CN117294169A - Resin ultrasonic actuator excited by symmetrical/antisymmetric bending vibration and application device thereof - Google Patents
Resin ultrasonic actuator excited by symmetrical/antisymmetric bending vibration and application device thereof Download PDFInfo
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- 238000005452 bending Methods 0.000 title claims abstract description 28
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Abstract
The invention provides a symmetrical/antisymmetric bending vibration excited resin ultrasonic actuator and an application device, which excite symmetrical bending vibration to generate longitudinal vibration in a vibrating body through structural design, and generate bending vibration outside the vibrating body through antisymmetric bending vibration, so that the whole volume of the actuator is reduced, the vibration amplitude is enhanced, and the characteristics problems of high weight, low speed and the like of a piezoelectric/ultrasonic actuator with a traditional structure are solved. The load/speed performance and the light weight degree are improved. The control system of the patch type ultrasonic actuator is simple, has high reliability, can be modularly designed according to application scenes, and expands the application range of the ultrasonic actuator.
Description
Technical Field
The invention relates to the field of piezoelectric/ultrasonic actuators, in particular to a resin ultrasonic actuator excited by symmetrical/antisymmetric bending vibration and an application device.
Background
The piezoelectric/ultrasonic actuator is an actuating element which converts electric energy into mechanical energy based on the inverse piezoelectric effect and realizes driving through friction. Compared with the traditional motor and electromagnetic actuator, the piezoelectric/ultrasonic actuator has the advantages of quick response, self-locking in the power-off stage, low power consumption, no electromagnetic radiation, high resolution and the like. In general, piezoelectric/ultrasonic actuators may be excited by a transducer or piezoceramic patch to produce corresponding motion. When the transducer is adopted for excitation, the geometric parameters are difficult to realize larger adjustment due to the influence of the relation between the vibration frequency and the wavelength, the length of the actuator in the vibration propagation direction (wavelength direction) of the transducer is limited, the optimization space of the mass/size is small, and the system integration difficulty is high. When the piezoelectric ceramic patch is adopted for excitation, the piezoelectric ceramic is adhered to the surface of the vibrator, and the system is light in weight, small in size and easy to integrate. In addition, various flexible movements of the actuator can be realized through structural design and modal degeneracy. Therefore, in the intelligent industrial scenes of high precision, high integration and high power density such as optical focusing equipment, robots, aerospace, micromechanics and the like, the patch type piezoelectric/ultrasonic actuator has more remarkable technical advantages and wide application prospect.
In order to meet the use requirements in different scenes, various patch type piezoelectric/ultrasonic actuators are disclosed in the prior art. Chinese patent document CN102437786A proposes a patch type I-shaped quadruped linear ultrasonic motor vibrator, which solves various adverse effects caused by coupled bending vibration existing in the conventional rectangular quadruped linear ultrasonic motor vibrator. The two end surfaces of the vertical beam are respectively provided with an amplitude transformer, the combination position of the two amplitude transformers is the big end surface of the amplitude transformer, the two end surfaces of the horizontal beam are respectively provided with an amplitude transformer, the combination position of the two amplitude transformers is the big end surface of the amplitude transformer, and the vertical beam is fixedly connected with the middle position of the inner side walls of the two horizontal beams through the small end surfaces of the two amplitude transformers at the two ends of the vertical beam; the outer side wall, the upper side wall and the lower side wall of each horizontal beam are respectively provided with a piezoelectric ceramic plate, the inner side wall of each horizontal beam is respectively provided with a piezoelectric ceramic plate at two sides of the amplitude transformer, the upper side wall and the lower side wall of the vertical beam are respectively provided with a piezoelectric ceramic plate, and the inner side wall and the outer side wall of the vertical beam are symmetrically provided with two piezoelectric ceramic plates at two sides of the thin-wall beam. The Chinese patent document CN113572387A proposes a piezoelectric actuator with a tuning fork structure and a working method thereof, wherein the body of the piezoelectric actuator comprises a substrate, a stator and a rotor, the stator comprises a metal elastomer, the metal elastomer is arranged on the substrate, and the metal elastomer is provided with symmetrical cantilever beams which are arc-shaped and face to opposite sides; the two surfaces of the metal elastomer and the two surfaces of the cantilever are respectively bonded with piezoelectric ceramic plates; has the characteristics of high precision, low noise, small structure and the like. In addition, the disc-shaped structure rotary linear motor and the patch-type rotary dual-drive piezoelectric actuator proposed in the Chinese patent documents CN103856099A and CN111181439A can also realize the actuation purposes of the piezoelectric/ultrasonic actuator body or the belt-loaded movement and the like.
However, in terms of driving principle, piezoelectric/ultrasonic actuators designed using a combination of flexural vibration and flexural/longitudinal vibration modes are conventionally used. Due to the characteristic limitations of the structure and weak electromechanical coupling, and the like, the actuator has a complex structure, large volume and difficult modal degeneracy, so that the actuator has poor controllability, low moving speed and insufficient application scene. The torsional vibration mode of the piezoelectric/ultrasonic actuator adopting torsional vibration is not easy to excite, the vibration speed is low, and the performance of the actuator is seriously affected. In addition, the traditional piezoelectric/ultrasonic actuator mostly adopts a single vibrator configuration, and the integral structural design of coupling of a plurality of vibration modes is realized through frequency degeneracy. Because a plurality of vibration modes are strongly coupled, structural parameters such as geometric dimension and the like are adjusted to influence a plurality of modes at the same time, so that the frequency degeneracy of the vibrator is difficult, and the design difficulty is high.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention aims to provide a resin ultrasonic actuator excited by symmetrical/antisymmetric bending vibration and an application device; compared with a piezoelectric actuator, the ultrasonic actuator provided by the invention has the advantages that the ultrasonic actuator generally works in a resonance state, and the higher working frequency increases the friction between the sole of the ultrasonic actuator and the ground, so that the moving speed, the driving force and the like of the actuator are improved.
In order to achieve the above object, the present invention is realized by the following technical scheme:
in a first aspect, an embodiment of the present invention provides a symmetrical/antisymmetric flexural vibration excited resin ultrasonic actuator, including a vibrator, a longitudinally vibrating piezoelectric ceramic plate; the vibrating body consists of an external vibrating body and an internal vibrating body, the internal vibrating body is arranged inside the external vibrating body, the external vibrating body and the internal vibrating body are symmetrical about a central plane respectively, and the tops of the external vibrating body and the internal vibrating body are level; the bottom of the inner vibrating body is a set distance from the bottom of the outer vibrating body, an inner driving foot is arranged at the bottom of the inner vibrating body, an outer driving foot is arranged at the bottom of the outer vibrating body, the inner driving foot penetrates through the outer vibrating body, and the inner driving foot and the outer driving foot are simultaneously contacted with the ground; four longitudinal vibration piezoelectric ceramic plates I with the same specification are stuck on two surfaces of the outer side of the external vibrating body; four longitudinal vibration piezoelectric ceramic plates II with the same specification are stuck on the two surfaces of the outer side of the internal vibration, and the longitudinal vibration piezoelectric ceramic plates I and II are polarized along the thickness direction.
As a further technical scheme, the left outer side face of the external vibrator is stuck with two longitudinal vibration piezoelectric ceramic plates I up and down, and the right outer side of the external vibrator is stuck with two longitudinal vibration piezoelectric ceramic plates I up and down.
As a further technical scheme, the left outer side face of the external vibrator is stuck with two longitudinal vibration piezoelectric ceramic plates II up and down, and the right outer side of the external vibrator is stuck with two longitudinal vibration piezoelectric ceramic plates II up and down.
As a further technical scheme, the internal vibrating body is a rectangular vibrating body.
As a further technical scheme, the external vibrating body is also a rectangular vibrating body, the bottom of the external vibrating body is also provided with a rectangular notch, and the internal driving foot penetrates through the rectangular notch to be in contact with the ground.
As a further technical scheme, the internal vibrator and the external vibrator adopt polyphenylene sulfide material as a vibration matrix.
As a further technical scheme, the tops of the external vibrator and the internal vibrator are connected with the actuator control board.
As a further technical scheme, the external driving foot and the internal driving foot are both in triangular prism structures.
In a second aspect, the invention also provides an application device of the resin ultrasonic actuator excited by symmetrical/antisymmetric bending vibration based on the resin ultrasonic actuator excited by symmetrical/antisymmetric bending vibration, which comprises two actuators, wherein the tops of the two actuators are connected with an actuator control board.
As a further technical scheme, the two actuators are symmetrically arranged at the bottom of the actuator control plate.
The beneficial effects of the embodiment of the invention are as follows:
the vibrating body of the patch type ultrasonic actuator excited by the symmetrical/antisymmetric flexural vibration consists of an external vibrating body and an internal vibrating body, wherein the internal vibrating body is arranged inside the external vibrating body, the external vibrating body and the internal vibrating body are respectively symmetrical about a central plane, and the tops of the external vibrating body and the internal vibrating body are level; the bottom of the inner vibrating body is a set distance from the bottom of the outer vibrating body, an inner driving foot is arranged at the bottom of the inner vibrating body, an outer driving foot is arranged at the bottom of the outer vibrating body, the inner driving foot penetrates through the outer vibrating body, and the inner driving foot and the outer driving foot are simultaneously contacted with the ground; four longitudinal vibration piezoelectric ceramic plates I with the same specification are stuck on two surfaces of the outer side of the external vibrating body; the two surfaces of the outer side of the internal vibration are stuck with 4 longitudinal vibration piezoelectric ceramic plates II with the same specification, and the longitudinal vibration piezoelectric ceramic plates I and II are polarized along the thickness direction; the structure excites symmetrical bending vibration to generate longitudinal vibration in the vibration body, and generates bending vibration outside the vibration body through anti-symmetrical bending vibration, so that the whole volume of the actuator is reduced, the vibration amplitude is enhanced, and the characteristic problems of high weight, low speed and the like of the piezoelectric/ultrasonic actuator with the traditional structure are solved; the load/speed performance and the light weight degree are improved. The control system of the patch type ultrasonic actuator is simple, has high reliability, can be modularly designed according to application scenes, and expands the application range of the ultrasonic actuator.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention.
FIG. 1 is a schematic view of the overall structure of the present invention;
FIGS. 2 (a) and 2 (b) are schematic views of the symmetric/anti-symmetric vibration modes of the present invention;
FIG. 3 is a practical example of an actuator assembly of the present invention;
in the figure: 1: a vibrator; 11: an external vibrator; 12: an internal vibrator; 111: an external drive foot; 112: a rectangular notch; 121: an internal drive foot; 2: longitudinally vibrating the piezoelectric ceramic plate; 3: an actuator control board; 4: a first actuator; 5: an actuator control board; 6: and a second actuator.
Detailed Description
It should be noted that the following detailed description is illustrative and is intended to provide further explanation of the invention. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the present invention. As used herein, the singular forms also are intended to include the plural forms unless the present invention clearly dictates otherwise, and furthermore, it should be understood that when the terms "comprise" and/or "include" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof;
aiming at the problems that the speed/load performance and the light weight degree of the piezoelectric/ultrasonic actuator which is designed by taking metal and ceramic materials as matrixes are limited due to the characteristics of high density, low amplitude and the like, the weight of the actuator is large, the moving speed is low, and the application scene is insufficient; in addition, the traditional scheme of adopting torsional vibration and tensile vibration as driving modes has the characteristics of larger structural volume and large excitation difficulty, and the performance parameters of the actuator are limited to a certain extent. The embodiment provides a resin ultrasonic actuator excited by symmetrical/antisymmetric bending vibration, and the difference between the ultrasonic actuator and the piezoelectric actuator comprises: 1. the operating frequency range of the ultrasonic actuator is generally larger than 20kHz (the invention relates to the ultrasonic actuator with the operating frequency of 21.65 kHz), and the operating frequency of the piezoelectric driver is relatively low; the ultrasonic actuator generally works in a resonance state, compared with the piezoelectric actuator, the higher working frequency enables the friction between the sole of the ultrasonic actuator and the ground to be increased, and the moving speed, the driving force and the like of the actuator are improved.
Example 1
In a typical embodiment of the present invention, as shown in fig. 1, the symmetric/antisymmetric bending vibration excited patch type ultrasonic actuator shown in the present example comprises a vibrator 1, a longitudinal vibration piezoelectric ceramic plate 2, and an actuator control board 3; the vibrator 1 is composed of an external vibrator 11 and an internal vibrator 12, and the external vibrator 11 and the internal vibrator 12 are symmetrical about a central plane, respectively; the inner vibrator 12 is a rectangular vibrator, the outer vibrator 11 is also a rectangular vibrator, the inner vibrator 12 is arranged inside the outer vibrator 11, the tops of the outer vibrator 11 and the inner vibrator 12 are level, and the outer vibrator 11 and the inner vibrator 12 are connected with the same actuator control board 3; the bottom of the inner vibrating body 12 is a set distance from the bottom of the outer vibrating body 11, an inner driving foot 121 is arranged at the bottom of the inner vibrating body 12, an outer driving foot 111 is arranged at the bottom of the outer vibrating body 11, a rectangular notch 112 is further designed at the bottom of the outer vibrating body 11, the inner driving foot 121 at the bottom of the inner vibrating body 12 penetrates through the rectangular notch 112, and the inner driving foot 121 and the outer driving foot 111 are simultaneously contacted with the ground.
Further, four longitudinal vibration piezoelectric ceramic plates 2 of the same specification are adhered to the two outer surfaces of the external vibrator 11 through a coupling agent (two longitudinal vibration piezoelectric ceramic plates 2 are arranged on the left outer side surface of the external vibrator 11, two longitudinal vibration piezoelectric ceramic plates 2 are arranged on the right outer side surface of the external vibrator 11, and the longitudinal vibration piezoelectric ceramic plates 2 on the left and right outer side surfaces are arranged in the same position); four longitudinal vibration piezoelectric ceramic plates 2 with the same specification are also distributed on two surfaces outside the internal vibrating body 12 (two longitudinal vibration piezoelectric ceramic plates 2 are arranged on the left outer side surface of the external vibrating body 11 up and down, two longitudinal vibration piezoelectric ceramic plates 2 are arranged on the right outer side surface of the external vibrating body 11 up and down, the longitudinal vibration piezoelectric ceramic plates 2 on the left outer side surface and the right outer side surface are arranged in the same position), the specifications of eight longitudinal vibration piezoelectric ceramic plates 2 are completely the same, and the eight longitudinal vibration piezoelectric ceramic plates 2 are polarized along the thickness direction; wherein the piezoelectric ceramic plates are arranged in such a manner as to effectively excite the symmetrical/antisymmetric flexural vibration of the vibrator 1.
Further, when an alternating voltage with the frequency of 21.65kHz is applied to the longitudinally vibrating piezoelectric ceramic plate 2 of the external vibrator 11, displacement periodically varying with the amplitude of the voltage is generated in the polarization direction by the longitudinally vibrating piezoelectric ceramic plate 2 according to the piezoelectric effect, and the external vibrator 11 resonates under the excitation of the displacement, and the vibration mode thereof is represented by a homodromous bending (antisymmetric bending); similarly, when an ac voltage of the same frequency is applied to the longitudinally vibrating piezoelectric ceramic plate attached to the surface of the internal vibrating body 12, the internal vibrating body 12 generates a reverse bending (symmetrical bending) upon excitation of the longitudinally vibrating piezoelectric ceramic plate. By adjusting the voltage and frequency, the vibration speeds, maximum displacements, and the like of the external vibrator 11 and the internal vibrator 12 can be controlled. By adjusting the phases of the voltages applied to the external vibrator 11 and the internal vibrator 12, the movement sequence of the external vibrator 11 and the internal vibrator 12 can be adjusted. That is, the motion time sequence of the external driving foot 111 and the internal driving foot 121 is controlled by the phase difference between the two voltages, so that the elliptical motion of the equivalent ultrasonic motor is achieved, and the self-body is driven to move along the friction force direction.
It is further required that the voltages of the external vibrator 11 and the internal vibrator 12 are applied simultaneously, but there is a phase difference between the voltages, which affects the timing at which the external vibrator 11 and the internal vibrator 12 resonate (bend deformation). When the phase difference is adjusted (when the vibration time sequence changes), the foot end of the actuator can be overlapped with equivalent multiple motion tracks. However, generally, an elliptical trajectory with a phase difference of pi/2 is used, which is more beneficial to realizing rapid and heavy-duty movement of the actuator.
Further, the outer driving leg 111 at the bottom of the outer vibrator 11 and the inner driving leg 121 at the bottom of the inner vibrator 12 are both triangular prisms, which is advantageous for increasing the driving leg-ground contact area and friction. And the outer driving foot 111 is integrally formed with the outer vibrator 11, and the inner driving foot 121 is adhered to the inner vibrator 12 by a coupling agent. When the same-amplitude opposite-phase excitation voltages are applied to the piezoelectric ceramic plates on both sides of the external vibrator 11, the external vibrator 11 can be excited to perform anti-symmetrical bending vibration, so that the external vibrator can swing back and forth. When excitation voltages of the same amplitude and the same phase are applied to the piezoelectric ceramic plates on both sides of the internal vibrating body 12, symmetrical vibration is excited on the internal vibrating body 12, and the internal vibrating body swings up and down. When the voltage phase difference of the piezoelectric ceramic plates at the two sides of the external vibration body 11 and the internal vibration body 12 meets + -pi/2, the vibration body 1 generates mixed resonance, and the internal and external driving feet alternately pedal the ground, so that the actuator moves along the anti-symmetrical bending vibration direction. In addition, the moving speed and direction of the actuator can be adjusted by adjusting the amplitude and the phase of the exciting voltage. The actuator control board 3 can convert the power supply signal into a control signal required for driving, thereby controlling the vibrator to realize desired movements such as forward, backward, speed change, etc.
Further, the vibration base materials commonly used for piezoelectric/ultrasonic actuators include metals (aluminum alloys, stainless steel, etc.), ceramics (such as alumina, silicon carbide, and aluminum nitride), polymers (polyphenylene sulfide), and the like. The common metal vibration matrix materials such as aluminum alloy, stainless steel and the like have the advantages of low cost, convenience in processing and the like, but the metal piezoelectric/ultrasonic actuator has small vibration displacement and low vibration speed, and meanwhile, the weight reduction is difficult to realize. Fine ceramics such as alumina can produce a large mechanical output at a low voltage, but the brittleness of the material is high, which makes it difficult to manufacture and use it for manufacturing a vibrator having a complicated structure. However, polymer materials such as resin have the characteristics of low density, easy processing, low cost and the like, but most polymers have lower rigidity and larger vibration mechanical loss. In particular, the polyphenylene sulfide as a novel anisotropic high-performance thermoplastic resin material has the advantages of low density, high mechanical strength, good thermal stability and the like. Therefore, in this embodiment, polyphenylene sulfide is used as the matrix material of the external vibrator 11, the internal vibrator 12, the external driving leg 111 and the internal driving leg 121, so that the problems of small vibration displacement, large mechanical loss and the like of the matrix of the actuator made of metal, ceramic and common polymer materials can be solved, and the quick movement, the light weight and the wide application of multiple scenes of the actuator can be realized.
In this regard, this embodiment provides a patch type ultrasonic actuator using polyphenylene sulfide (Polyphenylene sulfide, PPS) material as a vibration matrix and excited by a symmetrical/antisymmetric flexural vibration method and a driving method thereof. The actuator is based on 24X 10X 46mm 3 The prototype of the model number can realize the bidirectional movement of the actuator along the length direction and has certain movement capability of crossing a discontinuous road surface (the gap is less than or equal to 20 mm). When the voltage is 400V and the working frequency is 21.65kHz, the maximum 0.6m/s idle speed and 0.22m/s load speed (300 g, about 11.9 times of self weight of the body) of the actuator can be realized, and the moving performance of most traditional patch type resonance actuators can be exceeded.
As shown in fig. 2 (a) and fig. 2 (b), the vibration mode of the patch type ultrasonic actuator in this example is shown in the figure. Fig. 2 (a) shows an anti-symmetric vibration mode of the external vibrator 11, and fig. 2 (b) shows a symmetric vibration mode of the internal vibrator 12; the two modes are mutually independent, and when the system works at the resonance frequency, the piezoelectric ceramic plates at corresponding positions are independently excited.
Example 2
As shown in fig. 3, this embodiment proposes an application device of a symmetric/anti-symmetric bending vibration excited patch type ultrasonic actuator, which can be used in pairs by a single combination. As one of the simplest forms (the number of actuators is two), the individual speed control of the actuators can be achieved by controlling the amplitude and phase of the excitation voltage of the first actuator 4 and the second actuator 6. Furthermore, based on the differential principle, the motion of forward and backward movement, rotation around the center and the like of the actuator assembly can be realized.
The mode of the symmetrical/antisymmetric vibration combination mode is simple and easy to excite, and the vibration speed is high, so that the speed/load performance of the actuator is improved. And the vibration modes of the split structure are relatively independent, and the mode degeneracy can be realized rapidly by independently adjusting the structural parameters. Furthermore, the vibration performance of each mode obtained by the split structure can be fully utilized, and the actuator is beneficial to realizing high controllability and quick movement.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The resin ultrasonic actuator excited by symmetrical/antisymmetric flexural vibration is characterized by comprising a vibrator and a longitudinal vibration piezoelectric ceramic plate; the vibrating body consists of an external vibrating body and an internal vibrating body, the internal vibrating body is arranged inside the external vibrating body, the external vibrating body and the internal vibrating body are symmetrical about a central plane respectively, and the tops of the external vibrating body and the internal vibrating body are level; the bottom of the inner vibrating body is a set distance from the bottom of the outer vibrating body, an inner driving foot is arranged at the bottom of the inner vibrating body, an outer driving foot is arranged at the bottom of the outer vibrating body, the inner driving foot penetrates through the outer vibrating body, and the inner driving foot and the outer driving foot are simultaneously contacted with the ground; four longitudinal vibration piezoelectric ceramic plates I with the same specification are stuck on two surfaces of the outer side of the external vibrating body; four longitudinal vibration piezoelectric ceramic plates II with the same specification are stuck on the two surfaces of the outer side of the internal vibration, and the longitudinal vibration piezoelectric ceramic plates I and II are polarized along the thickness direction.
2. The resin ultrasonic actuator excited by the symmetrical/antisymmetric flexural vibration as claimed in claim 1, wherein the left outer side surface of the external vibrator is stuck with two longitudinal vibration piezoelectric ceramic plates one above the other, and the right outer side surface of the external vibrator is stuck with two longitudinal vibration piezoelectric ceramic plates one above the other.
3. The resin ultrasonic actuator excited by the symmetrical/antisymmetric flexural vibration as claimed in claim 1, wherein two longitudinal vibration piezoelectric ceramic plates two are stuck up and down on the left outer side surface of the external vibration body, and two longitudinal vibration piezoelectric ceramic plates two are stuck up and down on the right outer side surface of the external vibration body.
4. The symmetrical/asymmetrical bending vibration activated resin ultrasonic actuator as claimed in claim 1, wherein said internal vibrating body is a rectangular vibrating body.
5. The resin ultrasonic actuator excited by the symmetrical/antisymmetric flexural vibration as claimed in claim 1, wherein said external vibrating body is also a rectangular vibrating body, and the bottom of the external vibrating body is further provided with a rectangular notch, and the internal driving foot passes through said rectangular notch to contact with the ground.
6. The resin ultrasonic actuator excited by the symmetrical/antisymmetric bending vibration as claimed in claim 1, wherein the internal vibrator and the external vibrator adopt polyphenylene sulfide materials as vibration matrixes.
7. The resin ultrasonic actuator excited by the symmetrical/antisymmetric bending vibration as claimed in claim 1, wherein the external driving foot and the internal driving foot are both in a triangular prism structure.
8. The symmetrical/antisymmetric bending vibration excited resin ultrasonic actuator of claim 1, wherein the top of the external and internal vibrators are connected to an actuator control board.
9. The application device for a symmetrical/antisymmetric bending vibration excited resin ultrasonic actuator as claimed in any one of claims 1 to 7, comprising two of said actuators, the tops of the two actuators being connected to an actuator control board.
10. The application apparatus of claim 9 wherein two of said actuators are symmetrically disposed on the bottom of the actuator control plate.
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| CN202311288341.9A CN117294169A (en) | 2023-09-28 | 2023-09-28 | Resin ultrasonic actuator excited by symmetrical/antisymmetric bending vibration and application device thereof |
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| CN202311288341.9A CN117294169A (en) | 2023-09-28 | 2023-09-28 | Resin ultrasonic actuator excited by symmetrical/antisymmetric bending vibration and application device thereof |
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