CN117926215B - Cutter with CVD coating and preparation method thereof - Google Patents
Cutter with CVD coating and preparation method thereof Download PDFInfo
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- CN117926215B CN117926215B CN202410340630.7A CN202410340630A CN117926215B CN 117926215 B CN117926215 B CN 117926215B CN 202410340630 A CN202410340630 A CN 202410340630A CN 117926215 B CN117926215 B CN 117926215B
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- 238000000576 coating method Methods 0.000 title claims abstract description 154
- 239000011248 coating agent Substances 0.000 title claims abstract description 146
- 238000002360 preparation method Methods 0.000 title claims abstract description 30
- 239000010936 titanium Substances 0.000 claims description 54
- 238000005229 chemical vapour deposition Methods 0.000 claims description 43
- 239000007789 gas Substances 0.000 claims description 23
- 239000000203 mixture Substances 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 21
- 230000007704 transition Effects 0.000 claims description 16
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 11
- 229910052719 titanium Inorganic materials 0.000 claims description 11
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 10
- 229910052796 boron Inorganic materials 0.000 claims description 10
- 239000012159 carrier gas Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 239000002064 nanoplatelet Substances 0.000 claims description 5
- 230000007423 decrease Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 abstract description 19
- 238000003801 milling Methods 0.000 abstract description 7
- 229910000601 superalloy Inorganic materials 0.000 abstract description 5
- 238000002441 X-ray diffraction Methods 0.000 abstract description 4
- 230000000052 comparative effect Effects 0.000 description 11
- 239000013078 crystal Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention relates to a tool with a CVD coating and a preparation method thereof, wherein the coating at least comprises a Ti xBy coating, and y/x is more than or equal to 2.0 and less than or equal to 2.4; the Ti xBy coating has a strongest peak in the XRD pattern of (110) and a texture coefficient greater than 2. The coated tool has excellent cutting performance in milling of superalloy.
Description
Technical Field
The invention belongs to the technical field of machining tools, and particularly relates to a tool with a CVD coating and a preparation method thereof.
Background
The surface coating can significantly improve the wear resistance and cutting life of the tool material. TiB 2 coatings are commonly used to enhance the durability and service life of tools because of their relatively high hardness, excellent wear resistance, and low coefficient of friction. Common techniques for preparing such coatings include Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) methods. The TiB 2 coating prepared by the PVD method has the defects of high residual compressive stress and poor coating binding force. In contrast, the TiB 2 coating prepared by the CVD method has higher coating binding force and lower coating compressive stress. Thus, the CVD method for preparing TiB 2 coating is ideal choice for improving the wear resistance and the cutting life of the cutter material. However, the existing TiB 2 coating cutting tool can not meet the requirement of high-efficiency cutting of high-temperature alloy. Structural optimization of existing CVD TiB 2 coatings is required. In addition, the existing CVD coating has higher preparation temperature, and is easy to cause B element to diffuse to a matrix to form brittle harmful phase. Therefore, there is also a need for temperature control during deposition.
Disclosure of Invention
In order to solve the defects that the coating is not wear-resistant and a film-based interface is easy to generate brittle harmful phase in the existing CVD TiB 2 coating technology, the main purpose of the invention is to provide a cutter with a CVD coating and a preparation method thereof.
In order to solve the technical problems, according to one aspect of the present invention, the following technical solutions are provided:
A tool having a CVD coating comprising a tool substrate and a coating applied to the substrate, said coating comprising at least one layer of Ti xBy coating deposited by CVD, wherein 2.0 +.y/x +.2.4; the Ti xBy coating crystals have a tissue structure which preferentially grows in the (110) direction and have a texture coefficient greater than 2.
As a preferred embodiment of the tool with CVD coating according to the invention, wherein: the thickness of the Ti xBy coating is greater than 0.5 μm.
As a preferred embodiment of the tool with CVD coating according to the invention, wherein: the average grain size of the Ti xBy coating is less than 1.9 μm.
As a preferred embodiment of the tool with CVD coating according to the invention, wherein: the microhardness of the Ti xBy coating is more than 41GPa.
As a preferred embodiment of the tool with CVD coating according to the invention, wherein: the Ti xBy coating comprises a nanoplatelet structure wherein each nanoplatelet layer has a thickness of less than 9nm.
As a preferred embodiment of the tool with CVD coating according to the invention, wherein: the coating comprises a TiN coating, a transition layer and a Ti xBy coating from inside to outside in sequence from the surface of the cutter matrix.
As a preferred embodiment of the tool with CVD coating according to the invention, wherein: the thickness of the TiN coating is 0.1-1 mu m; the thickness of the transition layer is 0.1-0.5 mu m.
As a preferred embodiment of the tool with CVD coating according to the invention, wherein: the boron content of the transition layer is gradually increased from 0 to 67% from inside to outside.
In order to solve the above technical problems, according to another aspect of the present invention, the following technical solutions are provided:
The preparation method of the tool with the CVD coating comprises the following steps: depositing a Ti xBy coating on the tool substrate by a CVD method;
The preparation temperature of the Ti xBy coating is 700-800 ℃, the preparation pressure is 30-150 mbar, BCl 3 is adopted as a boron source of the coating, tiCl 4 is adopted as a titanium source of the coating, and H 2 is adopted as carrier gas to form a gas mixture, wherein the content of TiCl 4 in the gas mixture is 0.22-0.66 vol%, the content of BCl 3 is 1.19-1.59 vol%, and the content of BCl 3 is preferably 1.35-1.45 vol%.
As a preferred embodiment of the method for producing a tool with CVD coating according to the invention, the following applies: sequentially depositing a TiN coating, a transition layer and a Ti xBy coating on a cutter substrate by a CVD method;
The preparation temperature of the TiN coating is 800-1000 ℃, the preparation pressure is 80-500 mbar, N 2 is used as a nitrogen source of the coating, tiCl 4 is used as a titanium source of the coating, H 2 is used as carrier gas to form a gas mixture, the content of TiCl 4 in the gas mixture is 1.0-3.0vol% and the content of N 2 in the gas mixture is 30-50vol%;
The preparation temperature of the transition layer is 700-800 ℃, the preparation pressure is 30-150 mbar, N 2 is used as a nitrogen source of the coating, BCl 3 is used as a boron source of the coating, tiCl 4 is used as a titanium source of the coating, H 2 is used as carrier gas to form a gas mixture, the content of N 2 in the gas mixture gradually decreases from 40vol% to 0, the content of TiCl 4 is 1.0-3.0vol%, and the content of BCl 3 gradually increases from 0.1vol% to 1.30vol%.
The beneficial effects of the invention are as follows:
The invention provides a tool with a CVD coating and a preparation method thereof, comprising a tool substrate and a coating coated on the substrate, wherein the coating at least comprises a Ti xBy coating deposited by the CVD method, wherein y/x is more than or equal to 2.0 and less than or equal to 2.4; the Ti xBy coating crystal has a tissue structure which preferentially grows in the (110) direction, the texture coefficient is larger than 2, the coating has high strength, high hardness and excellent wear resistance, and a cutter coated with the coating has excellent cutting performance in the milling of a superalloy.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a graph of the topography of the coating of a tool having a CVD coating according to example 1 of the present invention.
FIG. 2 is a graph of the coating fracture morphology of a tool with CVD coating according to example 1 of the present invention.
Fig. 3 is a coating XRD diffractogram of the tool with CVD coating of example 1 of the present invention.
Fig. 4 is a nanolayered structure of a coating of a tool having a CVD coating according to example 1 of the present invention.
Fig. 5 is a spectrum of the coating of the CVD coated tool of example 1 of the present invention.
The achievement of the objects, functional features and advantages of the present invention will be further described with reference to the accompanying drawings, in conjunction with the embodiments.
Detailed Description
The following description will be made clearly and fully with reference to the technical solutions in the embodiments, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
According to one aspect of the invention, the invention provides the following technical scheme:
A tool having a CVD coating comprising a tool substrate and a coating applied to the substrate, said coating comprising at least one layer of Ti xBy coating deposited by CVD, wherein 2.0 +.y/x +.2.4; the Ti xBy coating crystals have a tissue structure which preferentially grows in the (110) direction and have a texture coefficient greater than 2. Specifically, y/x may be, for example, any one or a range between any two of 2.0, 2.1, 2.2, 2.3.
Preferably, the texture coefficients are defined as follows:
Wherein:
i (hkl) is the reflection intensity of the (hkl) crystal plane measured by X-ray diffraction;
i 0 is the standard intensity of the diffraction reflection according to PDF card number 35-0741;
n is the number of reflective crystal planes used in the calculation;
The (hkl) reflective crystal planes used are (001), (100), (101), (110), (102), (111), (201), (112).
Preferably, the substrate is made of cemented carbide material.
Preferably, the Ti xBy coating has a thickness of greater than 0.5 μm, preferably 2.5 to 5.5 μm.
Preferably, the average grain size of the Ti xBy coating is less than 1.9 μm, preferably 0.5 to 0.7 μm.
Preferably, the microhardness of the Ti xBy coating is greater than 41GPa.
Preferably, the Ti xBy coating comprises a nanoplatelet structure, wherein each nanoplatelet layer has a thickness of less than 9nm, preferably less than 4 nm.
Preferably, the coating comprises a TiN coating, a transition layer and a Ti xBy coating from inside to outside in sequence from the surface of the cutter matrix.
Preferably, the thickness of the TiN coating is 0.1-1 mu m; the thickness of the transition layer is 0.1-0.5 mu m; the thickness of the Ti xBy coating is 1.5-10.5 mu m.
Preferably, the boron content of the transition layer is gradually increased from 0 to 67% from inside to outside.
According to another aspect of the invention, the invention provides the following technical scheme:
The preparation method of the tool with the CVD coating comprises the following steps: depositing a Ti xBy coating on the tool substrate by a CVD method;
the preparation temperature of TixBy coating is 700-800 ℃, the preparation pressure is 30-150 mbar, BCl 3 is adopted as a boron source of the coating, tiCl 4 is adopted as a titanium source of the coating, H 2 is adopted as carrier gas to form a gas mixture, wherein the content of TiCl 4 in the gas mixture is 0.22-0.66 vol%, the content of BCl 3 is 1.19-1.59 vol%, and the content of BCl 3 is preferably 1.35-1.45 vol%.
Preferably, a TiN coating, a transition layer and a Ti xBy coating are deposited on the cutter substrate in sequence by a CVD method;
The preparation temperature of the TiN coating is 800-1000 ℃, the preparation pressure is 80-500 mbar, N 2 is used as a nitrogen source of the coating, tiCl 4 is used as a titanium source of the coating, H 2 is used as carrier gas to form a gas mixture, the content of TiCl 4 in the gas mixture is 1.0-3.0vol% and the content of N 2 in the gas mixture is 30-50vol%;
The preparation temperature of the transition layer is 700-800 ℃, the preparation pressure is 30-150 mbar, N 2 is used as a nitrogen source of the coating, BCl 3 is used as a boron source of the coating, tiCl 4 is used as a titanium source of the coating, H 2 is used as carrier gas to form a gas mixture, the content of N 2 in the gas mixture gradually decreases from 40vol% to 0, the content of TiCl 4 is 1.0-3.0vol%, and the content of BCl 3 gradually increases from 0.1vol% to 1.30vol%.
The technical scheme of the invention is further described below by combining specific embodiments.
According to the present invention, a cemented carbide indexable insert RPHT M8E is coated with 3 layers of coating by CVD techniques, including cemented carbide tool substrates and coatings on substrates; the cemented carbide component was 9.5wt% Co,1.5wt% Re and the balance WC, and the 3 layers of coating were TiN coating, transition layer and Ti xBy coating, respectively, with thicknesses of 0.5 μm,0.3 μm and 3 μm, respectively.
Examples 1-3 and comparative example 1 all coatings and substrates were identical except for the Ti xBy coating process. The process parameters for the deposition are shown in table 1.
Table 1 process parameters of the coating
The coated surface and fracture of the tool of example 1 were observed using a scanning electron microscope, as shown in fig. 1 and 2. The tool coatings of examples 1-3 and comparative example 1 were tested, with the XRD diffractograms of the tool coatings of example 1 shown in figure 3. The coated nanolaminate structure of a CVD coated tool is shown in fig. 4. The energy spectrum of the coating of the tool with CVD coating is shown in fig. 5. Table 2 shows the calculated Texture Coefficients (TC) for each diffraction peak for examples 1-3 and comparative example 1, and it can be seen that the Ti xBy coating of the present invention has a texture structure that preferentially grows in the (110) direction, and the texture coefficients are all greater than 4.
Table 2 sample texture factor (TC)
Experiment one: the tools prepared in examples 1-3 and comparative example 1 were experimentally compared by milling with a nickel-based superalloy.
The operation is as follows: face milling
Work piece: square piece
Materials: GH4169
Cutting speed: 45m/min
Feeding: 0.2mm/tooth
Cutting depth: 1mm of
Cutting width: 35mm
Wet cutting
The cutting life and failure modes of the tools prepared in examples 1-3 and comparative example 1 are shown in Table 3. It can be seen from Table 3 that the tools of examples 1-3 of the present invention were significantly superior to comparative example 1 in terms of wear resistance and chipping resistance. The test result also shows that the larger the crystal face texture coefficient of the Ti xBy coating (001) is, the more favorable the performance improvement is.
Table 3 cutting life and failure modes of the tools prepared in examples 1-3 and comparative example 1
Experiment II: the tools prepared in examples 1-3 and comparative example 1 were experimentally compared by milling with titanium-based superalloys.
The operation is as follows: face milling
Work piece: square piece
Materials: TC18
Cutting speed: 45m/min
Feeding: 0.2mm/tooth
Cutting depth: 1mm of
Cutting width: 44mm
Wet cutting
The cutting life and failure modes of the tools prepared in examples 1-3 and comparative example 1 are shown in Table 4. It can be seen from Table 4 that the tools of examples 1 to 3 of the present invention were significantly superior to comparative example 1 in terms of wear resistance and chipping resistance. The test result also shows that the larger the crystal face texture coefficient of the Ti xBy coating (001) is, the more favorable the performance improvement is.
Table 4 cutting life and failure modes of the tools prepared in examples 1-3 and comparative example 1
The invention relates to a tool with a CVD coating and a preparation method thereof, comprising a tool substrate and a coating coated on the substrate, wherein the coating at least comprises a Ti xBy coating deposited by a CVD method, wherein y/x is more than or equal to 2.0 and less than or equal to 2.4; the Ti xBy coating crystal has a tissue structure which preferentially grows in the (110) direction, the texture coefficient is larger than 2, the coating has high strength, high hardness and excellent wear resistance, and a cutter coated with the coating has excellent cutting performance in the milling of a superalloy.
The foregoing description is only of the preferred embodiments of the present invention and is not intended to limit the scope of the invention, and all equivalent structural changes made by the content of the present invention or direct/indirect application in other related technical fields are included in the scope of the present invention.
Claims (10)
1. A tool having a CVD coating comprising a tool substrate and a coating applied to the substrate, said coating comprising at least one layer of Ti xBy deposited by CVD, wherein 2.1 ∈y/x ∈2.4; the Ti xBy coating has a tissue structure which preferentially grows in the (110) direction, the texture coefficient is larger than 2, and the Ti xBy coating comprises a nano lamellar structure; the Ti xBy coating is deposited by a CVD method, the preparation temperature of the Ti xBy coating is 700-800 ℃, the preparation pressure is 30-150 mbar, BCl 3 is adopted as a boron source of the coating, tiCl 4 is adopted as a titanium source of the coating, H 2 is adopted as carrier gas to form a gas mixture, the TiCl 4 content is 0.22-0.66vol% and the BCl 3 content is 1.19-1.59vol%.
2. The CVD coated tool according to claim 1, wherein the Ti xBy coating has a thickness of more than 0.5 μm.
3. The CVD coated tool according to claim 1, wherein the average grain size of the Ti xBy coating is less than 1.9 μm.
4. The CVD coated tool according to claim 1, wherein the Ti xBy coating has a microhardness of more than 41GPa.
5. The CVD coated tool according to claim 1, wherein the thickness of each nano-platelet layer of the Ti xBy coating is less than 9nm.
6. The tool with CVD coating according to claim 1, wherein the coating comprises a TiN coating, a transition layer and a Ti xBy coating in order from inside to outside the surface of the tool substrate.
7. The tool with CVD coating according to claim 6, wherein the TiN coating thickness is 0.1-1 μm; the thickness of the transition layer is 0.1-0.5 mu m, and the thickness of the Ti xBy coating is 1.5-10.5 mu m.
8. The CVD coated tool according to claim 6, wherein the transition layer is gradually increasing boron content from 0 to 67% from inside to outside.
9. A method of producing a CVD coated tool according to any one of claims 1 to 8, comprising: depositing a Ti xBy coating on the tool substrate by a CVD method;
The preparation temperature of the Ti xBy coating is 700-800 ℃, the preparation pressure is 30-150 mbar, BCl 3 is adopted as a boron source of the coating, tiCl 4 is adopted as a titanium source of the coating, H 2 is adopted as carrier gas to form a gas mixture, the content of TiCl 4 in the gas mixture is 0.22-0.66 vol%, and the content of BCl 3 in the gas mixture is 1.19-1.59 vol%.
10. The method of manufacturing a tool with CVD coating according to claim 9, wherein a TiN coating, a transition layer, a Ti xBy coating are deposited in sequence on the tool substrate by CVD method;
The preparation temperature of the TiN coating is 800-1000 ℃, the preparation pressure is 80-500 mbar, N 2 is used as a nitrogen source of the coating, tiCl 4 is used as a titanium source of the coating, H 2 is used as carrier gas to form a gas mixture, the content of TiCl 4 in the gas mixture is 1.0-3.0vol% and the content of N 2 in the gas mixture is 30-50vol%;
The preparation temperature of the transition layer is 700-800 ℃, the preparation pressure is 30-150 mbar, N 2 is used as a nitrogen source of the coating, BCl 3 is used as a boron source of the coating, tiCl 4 is used as a titanium source of the coating, H 2 is used as carrier gas to form a gas mixture, the content of N 2 in the gas mixture gradually decreases from 40vol% to 0, the content of TiCl 4 is 1.0-3.0vol%, and the content of BCl 3 gradually increases from 0.1vol% to 1.30vol%.
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| CN101889104A (en) * | 2007-12-06 | 2010-11-17 | 森拉天时奥地利有限公司 | Coated article |
| CN113981369A (en) * | 2021-10-28 | 2022-01-28 | 赣州澳克泰工具技术有限公司 | Multilayer coating system and method for producing same |
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Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT15677U1 (en) * | 2017-01-31 | 2018-04-15 | Ceratizit Austria Gmbh | Coated tool |
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- 2024-03-25 CN CN202410340630.7A patent/CN117926215B/en active Active
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| CN101889104A (en) * | 2007-12-06 | 2010-11-17 | 森拉天时奥地利有限公司 | Coated article |
| CN113981369A (en) * | 2021-10-28 | 2022-01-28 | 赣州澳克泰工具技术有限公司 | Multilayer coating system and method for producing same |
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| CN117283004A (en) * | 2023-11-27 | 2023-12-26 | 赣州澳克泰工具技术有限公司 | TiB containing twin crystal reinforcement x Coated cutting tool and method for producing same |
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