CN112904478A - U-shaped waveguide connected two-stage asymmetric directional coupler type light polarization beam splitting rotator - Google Patents
U-shaped waveguide connected two-stage asymmetric directional coupler type light polarization beam splitting rotator Download PDFInfo
- Publication number
- CN112904478A CN112904478A CN202110347729.6A CN202110347729A CN112904478A CN 112904478 A CN112904478 A CN 112904478A CN 202110347729 A CN202110347729 A CN 202110347729A CN 112904478 A CN112904478 A CN 112904478A
- Authority
- CN
- China
- Prior art keywords
- waveguide
- section
- polarization
- directional coupler
- asymmetric directional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/105—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type having optical polarisation effects
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12176—Etching
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention discloses a U-shaped waveguide connected two-stage asymmetric directional coupler type light polarization beam splitting rotator, which is divided into three parts in the whole structure: the waveguide 1 is a tapered etched waveguide, and a polarization effective refractive index condition coupled with the waveguide 2 is constructed through etching; the waveguide 2 is a U-shaped waveguide and structurally comprises three sections: a gap is formed at the center of the first section by full etching to realize TM0The separation of the polarization mode forms a first-stage asymmetric directional coupler with the waveguide 1, the second section is a bent waveguide, the device is folded by utilizing the section to increase compactness, and the third section is a uniform waveguide and forms a second-stage asymmetric directional coupler together with the waveguide 3; the waveguide 3 is a tapered etched waveguide and the etching direction is the same as that of the waveguide 1. The invention has the characteristics of compact structure, high extinction ratio of the device, large manufacturing tolerance and the like. The method plays an important role in optical polarization multiplexing and demultiplexing, polarization signal processing, optical communication and photoelectric signal processing.
Description
Technical Field
The invention belongs to the fields of silicon-based photonic integration and optical devices, optical polarization multiplexing and demultiplexing, optical signal multi-dimensional multiplexing and the like, and particularly relates to a two-stage asymmetric directional coupler type optical polarization beam splitting rotator based on U-shaped waveguide connection.
Background
With the increasing development of planar optical waveguide integrated device technology, the number of integrated devices is rapidly increased, the integrated system is more and more complex, and the on-chip polarization is not negligible. However, most planar optical waveguide devices have strong polarization correlation, so that it is very important to separate and convert different polarization modes into the same polarization mode on a chip, and the separated polarization modes can be independently and flexibly processed, so as to improve the dimensionality of multiplexing and utilizing optical waves or optical signals; meanwhile, the separated polarization mode can be further rotated, and the complexity of the polarization mode in the system is reduced. Meanwhile, the planar integrated optical waveguide has good polarization maintaining characteristics, so that polarization can be separated and rotated in a short length.
In the traditional polarization separation scheme, the polarization beam splitter and the polarization rotator are two independent devices, the process of the traditional integrated polarization rotator is complex, and multiple coating, photoetching and etching processes are required, so that the implementation cost of the polarization separation scheme is greatly increased, and the stability of the polarization separation scheme is reduced.
Polarization beam splitting rotators, i.e. transverse electric fundamental mode (TE) in waveguides, are currently implemented on silicon-based planar optical waveguides0Mode) and transverse magnetic fundamental mode (TM)0Mode) the two polarization modes are separated, and there are two main approaches. Firstly, utilize the birefringence characteristic of different materials, through combining together silicon nanowire and other materials, make different polarization mode produce stronger birefringence, alright realize polarization mode's separation with littleer device. The disadvantages are that: the introduction of other materials increases the complexity of the process and may introduce large losses, while the performance of the device is low. And secondly, the birefringence characteristic of the structure of the silicon-based optical waveguide is utilized, and the structure of the silicon-based optical waveguide is designed to have different reactions to different polarization modes, so that the separation and rotation of different polarization modes are realized. The structure needs strict phase matching conditions to achieve mode coupling and mode conversion, so the structure is sensitive to wavelength and process and has small working bandwidth. Of silicon-based SOI platformsThe integrated waveguide device can realize an ultra-small integrated device due to huge refractive index difference between the cladding and the waveguide, and can be optimized and improved in structure due to the characteristics of compatibility with a CMOS (complementary metal oxide semiconductor) process, low loss and high efficiency, so that the effects of increasing the working bandwidth and the extinction ratio are achieved.
Most of the current polarization beam splitter rotators adopt asymmetric coupling structures, and related papers include: 1) liu L, Ding Y, Yvind K, et al, silicon-on-insulator polarization and polarization devices for polarization diversity circuits [ J ]. Optics Express,19,12646-12651 (2011); 2) dai and J.E.Bowers, Novel concept for ultra-compact polarization splitter-rotator based on silicon nanowires [ J ] Optics Express 19, 10940-; 3) chen, C.R.Doerr, and Y.K.Chen.compact polarization rotor on silicon for polarization-transformed circuits [ J ] Optics Letters 36,469-471 (2011). Most of the above mentioned papers are uniform waveguide single-stage coupling or multi-stage asymmetric coupling structures, and the asymmetric coupling is very sensitive to waveguide width and coupling length although it is simple in structure, which makes the manufacturing tolerance of the device very small, so that it is somehow to extend the structure size, such as the adiabatic taper etching-based polarization beam splitting rotator designed by Ding Y et al, which is not too sensitive to the manufacturing error, but approaches the structure size of 240 μm, which is not good for compact system-on-chip integration (Ding Y, Liu L, Peucheret C, et al. Therefore, the sub-wavelength grating becomes a better choice for increasing the manufacturing tolerance on a compact structure, but the current polarization beam splitting rotator based on the sub-wavelength structure only can achieve the extinction ratio performance while increasing the manufacturing tolerance, for example, the polarization beam splitting rotator based on the sub-wavelength grating structure designed by Xiong Y et al can only achieve the extinction ratio of 10dB within the bandwidth range of 100nm, and at the same time can only ensure the insensitivity of the index of loss to the manufacturing error, and on the index of the extinction ratio, the effect is not obvious (Xiong Y, Wang Emert-P rez, J.Gonzalo, Xu D X, et al. polarization splitter and rotor with a sub-wavelength grating for enhancing the surface separation [ J ]. Optics Letters, 39, 31-6934 (2014).
According to the above analysis, it is generally difficult to achieve a balance of three indexes, namely a compact structure, high overall performance and large manufacturing tolerance, in the polarization beam splitting rotator based on the asymmetric directional coupler type structure, and this phenomenon makes it difficult to prepare and apply the polarization beam splitting rotator based on the silicon-based photonic integration platform on a large scale at a low cost.
Disclosure of Invention
The invention aims to provide a two-stage asymmetric directional coupler type optical polarization beam splitting rotator connected with a U-shaped waveguide, which has the advantages of compact structure, excellent performance and large manufacturing tolerance.
The purpose of the invention is realized as follows:
a U-shaped waveguide connects the light polarization beam splitting rotator of the two-stage asymmetric directional coupler type, use silicon dioxide as basement and upper cladding, use silicon as the body of the polarization beam splitting rotator; the whole structure of the device is divided into three parts: the waveguide 1 is a tapered etching waveguide, and a polarization mode matching condition coupled with the first section of the waveguide 2 is constructed through etching; the waveguide 2 is a U-shaped waveguide and is structurally divided into three sections: the central position of the first section forms a gap through full etching to complete phase matching with the waveguide 1, so that a first-stage asymmetric directional coupler is formed with the waveguide 1 to realize TM0The polarization mode is separated, the second section is a bent waveguide, the device is folded to increase compactness, and the third section is a uniform waveguide and forms a second-stage asymmetric directional coupler together with the waveguide 3 to complete the polarization rotation effect; the waveguide 3 is of an adiabatic conical structure as a whole, and the etching direction is the same as that of the waveguide 1; the second-stage asymmetric directional coupler separates TM from the first-stage asymmetric directional coupler0Further rotation of polarization mode to TE0And outputting after polarization mode.
The phase matching condition of the polarization mode of the coupling of the waveguide 1 and the first section of the waveguide 2 is as follows:
neff1(TM0)＝neff2(TM0) (1)
TM of waveguide 2 in the second-stage asymmetric directional coupler0Polarization mode and TE in waveguide 30The polarization mode should satisfy the following phase matching condition:
neff2(TM0)＝neff3(TE0) (2)
wherein n iseff1(TM0) Showing TM in waveguide 10Effective refractive index of polarization mode, neff2(TM0) Indicating TM in waveguide 20Effective refractive index of polarization mode, neff3(TE0) Indicating TE in the waveguide 30The effective refractive index of the polarization mode; after the first section of the waveguide 2 is completely etched at the central position, the structure of the first section is kept unchanged at the bent waveguide part, and then the first section of the waveguide is restored into a uniform waveguide at the third section of the waveguide through a tapered structure.
The width of the waveguide 1 is 450nm, and the length of the coupling region is 11 μm; the width of the first section of the waveguide 2 is set to be 540nm, the preset distance between the waveguide 1 and the waveguide 2, namely the gap is 250nm, and the radius of the U-shaped waveguide is 20 mu m; the width and the thickness of the third section of the waveguide 2 are respectively 450nm and 220nm, the preset distance between the waveguide 3 and the section of the waveguide is 200nm, the width of the straight waveguide in the waveguide 3 is 310nm, and the conical etching depth of the waveguide is 70 nm.
The etching width of the first section of the waveguide 2 is 180nm, and the third section of the waveguide is a uniform straight waveguide with the thickness of 220 nm; the first-stage asymmetric directional coupling length is 11 μm, and the second-stage asymmetric directional coupling length is 40 μm.
The invention uses a U-shaped waveguide to connect two-stage asymmetric directional coupler to realize polarization separation and polarization rotation of the whole device; the substrate and the upper cladding both adopt silicon dioxide, and silicon is used as the main body of the polarization beam splitting rotator.
The whole structure of the device is divided into three parts: the waveguide 1 is a tapered etched waveguide, and a polarization effective refractive index condition which can be coupled with the waveguide 2 is constructed by etching. The waveguide 2 is a U-shaped waveguide, has a preset distance with the waveguide 1, and can be divided into three sections in structure: the central position of the first section is fully etched to form a gap which completes the phase with the waveguide 1Matching, implementing TM0The splitting of the polarization modes forms a first order asymmetric directional coupler with the waveguide 1. The second section is a curved waveguide, and the device is folded by using the section, so that the compactness is increased. The third section is a uniform waveguide, and forms a second-stage asymmetric directional coupler together with the waveguide 3 to complete the function of deflection rotation; the waveguide 3 is a tapered etched waveguide similar to the waveguide 1, has an adiabatic tapered structure as a whole, has the same etching direction as the waveguide 1, and is separated from the first-stage asymmetric directional coupler by the second-stage asymmetric directional coupler0The polarization mode is rotated for further conversion to TE0And outputting the polarization mode.
The waveguide 2 is a U-shaped waveguide and is divided into three sections. The first section is fully etched at the center of the waveguide, so that the internal effective refractive index is skillfully constructed, and the first-stage asymmetric directional coupler is formed by the first section and the waveguide 1; by etching the structure so that the TM of the waveguide 10TM of polarization mode and waveguide 20The polarization mode satisfies the phase matching condition:
neff1(TM0)＝neff2(TM0) (1)
wherein n iseff1(TM0) Showing TM in waveguide 10Effective refractive index of polarization mode, neff2(TM0) Showing TM in waveguide 20The effective refractive index of the polarization mode; the first-stage asymmetric directional coupler mainly realizes TM0A separation function of polarization modes; the second-stage asymmetric directional coupler separates TM from the first-stage asymmetric directional coupler0Further rotation of polarization mode to TE0And outputting after polarization mode.
The waveguide 3 is a tapered etching waveguide similar to the waveguide 1, the etching direction is the same as that of the waveguide 1, the whole waveguide is of an adiabatic tapered structure, and the waveguide and the third section of the waveguide 2 form a second-stage asymmetric directional coupler together, so that the function of polarization beam splitting rotation of the whole device is realized finally;
using a U-shaped waveguide as an intermediate connecting waveguide, the TM0Polarization mode and TE0Separation of polarization modes and rotational isolation, i.e. polarization splitting andthe polarization rotation is completed in two parts, so that the problem of polarization hybridization in the traditional structure is reduced.
After passing through the polarization beam splitting rotator consisting of the three parts, TM0The polarization mode is successfully split into waveguide 2 and the TM is completed simultaneously by waveguide 30Polarization mode to TE0Rotation of polarization mode without the overall structure being aligned with incident TE0The polarization mode acts to ensure that it is output from the waveguide with very low loss.
Preferably, the width of the waveguide 1 is 450nm, and the length of the coupling region is 11 μm; the width of a first section of waveguide in the waveguide 2 is set to be 540nm, the preset distance between the waveguide 1 and the waveguide 2 is 250nm, and the radius of the U-shaped waveguide is 20 mu m; the width of the third section of waveguide in the waveguide 2 is 450nm, the preset distance between the waveguide 3 and the section of waveguide is 200nm, and the width of the straight waveguide in the waveguide 3 is 310 nm.
The beneficial technical effects of the invention are as follows:
1. using phase matching conditions to complete TM using U-shaped waveguide structure0Separation of polarization modes and rotation.
2. The integral device is folded by using the U-shaped waveguide structure, so that the compactness of the device is increased, and the length of the integral device is reduced.
3. The two-stage asymmetric directional coupler type silicon-based light polarization beam splitting rotator connected by the U-shaped waveguide adopts a multi-stage coupling mode, polarization beam splitting and polarization rotation are respectively completed at two parts, the design freedom degree is increased, the mode separation degree is improved, and a device with a high extinction ratio is convenient to design.
4. The two-stage asymmetric directional coupler on the U-shaped waveguide adopts conical etching, so that the manufacturing tolerance of the device is improved.
5. The invention provides a two-stage asymmetric directional coupler type optical polarization beam splitting rotator connected by a U-shaped waveguide, which solves the problems that a related polarization beam splitter is low in extinction ratio and bandwidth does not meet requirements.
Drawings
Fig. 1 is a schematic diagram of a silicon-based optical polarization beam splitting rotator.
Fig. 2 is a two-stage asymmetric directional coupler optical transmission field: (a) a first stage asymmetric directional coupler; (b) and a second-stage asymmetric directional coupler.
FIG. 3 is the optical power distribution at different polarization mode inputs: (a) input TM0A polarization mode; (b) input TE0Polarization mode.
Detailed Description
The invention is described in further detail below with reference to the figures and the detailed description.
The invention relates to a two-stage asymmetric directional coupler type optical polarization beam splitting rotator connected by U-shaped waveguides. As shown in fig. 1, the substrate and the upper cladding both use silica; silicon is used as the body of the polarization beam splitting rotator.
The whole structure of the device is divided into three parts: the waveguide 1 is a tapered etching waveguide, the etching depth is 70nm according to the process requirement, and a polarization effective refractive index condition which can be coupled with the waveguide 2 is constructed by etching; the waveguide 2 is a U-shaped waveguide, connects the waveguide 1 and the waveguide 3, has a preset distance with the waveguide 1, and can be divided into three sections in structure: in order to complete phase matching with the waveguide 1, the first straight waveguide section is subjected to full etching at the central position of the waveguide to form a gap, so that a first-stage asymmetric directional coupler is formed with the waveguide 1, and TM is realized0Separation of polarization modes. The second section is a bent waveguide, the width of the section of the bent waveguide is the same as that of the first section of the straight waveguide, the device is folded by utilizing the section, the compactness is increased, and the third section is a uniform waveguide and forms a second-stage asymmetric directional coupler together with the waveguide 3 to complete the polarization rotation; the waveguide 3 is a tapered etched waveguide similar to the waveguide 1, the whole waveguide is of an adiabatic tapered structure, the tapered etching direction is the same as that of the waveguide 1, and the second-stage asymmetric directional coupler separates the TM from the first-stage asymmetric directional coupler0Further rotation of polarization mode to TE0And outputting after polarization mode.
The waveguide 1 has the function of forming a first-stage asymmetric directional coupler with the first waveguide section of the waveguide 2 by etching to construct a polarization effective refractive index condition capable of being coupled with the waveguide 2, so as to realize TM0Separation of polarization modes. As can be seen from fig. 1: the waveguide 1 is a tapered etched waveguide, the etching depth is determined by the process and TE0The requirement of the transmission loss of the polarization mode is set to be 70nm, the center position of the first section of the waveguide 2 is fully etched, the etching width is preferably 180nm according to the phase matching condition and the requirement of the manufacturing process, the gap between the waveguide 1 and the waveguide 2 is set to be 250nm, and the widths of the waveguide 1 and the waveguide 2 in the first-stage asymmetric directional coupler are preferably 450nm and 540nm respectively. The second section of the waveguide 2 is a curved waveguide, and the whole device is folded by using the section, so that the compactness of the device is increased, because of TM0The bending radius of the bent waveguide is preferably 20 microns, the loss is negligible at the moment, the third section is a uniform straight waveguide with the thickness of 220nm, the section is an adiabatic tapered waveguide, the coupling length is longer, the device has larger manufacturing tolerance at the moment, the width of the waveguide 2 is changed into 450nm through gradual change, the second-stage asymmetric directional coupler is composed of the waveguide 3 and the third section of the waveguide 2, the structure of the first section of the waveguide 2 is kept unchanged in the bent waveguide part after the first section of the waveguide 2 is completely etched in the central position, and then the first section of the waveguide 2 is restored into the uniform waveguide through a tapered structure in the third section of the waveguide 2. Waveguide 3 is similar to waveguide 1, using a 70nm deep taper etch, and the width of waveguide 3 is preferably 310nm, depending on the polarization rotation requirement.
Under the condition of the implementation example, through 3D-FDTD scanning calculation analysis, the first-stage asymmetric directional coupling length is set to be 11 μm, the second-stage asymmetric directional coupling length is set to be 40 μm, the coupling efficiency at the central wavelength is close to 95%, and the overall size of the structure is not more than 80 μm. The transmission performance of the overall structure of the present invention is shown in fig. 2 and 3, and includes polarization mode field distribution and output spectrum (or optical power as a function of wavelength). At TM0Under the input condition of a polarization mode, the output spectrum of each port realizes that the extinction ratio is more than 28dB in the 200nm bandwidth of 1450nm-1650nm, and the loss is lower than 0.9 dB; in the range of C band (1535-1565nm), the polarization extinction ratio is larger than 30dB,the loss is below 0.4 dB. In TE0Under the condition of polarization mode input, the extinction ratio is larger than 24dB and the loss is lower than 0.2dB in the whole tested 200nm bandwidth.
In summary of the above statements, the present invention has the following features. 1. The U-shaped waveguide is used as the intermediate connection waveguide to respectively complete polarization beam splitting and polarization rotation in two parts, so that the polarization separation degree of the device is improved, and the extinction ratio is obviously improved; 2. the U-shaped waveguide is used for folding the two functional sections of the whole device, so that the compactness of the device is improved; 3. the two coupling sections are both formed into the conical coupler by adopting conical etching, so that the manufacturing tolerance of the device is improved.
The above description is only a preferred embodiment of the present invention, and it should be noted that several modifications and decorations can be made in the actual implementation without departing from the essence of the method and core device of the present invention.
Claims (4)
1. A U-shaped waveguide connects the light polarization beam splitting rotator of the two-stage asymmetric directional coupler type, characterized by that, use silicon dioxide as basement and upper cladding, use silicon as the body of the polarization beam splitting rotator; the whole structure of the device is divided into three parts: the waveguide (1) is a tapered etching waveguide, and a polarization mode matching condition coupled with the first section of the waveguide (2) is constructed through etching; the waveguide (2) is a U-shaped waveguide, connects the waveguide (1) and the waveguide (3), and is structurally divided into three sections: the central position of the first section forms a gap through full etching to complete phase matching with the waveguide (1), thereby forming a first-stage asymmetric directional coupler with the waveguide (1) to realize TM0The polarization mode is separated, the second section is a bent waveguide, the device is folded to increase compactness, and the third section is a uniform waveguide and forms a second-stage asymmetric directional coupler together with the waveguide (3) to complete the polarization rotation effect; the whole waveguide (3) is of a heat insulation conical structure, and the etching direction is the same as that of the waveguide (1); the second-stage asymmetric directional coupler separates TM from the first-stage asymmetric directional coupler0Further rotation of polarization mode to TE0And outputting after polarization mode.
2. A U-shaped waveguide connected two-stage asymmetric directional coupler type optical polarization beam splitting rotator according to claim 1, wherein the phase matching condition of the polarization mode of the waveguide (1) coupled with the first segment of the waveguide (2) is:
neff1(TM0)＝neff2(TM0) (1)
TM of waveguide (2) in the second-stage asymmetric directional coupler0Polarization mode and TE in a waveguide (3)0The polarization mode should satisfy the following phase matching condition:
neff2(TM0)＝neff3(TE0) (2)
wherein n iseff1(TM0) Indicating TM in the waveguide (1)0Effective refractive index of polarization mode, neff2(TM0) Indicating TM in the waveguide (2)0Effective refractive index of polarization mode, neff3(TE0) Indicating TE in the waveguide (3)0The effective refractive index of the polarization mode; after the first section of the waveguide (2) is completely etched at the central position, the structure of the first section of the waveguide is kept unchanged at the bent waveguide part, and then the first section of the waveguide is restored into a uniform waveguide at the third section of the waveguide (2) through a conical structure.
3. A U-shaped waveguide connected two-stage asymmetric directional coupler type optical polarization beam splitting rotator according to claim 2, wherein the waveguide (1) has a width of 450nm and a coupling region length of 11 μm; the width of a first section of waveguide in the waveguide (2) is set to be 540nm, the preset distance between the waveguide (1) and the waveguide (2), namely the gap is 250nm, and the radius of the U-shaped waveguide is 20 mu m; the width and the thickness of the third section of the waveguide (2) are respectively 450nm and 220nm, the preset distance between the waveguide (3) and the section of the waveguide is 200nm, the width of the straight waveguide in the waveguide (3) is 310nm, and the taper etching depth of the waveguide (3) is 70 nm.
4. A U-shaped waveguide connected two-stage asymmetric directional coupler type optical polarization beam splitting rotator according to claim 3, wherein the waveguide (2) has a first section with an etched width of 180nm and a third section with a uniform straight waveguide thickness of 220 nm; the first-stage asymmetric directional coupling length is 11 μm, and the second-stage asymmetric directional coupling length is 40 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110347729.6A CN112904478B (en) | 2021-03-31 | 2021-03-31 | U-shaped waveguide connected two-stage asymmetric directional coupler type light polarization beam splitting rotator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110347729.6A CN112904478B (en) | 2021-03-31 | 2021-03-31 | U-shaped waveguide connected two-stage asymmetric directional coupler type light polarization beam splitting rotator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112904478A true CN112904478A (en) | 2021-06-04 |
| CN112904478B CN112904478B (en) | 2021-12-03 |
Family
ID=76109708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110347729.6A Active CN112904478B (en) | 2021-03-31 | 2021-03-31 | U-shaped waveguide connected two-stage asymmetric directional coupler type light polarization beam splitting rotator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112904478B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113777705A (en) * | 2021-08-04 | 2021-12-10 | 华中科技大学 | Optical polarization mode asymmetric conversion method and device |
| CN114966969A (en) * | 2022-05-27 | 2022-08-30 | 师大海能应急科技(清远)有限公司 | Parallel multimode cross structure based on asymmetric directional coupler |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140341500A1 (en) * | 2013-05-15 | 2014-11-20 | Hon Hai Precision Industry Co., Ltd. | Polarizing splitter and method for manufacturing same |
| JP2015090449A (en) * | 2013-11-06 | 2015-05-11 | 株式会社フジクラ | Mode conversion element and optical waveguide element |
| US9366818B1 (en) * | 2015-11-06 | 2016-06-14 | Inphi Corporation | Broadband silicon nitride polarization beam splitter |
| CN106199836A (en) * | 2016-07-21 | 2016-12-07 | 浙江大学 | A kind of bandwidth tunable filter based on silica-based waveguides grating |
| CN109814202A (en) * | 2019-03-28 | 2019-05-28 | 浙江大学 | One kind being based on PT symmetrically nonreciprocal polarization beam apparatus |
| CN210072135U (en) * | 2019-07-25 | 2020-02-14 | 上海新微技术研发中心有限公司 | Tapered polarization beam splitter based on slit waveguide |
| CN112041717A (en) * | 2018-04-26 | 2020-12-04 | 华为技术有限公司 | Light splitter with trident structure |
| CN112327410A (en) * | 2020-11-19 | 2021-02-05 | 西南交通大学 | Two-stage sub-wavelength grating silicon-based optical polarization beam splitting rotator based on asymmetric coupling |
| CN112327411A (en) * | 2020-11-19 | 2021-02-05 | 西南交通大学 | Silicon-based polarization beam splitting rotator based on adiabatic conical asymmetric coupling and Y-branch |
-
2021
- 2021-03-31 CN CN202110347729.6A patent/CN112904478B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140341500A1 (en) * | 2013-05-15 | 2014-11-20 | Hon Hai Precision Industry Co., Ltd. | Polarizing splitter and method for manufacturing same |
| JP2015090449A (en) * | 2013-11-06 | 2015-05-11 | 株式会社フジクラ | Mode conversion element and optical waveguide element |
| US9366818B1 (en) * | 2015-11-06 | 2016-06-14 | Inphi Corporation | Broadband silicon nitride polarization beam splitter |
| CN106199836A (en) * | 2016-07-21 | 2016-12-07 | 浙江大学 | A kind of bandwidth tunable filter based on silica-based waveguides grating |
| CN112041717A (en) * | 2018-04-26 | 2020-12-04 | 华为技术有限公司 | Light splitter with trident structure |
| CN109814202A (en) * | 2019-03-28 | 2019-05-28 | 浙江大学 | One kind being based on PT symmetrically nonreciprocal polarization beam apparatus |
| CN210072135U (en) * | 2019-07-25 | 2020-02-14 | 上海新微技术研发中心有限公司 | Tapered polarization beam splitter based on slit waveguide |
| CN112327410A (en) * | 2020-11-19 | 2021-02-05 | 西南交通大学 | Two-stage sub-wavelength grating silicon-based optical polarization beam splitting rotator based on asymmetric coupling |
| CN112327411A (en) * | 2020-11-19 | 2021-02-05 | 西南交通大学 | Silicon-based polarization beam splitting rotator based on adiabatic conical asymmetric coupling and Y-branch |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113777705A (en) * | 2021-08-04 | 2021-12-10 | 华中科技大学 | Optical polarization mode asymmetric conversion method and device |
| CN113777705B (en) * | 2021-08-04 | 2022-05-20 | 华中科技大学 | Optical polarization mode asymmetric conversion method and device |
| CN114966969A (en) * | 2022-05-27 | 2022-08-30 | 师大海能应急科技(清远)有限公司 | Parallel multimode cross structure based on asymmetric directional coupler |
| CN114966969B (en) * | 2022-05-27 | 2024-05-24 | 师大海能应急科技(清远)有限公司 | Parallel multimode cross structure based on asymmetric directional coupler |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112904478B (en) | 2021-12-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112327411B (en) | Silicon-based polarization beam splitting rotator based on adiabatic conical asymmetric coupling and Y-branch | |
| JP6103520B2 (en) | Mode expansion composite converter | |
| CN112904478B (en) | U-shaped waveguide connected two-stage asymmetric directional coupler type light polarization beam splitting rotator | |
| WO2015096070A1 (en) | Waveguide polarization splitter and polarization rotator | |
| CN107422421B (en) | Sparse wavelength division multiplexer based on bending directional coupler | |
| CN109407229B (en) | End face coupler | |
| CN110376753B (en) | High-performance polarization beam splitter and design method thereof | |
| CN112327410B (en) | Two-stage sub-wavelength grating silicon-based optical polarization beam splitting rotator based on asymmetric coupling | |
| CN115079345B (en) | Double-conical asymmetric directional coupler-based light polarization beam splitting rotator | |
| CN112711093B (en) | Polarization beam splitter structure and polarization beam splitting method | |
| CN105823474A (en) | Fiber-optic gyroscope resonant cavity chip based on tunable surface plasmon coupler | |
| CN112630892A (en) | Four-channel coarse wavelength division multiplexer based on non-equal-arm wide Mach-Zehnder interferometer | |
| CN106094115A (en) | Complex light wave multiplexer | |
| CN112904477A (en) | Polarization insensitive optical power divider based on shallow etching multimode interference coupler | |
| CN113391395B (en) | Compact on-chip polarization beam splitting rotator based on Bezier curve graded waveguide | |
| CN108594364B (en) | Ultra wide bandwidth 3dB based on narrow slit wave-guide divides bundling device and method | |
| CN113311537A (en) | Polymer three-mode multiplexer based on cascade conical coupler | |
| CN116560001A (en) | Polarization beam splitting-combining device based on cascade adiabatic coupler | |
| CN111458795A (en) | Full-wave-band polarizer based on silicon waveguide | |
| US11906780B2 (en) | Asymmetric adiabatic polarization beam splitter and integrated optical waveguide filtering chip | |
| CN116256842A (en) | Polarization beam splitting rotator | |
| CN115877507A (en) | Three-waveguide medium infrared base mode selector based on GaAs mixed plasma structure | |
| CN113325515B (en) | Array waveguide grating adopting slit array waveguide | |
| CN112596254B (en) | Compact polarization beam splitter based on photonic crystal | |
| US20130272644A1 (en) | Multi-Mode Interference Manipulator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |