CN116243407A - Superlens structure and electronic equipment - Google Patents
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- CN116243407A CN116243407A CN202310142493.1A CN202310142493A CN116243407A CN 116243407 A CN116243407 A CN 116243407A CN 202310142493 A CN202310142493 A CN 202310142493A CN 116243407 A CN116243407 A CN 116243407A
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Abstract
The present disclosure provides a superlens structure and an electronic device. Wherein the superlens structure comprises a first nanostructure layer, a second nanostructure layer, and a third nanostructure layer. The first nanostructure layer is used for receiving an incident light beam, wherein the incident light beam comprises a normal incident light beam and an oblique incident light beam; the second nanostructure layer is positioned on the first nanostructure layer and is used for receiving the incident light beam and realizing achromatism on the incident light beam; and a third nanostructure layer is positioned on the second nanostructure layer for achieving focusing of the achromatized beam. Based on the three-layer large-view-field achromatic superlens structure, the problem that the existing superlens cannot realize large-view-field and broadband imaging at the same time can be solved, and the high-performance large-view-field broadband achromatic effect can be realized.
Description
Technical Field
The disclosure relates to the technical field of micro-nano optics, in particular to a superlens structure and electronic equipment.
Background
By the 21 st century, optical technology has been rapidly developed, and integration, miniaturization and light weight of optical systems have become the most urgent demands at present, and the demands can be realized by the existing optical design technology and micro-nano processing technology. The super surface is a two-dimensional planar structure formed by sub-wavelength units, electromagnetic waves interact with the sub-wavelength units on the super surface, so that the regulation and control of amplitude, phase, polarization and wavelength are generated, the super surface has unprecedented advantages in the aspect of light wave control, and the integration, miniaturization and light weight of an optical system can be met. While existing superlenses have been studied to achieve good focusing, in practice superlenses that can image over a large field of view are more attractive and highly desirable. The imaging view field determines the space range of the super surface for acquiring electromagnetic information, and in an optical wave band, most of the super surfaces mainly carry out electromagnetic modulation on light waves with small incidence angles, so that the imaging range of the super surface is severely limited. In the existing research, the research on the large-field imaging technology based on the super surface is less, and the starting is relatively late. At present, in the application research of most medium type large-view-field cascading super-surface, the working wavelength is generally a single frequency point, and the large-view-field imaging requirement in a certain bandwidth range cannot be met. Therefore, the incident light with a large field of view is modulated, corresponding aberration is corrected, and finally the purpose of focusing is achieved at different longitudinal positions of the same focal plane.
The presence of chromatic aberration in imaging devices has also been a major problem for researchers, and how to achieve color imaging in display applications is critical. Until recently, achromatic imaging of superlenses has not been achieved by special means, such as achromatic superlenses designed with dense vertical superposition of independent supersurfaces, which can theoretically achieve color imaging using three different metals Ag, au, al as phase modulation units of the three independent supersurfaces; in addition, there is another superlens based on spatial multiplexing light modulation technology. However, these achromatic superlenses are designed for discrete wavelengths and do not achieve broadband achromatism.
Currently, the research of superlenses is mainly focused on two aspects of researching how to realize broadband achromatism or how to realize large-field imaging. In practical application, although both are of critical importance, it is difficult to achieve the compatibility, so that the study on the achromatic superlens capable of simultaneously realizing the wide-field and broadband imaging has important scientific significance and practical value.
Disclosure of Invention
First, the technical problem to be solved
In order to solve at least one of the above technical problems in the prior art, the present disclosure provides a superlens structure and an electronic device, so as to propose a three-layer large-field achromatic lens based on a cascading and stacking combined full-visible-light-band medium super surface based on a superlens phase modulation principle.
(II) technical scheme
An aspect of the present disclosure provides a superlens structure, including a first nanostructure layer, a second nanostructure layer, and a third nanostructure layer. The first nanostructure layer is used for receiving an incident light beam, wherein the incident light beam comprises a normal incident light beam and an oblique incident light beam; the second nanostructure layer is positioned on the first nanostructure layer and is used for receiving the incident light beam and realizing achromatism on the incident light beam; and a third nanostructure layer is positioned on the second nanostructure layer for achieving focusing of the achromatized beam.
According to an embodiment of the disclosure, the first nanostructure layer comprises a first nanostructure array comprising a plurality of first nanostructure units distributed in a first phase corresponding to a surface of the second nanostructure layer, a material of each of the plurality of first nanostructure units being a visible light material.
According to an embodiment of the present disclosure, the second nanostructure layer includes a first isolation layer and a substrate. The first isolation layer is located between the substrate and the first nanostructure layer and on a surface of the substrate facing the first nanostructure layer.
According to an embodiment of the present disclosure, the second nanostructure layer further comprises a second isolation layer, a filling structure layer, and a third isolation layer. The second isolation layer is positioned on the surface of the substrate facing away from the first nanostructure layer; the filling structure layer is positioned on the surface of the second isolation layer facing away from the substrate; the third isolation layer is positioned on the surface of the filling structure layer facing away from the second isolation layer.
According to an embodiment of the disclosure, the filling structure layer includes a filler, the filler material is a low dielectric constant material, and the first, second and third isolation layer materials are low dielectric constant materials.
According to an embodiment of the present disclosure, the filling structure layer further comprises a second nanostructure array. The second nanostructure array comprises a plurality of second nanostructure units distributed in a second phase corresponding to the surface of the second isolation layer, and the material of each second nanostructure unit of the plurality of second nanostructure units is a visible light material; the second nanostructure array and the first nanostructure array form a stacked double-layer super surface.
According to an embodiment of the present disclosure, the third nanostructure layer comprises a third nanostructure array. The third nanostructure array comprises a plurality of third nanostructure units distributed in a third phase on the surface of a third isolation layer corresponding to the second nanostructure layer, and the material of each third nanostructure unit of the plurality of third nanostructure units is a visible light material.
According to the embodiment of the disclosure, the visible light material is a visible light wave band dielectric material or a semiconductor material with a high dielectric constant, and the dielectric constant ratio between the preparation material of the substrate of the second nanostructure layer and the visible light material is 1:1.2-1:3.5.
According to an embodiment of the present disclosure, the cross-sectional shape of the first nanostructure unit of the first nanostructure layer, the second nanostructure unit of the second nanostructure layer, and the third nanostructure unit of the third nanostructure layer comprises one of square, rectangular, circular, and elliptical.
Another aspect of the present disclosure provides an electronic device, including the above-described superlens structure.
(III) beneficial effects
The present disclosure provides a superlens structure and an electronic device. Wherein the superlens structure comprises a first nanostructure layer, a second nanostructure layer, and a third nanostructure layer. The first nanostructure layer is used for receiving an incident light beam, wherein the incident light beam comprises a normal incident light beam and an oblique incident light beam; the second nanostructure layer is positioned on the first nanostructure layer and is used for receiving the incident light beam and realizing achromatism on the incident light beam; and a third nanostructure layer is positioned on the second nanostructure layer for achieving focusing of the achromatized beam. Based on the three-layer large-view-field achromatic superlens structure, the problem that the existing superlens cannot realize large-view-field and broadband imaging at the same time can be solved, and the high-performance large-view-field broadband achromatic effect can be realized.
Drawings
FIG. 1 schematically illustrates a cross-sectional view of a structural composition of a superlens structure according to an embodiment of the present disclosure;
fig. 2 schematically illustrates a bottom view of an array distribution of first nanostructure elements 110 (cylinders) of the first nanostructure layer 101, according to an embodiment of the disclosure.
Fig. 3 schematically illustrates an array distribution top view of second nanostructure cells 242 (cylinders) of second nanostructure layer 102, in accordance with an embodiment of the present disclosure.
Fig. 4 schematically illustrates an array distribution top view of second nanostructure cells 310 (rectangular posts) of the third nanostructure layer 103, according to an embodiment of the disclosure. and
Fig. 5 schematically illustrates an operational schematic of a superlens structure according to an embodiment of the present disclosure.
Detailed Description
The present invention will be further described in detail below with reference to specific embodiments and with reference to the accompanying drawings, in order to make the objects, technical solutions and advantages of the present invention more apparent.
It should be noted that, in the drawings or the text of the specification, implementations not shown or described are all forms known to those of ordinary skill in the art, and not described in detail. Furthermore, the above definitions of the elements and methods are not limited to the specific structures, shapes or modes mentioned in the embodiments, and may be simply modified or replaced by those of ordinary skill in the art.
It should be further noted that, the directional terms mentioned in the embodiments, such as "upper", "lower", "front", "rear", "left", "right", etc., are only referring to the directions of the drawings, and are not intended to limit the scope of the present disclosure. Like elements are denoted by like or similar reference numerals throughout the drawings. Conventional structures or constructions will be omitted when they may cause confusion in understanding the present disclosure.
And the shapes and dimensions of the various elements in the drawings do not reflect actual sizes and proportions, but merely illustrate the contents of the embodiments of the present disclosure. In addition, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.
Furthermore, the word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
The use of ordinal numbers such as "first," "second," "third," etc., in the description and in the claims to modify a corresponding element does not by itself connote any ordinal number of elements and does not by itself indicate the order in which a particular element is joined to another element or the order in which it is manufactured, but rather the use of ordinal numbers merely serves to distinguish one element having a particular name from another element having a same name.
Those skilled in the art will appreciate that the modules in the apparatus of the embodiments may be adaptively changed and disposed in one or more apparatuses different from the embodiments. The modules or units or components of the embodiments may be combined into one module or unit or component and, in addition, they may be divided into a plurality of sub-modules or sub-units or sub-components. Any combination of all features disclosed in this specification (including any accompanying claims, abstract and drawings), and all of the processes or units of any method or apparatus so disclosed, may be used in combination, except insofar as at least some of such features and/or processes or units are mutually exclusive. Each feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. Also, in the unit claims enumerating several means, several of these means may be embodied by one and the same item of hardware.
Similarly, it should be appreciated that in the foregoing description of exemplary embodiments of the disclosure, various features of the disclosure are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various disclosed aspects. However, the disclosed method should not be construed as reflecting the intention that: i.e., the claimed disclosure requires more features than are expressly recited in each claim. Rather, as the following claims reflect, inventive aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this disclosure.
In order to solve at least one of the above technical problems in the prior art, the present disclosure provides a superlens structure and an electronic device, so as to propose a three-layer large-field achromatic lens based on a cascading and stacking combined full-visible-light-band medium super surface based on a superlens phase modulation principle.
As shown in fig. 1-5, an aspect of the present disclosure provides a superlens structure 100, including a first nanostructure layer 101, a second nanostructure layer 102, and a third nanostructure layer 103.
The first nanostructure layer 101 is configured to receive an incident light beam, wherein the incident light beam includes a normal incident light beam S1 and an oblique incident light beam S2;
the second nanostructure layer 102 is located on the first nanostructure layer 101, and is configured to receive an incident light beam, and implement achromatism on the incident light beam;
a third nanostructure layer 103 is located on the second nanostructure layer 102 for achieving focusing of the achromatized beam.
The first nanostructure layer 101, the second nanostructure layer 102, and the third nanostructure layer 103 may all be arranged in the same or similar array of nanostructure elements, such as nano columns, nano spheres, nano grooves, nano sheets, or nano holes, etc., on the surface, and the present invention is not particularly limited. The super lens structure 100 having a super surface design can be constructed using the first, second and third nanostructure layers 101, 102 and 103 described above.
The first nanostructure layer 101 is mainly used for guiding an incident light beam into the super lens structure 100, wherein the incident light beam can be a light beam incident to the first nanostructure layer 101 in various directions, so that light beam processing at various incident angles can be satisfied, and a large-field imaging effect is realized.
The second nanostructure layer 102 may perform an achromatism treatment on the incident light beam guided by the first nanostructure layer 101, thereby further realizing a broadband achromatism effect on the basis of the first nanostructure layer 101. Wherein the first nanostructure layer 101 and the second nanostructure layer 102 may be cascaded to form a bi-layer stacked supersurface.
The third nanostructure layer 103 focuses the light beam after the achromatism treatment of the second nanostructure layer 102, so as to achieve wide-field broadband achromatism of the light beam. Wherein the above-mentioned two-layer stacked supersurfaces and the third nanostructure layer 103 are cascaded to form a three-layer stacked supersurface. Therefore, a three-layer large-field achromatic superlens based on the whole visible light wave band medium super surface combining cascading and stacking can be constructed.
The above-described superlens structure of the embodiments of the present disclosure may select a high refractive index low loss material as the nanostructure elements, i.e., the first nanostructure element of the first nanostructure layer 101, the second nanostructure element of the second nanostructure layer 102, and the second nanostructure element of the third nanostructure layer 103. In particular, higher polarization conversion efficiency can be achieved by adjusting the size, shape, etc. of the nanostructure elements. The nanostructure unit with specific parameters is used for forming the whole super-surface array, so that the wide-field broadband achromatism function can be realized. In the embodiment of the disclosure, the cross-sectional shape of the nanostructure unit may be circular, elliptical, rectangular, or the like, and may be specifically designed according to the actual functional effect.
The super-lens structure of the embodiment of the disclosure can be used as a three-layer large-view-field achromatic lens based on the super surface of the medium in the full visible light wave band combined by cascading and stacking, so that the technical problem that the large-view-field and broadband achromatism cannot be realized in a single super-lens in the prior art is effectively solved, and the high-performance large-view-field broadband achromatism effect can be realized.
As shown in fig. 1-5, according to an embodiment of the present disclosure, the first nanostructure layer 101 includes a first nanostructure array including a plurality of first nanostructure cells 110 distributed in a first phase corresponding to the surface of the second nanostructure layer 102, and the material of each first nanostructure cell 110 of the plurality of first nanostructure cells 110 is a visible light material.
One wavelength lambda is selected in the visible light band as the center wavelength of the operation of the large field achromatic superlens structure of the disclosed embodiment, and the phase distribution of the superlens can be defined according to the preset lens focal length f.
To meet the above-described requirement of a large field of view, the arrangement of the first nanostructure array of the first nanostructure layer 101 in the three-layer structure satisfies the first phase
The expression is as follows:
wherein, the liquid crystal display device comprises a liquid crystal display device,
a large field of view phase distributed for the first nanostructure array; m is the diffraction order; a is that i Is a correlation factor; r is the actual annulus radius; r is a binary phase planeIs included in the specification.
As shown in fig. 1-5, the second nanostructure layer 102 includes a first isolation layer 210 and a substrate 220, according to an embodiment of the present disclosure.
The first isolation layer 210 is located between the substrate 220 and the first nanostructure layer 101, and on a surface of the substrate 220 facing the first nanostructure layer 101.
The substrate 220 may be made of a dielectric material having a dielectric constant in a visible light band, such as quartz glass, bf33 glass, sapphire substrate, 7740 glass, and the like. The base 220 is mainly used as a support substrate for the superlens structure.
The first isolation layer 210 is mainly used for protecting the surface of the substrate 220 during the preparation process of the first nanostructure layer 101.
As shown in fig. 1-5, the second nanostructure layer 102 further includes a second isolation layer 230, a filling structure layer 240, and a third isolation layer 250, according to an embodiment of the present disclosure.
The second isolation layer 230 is located on the surface of the substrate 220 facing away from the first nanostructure layer 101;
the filling structure layer 240 is located on the surface of the second isolation layer 230 facing away from the substrate 220;
the third isolation layer 250 is located on the surface of the filling structure layer 240 facing away from the second isolation layer 230.
The second isolation layer 230 is mainly used for protecting the surface of the substrate 220 facing away from the first nanostructure layer 101 during the preparation process of the filling structure layer 240.
The filling structure layer 240 may then serve as a main functional structure layer of the second nanostructure layer 102, for filling the second nanostructure elements, receiving the light beam incident through the first nanostructure layer 101 and performing an achromatic function.
The third isolation layer 250 is mainly used for protecting the surface of the filling structure layer 240 facing away from the second isolation layer 230 during the preparation process of the third nanostructure layer 103.
As shown in fig. 1-5, the filling structure layer 240 includes a filling 241, the filling 241 is made of a low dielectric constant material, and the first isolation layer 210, the second isolation layer 230 and the third isolation layer 250 are made of a low dielectric constant material according to an embodiment of the present disclosure.
The preparation material of the filler 241 can be a visible light low dielectric constant material, wherein the low dielectric constant material can be SU8 photoresist, HSQ photoresist, AZ photoresist, glass or fluoride, and the like, so that the preparation material has good optical performance and good structural stability, and can realize a simpler low-cost preparation process.
In addition, the preparation materials of the first isolation layer 210, the second isolation layer 230 and the third isolation layer 250 may be visible light dielectric constant isolation materials, wherein the low dielectric constant materials may be alumina, gallium nitride, hafnium dioxide or titanium dioxide, so that good optical performance is achieved, meanwhile, good structural stability is achieved, protection of corresponding isolation structures in the preparation process can be achieved under the condition of meeting low loss of light beams, and meanwhile, a simpler low-cost preparation process can be achieved.
As shown in fig. 1-5, in accordance with an embodiment of the present disclosure, the fill structure layer 240 further comprises a second nanostructure array.
The second nanostructure array includes a plurality of second nanostructure elements 242 distributed in a second phase corresponding to the surface of the second isolation layer 230, and the material of each second nanostructure element 242 of the plurality of second nanostructure elements 242 is a visible light material;
the plurality of second nanostructure units 242 of the second nanostructure array are located in the filler 241 of the filling structure layer 240, and the second nanostructure array and the first nanostructure array form a stacked double-layer super surface.
The second nanostructure array of the second nanostructure layer 240 may be formed on the surface of the second isolation layer 230 first, and then the surface of the second isolation layer 230 having the second nanostructure array is filled with a filler to form a filled structure layer having the second nanostructure array.
Wherein the arrangement of the second nanostructure array satisfies a second phase for satisfying a phase dispersion required for the achromatic superlens
The expression is as follows:
wherein, the liquid crystal display device comprises a liquid crystal display device,
phase dispersion for the second nanostructure element; (x, y) is the structural position coordinates of the second nanostructure unit with the center of the structure as the origin; lambda (lambda) max Is the achromatic maximum wavelength; f is the focal length of the entire lens; lambda is the incident wavelength; />
To compensate for phase. Thus, the second nanostructure layer 102 and the first nanostructure layer 101 of the disclosed embodiments may be made to have different phase distributions, forming a stacked bilayer supersurface with respect to the substrate 220.
In the above-described position coordinates, λ, using the center of the structure as the origin and (x, y) as the structure max Is a second phase composed of a maximum wavelength for decoloring, f is the focal length of the whole lens, and lambda is the incident wavelength
Since the dispersion provided by the second nanostructure array structure is negative, an additional compensating phase +.>
The compensation phase->
Since it is only wavelength dependent and position independent, the positive dispersion required for achromatism in the embodiments of the present disclosure can be satisfied.
As shown in fig. 1-5, the third nanostructure layer 103 comprises a third nanostructure array, according to an embodiment of the disclosure.
The third nanostructure array includes a plurality of third nanostructure elements 310 distributed in a third phase on the surface of the third isolation layer 250 corresponding to the second nanostructure layer 102, and the material of each third nanostructure element 310 of the plurality of third nanostructure elements 310 is a visible light material.
To meet the focusing requirements of the third nanostructure layer 103, the third nanostructure array of the achromatic superlens is arranged to meet the third phase position required
The expression is as follows:
wherein, the liquid crystal display device comprises a liquid crystal display device,
a focal phase for a third nanostructure array; with the center of the structure as the origin, (x, y) as the position coordinates on the structure, lambda max F is the focal length of the entire lens, which is the maximum wavelength.
Thus, by means of the first nanostructure array, the second nanostructure array and the third nanostructure array which respectively adopt different phase distributions, a stacked cascade three-layer super surface is formed, so that the super-lens structure of the embodiment of the disclosure realizes large-field achromatic focusing imaging.
Thus, based on the above, the superlens structure 100 may be formed by covering the first surface of the substrate 220 with two layers of the dielectric constant material in the visible light range and covering the second surface with four layers of the dielectric constant material in the visible light range. Wherein the first nanostructure array of the first nanostructure layer 101 may be distributed on the surface of the first isolation layer 210 on the first surface of the substrate 220; the second nanostructure array of the second nanostructure layer 102 may be distributed on the surface of the second isolation layer 230 on the second surface of the substrate 220, and the filling structure layer 240 is formed based on the second nanostructure array being directly filled with a dielectric constant material in the visible light band; the third nanostructure array of the third nanostructure layer 103 may be distributed on the surface of the third isolation layer 250 on the surface of the filled structure layer 240 filled with the dielectric constant material. The second nanostructure array and the third nanostructure array can adopt different phase distributions to form a stacked double-layer super surface, and the different phase distributions of the first nanostructure array, the second nanostructure array and the third nanostructure array can form a cascaded three-layer super surface of the stacked double-layer nanostructure.
As shown in fig. 1 to 5, according to the embodiment of the present disclosure, the visible light material is a high-dielectric-constant visible light band dielectric material or semiconductor material, and the dielectric constant ratio between the preparation material of the substrate of the second nanostructure layer and the visible light material satisfies 1:1.2 to 1:3.5.
The first nanostructure unit 110, the second nanostructure unit 242, and the third nanostructure unit 310 may be made of the same material or different materials, and the preparation materials thereof may be high dielectric constant, low-loss visible light dielectric material or semiconductor material, such as gallium nitride, hafnium oxide, titanium dioxide, silicon nitride, or the like. The ratio of the dielectric constants of the materials of the substrate 220 and one of the first, second and third nanostructure units 110, 242 and 310 satisfies 1:1.2 to 1:3.5, thereby achieving abnormal refraction of the super structure.
As shown in fig. 2-4, the first nanostructure elements 110, the second nanostructure elements 242, and the third nanostructure elements 310 may be arranged in a quasi-periodic or periodic arrangement, respectively, to ensure that the first phase is satisfied
Second phase->
And a third phase->
Is effective in achieving an excellent large field achromatic focusing effect.
In one embodiment of the present disclosure, bf33 glass substrate may be used as the base, si 3 N 4 Preparation of materials for nanostructure units of the respective nanostructure layers, al 2 O 3 The film material is the preparation material of each isolation layer, and the filling material of the filling material can be HSQ photoresist to form the three-layer large-view-field achromatic superlens structure in the visible light wave band.
As shown in fig. 1-5, the cross-sectional shape of the first nanostructure cells 110 of the first nanostructure layer 101, the second nanostructure cells 242 of the second nanostructure layer 102, and the third nanostructure cells 310 of the third nanostructure layer 103, according to an embodiment of the present disclosure, includes one of square, rectangular, circular, and elliptical.
As shown in fig. 1-5, for a first nanostructure array of the same first nanostructure layer 101, different first nanostructure elements 110 at different distribution locations may have different structural dimensions, and may be primarily embodied as corresponding differences in width or thickness; correspondingly, the different second nanostructure elements 242 of the different distribution positions of the second nanostructure layer 102 may also have different structural dimensions, and the different third nanostructure elements 310 of the different distribution positions of the third nanostructure layer 103 may also have different structural dimensions, which is not particularly limited.
Wherein the heights of the first nanostructure elements 110 at different locations of the first nanostructure layer 101 may be kept uniform, and the heights of the second nanostructure elements 242 at different locations of the second nanostructure layer 102 may be kept uniform and the heights of the third nanostructure elements 310 at different locations of the third nanostructure layer 103 may be kept uniform, to facilitate the fabrication of the corresponding structural layers.
In addition, for the first nanostructure unit 110, the second nanostructure unit 242, and the third nanostructure unit 310, the three-dimensional structure of the corresponding nanostructure unit may be a nanopillar structure, and the specific cross-sectional shape may be a square, rectangle, circle, ellipse, or hole-shaped structure, etc., so as to be able to achieve the above-described designs of the corresponding first phase, second phase, and third phase, without being particularly limited thereto. Furthermore, in another embodiment, the second nanostructure elements 242 may also be nanoporous structures formed in the filled structure layer 240, but appear as solid structures from an external perspective. Higher polarization conversion efficiency can be achieved by adjusting the size of the nano-unit structure.
In summary, in the superlens structure of the embodiment of the disclosure, the superlens structure comprises a substrate and three layers of isolation layers, a filling layer and three layers of supersurfaces on the substrate, wherein the first surface of the substrate is covered with two layers of dielectric constant material layers in the visible light wave band, the second surface is covered with four layers of dielectric constant material layers in the visible light wave band, the first nanostructure units are distributed on the surface of the first isolation layer on the first surface of the substrate, the second nanostructure units are distributed on the surface of the second isolation layer on the second surface of the substrate and are filled in the dielectric constant filling material layers in the visible light wave band, the third nanostructure units are distributed on the surface of the third isolation layer on the surface of the filling dielectric constant material layer, so that the three-layer large-view achromatic lens based on the whole visible light wave band dielectric supersurface combined by cascading and stacking is formed,
wherein, as an embodiment of the present disclosure, the cross section of the nanostructure unit (e.g., nanopillar) may be any geometric figure, such as rectangle or ellipse; the substrate is made of low-loss materials with low dielectric constant, such as transparent glass, quartz glass, sapphire and the like; the material of the all-visible light medium super-surface nano structure unit is a visible light low-loss medium material or a semiconductor material with higher dielectric constant, such as gallium nitride, hafnium oxide, titanium dioxide, silicon nitride and the like; the first layer of nano-unit structure is formed by Si with circular or square cross section 3 N 4 Pillars, second layer of nano-unit structure with circular cross section Si 3 N 4 Column, si with rectangular cross section of third-layer nano-unit structure 3 N 4 The columns are thus utilized to form a triple layer large field of view achromat.
According to the above-mentioned superlens structure of the embodiment of the present disclosure, as shown in fig. 5, a piece of visible light large-field achromatic lens with a working center wavelength of 550nm and a bandwidth of 300nm includes two beams of light of normal incident light S1 and oblique incident light S2 along a main axis, after the two beams of light enter the first nanostructure layer 101, the normal incident light S1 is not deflected and is sequentially incident on the first isolation layer 210, the substrate glass substrate 220 and the second isolation layer 230 of the second nanostructure layer 102 according to the conventional optical principle, and simultaneously the oblique incident light S2 is deflected and is sequentially incident on the first isolation layer 210, the substrate glass substrate 220 and the second isolation layer 230 according to the conventional optical principle; then, the two light beams enter the second nanostructure array of the filling structure layer 240 of the second nanostructure layer 102, the normal incident light S1 and the oblique incident light S2 are deflected to achieve achromatism when passing through the second nanostructure array, and then, the two light beams are incident into the filling material 241 and the third isolation layer 250 according to the conventional optical principle; the last two beams of light enter the third nanostructure layer 103, and after deflection, the two beams of light are focused on the focusing plane 104 finally, so that the wide-field achromatic optical function is realized.
Therefore, the above-mentioned superlens structure of the disclosed embodiments solves the problem that the existing superlens cannot realize both large-field and broadband imaging by constructing three layers of large-field achromats, is favorable for realizing high-performance large-field broadband achromats, meets the current requirements for small, light and easy-to-integrate optical devices, is easy to integrate into imaging or display equipment such as cameras, microscopes, telescopes and VR/AR, and reduces the volume while ensuring the image quality.
Another aspect of the present disclosure provides an electronic device, including the above-described superlens structure. The electronic device can be imaging electronic device or display electronic device, in particular imaging or display device such as camera, microscope, telescope, VR/AR, etc., and has large visual field and high quality imaging effect, and simultaneously has small volume and stable structural performance.
The superlens structure and the electronic equipment provided by the embodiment of the disclosure have at least the following beneficial effects:
(1) By constructing three layers of wide-field broadband achromats, a high-performance wide-field broadband achromatic device is realized, and the combination of the device and an integrated optical system is facilitated; in addition, the polarization dependent device can be realized, and the polarization independent device can be realized.
(2) The substrate is a visible light low-dielectric constant dielectric material, and the material of the super-surface structure is a visible light low-loss dielectric material or a semiconductor material with a higher dielectric constant, and the efficiency of the unit structure is higher, so that the super-lens structure has higher optical imaging or display efficiency.
(3) Compared with the defects of the existing achromatic lens, the three-layer large-view-field achromatic superlens structure based on the supersurface structure can be used for designing devices with large numerical aperture, large diameter, large bandwidth and high efficiency, has great significance in solving the required large-view-field and broadband achromatic superlens, and has extremely high scientific research value and commercial utilization value.
Thus, embodiments of the present disclosure have been described in detail with reference to the accompanying drawings.
While the foregoing is directed to embodiments of the present invention, other and further details of the invention may be had by the present invention, it should be understood that the foregoing description is merely illustrative of the present invention and that no limitations are intended to the scope of the invention, except insofar as modifications, equivalents, improvements or modifications are within the spirit and principles of the invention.
Claims (10)
1. A superlens structure, comprising:
a first nanostructure layer for receiving an incident light beam, wherein the incident light beam comprises a normal incidence light beam and an oblique incidence light beam;
the second nanostructure layer is positioned on the first nanostructure layer and is used for receiving the incident light beam and realizing achromatism of the incident light beam; and
and a third nanostructure layer on the second nanostructure layer for focusing the achromatic light beam.
2. The superlens structure of claim 1, wherein the first nanostructure layer comprises:
the first nanostructure array comprises a plurality of first nanostructure units distributed in a first phase corresponding to the surface of the second nanostructure layer, and the material of each first nanostructure unit of the plurality of first nanostructure units is a visible light material.
3. The superlens structure of claim 1, wherein the second nanostructure layer comprises:
a first isolation layer is provided on the first substrate,
a substrate, the first isolation layer being located between the substrate and the first nanostructure layer and on a surface of the substrate facing the first nanostructure layer.
4. The superlens structure of claim 3, wherein the second nanostructure layer further comprises:
a second isolation layer on a surface of the substrate facing away from the first nanostructure layer;
a filling structure layer on a surface of the second isolation layer facing away from the substrate;
and the third isolation layer is positioned on the surface of the filling structure layer facing away from the second isolation layer.
5. The superlens structure of claim 4, wherein the filling structure layer comprises a filler, the filler material is a low dielectric constant material, and the first, second and third isolation layer materials are low dielectric constant materials.
6. The superlens structure of claim 4, wherein the filled structure layer further comprises:
the second nanostructure array comprises a plurality of second nanostructure units distributed in a second phase corresponding to the surface of the second isolation layer, and the material of each second nanostructure unit of the plurality of second nanostructure units is a visible light material;
the second nanostructure array and the first nanostructure array form a stacked double-layer super surface.
7. The superlens structure of claim 1, wherein the third nanostructure layer comprises:
the third nanostructure array comprises a plurality of third nanostructure units distributed in a third phase on the surface of a third isolation layer corresponding to the second nanostructure layer, and the material of each third nanostructure unit of the plurality of third nanostructure units is a visible light material.
8. The superlens structure of claim 2, 6 or 7, wherein the visible light material is a high dielectric constant visible light band dielectric material or a semiconductor material, and the dielectric constant ratio between the preparation material of the substrate of the second nanostructure layer and the visible light material satisfies 1:1.2-1:3.5.
9. The superlens structure of claim 1, wherein the cross-sectional shape of the first nanostructure unit of the first nanostructure layer, the second nanostructure unit of the second nanostructure layer, and the third nanostructure unit of the third nanostructure layer comprises one of square, rectangular, circular, and elliptical.
10. An electronic device comprising the superlens structure of any of claims 1-9.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117148571A (en) * | 2023-10-31 | 2023-12-01 | 武汉二元科技有限公司 | Design method of infrared short wave band achromatic super lens and super lens |
| CN117192790A (en) * | 2023-11-08 | 2023-12-08 | 浙江大学 | Achromatic vortex superlens and optical waveguide optical module for realizing edge enhancement imaging |
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- 2023-02-17 CN CN202310142493.1A patent/CN116243407A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117148571A (en) * | 2023-10-31 | 2023-12-01 | 武汉二元科技有限公司 | Design method of infrared short wave band achromatic super lens and super lens |
| CN117192790A (en) * | 2023-11-08 | 2023-12-08 | 浙江大学 | Achromatic vortex superlens and optical waveguide optical module for realizing edge enhancement imaging |
| CN117192790B (en) * | 2023-11-08 | 2024-04-09 | 浙江大学 | Achromatic vortex superlens and optical waveguide optical module for realizing edge enhancement imaging |
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