CN117233098A - Ultraviolet-infrared wide-spectrum ellipsometry measuring device and optical path debugging method thereof - Google Patents

Abstract

The application relates to an ultraviolet-infrared broad spectrum ellipsometry device and a light path debugging method thereof, wherein the device comprises a polarized arm module and a polarized arm module which are connected through a light path; the polarizing arm module is used for emitting modulated broad spectrum detection light to the tested sample piece; the polarization-maintaining arm module comprises a light splitting unit, an ultraviolet spectrometer and an infrared spectrometer, wherein the light splitting unit is used for splitting wide-spectrum detection light reflected by a sample to be detected, and sending ultraviolet light obtained by splitting into visible light to the ultraviolet spectrometer and infrared light obtained by splitting into infrared spectrometer. The application can effectively collect the data covering ultraviolet light-visible light-infrared light broadband, can measure film samples with various materials and shapes, and has wide detection sample range, higher accuracy and stronger applicability.

Description

Ultraviolet-infrared wide-spectrum ellipsometry measuring device and optical path debugging method thereof

Technical Field

The application relates to the technical field of ellipsometry, in particular to an ultraviolet-infrared wide spectrum ellipsometry device and an optical path debugging method thereof.

Background

Ellipsometry is a measurement technology based on optical scattering, and is a general optical measurement technical means for three-dimensional morphology, optical constants and other parameters of a nano structure. The basic principle of ellipsometry is that special ellipsometric light is projected to the surface of a structure to be measured through a polarizer, and the information of a sample to be measured is extracted from the polarized light by measuring the change of the polarization state (such as the amplitude ratio and the phase difference) of the polarized light before and after reflection. However, the current ellipsometer has a smaller detection light band, which limits the type of the object to be detected, and the detection accuracy thereof needs to be improved.

In order to improve the detection precision and realize the detection of the whole wave band, the patent CN103471992B realizes the high-precision measurement of the spectrum ellipsometer in the whole spectral range from ultraviolet to near infrared by carrying out the smooth processing on the light intensity of the xenon lamp light source. The specific operation mode is that the size of the diaphragm is set to enable light spots in the ultraviolet band to penetrate through the diaphragm and light spots in the near infrared band to be blocked, so that the light intensity of light beams in the near infrared band to be seen is reduced, and smoothness is realized; and respectively carrying out beam splitting filtering from strong to weak on the light rays in the light wave band range from strong to weak in the light rays of the xenon lamp, and then combining the light rays, so that the light intensity curve of the light rays in the whole wave band range is smooth. The idea of the scheme is that the light from the xenon lamp source is smoothed in the polarizer stage, so that accurate detection data in the whole wave band range is realized, and the mode is complex. Therefore, there is a need to develop a simpler scheme that can achieve broad spectrum ellipsometry.

Disclosure of Invention

Based on the expression, the application provides an ultraviolet-infrared wide spectrum ellipsometry device and an optical path debugging method thereof, which are used for solving the problems of limited types of objects to be detected and insufficient detection precision.

The technical scheme for solving the technical problems is as follows: an ultraviolet-infrared wide spectrum ellipsometry device comprises a polarization arm module and a polarization detection arm module which are connected through an optical path,

the polarizing arm module is used for emitting modulated broad spectrum detection light to the tested sample piece;

the polarization-maintaining arm module comprises a light splitting unit, an ultraviolet spectrometer and an infrared spectrometer, wherein the light splitting unit is used for splitting wide-spectrum detection light reflected by a sample to be detected, and sending ultraviolet light obtained by splitting into visible light to the ultraviolet spectrometer and infrared light obtained by splitting into infrared spectrometer.

Compared with the prior art, the technical scheme of the application has the following beneficial technical effects:

the ultraviolet-infrared wide-spectrum ellipsometry device provided by the application can effectively collect data covering ultraviolet light-visible light-infrared light broadband, can measure film samples with various materials and morphologies, and has the advantages of wide detection sample range, higher accuracy and stronger applicability.

On the basis of the technical scheme, the application can be improved as follows.

Further, the wavelength band of the detection light comprises 193nm-2500nm.

After the technical scheme is adopted, the beneficial effects are as follows: the device of the application collects detection data in the sub-band, can separately process the detection light rays in different bands, and improves the detection precision.

Further, the polarizing arm module comprises a xenon lamp light source, a pinhole diaphragm, a filter wheel, a collimating mirror, a first polaroid, a first wave plate and a polarizing arm diaphragm which are sequentially connected through an optical path;

the xenon lamp light source is used for outputting detection light rays with a wide spectrum;

the pinhole diaphragm is used for filtering the detection light to control the propagation direction, intensity and shape of the detection light;

a plurality of rotatable and replaceable optical filters are arranged in the filter wheel, and when the light path is conducted, detection light penetrates through one optical filter in the filter wheel and the optical filter is used for controlling the transmittance of the detection light;

the collimating mirror is used for converting the detection light into parallel light;

the first polaroid is used for modulating the polarization angle of the detection light;

the first wave plate is used for modulating the phase angle of the detection light;

and the polarizing arm diaphragm is used for filtering the modulated detection light.

After the technical scheme is adopted, the beneficial effects are as follows: the polarizing arm module filters original detection light provided by the light source through the pinhole diaphragm, the optical filter adjusts the optical density, and the collimating lens collimates the original detection light, and then the original detection light is subjected to polarization angle modulation and phase angle adjustment to prevent the interference between return light and output detection light caused by back propagation of light.

Further, the filter wheel comprises a driving motor, a rotary table, a position sensor and a plurality of optical filters, the optical filters have different transmittance, and the optical filters are arranged in the circumferential direction of the rotary table in a circumferential array; the driving motor is in transmission connection with the turntable and is used for controlling the rotation of the turntable; the position sensor is closely adjacent to the periphery of the turntable and is in signal connection with the driving motor and is used for measuring the rotation angle of the turntable and controlling the driving motor to operate.

After the technical scheme is adopted, the beneficial effects are as follows: the driving motor drives the filter wheel to rotate, so that the filter with different transmittance can be replaced; the position sensor feeds back the rotation position of the filter wheel, so that the drive motor can conveniently control the rotation angle of the filter wheel; the filter wheel is provided with the plurality of rotatable and replaceable optical filters so as to adjust the optical density of the detection light rays, so that the device is suitable for detection requirements of different types of detected sample pieces, the applicability of the measuring device is enhanced, and the device is applicable to more types of detected sample pieces.

Further, the polarizing arm module further comprises a reflecting mirror and a reflecting mirror adjusting device, wherein the reflecting mirror is arranged on the reflecting mirror adjusting device, the reflecting mirror adjusting device is used for adjusting the angle of the reflecting mirror, and the reflecting mirror is arranged between the pinhole diaphragm and the filter wheel and used for reflecting light output by the pinhole diaphragm to the light input end of the filter wheel through a reflecting surface.

After the technical scheme is adopted, the beneficial effects are as follows: the reflector adjusting device drives the reflector to conduct angle adjustment, and the length dimension between the xenon lamp light source and the filter wheel can be shortened due to the arrangement of the reflector, so that miniaturization of the polarization-detecting arm module is facilitated.

Further, the light splitting unit comprises an ultraviolet light receiving module and an infrared light receiving module which are connected through a light path, wherein the ultraviolet light receiving module comprises a spectroscope and an ultraviolet converging lens which are sequentially arranged along the light path, and further comprises a spectroscope angle adjusting mechanism which is in transmission connection with the spectroscope; the infrared light receiving module comprises an infrared converging lens and an infrared optical fiber which are sequentially arranged along a light path, wherein the infrared optical fiber is arranged between the light output end of the infrared converging lens and the infrared spectrometer, and the infrared light receiving module further comprises an infrared light receiving angle adjusting mechanism which is in transmission connection with the infrared optical fiber;

the spectroscope is used for splitting the input detection light into transmission light and reflection light, wherein the transmission light comprises ultraviolet light and visible light, and the reflection light comprises infrared light;

the spectroscope angle adjusting mechanism is used for adjusting the angle of the spectroscope;

the ultraviolet converging lens is used for receiving and converging the ultraviolet light and the visible light split by the spectroscope;

the infrared converging lens is used for receiving and converging the infrared light split by the spectroscope;

the infrared optical fiber is used for transmitting the converged infrared light to the input end of the infrared spectrometer;

the infrared light receiving angle adjusting mechanism is used for adjusting the angle of the infrared optical fiber.

After the technical scheme is adopted, the beneficial effects are as follows: the setting of spectroscope can divide the beam of light according to the wave band for follow-up equipment carries out the separation to the light of detecting of different wave bands and handles, thereby promotes the detection precision, makes measuring device be suitable for more types of measured sample piece, promotes device's suitability.

Further, the polarization-maintaining arm module also comprises a polarization-maintaining arm diaphragm, a second wave plate and a second polaroid which are sequentially arranged at the front end of the light splitting unit along the light path,

the polarization-detecting arm diaphragm is used for filtering the detection light reflected by the detected sample;

the second wave plate is used for modulating the phase angle of the detection light, and the phase angle modulation amplitude of the second wave plate is the same as that of the first wave plate and the phase angle modulation amplitude of the second wave plate is opposite to that of the first wave plate;

the second polaroid is used for modulating the polarization angle of the detection light, and the polarization angle modulation amplitude of the second polaroid is the same as that of the first polaroid and the direction is opposite.

After the technical scheme is adopted, the beneficial effects are as follows: the detection light reflected by the detected sample piece enters the diaphragm of the polarization-detecting arm to be filtered so as to limit the propagation direction, propagation intensity and propagation shape of the detection light; the second wave plate and the second polaroid demodulate the phase angle and the polarization angle of the detection light, so that the subsequent processing of the detection light is facilitated, and the demodulated detection light is compared with the detection light before modulation, so that a more accurate detection result is obtained.

Further, the polarizing arm module further comprises a shading module, the shading module is arranged at the light input end of the infrared optical fiber, and the shading module can be switched between a shading state and a light transmission state.

After the technical scheme is adopted, the beneficial effects are as follows: through the state switching of shading module, can all gather the dark noise of infrared spectrum at first when gathering infrared data at every turn, effectively promote measurement accuracy and stability.

Further, the shading module comprises a shading baffle plate and an electromagnet, the shading baffle plate is fixedly connected with the armature end of the electromagnet, a light transmission hole through which detection light can pass is formed in the shading baffle plate, and the radial size of the light transmission hole is matched with the radial size of the infrared optical fiber;

in the power-off state of the electromagnet, the detection light passes through the light hole to reach the infrared spectrometer; in the power-on state of the electromagnet, the shading baffle sheet deflects towards the iron core end of the electromagnet so as to cut off the light path of the detection light reaching the infrared spectrometer.

After the technical scheme is adopted, the beneficial effects are as follows: the coil of the electromagnet is powered on or powered off, so that the state of attraction/disconnection between the armature of the electromagnet and the iron core is switched, and the shading baffle sheet is driven to synchronously displace so as to conduct/cut off the light path of infrared rays.

As a second aspect of the present application, based on the foregoing apparatus, there is further provided a method for debugging an optical path of an ultraviolet to infrared broad spectrum ellipsometry apparatus, the method comprising:

s1, adjusting the angle of a reflecting mirror of a polarizing arm to enable detection light rays emitted by a xenon lamp light source to vertically enter a collimating mirror of the polarizing arm, and adjusting the integral angle of the polarizing arm to enable the detection light rays emitted by a tested sample piece to reach the center of a diaphragm of the polarizing arm;

s2, a light splitting module is not installed, and the angle of the polarization-detecting arm is adjusted, so that the detection light passes through the light splitting module and directly reaches the ultraviolet spectrometer; fine tuning the angle of the offset arm until the energy value of the ultraviolet spectrometer reaches the maximum;

s3, installing a beam splitting module, and adjusting the angle of the beam splitter until the energy value of the ultraviolet spectrometer reaches the maximum; adjusting the focal length of the ultraviolet converging lens until the energy value of the ultraviolet spectrometer reaches the maximum; adjusting the angle of the infrared optical fiber until the energy value of the infrared spectrometer reaches the maximum; and respectively fine-tuning the focal length of the ultraviolet converging lens and the focal length of the infrared converging lens until the energy value of the ultraviolet spectrometer and the energy value of the infrared spectrometer reach the maximum.

Compared with the prior art, the technical scheme of the application has the following beneficial technical effects: the optical path debugging method based on the measuring device can rapidly and accurately complete optical path debugging, and achieves high spectrum balance of ultraviolet band and infrared band, for example, 50:50.

Drawings

FIG. 1 is a schematic diagram of the overall structure of an ultraviolet-to-infrared broad spectrum ellipsometry apparatus according to an embodiment of the present application;

fig. 2 is a schematic diagram of a light source structure of a polarizing arm module according to an embodiment of the present application;

fig. 3 is a schematic diagram of a filter wheel structure of a polarizer arm module according to an embodiment of the present application;

fig. 4 is a schematic structural diagram of an ultraviolet light receiving module of a light splitting unit according to an embodiment of the present application;

fig. 5 is a schematic structural diagram of an infrared receiving module of a light splitting unit according to an embodiment of the present application;

fig. 6 is a schematic view of a light shielding module structure according to an embodiment of the present application;

fig. 7 is a flowchart of a method for debugging an optical path of an ultraviolet-to-infrared broad spectrum ellipsometry device according to an embodiment of the present application.

In the drawings, the list of components represented by the various numbers is as follows:

101. the device comprises a polarizing arm module, 102, a xenon lamp light source, 103, a reflector adjusting device, 104, a turntable, 105, a filter wheel, 106, a collimating mirror, 107, a first polaroid, 108, a first wave plate, 109, a reflector, 110, a pinhole diaphragm, 111, an optical filter, 112, a position sensor, 113, a driving motor, 114, a polarizing arm diaphragm, 201, a polarization detection arm module, 202, a polarization detection arm diaphragm, 203, a second wave plate, 204, a second polaroid, 205, an ultraviolet receiving module, 206, an infrared receiving module, 207, an infrared optical fiber, 208, an infrared spectrometer, 209, a shading module, 210, an ultraviolet spectrometer, 211, a spectroscope angle adjusting mechanism, 212, a spectroscope, 213, an ultraviolet converging lens, 214, a spectroscope reflecting surface, 215, an infrared converging lens, 216, an infrared receiving angle adjusting mechanism, 217, an electromagnet, 218, a shading baffle, 301 and a sample to be measured.

Detailed Description

In order that the application may be readily understood, a more complete description of the application will be rendered by reference to the appended drawings. Embodiments of the application are illustrated in the accompanying drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

It will be appreciated that spatially relative terms such as "under … …," "under … …," "below," "under … …," "over … …," "above," and the like may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use and operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements or features described as "under" or "beneath" other elements would then be oriented "on" the other elements or features. Thus, the exemplary terms "under … …" and "under … …" may include both an upper and a lower orientation. Furthermore, the device may also include an additional orientation (e.g., rotated 90 degrees or other orientations) and the spatial descriptors used herein interpreted accordingly.

It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or be connected to the other element through intervening elements. In the following embodiments, "connected" is understood to mean "electrically connected", "communicatively connected", and the like, if the connected circuits, modules, units, and the like have electrical or data transferred therebetween.

As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," and/or the like, specify the presence of stated features, integers, steps, operations, elements, components, or groups thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or groups thereof.

FIG. 1 is a schematic diagram of the overall structure of an ultraviolet-to-infrared broad spectrum ellipsometry apparatus according to an embodiment of the present application. As shown in fig. 1, the present embodiment provides an ultraviolet-to-infrared broad spectrum ellipsometry apparatus, which includes a polarizing arm module 101 and a polarization analyzer module 201 connected by an optical path, wherein:

the polarizing arm module 101 is configured to emit modulated broad spectrum detection light to a sample to be measured;

the polarization-detecting arm module 201 includes a light splitting unit, an ultraviolet spectrometer 210 and an infrared spectrometer 208, where the light splitting unit is configured to split a broad spectrum detection light reflected by a sample to be detected, and send ultraviolet light to visible light obtained by splitting into the ultraviolet spectrometer 210, and send infrared light obtained by splitting into the infrared spectrometer 208.

It can be appreciated that the ultraviolet-to-infrared wide spectrum ellipsometry device provided by the application can effectively collect detection light data covering ultraviolet light-visible light-infrared wide spectrum, can measure film samples with various materials and morphologies, and has the advantages of wide detection sample range, higher accuracy and stronger applicability.

In one embodiment, the wavelength band of the detection light includes 193nm to 2500nm, which covers the ultraviolet light-visible light-infrared light band.

The device of the application collects detection data in sub-bands, can separately process detection light rays in different bands, can achieve high spectrum balance of ultraviolet band and infrared band, and improves detection precision.

In one embodiment, as shown in fig. 1 to 3, the polarizing arm module 101 includes a xenon lamp light source 102, a pinhole diaphragm 110, a filter wheel 105, a collimator lens 106, a first polarizer 107, a first wave plate 108, and a polarizing arm diaphragm 114, which are sequentially connected through an optical path;

the xenon lamp light source 102 is configured to output a broad spectrum of detection light;

the pinhole diaphragm 110 may be provided with a diaphragm aperture of 0.5mm, and is used for filtering the detection light to control the propagation direction, intensity and shape of the detection light;

a plurality of rotatable and replaceable optical filters 111 are arranged in the filter wheel 105, when the optical path is conducted, the detection light penetrates through one optical filter 111 in the filter wheel 105, and the optical filter 111 is used for controlling the transmittance of the detection light;

the back focal length of the collimating mirror 106 is 90mm, and the collimating mirror 106 is used for modulating the introduced divergent light into parallel light, so that the detection light is converted into the parallel light;

the first polarizer 107 is configured to modulate a polarization angle of the detection light;

the first wave plate 108 is used for modulating the phase angle of the detection light;

the polarizing arm diaphragm 114 is used for filtering the modulated detection light.

It can be understood that the polarizer arm module 101 filters the original detection light provided by the light source through the pinhole aperture 110, the optical filter 111 adjusts the optical density, and the collimator lens 106 collimates the original detection light, and then the polarization angle modulation and the phase angle adjustment are performed to prevent the light from back propagation to cause interference between the return light and the output detection light.

In one embodiment, as shown in fig. 3, the filter wheel 105 includes a driving motor 113, a turntable 104, a position sensor 112, and a plurality of optical filters 111, wherein the optical filters 111 have different transmittance, so that the optical density (OD value) passing through each optical filter 111 is also different, and the plurality of optical filters 111 are arranged in a circumferential array on the turntable 104; for example, the turntable 104 is made into a structure of a rotating wheel, and is divided into 6 gears from 0 to 5, wherein the 0 th gear is not provided with a filter 111,1, a filter 111,2 with an OD value of 0.1, a filter 111,3 with an OD value of 0.3, a filter 111 with an OD value of 0.6, a filter 111,5 with an OD value of 1, and a filter 111 with an OD value of 1.3. By selecting different filters 111, the energy of the light beam can be adjusted to adapt to the sample to be measured with different reflectivities. The driving motor 113 is in transmission connection with the turntable 104 and is used for controlling the rotation of the turntable 104; the position sensor 112 is closely adjacent to the periphery of the turntable 104 and is in signal connection with the driving motor 113 for measuring the rotation angle of the turntable 104 and controlling the driving motor 113 to operate.

It will be appreciated that the drive motor 113 drives the filter wheel 105 to rotate, thereby replacing the filters 111 of different transmittance; the position sensor 112 can adopt a photoelectric sensor or a magneto-electric sensor, and the position sensor 112 feeds back the rotation position of the filter wheel 105, so that the driving motor 113 can conveniently control the rotation angle of the filter wheel 105; by arranging a plurality of rotatable and replaceable optical filters 111 on the filter wheel 105, the optical density of the detection light is adjusted to adapt to the detection requirements of different types of detected samples, the applicability of the measuring device is enhanced, and the measuring device can be suitable for more types of detected samples.

In one embodiment, as shown in fig. 2, the polarizing arm module 101 further includes a mirror 109 and a mirror adjustment device 103, where the mirror 109 is fixedly disposed (e.g., adhered) on the mirror adjustment device 103, and the mirror adjustment device 103 is used for adjusting an angle of the mirror 109, and the mirror 109 is disposed between the pinhole diaphragm 110 and the filter wheel 105, and is used for reflecting the light output by the pinhole diaphragm 110 to the light input end of the filter wheel 105 through a reflecting surface of the mirror 109.

It can be understood that the mirror adjusting device 103 drives the mirror 109 to perform angle adjustment, and the arrangement of the mirror 109 can shorten the length between the xenon lamp light source 102 and the filter wheel 105, which is beneficial to miniaturization of the polarization beam module 201.

In one embodiment, as shown in fig. 4 and fig. 5, the light splitting unit includes an ultraviolet light receiving module 205 and an infrared light receiving module 206 connected by an optical path, as shown in fig. 4, the ultraviolet light receiving module 205 includes a beam splitter 212 and an ultraviolet converging lens 213 sequentially disposed along the optical path, and further includes a beam splitter angle adjusting mechanism 211 in transmission connection with the beam splitter 212; as shown in fig. 5, the infrared light receiving module 206 includes an infrared converging lens 215 and an infrared optical fiber 207 sequentially arranged along a light path, the infrared optical fiber 207 is arranged between a light output end of the infrared converging lens 215 and the infrared spectrometer 208, and further includes an infrared light receiving angle adjusting mechanism 216, and the infrared light receiving angle adjusting mechanism 216 is in transmission connection with the infrared optical fiber 207;

the beam splitter 212 is configured to split an input detection light into a transmission light and a reflection light, where the transmission light includes ultraviolet light and visible light, and the reflection light includes infrared light; the transmittance and reflectance of the beam splitter 212 can be adjusted by adjusting the antireflection film/reflection film on the beam splitter 212, for example, setting the reflectance and transmittance ratio to 80% to 20%;

the spectroscope angle adjusting mechanism 211 is used for adjusting the angle of the spectroscope 212; for example, the spectroscope 212 is adhered to the spectroscope angle adjusting mechanism 211, and the pitching angle of the spectroscope 212 can be adjusted by the spectroscope angle adjusting mechanism 211;

the ultraviolet converging lens 213 is configured to receive and converge ultraviolet light and visible light split by the beam splitter 212 (transmitted by the transmission surface of the beam splitter 212), and converge parallel ultraviolet light beams into converging light spots, and enter the ultraviolet spectrometer 210;

the infrared converging lens 215 is configured to receive and converge the infrared light split by the beam splitter 212 (reflected by the beam splitter reflecting surface 214), and converge the parallel infrared light beams into a converging light spot, and enter the infrared optical fiber 207;

the infrared optical fiber 207 is configured to transmit the collected infrared spots to an input end of the infrared spectrometer 208;

the infrared light receiving angle adjusting mechanism 216 is configured to adjust an angle of the infrared optical fiber 207. For example, the optical fiber is connected to the infrared light receiving angle adjusting mechanism 216 through threads, and the pitching angle of the optical fiber can be adjusted through the infrared light receiving angle adjusting mechanism 216.

It can be appreciated that the beam splitter 212 can split the detection light according to the wavelength bands, so that the subsequent device can separate the detection light in different wavelength bands, thereby improving the detection precision, adapting the measuring device to more types of samples to be measured, and improving the applicability of the device.

In one embodiment, as shown in the overall structure diagram of fig. 1, the polarization beam splitter module 201 further includes a polarization beam splitter diaphragm 202, a second wave plate 203, and a second polarizer 204 sequentially disposed at the front end of the light splitting unit along the light path, where:

the offset arm diaphragm 202 is configured to filter the detection light reflected by the sample to be detected;

the second wave plate 203 is configured to modulate the phase angle of the detected light, and the second wave plate 203 modulates the phase angle of the detected light with the same amplitude and in opposite directions as the phase angle of the first wave plate 108, i.e. demodulates the phase angle modulated by the first wave plate 108;

the second polarizer 204 is configured to modulate the polarization angle of the detection light, and the second polarizer 204 has the same polarization angle modulation amplitude and opposite direction as the first polarizer 107, that is, demodulates the polarization angle modulated by the first polarizer 107.

It can be understood that the detection light reflected by the sample 301 enters the analyzer diaphragm 202 for filtering, so as to limit the propagation direction, propagation intensity and propagation shape of the detection light; the second wave plate 203 and the second polarizer 204 demodulate the phase angle and the polarization angle of the detected light, which is beneficial to the subsequent processing of the detected light, and the demodulated detected light is compared with the detected light before modulation, so as to obtain a more accurate detection result.

In one embodiment, as shown in fig. 1, the polarizer arm module 101 further includes a light shielding module 209, where the light shielding module 209 is disposed at the light input end of the infrared optical fiber 207, and the light shielding module 209 is switchable between a light shielding state and a light transmitting state.

It can be appreciated that, through the state switching of the shading module 209, dark noise of an infrared spectrum can be collected first when infrared data is collected each time, so that measurement accuracy and stability are effectively improved.

In one embodiment, as shown in fig. 6, the light shielding module 209 includes a light shielding baffle 218 and an electromagnet 217, where the light shielding baffle 218 is fixedly connected to an armature end of the electromagnet 217, for example, the light shielding baffle 218 is fixed on the electromagnet 217 through a threaded connection, and a light hole through which the detection light passes is formed in the light shielding baffle 218, and a radial dimension of the light hole is matched with a radial dimension of the infrared optical fiber 207;

in the power-off state of the electromagnet 217, the light shielding plate 218 is at a zero position, and at this time, the optical path of the infrared light receiving module 206 can normally pass through, and the detection light passes through the light hole to reach the infrared spectrometer 208; in the power-on state of the electromagnet 217, the armature end of the electromagnet 217 is attracted to the iron core, the shading baffle 218 is linked with the armature, the shading baffle 218 is offset towards the iron core end of the electromagnet 217, the shading baffle 218 is not in a zero position any more and is turned into a shading position, and at the moment, the light path of the infrared receiving module 206 is shaded, and the light path of the detection light reaching the infrared spectrometer 208 is cut off.

It can be appreciated that the coil of the electromagnet 217 is powered on or powered off, so that the state of the armature of the electromagnet 217 and the iron core is switched, and the shading baffle 218 is driven to synchronously displace to switch on/off the optical path of the infrared ray.

Fig. 7 shows a method for debugging an optical path of an ultraviolet-to-infrared broad spectrum ellipsometry device according to the foregoing embodiments, where the method includes:

s1, adjusting the angle of a reflecting mirror 109 of a polarizing arm to enable detection light rays emitted by a xenon lamp light source 102 to vertically enter a collimating mirror 106 of the polarizing arm, and adjusting the overall angle of the polarizing arm to enable the detection light rays reflected by a tested sample to reach the center of a diaphragm 202 of the polarizing arm;

s2, a light splitting module is not installed, and the angle of the polarization-detecting arm is adjusted, so that the detection light passes through the light splitting module and directly reaches the ultraviolet spectrometer 210; fine tuning the angle of the offset arm until the energy value of the ultraviolet spectrometer 210 reaches a maximum;

s3, installing a beam splitting module, and adjusting the angle of the beam splitter 212 until the energy value of the ultraviolet spectrometer 210 reaches the maximum; adjusting the focal length of the ultraviolet converging lens 213 until the energy value of the ultraviolet spectrometer 210 reaches a maximum; adjusting the angle of the infrared optical fiber 207 until the energy value of the infrared spectrometer 208 reaches the maximum; the focal length of ultraviolet converging lens 213 and the focal length of infrared converging lens 215 are fine tuned, respectively, until the energy value of ultraviolet spectrometer 210 and the energy value of infrared spectrometer 208 are maximized.

It can be understood that, on the basis of the foregoing measuring device, the optical path debugging method provided by this embodiment can quickly and accurately complete optical path debugging, and achieve high spectrum balance between the ultraviolet band and the infrared band, for example, up to 50:50.

The ultraviolet-infrared wide spectrum ellipsometry device and the optical path debugging method thereof provided by the application have the following advantages:

1. the ultraviolet-infrared wide spectrum ellipsometry measuring device provided by the application can effectively collect 193nm-2500nm wave band data and can measure films with various materials and morphologies.

2. According to the device optical path debugging method provided by the application, the optical path is debugged sequentially from the polarizing arm to the polarization detecting arm, so that the optical path debugging can be completed rapidly and accurately, and the spectrum balance of ultraviolet band and infrared band can reach 50:50, the detection precision is improved.

3. The shading module 209 that sets up in the device can all gather the dark noise of infrared spectrum at first when gathering the detection light at every turn, effectively promotes measurement accuracy and stability.

The foregoing description of the preferred embodiments of the application is not intended to limit the application to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the application are intended to be included within the scope of the application.

Claims (10)

1. An ultraviolet-infrared wide spectrum ellipsometry device is characterized by comprising a polarization arm module (101) and a polarization detection arm module (201) which are connected through an optical path,

the polarizing arm module (101) is used for emitting modulated broad spectrum detection light to the tested sample piece (301);

the polarization-maintaining arm module (201) comprises a light splitting unit, an ultraviolet spectrometer (210) and an infrared spectrometer (208), wherein the light splitting unit is used for splitting wide-spectrum detection light reflected by a tested sample piece (301) and sending ultraviolet light to visible light obtained by splitting into the ultraviolet spectrometer (210) and infrared light obtained by splitting into the infrared spectrometer (208).

2. The ultraviolet-to-infrared wide spectrum ellipsometry device according to claim 1, wherein the polarizing arm module (101) comprises a xenon lamp source (102), a pinhole diaphragm (110), a filter wheel (105), a collimating mirror (106), a first polarizer (107), a first wave plate (108) and a polarizing arm diaphragm (114) which are sequentially connected through an optical path;

the xenon lamp light source (102) is used for outputting detection light rays with a wide spectrum;

the pinhole diaphragm (110) is used for filtering the detection light to control the propagation direction, intensity and shape of the detection light;

a plurality of rotatable and replaceable optical filters (111) are arranged in the filter wheel (105), when the optical path is conducted, light rays penetrate through one optical filter (111) in the filter wheel (105), and the optical filters (111) are used for controlling the transmittance of the light rays;

the collimating mirror (106) is used for converting the detection light into parallel light;

the first polaroid (107) is used for modulating the polarization angle of the detection light;

the first wave plate (108) is used for modulating the phase angle of the detection light;

the polarizing arm diaphragm (114) is used for filtering the modulated detection light.

3. The ultraviolet-to-infrared wide spectrum ellipsometry device according to claim 2, wherein the filter wheel (105) comprises a driving motor (113), a turntable (104), a position sensor (112) and a plurality of optical filters (111), the optical filters (111) have different transmittance, and the optical filters (111) are arranged in a circumferential array on the circumference of the turntable (104); the driving motor (113) is in transmission connection with the turntable (104) and is used for controlling the rotation of the turntable (104); the position sensor (112) is closely adjacent to the periphery of the turntable (104) and is in signal connection with the driving motor (113) for measuring the rotation angle of the turntable (104) and controlling the driving motor (113) to operate.

4. An ultraviolet to infrared broad spectrum ellipsometry device according to claim 2, wherein the polarizing arm module (101) further comprises a mirror (109) and a mirror adjustment device (103), the mirror (109) is arranged on the mirror adjustment device (103), the mirror adjustment device (103) is used for adjusting the angle of the mirror (109), and the mirror (109) is arranged between the pinhole diaphragm (110) and the filter wheel (105) for reflecting the light output by the pinhole diaphragm (110) to the light input end of the filter wheel (105) through the reflecting surface.

5. The ultraviolet-to-infrared wide spectrum ellipsometry device according to claim 2, wherein the light splitting unit comprises an ultraviolet light receiving module (205) and an infrared light receiving module (206) which are connected through an optical path, the ultraviolet light receiving module (205) comprises a spectroscope (212) and an ultraviolet converging lens (213) which are sequentially arranged along the optical path, and the device further comprises a spectroscope angle adjusting mechanism (211) which is in transmission connection with the spectroscope (212); the infrared light receiving module (206) comprises an infrared converging lens (215) and an infrared optical fiber (207) which are sequentially arranged along a light path, wherein the infrared optical fiber (207) is arranged between the light output end of the infrared converging lens (215) and the infrared spectrometer (208), and the infrared light receiving module further comprises an infrared light receiving angle adjusting mechanism (216), and the infrared light receiving angle adjusting mechanism (216) is in transmission connection with the infrared optical fiber (207);

the spectroscope (212) is used for splitting input detection light into transmission light and reflection light, wherein the transmission light comprises ultraviolet light and visible light, and the reflection light comprises infrared light;

the spectroscope angle adjusting mechanism (211) is used for adjusting the angle of the spectroscope (212);

the ultraviolet converging lens (213) is used for receiving and converging the ultraviolet light and the visible light split by the spectroscope (212);

the infrared converging lens (215) is used for receiving and converging the infrared light split by the spectroscope (212);

the infrared optical fiber (207) is used for transmitting the converged infrared light to the input end of the infrared spectrometer (208);

the infrared light receiving angle adjusting mechanism (216) is used for adjusting the angle of the infrared optical fiber (207).

6. The ultraviolet-to-infrared wide spectrum ellipsometry device of claim 5, wherein the polarization analyzer module (201) further comprises a polarization analyzer diaphragm (202), a second wave plate (203) and a second polarizer (204) sequentially arranged at the front end of the light splitting unit along the light path,

the polarization-detecting arm diaphragm (202) is used for filtering detection light reflected by the detected sample piece (301);

the second wave plate (203) is used for modulating the phase angle of the detection light, and the phase angle of the second wave plate (203) and the phase angle of the first wave plate (108) are modulated in the same amplitude and opposite directions;

the second polarizer (204) is used for modulating the polarization angle of the detection light, and the second polarizer (204) has the same polarization angle modulation amplitude and opposite polarization angle modulation direction with the first polarizer (107).

7. The ultraviolet-to-infrared broad spectrum ellipsometry apparatus as in claim 5 or 6, wherein said polarizer arm module (101) further comprises a light shielding module (209), said light shielding module (209) is disposed at the light input end of said infrared optical fiber (207), and said light shielding module (209) is switchable between a light shielding state and a light transmitting state.

8. The ultraviolet-to-infrared wide spectrum ellipsometry device according to claim 7, wherein the light shielding module (209) comprises a light shielding baffle (218) and an electromagnet (217), the light shielding baffle (218) is fixedly connected with an armature end of the electromagnet (217), a light hole through which the detection light can pass is formed in the light shielding baffle (218), and the radial size of the light hole is matched with the radial size of the infrared optical fiber (207);

in the power-off state of the electromagnet (217), the detection light passes through the light-transmitting hole to reach the infrared spectrometer (208); in the power-on state of the electromagnet (217), the shading baffle piece (218) deflects towards the iron core end of the electromagnet (217) so as to cut off the light path of the detection light to the infrared spectrometer (208).

9. An ultraviolet to infrared broad spectrum ellipsometry apparatus of claim 1, wherein the wavelength band of the detection light comprises 193nm to 2500nm.

10. An optical path debugging method of an ultraviolet-to-infrared broad spectrum ellipsometry device, characterized in that the device based on any one of claims 5-9 comprises:

s1, adjusting the angle of a reflecting mirror (109) of a polarizing arm to enable detection light rays emitted by a xenon lamp light source (102) to vertically enter a collimating mirror (106) of the polarizing arm, and adjusting the integral angle of the polarizing arm to enable the detection light rays reflected by a tested sample piece (301) to reach the center of a diaphragm (202) of the polarizing arm;

s2, a light splitting module is not installed, and the angle of the deflection-detecting arm is adjusted, so that the detection light passes through the light splitting module and directly reaches an ultraviolet spectrometer (210); fine tuning the angle of the offset arm until the energy value of the ultraviolet spectrometer (210) reaches the maximum;

s3, installing a beam splitting module, and adjusting the angle of the beam splitter (212) until the energy value of the ultraviolet spectrometer (210) reaches the maximum; adjusting the focal length of the ultraviolet converging lens (213) until the energy value of the ultraviolet spectrometer (210) reaches the maximum; adjusting the angle of the infrared optical fiber (207) until the energy value of the infrared spectrometer (208) reaches the maximum; the focal length of the ultraviolet converging lens (213) and the focal length of the infrared converging lens (215) are respectively fine-tuned until the energy value of the ultraviolet spectrometer (210) and the energy value of the infrared spectrometer (208) reach the maximum.