CN117270104A - Polarization beam splitting rotator prepared based on SOI material - Google Patents
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- 230000010287 polarization Effects 0.000 title claims abstract description 83
- 239000000463 material Substances 0.000 title claims abstract description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 12
- 239000010703 silicon Substances 0.000 claims abstract description 12
- 238000001914 filtration Methods 0.000 claims abstract description 8
- 238000006243 chemical reaction Methods 0.000 claims abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 238000005253 cladding Methods 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 230000007423 decrease Effects 0.000 claims description 3
- 230000008033 biological extinction Effects 0.000 abstract description 16
- 230000005540 biological transmission Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 6
- 238000003780 insertion Methods 0.000 description 6
- 230000037431 insertion Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000411 transmission spectrum Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000009396 hybridization Methods 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/1215—Splitter
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Optics & Photonics (AREA)
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Abstract
The invention discloses a polarization beam splitting rotator prepared based on an SOI material, wherein a silicon waveguide comprises an input waveguide, a first conical waveguide, a first S-shaped waveguide, a bridge waveguide with a filtering function, a first output waveguide, a second S-shaped waveguide, a second conical waveguide, a first straight-through waveguide, a three-section conical waveguide and a nano-beam waveguide with a mode conversion and reflection function, wherein the input waveguide, the first conical waveguide, the first S-shaped waveguide, the bridge waveguide and the first output waveguide are sequentially connected to form an upper waveguide, and the second output waveguide, the second S-shaped waveguide, the second conical waveguide, the first straight-through waveguide, the three-section conical waveguide and the nano-beam waveguide are sequentially connected to form a lower waveguide. The invention has higher polarization extinction ratio and higher practicability.
Description
Technical Field
The invention relates to an optical communication technology, in particular to a polarization beam splitting rotator prepared based on an SOI material.
Background
Silicon-on-insulator (SOI) is widely used to develop compact integrated optics due to its large internal and external refractive index difference and CMOS compatibility. However, due to the characteristics of SOI materials, most of these devices are polarization dependent and have strong birefringence, so that large polarization mode dispersion and loss can be generated, making silicon photonic devices relatively sensitive to polarization, and limiting their application in optical communications. Meanwhile, as optical communication technologies develop, there is an increasing demand for polarization multiplexing, multimode multiplexing, polarization dependent and polarization independent devices. To address these problems, it is desirable to design polarization control devices with small dimensions, low insertion loss, and high extinction ratio. Such as a polarization beam splitter, a polarization rotator, and a polarization beam splitting rotator. Polarization beam splitters (PSR) are key devices to address on-chip polarization sensitivity.
The polarization beam splitter is a device having both polarization beam splitting and polarization rotation functions. Light of two different polarization states is input from the same port, and is output in the same mode at two different ports. The separation of TE0 and TM0 modes and the transition of TM0 mode into TE0 mode are realized.
The traditional PSR structure mainly utilizes the upper cladding and the lower cladding to be asymmetric or partially etched, so that the input TM0 is converted into a TE1 mode, the TE0 is unchanged, and then the TE1 is converted into the TE0 by utilizing an asymmetric directional coupling mode, and the TE0 is still transmitted along the original port, thereby realizing the purposes of polarization rotation and beam splitting. In order to obtain a high performance PSR, a number of approaches have been used to increase the polarization extinction ratio of the PSR, including using an MMI of 1*1 to effect filtering of the non-fully converted TE1 mode and a curved waveguide to effect filtering of the non-fully converted TM0 mode. However, the above-described methods, whether the mode filtered by MMI and curved waveguide, are only specific to one mode, so that the polarization beam splitter rotator is limited in terms of polarization extinction ratio, bandwidth, and the like, and thus has low practicability.
Disclosure of Invention
The invention aims to: aiming at the problems existing in the prior art, the invention provides the polarization beam splitting rotator which is prepared based on the SOI material and has higher polarization extinction ratio and higher practicability.
The technical scheme is as follows: the invention discloses a polarization beam splitting rotator prepared based on an SOI material, which comprises an input waveguide, a first conical waveguide, a first S-shaped waveguide, a bridge waveguide with a filtering function, a first output waveguide, a second S-shaped waveguide, a second conical waveguide, a first straight-through waveguide, a three-section conical waveguide and a nano-beam waveguide with a mode conversion and reflection function, wherein the input waveguide, the first conical waveguide, the first S-shaped waveguide, the bridge waveguide and the first output waveguide are sequentially connected to form an upper waveguide, and the second output waveguide, the second S-shaped waveguide, the second conical waveguide, the first straight-through waveguide, the three-section conical waveguide and the nano-beam waveguide are sequentially connected to form a lower waveguide.
Further, the lower layer of the silicon waveguide is a silicon dioxide substrate, and the upper layer is an air upper cladding layer wrapping the silicon waveguide.
Further, the bridge waveguide comprises a second straight-through waveguide, a third straight-through waveguide, a fourth straight-through waveguide and an arc-shaped waveguide, the second straight-through waveguide, the third straight-through waveguide and the fourth straight-through waveguide are sequentially arranged in parallel from bottom to top, the front end of the second straight-through waveguide is connected with the first S-shaped bent waveguide, the rear end of the second straight-through waveguide is connected with the first output waveguide, and the front end of the arc-shaped waveguide is connected with the fourth straight-through waveguide. The arcuate wave guide is curved in a direction away from the second straight-through waveguide.
Further, the three-section tapered waveguide comprises three tapered waveguides which are connected in sequence. The widths of the three tapered waveguides of the three-section tapered waveguide gradually increase along the forward propagation sequence of light.
Further, a plurality of nanopores are formed in the nano-beam waveguide. The spacing of the nanopores of the nanobeam waveguide increases gradually along the forward propagation order of light.
Further, the first tapered waveguide width gradually decreases in the forward propagation order of light. The second tapered waveguide width gradually increases along the forward propagation sequence of light. The partial waveguide formed by the input waveguide, the first conical waveguide and the first S-bend waveguide and the partial waveguide formed by the second S-bend waveguide, the second conical waveguide and the first straight waveguide are in a central symmetrical structure.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, an input waveguide, a first conical waveguide, a first S-bend waveguide, a second conical waveguide and a first straight-through waveguide are used at an input end to form a polarization beam splitter, so that TE0 and TM0 modes are separated, the working tolerance is increased by the polarization beam splitter with a biconical structure, and meanwhile, the center symmetrical structure has a secondary filtering effect on reflected light;
2. for the upper waveguide, a bridge waveguide is additionally arranged, so that a small part of TM0 modes left at the upper end can be filtered for the second time, the polarization extinction ratio is improved, and the practicability is improved;
3. the TE1 mode which is subjected to three-section tapering is reversely converted into TE0 by using the nano-beam structure, and unconverted TM0 and other interference modes can be removed by using an output port of the nano-beam structure, so that the polarization extinction ratio is improved, and the practicability is improved;
4. the spacing of the nano holes of the nano beam structure is gradually increased along the forward propagation sequence of light, so that the bandwidth is improved, and the practicability is improved.
Drawings
FIG. 1 is a schematic view of yz cross section of a polarization beam-splitting rotator made based on SOI materials according to the present invention;
FIG. 2 is a schematic diagram of a silicon waveguide structure of a polarization beam-splitting rotator made of SOI material according to the present invention;
FIG. 3 is a schematic diagram of simulation results of the light transmission field of the polarization beam splitter rotator according to the present invention when TE0 polarization mode is input;
FIG. 4 is a schematic diagram of simulation results of the light transmission field of the polarization beam splitter rotator according to the present invention when TM0 polarization mode is input;
FIG. 5 is a graph showing the distribution of optical power of the polarization beam splitter rotator according to the present invention at different bandwidths when TE0 polarization mode is input;
FIG. 6 is a graph showing the distribution of optical power of the polarization beam splitter rotator according to the present invention at different bandwidths when TM0 polarization mode is input.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The embodiment provides a polarization beam splitting rotator prepared based on an SOI material, which comprises a silicon dioxide substrate, a silicon waveguide positioned above the silicon dioxide substrate and an air upper cladding layer wrapping the silicon waveguide, as shown in figure 1. The air upper cladding is air to realize mode hybridization from TM0 to TE1, so that the process difficulty is avoided from being increased by secondary etching.
As shown in fig. 2, the silicon waveguide includes an input waveguide 1, a first tapered waveguide 2, a first S-bend waveguide 3, a bridge waveguide 4, a first output waveguide 5, a second output waveguide 6, a second S-bend waveguide 7, a second tapered waveguide 8, a first through waveguide 9, a three-stage tapered waveguide 10, and a nano-beam waveguide 11. The input waveguide 1, the first conical waveguide 2, the first S-bend waveguide 3, the bridge waveguide 4 and the first output waveguide 5 are sequentially connected to form an upper waveguide, and the second output waveguide 6, the second S-bend waveguide 7, the second conical waveguide 8, the first through waveguide 9, the three-section conical waveguide 10 and the nano-beam waveguide 11 are sequentially connected to form a lower waveguide.
Specifically, the input waveguide 1, the first taper waveguide 2, the first S-bend waveguide 3, the second S-bend waveguide 7, the second taper waveguide 8, and the first straight waveguide 9 form a polarization beam splitter, which is mainly used for separating a TE0 mode and a TM0 mode input from the input waveguide 1 through polarization beam splitting, the TE0 mode propagates from the upper waveguide and enters the bridge waveguide 4, and the TM0 mode splits into a lower waveguide and enters the three-section taper waveguide 10. The width of the first tapered waveguide 2 gradually decreases along the light forward propagation sequence, the width of the second tapered waveguide 8 gradually increases along the light forward propagation sequence, the first tapered waveguide 2 and the second tapered waveguide 8 are arranged in parallel, and the two meet the phase matching condition, so that the input TE0/TM0 modes can be separated, and polarization beam splitting is realized. The first S-bend waveguide 3 and the second S-bend waveguide 7 are mainly intended to separate the upper and lower waveguides so as to avoid crosstalk between the two. The polarization beam splitter is a central symmetrical structure, so that the lower waveguide has the same transmission mode with the upper waveguide for the reverse transmission TE0 mode reflected by the nano-beam waveguide 10, namely has a similar straight-through effect on the TE0 mode.
When the polarization beam splitter splits the beam, the upper waveguide may have a small part of the TM0 mode remaining in the light output from the first S-bend waveguide 3 in addition to the TE0 mode, so the bridge waveguide 4 is mainly used to filter out the TM0 mode coupled to the upper waveguide, thereby increasing the polarization extinction ratio. The bridge waveguide 4 comprises a second through waveguide 401, a third through waveguide 402, a fourth through waveguide 403 and an arc-shaped waveguide 404, wherein the second through waveguide 401, the third through waveguide 402 and the fourth through waveguide 403 are sequentially arranged in parallel from bottom to top, the front end of the second through waveguide 401 is connected with the first S-shaped bent waveguide 3, the rear end of the second through waveguide 401 is connected with the first output waveguide 5, and the front end of the arc-shaped waveguide 404 is connected with the fourth through waveguide 403 and bends towards a direction far away from the second through waveguide 401. The TE0 mode output from the first S-bend waveguide 3 is directly output to the first output waveguide 5, and the remaining TM0 mode sequentially passes through the third straight-through waveguide 402 and the fourth straight-through waveguide 403, and is output by the arc-shaped waveguide 404, and the rear end of the arc-shaped waveguide 404 is a Loss port Loss1.
The three-section tapered waveguide 10 forms a mode converter, and includes three tapered waveguides connected in sequence, the widths of the three tapered waveguides gradually increase along the forward propagation sequence of light, and the three tapered waveguides are mainly used for converting a TM0 mode split into a lower waveguide into a TE1 mode, and by setting the three tapered waveguides connected, the efficiency of converting TM0 into TE1 is increased.
The nano beam waveguide 11 is provided with a plurality of nano holes which are arranged, and the mode conversion and reflection functions are realized through the nano holes, so that the forward transmission TE1 is mainly converted into the reverse transmission TE0 mode; the spacing of the nanopores increases gradually along the light forward propagation order, which adopts a similar delay design, i.e., increasing the gap between the latter and the former holes can improve the conversion efficiency and bandwidth. The rear end of the nano beam waveguide 11 is used as a Loss port Loss2, and TM0, TE1 modes which are not completely converted and other interference modes can be output from the Loss port Loss2, so that the purposes of filtering TM0, TE1 modes which are not completely converted and other interference modes are achieved, and the polarization extinction ratio is improved.
The working principle of the invention is as follows: light of two different polarization states (TM 0 mode TE0 mode) enters from an input waveguide 1, when the light passes through a first tapered waveguide 2 and a second tapered waveguide 8, the input TE0/TM0 mode is separated, the TE0 mode enters a first S-bend waveguide 3, the TE0 mode output by the first S-bend waveguide 3 is output from an output waveguide 5 after a small amount of TM0 mode contained in the TE0 mode is filtered by a bridge waveguide 4, the TM0 mode enters a first straight-through waveguide 9, then the TM0 mode is converted into a TE1 mode by a three-section tapered waveguide 10, then the TE0 mode is transmitted into a nano-beam waveguide 11, the TE1 transmitted in the forward direction is converted into the TE0 mode and reflected, the light is transmitted in the reverse direction, and the TE0 mode is sequentially output at a second output waveguide 6 by the three-section tapered waveguide 10, the first straight-through waveguide 9, the second tapered waveguide 8 and the second S-bend waveguide 7.
In order to verify the beneficial effects of the invention, the following simulation experiments were performed: the experiment adopts a finite time domain difference method for calculation and analysis. The main parameters used for simulation include: the thickness of the silicon waveguide was 220nm, the two ends of the tapered waveguide were 563nm and 479nm, respectively, the total length was 28.62 μm, and the pitch was 339nm. The width of the nano-beam waveguide was 1.07 μm, wherein the diameter of the nano-holes was 189nm, and the number of holes was 12. The S-bend had a length of 10 μm and a width of 2. Mu.m.
Referring to the schematic diagram of fig. 3, fig. 3 shows the calculated light field transmission mode when light is input from the input waveguide 1 in TE0 mode, it can be seen that the light energy is input from the input waveguide 1, passes through the polarization beam splitter, continues to be transmitted through the upper waveguide, does not change the transmission path when passing through the bridge waveguide, and is finally output through the first output waveguide 5. While a very small portion of TE0 coupled to the underside, even if reflected to TM0 mode, is not output from the second output waveguide 6 after passing through the polarizing beam splitter. Thereby increasing the polarization extinction ratio for the TE0 mode.
Referring to the schematic of fig. 5, fig. 5 is a transmission spectrum obtained when light is input to the polarization beam splitter in TE0 mode, where Output1 represents the Output end of the first Output waveguide 5 and Output2 represents the Output end of the second Output waveguide 6. As can be seen from fig. 5, the insertion loss is 0.06dB at 1540nm, the crosstalk is-43.96 dB, the device insertion loss is less than 0.4dB in the range of 1450nm to 1630nm of the wavelength of the input light, the bandwidth of the polarization extinction ratio better than 35dB is up to 140nm, and the polarization extinction ratio better than 40dB in 1488nm to 1550 nm.
Referring to the illustration of fig. 4, when light is input from the input waveguide 1 in TM0 mode, the calculated light field transmission mode is as shown in fig. 4, and it can be seen that light energy is input from the input waveguide 1, passes through the tapered polarization beam splitter, and is transmitted in the lower waveguide. After passing through a mode converter formed by three sections of tapering, the mode converter is converted from TM0 to TE1. Further, after passing through the delayed nano-beam waveguide, the forward transmitted TE1 mode is reversely transmitted and becomes TE0 mode. The original effect is not changed after passing through the mode converter and the polarization beam splitter, and finally the output is in TE0 mode at the second output waveguide 6. While a very small portion of the TM0 that is not coupled to the lower side is transmitted through the upper waveguide, and after the bridge waveguide, it is coupled to the upper side again and Output from the Loss2 port, further reducing the Output from the Output1 port. Thereby increasing the polarization extinction ratio when TM0 mode is input.
Specifically, referring to the schematic of fig. 6, fig. 6 is a transmission spectrum obtained when light is input to the polarization beam splitter in TM0 mode, where Output1 represents the Output end of the first Output waveguide 5 and Output2 represents the Output end of the second Output waveguide 6. As can be seen from fig. 5, the insertion loss is 0.19dB at 1540nm, the crosstalk is-43.82 dB, the device insertion loss is less than 0.5dB in the range of 1480nm to 1596nm of the wavelength of the input light, and the extinction ratio is better than 30dB at 1470nm to 1630 nm. The polarization extinction ratio is better than 40dB, more than 95nm.
In summary, the polarization beam-splitting rotator prepared based on the SOI material provided by the invention can realize the functions of beam splitting and TM0 mode conversion when different incident polarization states are performed, has small insertion loss of devices in the working bandwidth exceeding 120nm, has high polarization inhibition ratio, and has the main characteristics of the polarization beam-splitting rotator; as the polarization beam splitter prepared based on the SOI material, the polarization extinction ratio is higher than that of a device in the prior scheme, so that the polarization beam splitter has better effects when being applied to polarization management systems such as a polarization multiplexing system, polarization independence, polarization filtering and the like.
It should be noted that the above-mentioned examples only represent some embodiments of the present invention, and the description thereof should not be construed as limiting the scope of the invention. It should be noted that it is possible for a person skilled in the art to make several modifications without departing from the inventive concept, which fall within the scope of protection of the present invention.
Claims (10)
1. A polarization beam splitting rotator prepared based on SOI material is characterized in that: the silicon waveguide of the polarization beam splitting rotator comprises an input waveguide (1), a first conical waveguide (2), a first S-shaped bent waveguide (3), a bridge waveguide (4) with a filtering function, a first output waveguide (5), a second output waveguide (6), a second S-shaped bent waveguide (7), a second conical waveguide (8), a first through waveguide (9), a three-section conical waveguide (10) and a nano-beam waveguide (11) with a mode conversion and reflection function, wherein the input waveguide (1), the first conical waveguide (2), the first S-shaped bent waveguide (3), the bridge waveguide (4) and the first output waveguide (5) are sequentially connected to form an upper waveguide, and the second output waveguide (6), the second S-shaped bent waveguide (7), the second conical waveguide (8), the first through waveguide (9), the three-section conical waveguide (10) and the nano-beam waveguide (11) are sequentially connected to form a lower waveguide.
2. The polarization beam splitter rotator prepared based on SOI material of claim 1, wherein: the lower layer of the silicon waveguide is a silicon dioxide substrate, and the upper layer is an air upper cladding layer wrapping the silicon waveguide.
3. The polarization beam splitter rotator prepared based on SOI material of claim 1, wherein: bridge waveguide (4) include second straight-through waveguide (401), third straight-through waveguide (402), fourth straight-through waveguide (403) and arc waveguide (404), second straight-through waveguide (401), third straight-through waveguide (402), fourth straight-through waveguide (403) are placed in parallel from the bottom up in proper order, second straight-through waveguide (401) front end is connected first S curved waveguide (3), first output waveguide (5) are connected to the rear end, arc waveguide (404) front end is connected fourth straight-through waveguide (403), arc waveguide (404) are crooked to the direction of keeping away from second straight-through waveguide (401).
4. The polarization beam splitter rotator prepared based on SOI material of claim 1, wherein: the three-section tapered waveguide (10) comprises three tapered waveguides which are connected in sequence.
5. The polarization beam splitter rotator prepared based on SOI material of claim 1, wherein: the widths of three tapered waveguides of the three-section tapered waveguide (10) gradually increase along the forward propagation sequence of light.
6. The polarization beam splitter rotator prepared based on SOI material of claim 1, wherein: the nano beam waveguide (11) is provided with a plurality of nano holes.
7. The SOI-based material fabricated polarization beam splitter rotator of claim 6, wherein: the spacing of the nanopores of the nanobeam waveguide (11) increases gradually along the forward propagation order of light.
8. The polarization beam splitter rotator prepared based on SOI material of claim 1, wherein: the first tapered waveguide (2) gradually decreases in width in the forward propagation order of light.
9. The polarization beam splitter rotator prepared based on SOI material of claim 1, wherein: the second tapered waveguide (8) increases in width gradually along the forward propagation sequence of light.
10. The polarization beam splitter rotator prepared based on SOI material of claim 1, wherein: the partial waveguide formed by the input waveguide (1), the first conical waveguide (2) and the first S-bend waveguide (3) and the partial waveguide formed by the second S-bend waveguide (7), the second conical waveguide (8) and the first straight waveguide (9) are in a central symmetrical structure.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311398377.2A CN117270104A (en) | 2023-10-26 | 2023-10-26 | Polarization beam splitting rotator prepared based on SOI material |
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| CN202311398377.2A CN117270104A (en) | 2023-10-26 | 2023-10-26 | Polarization beam splitting rotator prepared based on SOI material |
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