CN117287541A - Adjustable pressure stabilizing valve, assembling method thereof and semiconductor manufacturing equipment - Google Patents
Adjustable pressure stabilizing valve, assembling method thereof and semiconductor manufacturing equipment Download PDFInfo
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- CN117287541A CN117287541A CN202311583546.XA CN202311583546A CN117287541A CN 117287541 A CN117287541 A CN 117287541A CN 202311583546 A CN202311583546 A CN 202311583546A CN 117287541 A CN117287541 A CN 117287541A
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- 230000000087 stabilizing effect Effects 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title claims description 26
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 239000004065 semiconductor Substances 0.000 title claims description 15
- 239000012530 fluid Substances 0.000 claims abstract description 203
- 230000001603 reducing effect Effects 0.000 claims abstract description 94
- 239000000725 suspension Substances 0.000 claims abstract description 44
- 239000012528 membrane Substances 0.000 claims abstract description 30
- 238000007789 sealing Methods 0.000 claims abstract description 20
- 238000007667 floating Methods 0.000 claims description 45
- 230000003247 decreasing effect Effects 0.000 claims description 33
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- 230000008569 process Effects 0.000 claims description 10
- 230000007423 decrease Effects 0.000 claims description 8
- 230000009467 reduction Effects 0.000 claims description 8
- 230000006837 decompression Effects 0.000 claims description 7
- 230000000630 rising effect Effects 0.000 claims description 6
- 230000002829 reductive effect Effects 0.000 abstract description 19
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
- F16K17/20—Excess-flow valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Control Of Fluid Pressure (AREA)
- Safety Valves (AREA)
Abstract
Relates to an adjustable pressure stabilizing valve, which comprises a main body valve, a driving valve film for adjusting downward air pressure, a non-connecting suspension valve rod and an elastic element for providing upward fixed elastic force. The main valve is internally provided with a closed valve port and a notch ring positioned above the closed valve port. The driving valve membrane has a self-balancing valve head aligned to fit the notch ring. The valve rod is provided with a pressure reducing valve head capable of sealing the closed valve port, an upper guide pillar arranged on the pressure reducing valve head, a diaphragm arranged under the pressure reducing valve head and a lower guide pillar arranged under the diaphragm. When the fluctuation of the fluid input pressure is incremental, the self-balancing valve head automatically moves upwards slightly so as to reduce the opening of the pressure reducing valve head; when the fluctuation of the input pressure from the fluid is reduced, the self-balancing valve head automatically moves down slightly so as to enlarge the opening degree of the pressure reducing valve head. Examples of the invention feature an incremental rate of fluctuation of the fluid pressure of the output flow path that stabilizes within 0% to 10% or a decremental rate of fluctuation that stabilizes within-10% to 0% over a ten-fold reduced pressure range to provide a stable fluid output pressure.
Description
Technical Field
The invention relates to the technical field of key components in manufacturing equipment of an electric element assembly, in particular to an adjustable pressure stabilizing valve, an assembling method for manufacturing the adjustable pressure stabilizing valve and semiconductor manufacturing equipment, wherein one specific application is to realize domestic self-control of the semiconductor manufacturing equipment.
Background
One of the main uses of diaphragm valves is in particular for the opening and closing of media fluid transfer, but there are also other uses of diaphragm valves, such as pressure reducing valves, for reducing the pressure of the output fluid. However, pressure fluctuations in the input fluid to the pressure relief valve often affect the pressure of the output fluid, and sometimes the fluctuation in the fluid pressure is not acceptable for semiconductor manufacturing processes or precision manufacturing. In the semiconductor manufacturing process, more strict requirements are placed on the pressure stability, the flow precise adjustment and the corrosion resistance of the valve body of the working fluid, and if the fluid pressure of the leading-in device is sensitively subjected to fluctuation change of the pressure of the input fluid, the fluid input supply quantity and the fluid speed have fluctuation change, which is unfavorable for the quality control of precise production of semiconductor manufacturing.
The existing pressure reducing valve has various structures and corresponding systems, and the invention publication No. CN1806216A discloses a relative pressure control system and a relative flow control system, which can correctly adjust the partial pressure ratio of the working gas by a simple pressure reducing valve structure and can truly extract the working gas from the working gas supply pipeline in emergency. The control device comprises a plurality of normally open pneumatic valves connected to a working gas supply line to which a working gas is supplied, pressure sensors connected in series to the detected pneumatic valves, respectively, for detecting the pressure outputted from the pneumatic valves, a controller for controlling the operating pressure of the pneumatic valves based on the pressure detected by the pressure sensors, and a hard-interlock solenoid valve for associating at least one of the plurality of pneumatic valves to be opened at a constant time, wherein the opening degree of a pneumatic valve given from the plurality of pneumatic valves is adjusted, and the working gas is outputted at a predetermined partial pressure ratio. It can be seen that the pressure reducing valve system under the related art concept needs to monitor the gas pressures of the plurality of pneumatic valves in real time, that is, the valve opening of the pressure reducing valve is controlled by external driving air pressure or mechanical mode, a corresponding external driving assembly is needed, and the pressure reducing effect has hysteresis (the degree of abnormality of the fluid pressure needs to be determined first to determine the adjustment amplitude of the pressure reducing valve), which is an inherent technical thought in the art.
In addition, in the utility model patent number CN201934677U, a more specific structure of a pressure reducing valve is proposed, which has the following mechanical structures, including a valve body, a valve cover, a membrane, an adjusting screw, an adjusting spring, a spring pressing block, a spring cushion block, a pressing sleeve, a valve clack assembly, a return spring and a screw plug, wherein the valve clack assembly mainly comprises a valve clack, a push rod and a sealing element which are arranged on the valve clack, a stepped mounting hole is formed in the valve clack, one end of the mounting hole is used for mounting the push rod, the other end of the mounting hole is used for mounting the return spring, an axial blind hole is formed in the bottom of the push rod, and a plurality of radial backflow through holes are uniformly formed in the inner wall of the bottom of the blind hole. The diaphragm is a modified rubber diaphragm, and has the effect of reducing impact when the valve is opened, so that the pressure in the valve is stable. The two sides of the valve body are provided with pressure gauge interfaces. And washers are respectively arranged on the ejector rod and the valve clack. When the pressure reducing valve is closed, if the medium at the outlet flows back, the medium flows into the bottom of the valve clack through the through hole on the ejector rod, and the valve clack assembly can return in an accelerating way under the action of liquid pressure and can seal the pressure reducing valve better. The adjusting screw of the related prior art obviously belongs to an external driving component, and the opening height of the valve clack component can be changed by rotating the adjusting screw so as to adjust the passing medium flow to reach a required pressure value, namely the valve opening of the pressure reducing valve can not be changed without rotating the adjusting screw. Thus, the external driving is again verified as an inherent thinking in the technical field of pressure reducing valves.
In addition, the invention patent publication number CN104728488A proposes a kind of pipeline steady voltage valve, mainly made up of valve block, valve clack, valve bonnet, spring, adjusting screw, diaphragm, valve stem and valve seat, the diaphragm is equipped with between valve block and valve bonnet, form the valve pocket between valve bonnet and the diaphragm, there is a spring in the valve pocket, the spring upper portion is equipped with the spring stopper, the spring seat is equipped with in the inferior part of the spring, one end of adjusting screw extends into the valve pocket and contradicts with the spring stopper, adjusting screw cooperates with the valve bonnet screw thread, the spring seat contradicts with the diaphragm, the said valve clack is set up in the valve block, still there is valve seat in the valve block, the valve seat can be sealed with the lower end of the valve clack, the valve clack is limited by the valve stem, the valve stem is set up perpendicularly, pass the valve clack by the valve stem above the locating ring, the inferior extremity of the valve clack contradicts with the locating ring. The simple structure under the prior art provides the concept of pressure stabilizing effect, and the pressure stabilizing device can be directly arranged on a pipeline to stabilize the outlet pressure, so that the effects of pressure reduction, isobaric pressure stabilization and pressure stabilization are realized. However, there is no specific mechanism description of pressure stabilization, the adjusting screw uses the spring to adjust the opening of the valve, and from the structural diagram, it can be reasonably deduced by related technicians that when the input fluid pressure instantaneously fluctuates, the spring is elastically contracted by the fluid thrust, the opening of the valve actually changes to be larger, the input fluid pressure increases and the opening of the valve increases, and the output fluid pressure passing through the pipeline pressure stabilizing valve also obviously increases at the fluctuation moment of the input pressure, so that the current pressure stabilizing mechanism cannot well meet the actual industrial requirements.
Disclosure of Invention
There is currently no investigation of the adverse effect on the output of the pressure relief valve under momentary fluctuations in the external input fluid pressure. Therefore, a primary objective of the present invention is to provide an adjustable pressure stabilizing valve, which is mainly developed to solve the problem that the pressure of the fluid supply is easily affected by the pressure of the external input fluid due to the excessive decreasing/increasing fluctuation rate of the conventional pressure reducing valve. In addition, the defect that particles and ions are separated out in the use of the traditional pressure reducing valve is overcome. The invention provides a dynamic self-regulating balance concept of a pressure reducing valve, namely, the pressure reducing valve can synchronously and self-regulate dynamic balance at the moment of fluctuation of external input fluid pressure.
The second main object of the present invention is to provide a semiconductor manufacturing apparatus, which can significantly reduce the influence of external input fluid pressure fluctuation on the stable supply of valve output fluid pressure to the liquid-using unit of the apparatus.
The invention provides an assembling method of an adjustable pressure stabilizing valve, which realizes the non-connection internal installation of a non-connection suspension valve rod.
The main purpose of the invention is realized by the following technical scheme:
an adjustable pressure stabilizing valve is provided, comprising:
The main body valve is internally provided with an input flow channel, an output flow channel, a closed valve port communicated with the input flow channel and the output flow channel and a notch ring positioned above the closed valve port, and the bottom of the main body valve is provided with an elastic element;
the driving valve film is arranged at the top of the main body valve and is used for separating a top air pressure cavity and a flow passage space from top to bottom, and the driving valve film is provided with a self-balancing valve head which is aligned and matched with the notch ring;
a non-connected suspended valve rod, which is provided with a pressure reducing valve head capable of sealing the closed valve port, an upper guide post arranged on the pressure reducing valve head, a diaphragm arranged below the pressure reducing valve head and a lower guide post positioned below the diaphragm, wherein the upper guide post only contacts the self-balancing valve head of the driving valve film so as to receive the downward pushing gas pressure of the driving valve film, and the lower guide post receives the upward pushing elastic force of the elastic element; when the fluid pressure fluctuation from the input flow channel is incremental and partially acts on the self-balancing valve head, the self-balancing valve head automatically moves upwards slightly so as to reduce the opening degree of the pressure reducing valve head; when the fluid pressure fluctuation from the input flow channel is decreasing and partially acts on the self-balancing valve head, the self-balancing valve head automatically moves down slightly so as to enlarge the opening degree of the pressure reducing valve head; in the ten-fold decompression range, the fluid pressure of the output flow channel is stabilized at an increasing fluctuation rate within 0-10% or at a decreasing fluctuation rate within-10-0%.
The principle of implementation of this example of basic structure is that, with the longitudinal combination of the non-connected suspended valve stem, the driving valve membrane for constructing an adjustable set downward air pressure and the elastic element for providing an upward fixed elastic force, the self-balancing valve head of the driving valve membrane is aligned to be adapted to the notch ring of the main body valve, the pressure reducing valve head of the non-connected suspended valve stem is suspended in the flow channel space, and the opening of the pressure reducing valve head at the closed valve port can be dynamically and mechanically self-adjusted for generating a stable pressure reducing effect. That is, when the fluid pressure fluctuation from the input flow passage is incremental and partially acts on the self-balancing valve head, the self-balancing valve head automatically moves slightly upwards to reduce the opening of the pressure reducing valve head, so as to generate stable output fluid pressure with incremental input pressure under mutual compensation according to the incremental input fluid pressure; when the fluid pressure fluctuation from the input flow channel is decreasing and partially acts on the self-balancing valve head, the self-balancing valve head automatically moves down slightly to enlarge the opening of the pressure reducing valve head, so that stable output fluid pressure decreasing in input pressure is generated under mutual compensation according to the decreasing of the input fluid pressure, no matter the positive pressure fluctuation or the negative pressure fluctuation of the input end, the adjustable pressure stabilizing valve can stabilize the output fluid pressure in a mechanical automatic self-dynamic regulation mode, the effects of low fluctuation and quick self-regulation of the output fluid pressure are achieved, the protection effect of constant and stable fluid pressure is achieved, the opening is not required to be regulated in real time in an electromagnetic or power-consuming mode, or the energy consumption required by the real-time monitoring frequency and the valve opening regulation can be reduced.
The present invention may be further configured in a preferred example such that the diameter of the self-balancing valve head is greater than the diameter of the pressure reducing valve head such that the fluid pressure of the output flow passage is stabilized with an incremental fluctuation rate within 0% to 5% or a decremental fluctuation rate within-5% to 0% in particular over an eight-fold pressure reducing range.
By adopting the preferable technical characteristics of the structure, the self-balancing valve head is utilized to distinguish the diameter of the self-balancing valve head from the diameter of the pressure reducing valve head, the self-balancing valve head can sense the fluctuation of the fluid pressure from the input flow channel to carry out self-adjustment, the pressure reducing valve head is additionally connected with the self-balancing valve head, and the fluid pressure of the output flow channel has more stable increasing fluctuation rate and decreasing fluctuation rate within the range of eight times of pressure reduction.
The present invention may be further configured in a preferred example, that the regulator valve further includes: the floating adjusting seat is arranged on the elastic element and is in elastic contact with the lower guide post, and is used for transmitting the rising elastic force of the elastic element to the non-connected suspension valve rod; the upper surface of the floating adjusting seat is provided with a guide hole so as to elastically contact the bottom end of the lower guide post; the guide hole is provided with an inner R angle, the bottom end of the lower guide post is provided with an outer R angle, and the inner R angle is larger than the outer R angle, so that the axial direction of the lower guide post is aligned and the floating adjusting seat is separated from the lower guide post conveniently.
Through adopting the preferable technical characteristics of above-mentioned structure, utilize the structure and the relation of connection of floating adjustment seat, floating adjustment seat can be fine bear the upward elasticity of elastic component to as the intermediary commentaries on classics application of force in the non-connection hangs the standing valve rod, so that the relief pressure valve head moves towards the direction that the aperture reduces, makes the relief pressure range grow. Preferably, the inner R angle of the guide hole of the floating adjusting seat is utilized to be different from the outer R angle of the bottom end of the lower guide pillar of the non-connecting suspension valve rod, the non-connecting suspension valve rod is deformed by external force, the shaft orientation of the lower guide pillar is preferentially changed, large stress is not directly generated at the joint of the upper guide pillar and the self-balancing valve head, after the elimination or reduction of the external force is suddenly added, the lower guide pillar is guided by the floating adjusting seat based on the difference between the inner R angle and the outer R angle, and the lower guide pillar can be gradually reset to the shaft orientation, so that the joint between the upper guide pillar of the non-connecting suspension valve rod and the self-balancing valve head does not need fixed mechanical connection, and is not easy to incline or fall off.
The present invention may be further configured in a preferred example, wherein the relief valve head has an inverted conical slope to reduce side flow impact of the input fluid on the non-connected depending valve stem.
By adopting the preferable technical characteristics of the structure, the inverted cone inclined plane of the pressure reducing valve head is utilized, the shaking of the lower guide post is reduced under the fluctuation of the input fluid pressure, meanwhile, the direct up-and-down force applied to the pressure reducing valve head by the fluctuation of the input fluid pressure is avoided, the acting force to the pressure reducing valve head by the fluctuation of the input fluid pressure can be delayed, and the opening degree of the pressure reducing valve head can be sharply adjusted due to the fluctuation of the output fluid pressure.
The invention may further be configured in a preferred example in which the bottom of the floating adjustment seat extends with an adjustment ball end that nests within the resilient element.
By adopting the preferable technical characteristics of the structure, the adjusting ball end of the floating adjusting seat is utilized, so that the floating adjusting seat can axially slide in the bottom elastic chamber of the main body valve with margin, and the axial guide of the lower guide post is realized. The outer R angle of the adjusting ball end and the bottom end of the lower guide post is of a double reciprocating bendable and resettable structure so as to absorb pressure fluctuation of an input flow channel, so that the phenomenon that the connecting point between the top end of the upper guide post and the self-balancing valve head is directly acted is avoided, and the phenomenon that the non-connecting suspension valve rod cannot be reset automatically after being bent is avoided.
The present invention may be further configured in a preferred example, that the top end of the upper guide post is tightly fitted to the shaft hole of the self-balancing valve head; when the elastic element lifts the non-connected depending valve stem to its highest point, the relief valve head closes the closed valve port, while the self-balancing valve head is insufficient to disengage the split ring.
Through adopting the preferred technical characteristics of above-mentioned structure, utilize the upper guide pillar with the relation of combining of self-balancing valve head and the shape design of non-connection suspension valve rod, with the condition that the relief pressure valve head seals airtight valve port is defined as the non-connection suspension valve rod rises to the top dead center of highest point, self-balancing valve head still can not break away from the notch ring, so the notch ring of main part valve can be right the self-balancing valve head of driving the valve membrane plays whole sufficient guide slip anticreep.
In a preferred example, the present invention may be further configured such that the notch ring is opened toward the inlet of the input flow channel, and a flow channel ring groove capable of communicating with the output flow channel is formed at the periphery of the notch ring.
By adopting the preferable technical characteristics of the structure, the design of the opening direction of the notch ring and the ring groove of the runner is utilized, so that the space of the runner is clean and has no dead zone.
The present invention may be further configured in a preferred example such that an increase in the air pressure of the top air pressure chamber or/and a decrease in the fluid pressure of the output flow passage can move the self-balancing valve head downward, and the shape and thickness of the self-balancing valve head cannot close the split ring when the non-connected depending valve stem sinks to the lowest point; the elastic force of the elastic element pushes up or/and the fluid pressure of the input flow channel is increased to lift the non-connection hanging valve rod, and when the non-connection hanging valve rod is lifted to the highest point, the shape of the pressure reducing valve head can seal the closed valve port.
By adopting the preferable technical characteristics of the structure, the shape structure and the interrelation of the self-balancing valve head can be utilized to sense the air pressure of the top air pressure cavity or also sense the fluid pressure change of the output flow channel, the falling dead point of the self-balancing valve head is defined to be incapable of enabling the self-balancing valve head to seal the notch ring, and the rising dead point of the self-balancing valve head is also defined to be capable of enabling the shape of the pressure reducing valve head to seal the sealed valve port. Therefore, when the air in the top air pressure cavity is pumped out, the valve of the adjustable pressure stabilizing valve can be naturally closed.
In a preferred example, the self-balancing valve head is further configured that a stop ring is connected to the outer circumferential edge of the self-balancing valve head and is larger than the outer diameter of the notch ring, and when the stop ring is abutted against the upper edge of the notch ring, the non-connected hanging valve rod sinks to the lowest point; the stop ring also extends above the runner ring groove so that fluid pressure reduction fluctuation energy from the output runner acts on the driving valve membrane, and the self-balancing valve head automatically moves downwards slightly.
By adopting the preferable technical characteristics of the structure, the mechanism of the falling dead point of the self-balancing valve head is determined by utilizing the stop ring structure and the interrelation of the self-balancing valve head, and the position of the self-balancing valve head can be changed by the fluid pressure fluctuation of the output flow passage, so that the self-balancing effect is generated, and the fluid pressure fluctuation of the output flow passage is stabilized.
The present invention may be further configured in a preferred example, wherein the body valve includes:
the middle valve seat is used for providing the input flow channel, the output flow channel, the closed valve port and the notch ring;
the lower valve seat is combined below the middle valve seat and is used for fixing the first peripheral ring part of the diaphragm to form a bottom elastic chamber for accommodating the elastic element, one side of the lower valve seat is provided with a vent hole, and the vent hole is communicated with the bottom elastic chamber where the elastic element is positioned;
The upper valve cover is combined above the middle valve seat and fixes the second peripheral ring part of the driving valve membrane so as to form a top air pressure cavity.
Through adopting the preferred technical characteristics of above-mentioned structure, utilize well disk seat, lower disk seat and the relation of combination of valve gap, make the main part valve can the combination formula be fixed the first peripheral ring portion of diaphragm with the second peripheral ring portion of driving valve membrane effectively separates out top atmospheric pressure chamber, bottom elasticity room and the runner space between the two.
In a preferred example, the present invention may further be configured such that an upper fixing ring groove is provided above the middle valve seat for the peripheral frame of the driving valve membrane to be engaged, a lower fixing ring groove is provided below the middle valve seat for the peripheral frame of the diaphragm to be engaged, the driving valve membrane closes the upper opening of the middle valve seat, and the diaphragm closes the lower opening of the middle valve seat to form a flow passage space.
By adopting the preferable technical characteristics of the structure, the fixing force of the peripheral frame body of the driving valve membrane and the peripheral frame body of the diaphragm is increased by utilizing the upper fixing ring groove and the lower fixing ring groove.
In a preferred example, the present invention may be further configured such that the peripheral frame of the driving valve film has a lower protruding snap edge corresponding to the upper fixing ring groove, and the peripheral frame of the diaphragm has an upper protruding snap edge corresponding to the lower fixing ring groove.
By adopting the preferable technical characteristics of the structure, the leakage of the flow passage space to the top air pressure cavity and the leakage to the bottom elastic chamber are reduced by utilizing the lower protruding clamping edge and the upper protruding clamping edge.
The present invention may be further configured in a preferred example, wherein a sleeve is provided at the center of the lower valve seat for guiding and sliding the adjusting ball end of the floating adjusting seat, and the elastic element is sleeved on the outer diameter body of the sleeve.
By adopting the preferable technical characteristics of the structure, the central sleeve of the lower valve seat is utilized to enable the elastic element to provide upward elastic force which is not deflected in the longitudinal direction so as to drive the floating adjusting seat to guide towards the axle center even if being deflected, and limit the guiding and sliding point of the adjusting ball end of the floating adjusting seat to be positioned at the axle center.
The second main object of the present invention is achieved by the following technical scheme, and the present invention provides a semiconductor manufacturing apparatus, which includes an adjustable pressure stabilizing valve with any combination of the above-mentioned implementation features, and the working fluid output by the adjustable pressure stabilizing valve and introduced into the apparatus bench is continuously at a stable fluid output pressure, and is not adversely affected by the fluctuation of the external fluid input pressure, so as to be beneficial to stabilizing the production parameters of semiconductor manufacturing and maintaining better quality control.
The main purpose of the invention is realized by the following technical scheme: a method of assembling a trim valve is provided with any combination of features as described above, comprising:
s1, installing a driving valve membrane at the middle top of the main body valve;
s2, installing a non-connected suspension valve rod in the main body valve, wherein a diaphragm of the non-connected suspension valve rod is limited at the bottom of the main body valve so as to form a flow passage space;
s3, arranging an elastic element at the bottom of the main body valve;
s4, forming a bottom elastic chamber of the main body valve outside the flow passage space, so that the lower guide post of the non-connected suspension valve rod can receive the upward pushing elastic force of the elastic element;
s5, forming a top air pressure cavity of the main body valve outside the flow passage space, so that an upper guide pillar of the non-connected suspension valve rod can receive the pushing air pressure of the driving valve membrane; wherein, in the process of step S1 to step S5, the self-balancing valve head of the driving valve film always slides on the notch ring of the main valve.
The principle of implementing the basic method is that an adjustable pressure stabilizing valve driven by a mechanical structure without external force is manufactured by utilizing the steps S1 to S5, so that the protection effect of stable supply of the fluid output pressure is realized, and the fluid output pressure is not influenced by fluctuation of the fluid input pressure in a sensitive way.
The present invention may be further configured in a preferred example, in which the main body valve in steps S1 to S3 specifically includes a middle valve seat, in step S4 the main body valve further includes a lower valve seat coupled to a bottom of the middle valve seat, in step S5 the main body valve further includes an upper valve cover coupled to a top of the middle valve seat, a vent hole is formed at one side of the lower valve seat, and the main body valve is communicated to a bottom elastic chamber where the elastic element is located, and the assembling method further includes: connecting an exhaust pipe to the vent hole.
By adopting the preferable technical characteristics of the method, the bottom and the top of the middle valve seat are respectively combined in sequence by utilizing the lower valve seat and the upper valve cover, so that a bottom elastic chamber with fixed elastic force is constructed at the bottom of the middle valve seat, and a top air pressure chamber with adjustable air pressure is constructed at the top of the middle valve seat. In the assembling process from the step S2 to the step S3, as the top air pressure cavity is not yet constructed, the non-connecting suspension valve rod can always keep the form that the pressure reducing valve head seals the closed valve port, and the non-connecting suspension valve rod is relatively stable and does not shake in the assembling process, so that possible defects of fluid leakage caused by improper assembling operation are reduced.
In summary, the technical solutions of the present invention related to the structure or the method include at least one of the following technical effects contributing to the prior art:
1. the regulating pressure stabilizing valve does not need to consume external energy (comprising electric energy and pneumatic cylinder energy) continuously, can reduce the adverse effect of fluctuation of fluid input pressure, and stabilize the fluid output pressure after decompression; in a ten-fold decompression range, the fluid pressure of the output flow channel is stabilized at an increasing fluctuation rate within 0-10% or at a decreasing fluctuation rate within-10-0%; more specifically, the diameter of the self-balancing valve head is larger than the diameter ratio of the pressure reducing valve head, so that the fluid pressure of the output flow passage is stabilized to be in an increasing fluctuation rate within 0-5% or a decreasing fluctuation rate within-5-0% in an eight-time pressure reducing range;
2. the adjustable pressure stabilizing valve does not need to be combined with a driving assembly (comprising a pneumatic cylinder, a driving screw and a hand wheel) of the main valve body, does not need to be monitored and calibrated from time to time, and has the effect of stabilizing the output pressure of fluid in a self-dynamic balance mode;
3. the closed valve port in the flow passage space forms a blade sealing structure, and the axial deviation correcting connection relation of the elastic element in the elastic chamber at the bottom is combined so as to achieve the effect of zero leakage when the valve is closed;
4. The non-connection suspension valve rod forms a semicircular shape at the end part of the lower guide post, and is matched with the design of the size R angle of the floating adjusting seat, and the end part of the lower guide post can be deflected by fluctuation of the fluid input pressure and then guided to be correct, so that the direct influence of the fluctuation impulse of the fluid input pressure on the opening of the valve is reduced;
5. the peripheral frame part of the driving valve film forms three sealing structures for preventing fluid from leaking between the middle valve seat and the upper valve cover;
6. the vent hole of the lower valve seat has the function of balancing the internal and external air pressure of the bottom elastic chamber and also has the function of serving as a medium drainage port when the diaphragm of the non-connected suspension valve rod breaks;
7. the notch ring of the middle valve seat and the peripheral runner ring groove are provided with the self-balancing valve head of the non-connecting suspension valve rod, so that the self-balancing valve head can conform to the fluid design of reducing turbulent flow of the diaphragm of the driving valve film; the internal flow passage space has the effect of no dead zone in flow;
8. the unconnected suspended valve rod has two sealing structures for preventing the erosion and leakage of the flow passage space to the top air pressure cavity and the bottom elastic chamber.
Drawings
FIG. 1 is a perspective view of an adjustable pressure stabilizing valve according to some preferred embodiments of the present invention;
FIG. 2 is an exploded view of a regulator valve according to some preferred embodiments of the present invention;
FIG. 3 is a cross-sectional view of the regulator valve according to some preferred embodiments of the present invention taken along the XZ plane;
FIG. 4 is a cross-sectional view of the regulator valve according to some preferred embodiments of the present invention;
FIG. 5 is a cross-sectional view of the trim valve in the XY plane according to some preferred embodiments of the present invention;
FIG. 6 is a perspective view of a non-connected stem of an adjustable regulator according to some preferred embodiments of the present invention (A is an upper perspective view, B is a bottom perspective view);
FIG. 7 is a perspective view of a floating adjustment seat of an adjustable pressure regulator according to some preferred embodiments of the present invention (A is an upper view and B is a bottom view);
FIG. 8 is a perspective view of a driving valve film of an adjustable pressure stabilizing valve according to some preferred embodiments of the present invention (A is a top view and B is a bottom view);
FIG. 9 is a perspective view of a middle valve seat of a main body valve of an adjustable pressure stabilizing valve according to some preferred embodiments of the present invention (A is an upper perspective view, B is a bottom perspective view);
FIG. 10 is a perspective view of a lower valve seat of a main body valve of an adjustable pressure regulator according to some preferred embodiments of the present invention (A is an upper perspective view, B is a bottom perspective view);
FIG. 11 is a perspective view of an upper valve cover of a main body valve of an adjustable pressure regulator according to some preferred embodiments of the present invention (A is an upper perspective view, B is a bottom perspective view);
FIG. 12 is a diagram showing test data of an adjustable regulator valve according to some embodiments of the present invention;
FIG. 13 is a schematic diagram showing steps of an assembling method of an adjustable pressure stabilizing valve according to some preferred embodiments of the invention.
Reference numerals: 10. a main body valve; 11. an input flow channel; 12. an output flow channel; 13. sealing the valve port; 14. a notch ring; 15. a runner ring groove; 20. driving a valve membrane; 21. a self-balancing valve head; 22. a stop ring; 23. a second peripheral ring portion; 30. a non-connected, suspended valve stem; 31. a pressure relief valve head; 32. an upper guide post; 33. a diaphragm; 34. a lower guide post; 35. a first peripheral ring portion; 40. an elastic element; 50. a floating adjusting seat; 51. a guide hole; 52. adjusting the ball end; 60. a middle valve seat; 61. a flow passage space; 62. an upper fixing ring groove; 63. a lower fixing ring groove; 70. a lower valve seat; 71. a bottom spring chamber; 72. a vent hole; 73. a sleeve; 80. an upper valve cover; 81. a top pneumatic chamber; 82. a pressurizing hole; 91. a connecting rod; 92. a connecting seat; 93. a dust cover.
Detailed Description
The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only examples for understanding a part of the inventive concept of the present invention, and are not representative of all embodiments, nor are they to be construed as the only embodiments. All other embodiments, based on the embodiments of the present invention, which are obtained by those of ordinary skill in the art under the understanding of the inventive concept of the present invention, are within the scope of the present invention.
It should be noted that, if a directional indication (such as up, down, left, right, front, and rear … …) is involved in the embodiment of the present invention, the directional indication is merely used to explain the relative positional relationship, movement condition, etc. between the components in a specific posture, and if the specific posture is changed, the directional indication is correspondingly changed. In order to facilitate understanding of the technical scheme of the present invention, the following describes and explains the adjustable pressure stabilizing valve in further detail, but does not serve as a protection scope defined by the present invention.
Referring to fig. 1 to 5, some embodiments of the present invention firstly provide an adjustable pressure stabilizing valve, fig. 1 is a schematic perspective assembly view of the adjustable pressure stabilizing valve, fig. 2 is an exploded view of the adjustable pressure stabilizing valve, fig. 3 is a sectional view of the adjustable pressure stabilizing valve cut along XZ plane, wherein XZ plane is a longitudinal section along a flow channel, fig. 4 is a sectional view of the adjustable pressure stabilizing valve cut along YZ plane, wherein YZ plane is a longitudinal section transverse to the flow channel, and fig. 5 is a sectional view of the adjustable pressure stabilizing valve cut along XY plane, wherein XY plane is a horizontal section transverse to the flow channel. The embodiment of the invention provides an adjustable pressure stabilizing valve, which mainly comprises: the valve comprises a main body valve 10, a driving valve film 20 providing an adjustable air pressure at the top, a non-connected hanging stem 30 for implementing a reduced pressure opening degree, and an elastic member 40 providing a fixed elastic force to the non-connected hanging stem 30 at the bottom. A top air pressure chamber 81 is constructed above the driving valve film 20, a flow passage space 61 is constructed between the driving valve film 20 and the diaphragm 33 of the non-connection suspension valve rod 30, and a bottom elastic chamber 71 is constructed below the diaphragm 33 of the non-connection suspension valve rod 30. The driving valve film 20 is provided with a self-balancing valve head 21, and the non-connected suspension valve rod 30 is provided with a pressure reducing valve head 31 which are in longitudinal linkage relation. The body valve 10 has a closed valve port 13 corresponding to the pressure reducing valve head 31 formed in the flow passage space 61, and a notch ring 14 corresponding to the self-balancing valve head 21 formed above the closed valve port 13.
The term "driving" of the "driving valve film" refers to a valve film that does not directly perform the opening adjustment of the normal valve film, i.e., the driving member, not the executing member, and the normal valve film is driven to perform the valve opening reducing or expanding action by the valve head itself, and the driving valve film 20 is driven to drive the other valve head (specifically, the pressure reducing valve head 31 of the non-connected hanging valve rod 30) to perform the valve opening reducing or expanding action. The driving force for driving the valve membrane 20 mainly comes from the fluid input pressure, the air pressure formed by the compressed air in the top air pressure chamber 81, the elastic force of the elastic member 40, and if necessary, the fluid output pressure. The air pressure of the top air pressure chamber 81 is a forward force and the fluid input pressure, the fluid output pressure and the elastic force of the elastic member 40 are reverse forces corresponding to the opening degree of the valve. As one of the more specific structures of the pressure reducing valve, the pressure regulating valve should always have a fluid input pressure greater than a fluid output pressure.
By "non-connected" with respect to the "non-connected depending valve stem", reference to the coupling relationship of the non-connected depending valve stem 30 to the actuation valve membrane 20 excludes generally known coupling relationships such as welding, bolting, C-snap-fitting, and also means that the non-connected depending valve stem 30 does not extend through the self-balancing valve head 21 of the actuation valve membrane 20 to connect with other components.
By "self-balancing" with respect to a "self-balancing valve head", it is meant that the self-balancing valve head 21 has the ability to achieve an adjustable trim valve self-balancing pressure. The self-balancing valve head 21 automatically changes the lifting space position in the notch ring 14 in the fluid space, so that the self-balancing valve head 21 can reach the balance of the up-down pressure, because the sinking movement of the self-balancing valve head 21 is caused when the fluid input pressure is too small, the valve opening degree can be increased, more input flow can enter the notch ring 14, the self-balancing valve head 21 is prevented from sinking continuously, and the fluid output pressure is compensated to be at a stable value; when the fluid input pressure is too high, the input fluid rapidly enters the notch ring 14, the self-balancing valve head 21 is pushed to rise, the valve opening degree is reduced, the amount of the input fluid entering the notch ring 14 is reduced, and the self-balancing valve head 21 rises to a balance point, so that the fluid output pressure which possibly fluctuates originally is stabilized. That is, the fluctuation of the fluid input pressure only affects the relative height position of the self-balancing valve head 21 at the notch ring 14, and the self-balancing valve head 21 drives the valve opening of the relief valve head 31 in a interlocked manner, so that the fluctuation of the fluid input pressure does not have a significant influence on the fluid output pressure. Further, with regard to "floating" of the "floating adjustment seat", it is referred to that the floating adjustment seat 50 is floated by the action of the elastic member 40 in the bottom elastic chamber 71.
With respect to the "reduced pressure range," it is referred to as the ratio of the input fluid pressure to the output fluid pressure. For example, a ten-fold reduced pressure range refers to an input fluid pressure that is between one (excluding the end point value) and ten (including the end point value) times the output fluid pressure; an eight-fold reduced pressure range refers to an input fluid pressure that is between one (excluding the end point values) and eight (including the end point values) times the output fluid pressure.
In the "incremental fluctuation ratio", the calculation formula is that after the pressure reducing valve is adjusted, the low set value of the input fluid pressure is set, the low initial adjustment value of the output fluid pressure is also obtained by the air pressure adjustment of the top air pressure chamber 81, and the difference of the actual change of the input fluid pressure is a positive number. The calculation of the incremental fluctuation rate is: the actual change value of the input fluid pressure minus the low set value of the input fluid pressure is taken as a positive denominator, the actual measured value of the output fluid pressure minus the low initial adjustment value of the output fluid pressure is taken as a molecule, and the percentage value is obtained after multiplication and division, namely the incremental fluctuation rate. As shown in fig. 12, the actual inlet pressure, the actual outlet pressure and the increasing fluctuation rate of the inlet pressure are increased, the actual variation value of the input fluid pressure is 3, and the low set value 2 of the input fluid pressure is subtracted to obtain the denominator with the value of 1; the actual measured value of the output fluid pressure is 1.02, and the low-level initial adjustment value 1 of the output fluid pressure is subtracted to obtain molecules with the value of 0.02; dividing 0.02 by 1 gives an incremental volatility of 2%. As shown in fig. 12, the actual inlet pressure, the actual outlet pressure and the increasing fluctuation rate of the inlet pressure are increased gradually, the actual variation positive value of the input fluid pressure is 8, and the low set value 2 of the input fluid pressure is subtracted to obtain the denominator with the value of 6; the actual measured value of the output fluid pressure is 1.15, and the low-level initial adjustment value 1 of the output fluid pressure is subtracted to obtain molecules with the value of 0.15; dividing 0.15 by 6 gives an incremental volatility of 2.5%. The smaller the incremental fluctuation rate, the less affected the output fluid pressure will be by its fluctuation as the input fluid pressure changes to a large extent.
In the "decreasing fluctuation ratio", the calculation formula is that after the pressure reducing valve is adjusted, the high set value of the input fluid pressure is set, and the high initial adjustment value of the output fluid pressure is obtained, and the difference value of the actual change of the input fluid pressure is negative. The calculation of the decreasing fluctuation rate is as follows: the actual change value of the input fluid pressure minus the high-order set value of the input fluid pressure is taken as a negative denominator, the absolute positive value is taken, the actual measured value of the output fluid pressure minus the high-order initial adjustment value of the output fluid pressure is taken as a molecule, and the percentage value is obtained after multiplication and division, namely the decreasing fluctuation rate. As shown in fig. 12, the actual inlet pressure, the actual outlet pressure and the decreasing fluctuation rate of the inlet pressure decrease, the actual change positive value of the input fluid pressure is 7, the high set value 8 of the input fluid pressure is subtracted and the absolute positive value is taken, so as to obtain the denominator with the value of 1; the actual measured value of the output fluid pressure is 0.98, and the high initial adjustment value 1 of the output fluid pressure is subtracted to obtain a molecule with the value of-0.02; dividing by 1 by 0.02 gives a decreasing ripple of-2%. In fig. 12, the actual inlet pressure, the actual outlet pressure and the decreasing fluctuation rate of the inlet pressure decrease, the actual change positive value of the input fluid pressure is 2, the high-order set value 8 of the input fluid pressure is subtracted, and the absolute value is taken, so as to obtain the denominator with the value of 6; the actual measured value of the output fluid pressure is 0.8, and the high initial adjustment value 1 of the output fluid pressure is subtracted to obtain molecules with the value of-0.2; dividing 0.2 by 6 gives a decreasing volatility of-3.3%. The smaller the decreasing fluctuation rate, the less affected the output fluid pressure will be by its fluctuation as the input fluid pressure changes to a small degree. In fig. 12, the increasing fluctuation ratio is relatively smaller than the absolute value of the decreasing fluctuation ratio, and the degree to which the output fluid pressure is less affected by the fluctuation when the input fluid pressure changes greatly is better than the degree to which the input fluid pressure changes little, so that the lower setting is slightly better than the higher setting, and the difference between them is not great. Fig. 12 also demonstrates that the example trim valve of the present invention has a trim function under reduced pressure adjustment, which can make both a low setting and a high setting. In the measurement, after the low level setting or the high level setting, the air pressure value in the top air pressure chamber 81 is not adjusted any more, and a phenomenon of extremely small consumption of external energy is exhibited. The pressure value in the top air pressure cavity 81 can be adjusted according to the actual installation occasion, but the pressure value does not need to be adjusted from time to time, and the adjustable pressure stabilizing valve also has the effect of pressure reduction, pressure stabilization and recalibration.
Referring to fig. 1 to 5, the present invention illustrates a key component of an adjustable regulator valve. Referring to fig. 2 and 3 in particular, first, regarding the main body valve 10, there are an input flow channel 11, an output flow channel 12, a closed valve port 13 communicating the input flow channel 11 with the output flow channel 12, and a notch ring 14 located above the closed valve port 13, an elastic element 40 is provided at the bottom of the main body valve 10, for providing a fixed elastic force to the non-connected hanging valve rod 30. With reference to fig. 8, regarding the air pressure regulated driving valve film 20, the driving valve film 20 is disposed on top of the main body valve 10 to separate the top air pressure cavity 81 and the flow channel space 61 from each other, the self-balancing valve head 21 of the driving valve film 20 is aligned with the notch ring 14 adapted to the main body valve 10, and the self-balancing valve head 21 is relatively slidable in the notch ring 14 to a limited extent. With reference to fig. 6 in conjunction, regarding the non-connected suspension stem 30, the non-connected suspension stem 30 has a pressure-reducing valve head 31 capable of closing the closed valve port 13, an upper guide post 32 provided on the pressure-reducing valve head 31, a diaphragm 33 provided under the pressure-reducing valve head 31, and a lower guide post 34 positioned under the diaphragm 33, wherein the upper guide post 32 contacts only the self-balancing valve head 21 of the driving valve film 20 to receive the pushing-down gas pressure of the driving valve film 20, and the lower guide post 34 receives the pushing-up elastic force of the elastic member 40, causing the pressure-reducing valve head 31 and the self-balancing valve head 21 to form a longitudinally interlocked relationship; when the fluid pressure fluctuation from the inlet flow passage 11 is increased and partially acts on the self-balancing valve head 21, the self-balancing valve head 21 automatically moves up slightly to reduce the opening of the pressure reducing valve head 31, i.e. the opening gap between the pressure reducing valve head 31 and the sealing valve port 13 for the fluid to pass through is reduced. When the fluid pressure fluctuation from the input flow passage 11 is decreasing and partially acts on the self-balancing valve head 21, the self-balancing valve head 21 automatically moves down slightly to enlarge the opening of the pressure reducing valve head 31, namely, the opening gap between the pressure reducing valve head 31 and the sealing valve port 13 for the fluid to pass through is enlarged; the fluid pressure in the output flow channel 12 is stabilized at an increasing fluctuation rate within 0% -10% or at a decreasing fluctuation rate within-10% -0% within ten times of the pressure reduction range, and the relevant test data are demonstrated in fig. 12.
An inventive implementation method for the present basic structure example is that, with the longitudinal combination of the non-connected suspended valve stem 30, the driving valve membrane 20 for constructing an adjustable set downward air pressure and the elastic element 40 for providing an upward fixed elastic force, the self-balancing valve head 21 of the driving valve membrane 20 is aligned to be adapted to the notch ring 14 of the main body valve 10, the pressure reducing valve head 31 of the non-connected suspended valve stem 30 is suspended in the flow channel space 61, and the opening of the pressure reducing valve head 31 at the closed valve port 13 can be dynamically and mechanically self-adjusted for generating a stable pressure reducing effect. That is, when the fluctuation of the fluid pressure from the input flow passage 11 is incremental and partially acts on the self-balancing valve head 21, the self-balancing valve head 21 automatically moves up slightly to reduce the opening of the pressure reducing valve head 31, so as to generate stable output fluid pressure with incremental input pressure in response to the incremental input fluid pressure, and with mutual compensation; when the fluid pressure fluctuation from the input flow channel 11 is decreasing and partially acts on the self-balancing valve head 21, the self-balancing valve head 21 automatically moves down slightly to enlarge the opening of the pressure-reducing valve head 31, so as to generate stable output fluid pressure decreasing in input pressure under mutual compensation according to the decreasing of the input fluid pressure, the adjustable pressure stabilizing valve can stabilize the output fluid pressure in a mechanical automatic self-dynamic regulation mode no matter the positive pressure fluctuation or the negative pressure fluctuation of the input end, the effects of low fluctuation and quick self-regulation of the output fluid pressure are achieved, the protection effect of constant and stable fluid pressure is achieved, the opening is not required to be regulated electromagnetically or electrically, or the energy consumption required by the regulation of the real-time monitoring frequency and the valve opening can be reduced. In another angle, referring to fig. 3, when the fluid input pressure of the input flow channel 11 suddenly and rapidly increases, the self-balancing valve head 21 rises, the pressure-reducing valve head 31 of the non-connected hanging valve rod 30 naturally and synchronously rises instantaneously without measurement, the valve opening is reduced, the fluid output pressure of the output flow channel 12 is relatively stable in cooperation with the increase of the fluid flow rate; if the fluid input pressure suddenly decreases, the self-balancing valve head 21 is lowered, the pressure-reducing valve head 31 of the non-connected suspended valve rod 30 naturally, synchronously and exemptly drops instantaneously, the valve opening is enlarged, and the fluid output pressure of the output flow channel 12 is relatively stable in cooperation with the decrease of the fluid flow rate.
In the preferred example of dual valve head materialization, referring to fig. 3 and 4, the diameter of the self-balancing valve head 21 is larger than the diameter of the pressure reducing valve head 31, so that the fluid pressure of the output flow passage 12 is stabilized with an increasing fluctuation rate within 0% -5% or a decreasing fluctuation rate within-5% -0% within eight times of the pressure reducing range, as demonstrated by the test data set of fig. 12, which is reciprocally conducted at the inlet actual pressures 2 to 8, 3 to 8, 4-8 bar, no matter whether the inlet actual pressure is in the high position setting or the low position setting, the absolute positive values of the increasing fluctuation rate and the decreasing fluctuation rate are not more than 5%. By utilizing the difference between the diameters of the self-balancing valve head 21 and the pressure reducing valve head 31, the self-balancing valve head 21 can sense the fluctuation of the fluid pressure from the input flow channel 11 to perform self-adjustment, and the pressure reducing valve head 31 is linked with the self-balancing valve head 21, so that the fluid pressure of the output flow channel 12 has more stable increasing fluctuation rate and decreasing fluctuation rate within the eight-time pressure reducing range. The invention is implemented by reducing the influence of the fluctuation of the input fluid pressure on the non-connected suspension valve rod 30 and increasing the back driving induction of the fluctuation of the input fluid pressure on the self-balancing valve head 21 of the driving valve membrane 20.
Referring to fig. 12, in the first set of experiments, when the low set value of the actual inlet pressure is 2 bar, the air pressure of the top air pressure chamber 81 is adjusted until the low initial adjustment value of the actual outlet pressure is 1 bar as the end of the adjustment, and under the condition that the top air pressure is not adjusted, the values of the actual outlet pressure are detected at 3, 4, 5, 6, 7 and 8 bar respectively, and the obtained incremental fluctuation rates x are 2.0%, 2.5%, 2.7%, 2.5%, 2.6% and 2.5% respectively, and the incremental fluctuation rates not exceeding 5% are obtained respectively. On the other hand, when the upper set value of the inlet actual pressure is 8 bar, the air pressure of the top air pressure chamber 81 is adjusted until the lower initial adjustment value of the outlet actual pressure is 1 bar as the end of the adjustment, and when the top air pressure is not adjusted, the values of the outlet actual pressure are detected at 7, 6, 5, 4, 3, and 2 bar, respectively, and the obtained decreasing fluctuation rates y are-2.0%, -2.5%, -2.7%, -3.0%, -3.4%, -3.3%, and decreasing fluctuation rates not exceeding-5%, respectively. In the second set of experiments, when the low set value of the inlet actual pressure is 3 bar, the air pressure of the top air pressure cavity 81 is adjusted until the low initial adjustment value of the outlet actual pressure is 2 bar as the end of adjustment, and under the condition that the top air pressure is not adjusted, the values of the outlet actual pressure are detected at the inlet actual pressures of 4, 5, 6, 7 and 8 bar, and the obtained incremental fluctuation rates x are respectively 2.0%, 2.5%, 3.3%, 3.0% and are not more than 5%. On the other hand, when the upper set value of the inlet actual pressure is 8 bar, the air pressure of the top air pressure chamber 81 is adjusted until the lower initial adjustment value of the outlet actual pressure is 2 bar as the end of the adjustment, and when the top air pressure is not adjusted, the values of the outlet actual pressure are detected at 7, 6, 5, 4 and 3 bar, respectively, and the obtained decreasing fluctuation rates y are-2.0%, -2.7%, -3.0%, -3.4% and decreasing fluctuation rates not exceeding-5%, respectively. Other sets of tests may be compared to the subsequent test of fig. 12. Therefore, the regulated pressure stabilizing valve of the present invention has a protection function of self-inhibiting the fluctuation of the fluid input pressure, and the increasing fluctuation rate x and/or the decreasing fluctuation rate y are superior to the conventional pressure reducing valve (the increasing rate is about 20% or higher) in a way that the value of 0< x is less than or equal to 10.0%, and-10.0% is less than or equal to y < 0).
In the preferred example of the non-connecting depending valve stem 30, and referring again to FIGS. 2, 3 and 4, in conjunction with FIG. 6, the relief valve head 31 has an inverted conical chamfer to reduce side flow impact of the input fluid to the non-connecting depending valve stem 30. By utilizing the inverted cone slope of the pressure reducing valve head 31, the shaking of the lower guide post 34 is reduced under the fluctuation of the input fluid pressure, and the direct up-and-down force applied to the pressure reducing valve head 31 by the fluctuation of the input fluid pressure is avoided, and the shape can slow down the acting force of the fluctuation of the input fluid pressure to the pressure reducing valve head 31, but can sharply adjust the opening of the pressure reducing valve head 31 due to the fluctuation of the output fluid pressure.
In a preferred embodiment of the regulator valve, referring again to fig. 2, 3 and 4, and referring to fig. 7, the regulator valve further comprises: a floating adjustment seat 50 disposed on the elastic element 40 and in elastic contact with the lower guide post 34, for transmitting the rising elastic force of the elastic element 40 to the non-connected suspension valve rod 30; the upper surface of the floating adjustment seat 50 is formed with a guide hole 51 to elastically contact the bottom end of the lower guide post 34; the guiding hole 51 has an inner R-angle, and the bottom end of the lower guiding pillar 34 has an outer R-angle, and the inner R-angle is larger than the outer R-angle, so that the axial direction of the lower guiding pillar 34 is aligned and the floating adjustment seat 50 is disengaged from the lower guiding pillar 34 during assembly. By utilizing the structure and connection relation of the floating adjustment seat 50, the floating adjustment seat 50 can well bear the upward elastic force of the elastic element 40 and act as a medium to rotate and apply force to the non-connected suspension valve rod 30, so that the pressure reducing valve head 31 moves in the direction of reducing the opening degree, and the pressure reducing amplitude is increased. In a more preferred example, by utilizing the difference between the inner R angle of the guiding hole 51 of the floating adjustment seat 50 and the outer R angle of the bottom end of the lower guide post 34 of the non-connecting suspension valve rod 30, the non-connecting suspension valve rod 30 is deformed by an external force, so as to preferentially change the axial direction of the lower guide post 34, and not directly generate a large stress on the connection part between the upper guide post 32 and the self-balancing valve head 21, and after the elimination or reduction of the sudden external force, the lower guide post 34 is guided by the floating adjustment seat 50 based on the difference between the inner R angle and the outer R angle, so that the lower guide post 34 can be gradually reset back to the axial direction, and the connection part between the upper guide post 32 of the non-connecting suspension valve rod 30 and the self-balancing valve head 21 does not need a fixed mechanical connection, and is not easy to be skewed or fallen. It can be seen that the upper guide post 32 is less prone to sloshing or skewing relative to the lower guide post 34 under the influence of fluctuations in the fluid input pressure. The tip skew of the lower guide post 34 can be seen as a first stage of tortuous deformation under the influence of fluctuations in fluid input pressure.
In the preferred embodiment of the floating adjustment seat 50, referring again to fig. 2, 3 and 4, in conjunction with fig. 7, the bottom of the floating adjustment seat 50 extends with an adjustment ball end 52, which is nested in the elastic element 40. The elastic element 40 may specifically compress the spring, and the surface may have an anti-corrosion coating, and the top end of the elastic element 40 uniformly applies force to the table top of the floating adjustment seat 50 provided with the guide hole 51. The floating adjusting seat 50 can axially slide on the bottom elastic chamber 71 of the main body valve 10 with a margin by utilizing the adjusting ball end 52 of the floating adjusting seat 50, so as to realize the axial alignment of the lower guide post 34. The outer R-angle formed by the adjusting ball end 52 and the bottom end of the lower guide post 34 has a double reciprocating bendable and resettable structure to absorb pressure fluctuation of the input flow channel 11, so as to avoid directly acting on the joint between the top end of the upper guide post 32 and the self-balancing valve head 21, and avoid the occurrence of non-automatic resetting of the non-connecting suspension valve rod 30 after bending. In a more preferred example, a sleeve 73 is provided at the center of the lower valve seat 70 of the main body valve 10 for guiding the sliding movement of the adjusting ball end 52 of the floating adjusting seat 50, and the elastic member 40 is sleeved on the outer diameter of the sleeve 73. The central sleeve 73 of the lower valve seat 70 is used to enable the elastic element 40 to provide upward elastic force which is not deflected in the longitudinal direction, so as to drive the floating adjusting seat 50 to be guided towards the axle center even if being deflected, and limit the sliding guide point of the adjusting ball end 52 of the floating adjusting seat 50 to be positioned at the axle center. The deflection of the end of the adjusting ball end 5 of the floating adjusting seat 50 may be regarded as a second bending deformation under the influence of fluctuation of the fluid input pressure, which is opposite to the first bending deformation, and the collocation combination of the top air pressure cavity 81 and the bottom elastic chamber 71 has the effect of rectifying and straightening, wherein in the self-balancing process, the top air pressure cavity 81 is a relatively closed space, based on different lifting positions of the self-balancing valve head 21, the air pressure value of the top air pressure cavity 81 also varies, that is, the downward air pressure is a relatively variable, the elastic element 40 of the bottom elastic chamber 71 can provide relatively fixed elastic force within the limited lifting distance of the pressure reducing valve head 31, so that the two bending deformation can gradually self-rectify and guide, and can overcome the fluctuation burst peak of the fluid input pressure, and when the fluid input pressure increases or decreases to a new value, the self-balancing valve head 21 also naturally adjusts to a new balancing position, so that the fluid output pressure is more stable. In this example, the elastic element 40, the floating adjusting seat 50 and the lower guide post 34 of the non-connecting suspension valve rod 30 are matched to form a concentricity offset floating adjusting structure, which can offset the moment misalignment caused by the perpendicularity tolerance of the elastic element 40, and ensure the sealing effect of the pressure reducing valve head 31 on and off the sealing surface of the closed valve port 13. More specifically, the adjustment ball end 52 of the floating adjustment seat 50 reduces friction under structural interaction, allowing the resilient member 40 to urge the floating adjustment seat 50 over a range of axial misalignment with vertical tolerance.
In the preferred embodiment of the non-connecting hanging stem 30, referring again to fig. 2, 3 and 4, and referring to fig. 6, the top end of the upper guide post 32 is tightly fitted in the shaft hole of the self-balancing valve head 21; when the elastic member 40 lifts the non-connected depending valve stem 30 to its highest point, the relief valve head 31 closes the closed valve port 13, while the self-balancing valve head 21 is insufficient to disengage the split ring 14. Therefore, the condition that the pressure reducing valve head 31 seals the closed valve port 13 is defined as the upper dead point of the non-connected suspended valve rod 30 rising to the highest point, and the self-balancing valve head 21 cannot be separated from the notch ring 14, so that the notch ring 14 of the main body valve 10 can perform a sufficient slide guiding and anti-falling function on the self-balancing valve head 21 of the driving valve film 20 in the whole process of pressure reducing and stabilizing.
In the preferred embodiment of the body valve 10, referring to fig. 3 and 4, and in combination with fig. 9, the notch ring 14 is opened toward the inlet of the inlet flow channel 11, and a flow channel ring groove 15 capable of communicating with the outlet flow channel 12 is formed at the periphery of the notch ring 14. By means of the design of the opening orientation of the notch ring 14 and the runner ring groove 15, the whole runner path is the movable space of the pressure reducing valve head 31 below the input runner 11 and the closed valve port 13, the notch 0 ring 14 and the runner ring groove 15 to the output runner 12, and the runner space 61 is clean and free of dead zones. The sealing valve port 13 may specifically form a knife edge sealing end surface at the periphery of the lower ring opening, and has a tiny sealing contact section, so that particles will not be generated due to pressing when the opening and closing sealing surface of the pressure reducing valve head 33 made of PTFE contacts with the flow passage knife edge sealing end surface of the sealing valve port 13.
In a more specific preferred example of the main body valve 10 and the non-connecting suspension valve rod 30, referring again to fig. 3 and 4, the increase of the air pressure of the top air pressure chamber 81 or/and the decrease of the fluid pressure of the output flow channel 12 can move the self-balancing valve head 21 downwards, and when the non-connecting suspension valve rod 30 sinks to the lowest point, the shape and thickness of the self-balancing valve head 21 cannot close the notch ring 14; the elastic force of the elastic element 40 pushes up or/and increases the fluid pressure in the input flow channel 11 to raise the non-connected hanging stem 30, and when the non-connected hanging stem 30 rises to the highest point, the pressure reducing valve head 31 is shaped to close the closed valve port 13. By using the shape and the interrelation of the self-balancing valve head 21, the air pressure of the top air pressure cavity 81 or the fluid pressure change of the output flow channel 12 can be sensed, it is defined that the falling dead point of the self-balancing valve head 21 cannot cause the self-balancing valve head 21 to seal the notch ring 14, and it is also defined that the rising dead point of the self-balancing valve head 21 can cause the shape of the pressure reducing valve head 31 to seal the sealed valve port 13. Thus, when the air of the top air pressure chamber 81 is drawn out, the valve of the regulator valve can be closed naturally. In a more specific example, the periphery of the closing valve port 13 is formed with a downward flange to increase the closing effect of the relief valve head 31.
In the preferred embodiment of the driving valve film 20, referring to fig. 3 and 4, and referring to fig. 8, the outer edge of the self-balancing valve head 21 is connected with a stop ring 22, which is larger than the outer diameter of the notch ring 14, the stop ring 22 has a relatively good pressure sensing effect, when the stop ring 22 abuts against the upper edge of the notch ring 14, which indicates that the non-connected hanging valve rod 30 has sunk to the lowest point, and the opening of the valve is the largest; the stop ring 22 also extends above the flow channel ring groove 15 to enable the fluid pressure reducing fluctuation from the output flow channel 12 to act on the driving valve membrane 20, and the self-balancing valve head 21 automatically moves slightly downward. By using the structure and interrelationship of the stop ring 22 of the self-balancing valve head 21, the mechanism of the falling dead point of the self-balancing valve head 21 is determined, and the fluid pressure fluctuation of the output flow passage 12 also changes the position of the self-balancing valve head 21, so as to generate a self-balancing effect and stabilize the fluid pressure fluctuation of the output flow passage 12.
In the preferred embodiment of the body valve 10, referring again to fig. 1, 2 and 3, and in conjunction with fig. 9-11, the body valve 10 includes a middle valve seat 60, a lower valve seat 70 and an upper valve cover 80. The middle valve seat 60 provides the input flow passage 11, the output flow passage 12, the closed valve port 13 and the notch ring 14; a lower valve seat 70 is combined below the middle valve seat 60, and fixes the first peripheral ring portion 35 of the diaphragm 33 to form a bottom elastic chamber 71 for accommodating the elastic element 40, one side of the lower valve seat 70 is provided with a vent hole 72, and the vent hole is communicated with the bottom elastic chamber 71 where the elastic element 40 is positioned; the upper valve cover 80 is coupled to the upper side of the middle valve seat 60 and fixes the second peripheral ring portion 23 of the driving valve film 20 to form a top pneumatic chamber 81. By means of the combination of the middle valve seat 60, the lower valve seat 70 and the upper valve cover 80, the main valve 10 can fix the first peripheral ring portion 35 of the diaphragm 33 and the second peripheral ring portion 23 of the driving valve film 20 in a combined manner, and effectively partition the flow passage space 61 between the top air pressure cavity 81, the bottom elastic chamber 71 and the two. The driving valve film 20 has the function of a sensing film and a separation film, and the diaphragm 33 has the function of a separation film only. Specifically, the vent passage in the vent hole 72 may be provided with screw threads, and in the acid mist environment, the vent passage may be led out by a hose to ensure that the elastic member 40 is not in direct contact with the external environment.
In a more specific preferred example of the main body valve 10, referring to fig. 3 and 10, an upper fixing ring groove 62 is formed above the middle valve seat 60 for the peripheral frame of the driving valve film 20 to be engaged, a lower fixing ring groove 63 is formed below the middle valve seat 60 for the peripheral frame of the diaphragm 33 to be engaged, the driving valve film 20 closes the upper opening of the middle valve seat 60, and the diaphragm 33 closes the lower opening of the middle valve seat 60 to form a flow passage space 61. The upper fixing ring groove 62 and the lower fixing ring groove 63 increase the fixing force and the leakage-proof property of the peripheral frame body of the driving valve film 20 and the peripheral frame body of the diaphragm 33.
In a more specific preferred example of the dual membrane, referring to fig. 3, 4 and comparing fig. 8 and 6, the peripheral frame of the driving valve membrane 20 has a lower protruding rim corresponding to the upper fixing ring groove 62, and the peripheral frame of the diaphragm 33 has an upper protruding rim corresponding to the lower fixing ring groove 63. By the lower protruding clamping edge and the upper protruding clamping edge, leakage of the flow channel space 61 to the top air pressure cavity 81 and leakage to the bottom elastic chamber 71 are reduced.
The embodiment of the invention also provides a semiconductor manufacturing device which comprises the adjustable pressure stabilizing valve (shown in figure 1), wherein the working fluid output by the adjustable pressure stabilizing valve and introduced into the device platform is continuously at stable fluid output pressure, and the working fluid is not adversely affected by external fluid input pressure fluctuation, so that the working fluid is beneficial to stabilizing the production parameters of semiconductor manufacturing and maintaining better quality control. The embodiment of the invention can meet the ultra-pure cleanliness of the semiconductor requirement, and can stop the outflow of grease, metal ions and pollution particles in the flow channel space 61, because a sealing ring is not needed in use, and the defect caused by friction of the sealing ring is avoided naturally, the driving valve film 20 positioned above the flow channel space 61 and the non-connecting suspension valve rod positioned in the space and the diaphragm 33 thereof can be particularly made of ultra-pure PTFE (polytetrafluoroethylene), the main body valve 10 can be particularly made of ultra-pure PFA (soluble polytetrafluoroethylene), the bottom elastic chamber 71 and the top air pressure chamber 81 are upper and lower structural chambers which are isolated, the cleanliness of an overcurrent medium in the flow channel space 61 can be ensured, no pollution is generated, and the invention is particularly suitable for the ultra-pure chemicals of the semiconductor and the pressure reducing valve with the requirement of the cleanliness of an electronic ultra-pure water system.
Referring to fig. 1, 3 and 4, in the initial adjustment stage of the use process of the adjustable pressure-stabilizing valve, the compressed air pressure P1 of the top air pressure chamber 81 is adjusted through the pressurization hole 82 above the main valve 10, the opening of the pressure-reducing valve head 31 of the non-connected hanging valve rod 30 in the main valve 10 relative to the closed valve port 13 of the main valve 10 is controlled, and the fluid output pressure of the fluid medium is adjusted to stabilize the fluid supply, and when the opening is smaller (the self-balancing valve head 21 is raised), the fluid output pressure of the medium is smaller until the set value of the pressure-reducing valve is initially set. In the actual decompression stage, the fluid output pressure P4 of the output flow channel 12 also acts below the stop ring 22 of the driving valve film 20, when the fluid output pressure P4 of the output flow channel 12 is lower than the initial value, the stop ring 22 and the self-balancing valve head 21 connected with the stop ring are pulled down, and the decompression valve head 31 is synchronously linked to move down, so that the valve opening is expanded, so that the deficiency of the fluid output pressure P4 can be reinforced, the valve expansion is in the form of expression P1> (p4+p2+p3 '), P1 is the compressed air pressure from top to bottom in the top air pressure cavity 81, P4 is the fluid output pressure in the flow channel ring groove 15, P2 is the upward fixed elastic force exerted by the elastic element 40, and P3' is the part of the fluid input pressure of the input flow channel 11 locally exerted on the self-balancing valve head 21 (influenced by the forward direction of the valve opening, the lower the decompression valve head 31 and the larger valve opening). In the equilibrium state, p1= (p4+p2+p3 '), with the height position of the self-balancing valve head 21 different, the compressed air pressure P1 is a regular variable, the fixed elastic force P2 is a relatively constant elastic force, the local fluid input pressure P3' is a random variable in the actual production process and is positively influenced by the opening of the valve, and P4 is the fluid output pressure in the runner ring groove 15, which should be kept stable. For example, in actual operation, the fluid input pressure P3 fluctuates, and as the position of the self-balancing valve head 21 changes, the low-high position of the relief valve head 31 (corresponding to the valve opening size) also changes synchronously, affecting the local fluid input pressure P3', the compressed air pressure P1 also has a compensating effect, and the fluid output pressure P4 remains relatively stable as the self-balancing valve head 21 dynamically self-adjusts to a new position. When the fluid input pressure P3 extremely increases, the self-balancing valve head 21 rises, and the relief valve head 31 approaches the closing valve port 13, so that the fluid output pressure P4 is suppressed and stabilized.
Referring to fig. 13, fig. 2, fig. 3 and fig. 6 to fig. 11 corresponding to the respective components, an embodiment of the invention further provides an assembling method of the adjustable pressure stabilizing valve, which includes the following steps:
step S1, installing a driving valve membrane 20 on the middle top of the main body valve 10; specifically, the second peripheral ring portion 23 (which may be formed by a diaphragm flange) of the driving valve film 20 is pressed into alignment with the upper fixing ring groove 62 of the middle valve seat 60, while the two form an interference fit;
step S2 of installing a non-connected hanging stem 30 in the body valve 10, the diaphragm 33 of the non-connected hanging stem 30 being limited to the bottom of the body valve 10 to form a flow passage space 61; specifically, the first peripheral ring portion 35 (which may be formed by membrane flanging) of the diaphragm 33 of the non-connecting suspension valve rod 30 is aligned with the lower fixing ring groove 63 of the middle valve seat 60 to be pressed in, and at the same time, the first peripheral ring portion 35 of the diaphragm 33 of the middle valve seat 60 is in interference fit;
step S3, arranging an elastic element 40 at the bottom of the main body valve 10; specifically, the elastic member 40 is put in along the sleeve 73 of the lower valve seat 70;
step S4, forming a bottom elastic chamber 71 of the main body valve 10 outside the flow passage space 61, so that the lower guide post 34 of the non-connecting suspension valve rod 30 can receive the upward pushing elastic force of the elastic element 40; specifically, the floating adjustment seat 50 is then placed along the adjustment ball end 52 of the lower valve seat 70;
Step S5, forming a top air pressure cavity 81 of the main body valve 10 outside the flow channel space 61, so that the upper guide pillar 32 of the non-connected suspension valve rod 30 can receive the pushing air pressure of the driving valve film 20; wherein, in the process of step S1 to step S5, the self-balancing valve head 21 of the driving valve film 20 is always guided and slides on the notch ring 14 of the main body valve 10; specifically, the above components are aligned with the diaphragm guide post holes of the components by using the connecting rod 91 and are combined to the connecting seat 92 of the other end face of the main body valve 10, so that the main body valve 10 is assembled in a combined way, and the connecting end face of the main body valve 10 can be provided with the dust cover 93 again; specifically, the upper valve cover 80 is assembled with the valve upper air cavity cover on the surface.
The implementation principle of the method is that the step S1 to the step S5 are utilized to manufacture the adjustable pressure stabilizing valve driven by the mechanical structure without external force, so that the protection effect of stable supply of the fluid output pressure is realized, and adverse effects caused by fluctuation of the fluid input pressure can not be sensitively generated.
In a preferred example, the main body valve 10 in steps S1 to S3 specifically includes a middle valve seat 60, the main body valve 10 in step S4 further includes a lower valve seat 70 coupled to the bottom of the middle valve seat 60, the main body valve 10 in step S5 further includes an upper valve cover 80 coupled to the top of the middle valve seat 60, a vent hole 72 is formed at one side of the lower valve seat 70, and the assembly method further includes: connecting an exhaust pipe to the vent hole 72. The bottom and top of the middle valve seat 60 are sequentially combined with a lower valve seat 70 and an upper valve cover 80, respectively, to construct a bottom elastic chamber 71 having a fixed elastic force at the bottom of the middle valve seat 60 and a top air pressure chamber 81 having an adjustable air pressure at the top of the middle valve seat 60. In the assembly process from step S2 to step S3, since the top air pressure chamber 81 is not yet constructed, the non-connecting suspension valve rod 30 can always maintain the state that the pressure reducing valve head 31 seals the closed valve port 13, and the non-connecting suspension valve rod 30 is relatively stable and does not shake during the assembly process, so as to reduce the possible defect of fluid leakage caused by improper assembly operation.
The embodiments of the present invention are all preferred embodiments for easy understanding or implementation of the technical solution of the present invention, and are not limited in scope by the present invention, and all equivalent changes according to the structure, shape and principle of the present invention should be covered in the scope of the claimed invention.
Claims (10)
1. An adjustable pressure regulator valve, comprising:
the main body valve is internally provided with an input flow channel, an output flow channel, a closed valve port communicated with the input flow channel and the output flow channel and a notch ring positioned above the closed valve port, and the bottom of the main body valve is provided with an elastic element;
the driving valve film is arranged at the top of the main body valve and is used for separating a top air pressure cavity and a flow passage space from top to bottom, and the driving valve film is provided with a self-balancing valve head which is aligned and matched with the notch ring;
a non-connected suspended valve rod, which is provided with a pressure reducing valve head capable of sealing the closed valve port, an upper guide post arranged on the pressure reducing valve head, a diaphragm arranged below the pressure reducing valve head and a lower guide post positioned below the diaphragm, wherein the upper guide post only contacts the self-balancing valve head of the driving valve film so as to receive the downward pushing gas pressure of the driving valve film, and the lower guide post receives the upward pushing elastic force of the elastic element; when the fluid pressure fluctuation from the input flow channel is incremental and partially acts on the self-balancing valve head, the self-balancing valve head automatically moves upwards slightly so as to reduce the opening degree of the pressure reducing valve head; when the fluid pressure fluctuation from the input flow channel is decreasing and partially acts on the self-balancing valve head, the self-balancing valve head automatically moves down slightly so as to enlarge the opening degree of the pressure reducing valve head; in the ten-fold decompression range, the fluid pressure of the output flow channel is stabilized at an increasing fluctuation rate within 0-10% or at a decreasing fluctuation rate within-10-0%.
2. The trim valve of claim 1, wherein the self-balancing valve head has a diameter greater than the pressure relief valve head such that fluid pressure of the output flow passage is specifically stabilized at an incremental rate of fluctuation within a range of 0% -5% or a decremental rate of fluctuation within a range of-5% -0% over an octave pressure relief range.
3. The trim valve of claim 1, further comprising: the floating adjusting seat is arranged on the elastic element and is in elastic contact with the lower guide post, and is used for transmitting the rising elastic force of the elastic element to the non-connected suspension valve rod; the upper surface of the floating adjusting seat is provided with a guide hole so as to elastically contact the bottom end of the lower guide post; the guide hole is provided with an inner R angle, the bottom end of the lower guide post is provided with an outer R angle, and the inner R angle is larger than the outer R angle so as to facilitate the axial alignment of the lower guide post and the detachment of the floating adjusting seat from the lower guide post;
preferably, the relief valve head has an inverted conical bevel to reduce side stream impact of the input fluid on the non-connected depending valve stem;
preferably, the bottom of the floating adjusting seat extends to form an adjusting ball end, and the adjusting ball end is nested in the elastic element.
4. The adjustable pressure regulator valve according to claim 1, wherein the top end of the upper guide post is tightly fitted in the shaft hole of the self-balancing valve head; when the elastic element lifts the non-connected depending valve stem to its highest point, the relief valve head closes the closed valve port, while the self-balancing valve head is insufficient to disengage the split ring.
5. The regulator valve of claim 4, wherein the split ring opens toward the inlet of the inlet flow passage, and wherein a flow passage ring groove is formed around the split ring that communicates with the outlet flow passage.
6. The regulator valve of claim 5, wherein an increase in the air pressure of the top air pressure chamber or/and a decrease in the fluid pressure of the outlet flow passage moves the self-balancing valve head downward, the self-balancing valve head being shaped and thick to not close the split ring when the non-connecting depending valve stem is submerged to a lowest point; the elastic force of the elastic element pushes up or/and the fluid pressure of the input flow channel is increased to lift the non-connection hanging valve rod, and when the non-connection hanging valve rod is lifted to the highest point, the shape of the pressure reducing valve head can seal the closed valve port.
7. The regulator valve of claim 6, wherein the outer circumferential edge of the self-balancing valve head is connected with a stop ring, which is larger than the outer diameter of the notch ring, and when the stop ring abuts against the upper edge of the notch ring, the non-connected hanging valve rod sinks to the lowest point; the stop ring also extends above the runner ring groove so that fluid pressure reduction fluctuation energy from the output runner acts on the driving valve membrane, and the self-balancing valve head automatically moves downwards slightly.
8. The trim valve of any one of claims 1-7, wherein the body valve comprises:
the middle valve seat is used for providing the input flow channel, the output flow channel, the closed valve port and the notch ring;
the lower valve seat is combined below the middle valve seat and is used for fixing the first peripheral ring part of the diaphragm to form a bottom elastic chamber for accommodating the elastic element, one side of the lower valve seat is provided with a vent hole, and the vent hole is communicated with the elastic chamber where the elastic element is positioned;
the upper valve cover is combined above the middle valve seat and fixes the second peripheral ring part of the driving valve film so as to form a top air pressure cavity;
preferably, an upper fixing ring groove is formed above the middle valve seat for clamping the peripheral frame body of the driving valve membrane, a lower fixing ring groove is formed below the middle valve seat for clamping the peripheral frame body of the diaphragm, the driving valve membrane seals the upper opening of the middle valve seat, and the diaphragm seals the lower opening of the middle valve seat to form a flow passage space;
More preferably, the peripheral frame of the driving valve film has a lower protruding snap edge corresponding to the upper fixing ring groove, and the peripheral frame of the diaphragm has an upper protruding snap edge corresponding to the lower fixing ring groove;
preferably, a sleeve is arranged in the center of the lower valve seat for guiding and sliding the adjusting ball end of the floating adjusting seat, and the elastic element is sleeved on the outer diameter body of the sleeve.
9. A semiconductor manufacturing apparatus including the trim regulator valve as defined in any one of claims 1 to 8 for automatically stabilizing the fluid pressure of a working fluid continuously supplied from the output flow passage.
10. A method of assembling the trim valve of any one of claims 1-8, comprising:
s1, installing a driving valve membrane at the middle top of a main body valve;
s2, installing a non-connected suspension valve rod in the main body valve, wherein a diaphragm of the non-connected suspension valve rod is limited at the bottom of the main body valve so as to form a flow passage space;
s3, arranging an elastic element at the bottom of the main body valve;
s4, forming a bottom elastic chamber of the main body valve outside the flow passage space, so that the lower guide post of the non-connected suspension valve rod can receive the upward pushing elastic force of the elastic element;
S5, forming a top air pressure cavity of the main body valve outside the flow passage space, so that an upper guide pillar of the non-connected suspension valve rod can receive the pushing air pressure of the driving valve membrane; wherein, in the process from step S1 to step S5, the self-balancing valve head of the driving valve film always slides on the notch ring of the main body valve;
preferably, in step S1 to step S3, the main body valve specifically includes a middle valve seat, in step S4, the main body valve further includes a lower valve seat coupled to a bottom of the middle valve seat, in step S5, the main body valve further includes an upper valve cover coupled to a top of the middle valve seat, a vent hole is formed at one side of the lower valve seat, and the lower valve seat is communicated with a bottom elastic chamber where the elastic element is located, and the assembling method further includes: connecting an exhaust pipe to the vent hole.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311583546.XA CN117287541B (en) | 2023-11-24 | 2023-11-24 | Adjustable pressure stabilizing valve, assembling method thereof and semiconductor manufacturing equipment |
| CN202410114552.9A CN117927710A (en) | 2023-11-24 | 2023-11-24 | Pilot-operated pressure reducing valve for semiconductor wet process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311583546.XA CN117287541B (en) | 2023-11-24 | 2023-11-24 | Adjustable pressure stabilizing valve, assembling method thereof and semiconductor manufacturing equipment |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410114552.9A Division CN117927710A (en) | 2023-11-24 | 2023-11-24 | Pilot-operated pressure reducing valve for semiconductor wet process |
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| CN117287541A true CN117287541A (en) | 2023-12-26 |
| CN117287541B CN117287541B (en) | 2024-02-13 |
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| CN202410114552.9A Pending CN117927710A (en) | 2023-11-24 | 2023-11-24 | Pilot-operated pressure reducing valve for semiconductor wet process |
| CN202311583546.XA Active CN117287541B (en) | 2023-11-24 | 2023-11-24 | Adjustable pressure stabilizing valve, assembling method thereof and semiconductor manufacturing equipment |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070163657A1 (en) * | 2003-12-25 | 2007-07-19 | Asahi Organic Chemicals Industry Co., Ltd. | Constant flow valve |
| KR100753495B1 (en) * | 2006-07-19 | 2007-08-31 | 주식회사 영텍 | Valve structure of filter regulator |
| CN101109467A (en) * | 2006-07-19 | 2008-01-23 | 杨克庆 | Pressure-limiting stabilizing valve |
| CN201228792Y (en) * | 2007-08-16 | 2009-04-29 | 陆丕贤 | Pneumatic air pressure reducing valve |
| CN201288868Y (en) * | 2008-04-03 | 2009-08-12 | 周晓冬 | Pressure reducing valve |
| JP2019101946A (en) * | 2017-12-07 | 2019-06-24 | 株式会社ダンレイ | Pressure reduction valve |
| CN209705299U (en) * | 2019-03-30 | 2019-11-29 | 江苏阀邦半导体材料科技有限公司 | A kind of energy-saving type gas pressure reducing valve |
| CN219692293U (en) * | 2023-01-30 | 2023-09-15 | 宁波市华益气动工程有限公司 | Oil-free lubrication pressure reducing valve |
-
2023
- 2023-11-24 CN CN202410114552.9A patent/CN117927710A/en active Pending
- 2023-11-24 CN CN202311583546.XA patent/CN117287541B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070163657A1 (en) * | 2003-12-25 | 2007-07-19 | Asahi Organic Chemicals Industry Co., Ltd. | Constant flow valve |
| KR100753495B1 (en) * | 2006-07-19 | 2007-08-31 | 주식회사 영텍 | Valve structure of filter regulator |
| CN101109467A (en) * | 2006-07-19 | 2008-01-23 | 杨克庆 | Pressure-limiting stabilizing valve |
| CN201228792Y (en) * | 2007-08-16 | 2009-04-29 | 陆丕贤 | Pneumatic air pressure reducing valve |
| CN201288868Y (en) * | 2008-04-03 | 2009-08-12 | 周晓冬 | Pressure reducing valve |
| JP2019101946A (en) * | 2017-12-07 | 2019-06-24 | 株式会社ダンレイ | Pressure reduction valve |
| CN209705299U (en) * | 2019-03-30 | 2019-11-29 | 江苏阀邦半导体材料科技有限公司 | A kind of energy-saving type gas pressure reducing valve |
| CN219692293U (en) * | 2023-01-30 | 2023-09-15 | 宁波市华益气动工程有限公司 | Oil-free lubrication pressure reducing valve |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117287541B (en) | 2024-02-13 |
| CN117927710A (en) | 2024-04-26 |
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