removed by the first analyzer 313 and the second analyzer 323, and the light intensity distribution of the polarization state change due to the defects and the surface contaminants is detected.
As shown in fig. 4, according to another aspect of the present invention, there is provided an optical element full-space detection method including the steps of:
s1, starting a light source assembly, adjusting the polarization state of incident light, then placing an optical element 200 to be tested, finally starting a reflection detection assembly 310 and a transmission detection assembly 320, and debugging a first photomultiplier 311 and a second photomultiplier 321;
s2, the light source moving platform is utilized to drive the light source assembly to rotate so as to adjust the incident angle of incident light, and meanwhile, the detector hemispherical moving platform is utilized to drive the reflection detection assembly 310 and the transmission detection assembly 320 to rotate by the same angle so as to collect the light intensity information of the reflected light and the transmitted light;
s3, repeating the step S2 until the incident angle covers the set range so as to finish detection of the current light spot;
s4, driving the optical element 200 to be tested to move a preset distance to the position of the next light spot by using the sample motion platform, and repeating the steps S2 and S3 until the incident light covers the optical element 200 to be tested, and obtaining the surface defect and the pollutant of the optical element 200 to be tested according to the collected light intensity information.
In step S1, the equipment is first debugged before use, and the factors such as the polarization state of the incident light, the diameter of the spot of the incident light, and the defect detection environment are mainly concentrated; after the initial debugging of the device is completed, the laser 301 is started, and the whole device is ensured to enter a stable operation state by stably operating for a period of time under the condition that the constant temperature is free from interference of external noise signals.
Further, in step S2, the initial incident angle of the incident light is set to be 0 °, at this time, the light intensities detected by the first photomultiplier 311 and the second photomultiplier 321 have maximum values, the distribution of the maximum light intensities is detected, a high-low range is set, and high-sensitivity measurement of the defect light intensity signal is realized on the premise of ensuring the safety of the photomultipliers. As shown in fig. 5, it is determined whether the intensity of the detected light intensity signal exceeds the peak light intensity, if yes, the strong light protection is turned on to turn off the light intensity collection, if not, it is determined whether the low gear measuring range is exceeded, if yes, the high gear light intensity collection circuit is turned on, and if not, the low gear light intensity collection circuit is turned on.
In step S3, the surface defect morphology is detected by common detection means such as white light scattering, the detected surface defect morphology is compared with the detected light intensity distribution, and a scattering matrix library is established under the condition that the spatial distribution of the compared defects corresponds to the actual defect morphology, so that the defect morphology is judged by means of the scattering matrix library and the collected light intensity information.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (10)
1. An optical element full-space detection device is characterized by comprising an optical path unit and a mechanical unit, wherein:
the light path unit comprises a light source assembly, a reflection detection assembly (310) and a transmission detection assembly (320), wherein the light source assembly is used for providing incident light to the optical element (200) to be detected so as to generate reflected light and transmitted light; the reflection detection component (310) is arranged on the reflection side of the optical element (200) to be detected and is used for collecting the light intensity information of the reflected light; the transmission detection component (320) is arranged on the transmission side of the optical element (200) to be detected and is used for collecting the light intensity information of the transmitted light;
the mechanical unit comprises a sample motion platform, a light source motion platform and a detector hemispherical motion platform, wherein the sample motion platform is used for fixing an optical element (200) to be detected and driving the optical element to move; the light source moving platform is arranged in front of the sample moving platform and is connected with the light source assembly so as to drive the light source assembly to rotate; the hemispherical detector motion platform is arranged behind the sample motion platform and is connected with the reflection detection assembly (310) and the transmission detection assembly (320) so as to synchronously drive the reflection detection assembly (310) and the transmission detection assembly (320) to move in respective hemispheres, thereby realizing full-space detection of reflected light and transmitted light.
2. The optical element full-space detection device according to claim 1, further comprising a darkroom cover (400), the darkroom cover (400) being disposed outside the optical path unit and the mechanical unit for forming a darkroom environment, and an inner wall of the darkroom cover (400) being provided with a light absorbing structure (401) for absorbing stray light.
3. The optical element full space detection device according to claim 1, wherein the light source assembly comprises a laser (301) and a spot adjusting structure (300) connected in sequence, the laser (301) being configured to generate a laser spot, the spot adjusting structure (300) being configured to adjust the laser spot to form incident light.
4. A full-space optical element detection device according to claim 3, characterized in that the spot-adjusting structure (300) comprises a polarizer (302), a filter (303), a collimator mirror (304) and an entrance diaphragm (305) connected in sequence in the direction of light propagation.
5. The optical element full-space detection device according to claim 1, wherein the reflection detection assembly (310) includes a first analyzer (313), a first diaphragm (312), and a first photomultiplier tube (311) connected in order along a light propagation direction.
6. The optical element full-space detection device according to claim 1, wherein the transmission detection assembly (320) includes a second analyzer (323), a second diaphragm (322), and a second photomultiplier (321) connected in order along a light propagation direction.
7. The optical element full-space detection device according to claim 1, wherein the sample motion platform comprises a sample clamp (104) and a sample XY axis moving structure (107), wherein the sample clamp (104) is used for placing the optical element (200) to be detected, and the sample XY axis moving structure (107) is connected with the sample clamp (104) to drive the optical element (200) to be detected to move along the directions of an X axis and a Y axis, so as to change the irradiation position of incident light.
8. The optical element full-space detection device according to claim 1, wherein the light source moving platform comprises a first supporting rod (102) and a light source C-axis rotating structure (101), wherein the first supporting rod (102) is vertically arranged, the upper end of the first supporting rod is connected with a light source assembly, and the lower end of the first supporting rod is connected with the light source C-axis rotating structure (101); the light source C-axis rotating structure (101) is fixed on the bottom surface and is used for driving the light source assembly to rotate around the Z axis.
9. The full-space optical element detection device according to any one of claims 1 to 8, wherein the hemispherical detector motion platform comprises a second support rod (103), an L-shaped connecting rod (108), a detector B-axis rotation structure (106), a detector C-axis rotation structure (105) and a cross rod (109), wherein the second support rod (103) is vertically fixed on a bottom surface; one end of the L-shaped connecting rod (108) is connected with the second supporting rod (103) through the detector B-axis rotating structure (106), and the other end of the L-shaped connecting rod is connected with the cross rod (109) through the detector C-axis rotating structure (105); one end of the cross bar (109) is connected with an inclined reflection detection component (310), and the other end of the cross bar is connected with a transmission detection component (320).
10. An optical element full-space detection method, characterized in that the method adopts the optical element full-space detection device as claimed in any one of claims 1 to 9, and specifically comprises the following steps:
s1, starting a light source assembly, placing an optical element (200) to be tested, and then starting a reflection detection assembly (310) and a transmission detection assembly (320);
s2, driving a light source assembly to rotate by utilizing a light source moving platform to adjust the incident angle of incident light, and simultaneously driving a reflection detection assembly (310) and a transmission detection assembly (320) to rotate by the same angle by utilizing a detector hemispherical moving platform to acquire light intensity information of the reflected light and the transmitted light;
s3, repeating the step S2 until the incident angle covers the set range, so as to finish the detection of the current light spot;
s4, driving the optical element (200) to be detected to move a preset distance to the position of the next light spot by using the sample motion platform, and repeating the steps S2 and S3 until the incident light covers the optical element (200) to be detected, and obtaining the surface defect and the pollutant of the optical element (200) to be detected according to the collected light intensity information.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311256166.5A CN117309329A (en) | 2023-09-26 | 2023-09-26 | Full-space detection device and method for optical element |
Applications Claiming Priority (1)
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