CN117267434A - Flow control electromagnetic valve - Google Patents

Flow control electromagnetic valve Download PDF

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Publication number
CN117267434A
CN117267434A CN202311549803.8A CN202311549803A CN117267434A CN 117267434 A CN117267434 A CN 117267434A CN 202311549803 A CN202311549803 A CN 202311549803A CN 117267434 A CN117267434 A CN 117267434A
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CN
China
Prior art keywords
optical fiber
valve
valve rod
valve body
closed space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311549803.8A
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Chinese (zh)
Inventor
钟少龙
凌晶芳
袁硕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai B&a Sensor Co ltd
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Shanghai B&a Sensor Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai B&a Sensor Co ltd filed Critical Shanghai B&a Sensor Co ltd
Priority to CN202311549803.8A priority Critical patent/CN117267434A/en
Publication of CN117267434A publication Critical patent/CN117267434A/en
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/08—Guiding yokes for spindles; Means for closing housings; Dust caps, e.g. for tyre valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
    • F16K37/0083—For recording or indicating the functioning of a valve in combination with test equipment by measuring valve parameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Magnetically Actuated Valves (AREA)

Abstract

The application relates to a flow control electromagnetic valve, which comprises a valve body and a sealing cover arranged on the valve body, wherein a closed space exists between the sealing cover and the valve body or a closed space exists inside the sealing cover; the valve body is provided with a valve rod, a piezoelectric driver, a first optical fiber inserting core and a second optical fiber inserting core, wherein the first end of the valve rod is positioned in the valve body, the piezoelectric driver is arranged on the valve body and is configured to drive the valve rod to move, and the first optical fiber inserting core and the second optical fiber inserting core are arranged on the second end of the valve rod. The use end of the second optical fiber lock pin extends into the closed space, the second end of the valve rod or the use end of the first optical fiber lock pin extends into the closed space, and the first optical fiber lock pin and the second optical fiber lock pin provide a group of reflecting surfaces. The flow control electromagnetic valve disclosed by the application uses the Fabry-Perot cavity formed by the double optical fiber lock pin to accurately measure the displacement of the valve rod, then uses the displacement to correct the displacement of the valve rod, and can realize the accurate control of flow by the closed-loop control realized by the mode.

Description

Flow control electromagnetic valve
Technical Field
The present application relates to the field of control technologies, and in particular, to a flow control electromagnetic valve.
Background
The electromagnetic valve is an electromagnetic controlled electric valve, and is a basic element for controlling the flow of fluid. Can be used for controlling the flow rate, the flow velocity and other parameters of liquid and gas. The electromagnetic valve can realize accurate control of various parameters by being provided with a non-through circuit.
For the accurate control of the flow in the interval of 50ml-100ml, the precision of the existing electromagnetic valve cannot meet the requirement, for example, the electromagnetic valve in an electromagnetic coil control mode is taken as an example, the magnetic field strength generated after the electromagnetic coil is electrified cannot be accurately controlled, and therefore a certain fluctuation range exists in the displacement of each time, and the actual flow of the electromagnetic valve cannot be accurately controlled. In addition, if closed-loop control is used in the control mode, frequent regulation and control and a large amount of data calculation can also lead to certain hysteresis of regulation and control actions.
For another example, in a servo motor control mode, the servo motor has a certain defect in micro-angle rotation precision, in order to solve the problem, a set of transmission components are additionally added to increase the rotation quantity of the servo motor in each control process, the increase of the transmission components can lead to the increase of the number of nodes, each node has errors, error accumulation can still be transmitted to the tail end, and a certain fluctuation range exists in the displacement quantity; and also causes a problem of an increase in volume.
It can be seen that the existing proportional solenoid valve has certain limitations in terms of accuracy, stability and response speed of flow control. Especially in the fields of medical treatment, chemical industry, laboratory, etc., the demand for accurate flow control is becoming urgent. Therefore, there is a need in the art to develop a fine flow control solenoid valve that can achieve precise flow control.
Disclosure of Invention
In order to realize accurate flow control, the application provides a flow control electromagnetic valve, which is used for accurately measuring the displacement of a valve rod through a Fabry-Perot cavity formed by a double-fiber ferrule, and then reversely adjusting the displacement of the valve rod by using the displacement, and the accurate flow control can be realized through closed-loop control realized in the mode; the flow in the interval of 50ml-100ml is accurately controlled, the closed-loop feedback structure of the piezoelectric ceramic and the F-P cavity is adopted, the drift of the flow can be compensated in real time, and the stability of flow control is improved.
The above object of the present application is achieved by the following technical solutions:
in a first aspect, the present application provides a flow control solenoid valve comprising:
a valve body;
the sealing cover is arranged on the valve body, a closed space exists between the sealing cover and the valve body or a closed space exists inside the sealing cover;
the first end of the valve rod is positioned in the valve body;
a piezoelectric actuator disposed on the valve body, the piezoelectric actuator configured to drive the valve stem to move;
the first optical fiber inserting core is arranged at the second end of the valve rod, and the second end of the valve rod or the using end of the first optical fiber inserting core extends into the closed space; and
the second optical fiber inserting core penetrates through the sealing cover and stretches into the sealed space, so that the using end of the second optical fiber inserting core is positioned in the sealed space;
the use end of the first optical fiber insert core and the use end of the second optical fiber insert core provide a group of reflecting surfaces, so that a Fabry-Perot cavity is formed.
In a possible implementation manner of the first aspect, the method further includes:
the optical signal unit is connected with the second optical fiber ferrule; and
the controller is electrically connected with the optical signal unit and the piezoelectric driver;
the controller controls the displacement of the valve rod through the piezoelectric driver according to the feedback of the optical signal unit.
In one possible implementation of the first aspect, the piezoelectric actuator comprises a piezoelectric ceramic disposed on the valve body;
the valve rod passes through the guide hole on the piezoelectric ceramic.
In a second aspect, the present application provides a flow control solenoid valve comprising:
a valve body having a closed space inside;
the first end of the valve rod is positioned in the valve body;
a piezoelectric actuator disposed on the valve body, the piezoelectric actuator configured to drive the valve stem to move;
the first optical fiber inserting core is arranged at the second end of the valve rod, and the second end of the valve rod or the using end of the first optical fiber inserting core extends into the closed space; and
the second optical fiber inserting core penetrates through the sealing cover and stretches into the sealed space, so that the using end of the second optical fiber inserting core is positioned in the sealed space;
the use end of the first optical fiber insert core and the use end of the second optical fiber insert core provide a group of reflecting surfaces, so that a Fabry-Perot cavity is formed.
In a possible implementation manner of the second aspect, the method further includes:
the optical signal unit is connected with the second optical fiber ferrule; and
the controller is electrically connected with the optical signal unit and the piezoelectric driver;
the controller controls the displacement of the valve rod through the piezoelectric driver according to the feedback of the optical signal unit.
In one possible implementation of the second aspect, the piezoelectric actuator comprises a piezoelectric ceramic disposed on the valve body;
the valve rod passes through the guide hole on the piezoelectric ceramic.
The invention has the following beneficial effects:
the electromagnetic valve adopts a feedback structure for controlling the displacement of the valve formed by the piezoelectric ceramic and the Fabry-Perot cavity formed by the double optical fiber inserts, and can accurately feed back and stably control the displacement, so that the flow of the electromagnetic valve is accurately controlled, and the error of flow control can be reduced to be within 2%. The electromagnetic valve has the advantages of simple structure, strong stability, accurate control and the like.
The dual-fiber core is adopted to form the Fabry-Perot cavity, and the diameter of the optical fiber is in the micron level, so that the formed electromagnetic valve is small in size and can be used for precisely controlling the flow in a 50ml-100ml interval.
Drawings
Fig. 1 is a schematic view showing the operation principle of a conventional solenoid valve, in which the solenoid valve is in a closed state.
Fig. 2 is a schematic view of a conventional solenoid valve in an opened state based on fig. 1.
Fig. 3 is a schematic structural view of a flow control solenoid valve provided herein.
Fig. 4 is a schematic structural view of a flow control solenoid valve using piezoelectric ceramics provided herein.
Fig. 5 is a schematic structural view of a piezoelectric ceramic provided in the present application.
Fig. 6 is a schematic diagram of a control principle of a controller provided in the present application.
Fig. 7 is a graph of spool displacement control flow for a flow control solenoid valve provided herein.
In the figure, 1, a valve body, 2, a sealing cover, 3, a valve rod, 4, a piezoelectric actuator, 51, a first optical fiber inserting core, 52, a second optical fiber inserting core, 6, an optical signal unit, 7, a controller, 11, piezoelectric ceramics, 111 and a guide hole.
Detailed Description
The technical solutions in the present application are described in further detail below with reference to the accompanying drawings.
The present application discloses a flow control solenoid valve, and in some examples, the flow control solenoid valve disclosed herein is primarily used for flow precise control in the interval 50ml-100 ml.
First, the basic operation principle of the solenoid valve will be described.
Referring to fig. 1 and 2, the conventional solenoid valve mainly comprises a valve seat 601, an inlet 602, an outlet 603, a valve core 604, a spring 605 and a coil 606, wherein the inlet 602 and the outlet 603 are communicated through a cavity in the valve seat 601.
The spring 605 urges the spool 604 to block the passage between the inlet 602 and the outlet 603, with the inlet 602 and the outlet 603 in a disconnected state, and fluid is not circulated within the solenoid valve. The coil 606 is used for generating a magnetic field, and pulling the valve core 604 to move, so that the inlet 602 and the outlet 603 are switched from the disconnected state to the connected state, and fluid can circulate in the electromagnetic valve.
Referring to fig. 3, the flow control solenoid valve disclosed in the present application mainly comprises a valve body 1, a sealing cover 2, a valve rod 3, a piezoelectric actuator 4, a first optical fiber ferrule 51, a second optical fiber ferrule 52 and the like, and in some possible implementation manners, the valve body 1 in the present application comprises a valve seat, on which an inlet and an outlet are provided.
The sealing cover 2 is mounted on the valve body 1, and the sealing cover 2 is used for providing a closed space, and the closed space can be positioned between the sealing cover 2 and the valve body 1 or inside the sealing cover 2. The function of the closed space is to provide a working environment for the first and second optical fiber ferrules 51 and 52 that is not affected by external light sources, dust, moisture, etc.
A first end of the valve rod 3 is positioned in the valve body 1 and is used for adjusting a passage between an inlet and an outlet on a valve seat; the second end is provided with a first optical fiber ferrule 51; the second end of the valve stem 3, or the end of the first fiber stub 51, extends into the enclosed space.
In some possible implementations, the first fiber stub 51 is secured to the second end of the valve stem 3 using adhesive, plugging, or the like.
The end of the first optical fiber ferrule 51 is the end of the first optical fiber ferrule 51 facing the second optical fiber ferrule 52, and the end of the second optical fiber ferrule 52 is the end of the second optical fiber ferrule 52 facing the first optical fiber ferrule 51.
The use end of the second optical fiber ferrule 52 extends into the enclosed space through the sealing cover, and the first optical fiber ferrule 51 and the second optical fiber ferrule 52 serve to provide a set of reflecting surfaces by the use ends of the two, specifically, the number of the reflecting surfaces is two, and the two reflecting surfaces are respectively positioned on the use end of the first optical fiber ferrule 51 and the use end of the second optical fiber ferrule 52, so as to form a fabry-perot cavity.
A piezoelectric actuator 4 is mounted on the valve body 1, the piezoelectric actuator 4 serving to actuate the valve stem 3.
In some possible implementations, referring to fig. 4 and 5, the piezoelectric actuator 4 includes a piezoelectric ceramic 11 provided on the valve body 1, and the valve stem 3 passes through a guide hole 111 provided on the piezoelectric ceramic 11.
The working modes of the use end of the first optical fiber ferrule 51 and the use end of the second optical fiber ferrule 52 are as follows:
one beam of light is directed to the reflecting surface of the second fiber ferrule 52 and then continuously reflected between the reflecting surface of the first fiber ferrule 51 and the reflecting surface of the second fiber ferrule 52, the distance between the two reflecting surfaces being the cavity length L.
According to the formula of beam interference enhancement:
wherein,expressed as the phase difference of the interfering beams; lambda is the wavelength of the coherent light beam; />Is the optical path difference of the interference light beam;mthe range of the resonance order is any integer.
For the fabry-perot cavity (composed of the first optical fiber ferrule 51 and the second optical fiber ferrule 52, or the use end of the first optical fiber ferrule 51 and the use end of the second optical fiber ferrule 52), after the light beam is transmitted for one period, when the optical path difference satisfies the interference enhancement formula, the light beam with the corresponding wavelength can resonate in the fabry-perot cavity and then be output.
For cavity length ofLThe resonance wavelength of the Fabry-Perot cavity is as follows:
λ=2nL/m，
wherein the method comprises the steps ofnIs the refractive index of the medium in the cavity.
As can be seen from the resonant wavelength formula, when the resonant cavity is fixed, differentmThe resonant orders correspond to different resonant wavelengths, so the fabry-perot cavity has a plurality of resonant wavelengths.
When the cavity length of the fabry-perot cavity increases or decreases, the resonant wavelength of the fabry-perot cavity can undergo a red shift or a blue shift in the spectrum. By shift of resonant wavelengthThe variation of the cavity length can be accurately calculated>It is expressed as:
the FT702E high-precision demodulator of Shanghai Bai An sensing technology Co can achieve the picometer-level demodulation precision, so that the Fabry-Perot cavity measurement displacement precision in the method can reach 0.1 mu m.
The flow control solenoid valve disclosed in the present application uses a fabry-perot cavity composed of dual optical fiber ferrules (a first optical fiber ferrule 51 and a second optical fiber ferrule 52), and when the piezoelectric actuator 4 controls the valve stem 3 to move, the cavity length of the fabry-perot cavity in the flow control solenoid valveLA change occurs. By shift of resonant wavelength in Fabry-Perot cavity spectraThe displacement of the cavity can be accurately calculated>And meanwhile, the displacement of the valve rod 3 controlled by the piezoelectric driver 4 is corrected by taking the displacement of the Fabry-Perot cavity as a feedback quantity, so that the accuracy of the displacement of the valve rod 3 is improved.
For flow calculation, it is assumed here that the outlet of the flow control solenoid valve disclosed in the present application is similar to a circle, and the valve rod 3 is driven to drive the valve core to displace, so as to change the area of the outlet, and finally control the flow of the outgoing fluid. When the valve core is displacedSmaller than the radius of the outletRWhen it is at its exit areaSThe method comprises the following steps:
when valveDisplacement of coreGreater than the radius of the outletRWhen it is at its exit areaSThe method comprises the following steps:
the corresponding flow rate can be calculated through the opening areaQThe method comprises the following steps:
Q= Sv；
wherein the method comprises the steps ofvIs the fluid flow rate.
From the above, the valve core displacementAnd flow rateQThere is a corresponding functional relationship. As shown in fig. 7, when the displacement amount becomes 0.75mm to 1.25mm, the curve linearity of the output flow rate is high. In order to reduce the error of measurement, a range with high linearity is selected as the working interval of the flow control electromagnetic valve. When the inlet flow rate is 50 m/s, the flow rate change range of the flow control electromagnetic valve is 50-100 mL according to the formula.
From the above description, it can be seen that by precisely detecting the displacement of the valve rod 3, precise control of the flow rate can be achieved.
In some examples, referring to fig. 6, an optical signal unit 6 and a controller 7 are further added, where the optical signal unit 6 is connected to a portion of the second optical fiber ferrule 52 outside the sealing cap; the controller 7 is electrically connected to the optical signal unit 6 and the piezoelectric actuator 4. In the foregoing, when the cavity length of the fabry-perot cavity is increased or decreased, the resonance wavelength of the fabry-perot cavity can be red shifted or blue shifted in the spectrum, and the variation of the cavity length can be accurately calculated through the shift of the resonance wavelength.
In the detection process, the optical signal unit 6 firstly emits a beam of light to the second optical fiber ferrule 52, the beam of light is reflected between the use end of the first optical fiber ferrule 51 and a set of reflection surfaces provided by the use end of the second optical fiber ferrule 52 after being emitted from the second optical fiber ferrule 52, refraction occurs at the use end of the second optical fiber ferrule 52 during the reflection process, and the light generated by refraction returns to the optical signal unit 6 to be analyzed by the optical signal unit 6.
The analysis principle is as follows: when the cavity length of the Fabry-Perot cavity is increased or decreased, the resonance wavelength on the spectrum of the Fabry-Perot cavity can be subjected to red shift or blue shift, and the change of the cavity length can be accurately calculated through the offset of the resonance wavelength.
In some possible implementations, the optical signal unit 6 comprises a light source generator and a full spectrum analyzer.
The data analyzed by the optical signal unit 6 is sent to the controller 7, and the controller 7 adjusts the displacement of the valve rod 3 by the piezoelectric actuator 4. In a specific embodiment, the optical signal unit 6 and the controller 7 are integrated into one device, such as an FT702E high-precision demodulator using shanghai bayer sensing technology limited.
It will be appreciated that there are both open loop and closed loop control for the control of the valve stem 3.
In short, the open loop control mode is that the controller 7 completes a control process after issuing an instruction; the closed-loop control mode is that after the controller 7 issues a command, the movement amount of the valve rod 3 is detected, the relation between the required displacement amount and the actual displacement amount of the valve rod 3 is judged, and the displacement of the valve rod 3 is adjusted again according to the relation, so that the actual displacement amount of the valve rod 3 is equal to the required displacement amount or the error is within an allowable range.
For the traditional piezoelectric ceramic control displacement, the hysteresis exists seriously, which is about 15%. This is very disadvantageous for high-precision flow solenoid valves. The piezoelectric actuator 4 with piezoelectric ceramic action and the dual-fiber ferrule form a feedback structure for controlling the displacement of the valve, and the error of flow control can be reduced to be within 2%, as shown in fig. 7.
The present application also discloses another type of flow control solenoid valve, which differs from the flow control solenoid valve described above in that the valve body 1 has a closed space therein, and the closed space is also provided for the first optical fiber ferrule 51 and the second optical fiber ferrule 52.
The electromagnetic valve can also be regarded as that the valve body 1 and the sealing cover 2 are integrally designed, namely, the valve body 1 and the sealing cover 2 are a part.
The embodiments of the present invention are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in this way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.

Claims (6)

1. A flow control solenoid valve, comprising:
a valve body (1);
the sealing cover (2) is arranged on the valve body (1), a closed space exists between the sealing cover (2) and the valve body (1) or a closed space exists inside the sealing cover (2);
a valve rod (3), wherein a first end of the valve rod (3) is positioned in the valve body (1);
a piezoelectric actuator (4) provided on the valve body (1), the piezoelectric actuator (4) being configured to drive the valve rod (3) to move;
the first optical fiber inserting core (51) is arranged at the second end of the valve rod (3), and the second end of the valve rod (3) or the using end of the first optical fiber inserting core (51) extends into the closed space; and
the second optical fiber inserting core (52) penetrates through the sealing cover (2) to extend into the closed space, so that the using end of the second optical fiber inserting core (52) is positioned in the closed space;
wherein the use end of the first optical fiber ferrule (51) and the use end of the second optical fiber ferrule (52) provide a set of reflecting surfaces.
2. The flow control solenoid valve of claim 1 further comprising:
an optical signal unit (6) connected to the second optical fiber ferrule (52); and
a controller (7) electrically connected with the optical signal unit (6) and the piezoelectric driver (4);
wherein, the controller (7) controls the displacement of the valve rod (3) through the piezoelectric actuator (4) according to the feedback of the optical signal unit (6).
3. A flow control solenoid valve according to claim 1 or 2, characterised in that the piezoelectric actuator (4) comprises a piezoelectric ceramic (11) provided on the valve body (1);
the valve rod (3) passes through a guide hole (111) on the piezoelectric ceramic (11).
4. A flow control solenoid valve, comprising:
a valve body (1) having a closed space inside;
a valve rod (3), wherein a first end of the valve rod (3) is positioned in the valve body (1);
a piezoelectric actuator (4) provided on the valve body (1), the piezoelectric actuator (4) being configured to drive the valve rod (3) to move;
the first optical fiber inserting core (51) is arranged at the second end of the valve rod (3), and the second end of the valve rod (3) or the using end of the first optical fiber inserting core (51) extends into the closed space; and
the second optical fiber inserting core (52) penetrates through the sealing cover (2) to extend into the closed space, so that the using end of the second optical fiber inserting core (52) is positioned in the closed space;
wherein the use end of the first optical fiber ferrule (51) and the use end of the second optical fiber ferrule (52) provide a set of reflecting surfaces.
5. The flow control solenoid valve of claim 4 further comprising:
an optical signal unit (6) connected to the first optical fiber ferrule (51) and the second optical fiber ferrule (52); and
a controller (7) electrically connected with the optical signal unit (6) and the piezoelectric driver (4);
wherein, the controller (7) controls the displacement of the valve rod (3) through the piezoelectric actuator (4) according to the feedback of the optical signal unit (6).
6. A flow control solenoid valve according to claim 4 or 5, characterised in that the piezoelectric actuator (4) comprises a piezoelectric ceramic (11) provided on the valve body (1);
the valve rod (3) passes through a guide hole (111) on the piezoelectric ceramic (11).
CN202311549803.8A 2023-11-21 2023-11-21 Flow control electromagnetic valve Pending CN117267434A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311549803.8A CN117267434A (en) 2023-11-21 2023-11-21 Flow control electromagnetic valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311549803.8A CN117267434A (en) 2023-11-21 2023-11-21 Flow control electromagnetic valve

Publications (1)

Publication Number Publication Date
CN117267434A true CN117267434A (en) 2023-12-22

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CN208402060U (en) * 2017-01-18 2019-01-18 大力士股份有限公司 The regulating device that diagnostic system and the processing medium for influencing technique production equipment flow
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CN111350875A (en) * 2020-03-19 2020-06-30 大连理工大学 Micro-flow proportional control valve
CN113738881A (en) * 2021-08-04 2021-12-03 北京控制工程研究所 Multi-sensor fused piezoelectric cold air variable thrust closed-loop regulation and control device
CN217403787U (en) * 2022-05-24 2022-09-09 深圳市常青藤节能科技有限公司 Pneumatic valve debugging and performance parameter diagnosis system
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CN116221488A (en) * 2022-12-26 2023-06-06 中国核动力研究设计院 Valve position measuring device of voltage stabilizer safety valve based on optical fiber Fabry-Perot sensing

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CN110114601A (en) * 2016-12-26 2019-08-09 株式会社富士金 Piezoelectric element drive-type valve and volume control device
CN208402060U (en) * 2017-01-18 2019-01-18 大力士股份有限公司 The regulating device that diagnostic system and the processing medium for influencing technique production equipment flow
CN108571600A (en) * 2017-03-09 2018-09-25 Vat控股公司 Vacuum valve with optical sensor
CN111350875A (en) * 2020-03-19 2020-06-30 大连理工大学 Micro-flow proportional control valve
CN113738881A (en) * 2021-08-04 2021-12-03 北京控制工程研究所 Multi-sensor fused piezoelectric cold air variable thrust closed-loop regulation and control device
CN217403787U (en) * 2022-05-24 2022-09-09 深圳市常青藤节能科技有限公司 Pneumatic valve debugging and performance parameter diagnosis system
CN115789316A (en) * 2022-09-26 2023-03-14 北京控制工程研究所 Valve core displacement direct measurement type piezoelectric proportional valve
CN116221488A (en) * 2022-12-26 2023-06-06 中国核动力研究设计院 Valve position measuring device of voltage stabilizer safety valve based on optical fiber Fabry-Perot sensing

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