CN117276450A - Micrometer LED device capable of emitting directional light beams in wide visible light spectrum range - Google Patents
Micrometer LED device capable of emitting directional light beams in wide visible light spectrum range Download PDFInfo
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- CN117276450A CN117276450A CN202311320260.2A CN202311320260A CN117276450A CN 117276450 A CN117276450 A CN 117276450A CN 202311320260 A CN202311320260 A CN 202311320260A CN 117276450 A CN117276450 A CN 117276450A
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- 238000001228 spectrum Methods 0.000 title claims abstract description 12
- 230000001105 regulatory effect Effects 0.000 claims abstract description 18
- 230000033228 biological regulation Effects 0.000 claims abstract description 10
- 230000003247 decreasing effect Effects 0.000 claims abstract description 8
- 230000001276 controlling effect Effects 0.000 claims abstract description 5
- 239000002061 nanopillar Substances 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 8
- 230000003595 spectral effect Effects 0.000 claims description 7
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 6
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 3
- 229910052809 inorganic oxide Inorganic materials 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims description 2
- 230000001427 coherent effect Effects 0.000 abstract description 3
- 230000003287 optical effect Effects 0.000 description 7
- 230000010363 phase shift Effects 0.000 description 6
- 229910002601 GaN Inorganic materials 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
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- 238000001429 visible spectrum Methods 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
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- 238000005286 illumination Methods 0.000 description 1
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- 238000011160 research Methods 0.000 description 1
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- 238000004088 simulation Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
- H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
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Abstract
The invention provides a micrometer LED device for emitting directional light beams in a wide spectrum range of visible light, which sequentially comprises a light beam reflecting layer, a micrometer LED structure layer and a super-surface light beam deflection layer from bottom to top; the super-surface light beam deflection layer divides a plurality of light beam deflection areas, and a phase regulation and control unit is arranged in each light beam deflection area; the area of the cross section of the phase regulating units is gradually decreased and arranged on the beam deflection area, and the beams vertically pass through the phase regulating units to form gradient phase differences of the emergent beams in space and are used for controlling the deflection angles of the emergent beams. The invention is suitable for various coherent LED light sources, and has the function of modulating light for blue, green and red light.
Description
Technical Field
The invention relates to the field of display illumination, in particular to a micrometer LED device for emitting directional light beams in a wide spectrum range of visible light.
Background
Conventional optical elements typically have a large structural size and weight, which is disadvantageous for miniaturization of the optical device. With the development of LED technology and the increasing demands of various industries for miniaturized integrated applications, miniaturized LED devices have been developed. The super-surface array of the periodic sub-wavelength structure has unique electromagnetic characteristics, can be combined with a micro LED to regulate and control light beams, and is easy to process. The micro LED device is a two-dimensional array of high-density micro-sized light emitting diode chips integrated on the same light emitting diode chip or a two-dimensional array of micro-sized high-brightness light emitting diode chips arranged in a high-density integrated manner on the same epitaxial substrate material.
Light beam regulation is an important component in the field of optical research, most of the existing various micron LED devices emit light from the vertical surface, and with the rising of naked eye 3D display, VR, AR and other technologies, the traditional LED for vertically emitting light beams cannot meet the requirements. In order to solve the problems, the invention aims to provide a gallium nitride micron LED device structure which can be applied to RGB three-color light and regulate and control light beams under the whole visible light wave band. The micro LED device structure of the present invention includes a reflective layer to increase beam coherence and a phase gradient supersurface to control beam deflection. Each sub-wavelength unit structure in the phase gradient super-surface can be regarded as an independent electromagnetic regulation and control unit, and the information such as the phase, polarization, amplitude and the like of a local field can be regulated and controlled in a sub-wavelength scale through reasonably designing the geometric parameters of each unit structure, so that the purpose of randomly controlling electromagnetic waves is achieved, and the requirements of modern optical devices on miniaturization and integration are met.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention provides a micrometer LED device for emitting directional light beams in a wide spectrum range of visible light, which is suitable for various coherent LED light sources, has the function of modulating light emission for blue light, green light and red light, realizes the multi-angle designable deflection light emission in a wide spectrum band of the visible light, has higher beam efficiency, combines a micrometer LED with a medium type super surface, is beneficial to integration and processing, and can be applied to full-color LED display technology and naked eye 3D display.
The present invention achieves the above technical object by the following means.
A micrometer LED device for directional light beam emission in a wide spectrum range of visible light comprises a light beam reflecting layer, a micrometer LED structure layer and a super-surface light beam deflection layer from bottom to top in sequence; the super-surface light beam deflection layer divides a plurality of light beam deflection areas, and a phase regulation and control unit is arranged in each light beam deflection area; the area of the cross section of the phase regulating units is gradually decreased and arranged on the beam deflection area, and the beams vertically pass through the phase regulating units to form gradient phase differences of the emergent beams in space and are used for controlling the deflection angles of the emergent beams.
Further, the phase regulating unit is a nano column, and a plurality of nano column arrays are distributed on the beam deflection area; the area of the cross section of the nano-pillars is gradually decreased along the direction of the array.
Further, the nano-pillar is cuboid, the cross section of the nano-pillar is square, and the side length of the cross section is 250-400 nm; the height range of the nano-pillars is 500 nm-2000 nm.
Further, the nano column is a cylinder, a round table or a cone, and the height range of the nano column is 500 nm-2000 nm.
Further, the phase regulating unit is made of an inorganic oxide material with transmission performance in a visible light wave band.
Furthermore, the light beam reflection layer reflects the emergent light of the micro LED structural layer, and a resonant cavity is formed between the light beam reflection layer and the micro LED structural layer and is used for improving the coherence of the light beam entering the super-surface light beam deflection layer.
Further, the material of the light beam reflection layer is a metal material.
Further, the light beam reflection layer is a distributed Bragg reflection structure formed by oxides, and the Bragg reflection structure material is SiO 2 /TiO 2 Structure or SiN 3 /SiO 2 Structure is as follows.
The invention has the beneficial effects that:
the micro LED device for emitting the directional light beam in the wide visible light spectrum range is suitable for various coherent LED light sources, has the function of modulating light emission for blue light, green light and red light, realizes multi-angle designable deflection light emission in the wide visible light spectrum band, has higher light beam efficiency, is favorable for integration and processing by combining the micro LED with a medium type super surface, and can be applied to full-color LED display technology and naked eye 3D display. Based on a transmission phase principle and a time domain finite difference algorithm, adopting Lumerical FDTD software to simulate and analyze the propagation characteristics of electromagnetic waves under a specific phase gradient super-surface structure; performing simulation on the phase delay influence of different cross sectional areas of the nano column on the visible light beam; the nanopillar with proper size is selected to construct a light beam deflection regulating array, so that the deflection of the emergent light beam of 9-18 degrees is realized, and the light efficiency is about 20-35%.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are needed in the embodiments or the description of the prior art will be briefly described, in which the drawings are some embodiments of the invention, and it will be obvious to those skilled in the art that other drawings can be obtained from these drawings without inventive effort.
Fig. 1 is a three-dimensional view of a micro LED device according to the present invention with directional beam emission in a wide spectral range of visible light.
Fig. 2 is a schematic diagram of a micro LED device emitting a directional beam in a wide spectrum of visible light according to the present invention.
FIG. 3 is a graph showing far field energy distribution of blue, green and red light after passing through the model of example 1, wherein FIG. 3a is a graph showing far field energy distribution of blue light after passing through the model of example 1; FIG. 3b is a graph showing the far field energy distribution of green light after passing through the model of example 1; fig. 3c is a far field energy distribution plot of red light after passing through the model of example 1.
FIG. 4 is a line graph showing the variation of the deflection angle of the outgoing beam with the wavelength after the visible light beam passes through the beam deflection control array models 1-4 in the present invention.
In the figure:
1-air; 2-nanopillars; 3-a super-surface beam-deflecting layer; 4-micron LED structure layer; 5-a light beam reflecting layer.
Detailed Description
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present invention and should not be construed as limiting the invention.
In the description of the present invention, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "axial," "radial," "vertical," "horizontal," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
As shown in fig. 1 and 2, the micro LED device for directional beam emission in a wide spectrum range of visible light according to the present invention comprises, from bottom to top, a beam reflection layer 5, a micro LED structure layer 4 and a super surface beam deflection layer 3; the super-surface beam deflection layer 3 divides a plurality of beam deflection areas, and each beam deflection area is internally provided with a phase regulation unit; the area of the cross section of the phase regulating units is gradually decreased and arranged on the beam deflection area, and the beams vertically pass through the phase regulating units to form gradient phase differences of the emergent beams in space and are used for controlling the deflection angles of the emergent beams. The phase regulating units are closely distributed along the orthogonal direction in the horizontal plane of the micron LED structure layer 4. There are 4 to 8 phase adjustment units in a single direction. The beam reflection layer 5 reflects the emergent light of the micro LED structural layer 4, and a resonant cavity is formed between the beam reflection layer 5 and the micro LED structural layer 4 and is used for improving the coherence of the light beam entering the super-surface beam deflection layer.
The phase regulating unit is a nano column 2, and a plurality of nano columns 2 are distributed on the beam deflection area in an array manner; the cross-sectional areas of the plurality of nano-pillars 2 are stepwise decreased along one array direction. The nano column 2 is a cuboid, the cross section of the nano column 2 is square, and the side length of the cross section is 250-400 nm; the height range of the nano column 2 is 500 nm-2000 nm. The nano-pillar 2 may also be a cylinder, a truncated cone or a cone, preferably the nano-pillar 2 is a cylinder, the diameter of the cylinder is 50 nm-245 nm, the refractive index n=1.7, and the height h=850 nm.
The nano-pillars 2 are arranged in a step manner on the micron LED structural layer 4 from large to small in diameter, and the nano-pillars with different diameters are selected to realize the step change of phase shift, so that an equiphase surface is inclined, and deflection of an emergent light beam is realized. The regulation and control principle is that four basic phase regulation and control units with different diameters are selected according to phase delay data generated by single nano-column with different parameters on the light beam, so that the light beam deflection regulation and control unit can be constructed. Assuming that the incident light perpendicular to the super-surface is a plane wave, then the formula:
is the phase shift imposed by the supersurface to ensure beam deflection, λ is the wavelength of light in free space, θ is the designed beam deflection angle, and X is the period of the nanopillar. The period X of the nanopillar is set to 250nm, the entire 2 pi phase retardation variation is divided into discrete values, for example, 0.1 pi, 0.2 pi..1.9 pi, etc., and the beam deflection equation is satisfied by selecting the fundamental phase adjusting unit of the corresponding diameter. Therefore, the 4 phase regulating units realize the step change of phase shift by changing the diameter D of the nano-pillar, so that the deflection of the emergent light beam can be realized by inclining the equiphase surface.
Example 1
As shown in fig. 1 and 2, in the beam deflection device of the present embodiment, the beam reflection layer 5 is made of metal Al, and has a thickness of 200nm; the micrometer LED structure layer 4 is a GaN-LED structure, the GaN-LED structure consists of a p-GaN layer, an MQWs layer and an n-GaN layer, the thicknesses are 104nm, 96nm and 200nm respectively, and the total thickness is 400nm; the super-surface beam deflection layer 3 is divided into a plurality of beam deflection areas with the size of 1 multiplied by 1 mu m, the nano columns 2 of the array 4X4 in each beam deflection area, the cross sections of the nano columns 2 are circular, and the area of the cross sections of the 4 columns of the nano columns 2 is gradually decreased along the direction of the array. The diameters of the cross sections of the 4 columns of nano-pillars 2 are 210nm, 160nm, 110nm and 60nm, respectively.
Fig. 3a, 3b and 3c show far-field energy distribution diagrams after passing through the beam deflection regulation array when λ=450 nm, 530nm and 670nm, and it can be seen from the far-field energy distribution diagrams that the convergence effect of the outgoing beam is better, the energy is more concentrated, and the deflection angles of the outgoing beam are 16 ° under the corresponding three different wavelengths of blue, green and red light.
Example 2
The light beam reflection layer 5 is a distributed bragg reflection structure formed by oxide on the basis of embodiment 1, the light beam reflection layer 5 reflects the emergent light of the micro LED structure layer 4, and a resonant cavity is formed between the light beam reflection layer 5 and the micro LED structure layer 4 for improving the entrance into the ultra-lightCoherence of the light beam in the surface beam deflection layer. The Bragg reflection structure material is SiO 2 /TiO 2 Structure or SiN 3 /SiO 2 Structure is as follows.
The adjustment of the beam deflection angle can be realized by adjusting the intensity of the phase shift step change. The invention designs beam deflection regulating arrays with diameter differences of 20nm, 35nm, 50nm and 65nm of adjacent nano-columns to realize deflection light emission at a plurality of angles, and for convenience of identification, the three models and the models are named as models 1-4, and the names of the beam deflection regulating arrays and the diameter sizes of the nano-columns in each row are shown in table 1.
Table 1 list of corresponding diameters of beam deflection control array models
Table 2 summarizes the outgoing beam deflection conditions for the far field energy for each of the beam deflection control array models of models 1-4, where blue, green, and red light correspond to wavelengths λ=450 nm, 530nm, and 670nm, respectively. According to the design theory, along with the increase of the diameter difference of the adjacent nano-pillars, the deflection angle of the emergent light beam after passing through the light beam deflection regulating array is also increased. As the diameter increases, the deflection angle increases. A large phase shift is generated according to the formula large diameter increment, resulting in a large deflection angle (sin theta). The maximum deflection angles in these models were 10.72 °, 16.04 ° and 18.25 ° for blue, green and red light, respectively. However, as the diameter increases, a negative effect is created in order to achieve a large deflection angle. In addition to the deflected beam in the desired direction, there is another deflected beam of low intensity in the opposite direction (from-15 deg. to-45 deg.). Beam efficiency is defined as the ratio of optical power to total optical power over the Full Width Half Maximum (FWHM) range. In the model 3 having a deflection angle of about 16 °, an optical power in the range of 11 ° to 21 ° is selected. As shown in table 2, the four models have beam efficiencies ranging from 23.6% to 33.6%, indicating that most of the light can be deflected into the designed direction, and the invention has practical value.
Table 2 deflection angle and beam efficiency for models of different diameter increments
Fig. 4 depicts the deflection angle of the four models as a function of the wavelength of light throughout the visible spectrum. The deflection angle remains fairly stable at different wavelengths from 400nm to 700 nm. The square root of the deflection angle variance of the four models was 3.16 °, 3.30 °, 3.47 ° and 4.36 °, respectively, with increases in variance values corresponding to increases in diameter. While increasing the diameter increment may increase the deflection angle of the beam, it also loses deflection stability throughout the visible spectrum.
In summary, the present invention proposes a micro LED device structure for visible light beam deflection based on the phase shift generated by the basic phase adjusting unit composed of nano-pillars. The reflective layer in the structure enhances the coherence of the light emitted by the light source, meanwhile, the beam deflection layer achieves the designable emergent beam deflection effect by using the step arrangement of units with different nano-pillar diameters, the deflection angles of the blue, green and red beams by the structure in the embodiment 1 reach 16 degrees, the deflection performance of the structure in the embodiment 2 is tested in the whole visible light area, the deflection efficiency is good under the target angle, and the practical application value is realized. The beam deflection device combined with the GaN-based LED provides an effective technical scheme in the field of visible light broadband display, and is beneficial to development of the fields of full-color display and naked eye 3D display.
It should be understood that although the present disclosure has been described in terms of various embodiments, not every embodiment is provided with a separate technical solution, and this description is for clarity only, and those skilled in the art should consider the disclosure as a whole, and the technical solutions in the various embodiments may be combined appropriately to form other embodiments that will be understood by those skilled in the art.
The above list of detailed descriptions is only specific to practical embodiments of the present invention, and they are not intended to limit the scope of the present invention, and all equivalent embodiments or modifications that do not depart from the spirit of the present invention should be included in the scope of the present invention.
Claims (8)
1. The micro LED device for directional light beam emission in a wide spectrum range of visible light is characterized by sequentially comprising a light beam reflecting layer (5), a micro LED structure layer (4) and a super-surface light beam deflection layer (3) from bottom to top; the super-surface light beam deflection layer (3) divides a plurality of light beam deflection areas, and a phase regulation unit is arranged in each light beam deflection area; the area of the cross section of the phase regulating units is gradually decreased and arranged on the beam deflection area, and the beams vertically pass through the phase regulating units to form gradient phase differences of the emergent beams in space and are used for controlling the deflection angles of the emergent beams.
2. The micro LED device of directional beam emission in a wide spectral range of visible light according to claim 1, wherein the phase modulating unit is a nano-pillar (2), and an array of nano-pillars (2) are distributed on the beam deflection area; the area of the cross section of the nano-pillars (2) is gradually decreased along the direction of an array.
3. The micro LED device of directional light beam emission in a wide spectral range of visible light according to claim 2, characterized in that the nano-pillars (2) are cuboid, the cross-section of the nano-pillars (2) is square, the side length of the cross-section ranges from 250nm to 400nm; the height range of the nano column (2) is 500 nm-2000 nm.
4. The micro LED device of directional beam emission in a wide spectral range of visible light according to claim 2, characterized in that the nano-pillars (2) are cylindrical or truncated cone or cone, the nano-pillars (2) have a height in the range of 500nm to 2000nm.
5. The LED device of claim 1, wherein the phase modulating element is an inorganic oxide material having a transmission property in the visible light band.
6. A micro LED device for directional beam emission in a broad spectral range of visible light according to claim 1, characterized in that the beam reflecting layer (5) reflects the light exiting the micro LED structure layer (4), a resonant cavity being formed between the beam reflecting layer (5) and the micro LED structure layer (4) for improving the coherence of the light beam entering the ultra surface beam deflection layer.
7. A micro LED device for directional beam emission in a broad spectral range of visible light according to claim 6, characterized in that the material of the beam reflecting layer (5) is a metallic material.
8. A micro LED device with directional beam emission in a broad spectral range of visible light as claimed in claim 6, characterized in that the beam reflecting layer (5) is a distributed bragg reflecting structure of oxide, the bragg reflecting structure material being SiO 2 /TiO 2 Structure or SiN 3 /SiO 2 Structure is as follows.
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| CN202311320260.2A CN117276450A (en) | 2023-10-12 | 2023-10-12 | Micrometer LED device capable of emitting directional light beams in wide visible light spectrum range |
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