CN117213807B - Double-tube angle measuring device and angle measuring method of beam splitting prism - Google Patents
Double-tube angle measuring device and angle measuring method of beam splitting prism Download PDFInfo
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- CN117213807B CN117213807B CN202311481483.7A CN202311481483A CN117213807B CN 117213807 B CN117213807 B CN 117213807B CN 202311481483 A CN202311481483 A CN 202311481483A CN 117213807 B CN117213807 B CN 117213807B
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Abstract
The invention belongs to the technical field of prism angle measurement, and mainly relates to a double-tube angle measurement device and an angle measurement method of a beam splitter prism, wherein the double-tube angle measurement device comprises a bearing jig, the bearing jig comprises a base, a first vertical plate and a second vertical plate, the first vertical plate is provided with a first light hole, and the second vertical plate is provided with a second light hole; the first vertical plate is provided with three first round beads which are distributed in a triangular shape to determine a plane; the second vertical plate is provided with two second beads which are sequentially arranged along the up-down direction, and the base is provided with a third bead; the bearing jig also comprises a pressing mechanism; the angle measurement method comprises the following steps: the method comprises the steps of calibrating a bearing jig test standard of a cube prism, and then detecting the angle deviation of the to-be-detected beam splitting prism by using a double-tube angle measuring device. By arranging the bearing station of the beam splitting prism formed by the first ball, the second ball and the third ball, the incident beam can be always and rapidly vertical to the incident surface of the beam splitting prism to be tested no matter any beam splitting prism to be tested is replaced.
Description
Technical Field
The invention belongs to the technical field of prism angle measurement, and mainly relates to a double-tube angle measurement device and an angle measurement method of a beam-splitting prism.
Background
In the prior art, the detection quality of the beam-splitting prism is affected in two aspects: 1. how to ensure the rapid alignment of the reference plane when the incident beam is incident; 2. in the test process, the included angle between the test reference coordinate axis x and the incident beam is 0 degrees, and the test reference coordinate axis y is perpendicular to the coordinate axis x, so that the test is fast and efficient.
The Chinese patent application document with publication number of CN102798357A discloses a double-tube angle measuring device and method, comprising two autocollimators, two autocollimator adjusting frames, a rotary table, a base, a main shaft, a multi-dimensional adjusting frame and a bearing table, wherein one autocollimator is respectively arranged above the two autocollimator adjusting frames, and the autocollimator adjusting frames are used for adjusting the autocollimator to be coaxial up, down, left and right; the turntable is connected with the auto-collimator adjusting frame through the connecting arm, the first auto-collimator is arranged on the auto-collimator adjusting frame, the turntable drives the first auto-collimator to realize 360-degree measurement, and the turntable is locked through the fastening screw; the base is fixed with another auto-collimator adjusting frame through a vertical arm, the second auto-collimator is arranged on the auto-collimator adjusting frame, and the vertical arm is mutually perpendicular to the base; the main shaft is arranged in the center of the turntable, penetrates through the turntable and is fixed with the base, the main shaft, the turntable and the base are connected through a bearing, and the main shaft drives the turntable to rotate through the bearing; the multidimensional adjusting frame is fixed right above the main shaft; the bearing seat table is fixed right above the multidimensional adjusting frame. This patent solves the above aspect 2 by a multidimensional adjustment frame, but does not solve the above aspect 1, and places the beam splitter prism on the mount table, and the incident beam cannot be aligned with the reference plane when the patent performs the test of the next beam splitter prism due to the placement position and the precision of the mount table.
Disclosure of Invention
The invention provides a double-tube angle measuring device, which solves the problem that an incident surface of a beam splitting prism cannot be aligned rapidly when an incident beam is incident in the prior art.
The invention also provides an angle measuring method of the beam-splitting prism, which is used for solving the problem that the incident surface of the beam-splitting prism cannot be aligned rapidly when an incident beam is incident in the prior art.
In order to solve the problems, the invention adopts the following technical scheme:
a dual tube goniometer for measuring the beam angle of a beam splitting prism comprising:
the double-tube angle measuring device comprises a fixed auto-collimator, a rotary auto-collimator and a three-dimensional angle adjusting frame, and further comprises a bearing jig, wherein the bearing jig comprises:
the base is fixedly arranged on the three-dimensional angle adjusting frame;
the first vertical plate and the second vertical plate are fixedly arranged on the base, planes where the first vertical plate and the second vertical plate are located are intersected, a first light hole for a light beam to pass through is formed in the first vertical plate, a second light hole for the light beam to pass through is formed in the second vertical plate, a placing area for placing the beam splitting prism is formed by surrounding the base, the first vertical plate and the second vertical plate, and the first vertical plate and the second vertical plate are in one-to-one correspondence with two adjacent side surfaces of the beam splitting prism;
three first beads are arranged on the plate surface of the first vertical plate and distributed in a triangular shape, and are used for being contacted with one of two adjacent side surfaces in the beam-splitting prism; two second beads are arranged on the plate surface of the second vertical plate, and are sequentially arranged along the up-down direction, and the two second beads are used for being contacted with the other side surface of the two adjacent side surfaces in the beam-splitting prism; the top surface of the base is provided with a third ball which is used for supporting the bottom surface of the beam-splitting prism;
the bearing jig further comprises a pressing mechanism fixedly arranged on the base, and the pressing mechanism is used for pressing the edge of the beam splitting prism so as to press the beam splitting prism on each first round bead and each second round bead.
Further, the outer convex points, which are in contact with the beam-splitting prisms, in the three first beads form a bearing plane, and the bearing plane is perpendicular to the top surface of the base.
Further, a straight line formed by the outer convex points, which are in contact with the beam-splitting prism, of the two second beads is parallel to the bearing plane.
Further, the first vertical plate faces the plate surface of the placement area, the second vertical plate faces the plate surface of the placement area and the top surface of the base are mutually perpendicular.
Further, three first beads are uniformly distributed around the first light holes.
Further, two second beads are vertically and uniformly distributed around the second light holes.
Further, the first vertical plate, the second vertical plate and the base are integrally formed.
Further, the compressing mechanism is a compressing spring plate arranged on the base.
The angle measuring method of the beam splitting prism adopts the double-tube angle measuring device and comprises the following steps:
s1: the bearing fixture is empty, the rotary autocollimator and the fixed autocollimator emit light beams, then the rotation angle of the rotary autocollimator is adjusted until the reading angles of the rotary autocollimator and the fixed autocollimator are 0 degrees, the rotary autocollimator is aligned with the fixed autocollimator, and then an x test axis 0 degree reference is established;
s2: placing a cube prism on a bearing jig, firstly, rotating an autocollimator by 90 degrees to enable a light beam emitted by the autocollimator and a light beam emitted by a fixed autocollimator to generate a 90-degree reference, adjusting a three-dimensional angle adjusting frame to enable the surface of the cube prism facing a first vertical plate to be perpendicular to the fixed autocollimator and the surface of the cube prism facing a second vertical plate to be perpendicular to the rotating autocollimator, and thus establishing an xoy measuring surface 90-degree reference based on the bearing surfaces of the first vertical plate and the second vertical plate;
s3: taking down the cube prism, putting the to-be-measured beam splitter prism on the bearing jig, turning the rotary autocollimator back to a state that the fixed autocollimator and the rotary autocollimator are aligned, sending out light beams by one of the fixed autocollimator and the rotary autocollimator, generating a first beam splitter beam by passing through the to-be-measured beam splitter prism, entering the other of the fixed autocollimator and the rotary autocollimator, and reading the angle to obtain a 0-degree reference angle error of the to-be-measured beam splitter prism;
s4: and rotating the rotary autocollimator by 90 degrees, wherein the fixed autocollimator and the rotary autocollimator are positioned on the 90-degree reference of the xoy measuring surface, one of the fixed autocollimator and the rotary autocollimator emits light beams, the light beams penetrate through the to-be-measured beam splitting prism to generate second beam splitting light beams on the beam splitting surface, and the second beam splitting light beams enter the other one of the fixed autocollimator and the rotary autocollimator and read the angle to obtain the 90-degree reference angle error of the to-be-measured beam splitting prism, so that the detection of the to-be-measured beam splitting prism is completed.
Compared with the prior art, the invention has the following beneficial effects: by arranging the first ball, the second ball and the third ball, the balls form a bearing station of the beam splitting prism, the beam splitting prism to be tested is placed on the bearing station, and then is pressed on one edge of the beam splitting prism to be tested by using the pressing mechanism, so that the incident beam can be always and rapidly vertical to the incident surface of the beam splitting prism to be tested no matter any beam splitting prism to be tested is replaced; meanwhile, the processing precision of the objective table bearing the beam-splitting prism is greatly reduced, and the cost of the detection equipment is reduced.
Drawings
The above, as well as additional purposes, features, and advantages of exemplary embodiments of the present invention will become readily apparent from the following detailed description when read in conjunction with the accompanying drawings. In the drawings, embodiments of the invention are illustrated by way of example and not by way of limitation, and like reference numerals refer to similar or corresponding parts and in which:
FIG. 1 is a schematic view of a bearing fixture;
FIG. 2 is a schematic diagram of a beam splitter prism placed on a support fixture;
FIG. 3 is a schematic view of the structure of the support fixture placed on the three-dimensional angle adjusting frame;
FIG. 4 is a schematic structural view of a dual tube goniometer;
FIG. 5 is a schematic diagram of an x-test axis 0 reference established;
FIG. 6 is a schematic diagram of establishing 90 ° reference for an xoy measurement plane;
FIG. 7 is a schematic diagram of detecting a 0℃beam angle error of a beam splitter prism to be measured;
FIG. 8 is a schematic diagram of a test beam splitter prism for detecting a 90 angle error;
FIG. 9 is a schematic diagram of the first angular method of beam incidence and exit direction;
fig. 10 is a schematic diagram of the incident and outgoing directions of the light beam according to the second angle measurement method.
Reference numerals illustrate:
1. a first bead; 2. a first riser; 3. a second riser; 4. a base; 5. compressing the spring plate; 6. a first light hole; 7. a second light hole; 8. a second bead; 9. a third bead; 10. a three-dimensional angle adjusting frame; 11. fixing an auto-collimator; 12. rotating the autocollimator; 13. a first reference surface; 14. a second reference surface; 15. a third reference surface; 16. a beam-splitting prism; 17. the bearing tool.
Detailed Description
The following description of the embodiments of the present invention will be made more complete and clear to those skilled in the art by reference to the figures of the embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Various non-limiting embodiments of the invention are described in detail below. Any number of elements in the figures are for illustration and not limitation, and any naming is used for distinction only and not for any limiting sense.
As shown in fig. 1 to 4, the present invention provides a dual-tube angular device, which includes a fixed autocollimator 11, a rotary autocollimator 12, a three-dimensional angle adjusting frame 10, a supporting jig 17, the supporting jig 17 is used for supporting a beam splitter prism 16, and the supporting jig 17 is placed on the three-dimensional angle adjusting frame 10 of the dual-tube angular device, so that the detection posture of the beam splitter prism to be detected placed on the supporting jig 17 can be adjusted. The bearing jig 17 comprises a base 4, a first vertical plate 2, a second vertical plate 3 and a pressing mechanism, wherein the base 4 is placed on the three-dimensional angle adjusting frame 10.
Wherein, first riser 2 and second riser 3 all set firmly on the top surface of base 4, and first riser 2 and second riser 3 can be perpendicular to the top surface of base 4 simultaneously, also can not perpendicular to the top surface of base 4 simultaneously, and the requirement is not high to it.
The faces of the first riser 2 and the second riser 3 are arranged along the extending direction, the plane of the first riser 2 and the plane of the second riser 3 are intersected, namely, the plane of the first riser 2 and the plane of the second riser 3 cannot be parallel, the plane of the first riser 2 and the plane of the second riser 3 are perpendicular to each other or not perpendicular, the use can be satisfied as long as the intersection is achieved, meanwhile, the first riser 2 and the second riser 3 are intersected or not intersected, and the plane of the first riser 2 and the plane of the second riser 3 are intersected, namely, the precision is not required. If the first riser 2 and the second riser 3 intersect themselves, the first riser 2, the second riser 3 and the base 4 are integrally formed. This is different from the requirement of high precision in the prior art. The base 4, the first vertical plate 2 and the second vertical plate 3 surround to form a placement area for placing the beam splitting prism 16, and the first vertical plate 2 and the second vertical plate 3 are used for corresponding to two adjacent side surfaces of the beam splitting prism 16 one by one.
The first riser 2 is provided with a first light hole 6 for passing light beams, the first light hole 6 can be used for passing incident light beams to irradiate the incident surface of the beam splitting prism 16, and meanwhile, the first light hole 6 can also be used for passing emergent light beams from the beam splitting prism 16; the second riser 3 is provided with a second light hole 7 through which the light beam passes, the second light hole 7 can allow the outgoing light beam from the beam splitter prism 16 to pass through, and the second light hole 7 can also be used for the incoming light beam to pass through so as to irradiate on the incident surface of the beam splitter prism 16.
The first vertical plate 2 is fixedly provided with three first beads 1, the three first beads 1 are used for contacting one of two adjacent side surfaces in the beam splitting prism 16, the three first beads 1 are distributed in a triangular shape, the outer protruding points of the three first beads 1 on the first vertical plate 2 can form a uniquely determined bearing plane, the bearing plane can be perpendicular to the top surface of the base 4 or not perpendicular to the top surface of the base 4, but only one beam splitting prism to be detected is placed, and the incidence planes of the beam splitting prisms to be detected are the same. However, the three first beads 1 on the first riser 2 cannot be on the same straight line at the same time, or it can be said that only any two first beads 1 on the first riser 2 can be on the same straight line, but not three first beads 1 can be on the same straight line at the same time. Meanwhile, the three first beads 1 may be uniformly distributed around the first light holes 6 or may be unevenly distributed.
Two second beads 8 are fixedly arranged on the second vertical plate 3, and the two second beads 8 on the second vertical plate 3 are sequentially arranged along the up-down direction, wherein the sequential arrangement along the up-down direction is determined after three-dimensional angle adjustment is performed, namely, after the posture of the beam splitter prism 16 is adjusted by utilizing the three-dimensional angle adjusting frame 10, the two second beads 8 on the second vertical plate 3 must be staggered along the up-down direction and cannot be on the same horizontal line. Two second beads 8 are used to contact the other of the adjacent two sides of the beam splitting prism 16. The straight line formed by the convex points of the two second beads 8, which are in contact with the beam splitter prism 16, can be parallel to the bearing plane or not, and meanwhile, the distribution of the two second beads 8 around the second light holes 7 can be vertically uniform or vertically nonuniform.
Meanwhile, a third ball 9 is arranged on the top surface of the base 4, and the third ball 9 is used for supporting the bottom surface of the beam splitting prism 16.
The compressing mechanism can be a compressing spring piece 5, the compressing spring piece 5 is fixed on the base 4 through a fastening bolt, the compressing spring piece 5 has a certain length and can contact with the vertical edge of the beam splitter prism 16, and then the beam splitter prism 16 is compressed on each first ball 1 and each second ball 8 through elasticity.
The first ball 1, the second ball 8 and the third ball 9 form a bearing station of the beam splitting prism 16, the bearing station is used for placing the beam splitting prism 16, the beam splitting prism 16 is pressed by the pressing spring piece 5, so that an incident light beam can be always perpendicular to the incident surface of the beam splitting prism 16, namely, any beam splitting prism to be detected is placed, the incident surface of the beam splitting prism to be detected is unique, the incident light beam can be always perpendicular to the incident surface of any beam splitting prism to be detected, and the alignment is rapid. For example: the beam splitting prism to be detected is qualified, the optical dihedral angles are 90 degrees, but due to the processing precision problem of the objective table carrying the beam splitting prism to be detected, the incident beam cannot be perpendicular to the incident surface of the beam splitting prism to be detected, so that the detection result is error, the incident beam can be guaranteed to be always perpendicular to the incident surface of the beam splitting prism to be detected, and the detection stability is guaranteed.
By arranging the first ball 1, the second ball 8 and the third ball 9, the first ball 1, the second ball 8 and the third ball 9 form a bearing station of the beam splitting prism 16, the beam splitting prism to be tested is placed on the bearing station, and then the pressing spring plate 5 is used for pressing on one edge of the beam splitting prism to be tested, so that the incident beam can be always and rapidly vertical to the incident surface of the beam splitting prism to be tested no matter any beam splitting prism to be tested is replaced; and simultaneously, the processing precision of the objective table carrying the beam-splitting prism 16 is greatly reduced, so that the cost of the detection equipment is reduced.
The invention also provides an angle measurement method of the beam splitting prism, which comprises the steps of testing the optical dihedral angle of the beam splitting prism to be tested through the double-tube angle measurement device, and establishing a coordinate system, wherein the incidence direction of a light beam is an x test axis, the turning direction of a beam splitting surface is a y test axis, the turning point origin o of the beam splitting surface is a y test axis, and the direction vertical to the upward direction of the xoy measurement surface is a z test axis; for the calibrated bearing jig 17, a bearing plane formed by the outer convex points of the three first beads 1 on the first vertical plate 2 is set as a first reference plane 13, a plane formed by the outer convex points of the two second beads 8 on the second vertical plate 3 is set as a second reference plane 14, the first reference plane 13 is perpendicular to the second reference plane 14, and the side surface of the cubic prism parallel to the first reference plane 13 is a third reference plane 15.
As shown in fig. 5-9, the first goniometric method comprises the following steps:
as shown in fig. 5, step one: the bearing jig 17 is empty, namely the cube prism is not put at first, the rotating autocollimator 12 and the fixed autocollimator 11 both emit calibration beams, the calibration beams emitted by the fixed autocollimator 11 pass through the first light holes 6, then the rotation angle of the rotating autocollimator 12 is adjusted, the angle error read by the rotating autocollimator 12 is 0 degrees after adjustment, meanwhile, the calibration beams emitted by the rotating autocollimator 12 are received by the fixed autocollimator 11, the angle error read by the fixed autocollimator 11 is 0 degrees, and therefore the alignment of the rotating autocollimator 12 and the fixed autocollimator 11 is completed, and the 0-degree reference of the x test axis is established.
As shown in fig. 6, step two: firstly, a cube prism is placed on a bearing jig 17, then the rotating autocollimator 12 rotates 90 degrees to enable a light beam emitted by the cube prism and a light beam emitted by a fixed autocollimator 11 to generate 90-degree reference, a three-dimensional angle adjusting frame 10 is adjusted to enable the surface of the cube prism facing a first vertical plate 2 to be perpendicular to the fixed autocollimator 11, the surface of the cube prism facing a second vertical plate 3 to be perpendicular to the rotating autocollimator 12, and the angle errors read by the rotating autocollimator 12 and the fixed autocollimator 11 are all 0-degree, so that an xoy measuring surface 90-degree reference based on the ball bearing surfaces of the first vertical plate 2 and the second vertical plate 3 is established.
As shown in fig. 7 and 9, step three: after the calibration of the double-tube angle measuring device is completed through the first step and the second step, the cube prism is taken down, the to-be-measured beam splitter prism is placed on the bearing fixture 17, the rotating autocollimator 12 is turned back to 0 degrees, at the moment, the fixed autocollimator 11 and the rotating autocollimator 12 are positioned on the 0-degree reference of the x test axis and are in an aligned state, the fixed autocollimator 11 emits a test beam, the test beam passes through the first light transmission hole 6 and enters the to-be-measured beam splitter prism through the first reference surface 13, then the first beam splitter beam is generated through the to-be-measured beam splitter prism, the first beam splitter beam passes out of the third reference surface 15 and enters the rotating autocollimator 12, and the reading of the rotating autocollimator 12 is the 0-degree beam angle error of the to-be-measured beam splitter prism.
As shown in fig. 8 and 9, step four: and then the rotary autocollimator 12 is rotated by 90 degrees, at the moment, the fixed autocollimator 11 and the rotary autocollimator 12 are positioned on the 90-degree reference of the xoy measuring surface, a second beam splitting beam generated by turning a test beam emitted by the fixed autocollimator 11 on the beam splitting surface passes through the second light transmitting hole 7 and enters the rotary autocollimator 12 through the second reference surface 14, at the moment, the reading of the rotary autocollimator 12 is the 90-degree beam angle error of the beam splitting prism to be detected, and therefore, the detection of the beam splitting prism to be detected is completed.
And then repeating the third step and the fourth step, and continuously detecting the to-be-detected beam splitter prism.
As shown in fig. 10, the second goniometric method comprises the following steps:
the calibration steps of the double tube goniometer in the second goniometer method are identical to those of the double tube goniometer in the first goniometer method.
Step three: taking down the cube prism, putting the to-be-measured beam splitter prism on the bearing jig 17, rotating the rotary autocollimator 12 to turn back to 0 DEG, wherein the fixed autocollimator 11 and the rotary autocollimator 12 are positioned on the 0 DEG reference of the x test axis, the rotary autocollimator 12 emits a test beam, the test beam passes through the third reference surface 15 and enters the to-be-measured beam splitter prism, then passes through the to-be-measured beam splitter prism, the test beam enters the fixed autocollimator 11 from the first reference surface 13, and the reading of the fixed autocollimator 11 is the 0 DEG beam angle error of the to-be-measured beam splitter prism;
step four: then the rotary autocollimator 12 is rotated by 90 degrees, at this time, the fixed autocollimator 11 and the rotary autocollimator 12 are positioned on the 90-degree reference of the xoy measuring surface, the test light beam emitted by the rotary autocollimator 12 enters the to-be-measured beam splitter prism from the second reference surface 14, the beam splitting light beam generated by turning the test light beam on the beam splitting surface of the to-be-measured beam splitter prism passes through the first reference surface 13 and enters the fixed autocollimator 11, at this time, the reading of the fixed autocollimator 11 is the 90-degree light beam angle error of the to-be-measured beam splitter prism, and therefore the detection of the to-be-measured beam splitter prism is completed.
And then repeating the third step and the fourth step, and continuously detecting the to-be-detected beam splitter prism.
From the foregoing description of the present specification, it will be further understood by those skilled in the art that terms such as "upper", "lower", "front", "rear", "left", "right", "width", "horizontal", "top", "bottom", "inner", "outer", and the like, which indicate an azimuth or a positional relationship, are based on the azimuth or the positional relationship shown in the drawings of the present specification, are for convenience only in explaining aspects of the present invention and simplifying the description, and do not explicitly or implicitly refer to devices or elements having to have the specific azimuth, be constructed and operate in the specific azimuth, and thus the azimuth or positional relationship terms described above should not be interpreted or construed as limitations of aspects of the present invention.
In addition, in the description of the present specification, the meaning of "plurality" means at least two, for example, two, three or more, etc., unless specifically defined otherwise.
Claims (7)
1. A dual tube goniometer for measuring the beam angle of a beam splitting prism (16), comprising:
fixed auto-collimator (11), rotatory auto-collimator (12) and three-dimensional angle regulation frame (10), its characterized in that, double-barrelled goniometer still includes and holds and lean on tool (17), hold and lean on tool (17) include:
the base (4) is fixedly arranged on the three-dimensional angle adjusting frame (10);
the light splitting device comprises a base (4), a first vertical plate (2) and a second vertical plate (3), wherein the base (4) is fixedly provided with the first vertical plate (2) and the second vertical plate (3), planes where the first vertical plate (2) and the second vertical plate (3) are located are intersected, a first light hole (6) for a light beam to pass through is formed in the first vertical plate (2), a second light hole (7) for the light beam to pass through is formed in the second vertical plate (3), a placing area for placing a light splitting prism (16) is formed by surrounding the base (4), the first vertical plate (2) and the second vertical plate (3), and two side surfaces adjacent to the light splitting prism (16) are in one-to-one correspondence;
three first beads (1) are arranged on the plate surface of the first vertical plate (2), the three first beads (1) are distributed in a triangular shape, and the three first beads (1) are used for being in contact with one of two adjacent side surfaces in the beam-splitting prism (16); two second beads (8) are arranged on the plate surface of the second vertical plate (3), the two second beads (8) are sequentially arranged along the up-down direction, and the two second beads (8) are used for being contacted with the other side surface of the two adjacent side surfaces in the beam-splitting prism (16); the top surface of the base (4) is provided with a third ball (9), and the third ball (9) is used for supporting the bottom surface of the beam-splitting prism (16);
the outer convex points of the three first beads (1) which are contacted with the beam-splitting prism (16) form a bearing plane, and the bearing plane is perpendicular to the top surface of the base (4);
straight lines formed by outer convex points, which are in contact with the beam-splitting prism (16), of the two second beads (8) are parallel to the bearing plane;
the bearing jig (17) further comprises a pressing mechanism fixedly arranged on the base (4), and the pressing mechanism is used for pressing the edges of the beam-splitting prism (16) so as to press the beam-splitting prism (16) on each first ball (1) and each second ball (8).
2. A double tube goniometer according to claim 1, characterized in that the first riser (2) faces the surface of the placement area, the second riser (3) faces the surface of the placement area and the top surface of the base (4) are mutually perpendicular.
3. A double tube goniometer according to claim 2, characterized in that three of the first beads (1) are evenly distributed around the first light transmission aperture (6).
4. A double tube goniometer according to claim 3, characterized in that two of said second beads (8) are vertically equispaced around said second light-transmitting aperture (7).
5. The double-tube angle measuring device according to claim 4, wherein the first riser (2), the second riser (3) and the base (4) are integrally formed.
6. A double tube goniometer according to claim 5, characterized in that the hold-down mechanism is a hold-down spring (5) mounted on the base (4).
7. A method for angle measurement of a beam splitting prism, characterized by using a double tube angle measurement device according to any one of claims 1-6, comprising the steps of:
s1: the bearing jig (17) is empty, the rotary autocollimator (12) and the fixed autocollimator (11) emit light beams, then the rotation angle of the rotary autocollimator (12) is adjusted until the reading angles of the rotary autocollimator (12) and the fixed autocollimator (11) are 0 DEG, the rotary autocollimator (12) is aligned with the fixed autocollimator (11), and then an x test axis 0 DEG reference is established;
s2: firstly, rotating an autocollimator (12) by 90 degrees to enable a light beam emitted by the autocollimator and a light beam emitted by a fixed autocollimator (11) to generate a 90-degree reference, adjusting a three-dimensional angle adjusting frame (10) to enable the surface of the cubic prism facing a first riser (2) to be perpendicular to the fixed autocollimator (11) and the surface of the cubic prism facing a second riser (3) to be perpendicular to the rotating autocollimator (12), and thus establishing an xoy measuring surface 90-degree reference based on the bearing surfaces of the first riser (2) and the second riser (3) and the beads;
s3: taking down the cube prism, putting the to-be-measured beam splitting prism on the bearing jig (17), turning the rotary autocollimator (12) back to a state that the fixed autocollimator (11) and the rotary autocollimator (12) are aligned, sending out light beams by one of the fixed autocollimator (11) and the rotary autocollimator (12), generating a first beam splitting light beam by passing through the to-be-measured beam splitting prism, entering the other of the fixed autocollimator (11) and the rotary autocollimator (12), and reading the angle to obtain a 0-degree reference angle error of the to-be-measured beam splitting prism;
s4: rotating the rotary autocollimator (12) by 90 degrees, wherein the fixed autocollimator (11) and the rotary autocollimator (12) are positioned on the 90-degree reference of the xoy measuring surface, one of the fixed autocollimator (11) and the rotary autocollimator (12) emits a light beam, a second light beam is generated on the light splitting surface through the light splitting prism to be detected, and the light beam enters the other one of the fixed autocollimator (11) and the rotary autocollimator (12) and reads the angle to obtain the 90-degree reference angle error of the light splitting prism to be detected, so that the detection of the light splitting prism to be detected is completed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311481483.7A CN117213807B (en) | 2023-11-09 | 2023-11-09 | Double-tube angle measuring device and angle measuring method of beam splitting prism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311481483.7A CN117213807B (en) | 2023-11-09 | 2023-11-09 | Double-tube angle measuring device and angle measuring method of beam splitting prism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117213807A CN117213807A (en) | 2023-12-12 |
| CN117213807B true CN117213807B (en) | 2024-02-23 |
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