CN117192656A - RGB achromatic superlens structure based on space-staggered multiplexing geometric phase principle - Google Patents
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Abstract
The present disclosure provides an RGB achromatic superlens structure based on spatial-interleaved geometric phase principle, comprising: a support substrate; an isolation layer formed on the support substrate; and a super lens structure material layer formed on the isolation layer. The super-lens structure material layer is distributed with super-lens space staggered multiplexing arrays formed by a plurality of space staggered small array units in a periodic arrangement mode, each space staggered small array unit comprises three nano structure unit small arrays which are based on space staggered multiplexing and meet the geometric phase principle, and the focal lengths or focal points of the three nano structure unit small arrays are consistent, so that achromatic focusing on incident light beams can be realized. The invention solves the problems of complex structure, high process difficulty and difficult realization of large area of the traditional achromatic superlens based on the transmission phase principle.
Description
Technical Field
The disclosure relates to the technical field of micro-nano optics, in particular to an RGB achromatic superlens structure based on a space-staggered multiplexing geometric phase principle.
Background
The super surface is a two-dimensional planar structure formed by sub-wavelength units, can realize flexible regulation and control on amplitude, phase, polarization and the like of incident light, has strong light field control capability, can meet the integration, miniaturization and light weight of an optical system, but has the problems that the two-dimensional planar structure overcomes the processing difficulty of a three-dimensional structure of a metamaterial and the like.
In imaging devices, the existence of chromatic aberration causes that the lens cannot focus light with different wavelengths onto the same plane, and thus the phenomena of imaging blur and color distortion occur, which is always a big problem for researchers, so how to eliminate chromatic aberration in display applications to realize color imaging is of great importance.
In recent years, achromatic imaging of superlenses has been achieved by a variety of special means, such as by utilizing degrees of freedom in the vertical direction, by implementing RGB achromatic superlenses by a two-layer supersurface structural design; or the achromatic aggregation of the visible light wave band width is realized by combining a geometric phase (P-B phase) and a transmission phase; or achromatic imaging by spatial partitioning or spatial interlacing, etc. However, the above technical means for implementing achromatic imaging of the superlens are designed based on the transmission phase principle, or the transmission phase principle and the geometric phase principle are combined, so far, no achromatic superlens based on the geometric phase principle alone exists.
At present, the study of the achromatic superlens mainly focuses on the transmission phase principle, the dimension difference of the unit structure of the superlens based on the transmission phase principle is large, the structural dimension change types are many, the achromatic effect can be realized only by adopting a complex structure, and the array structure is difficult to realize a large area due to different etching rates of different dimensions, and the process consistency of the array structure is also difficult to ensure.
The achromatic superlens based on the geometric phase principle has the advantages of simple structure, easy control of the process and large-area manufacture, and in practical application, the simple structure and the easy control of the process are of great importance to the superlens, so that the achromatic superlens based on the geometric phase principle, which is simple in structure and easy to realize in the process, has important scientific significance and practical value, and has application prospect in the fields of digital imaging systems, virtual reality display, high-resolution microscopes and the like.
Disclosure of Invention
First, the technical problem to be solved
In view of the above, a main object of the present disclosure is to provide an RGB achromatic superlens structure based on a spatial-interleaved geometric phase principle, so as to solve the problems of complex structure, high process difficulty and difficulty in realizing a large area of the existing achromatic superlens based on a transmission phase principle.
(II) technical scheme
According to one aspect of the present disclosure, there is provided an RGB achromatic superlens structure based on spatial-interleaved geometric phase principles, comprising: a support substrate; an isolation layer formed on the support substrate; and a superlens structure material layer formed on the isolation layer; the super-lens structure material layer is distributed with super-lens space staggered multiplexing arrays formed by a plurality of space staggered small array units in a periodic arrangement mode, each space staggered small array unit comprises three nano structure unit small arrays based on space staggered multiplexing and meeting a geometric phase principle, and the three nano structure unit small arrays based on space staggered multiplexing and meeting the geometric phase principle have the same focal length or focal point, so that achromatic focusing on incident light beams can be realized.
In the above scheme, among the three nanostructure cell arrays based on spatial interleaving multiplexing and satisfying the geometric phase principle, the first nanostructure cell array satisfies the geometric phase principle, and is used for focusing blue light B in RGB incident light, and focusing the blue light B to a designed focal length position; the second nano-structure unit small array also meets the geometric phase principle, and is used for focusing green light G in RGB incident light and focusing the green light G to a designed focal length position; the third nano-structure unit small array also meets the geometric phase principle, and is used for focusing red light R in RGB incident light and focusing the red light R to a designed focal length position; when the RGB incident light enters the RGB achromatic super-lens structure, the focal lengths f of emergent focal spots of the three nanostructure unit small arrays are the same, so that the RGB achromatic function is realized, and the three nanostructure unit small arrays are arranged in a staggered manner in the space staggered small array units, so that the achromatic function can be realized in each space staggered small array unit of the RGB achromatic super-lens structure.
In the above scheme, the phase distribution of the RGB achromatic superlens structure satisfies the following conditions:
wherein,for the phase of the RGB achromatic superlens structure, i.e. the phase of a superlens spatially interleaved multiplexed array consisting of a plurality of spatially interleaved mini-array elements in a periodic arrangement, (x) b ，y b ) For the first nanostructure cell small array, (x) b0 ，y b0 ) For the initial position coordinates, P, of the first nanostructure cell array b For the period of the first nanostructure cell small array, n b The values are 0, ±1, ±2, ±3. (x) g ，y g ) Position coordinates of a small array of nanostructure elements of the second type, (x g0 ，y g0 ) For the initial position coordinates, P, of the second nanostructure cell array g For the period of the second nanostructure cell small array, n g The values are 0, ±1, ±2, ±3. (x) r ，y r ) Is of a third kind of nano structurePosition coordinates of cell small array, (x r0 ，y r0 ) For the initial position coordinates, P, of the third nanostructure cell array r For the period of the third nanostructure cell array, n r The values are 0, ±1, ±2, ±3. f is the focal length, lambda of the RGB achromatic superlens structure b Is blue wavelength lambda g Is of green wavelength lambda r And r is the distance from each nanostructure unit in the three nanostructure unit small arrays to the center of the superlens for the red light wavelength.
In the above scheme, the first nanostructure unit array, the second nanostructure unit array and the third nanostructure unit array form the spatially staggered small array units, and then the plurality of spatially staggered small array units form the superlens spatially staggered multiplexing array in a periodic arrangement mode, the spatially staggered small array units and the superlens spatially staggered multiplexing array all satisfy the geometric phase principle, and the internal structures of the spatially staggered small array units satisfy the same focal length f, and the spatially staggered small array units at different positions also satisfy the same focal length f, so that the focal lengths f of three RGB wavelengths of the superlens spatially staggered multiplexing array formed by the spatially staggered small array units are also the same, and therefore the achromatic focusing of the RGB achromatic superlens structure can be realized.
In the above-mentioned scheme, in the first nanostructure cell array, the second nanostructure cell array, and the third nanostructure cell array, the cross section of each nanostructure cell is at least one of a rectangular nanorod, an oval nanorod, a rectangular nanopore, or an oval nanopore.
In the above scheme, the material adopted by the nano-pillars or the external material of the nano-holes in each nano-structure unit is a visible light material, and the visible light material comprises a high refractive index dielectric material, a high dielectric constant visible light wave band dielectric material or a semiconductor material. Optionally, the high refractive index medium material adopts Si, siN, siO 2 、HfO 2 、a-Si、TiO 2 Or GaN.
In the above scheme, the nanostructure units in the first nanostructure unit array, the second nanostructure unit array and the third nanostructure unit array may have the same or different shapes or sizes, and the achromatic focusing is realized by changing the geometric phase principle of the nanostructure unit phase by changing the direction of the nanopillar or nanopore.
In the above scheme, the nanostructure units in the first nanostructure unit array, the second nanostructure unit array and the third nanostructure unit array modulate the phase of the incident light by satisfying the geometric phase principle of the rotation direction of the respective phases, so that the focal length or the focal point is consistent, and achromatic focusing on the incident light beam is realized.
In the above scheme, the supporting substrate is made of dielectric materials including Si, gaAs, transparent glass, quartz glass, or sapphire.
In the above scheme, the isolation layer is made of aluminum oxide, gallium nitride, hafnium oxide or titanium dioxide.
According to another aspect of the present disclosure, an electronic device is provided, comprising the described RGB achromatic superlens structure based on the principle of spatially interleaved geometric phase.
According to yet another aspect of the present disclosure, there is provided the use of the described RGB achromatic superlens structure based on the principle of spatially interleaved geometric phase in digital imaging systems, virtual reality displays and high resolution microscopes.
(III) beneficial effects
From the above technical solution, it can be seen that the RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle provided by the present disclosure has at least the following beneficial effects:
1. the RGB achromatic superlens structure based on the space-staggered multiplexing geometric phase principle is characterized in that a superlens space-staggered multiplexing array formed by a plurality of space-staggered small array units in a periodical arrangement mode is distributed on a superlens structure material layer, each space-staggered small array unit comprises three nanostructure unit small arrays based on space-staggered multiplexing and meeting geometric phase principle, the three nanostructure unit small arrays based on space-staggered multiplexing and meeting geometric phase principle are identical in focal length or focal point, achromatic focusing on RGB incident light beams can be achieved, achromatic focusing on the incident light beams is achieved, the advantages of simple process, simplicity in design and convenience in large-area manufacturing are achieved, and the problems that an existing achromatic superlens based on the transmission phase principle is complex in structure, large in process difficulty and difficult to achieve a large area are solved.
2. The space-staggered multiplexing geometric phase principle-based RGB achromatic super-lens structure provided by the disclosure comprises a first nano-structure unit small array, a second nano-structure unit small array and a third nano-structure unit small array which form a space-staggered small array unit, and then a plurality of space-staggered small array units form a super-lens space-staggered multiplexing array in a periodical arrangement mode, the space-staggered small array units and the super-lens space-staggered multiplexing array all meet the geometric phase principle, the internal structures of the space-staggered small array units meet the same focal length f, the space-staggered small array units at different positions also meet the same focal length f, so that the focal lengths f of three RGB wavelengths of the super-lens space-staggered multiplexing array formed by the space-staggered small array units are also the same, and the RGB achromatic super-lens structure can realize achromatic focusing.
3. The RGB achromatic superlens structure based on the space-interleaved geometric phase principle has the advantages of being capable of realizing larger phase change, simplifying the structure of the superlens, being easy to process and manufacture, solving the problem that achromatism cannot be realized only by using the geometric phase principle, and being beneficial to realizing the achromatic superlens with high performance and better process compatibility because the adopted principle is the geometric phase principle and the superlens structure has the characteristics of consistent transmittance and consistent structural size.
4. The RGB achromatic superlens structure based on the space-staggered multiplexing geometric phase principle, which is provided by the disclosure, is a space-staggered multiplexing nanopore array superlens structure based on the geometric phase principle, can realize RGB achromatic focusing in a transmission mode, is favorable for realizing light transmission focusing of a P-B phase principle, and is favorable for combining devices and an integrated optical system.
5. The RGB achromatic superlens structure based on the space-interleaved geometric phase principle has the advantages of simple process, simple design and large-area manufacture, can be widely applied to the fields of material science, color imaging, nanotechnology and the like, and is widely applied to digital imaging systems, virtual reality display and high-resolution microscopes.
Drawings
The above and other objects, features and advantages of the present disclosure will become more apparent from the following description of embodiments thereof, taken in conjunction with the accompanying drawings, which illustrate, by way of example, and not by way of undue limitation, the present disclosure, many of which are to be considered readily appreciated, as the following detailed description proceeds, while the accompanying drawings, which illustrate, by way of example, the present disclosure, and in which:
FIG. 1 is a schematic top view of an RGB achromatic superlens structure based on spatially-interleaved geometric phase principles according to an embodiment of the present disclosure;
FIG. 2 is an optical path diagram of an RGB achromatic superlens structure based on the principle of spatially-interleaved geometric phase according to an embodiment of the present disclosure;
FIG. 3a is a graph of the phase versus angle for a first nanostructure cell array in an RGB achromatic superlens structure based on the principle of spatially interleaved geometric phase for 488nm blue light focusing, according to an embodiment of the present disclosure;
FIG. 3b is a graph of phase versus angle for a second nanostructure cell array in an RGB achromatic superlens structure based on the principle of spatially interleaved geometric phase for 532nm green focusing, in accordance with an embodiment of the present disclosure;
FIG. 3c is a graph of phase versus angle for a second nanostructure cell array in an RGB achromatic superlens structure based on the principle of spatially interleaved geometric phase for focusing 633nm red light, according to an embodiment of the present disclosure;
fig. 4 is a normalized focal spot diagram of an RGB achromatic superlens structure based on the principle of spatially-interleaved geometric phase at RGB wavelength light incidence, where a is a normalized focal spot diagram of a superlens at 488nm wavelength light incidence, b is a normalized focal spot diagram of a superlens at 532nm wavelength light incidence, c is a normalized focal spot diagram of a superlens at 633nm wavelength light incidence, and the white dashed line represents the design focal length f=50 μm, in accordance with an embodiment of the present disclosure.
Reference numerals:
1. a first nanostructure cell mini-array; 2. a second nanostructure cell mini-array; 3. a third nanostructure cell mini-array;
4. an isolation layer; 5. an unetched superlens structural material layer; spatially staggered miniature array units in an rgb achromatic superlens; 7. a support substrate;
RGB incident light, 9. Blue light is emitted; 10. emitting green light; 11. emitting red light; 12. a focal plane.
Detailed Description
Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood that the description is only exemplary and is not intended to limit the scope of the present disclosure. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the concepts of the present disclosure.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It should be noted that the terms used herein should be construed to have meanings consistent with the context of the present specification and should not be construed in an idealized or overly formal manner.
And the shapes and dimensions of the various elements in the drawings do not reflect actual sizes and proportions, but merely illustrate the contents of the embodiments of the present disclosure. In addition, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.
Furthermore, the word "comprising" or "comprises" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
In order to solve the problems of complex structure, high process difficulty and difficulty in realizing a large area of the existing achromatic superlens based on the transmission phase principle, the present disclosure provides an RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle, as shown in fig. 1 and 2, fig. 1 is a schematic top view of an RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle according to an embodiment of the present disclosure, and fig. 2 is an optical path diagram of an RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle according to an embodiment of the present disclosure, where the RGB achromatic superlens structure includes: a support base 7; an isolation layer 4 formed on the support substrate 7; and a superlens structural material layer formed on the isolation layer 4; the super-lens structure material layer is distributed with super-lens space-staggered multiplexing arrays formed by a plurality of space-staggered small array units 6 in a periodic arrangement mode, each space-staggered small array unit 6 comprises three nano-structure unit small arrays based on space-staggered multiplexing and meeting a geometric phase principle, and the three nano-structure unit small arrays based on space-staggered multiplexing and meeting the geometric phase principle have consistent focal lengths or focal points, so that achromatic focusing on RGB incident light 8 can be realized.
According to the embodiment of the present disclosure, as shown in fig. 1 and 2, among the three nanostructure cell small arrays based on spatial interleaving multiplexing and satisfying the geometric phase principle, the first nanostructure cell small array 1 satisfies the geometric phase principle for focusing blue light B in RGB incident light 8 and focusing the blue light B to a designed focal length position; the second nanostructure cell array 2 also satisfies the principle of geometric phase for focusing the green light G in the RGB incident light 8 and focusing the green light G to the designed focal length position; the third nano-structure unit small array 3 also meets the geometric phase principle and is used for focusing red light R in RGB incident light 8 and focusing the red light R to a designed focal length position; when the RGB incident light 8 enters the RGB achromatic super-lens structure, focal lengths f of emergent focal spots of the three nanostructure unit small arrays are the same, namely focal lengths f of emergent blue light 9, emergent green light 10 and emergent red light 11 are all located on a focusing plane 12, so that the RGB achromatic function is realized, and because the three nanostructure unit small arrays are staggered in the space staggered small array units 6, the achromatic function can be realized in each space staggered small array unit 6 of the RGB achromatic super-lens structure.
According to an embodiment of the present disclosure, as shown in fig. 1 and 2, the phase distribution of the RGB achromatic superlens structure satisfies the following condition:
wherein,for the phase of the RGB achromatic superlens structure, i.e. the phase of the superlens spatially interleaved multiplexed array consisting of a plurality of spatially interleaved mini-array units 6 in a periodic arrangement, (x) b ，y b ) For the first nanostructure cell array 1, (x) b0 ，y b0 ) For the initial position coordinates, P, of the first nanostructure cell array 1 b For the period, n, of the first nanostructure cell array 1 b The values are 0, ±1, ±2, ±3. (x) g ，y g ) For the second nanostructure cell array 2, (x) g0 ，y g0 ) For the initial position coordinates, P, of the second nanostructure cell array 2 g For the period, n, of the second nanostructure cell array 2 g The values are 0, ±1, ±2, ±3. (x) r ，y r ) Is a third kind of nano-structural unitPosition coordinates of the small array 3, (x r0 ，y r0 ) For the starting position coordinates, P, of the third nanostructure cell array 3 r For the period, n, of the third nanostructure cell array 3 r The values are 0, ±1, ±2, ±3. f is the focal length, lambda of the RGB achromatic superlens structure b Is blue wavelength lambda g Is of green wavelength lambda r And r is the distance from each nanostructure unit in the three nanostructure unit small arrays to the center of the superlens for the red light wavelength.
According to the embodiment of the disclosure, as shown in fig. 1 and 2, the first nanostructure cell array 1, the second nanostructure cell array 2 and the third nanostructure cell array 3 form the spatially-staggered small array cell 6, and then the plurality of spatially-staggered small array cells 6 form the super-lens spatially-staggered multiplexing array in a periodic arrangement manner, the spatially-staggered small array cell 6 and the super-lens spatially-staggered multiplexing array both satisfy the geometric phase principle, and the internal structures of the spatially-staggered small array cell 6 satisfy the focal length f, and the spatially-staggered small array cells 6 at different positions also satisfy the focal length f.
According to the embodiment of the disclosure, in the first nanostructure cell array 1, the second nanostructure cell array 2, and the third nanostructure cell array 3, the cross section of each nanostructure cell adopts at least one of a rectangular nanorod, an oval nanorod, a rectangular nanopore, or an oval nanopore, wherein the material adopted by the nanorod or the external material of the nanopore is a visible light material, and the visible light material comprises a high refractive index dielectric material, a high dielectric constant visible light band dielectric material, or a semiconductor material. Alternatively, a high refractive index dielectric material may be used Si, siN, siO 2 、HfO 2 、a-Si、TiO 2 Or GaN.
According to the embodiment of the disclosure, the nanostructure units in the first nanostructure unit small array 1, the second nanostructure unit small array 2 and the third nanostructure unit small array 3 may be the same or different in shape or size.
According to the disclosed embodiment, the nanostructure units in the first nanostructure unit small array 1, the second nanostructure unit small array 2 and the third nanostructure unit small array 3 modulate the phases of the incident light by satisfying the geometric phase principle of the respective phase rotation directions, so that the focal lengths or focuses are consistent, that is, the focal lengths f of the emergent blue light 9, the emergent green light 10 and the emergent red light 11 are all located on the focusing plane 12, thereby realizing achromatic focusing on the RGB incident light 8.
According to an embodiment of the present disclosure, the support substrate is made of a dielectric material, which may be Si, gaAs, transparent glass, quartz glass, or sapphire.
According to an embodiment of the present disclosure, the isolation layer is made of aluminum oxide, gallium nitride, hafnium oxide, titanium dioxide, or the like.
In one embodiment of the present disclosure, quartz glass is used as a support substrate, alumina (Al 2 O 3 ) The thin film material is an isolation layer, the SiN thin film material is a super-lens structure material layer, and the RGB achromatic super-lens structure based on the space-staggered multiplexing geometric phase principle is realized.
Specifically, in selecting wavelengths for blue 488nm, green 532nm, and red 633nm as the working wavelengths of the superlens, the focal length f of the entire superlens is set according to actual requirements, and the focal length of the superlens in this embodiment is set to 50 μm. According to the focusing requirement of the nanopore structure unit array, the phase distribution of the RGB achromatic super-lens structure based on the space-staggered multiplexing geometric phase principle provided by the embodiment meets the following conditions:
in the case of the formula 1 of the present invention,for the phase of the RGB achromatic superlens structure, i.e. the phase of the superlens spatially interleaved multiplexed array consisting of a plurality of spatially interleaved mini-array units 6 in a periodic arrangement, (x) b ，y b ) The position coordinates of the first nano-structure unit small array 1 in the three nano-structure unit small arrays based on space-staggered multiplexing and meeting the geometric phase principle, (x) b0 ，y b0 ) For the initial position coordinates, P, of the first nanostructure cell array 1 b For the period, n, of the first nanostructure cell array 1 b The values are 0, ±1, ±2, ±3. (x) g ，y g ) Is the position coordinate, x of the second nano-structure unit small array 2 in the three nano-structure unit small arrays based on space-staggered multiplexing and meeting the geometric phase principle x0 ，y g0 ) For the initial position coordinates, P, of the second nanostructure cell array 2 g For the period, n, of the second nanostructure cell array 2 g The values are 0, ±1, ±2, ±3. (x) r ，y r ) Is the position coordinates (x) of a third nano-structure unit small array 3 in three nano-structure unit small arrays based on space-staggered multiplexing and meeting the geometric phase principle r0 ，y r0 ) For the starting position coordinates, P, of the third nanostructure cell array 3 r For the period, n, of the third nanostructure cell array 3 r The values are 0, ±1, ±2, ±3. f is the focal length, lambda of the RGB achromatic superlens structure b Blue wavelength, 488nm, lambda in this example g The green wavelength is 532nm, lambda r In this embodiment, the red wavelength is 633nm, and r is the distance between each nanostructure unit in the nanostructure unit array and the center of the superlens.
In the present embodiment, the initial coordinates of the positions of the first nanostructure cell array 1, the second nanostructure cell array 2, and the third nanostructure cell array 3 are all set as the origin, i.e., x b0 ＝x g0 ＝x r0 ＝0，y b0 ＝y g0 ＝y r0 The period of the first nanostructure cell array 1, the second nanostructure cell array 2, and the third nanostructure cell array 3 was set to 300 nm, i.e., period P =0 b ＝P g ＝P r ＝300nm，n b ，n g ，n r The values were taken according to the arrangement shown in fig. 1.
The RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle provided by the embodiment can realize phase change by adjusting the direction of the nanostructure unit. The section of the nanostructure unit is a nanostructure which satisfies the principle of geometric phase, such as a rectangular nano-pillar or a rectangular nano-hole, an elliptic nano-pillar or an elliptic nano-hole, etc.
In the RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle provided in the present embodiment, the support substrate 7 may employ a dielectric material such as Si, gaAs, transparent glass, quartz glass, sapphire, and the like.
In the RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle provided in this embodiment, the material adopted by the nano-pillars in the superlens structure material layer or the external material of the nano-holes may adopt a visible light material, and the visible light material includes a high refractive index dielectric material, a high dielectric constant visible light band dielectric material or a semiconductor material. Alternatively, the high refractive index dielectric material is Si, siN, siO 2 、HfO 2 、a-Si、TiO 2 Or GaN.
In the RGB achromatic super-lens structure based on the spatial-interleaved geometric phase principle provided in this embodiment, the nano-structure units are nano-pillars, the section of each nano-pillar is rectangular SiN nano-pillars, and the top view of the RGB achromatic super-lens structure is shown in fig. 1, and the whole super-lens structure is composed of three kinds of staggered nano-structure units, wherein the first rectangular nano-pillar unit focuses blue light, the second rectangular nano-pillar unit focuses green light, and the third rectangular nano-pillar unit focuses red light. The 9 small nanostructures make up a spatially staggered small array of units of RGB achromatic superlenses. In fig. 1, 1. A first rectangular nanopillar cell array, 2. A second rectangular nanopillar cell array, 3. A third rectangular nanopillar cell array, 4. An isolation layer (e.g., alumina), 5. An unetched superlens structural material layer (e.g., silicon nitride), 6. Spatially staggered miniature array cells in an achromatic superlens.
In the RGB achromatic super-lens structure based on the spatial-interleaved geometric phase principle provided in this embodiment, the first nanostructure cell array 1, the second nanostructure cell array 2, and the third nanostructure cell array 3 may adopt cell structures with the same structural parameters, or may also adopt cell structures with different structural parameters. In this embodiment, the blue light focusing array in the RGB achromatic super lens is composed of rectangular nano-pillars with a length l1=220 nm, a width w1=140 nm, and a height h=400 nm, and the phase changes with the rotation angle θ as shown in fig. 3 a. The green focusing array in the RGB achromatic superlens consists of rectangular nanopillars rotating with length l2=240 nm, width w2=110 nm and height h=400 nm, and the phase change relationship with the rotation angle θ is shown in fig. 3 b. The red light focusing region in the RGB achromatic superlens consists of a rectangular nano-rod with a rotating length l3=250 nm, a width w3=140 nm and a height h=400 nm, and the phase of the rectangular nano-rod varies with the rotation angle θ as shown in fig. 3 c.
The phases and rotation angles of the three rectangular nano-pillar structures in fig. 3a, 3b and 3c all satisfy: the phase is the double relation of the rotation angle, and all three selected rectangular nano-pillars satisfy the geometric phase principle.
In this embodiment, the phase formula (i.e. formula 1) that should be satisfied by the RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle is corresponding to the phase shown in fig. 3 a-3 c and the rotation angle of the silicon nitride column unit, the ideal phase is matched with the actual phase that can be provided by the silicon nitride column unit through data processing software such as matlab, and the position coordinate and rotation angle of the center of each nano column unit structure on the supersurface layer structure in the RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle can be further determined through the phase and rotation angle corresponding relation (shown in fig. 3 a-3 c) of the silicon nitride column unit, so as to complete the arrangement of the RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle as shown in fig. 1.
According to the simulation analysis of the theoretical design, the super-lens normalized focused focal spot diagram of the RGB achromatic super-lens structure based on the spatial-interleaved geometric phase principle is shown in fig. 4 under the incidence of RGB wavelength light. Wherein the white dotted line in the figure indicates the design focal length f=50 μm. The super-lens of this embodiment was further verified to have RGB three-wavelength achromatic capability at (a) blue 488nm, (b) green 532nm, and (c) red 633nm incidence, where the super-lens is capable of focusing light at the design focal length (design focal length f=50 μm), i.e., the position shown by the white dashed line in fig. 4.
Therefore, the RGB achromatic super-lens structure based on the spatial interlacing multiplexing geometric phase principle provided by the embodiment of the disclosure is characterized in that the super-lens spatial interlacing multiplexing array formed by a plurality of spatial interlacing small array units in a periodic arrangement form is distributed on the super-lens structural material layer, each spatial interlacing small array unit comprises three nano-structure unit small arrays based on spatial interlacing multiplexing and meeting geometric phase principle, the three nano-structure unit small arrays based on spatial interlacing multiplexing and meeting geometric phase principle have the same focal length or focal point, the achromatic focusing on an incident beam can be realized, the achromatic focusing on the incident beam is further realized, the advantages of simple process, simple design and large-area manufacturing are realized, and the problems of complex structure, large process difficulty and difficulty in realizing large area of the existing achromatic super-lens based on the transmission phase principle are solved.
According to the RGB achromatic super-lens structure based on the space-staggered multiplexing geometric phase principle, the first nano-structure unit small array, the second nano-structure unit small array and the third nano-structure unit small array form the space-staggered small array units, the space-staggered small array units and the super-lens space-staggered multiplexing array all meet the geometric phase principle in a periodic arrangement mode, the inner structures of the space-staggered small array units meet the same focal length f, the space-staggered small array units at different positions also meet the same focal length f, and therefore the focal lengths f of three RGB wavelengths of the super-lens space-staggered multiplexing array formed by the space-staggered small array units are also the same, and the RGB achromatic super-lens structure can achieve achromatic focusing.
Another aspect of the present disclosure provides an electronic device comprising the RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle. The electronic device can be imaging electronic devices, display electronic devices and the like in the fields of digital imaging systems, virtual reality display and high-resolution microscopes, particularly can be imaging or display devices such as cameras, microscopes, telescopes and VR/AR, has a large-view-field high-quality imaging effect, and simultaneously has integrated, miniaturized, light-weighted and stable structural performance.
Further, the RGB achromatic superlens structure based on the space-interleaved geometric phase principle according to the embodiment of the disclosure has the advantages of simple process, simple design and large-area manufacture, and can be widely applied to the fields of digital imaging systems, virtual reality display, high-resolution microscopes and the like.
Thus, embodiments of the present disclosure have been described in detail with reference to the accompanying drawings. It should be noted that, in the drawings or the text of the specification, implementations not shown or described are all forms known to those of ordinary skill in the art, and not described in detail. Furthermore, the above definitions of the elements and methods are not limited to the specific structures, shapes or modes mentioned in the embodiments, and may be simply modified or replaced by those of ordinary skill in the art.
Similarly, it should be appreciated that in the above description of exemplary embodiments of the disclosure, various features of the disclosure are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various disclosed aspects. However, the disclosed method should not be construed as reflecting the intention that: i.e., the claimed disclosure requires more features than are expressly recited in each claim. Rather, as the following claims reflect, inventive aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this disclosure.
While the foregoing embodiments have been described in some detail for purposes of clarity of understanding, it will be understood that the foregoing embodiments are merely illustrative of the invention and are not intended to limit the invention, and that any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the present disclosure are intended to be included within the scope of the present disclosure.
Claims (13)
1. An RGB achromatic superlens structure based on spatial-interleaved geometric phase principle, comprising:
a support substrate;
an isolation layer formed on the support substrate; and
a super lens structure material layer formed on the isolation layer;
the super-lens structure material layer is distributed with super-lens space staggered multiplexing arrays formed by a plurality of space staggered small array units in a periodic arrangement mode, each space staggered small array unit comprises three nano structure unit small arrays based on space staggered multiplexing and meeting a geometric phase principle, and the three nano structure unit small arrays based on space staggered multiplexing and meeting the geometric phase principle have the same focal length or focal point, so that achromatic focusing on incident light beams can be realized.
2. The RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle according to claim 1, wherein among the three nanostructure cell small arrays based on spatial-interleaved and satisfying the geometric phase principle, the first nanostructure cell small array satisfies the geometric phase principle for focusing blue light B in RGB incident light and focusing blue light B to a design focal length position; the second nano-structure unit small array also meets the geometric phase principle, and is used for focusing green light G in RGB incident light and focusing the green light G to a designed focal length position; the third nano-structure unit small array also meets the geometric phase principle, and is used for focusing red light R in RGB incident light and focusing the red light R to a designed focal length position;
when the RGB incident light enters the RGB achromatic super-lens structure, the focal lengths f of emergent focal spots of the three nanostructure unit small arrays are the same, so that the RGB achromatic function is realized, and the three nanostructure unit small arrays are arranged in a staggered manner in the space staggered small array units, so that the achromatic function can be realized in each space staggered small array unit of the RGB achromatic super-lens structure.
3. The RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle according to claim 2 wherein the phase distribution of the RGB achromatic superlens structure satisfies the following condition:
wherein,for the phase of the RGB achromatic superlens structure, i.e. the phase of a superlens spatially interleaved multiplexed array consisting of a plurality of spatially interleaved mini-array elements in a periodic arrangement, (x) b ，y b ) For the first nanostructure cell small array, (x) b0 ，y b0 ) For the initial position coordinates, P, of the first nanostructure cell array b For the period of the first nanostructure cell small array, n b Is an integer, and takes the values of 0, +/-1, +/-2, +/-3 … …; (x) g ，y g ) Position coordinates of a small array of nanostructure elements of the second type, (x g0 ，y g0 ) For the initial position coordinates, P, of the second nanostructure cell array g For the period of the second nanostructure cell small array, n g Is an integer, and takes the values of 0, +/-1, +/-2, +/-3 … …; (x) r ，y r ) Position coordinates for a small array of third nanostructure elements, (x r0 ，y r0 ) For the initial position coordinates, P, of the third nanostructure cell array r For the period of the third nanostructure cell array, n r Is an integer, and takes the values of 0, +/-1, +/-2, +/-3 … …; f is the focal length, lambda of the RGB achromatic superlens structure b Is blue wavelength lambda g Is of green wavelength lambda r And r is the distance from each nanostructure unit in the three nanostructure unit small arrays to the center of the superlens for the red light wavelength.
4. The RGB achromatic super-lens structure based on the geometric phase principle of spatial interlacing, according to claim 3, wherein the first nanostructure cell array, the second nanostructure cell array and the third nanostructure cell array form the spatial interlacing micro-array cells, and the super-lens spatial interlacing array is formed by a plurality of the spatial interlacing micro-array cells in a periodic arrangement form, the spatial interlacing micro-array cells and the super-lens spatial interlacing array both satisfy the geometric phase principle, and the internal structures of the spatial interlacing micro-array cells satisfy the focal length f, and the focal lengths f of the three wavelengths of the super-lens spatial interlacing array formed by the spatial interlacing micro-array cells are the same, so that the RGB achromatic super-lens structure can realize achromatic focusing.
5. The RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle according to claim 2 wherein in the first, second, and third nanostructure cell arrays, each nanostructure cell has a cross-section of at least one of rectangular, elliptical, rectangular, or elliptical nanopillars.
6. The RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle according to claim 5 wherein the material used for the nanopillars or the external material of the nanopores in each nanostructure cell is a visible light material comprising a high refractive index dielectric material, a high dielectric constant visible light band dielectric material, or a semiconductor material.
7. The RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle according to claim 6 wherein the high refractive index dielectric material employs Si, siN, siO 2 、HfO 2 、a-Si、TiO 2 Or GaN.
8. The RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle according to claim 2 wherein the nanostructure cells in the first nanostructure cell array, the second nanostructure cell array, and the third nanostructure cell array are the same or different in shape or size, and the achromatic focusing is achieved by changing the geometric phase principle of the nanostructure cell phases by changing the directions of the nanopillars or nanopores.
9. The RGB achromatic superlens structure based on the spatial-interleaved geometry phase principle according to claim 2 wherein the nanostructure cells in the first nanostructure cell array, the second nanostructure cell array, and the third nanostructure cell array are configured to modulate the phase of incident light by satisfying the geometry phase principle of the respective phase rotation directions to make the focal length or focus uniform, thereby achieving achromatic focusing of the incident light beam.
10. The RGB achromatic superlens structure based on the spatial-interleaved geometric phase principle according to claim 1 wherein the support substrate is a dielectric material comprising Si, gaAs, transparent glass, quartz glass, or sapphire.
11. The RGB achromatic superlens structure based on the spatial-interleaved geometry phase principle according to claim 1 wherein the barrier layer is alumina, gallium nitride, hafnium oxide or titanium dioxide.
12. An electronic device comprising the RGB achromatic superlens structure of any one of claims 1-11 based on the principle of spatially-interleaved geometric phase.
13. Use of an RGB achromatic superlens structure based on the principle of spatial-interleaved geometric phase according to any one of claims 1-11 in digital imaging systems, virtual reality displays and high resolution microscopes.
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