CN117233579B - Chip aging tester and test line - Google Patents

Chip aging tester and test line Download PDF

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Publication number
CN117233579B
CN117233579B CN202311389796.XA CN202311389796A CN117233579B CN 117233579 B CN117233579 B CN 117233579B CN 202311389796 A CN202311389796 A CN 202311389796A CN 117233579 B CN117233579 B CN 117233579B
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Prior art keywords
pushing
test
chip
base plate
inner table
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CN202311389796.XA
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CN117233579A (en
Inventor
何润
侯德胜
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Suzhou Qianming Semiconductor Equipment Co ltd
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Suzhou Qianming Semiconductor Equipment Co ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

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Abstract

The invention relates to a chip aging tester and a test line, and relates to the technical field of chip aging tests, comprising a feeding machine, a discharging machine and a production line; a material taking manipulator is arranged on the production line, the material taking manipulator slides from a feeding machine to a discharging machine, and a shooting unit is arranged at the top of the material taking manipulator; a plurality of chip burn-in testers are arranged at intervals along the length direction of the side edge of the assembly line, and are uniformly distributed on two sides of the assembly line; the chip aging tester comprises a rack, wherein test units are arranged in the rack, a plurality of groups of test units are arranged in the rack, and the test units are arranged at intervals in the vertical direction; the test unit comprises a substrate, a placing table and a test seat, wherein the substrate is provided with a lifting cylinder for driving the placing table to move towards the test seat; the placing table at least comprises an inner table and an outer table, and a pushing component for pushing the tray on the inner table to the outer table is slidably arranged on the substrate. The invention has the advantage of improving the test efficiency.

Description

Chip aging tester and test line
Technical Field
The invention relates to the technical field of chip burn-in testing, in particular to a chip burn-in tester and a test wire.
Background
The IC chip (INTEGRATED CIRCUIT CHIP) is a chip formed by placing an integrated circuit formed by a large number of microelectronic components (transistors, resistors, capacitors, etc.) on a plastic substrate. Because the requirement for using the IC chip is high, the chip needs to be subjected to burn-in test before leaving the factory, so that the chip can be used under normal conditions and also can be used under severe environments (such as high temperature conditions), and after the chip is used for a period of time, the chip needs to be subjected to corresponding burn-in test so as to ensure the normal use of the chip.
The core test unit in the IC test is usually smaller in size, which results in smaller overall equipment space of the test unit, so that the conventional burn-in test equipment can only test one disc of chips when testing, and the number of chips which can be tested at a time is smaller, and the test efficiency is more general.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention aims to provide a chip burn-in tester and a test line, which have the advantage of improving the test efficiency.
The above object of the present invention is achieved by the following technical solutions:
In one aspect, the application discloses a chip burn-in tester,
The test device comprises a rack, wherein test units are arranged in the rack, a plurality of groups of test units are arranged in the rack, and the test units are arranged at intervals in the vertical direction;
The test unit comprises a substrate, a placing table arranged on the substrate and used for placing the tray, and a test seat used for testing the chip, wherein the substrate is provided with a lifting cylinder used for driving the placing table to move towards the test seat;
The placing table at least comprises an inner table and an outer table, and a pushing assembly for pushing the tray on the inner table to the outer table is slidably arranged on the substrate.
The invention is further provided with: the pushing assembly comprises a pushing rod arranged on one side of the inner platform, deviating from the outer platform, and a pushing cylinder for driving the pushing rod to move towards the inner platform, wherein the pushing rod is at the same height as the inner platform in the vertical direction, a guide column is arranged at one end, adjacent to the inner platform, of the base plate, and an opening for the pushing rod to pass through is formed in the top end of the guide column.
The invention is further provided with: the push rods are arranged at intervals along the length direction of the inner table, one ends of the push rods, far away from the inner table, are connected with connecting plates together, a plurality of bottom plates are connected onto the connecting plates, the bottom plates correspond to the push rods one by one, and the push air cylinders are connected with one of the bottom plates.
The invention is further provided with: the bottom plates are lower than the base plate in the vertical direction, pushing rails are arranged on one side face, facing the base plate, of each bottom plate, a plurality of pushing blocks are arranged on the base plate, and each pushing block is arranged on one pushing rail in a sliding mode.
The invention is further provided with: the inner platform and the outer platform are arranged at intervals, a plurality of lifting cylinders are arranged, and the lifting cylinders correspond to the inner platform and the outer platform one by one.
The invention is further provided with: the lifting cylinder is arranged on one side surface of the substrate, which is away from the placing table, the telescopic rods of the lifting cylinder are arranged in the vertical direction, each lifting cylinder is connected with a lifting plate on the telescopic rod of the lifting cylinder, the lifting plates are parallel to the placing table, a plurality of connecting rods are connected between the lifting plates and the placing table, a plurality of guide sleeves are arranged on the substrate, and each connecting rod penetrates through one guide sleeve.
The invention is further provided with: each lifting cylinder is connected with a unidirectional pilot valve.
The invention is further provided with: the bottom of the frame is provided with a plurality of independent pressure regulating valves, the independent pressure regulating valves are connected with an air inlet source together, and each independent pressure regulating valve is connected with a lifting cylinder.
In another aspect, the application discloses a chip burn-in test line,
The chip aging testing machine comprises the chip aging testing machine, a feeding machine, a discharging machine and a production line arranged between the feeding machine and the discharging machine;
The production line is provided with a material taking manipulator which slides from a feeding machine to a discharging machine, and the top of the material taking manipulator is provided with a shooting unit;
The chip burn-in tester is provided with a plurality of chip burn-in testers at intervals along the assembly line, and the plurality of chip burn-in testers are uniformly distributed on two sides of the assembly line.
In summary, the beneficial technical effects of the invention are as follows:
1. The aging tester can test multiple chips at a time, and the multiple test tables are independent and do not influence each other, so that the processing efficiency is greatly improved;
2. the lifting cylinder is connected with the unidirectional pilot valve, after the jacking action is finished, the unidirectional pilot valve is locked, so that the test unit is ensured not to move downwards slightly, and the stability during the test is improved.
Drawings
FIG. 1 is a schematic diagram of an overall structure of a chip burn-in test line according to an embodiment of the present application;
FIG. 2 is a schematic diagram of the overall structure of a chip burn-in tester according to an embodiment of the present application;
FIG. 3 is an overall block diagram of a test unit in an embodiment of the application;
FIG. 4 is an overall block diagram of another view of a test cell in an embodiment of the present application;
FIG. 5 is an enlarged view of portion A of FIG. 4;
Fig. 6 is a schematic view of the structure of the placement stage.
In the figure, 1, a rack; 11. an independent pressure regulating valve; 2. a test unit; 21. a substrate; 211. a guide post; 212. opening holes; 213. a pushing block; 214. a guide sleeve; 22. a placement table; 221. an inner stage; 2211. a socket; 222. an outer stage; 23. a test seat; 24. a lifting cylinder; 241. a unidirectional pilot valve; 3. a pushing assembly; 31. a push rod; 32. a pushing cylinder; 33. a connecting plate; 34. a bottom plate; 341. a push rail; 35. a lifting plate; 351. a connecting rod; 4. a feeding machine; 5. a blanking machine; 6. a pipeline; 7. a chip burn-in tester; 8. a material taking manipulator; 9. and a photographing unit.
Detailed Description
The invention is described in further detail below with reference to fig. 1-6.
The invention discloses a chip aging test line which comprises a feeding machine 4 and a discharging machine 5, wherein a production line 6 is arranged between the feeding machine 4 and the discharging machine 5, and the transportation direction of the production line 6 flows from the feeding machine 4 to the discharging machine 5. Chip burn-in testers 7 are placed on two sides of the assembly line 6, a plurality of chip burn-in testers 7 on each side are uniformly distributed along the length direction of the assembly line 6 at intervals, and the chip burn-in testers 7 on two sides are arranged in a one-to-one symmetry mode with respect to the assembly line 6. The production line 6 is provided with a material taking manipulator 8 in a sliding manner, a shooting unit 9 is arranged at the top of the material taking manipulator 8, and the material taking manipulator 8 moves under the drive of the production line 6. When testing operation is performed, the material taking manipulator 8 takes away a material tray provided with a test piece to be tested on the feeder 4, and moves to the chip aging tester 7 under the drive of the production line 6, the material tray is placed into the chip aging tester 7, and after testing is completed, the material taking manipulator 8 takes out the material tray in the chip aging tester 7 and conveys the material tray to the blanking machine 5. The loader 4, the unloader 5, and the reclaiming robot 8 in this embodiment are all conventionally arranged, and will not be described in detail here.
The chip aging tester 7 comprises a frame 1 with a hollow inside, wherein the frame 1 comprises a base, four upright posts arranged at four corners of the base, a supporting plate arranged on the upright posts, and a top cover arranged at the top end of the upright posts, and the supporting plate comprises a middle supporting plate positioned in the middle of the upright posts and a bottom supporting plate positioned at the bottom of the upright posts. The middle position backup pad divides frame 1 into upper and lower two-layer, and each in-layer of frame 1 all is provided with a set of test unit 2, and two sets of test unit 2 are located bottom support board and middle position backup pad respectively.
The test unit 2 comprises a substrate 21, the substrate 21 is horizontally placed, two lifting cylinders 24 are fixedly connected to the lower end face of the substrate 21, the two lifting cylinders 24 are respectively located at two ends of the substrate 21, and telescopic rods of the lifting cylinders 24 are downwards arranged along the vertical direction. The lower end of the telescopic rod of each lifting cylinder 24 is fixedly connected with a rectangular lifting plate 35, and the lifting plates 35 are arranged parallel to the base plate 21. Four connecting rods 351 are fixedly connected to four corners of the upper end surface of the lifting plate 35, and the connecting rods 351 penetrate the base plate 21 upwards in the vertical direction. Eight guide sleeves 214 are arranged on one side surface of the base plate 21 facing the lifting plates 35, the eight guide sleeves 214 correspond to a total of eight connecting rods 351 on the two lifting plates 35, each guide sleeve 214 is coaxial with one connecting rod 351, and each connecting rod 351 penetrates through one guide sleeve 214.
The top ends of the four connecting rods 351 of the lifting plate 35 adjacent to one side of the assembly line 6 are connected with an outer platform 222 together, the top ends of the four connecting rods 351 of the lifting plate 35 far away from one side of the assembly line 6 are connected with an inner platform 221 together, the inner platform 221 and the outer platform 222 are mutually independent and are arranged at intervals, a buffer platform is formed on one side of the outer platform 222 facing the assembly line 6, and the buffer platform extends towards the assembly line 6. The two lifting cylinders 24 drive the test pieces to be tested on the inner table 221 and the outer table 222 to lift respectively, so that uneven stress caused by mutual conduction of lifting force in the same layer is prevented. Two limiting air cylinders are arranged on one side edge of the outer table 222 facing the inner table 221, the two limiting air cylinders are respectively located on two sides of the outer table 222, and telescopic rods of the limiting air cylinders are arranged facing the outer table 222. The telescopic rod of the limiting cylinder is fixedly connected with a limiting clamping block, and the limiting clamping block is provided with a protruding part, so that the function of stabilizing the position of the material tray is achieved.
The inner table 221 and the outer table 222 together form a placing table 22 of the chip burn-in tester 7, a test seat 23 is arranged right above the placing table 22, a test component is arranged on the test seat 23 and used for testing a test piece to be tested, when the test operation is carried out, the test piece to be tested is placed on the placing table 22, and the lifting cylinder 24 drives the placing table 22 to lift, so that the test piece to be tested in the placing table 22 is contacted with the test component in the test seat 23, and thus the burn-in test is completed.
Each lifting cylinder 24 is connected with a unidirectional pilot valve 241, and after the jacking action is finished, the unidirectional pilot valve 241 is locked, so that the test unit 2 is ensured not to move downwards slightly, and the stability during the test is improved.
The below of base plate 21 is provided with promotes cylinder 32, promotes cylinder 32 and sets up towards assembly line 6, and fixed connection drive plate is gone up to the telescopic link of promoting cylinder 32, is connected with bottom plate 34 on the drive plate, and bottom plate 34 is less than base plate 21 in the vertical direction, and bottom plate 34 extends along keeping away from assembly line 6 direction, and the one end that the drive plate was kept away from to bottom plate 34 is connected with connecting plate 33, and connecting plate 33 sets up along vertical direction. The top of connecting plate 33 fixedly connected with two push rods 31, push rods 31 along horizontal direction towards interior platform 221 setting, push rods 31 in vertical direction with interior platform 221 the same height, interior platform 221 has seted up socket 2211 towards connecting plate 33's one side. One end of the base plate 21 adjacent to the inner stage 221 is provided with a guide post 211, and an opening 212 for the push rod 31 to pass through is formed at the top end of the guide post 211. The pushing rod 31 and the pushing cylinder 32 constitute a pushing assembly 3 for pushing the tray on the inner stage 221 to the outer stage 222, and the pushing rod 31 is inserted into the insertion hole 2211 through the opening 212 under the driving of the pushing cylinder 32 and pushes the tray on the inner stage 221.
The bottom plate 34 is provided with a pushing rail 341 on a side surface facing the substrate 21, a pushing block 213 is provided on a lower end surface of the substrate 21, and each pushing block 213 is slidably disposed on one pushing rail 341.
Both sides edge of base plate 21 all is connected with the sliding plate, and the length direction of sliding plate is unanimous with the length direction of base plate 21, is provided with the slip rail on the lower terminal surface of sliding plate, and the slip rail sets up along sliding plate length direction, and the one end fixedly connected with of slip rail moves the slider. The upper end face of the supporting plate is provided with guide rails which are parallel to and in one-to-one correspondence with the sliding rails, the movable sliding blocks are arranged on the guide rails in a sliding mode, one end, away from the movable sliding blocks, of each guide rail is fixedly connected with a fixed sliding block, and the sliding rails are in sliding connection with the fixed sliding blocks. In this embodiment, the sliding plate is provided with upper and lower two-layer, and two-layer sliding plate is parallel to each other, all is provided with the slip rail and decides the slider on the both sides face of the sliding plate that is located the middle part for the sliding plate that is located the middle part is sliding connection with backup pad, the sliding plate that is located the top, thereby has prolonged the outside extension distance of test unit 2, has further increased the maintenance space, has improved the convenience of maintenance. Limiting baffles are arranged at two ends of the sliding rail, the limiting baffles are arranged in the vertical direction, and the limiting baffles at one end of the limiting baffles are detachably arranged.
A plurality of limiting stand columns are arranged on the frame 1, and the limiting stand columns are distributed on two sides of the sliding rail and are arranged adjacent to the fixed sliding blocks. When the movable slide block slides along the guide rail, the limiting upright post plays a role in limiting the movable slide block, so that the situation that the movable slide block collides with the fixed slide block is avoided.
One end of the base plate 21 is connected with a pull handle, the pull handle is integrally rectangular, one end of the pull handle is provided with a holding opening, and the pull plate extends outwards along the length direction of the sliding rail. The base plate 21 is provided with a rectangular restraint frame at one end of the pull handle, an opening is arranged on the restraint frame, and the pull plate extends out of the opening.
One end of the base plate 21, which is away from the pull handle, is provided with positioning holes, the positioning holes are positioned on the lower end face of the base plate 21, and the number of the positioning holes on each base plate 21 is at least two. The machine frame 1 is provided with a positioning cylinder, a telescopic rod of the positioning cylinder is upwards arranged along the vertical direction, the top end of the telescopic rod of the positioning cylinder is fixedly connected with a positioning guide sleeve, and the positioning guide sleeves are in one-to-one correspondence with the positioning holes. The whole positioning guide sleeve is in a round table shape, namely one end of the positioning guide sleeve, which faces the testing unit 2, is in a conical shape, and the diameter length of one end, which faces the testing unit 2, is smaller than that of one end, which is far away from the testing unit 2. The positioning guide sleeve is inserted into the positioning hole under the drive of the positioning cylinder, and the positioning guide sleeve is positioned accurately while limiting the test unit 2, so that the repeated positioning accuracy is improved.
The middle part of the base of frame 1 is provided with a plurality of independent air-vent valves 11, and each independent air-vent valve 11 is connected with a lift cylinder 24 for during test operation, can adjust the required jacking pressure of different products according to the actual verification condition, prevent that the product excessive pressure from influencing the test result.
The implementation principle of the embodiment is as follows: when the ageing test operation is carried out, the material taking manipulator 8 takes away the material tray provided with the test piece to be tested on the feeder 4, and moves to the chip ageing tester 7 under the drive of the production line 6, the material tray is placed into the chip ageing tester 7, and after the test is completed, the material taking manipulator 8 takes out the material tray in the chip ageing tester 7 and conveys the material tray to the blanking machine 5. According to the application, one aging tester can test multiple chips at a time, and multiple test stations are independent and do not influence each other, so that the processing efficiency is greatly improved.
The embodiments of the present invention are all preferred embodiments of the present invention, and are not intended to limit the scope of the present invention in this way, therefore: all equivalent changes in structure, shape and principle of the invention should be covered in the scope of protection of the invention.

Claims (5)

1. The chip aging tester comprises a rack (1), and is characterized in that: the test device comprises a rack (1), wherein test units (2) are arranged in the rack (1), a plurality of groups of test units (2) are arranged in the rack (1), and the test units (2) are arranged at intervals in the vertical direction;
The test unit (2) comprises a base plate (21), a placing table (22) arranged on the base plate (21) and used for placing a tray, and a test seat (23) used for testing chips, wherein a lifting cylinder (24) used for driving the placing table (22) to move towards the test seat (23) is arranged on the base plate (21);
The placing table (22) at least comprises an inner table (221) and an outer table (222), and a pushing component (3) for pushing a tray on the inner table (221) to the outer table (222) is arranged on the base plate (21) in a sliding manner;
The pushing assembly (3) comprises a pushing rod (31) arranged at one side of the inner table (221) deviating from the outer table (222) and a pushing cylinder (32) for driving the pushing rod (31) to move towards the inner table (221), the pushing rod (31) is at the same height as the inner table (221) in the vertical direction, a socket (2211) for inserting the pushing rod (31) is formed in the inner table (221), a guide column (211) is arranged at one end, adjacent to the inner table (221), of the base plate (21), and an opening (212) for the pushing rod (31) to penetrate is formed in the top end of the guide column (211);
The pushing rods (31) are arranged at intervals along the length direction of the inner table (221), one ends, far away from the inner table (221), of the pushing rods (31) are connected with connecting plates (33) together, the connecting plates (33) are connected with a plurality of bottom plates (34), the bottom plates (34) correspond to the pushing rods (31) one by one, and the pushing air cylinders (32) are connected with one bottom plate (34) of the pushing cylinders;
The bottom plates (34) are lower than the base plates (21) in the vertical direction, a pushing rail (341) is arranged on one side surface, facing the base plates (21), of each bottom plate (34), a plurality of pushing blocks (213) are arranged on the base plates (21), and each pushing block (213) is slidably arranged on one pushing rail (341);
The inner table (221) and the outer table (222) are arranged at intervals, a plurality of lifting cylinders (24) are arranged, and the lifting cylinders (24) are in one-to-one correspondence with the inner table (221) and the outer table (222).
2. The die burn-in machine of claim 1, wherein: lifting cylinder (24) set up on one side of base plate (21) deviating from and placing platform (22), the telescopic link of lifting cylinder (24) sets up along vertical direction, each all be connected with lifter plate (35) on the telescopic link of lifting cylinder (24), lifter plate (35) are on a parallel with and place platform (22), be connected with many connecting rods (351) between lifter plate (35) and placing platform (22), be provided with a plurality of uide bushing (214) on base plate (21), each connecting rod (351) all runs through a uide bushing (214) setting.
3. The die burn-in machine of claim 2 wherein: each lifting cylinder (24) is connected with a unidirectional pilot valve (241).
4. A die burn-in machine as claimed in claim 3, wherein: the bottom of the frame (1) is provided with a plurality of independent pressure regulating valves (11), the independent pressure regulating valves (11) are connected with an air inlet source together, and each independent pressure regulating valve (11) is connected with a lifting cylinder (24).
5. A chip burn-in test line is characterized in that: -a chip burn-in tester (7) comprising any one of claims 1-4, further comprising a feeder (4), a unloader (5), a line (6) arranged between the feeder (4) and the unloader (5);
The production line (6) is provided with a material taking manipulator (8), the material taking manipulator (8) slides from the feeding machine (4) towards the discharging machine (5), and the top of the material taking manipulator (8) is provided with a shooting unit (9);
The chip aging testing machine (7) is provided with a plurality of chip aging testing machines along the assembly line (6) at intervals, and the plurality of chip aging testing machines (7) are uniformly distributed on two sides of the assembly line (6).
CN202311389796.XA 2023-10-25 2023-10-25 Chip aging tester and test line Active CN117233579B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311389796.XA CN117233579B (en) 2023-10-25 2023-10-25 Chip aging tester and test line

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Application Number Priority Date Filing Date Title
CN202311389796.XA CN117233579B (en) 2023-10-25 2023-10-25 Chip aging tester and test line

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CN117233579B true CN117233579B (en) 2024-05-24

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110508500A (en) * 2019-09-20 2019-11-29 深圳市标王工业设备有限公司 Multistation chip testing sorting machine
CN112520413A (en) * 2020-12-11 2021-03-19 苏州乾鸣自动化科技有限公司 Full-automatic aging test loading and unloading system and method
CN212821225U (en) * 2020-08-10 2021-03-30 苏州欣华锐电子有限公司 Chip arrangement device for chip aging test
CN112964977A (en) * 2020-12-31 2021-06-15 苏州乾鸣自动化科技有限公司 Full-automatic chip aging testing device
CN215997609U (en) * 2021-08-24 2022-03-11 苏州乾鸣半导体设备有限公司 High-efficiency chip testing equipment
CN114690024A (en) * 2022-05-31 2022-07-01 广东东博自动化设备有限公司 Full-automatic chip testing machine
CN115480147A (en) * 2022-07-17 2022-12-16 珠海沛烨智能设备有限公司 Multistation chip test machine

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110508500A (en) * 2019-09-20 2019-11-29 深圳市标王工业设备有限公司 Multistation chip testing sorting machine
CN212821225U (en) * 2020-08-10 2021-03-30 苏州欣华锐电子有限公司 Chip arrangement device for chip aging test
CN112520413A (en) * 2020-12-11 2021-03-19 苏州乾鸣自动化科技有限公司 Full-automatic aging test loading and unloading system and method
CN112964977A (en) * 2020-12-31 2021-06-15 苏州乾鸣自动化科技有限公司 Full-automatic chip aging testing device
CN215997609U (en) * 2021-08-24 2022-03-11 苏州乾鸣半导体设备有限公司 High-efficiency chip testing equipment
CN114690024A (en) * 2022-05-31 2022-07-01 广东东博自动化设备有限公司 Full-automatic chip testing machine
CN115480147A (en) * 2022-07-17 2022-12-16 珠海沛烨智能设备有限公司 Multistation chip test machine

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