CN117190908A - Calibrating device and calibrating method for line spectrum confocal sensor - Google Patents
Calibrating device and calibrating method for line spectrum confocal sensor Download PDFInfo
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Abstract
The invention belongs to the technical field of photoelectric detection and discloses a verification device and a verification method of a line spectrum confocal sensor. The device comprises an integrated standard device, a displacement generating device, a displacement measuring device and a driving device, wherein the driving device drives the displacement generating device to generate displacement in the vertical direction, the displacement measuring device measures the displacement generated in the vertical direction, and the integrated standard device is driven to move in the vertical direction when the displacement generating device generates displacement in the vertical direction; the line spectrum confocal sensor measures the contour displacement of the integrated standard device in the vertical direction, and compares the measured result with the measured result of the displacement measuring device, so as to obtain the limit positioning errors of the line spectrum confocal sensor in the transverse direction and the vertical direction in the vertical measuring plane, and establish an error model. The invention solves the problems that the existing linear spectrum confocal sensor is difficult to detect and can not detect.
Description
Technical Field
The invention belongs to the technical field of photoelectric detection, and particularly relates to a verification device and a verification method of a linear spectrum confocal sensor.
Background
Currently, a line spectral confocal sensor is a non-contact line profile sensor based on spectral dispersion positioning. The measuring precision can reach submicron or even nanometer level, is insensitive to the surface inclination, texture and surface reflection characteristics of an object, has stronger stray light resistance, is an important 3D measuring sensor in the manufacturing fields of electronic manufacturing, new energy, semiconductors and the like, and can provide powerful support for material surface analysis, quality control, production process optimization and the like.
The verification and calibration of the line spectrum confocal sensor are of great significance for the precision analysis and the guarantee of the line spectrum confocal sensor. At present, a length measuring instrument is generally adopted for verification of a line spectrum confocal sensor, so that the verification is inconvenient and difficult to operate, and the transverse positioning error of the sensor cannot be verified, and therefore, a set of special equipment and a set of device which are convenient to use and are used for effectively verifying and calibrating the sensor are required.
Disclosure of Invention
Aiming at the defects or improvement demands of the prior art, the invention provides a verification device and a verification method of a line spectrum confocal sensor, and solves the problems that the existing line spectrum confocal sensor is difficult to verify and can not be verified.
To achieve the above object, according to one aspect of the present invention, there is provided an assay device for a line spectral confocal sensor, the device comprising an integrated etalon, a displacement generating device, a displacement measuring device, and a driving device, wherein:
the driving device is connected with the displacement generating device and used for driving the displacement generating device to generate displacement in the vertical direction, the displacement measuring device is used for measuring the displacement generated by the displacement generating device in the vertical direction, the integrated etalon is arranged above the displacement generating device, when the displacement generating device generates displacement in the vertical direction, the integrated etalon is driven to generate displacement in the vertical direction, the line spectrum confocal sensor to be detected is used for measuring the profile displacement of the integrated etalon in the vertical direction, and the measured result is compared with the measured result of the displacement measuring device, so that the limit positioning error of the line spectrum confocal sensor to be detected in the transverse direction and the vertical direction is obtained;
the upper top surface of the integrated standard device comprises an inclined surface and a horizontal surface, the inclined surface is used for detecting the transverse positioning limit error of the spectrum sensor to be detected, the horizontal surface is used for detecting the positioning limit error of the spectrum sensor to be detected in the vertical direction, and further preferably, the displacement measuring device) comprises a fixed unit and a movable unit, the fixed unit is fixed in position, the movable unit is fixedly connected with the displacement generating device, and the displacement generating device drives the movable unit to displace in the vertical direction; and grabbing a movement signal of the mobile unit by using the fixed unit, and measuring the displacement of the mobile unit in the vertical direction.
Further preferably, the moving unit includes a displacement table, a second reflecting mirror and a beam splitter prism, the displacement table is disposed at a bottom end of the displacement measuring device and is used for contacting with the displacement generating device, the second reflecting mirror is disposed at one side of the beam splitter prism in a vertical direction, and the displacement generating device moves horizontally to enable the displacement table to displace in the vertical direction, that is, the displacement generating device displaces.
Still preferably, the fixing unit includes a laser, a photodetector, and a first mirror, where the laser and the first mirror are respectively disposed at two sides of the beam-splitting prism in a horizontal direction, the laser emits laser light, the laser light is split into two beams of light through the beam-splitting prism, one beam is a reference light, the other beam is a measurement light, the reference light and the measurement light respectively enter the first mirror and the second mirror to be reflected, then enter the beam-splitting prism to be transmitted, the transmitted light enters the photodetector to form interference fringes, and up-down movement of the moving unit changes positions of the interference fringes.
Further preferably, the moving unit further includes a third reflecting mirror disposed under the light-splitting prism, through which the light transmitted from the light-splitting prism is reflected into the photodetector.
Still preferably, the displacement generating device comprises a screw rod, a sliding block, a conversion block and a guide rail, wherein the screw rod is connected with the driving device and is used for converting rotation of an output shaft of the driving device into horizontal movement of the sliding block on the guide rail, the conversion block is arranged above the sliding block and is fixedly connected with the sliding block, the conversion block is driven to horizontally move when the sliding block horizontally moves, and the conversion block is used for converting the horizontal movement of the sliding block into displacement of the moving unit in the vertical direction, namely the displacement generated by the displacement generating device.
Further preferably, the conversion block is a sloping block, and an upper surface thereof is a sloping surface, and when the conversion block moves horizontally, the moving unit contacts with the conversion block so that the moving unit is displaced in a vertical direction.
According to another aspect of the present invention, there is provided a method for calibrating an calibrating apparatus for a line spectral confocal sensor, the method comprising the steps of:
the driving device drives the displacement generating device to move, and the displacement measuring device measures the displacement of the moving unit in the displacement measuring device in the vertical direction and takes the displacement as standard displacement;
s2, aligning the line spectral confocal sensor to be detected with the horizontal plane of the integrated standard device, measuring the displacement of points at different positions on the horizontal plane in the vertical direction, and comparing the displacement obtained by the measurement with the standard displacement in the step S1 to obtain the vertical direction error distribution and the limit positioning error of the line spectral confocal sensor to be detected;
s3, measuring an inclined plane of the integrated standard device by the line spectrum confocal sensor to be detected, and measuring the actual measured vertical heights of the inclined plane at different positions of the same vertical height, thereby obtaining the transverse positioning error distribution and the limit positioning error of the line spectrum confocal sensor to be detected in the vertical direction.
S4, according to the vertical positioning error distribution and the horizontal positioning error distribution of the to-be-detected line spectrum confocal sensor obtained in the S2 and the S3, a fitting method is adopted to obtain an error model of the sensor.
Further preferably, in step S2, the vertical direction limit positioning error is calculated according to the following relation:
wherein y is j mark Is the standard displacement obtained by measurement of the displacement measuring device,the measured value is the actual measured value of the line spectrum confocal sensor to be detected, i is the number of points at different positions in the scanning line direction on the horizontal plane, and j is the number of positions at different heights in the vertical height range.
Further preferably, in step S3, the lateral direction limit positioning error is calculated according to the following relation:
Δx＝max{|Δx j |}
wherein Deltax is j Is the maximum lateral positioning error, y, at vertical height j Measuring j max、y Measuring j min is the maximum and minimum value measured by the linear spectrum confocal sensor at the vertical height corresponding to j, alpha is the inclination angle of the standard inclined plane, j is the position numbers of different heights in the vertical height range, and i is the number of points at different positions in the scanning line direction on the inclined plane.
In general, compared with the prior art, the above technical solution conceived by the present invention has the following beneficial effects:
1. the integrated standard device in the calibrating device of the line spectrum confocal sensor provided by the invention comprises two horizontal planes and inclined planes, wherein different planes are used for calibrating positioning errors of the line spectrum confocal sensor in different directions, and the calibration in two directions can be realized at one time, and the calibrating method is simple and convenient;
2. the conversion block in the displacement generation device converts the motion in the horizontal direction into the displacement in the vertical direction, the mechanical structure is more precise through the inclination of the conversion block, the resolution of the motion in the vertical direction is improved, the function conversion is realized through a simple structure, and the operability is strong;
3. the displacement measuring device provided by the invention utilizes the optical principle to measure the displacement in the vertical direction generated by the displacement generating device, the measuring method is perfect, the measuring principle is simple, and the device has extremely high precision;
4. according to the verification method provided by the invention, the plane of the integrated standard device is driven by the driving device to generate micro displacement, so that the method can be used for detecting the positioning errors of the sensor along each point on the scanning line in the vertical direction, and considering the transverse positioning errors of each point on the sensor line in the longitudinal direction, the transverse positioning errors of each point on the sensor line in the longitudinal direction are reflected in the vertical direction through the inclined plane of the integrated standard device, so that the transverse positioning errors of the sensor are reflected; meanwhile, a fitting method can be adopted to obtain a vertical and transverse positioning error model of each point of the sensor scanning line in the long direction in the vertical range, so that verification and calibration of the sensor are formed. The standard value of the calibrating device can be directly traced to the length standard, and the calibrating device has stable, high-precision, quick and convenient calibrating capability.
Drawings
FIG. 1 is a schematic diagram of an assay device for a line spectral confocal sensor constructed in accordance with a preferred embodiment of the invention;
FIG. 2 is a schematic diagram of an exemplary configuration of an assay device for a line spectral confocal sensor constructed in accordance with a preferred embodiment of the invention;
FIG. 3 is a schematic diagram of a structure constructed in accordance with a preferred embodiment of the present invention to replace a etalon;
FIG. 4 is a partial schematic view of a standard displacement generating device constructed in accordance with a preferred embodiment of the present invention;
FIG. 5 is a schematic diagram of a standard displacement measurement system constructed in accordance with a preferred embodiment of the present invention;
FIG. 6 is a schematic representation of the planar error distribution obtained for an ideal profile displacement and a measured profile displacement constructed in accordance with a preferred embodiment of the present invention.
The same reference numbers are used throughout the drawings to reference like elements or structures, wherein:
the device comprises a 1-base, a 2-motor seat, a 3-driving device, a 4-speed reducer, a 5-right bearing seat, a 6-screw rod, a 7-supporting seat, an 8-supporting plate, a 9-laser, a 10-photoelectric detector, an 11-displacement table, a 12-third reflecting mirror, a 13-beam splitting prism supporting frame, a 14-beam splitting prism, a 15-second reflecting mirror, a 16-second reflecting mirror seat, a 17-integrated standard, a 18-upright post, a 19-first reflecting mirror, a 20-first reflecting mirror supporting seat, a 21-conversion block, a 22-sliding block, a 23-guide rail and a 24-left bearing seat.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
The invention relates to a calibrating device and a calibrating method for a line spectrum confocal sensor, as shown in fig. 1, wherein the calibrating device for the line spectrum confocal sensor consists of a standard plane and standard inclined plane integrated standard 17, a standard displacement generating device 110 and a standard displacement measuring device 120.
The standard plane and standard inclined plane integrated standard 17 is composed of a standard plane section and a standard inclined plane section connected with each other, and has high plane precision and surface quality respectively. The integrated etalon is connected to the displacement table 11 of the standard displacement generating device, and outputs standard displacement to the sensor to be verified and calibrated.
The standard displacement generating device 110 comprises a base 1, a guide rail 23, a sliding block 22, a conversion block 21, a displacement table 11, a stand column 18, a lead screw 6 and an integrated standard 17. The conversion block 22 is fixed to the slider 22, and the slider 22 and the guide rail 23 constitute an x-direction linear motion pair. The guide rail 23 is fixedly connected with the base 1. The screw 6 passes through the center of the slider 22 and is fixed to the right bearing housing 5 and the left bearing housing 24. Further, the upper surface of the conversion block 21 is a slope. The displacement table 11 and the guide rail 23 fixed on the upright 18 form a z-direction linear motion pair, and the upright 18 is connected with the base 1. This structure can convert x-direction displacement into z-direction displacement, and realize high-precision subdivision control. In this embodiment, the driving device 3 is a stepping motor, the driving device is disposed on the motor base 2, and an output shaft of the driving device 3 is connected with the speed reducer 4.
The structure of the standard displacement measuring device is as follows: the laser 9 and the beam splitter prism 14 divide the light emitted by the laser 9 into two paths, one path of light is emitted to the first reflecting mirror 19 on the upright post 18 to serve as a reference light path, the other path of light is emitted to the second reflecting mirror 15 on the displacement table 11 to serve as a measuring light path, the two paths of returned light are emitted to the photoelectric detector 10 through the third reflecting mirror 12, and the photoelectric detector 10 is positioned on the axis of the third reflecting mirror 12. The laser 9 is arranged on the supporting plate 8, the supporting plate 8 is arranged on the supporting seat 7, the second reflecting mirror 15 is arranged on the second reflecting mirror seat 16, the first reflecting mirror 19 is arranged on the first reflecting mirror seat 20, the beam splitting prism 14 and the third reflecting mirror 12 are arranged on the beam splitting mirror support frame 13, and the beam splitting mirror support frame 13 is arranged on the supporting plate 8. The light emitted from the laser 9 passes through the beam splitting prism 14, one path of light is directed to the first reflecting mirror 19 arranged on the supporting plate 8, the other path of light is directed to the second reflecting mirror 15 arranged on the displacement table, the two paths of return light meet at the first reflecting mirror 12 after passing through the beam splitting prism 14, interference occurs, the interference signals are received by the photoelectric detector 10 and input into a subsequent processing circuit, and the real-time standard displacement information of the standard plane and standard inclined plane integrated standard 17 is obtained by obtaining the change of the optical path difference of the two paths of interference, namely the displacement measurement of the displacement table.
The integrated etalon 17, the standard displacement generating device 110, and the standard displacement measuring device 120 constitute a linear spectral confocal sensor verification device. The standard displacement generating device 110 generates high-resolution and wide-range displacement, and combines the real-time high-precision measurement of the displacement by the standard displacement measuring device 120 to form standard displacement, and the standard displacement is input to the integrated standard 17 to form standard plane translation motion and standard inclined plane translation motion of the standard. The standard translational motion is output as standard to the line spectral confocal sensor. The results measured by the sensor are compared with standard motions, and the verification and calibration of the sensor are formed by combining corresponding algorithms and modeling. The standard value of the calibrating device can be directly traced to the length standard, and the calibrating device has stable, high-precision, quick and convenient calibrating capability.
The displacement expressed in general is the displacement of a point, the profile displacement referred to in the present invention refers to the overall displacement of a profile line in a horizontal plane or an inclined plane, namely the profile displacement, specifically, the light emitted by the line spectrum confocal sensor forms a light plane in a vertical direction, the plane in the vertical direction intersects with the integrated etalon to obtain a straight line, the straight line is referred to as a profile line, when the integrated etalon moves in the vertical direction, the light plane emitted by the line spectrum sensor intersects with the integrated etalon in the vertical direction to form a plurality of profile lines, the ideal profile line is a horizontal straight line, the left side of fig. 6 is marked with a plurality of ideal profile lines, namely standard profile lines, in the present invention, the line spectrum confocal sensor respectively measures the profile displacement generated by translational movement of the horizontal plane and the inclined plane of the integrated etalon in the vertical measuring range, the profile displacement is defined as standard profile displacement, and the profile displacement generates a series of horizontal straight lines which are distributed according to standard intervals in the vertical plane as shown in fig. 6; the actual measurement is a curve with errors due to sensor errors.
The specific working process is as follows: the computer sends out displacement signals to drive the driving device 3 to rotate, so that the screw rod 6 is driven to rotate. The screw rod 6 nut moves in the corresponding direction under the action of the screw pair. The conversion block 22 is driven by a lead screw, and is guided by a guide rail 23 to realize movement along the x direction. The conversion block 22 converts the x-direction movement of the guide rail into the z-direction linear movement of the displacement table 11, and then drives the z-direction standard displacement movement of the standard plane and standard inclined plane integrated standard 17.
In general, the standard displacement generating device 110 achieves high resolution through the electronic subdivision of the stepping motor and the mechanical subdivision of the oblique block, and promotes the integrated standard device to translate in a large range with high resolution. The standard displacement measuring device 120 is realized based on the measurement principle of a laser interferometer, and obtains the standard value of the large-range high-resolution translation of the standard device in real time. And the standard displacement is input into the sensor, is compared with the actual measured value of the sensor and is subjected to relation modeling, so that verification and calibration of the sensor are realized. The calibrating device can be used for calibrating the precision characteristics of the linear spectrum confocal sensor, and comprises the linearity and the accuracy of the vertical height measurement of each point in the linear length direction and the positioning uncertainty of the transverse measuring point of the sensor.
When the method is particularly applied to sensor verification and calibration, a computer sends a driving displacement signal to drive a standard displacement generating device to push 110 a standard plane and standard inclined plane integrated standard 17 to a designated position, a standard displacement measuring device 120 measures standard displacement output, the measured values of a linear spectrum confocal displacement sensor 100 are compared to obtain verification results, and an error calibration model is obtained through fitting. When the detection line spectrum confocal displacement sensor is axially accurate, the line is aligned with the standard plane part, and when the detection line spectrum confocal displacement sensor is transversely inaccurate, the line is aligned with the standard inclined plane part.
The specific evaluation process is as follows:
when the accuracy of the measurement of the line spectrum confocal displacement sensor in the vertical direction is detected, the limit positioning error in the vertical direction is calculated according to the following relation:
and obtaining the maximum value delta y of the positioning errors of each line length direction and each point in the whole height measurement range, reflecting the limit error of the sensor in the whole range, and analyzing and judging the accuracy characteristics of the sensor.
And constructing an error model in the whole vertical plane by the obtained positioning errors of the long-direction points of each line in the whole height measurement range, and can be used as a sensor calibration model.
When the detection line spectral confocal sensor is positioned inaccurately at the transverse measuring point, the measurement line of the line spectral confocal sensor 100 is positioned at the standard inclined plane, the measurement value of the line spectral confocal sensor 100 is read, the measurement results of all points in the line length direction of the line spectral confocal sensor are compared, and the straightness of all vertical height focal lines and the flatness of all height focal planes are obtained, so that the verification result is obtained.
The maximum positioning error in the transverse direction of the j-height position is
Wherein y is Measuring j max、y Measuring j min is the maximum and minimum value measured by the linear spectrum confocal sensor at the vertical height corresponding to j, alpha is the inclination angle of the standard inclined plane, j is the position numbers of different heights in the vertical height range, and i is the number of points at different positions in the scanning line direction on the inclined plane. The maximum value of the lateral positioning error in the entire height range is the lateral positioning limit error, Δx=max { |Δx j |}。
Positioning errors of points in the longitudinal direction of the line over the entire height measurement range obtained by detecting series of standard profile displacements generated by an integral etalon with a sensor to be calibrated
Thus, i can be the abscissa, j h the ordinate,and (3) for output, adopting curved surface fitting to build an error model in the whole vertical plane. Where h is the standard profile displacement step. The error model can be used for error compensation of the contour measurement of the sensor in the whole vertical measuring range.
Similarly, a model of the lateral positioning error of each point of the sensor's profile measurement throughout the vertical measurement range can be obtained.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (10)
1. A calibration device for a line spectral confocal sensor, characterized in that the device comprises an integrated etalon (17), a displacement generating device (110), a displacement measuring device (120) and a driving device (3), wherein:
the driving device (3) is connected with the displacement generating device (110) and is used for driving the displacement generating device (110) to generate displacement in the vertical direction, the displacement measuring device (120) is used for measuring the displacement generated by the displacement generating device (110) in the vertical direction, the integrated etalon (17) is arranged above the displacement generating device (110), when the displacement generating device (110) generates displacement in the vertical direction, the integrated etalon (17) is driven to generate displacement in the vertical direction, the line spectrum confocal sensor to be detected is used for measuring the profile displacement of the integrated etalon (17) in the vertical direction and comparing the measured result with the measured result of the displacement measuring device (120), so that the limit positioning error of the line spectrum confocal sensor to be detected in the transverse direction and the vertical direction is obtained;
the upper top surface of the integrated standard device (17) comprises an inclined surface and a horizontal plane, wherein the inclined surface is used for detecting the transverse positioning limit error of the spectrum sensor to be detected, and the horizontal plane is used for detecting the positioning limit error of the spectrum sensor to be detected in the vertical direction.
2. The calibrating apparatus for a linear-spectral confocal sensor according to claim 1, wherein said displacement measuring device (120) comprises a fixed unit and a moving unit, said fixed unit is fixed in position, said moving unit is fixedly connected to said displacement generating device (110), and said displacement generating device (110) drives said moving unit to displace in a vertical direction; and grabbing a movement signal of the mobile unit by using the fixed unit, and measuring the displacement of the mobile unit in the vertical direction.
3. A device for calibrating a linear-spectral confocal sensor according to claim 2, wherein said moving unit comprises a displacement stage (11), a second reflecting mirror (15) and a beam-splitting prism (14), said displacement stage (11) being arranged at the bottom end of said displacement measuring device (120) for contacting said displacement generating device (110), said second reflecting mirror (15) being arranged at one side of the beam-splitting prism (14) in the vertical direction, and wherein the horizontal movement of said displacement generating device (110) causes a displacement of said displacement stage (11) in the vertical direction.
4. A calibration device for a line spectral confocal sensor according to claim 3, wherein the fixing unit comprises a laser (9), a photodetector (10) and a first reflecting mirror (19), the laser (9) and the first reflecting mirror (19) are respectively arranged at two sides of the beam splitting prism (14) in the horizontal direction, the laser (9) emits laser light, the beam is divided into two beams of light through the beam splitting prism (14), one beam is a reference beam, the other beam is a measuring beam, the reference beam and the measuring beam respectively enter the first reflecting mirror (19) and the second reflecting mirror (15) to be reflected, then enter the beam splitting prism (14) to be transmitted, the transmitted light enters the photodetector (10) to form interference fringes, and the up-down movement of the moving unit changes the positions of the interference fringes.
5. The assay device for line spectral confocal sensors according to claim 4, wherein said mobile unit further comprises a third mirror (12), said third mirror (12) being arranged below said beam-splitting prism (14), light transmitted from said beam-splitting prism (14) being reflected by said third mirror (12) into said photodetector (10).
6. The calibrating device for the linear spectrum confocal sensor according to claim 1, wherein the displacement generating device (110) comprises a screw rod (6), a sliding block (22), a conversion block (21) and a guide rail (23), the screw rod (6) is connected with the driving device (3) and is used for converting the rotation of an output shaft of the driving device (3) into the horizontal movement of the sliding block (22) on the guide rail (23), the conversion block (21) is arranged above the sliding block (22) and is fixedly connected with the sliding block, the sliding block (22) drives the conversion block (21) to horizontally move when horizontally moves, and the conversion block (21) is used for converting the horizontal movement of the sliding block (22) into the displacement in the vertical direction of the moving unit, namely the displacement generated by the displacement generating device.
7. The calibration device for a linear-spectral confocal sensor according to claim 6, wherein said conversion block (21) is a sloping block, the upper surface of which is a sloping surface, and wherein said movement unit is in contact with said conversion block (21) such that said movement unit is displaced in the vertical direction when said conversion block (21) is moved horizontally.
8. A method of performing an assay using the assay device of the line spectral confocal sensor of any one of claims 1-7, the method comprising the steps of:
the driving device drives the displacement generating device to move, and the displacement measuring device measures the displacement of the moving unit in the displacement measuring device in the vertical direction and takes the displacement as standard displacement;
s2, aligning the line spectral confocal sensor to be detected with the horizontal plane of the integrated standard device, measuring the displacement of points at different positions on the horizontal plane in the vertical direction, and comparing the displacement obtained by the measurement with the standard displacement in the step S1 to obtain the vertical direction error distribution and the limit positioning error of the line spectral confocal sensor to be detected;
s3, measuring an inclined plane of the integrated standard device by the line spectrum confocal sensor to be detected, and measuring the actual measured vertical heights of the inclined plane at different positions of the same vertical height, thereby obtaining the transverse positioning error distribution and the limit positioning error of the line spectrum confocal sensor to be detected.
And S4, fitting according to the vertical positioning error distribution and the transverse positioning error distribution of the to-be-detected line spectrum confocal sensor obtained in the steps S2 and S3 to obtain an error model of the sensor.
9. The method according to claim 8, wherein in step S2, the vertical limit positioning error is calculated according to the following relation:
wherein y is Label (C) Is the standard displacement obtained by the measurement of the displacement measuring device, y Measuring Is the actual measured value of the line spectral confocal sensor to be detected, j is the number of different height positions in the vertical height range, and i is the number of points at different positions in the scanning line direction on the horizontal plane.
10. The method of claim 8, wherein in step S3, the lateral direction limit positioning error is calculated according to the following relation:
Δx＝max{|Δx j |}
wherein Deltax is j Is the maximum lateral positioning error, y, at vertical height j Measuring j max、y Measuring j min is the maximum and minimum value measured by the linear spectrum confocal sensor at the vertical height corresponding to j, alpha is the inclination angle of the standard inclined plane, j is the position numbers of different heights in the vertical height range, and i is the number of points at different positions in the scanning line direction on the inclined plane.
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| CN118129643A (en) * | 2024-01-29 | 2024-06-04 | 苏州创视智能技术有限公司 | Line scanning spectrum confocal system test calibration device and method |
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