CN117192657A - RGB achromatic superlens structure based on space division multiplexing geometric phase principle - Google Patents
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- 239000002086 nanomaterial Substances 0.000 claims abstract description 88
- 239000000463 material Substances 0.000 claims abstract description 37
- 238000003491 array Methods 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 238000005192 partition Methods 0.000 claims abstract description 13
- 238000002955 isolation Methods 0.000 claims abstract description 12
- 239000002061 nanopillar Substances 0.000 claims description 18
- 238000003384 imaging method Methods 0.000 claims description 16
- 239000003989 dielectric material Substances 0.000 claims description 15
- 229910002601 GaN Inorganic materials 0.000 claims description 7
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 229910052594 sapphire Inorganic materials 0.000 claims description 4
- 239000010980 sapphire Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 229910000449 hafnium oxide Inorganic materials 0.000 claims description 3
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 3
- 239000004408 titanium dioxide Substances 0.000 claims description 3
- 230000004888 barrier function Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 18
- 230000008569 process Effects 0.000 abstract description 14
- 238000013461 design Methods 0.000 description 11
- 230000008901 benefit Effects 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 239000002073 nanorod Substances 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 230000004075 alteration Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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Abstract
An RGB achromatic superlens structure based on spatially-partitioned multiplexing geometric phase principle, comprising: a support substrate; an isolation layer formed on the support substrate; a super lens structure material layer formed on the isolation layer; the super-lens structure material layer is distributed with three nanostructure unit arrays based on space partition multiplexing and meeting the geometric phase principle, and the first nanostructure unit array is positioned at the center radius of the super-lens and is R 1 For focusing blue light B in the RGB incident light; the second nanostructure cell array is positioned at the center radius R of the superlens 1 And R is R 2 The circular ring area is used for focusing green light G in the RGB incident light; the third nano-structure unit array is positioned at the center radius R of the super lens 2 And R is R 3 The circular ring area is used for focusing red light R in RGB incident light; focal length or focal length of first to third nanostructure cell arraysThe focus is consistent. The invention solves the problems of complex structure, high process difficulty and difficult realization of large area of the existing achromatic superlens.
Description
Technical Field
The disclosure relates to the technical field of micro-nano optics, in particular to an RGB achromatic superlens structure based on a space partition multiplexing geometric phase principle.
Background
With the rapid development of 21 st century optical technology, integration, miniaturization and light weight of an optical system are the most urgent demands at present, and the demands can be realized by the existing optical design technology and micro-nano processing technology.
The super surface is a two-dimensional planar structure formed by sub-wavelength units, electromagnetic waves interact with the sub-wavelength units on the super surface, so that the regulation and control of amplitude, phase, polarization and wavelength are generated, the super surface has unprecedented advantages in the aspect of light wave control, and the integration, miniaturization and light weight of an optical system can be met. While existing superlenses have achieved focusing well, in practical applications, superlenses capable of achromatic imaging are more attractive and have an urgent market need.
In imaging devices, the existence of chromatic aberration is also a big problem for researchers, and the chromatic aberration causes that lenses cannot focus light with different wavelengths onto the same plane, so that phenomena of imaging blurring and color distortion occur, and how to eliminate chromatic aberration in display application to realize color imaging is important.
Currently, achromatic imaging of a superlens is realized by combining spatial multiplexing, propagation phase and geometric phase (P-B phase), utilizing equivalent refractive index theory and other methods, for example, the achromatic superlens is designed by dense vertical superposition of independent supersurfaces, and chromatic aberration elimination color imaging is realized by a plurality of phase modulation units of the independent supersurfaces; superlens based on spatial multiplexing light modulation technology; dual-structure achromatic superlenses and holed-structure achromatic superlenses.
It follows that these achromatic superlenses of the prior art are designed based on the transmission phase principle or on a combination of the propagation phase principle and the geometrical phase principle (P-B phase principle), and there is no RGB (red green blue) achromatic superlens based solely on the geometrical phase principle. The super-lens unit structure based on the transmission phase principle has the advantages that the size change types are multiple, the structural size difference is large, the achromatism can be realized only by adopting a complex structure, so that the overall structure is complex, the process consistency of the array structure is difficult to ensure due to different etching rates of different sizes, the process difficulty is large, and the large area is difficult to realize. The achromatic superlens based on the geometric phase principle has the advantages of simple process, simple design and large-area manufacture, and in practical application, the structure is simple, the process is easy to control and is of great importance to the superlens, so that the achromatic superlens based on the geometric phase principle, which is simple in structure and easy to realize, has important scientific significance and practical value, and has application prospect in the fields of digital imaging systems, virtual reality display, high-resolution microscopes and the like.
Therefore, how to realize the RGB achromatic superlens based on the geometrical phase principle solves the problems of complex structure, high process difficulty and difficult realization of large area of the existing achromatic superlens, and becomes an important technical problem to be solved urgently at present.
Disclosure of Invention
First, the technical problem to be solved
In view of the above, a main object of the present disclosure is to provide an RGB achromatic superlens structure based on a spatial division multiplexing geometric phase principle, so as to solve the problems of complex structure, high process difficulty and difficulty in realizing a large area of the existing achromatic superlens based on a transmission phase principle.
(II) technical scheme
According to one aspect of the present disclosure, there is provided an RGB achromatic superlens based on spatially-partitioned multiplexing geometric phase principlesA structure, comprising: a support substrate; an isolation layer formed on the support substrate; and a superlens structure material layer formed on the isolation layer; wherein, the super-lens structure material layer is distributed with three nanostructure unit arrays based on space partition multiplexing and meeting the geometric phase principle, and the first nanostructure unit array is positioned at the center radius of the super-lens and is R 1 For focusing blue light B in the RGB incident light; the second nanostructure cell array is positioned at the center radius R of the superlens 1 And R is R 2 The circular ring area is used for focusing green light G in the RGB incident light; the third nano-structure unit array is positioned at the center radius R of the super lens 2 And R is R 3 The circular ring area is used for focusing red light R in RGB incident light; wherein R is 1 ＜R 2 ＜R 3 And the focal lengths or focuses of the first to third nanostructure cell arrays are consistent, so that achromatic focusing on an incident light beam can be realized.
In the above aspect, the phase distribution of the first to third nanostructure cell arrays satisfies the following condition:
wherein,the phase of the super lens structure comprises a first area phase, a second area phase and a third area phase, wherein the first area phase is the center radius of the super lens is R 1 The blue light phase of the circular region of (2), the second region phase, i.e. the center radius of the superlens is R 1 And R is R 2 Green light phase of the ring area in between, and the third area phase, namely the center radius of the super lens, is R 2 And R is R 3 Red light phase of the circular ring area in between; (x, y) is the position coordinate on the superlens structure, f is the focal length of the superlens structure, lambda b Is blue wavelength lambda g At green wavelength lambda r R is the wavelength of red light, and r is each nano junction in the nano structure unit arrayDistance of the building block from the center of the superlens.
In the above-mentioned scheme, the section of the nanostructure unit in the first to third nanostructure unit arrays adopts at least one of rectangular nanorods, oval nanorods, rectangular nanopores or oval nanopores.
In the above scheme, the nano-pillar material or the external material of the nano-hole in the nano-structure unit is a visible light material, including a high refractive index dielectric material, a high dielectric constant visible light band dielectric material or a semiconductor material.
In the above scheme, the high refractive index medium material adopts Si, siN, siO 2 、HfO 2 、a-Si、TiO 2 Or GaN.
In the above scheme, the nanostructure units in the first to third nanostructure unit arrays are the same or different in shape or size, and achromatic focusing is realized by changing the geometric phase principle of the nanostructure unit phase by changing the direction of the nanopillar or nanopore.
In the above scheme, the nanostructure units in the first to third nanostructure unit arrays modulate the phase of the incident light by satisfying the geometric phase principle of the rotation direction of the respective phases, so as to make the focal length or focal point consistent, thereby realizing achromatic focusing on the incident light beam.
In the above scheme, the supporting substrate is made of dielectric materials including Si, gaAs, transparent glass, quartz glass, or sapphire.
In the above scheme, the isolation layer is made of aluminum oxide, gallium nitride, hafnium oxide or titanium dioxide.
According to another aspect of the present disclosure, an electronic device is provided, comprising the described RGB achromatic superlens structure based on the principle of spatially-partitioned multiplexed geometric phase.
According to yet another aspect of the present disclosure, there is provided the use of the described RGB achromatic superlens structure based on spatially-partitioned multiplexed geometric phase principles in digital imaging systems, virtual reality displays, and high resolution microscopes.
(III) beneficial effects
From the above technical solution, it can be seen that the RGB achromatic superlens structure based on the spatial partition multiplexing geometric phase principle provided by the present disclosure has at least the following beneficial effects:
1. the RGB achromatic superlens structure based on the space partition multiplexing geometric phase principle is characterized in that three nanostructure unit arrays based on the space partition multiplexing and meeting the geometric phase principle are distributed on a superlens structure material layer, and the focal length or focal point of the three nanostructure unit arrays is consistent through space partition design, so that achromatic focusing on an incident light beam is realized.
2. The RGB achromatic superlens structure based on the space partition multiplexing geometric phase principle has the advantages that the principle adopted is the geometric phase principle, the superlens structure has the characteristics of consistent transmittance and consistent structural size, so that larger phase change can be realized, the structure of the superlens is simplified, the structure is easy to process and prepare, the problem that achromatism cannot be realized only by using the geometric phase principle is solved, and the achromatism superlens with high performance and better process compatibility is realized.
3. The RGB achromatic superlens structure based on the space division multiplexing geometric phase principle is based on the geometric phase principle, can realize RGB achromatic focusing in a transmission mode, is favorable for realizing light transmission focusing of the P-B phase principle, and is favorable for combining devices and an integrated optical system.
4. The RGB achromatic superlens structure based on the space division multiplexing geometric phase principle has the advantages of simple process, simple design and large-area manufacture, and can be widely applied to the fields of material science, color imaging, nanotechnology and the like.
Drawings
The above and other objects, features and advantages of the present disclosure will become more apparent from the following description of embodiments thereof, taken in conjunction with the accompanying drawings, which illustrate, by way of example, and not by way of undue limitation, the present disclosure, many of which are to be considered readily appreciated, as the following detailed description proceeds, while the accompanying drawings, which illustrate, by way of example, the present disclosure, and in which:
FIG. 1 is a schematic top view of an RGB achromatic superlens structure based on spatially-partitioned multiplexed geometric phase principles according to an embodiment of the present disclosure;
FIG. 2 is an optical path diagram of an RGB achromatic superlens structure based on spatially-partitioned multiplexed geometric phase principles according to an embodiment of the present disclosure;
FIG. 3a is a graph of superlens cell structure phase versus angle for region one of 488nm blue light focus in an RGB achromatic superlens structure based on spatially partitioned multiplexing geometric phase principles according to an embodiment of the present disclosure;
FIG. 3b is a graph of superlens cell structure phase versus angle for region two focused for 532nm green in an RGB achromatic superlens structure based on spatially partitioned multiplexed geometric phase principles according to an embodiment of the present disclosure;
FIG. 3c is a graph of superlens cell structure phase versus angle for region three focused for 633nm red light in an RGB achromatic superlens structure based on spatially partitioned multiplexed geometric phase principles according to an embodiment of the present disclosure;
fig. 4 is a focusing effect diagram of an RGB achromatic superlens structure based on the principle of spatially-partitioned multiplexed geometric phase, where the white dashed line is the design focal length of the superlens, i.e., z=62 μm, in accordance with an embodiment of the present disclosure.
Reference numerals:
1. a first nanostructure cell array; 2. a second nanostructure cell array; 3. a third nanostructure cell array;
4. an isolation layer; 5. an unetched superlens structural material layer;
blue light focal region in gb achromatic superlens; green light focusing region in rgb achromatic superlens; red light focusing region in rgb achromatic superlens;
rgb incident light; 10. a support substrate; 11. blue light is emitted; 12. emitting green light; 13. emitting red light; 14. a focal plane.
Detailed Description
Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood that the description is only exemplary and is not intended to limit the scope of the present disclosure. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the concepts of the present disclosure.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It should be noted that the terms used herein should be construed to have meanings consistent with the context of the present specification and should not be construed in an idealized or overly formal manner.
And the shapes and dimensions of the various elements in the drawings do not reflect actual sizes and proportions, but merely illustrate the contents of the embodiments of the present disclosure. In addition, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.
Furthermore, the word "comprising" or "comprises" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
In order to solve the problems of complex structure, high process difficulty and difficulty in realizing a large area of the existing achromatic superlens based on the transmission phase principle, the present disclosure provides an RGB achromatic superlens structure based on the spatial division multiplexing geometric phase principle, as shown in fig. 1 and 2, fig. 1 is a schematic top view of an RGB achromatic superlens structure based on the spatial division multiplexing geometric phase principle according to an embodiment of the present disclosure, and fig. 2 is an optical path diagram of an RGB achromatic superlens structure based on the spatial division multiplexing geometric phase principle according to an embodiment of the present disclosure, where the RGB achromatic superlens structure includes: a support substrate 10; an isolation layer 4 formed on the support substrate 10; and a superlens structural material layer formed on the isolation layer 4.
According to the embodiment of the present disclosure, as shown in fig. 1 and 2, the super lens structure material layer is distributed with three nanostructure cell arrays based on spatial division multiplexing and satisfying the geometric phase principle, namely, a first nanostructure cell array 1, a second nanostructure cell array 2, and a third nanostructure cell array 3. The first nanostructure cell array 1 is positioned at the center radius R of the superlens 1 A blue light focusing region 6 in the RGB achromatic superlens of fig. 1, for focusing blue light B in RGB incident light 9; the second nanostructure cell array 2 is positioned at the center radius R of the superlens 1 And R is R 2 A ring area in between, namely a green light focusing area 7 in the RGB achromatic superlens of fig. 1, for focusing green light G in the RGB incident light 9; the third nanostructure cell array 3 is positioned at the center radius R of the superlens 2 And R is R 3 The circular ring area in between, namely the red light focusing area 8 in the RGB achromatic superlens in figure 1, is used for focusing the red light R in the RGB incident light 9; wherein R is 1 ＜R 2 ＜R 3 And the focal lengths or focal points of the first nanostructure cell array 1, the second nanostructure cell array 2 and the third nanostructure cell array 3 are consistent, that is, the focal lengths f of the emergent blue light 11, the emergent green light 12 and the emergent red light 13 are all located on the focusing plane 14, so that achromatic focusing on the incident light beam can be realized.
According to the embodiment of the present disclosure, as shown in fig. 1 and 2, the phase distribution of the first nanostructure cell array 1, the second nanostructure cell array 2, and the third nanostructure cell array 3 satisfies the following conditions:
in the case of the formula 1 of the present invention,the phase of the super lens structure comprises a first area phase, a second area phase and a third area phase, wherein the first area phase is the center radius of the super lens is R 1 The blue light phase of the circular region of (2), the second region phase, i.e. the center radius of the superlens is R 1 And R is R 2 Green light phase of the ring area in between, and the third area phase, namely the center radius of the super lens, is R 2 And R is R 3 Red light phase of the circular ring area in between; (x, y) is the position coordinate on the superlens structure, f is the focal length of the superlens structure, lambda b Is blue wavelength lambda g At green wavelength lambda r And r is the distance from each nanostructure unit in the nanostructure unit array to the center of the superlens.
According to the embodiment of the disclosure, the sections of the nanostructure units in the first nanostructure unit array 1, the second nanostructure unit array 2 and the third nanostructure unit array 3 all adopt at least one of rectangular nanorods, oval nanorods, rectangular nanopores or oval nanopores, wherein the material adopted by the nanorods or the external material of the nanopores is a visible light material, and the visible light material comprises a high refractive index dielectric material, a high dielectric constant visible light band dielectric material or a semiconductor material. Alternatively, a high refractive index dielectric material may be used Si, siN, siO 2 、HfO 2 、a-Si、TiO 2 Or GaN.
According to the embodiment of the present disclosure, the nanostructure elements in the first nanostructure element array 1, the second nanostructure element array 2, and the third nanostructure element array 3 may be the same or different in shape or size.
According to the embodiment of the disclosure, the nanostructure elements in the first nanostructure element array 1, the second nanostructure element array 2 and the third nanostructure element array 3 realize achromatic focusing of the spatially-partitioned P-B phase principle according to wavelength, region and corresponding phase distribution, specifically, the geometrical phase principle of changing the phases of the nanostructure elements by changing the directions of the nanopillars or nanopores, and the achromatic focusing of the incident light beam.
According to the embodiment of the disclosure, the nanostructure units in the first nanostructure unit array 1, the second nanostructure unit array 2 and the third nanostructure unit array 3 modulate the phase of the incident light by satisfying the geometric phase principle of the respective phase rotation directions, so that the focal length or the focal point is consistent, thereby realizing achromatic focusing on the incident light beam.
According to an embodiment of the present disclosure, the support substrate 10 is made of a dielectric material, which may be Si, gaAs, transparent glass, quartz glass, sapphire, or the like.
According to an embodiment of the present disclosure, the isolation layer 4 is made of aluminum oxide, gallium nitride, hafnium oxide, titanium dioxide, or the like.
In one embodiment of the present disclosure, quartz glass is used as a support substrate, alumina (Al 2 O 3 ) The film material is an isolation layer, the SiN film material is a super-lens structure material layer, and the RGB achromatic super-lens structure based on the principle of space partition multiplexing geometric phase is realized.
Specifically, in selecting wavelengths for blue 488nm, green 532nm, and red 633nm as the working wavelengths of the superlens, the focal length f of the entire superlens is set according to actual requirements, and the focal length of the superlens in this embodiment is set to 62 μm. According to a classical superlens single-wavelength focusing phase formula, three regions of the superlens meet different phases. According to the focusing requirement of the nanopore structure unit array, the phase distribution of the first to third nanostructure unit arrays in the RGB achromatic super lens structure based on the space division multiplexing geometric phase principle provided by the embodiment meets the following conditions:
in the case of the formula 1 of the present invention,the phase of the super lens structure comprises a first area phase, a second area phase and a third area phase, wherein the first area phase is the center radius of the super lens is R 1 The blue light phase of the circular region of (2), the second region phase, i.e. the center radius of the superlens is R 1 And R is R 2 Green light phase of the ring area in between, and the third area phase, namely the center radius of the super lens, is R 2 And R is R 3 Red light phase of the circular ring area in between; (x, y) is the position coordinate on the superlens structure, f is the focal length of the superlens structure, lambda b Blue wavelength, 488nm, lambda in this example g The green wavelength is 532nm, lambda r In this embodiment, the red wavelength is 633nm, and r is the distance between each nanostructure unit in the nanostructure unit array and the center of the superlens.
The RGB achromatic superlens structure based on the spatial division multiplexing geometric phase principle provided by the embodiment can realize phase change by adjusting the direction of the nanostructure unit. The section of the nanostructure unit is a nanopore satisfying the principle of geometric phase, such as a rectangular nanopillar or rectangular nanopore, an elliptic nanopillar or elliptic nanopore, etc.
In the RGB achromatic superlens structure based on the principle of spatial division multiplexing geometric phase provided in the present embodiment, the support substrate may be made of a dielectric material, for example, si, gaAs, transparent glass, quartz glass, sapphire, and the like.
In the RGB achromatic superlens structure based on the principle of spatial division multiplexing geometric phase provided in this embodiment, the material adopted by the nano-pillars in the superlens structure material layer or the external material of the nano-holes may adopt a visible light material, and the visible light material includes a high refractive index dielectric material, a high dielectric constant visible light band dielectric material or a semiconductor material. Alternatively, the high refractive index dielectric material is Si, siN, siO 2 、HfO 2 、a-Si、TiO 2 Or GaN.
In the RGB achromatic super-lens structure based on the spatial division multiplexing geometric phase principle, the nano-structure units are nano-pillars, the section of each nano-pillar is rectangular SiN nano-pillars, as shown in fig. 1, three kinds of nano-structure unit arrays based on the spatial division multiplexing geometric phase principle, namely, a first nano-structure unit array 1, a second nano-structure unit array 2 and a third nano-structure unit array 3, are distributed on the super-lens structure material layer, and focal lengths or focal points of the three kinds of nano-structure unit arrays are consistent, namely, focal lengths f of emergent blue light 11, emergent green light 12 and emergent red light 13 are all located on a focusing plane 14, so that achromatic focusing on RGB incident light 9 can be realized. In fig. 1, reference numeral 4 is an insulating layer, such as alumina; reference numeral 5 is a layer of unetched superlens structure material, such as silicon nitride.
In the RGB achromatic super lens structure based on the spatial division multiplexing geometric phase principle provided in this embodiment, the first nanostructure cell array 1, the second nanostructure cell array 2, and the third nanostructure cell array 3 may adopt cell structures with the same structural parameters, or may adopt cell structures with different structural parameters. In this embodiment, the blue light focusing region 6 in the RGB achromatic super lens is composed of rectangular nano-pillars with a length l1=220 nm, a width w1=140 nm, and a height h=400 nm, and the phase changes with the rotation angle θ as shown in fig. 3 a. The green focusing region 7 in the RGB achromatic superlens consists of rectangular nanopillars rotated to a length l1=250 nm, a width w1=140 nm, and a height h=400 nm, and the phase of the rectangular nanopillars varies with the rotation angle θ as shown in fig. 3 b. The red light focusing region 8 in the RGB achromatic superlens consists of a rectangular nanopillar rotating with a length l1=240 nm, a width w1=110 nm and a height h=400 nm, and the phase of the rectangular nanopillar varies with the rotation angle θ as shown in fig. 3 c.
In this embodiment, the phase formula (i.e. formula 1) that should be satisfied by the RGB achromatic superlens structure based on the spatial division multiplexing geometric phase principle is corresponding to the phase shown in fig. 3 a-3 c and the rotation angle of the silicon nitride column unit, the ideal phase is matched with the actual phase that can be provided by the silicon nitride column unit through data processing software such as matlab, and the position coordinate and rotation angle of the center of each nano column unit structure on the supersurface layer structure in the RGB achromatic superlens structure based on the spatial division multiplexing geometric phase principle can be further determined through the phase and rotation angle corresponding relation (shown in fig. 3 a-3 c) of the silicon nitride column unit, so as to complete the arrangement of the RGB achromatic superlens structure based on the spatial division multiplexing geometric phase principle as shown in fig. 1.
According to the simulation analysis of the theoretical design, the three-region three-wavelength focused focal spot is shown in fig. 4, wherein the white dotted line is the design focal length of the superlens, that is, z=62 μm, and the focal spots are all near the design focal length under the incidence of blue light 488nm, green light 532nm and red light 633nm, and the simulation result shows that the P-B phase principle superlens can realize RGB achromatic color imaging.
Therefore, according to the RGB achromatic superlens structure based on the space partition multiplexing geometric phase principle, three nanostructure unit arrays based on the space partition multiplexing and meeting the geometric phase principle are distributed on the superlens structure material layer, the focal length or focal point of the three nanostructure unit arrays is consistent through space partition design, achromatic focusing on an incident light beam is further achieved, the advantages of simple process, simple design and benefit for large-area manufacturing are achieved, and the problems that an existing achromatic superlens structure is complex, process difficulty is large and large-area implementation is difficult are solved.
Another aspect of the present disclosure provides an electronic device comprising the RGB achromatic superlens structure based on the principle of spatially-partitioned multiplexing geometric phase. The electronic device can be imaging electronic devices, display electronic devices and the like in the fields of digital imaging systems, virtual reality display and high-resolution microscopes, particularly can be imaging or display devices such as cameras, microscopes, telescopes and VR/AR, has a large-view-field high-quality imaging effect, and simultaneously has integrated, miniaturized, light-weighted and stable structural performance.
Further, the RGB achromatic superlens structure based on the space division multiplexing geometric phase principle according to the embodiment of the disclosure has the advantages of simple process, simple design and large-area manufacture, and can be widely applied to the fields of digital imaging systems, virtual reality display, high-resolution microscopes and the like.
Thus, embodiments of the present disclosure have been described in detail with reference to the accompanying drawings. It should be noted that, in the drawings or the text of the specification, implementations not shown or described are all forms known to those of ordinary skill in the art, and not described in detail. Furthermore, the above definitions of the elements and methods are not limited to the specific structures, shapes or modes mentioned in the embodiments, and may be simply modified or replaced by those of ordinary skill in the art.
Similarly, it should be appreciated that in the above description of exemplary embodiments of the disclosure, various features of the disclosure are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various disclosed aspects. However, the disclosed method should not be construed as reflecting the intention that: i.e., the claimed disclosure requires more features than are expressly recited in each claim. Rather, as the following claims reflect, inventive aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this disclosure.
While the foregoing embodiments have been described in some detail for purposes of clarity of understanding, it will be understood that the foregoing embodiments are merely illustrative of the invention and are not intended to limit the invention, and that any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the present disclosure are intended to be included within the scope of the present disclosure.
Claims (11)
1. An RGB achromatic superlens structure based on spatially-partitioned multiplexing geometric phase principle, comprising:
a support substrate;
an isolation layer formed on the support substrate; and
a super lens structure material layer formed on the isolation layer;
wherein, the super-lens structure material layer is distributed with three nanostructure unit arrays based on space partition multiplexing and meeting the geometric phase principle, and the first nanostructure unit array is positioned at the center radius of the super-lens and is R 1 For focusing blue light B in the RGB incident light; the second nanostructure cell array is positioned at the center radius R of the superlens 1 And R is R 2 The circular ring area is used for focusing green light G in the RGB incident light; the third nano-structure unit array is positioned at the center radius R of the super lens 2 And R is R 3 The circular ring area is used for focusing red light R in RGB incident light; wherein R is 1 ＜R 2 ＜R 3 And the focal lengths or focuses of the first to third nanostructure cell arrays are consistent, so that achromatic focusing on an incident light beam can be realized.
2. The RGB achromatic superlens structure based on the principle of spatially-partitioned multiplexing geometric phase according to claim 1, wherein the phase distribution of the first to third nanostructure cell arrays satisfies the following condition:
wherein,the phase of the super lens structure comprises a first area phase, a second area phase and a third area phase, wherein the first area phase is the center radius of the super lens is R 1 The blue light phase of the circular region of (2), the second region phase, i.e. the center radius of the superlens is R 1 And R is R 2 Green light phase of the ring area in between, and the third area phase, namely the center radius of the super lens, is R 2 And R is R 3 Circle in betweenRed phase of the ring region; (x, y) is the position coordinate on the superlens structure, f is the focal length of the superlens structure, lambda b Is blue wavelength lambda g At green wavelength lambda r And r is the distance from each nanostructure unit in the nanostructure unit array to the center of the superlens.
3. The RGB achromatic superlens structure based on the principle of spatially-partitioned multiplexing geometric phase according to claim 1, wherein the nanostructure elements in the first to third nanostructure element arrays have a cross section of at least one of rectangular nanopillars, elliptical nanopillars, rectangular nanopores, or elliptical nanopores.
4. The RGB achromatic superlens structure based on the principle of spatial-division multiplexing geometric phase according to claim 3, wherein the material used for the nano-pillars or the external material of the nano-holes in the nano-structural units is a visible light material, including a high refractive index dielectric material, a high dielectric constant visible light band dielectric material or a semiconductor material.
5. The RGB achromatic superlens structure based on the spatially-partitioned multiplexing geometric phase principle according to claim 4, wherein the high-refractive-index dielectric material adopts Si, siN, siO 2 、HfO 2 、a-Si、TiO 2 Or GaN.
6. The RGB achromatic superlens structure based on the principle of spatially-partitioned multiplexing geometric phase according to claim 3, wherein the nanostructure cells in the first to third nanostructure cell arrays are the same or different in shape or size, and the achromatic focusing is achieved by changing the geometric phase principle of the nanostructure cell phase by changing the direction of the nanopillars or nanopores.
7. The RGB achromatic superlens structure based on the spatially-partitioned-multiplexing geometric phase principle according to claim 1, wherein the nanostructure elements in the first to third nanostructure element arrays modulate the phase of incident light by satisfying the geometric phase principle of the respective phase rotation directions, so that the focal length or focus is uniform, thereby achieving achromatic focusing of the incident light beam.
8. The RGB achromatic superlens structure based on the principle of spatially-partitioned multiplexing geometric phase according to claim 1, wherein the support substrate system is made of dielectric material including Si, gaAs, transparent glass, quartz glass, or sapphire.
9. The RGB achromatic superlens structure based on the principle of spatially-partitioned multiplexed geometric phase according to claim 1, wherein the barrier layer is alumina, gallium nitride, hafnium oxide or titanium dioxide.
10. An electronic device comprising an RGB achromatic superlens structure based on the principle of spatially-partitioned multiplexed geometric phase according to any one of claims 1-9.
11. Use of an RGB achromatic superlens structure based on spatially-partitioned multiplexed geometric phase principles according to any one of claims 1-9 in digital imaging systems, virtual reality displays, and high resolution microscopes.
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