CN117283004B - TiB containing twin crystal reinforcement x Coated cutting tool and method for producing same - Google Patents
TiB containing twin crystal reinforcement x Coated cutting tool and method for producing same Download PDFInfo
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- CN117283004B CN117283004B CN202311592338.6A CN202311592338A CN117283004B CN 117283004 B CN117283004 B CN 117283004B CN 202311592338 A CN202311592338 A CN 202311592338A CN 117283004 B CN117283004 B CN 117283004B
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- 238000005520 cutting process Methods 0.000 title claims abstract description 52
- 239000013078 crystal Substances 0.000 title claims abstract description 23
- 230000002787 reinforcement Effects 0.000 title claims abstract description 13
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 238000000576 coating method Methods 0.000 claims abstract description 173
- 239000011248 coating agent Substances 0.000 claims abstract description 168
- 238000000034 method Methods 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 21
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000010936 titanium Substances 0.000 claims abstract description 13
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 13
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 14
- 229910052796 boron Inorganic materials 0.000 claims description 14
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 11
- 238000002360 preparation method Methods 0.000 claims description 10
- 229910010060 TiBN Inorganic materials 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 8
- 239000012159 carrier gas Substances 0.000 claims description 7
- 230000007704 transition Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 23
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract description 16
- 238000003801 milling Methods 0.000 abstract description 10
- 229910000601 superalloy Inorganic materials 0.000 abstract description 10
- 229910052759 nickel Inorganic materials 0.000 abstract description 8
- 238000003754 machining Methods 0.000 abstract description 2
- 239000000523 sample Substances 0.000 description 32
- 239000010410 layer Substances 0.000 description 30
- 238000005229 chemical vapour deposition Methods 0.000 description 29
- 239000011247 coating layer Substances 0.000 description 16
- 239000007789 gas Substances 0.000 description 12
- 238000005728 strengthening Methods 0.000 description 11
- 238000000151 deposition Methods 0.000 description 10
- 238000005240 physical vapour deposition Methods 0.000 description 9
- 230000008021 deposition Effects 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 6
- 238000004040 coloring Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000013074 reference sample Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000001887 electron backscatter diffraction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007385 chemical modification Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/38—Borides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/10—Coatings
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention belongs to the technical field of machining tools, and particularly relates to a TiB containing twin crystal reinforcement x A coated cutting tool and a method of making the same, including a cutting tool substrate and a coating on the substrate; the coating comprises at least one layer of TiB deposited by CVD and having a thickness of at least 0.1 μm x Coating, tiB x X of (2) satisfies 1.7.ltoreq.x.ltoreq.2.0, the TiB x The coating has a sigma 3 twin structure, and the ratio of twin grain boundaries in the total grain boundary length is more than 30%; the invention effectively enhances the toughness and the wear resistance of the cutter, and the cutter has high strength, high hardness and excellent wear resistance, and is suitable for milling difficult-to-process materials such as titanium-based and nickel-based superalloy.
Description
Technical Field
The invention belongs to the technical field of machining tools, and particularly relates to a TiB containing twin crystal reinforcement x Coated tools and methods of making the same.
Background
Surface coatings are widely used to improve the wear resistance and cutting life of tool materials. Wherein TiB is 2 Has the characteristics of high hardness, high melting point, excellent wear resistance, low friction coefficient and the like, and becomes an ideal choice for improving the wear resistance of the material. Preparation of TiB 2 Methods of coating include PVD (physical vapor deposition) and CVD (chemical vapor deposition) methods. Wherein, tiB prepared by PVD method 2 The coating has the technical problems of overhigh residual stress, poor film base binding force and the like. CVD coating is a common coating technique by reacting gaseous reactants at elevated temperaturesDeposited on the surface of the substrate to form a thin film having desired characteristics. TiB prepared by CVD method 2 The coating can well avoid the problems of high coating stress and poor film-base binding force caused by a PVD method.
Chinese patent publication No. CN101889104a discloses TiB with very fine grain structure prepared by CVD method 2 Coating, tiB of the invention 2 The average grain size of the coating is less than 50nm, so that the wear resistance of the coating is improved to a certain extent. However, this wear resistance has room for improvement for very difficult to process materials.
It is well known that the law between the strength and grain size of polycrystalline materials follows the Hall-Petch relationship. The Hall-Petch relationship has the expression:wherein σ is the yield strength of the material, +.>Is the basic yield strength of the material independent of the grain size, d is the average grain size, +.>Is a constant related to the nature and structure of the material. According to the Hall-Petch relationship, the strength of the crystalline material increases with decreasing grain size. However, when the grain size reaches the nanometer level, the rule between the strength of the material and the grain size follows the inverse Hall-Petch relationship, i.e., it is difficult to continue to increase the strength of the material by continuing to decrease the grain size, and conversely, the material strength begins to decrease. Therefore, it is difficult to continue lowering TiB 2 The grain size of the coating improves the strength and wear resistance. In addition, the temperature of the tip of the cutting tool is very high during processing of difficult-to-process materials. Nanocrystalline TiB 2 The coating has a large number of grain boundaries, and heat generated in the cutting process can induce nano TiB 2 The grain boundary of the coating slips, thereby reducing its hardness at high temperatures.
In conclusion, tiB can be improved by fine grain strengthening 2 The performance of the coating is improved, and the cutting of difficult-to-process materials is improvedPerformance. However, it is difficult to continue to lower TiB by the anti-Hall-Petch effect 2 To improve its performance. In addition, nanocrystalline TiB 2 Grain boundary sliding is easily generated at high temperature generated by cutting, so that plastic deformation is generated, and continuous improvement of cutting performance is limited. Grain boundaries have a significant impact on material properties including grain growth, creep, diffusion, electrical properties, optical properties, and mechanical properties. Important factors include grain boundary density, interfacial chemical composition, and poor grain boundary orientation. CSL grain boundaries are characterized by a multiple index Σ, low Σ value grain boundaries typically having low interfacial energy and special properties. Thus, controlling the specific grain boundary ratio for increasing TiB 2 The nature of the coating is critical.
Disclosure of Invention
To solve the problems in the prior art, the main object of the invention is to provide a TiB with twin crystal strengthening x Coated tools and methods of making the same.
In order to solve the technical problems, according to one aspect of the present invention, the following technical solutions are provided:
TiB containing twin crystal reinforcement x A coated tool comprising a tool substrate and a coating on the substrate; the coating comprises at least one layer of TiB deposited by CVD and having a thickness of at least 0.1 μm x Coating, tiB x X of (2) satisfies 1.7.ltoreq.x.ltoreq.2.0, the TiB x The coating has a sigma 3 twin structure with a twin grain boundary of greater than 30% of the total grain boundary length.
As the TiB containing twin crystal strengthening x A preferred version of the coated tool wherein: the TiB is x The coating also contains a stacking fault structure.
As the TiB containing twin crystal strengthening x A preferred version of the coated tool wherein: the TiB is x The boron content of the coating is 62.9-65.6at%.
As the TiB containing twin crystal strengthening x A preferred version of the coated tool wherein: the TiB is x The grain size of the coating is more than 50nm.
As one of the inventionTiB containing twinning reinforcement x A preferred version of the coated tool wherein: the TiB is x The thickness of the coating is 0.1-10 mu m.
As the TiB containing twin crystal strengthening x A preferred version of the coated tool wherein: the TiB is x The microhardness of the coating is more than or equal to 50GPa.
As the TiB containing twin crystal strengthening x A preferred version of the coated tool wherein: the coating comprises a first coating, a second coating and a third coating from the substrate outwards in sequence, wherein the first coating is a TiN coating, a TiC coating or a TiCN coating; the second coating is a TiBN transition layer, wherein the boron content gradually increases from the first coating to the third coating; the third coating is TiB x And (3) coating.
As the TiB containing twin crystal strengthening x A preferred version of the coated tool wherein: the third coating layer also comprises a fourth coating layer, wherein the fourth coating layer is a top coloring layer, and the top coloring layer is a TiN coating layer, a TiC coating layer or a TiCN coating layer.
As the TiB containing twin crystal strengthening x A preferred version of the coated tool wherein: the first coating thickness is 0.1-1 μm, the second coating thickness is 0.1-0.5 μm, and the fourth coating thickness is 0.1-2 μm.
In order to solve the above technical problems, according to another aspect of the present invention, the following technical solutions are provided:
TiB containing twin crystal reinforcement x A method of making a coated tool comprising: applying a coating to a tool substrate, said coating comprising at least one layer of TiB deposited by CVD x Coating, tiB x The preparation temperature of the coating is 700-900 ℃, the preparation pressure is 30-100 mbar, and BCl is adopted 3 As boron source for the coating TiCl is used 4 As a titanium source for the coating, H was used 2 As a carrier gas.
As the TiB containing twin crystal strengthening x A preferred embodiment of the method for producing a coated tool, wherein: the TiCl is 4 0.2-0.6vol% of total air flow, and the BCl is as follows 3 In the form of pulsesIntroducing the mixture into a reaction container, wherein the pulse peak value accounts for 1.0-1.5vol% of the total air flow, the pulse trough accounts for 0.1-0.5vol% of the total air flow, and the pulse period is 30-60 s.
The beneficial effects of the invention are as follows:
the invention provides a TiB containing twin crystal reinforcement x A coated cutting tool and a method of making the same, including a cutting tool substrate and a coating on the substrate; the coating comprises at least one layer of TiB deposited by CVD and having a thickness of at least 0.1 μm x Coating, tiB x X of (2) satisfies 1.7.ltoreq.x.ltoreq.2.0, the TiB x The coating has a sigma 3 twin structure, and the ratio of twin grain boundaries in the total grain boundary length is more than 30%; the invention effectively enhances the toughness and the wear resistance of the cutter, and the cutter has high strength, high hardness and excellent wear resistance, and is suitable for milling difficult-to-process materials such as titanium-based and nickel-based superalloy.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.
FIG. 1 shows a twin-reinforced TiB according to example 1 of the present invention 2 TiB of coated tool x Surface topography of the coating.
FIG. 2 shows a twin-reinforced TiB according to example 1 of the present invention 2 Fracture morphology of the coating of the coated tool.
FIG. 3 shows a twin-reinforced TiB according to example 1 of the present invention 2 TiB of coated tool 2 Twin structure of the coating.
FIG. 4 shows a twin-strengthened TiB according to example 1 of the present invention 2 TiB of coated tool 2 Stacking fault structure of the coating.
The achievement of the objects, functional features and advantages of the present invention will be further described with reference to the accompanying drawings, in conjunction with the embodiments.
Detailed Description
The following description will be made clearly and fully with reference to the technical solutions in the embodiments, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
According to one aspect of the invention, the invention provides the following technical scheme:
TiB containing twin crystal reinforcement x A coated tool comprising a tool substrate and a coating on the substrate; the coating comprises at least one layer of TiB deposited by CVD and having a thickness of at least 0.1 μm x Coating, tiB x X of (2) satisfies 1.7.ltoreq.x.ltoreq.2.0, the TiB x The coating has a sigma 3 twin structure with a twin grain boundary of greater than 30% of the total grain boundary length. Specifically, tiB x X of (c) may be, for example, but is not limited to, any one or a range between any two of 1.7, 1.75, 1.8, 1.85, 1.9, 1.95, 2.0.
Preferably, the TiB x The coating also contains a stacking fault structure. The TiB is x The boron content of the coating is 62.9-65.6at%. The TiB is x The grain size of the coating is more than 50nm. The TiB is x The thickness of the coating is 0.1-10 mu m. The TiB is x The microhardness of the coating is more than or equal to 50GPa. Specifically, the TiB x The boron content of the coating may be, for example, but not limited to, any one or a range between any two of 62.9at%, 63.0at%, 63.5at%, 64.0at%, 64.5at%, 65.0at%, 65.6at%; the TiB is x The thickness of the coating may be, for example, but not limited to, any one or a range between any two of 0.1 μm, 0.2 μm, 0.5 μm, 1 μm, 2 μm, 3 μm, 4 μm, 5 μm, 6 μm, 7 μm, 8 μm, 9 μm, 10 μm;
preferably, the coating comprises a first coating, a second coating and a third coating from the substrate to the outside in sequence, wherein the first coating is a TiN coating, a TiC coating or a TiCN coating; the second coating is a TiBN transition layer, wherein the boron content gradually changes from the first coating to the third coatingLifting; the third coating is TiB x And (3) coating.
Further preferably, the third coating layer further comprises a fourth coating layer, the fourth coating layer is a top coloring layer, and the top coloring layer is a TiN coating layer, a TiC coating layer or a TiCN coating layer. Further preferably, the first coating layer has a thickness of 0.1 to 1 μm, the second coating layer has a thickness of 0.1 to 0.5 μm, and the fourth coating layer has a thickness of 0.1 to 2 μm.
According to another aspect of the invention, the invention provides the following technical scheme:
TiB containing twin crystal reinforcement x A method of making a coated tool comprising: applying a coating to a tool substrate, said coating comprising at least one layer of TiB deposited by CVD x Coating, tiB x The preparation temperature of the coating is 700-900 ℃, the preparation pressure is 30-100 mbar, and BCl is adopted 3 As boron source for the coating TiCl is used 4 As a titanium source for the coating, H was used 2 As a carrier gas.
Preferably, the TiCl 4 0.2-0.6vol% of total air flow, and the BCl is as follows 3 The reaction vessel is filled with pulse, the peak value of the pulse is 1.0-1.5vol% of the total air flow, the trough of the pulse is 0.1-0.5vol% of the total air flow, and the pulse period is 30-60 s. BCl (binary coded decimal) 3 The TiB which can ensure the strengthening of the twin crystal is introduced in the pulse form x And (3) preparation of a coating.
The technical scheme of the invention is further described below by combining specific embodiments.
Example 1
TiB containing twin crystal reinforcement x A coated cutter, wherein a CVD technology is used for coating 3 layers of coatings on a cemented carbide indexable insert RPHT 1204M8E, and the coated cutter comprises a cemented carbide cutter substrate and the coatings on the substrate; the hard alloy comprises 9.5wt% of Co,1.5wt% of Re and the balance of WC, and the 3-layer coating is respectively a TiN coating, a TiBN coating and a TiB coating x The thickness of the coating was 0.5 μm, 0.3 μm and 2.5 μm, respectively. The three types of samples are referred to as sample A1 (invention), sample B (conventional CVD coating reference sample) and sample C (PVD coating reference sample), respectively. TiB in sample A1 and sample B x The layers were prepared by CVD, but the process was different, sample C wasPVD method preparation. The process parameters for sample A1 and sample B deposition are as follows (the first layer TiN and second layer TiBN processes are the same):
depositing a first TiN coating by CVD at 860℃and 120 mbar under TiCl 4 、N 2 And H 2 Accounting for 1.5vol%, 40vol% and 58.5% of the total gas flow, respectively.
Depositing a second TiBN coating by CVD at 800 ℃ and 65mbar TiCl 4 And H 2 Accounting for 1.5vol% and 58.5% of the total gas flow, respectively. N (N) 2 Gradually reducing the ratio from 40vol% to 0vol%, and BCl 3 The duty ratio gradually increases from 0vol% to 1.2vol%.
Sample A1, deposition of a third TiB layer by CVD method x Coating, tiB x The coating was prepared at a temperature of 800℃and a pressure of 65mbar using BCl 3 As boron source for the coating TiCl is used 4 As a titanium source for the coating, H was used 2 As a carrier gas. The TiCl is 4 0.44vol% of the total gas flow, said BCl 3 Introducing the mixture into a reaction vessel in a pulse mode, wherein the pulse peak value is 1.2vol% of the total gas flow, the pulse trough is 0.2vol% of the total gas flow, and the pulse period is 50s; third layer TiB x The coating is TiB of a third layer 2 And (3) coating.
Sample B, deposition of third layer TiB by CVD method x Coating, tiB x The coating was prepared at a temperature of 800℃and a pressure of 65mbar using BCl 3 As boron source for the coating TiCl is used 4 As a titanium source for the coating, H was used 2 As a carrier gas. The TiCl is 4 0.44vol% of the total gas flow, said BCl 3 The reaction vessel was fed at a constant flow rate, accounting for 0.7vol% of the total gas flow.
FIG. 1 shows a twin-reinforced TiB according to example 1 of the present invention 2 TiB of coated tool 2 A surface topography of the coating; FIG. 2 shows a twin-reinforced TiB according to example 1 of the present invention 2 A fracture morphology map of the coating of the coated tool; FIG. 3 shows a twin-reinforced TiB according to example 1 of the present invention 2 TiB of coated tool 2 Twin structure of the coating; FIG. 4 shows the twin strength of example 1 of the present inventionTiB of chemical modification 2 TiB of coated tool 2 Stacking fault structure of the coating. TiB of the tool prepared in example 1 of the present invention 2 The coating contains a twin structure and contains a certain amount of stacking faults, and the TiB of the invention is obtained by EBSD measurement 2 The twin boundary of the Σ3 twin structure of the coating had a 35% ratio in the total grain boundary length.
Experiment one: the tool prepared in example 1 (sample A1) and the CVD TiB without twinning structure prepared in the prior art were milled by nickel-based superalloy 2 The coated tool (sample B) was subjected to experimental comparison.
The operation is as follows: face milling
Work piece: square piece
Materials: GH4169
Cutting speed: 45m/min
Feeding: 0.2mm/tooth
Cutting depth: 1mm of
Cutting width: 35mm
Wet cutting
The wear values VB (unit mm) measured after cutting for 3 minutes, 6 minutes, 9 minutes and 12 minutes are shown in Table 1 below.
Table 1 wear values VB (unit mm) after cutting for 3 minutes, 6 minutes, 9 minutes and 12 minutes
Experiment II: the tool prepared in example 1 (sample A1) and the CVD TiB without twinning structure prepared in the prior art were milled by titanium-based superalloy 2 The coated tool (sample B) was subjected to experimental comparison.
The operation is as follows: face milling
Work piece: square piece
Materials: TC18
Cutting speed: 45m/min
Feeding: 0.2mm/tooth
Cutting depth: 1mm of
Cutting width: 44mm
Wet cutting
The wear values VB (unit mm) measured after cutting for 3 minutes, 8 minutes, 12 minutes and 16 minutes are shown in Table 2 below.
Table 2 wear values VB (unit mm) after cutting for 3 minutes, 8 minutes, 12 minutes and 16 minutes
Experiment III: the tool prepared in example 1 (sample A1) and PVD TiB without twinning structure prepared in the prior art were milled by nickel-based superalloy 2 The coated tool (sample C) was subjected to experimental comparison.
The operation is as follows: face milling
Work piece: square piece
Materials: GH4169
Cutting speed: 30m/min
Feeding: 0.22mm/tooth
Cutting depth: 2.5mm
Cutting width: 38mm of
Wet cutting
The wear values VB (unit mm) measured after cutting for 3 minutes, 6 minutes, 9 minutes and 12 minutes are shown in Table 3 below.
TABLE 3 wear values VB (unit mm) after cutting for 3 minutes, 6 minutes, 9 minutes and 12 minutes
It can be seen that the twin-reinforced TiB of the present example 2 The coated cutter has better performance and can be better suitable for milling difficult-to-process materials such as titanium-based and nickel-based superalloy.
Example 2
TiB containing twin crystal reinforcement x A coated cutter, wherein a CVD technology is used for coating 3 layers of coatings on a cemented carbide indexable insert RPHT 1204M8E, and the coated cutter comprises a cemented carbide cutter substrate and the coatings on the substrate; the hard alloy component is 9.5wt% of Co,1.5wt% of Re and the balanceThe WC, 3-layer coating of (a) is respectively TiN coating, tiBN coating and TiB coating x The thickness of the coating was 0.5 μm, 0.3 μm and 2.5 μm, respectively. The three types of samples are referred to as sample A2 (invention), sample B (conventional CVD coating reference sample) and sample C (PVD coating reference sample), respectively. TiB in sample A2 and sample B x The layers were prepared by CVD but the process was different and sample C was prepared by PVD. The process parameters for sample A2 and sample B deposition are as follows (the first layer TiN and second layer TiBN processes are the same):
depositing a first TiN coating by CVD at 860℃and 120 mbar under TiCl 4 、N 2 And H 2 Accounting for 1.5vol%, 40vol% and 58.5% of the total gas flow, respectively.
Depositing a second TiBN coating by CVD at 800 ℃ and 65mbar TiCl 4 And H 2 Accounting for 1.5vol% and 58.5% of the total gas flow, respectively. N (N) 2 Gradually reducing the ratio from 40vol% to 0vol%, and BCl 3 The duty ratio gradually increases from 0vol% to 1.2vol%.
Sample A2, deposition of TiB third layer by CVD method x Coating, tiB x The coating was prepared at a temperature of 850℃and a pressure of 70mbar using BCl 3 As boron source for the coating TiCl is used 4 As a titanium source for the coating, H was used 2 As a carrier gas. The TiCl is 4 0.5vol% of the total gas flow, said BCl 3 Introducing the mixture into a reaction vessel in a pulse mode, wherein the pulse peak value accounts for 1.0vol% of the total air flow, the pulse trough accounts for 0.1vol% of the total air flow, and the pulse period is 60s; third layer TiB x The coating is TiB of a third layer 1.8 And (3) coating.
Sample B, deposition of third layer TiB by CVD method x Coating, tiB x The coating was prepared at a temperature of 800℃and a pressure of 65mbar using BCl 3 As boron source for the coating TiCl is used 4 As a titanium source for the coating, H was used 2 As a carrier gas. The TiCl is 4 0.44vol% of the total gas flow, said BCl 3 The reaction vessel was fed at a constant flow rate, accounting for 0.7vol% of the total gas flow.
T of tool prepared in inventive example 2iB 1.8 The coating contains a twin structure and contains a certain amount of stacking faults, and the TiB of the invention is obtained by EBSD measurement 1.8 The twin boundary of the Σ3 twin structure of the coating layer has a ratio of 32% in the total grain boundary length.
Experiment IV: the tool prepared in example 2 (sample A2) and the CVD TiB without twinning structure prepared in the prior art were milled by nickel-based superalloy 2 The coated tool (sample B) was subjected to experimental comparison.
The operation is as follows: face milling
Work piece: square piece
Materials: GH4169
Cutting speed: 45m/min
Feeding: 0.2mm/tooth
Cutting depth: 1mm of
Cutting width: 35mm
Wet cutting
The wear values VB (unit mm) measured after cutting for 3 minutes, 6 minutes, 9 minutes and 12 minutes are shown in Table 4 below.
Table 4 wear values VB (unit mm) after cutting for 3 minutes, 6 minutes, 9 minutes and 12 minutes
Experiment five: the tool prepared in example 2 (sample A2) and the CVD TiB without twinning structure prepared in the prior art were milled by titanium-based superalloy 2 The coated tool (sample B) was subjected to experimental comparison.
The operation is as follows: face milling
Work piece: square piece
Materials: TC18
Cutting speed: 45m/min
Feeding: 0.2mm/tooth
Cutting depth: 1mm of
Cutting width: 44mm
Wet cutting
The wear values VB (unit mm) measured after cutting for 3 minutes, 8 minutes, 12 minutes and 16 minutes are shown in Table 5 below.
Table 5 wear values VB (unit mm) after cutting for 3 minutes, 8 minutes, 12 minutes and 16 minutes
Experiment six: the tool prepared in example 2 (sample A2) and PVD TiB without twinning structure prepared in the prior art were milled by nickel-based superalloy 2 The coated tool (sample C) was subjected to experimental comparison.
The operation is as follows: face milling
Work piece: square piece
Materials: GH4169
Cutting speed: 30m/min
Feeding: 0.22mm/tooth
Cutting depth: 2.5mm
Cutting width: 38mm of
Wet cutting
The wear values VB (unit mm) measured after cutting for 3 minutes, 6 minutes, 9 minutes and 12 minutes are shown in Table 6 below.
TABLE 6 wear values VB (unit mm) after cutting for 3 minutes, 6 minutes, 9 minutes and 12 minutes
The invention contains the TiB reinforced by twin crystals x The coated tool comprises a tool body and a coating on the body; the coating comprises at least one layer of TiB deposited by CVD and having a thickness of at least 0.1 μm x Coating, tiB x X of (2) satisfies 1.7.ltoreq.x.ltoreq.2.0, the TiB x The coating has a sigma 3 twin structure, and the ratio of twin grain boundaries in the total grain boundary length is more than 30%; the invention effectively enhances the toughness and the wear resistance of the cutter, and the cutter has high strength, high hardness and excellent wear resistance, and is suitable for milling difficult-to-process materials such as titanium-based and nickel-based superalloy.
The foregoing description is only of the preferred embodiments of the present invention and is not intended to limit the scope of the invention, and all equivalent structural changes made by the content of the present invention or direct/indirect application in other related technical fields are included in the scope of the present invention.
Claims (8)
1. TiB containing twin crystal reinforcement x A coated tool comprising a tool substrate and a coating on the substrate; the coating comprises at least one layer of TiB deposited by CVD and having a thickness of at least 0.1 μm x Coating, tiB x X of (2) satisfies 1.7.ltoreq.x.ltoreq.2.0, the TiB x The coating has a sigma 3 twin structure, and the ratio of twin grain boundaries in the total grain boundary length is more than 30%; the TiB is x The boron content of the coating is 62.9-65.6at%; the TiB is x The grain size of the coating is more than 50nm.
2. The twinned-enriched TiB of claim 1 x Coated cutting tool, characterized in that the TiB x The coating also contains a stacking fault structure.
3. The twinned-enriched TiB of claim 1 x Coated cutting tool, characterized in that the TiB x The thickness of the coating is 0.1-10 mu m.
4. The twinned-enriched TiB of claim 1 x Coated cutting tool, characterized in that the TiB x The microhardness of the coating is more than or equal to 50GPa.
5. The twinned-enriched TiB of claim 1 x The coated cutter is characterized in that the coating sequentially comprises a first coating, a second coating and a third coating from the substrate to the outside, wherein the first coating is a TiN coating, a TiC coating or a TiCN coating; the second coating is a TiBN transition layer, wherein the boron content gradually increases from the first coating to the third coating; the third coating is TiB x And (3) coating.
6. The twinned-enriched TiB of claim 5 x The coated cutting tool is characterized in that the thickness of the first coating is 0.1-1 mu m, and the thickness of the second coating is 0.1-0.5 mu m.
7. A twinned-enriched TiB according to any one of claims 1 to 6 x A method of making a coated tool comprising: applying a coating to a tool substrate, said coating comprising at least one layer of TiB deposited by CVD x Coating, tiB x The preparation temperature of the coating is 700-900 ℃, the preparation pressure is 30-100 mbar, and BCl is adopted 3 As boron source for the coating TiCl is used 4 As a titanium source for the coating, H was used 2 As a carrier gas.
8. The twinned-enriched TiB of claim 7 x A process for the preparation of coated tools, characterized in that the TiCl 4 0.2-0.6vol% of total air flow, and the BCl is as follows 3 The reaction vessel is filled with pulse, the peak value of the pulse is 1.0-1.5vol% of the total air flow, the trough of the pulse is 0.1-0.5vol% of the total air flow, and the pulse period is 30-60 s.
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| CN117926215B (en) * | 2024-03-25 | 2024-06-07 | 赣州澳克泰工具技术有限公司 | Cutter with CVD coating and preparation method thereof |
| CN117943599B (en) * | 2024-03-26 | 2024-06-21 | 赣州澳克泰工具技术有限公司 | CVD (chemical vapor deposition) coating cutting tool and preparation method thereof |
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| EP2209929A1 (en) * | 2007-12-06 | 2010-07-28 | Ceratizit Austria GmbH | Coated article |
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