CN117161585A - Method for preparing micro-channel with adjustable inclination angle in quartz glass - Google Patents
Method for preparing micro-channel with adjustable inclination angle in quartz glass Download PDFInfo
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- CN117161585A CN117161585A CN202311075598.6A CN202311075598A CN117161585A CN 117161585 A CN117161585 A CN 117161585A CN 202311075598 A CN202311075598 A CN 202311075598A CN 117161585 A CN117161585 A CN 117161585A
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- quartz glass
- micro
- channel
- laser
- infrared laser
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 83
- 238000000034 method Methods 0.000 title claims abstract description 20
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000002360 preparation method Methods 0.000 abstract description 12
- 238000001259 photo etching Methods 0.000 abstract description 6
- 210000002381 plasma Anatomy 0.000 description 19
- 238000005516 engineering process Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Abstract
The invention discloses a method for preparing a micro-channel with adjustable inclination angle in quartz glass, which comprises the following steps: placing the quartz glass such that both the upper surface and the lower surface of the quartz glass are in contact with air; the nanosecond infrared laser is incident perpendicular to the upper surface of the quartz glass, and the laser focus of the nanosecond infrared laser is arranged on the lower surface of the quartz glass through a focusing lens; different scanning speeds are set, so that nanosecond infrared laser is focused on the lower surface of the quartz glass for scanning a set distance, and a micro-channel which extends from the lower surface of the quartz glass to the upper surface of the quartz glass and is adjustable in inclination angle is obtained. According to the invention, the micro-channel is prepared in the quartz glass by utilizing nanosecond infrared laser, so that the preparation cost is greatly reduced, the processing speed is high, and the method is suitable for industrial application; no special photoetching template is required to be designed, no other parts are required to be matched, the preparation efficiency is high, and the realization requirement is low. By controlling the scanning speed of the nanosecond infrared laser, micro-channels with different inclination angles can be obtained according to the requirements.
Description
Technical Field
The invention relates to the technical field of micro-fluidic channel preparation, in particular to a method for preparing a micro-channel with an adjustable inclination angle in quartz glass.
Background
A microchannel is a channel structure having a micrometer scale, typically ranging in size from 10 micrometers to 1000 micrometers. The micro-channel can be used for precisely controlling and processing fluid, gas and the like, and has various functions of analysis, synthesis, detection, filtration and the like. The microchannels may exist alone or may constitute a multi-stage conduit or mesh structure.
The preparation method of the micro-channel mainly comprises technologies of photoetching, imprinting, rubbing and the like, but the preparation steps of the technologies are complex, and the preparation efficiency is low.
Femtosecond laser is a laser with very narrow pulse width (10 -15 s), ultra-short pulse laser with extremely high peak power. Compared with long pulse laser processing, the femtosecond laser processing precision is high, the heat affected area is small, and transparent materials can be processed. Micro-addition using femtosecond laserThe industrial technology is hopeful to overcome various difficulties faced by the traditional processing technology, a real micro-channel is directly processed in a glass material, but a femtosecond laser is high in price and difficult to realize large-scale industrial production, and in addition, the angle of the micro-channel is not adjustable in the preparation process.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a method for preparing a micro-channel with an adjustable inclination angle in quartz glass by utilizing nanosecond infrared laser, which has high preparation efficiency and lower realization requirement, and the inclination angle of the micro-channel is adjustable in the process of preparing the micro-channel.
In order to achieve the above purpose, the technical scheme provided by the invention is as follows:
a method of preparing a micro-channel with an adjustable tilt angle inside quartz glass, comprising:
placing the quartz glass such that both the upper surface and the lower surface of the quartz glass are in contact with air;
the nanosecond infrared laser is incident perpendicular to the upper surface of the quartz glass, and the laser focus of the nanosecond infrared laser is arranged on the lower surface of the quartz glass through a focusing lens;
different scanning speeds are set, so that nanosecond infrared laser is focused on the lower surface of the quartz glass for scanning a set distance, and a micro-channel which extends from the lower surface of the quartz glass to the upper surface of the quartz glass and is adjustable in inclination angle is obtained.
Compared with the femtosecond laser micro-processing technology, the technical scheme utilizes nanosecond infrared laser to prepare the micro-channel in the quartz glass, thereby greatly reducing the preparation cost, having high processing speed and direct writing speed of 100mm/s and being suitable for industrial application.
Compared with the technologies of photoetching, imprinting, rubbing and the like, the technical scheme does not need to design a special photoetching template, does not need other parts to cooperate, and has high preparation efficiency and lower realization requirement.
And by controlling the scanning speed of the nanosecond infrared laser, micro channels with different inclination angles can be obtained according to the requirements. The greater the scanning speed, the more the angle is tilted.
Furthermore, in the process of focusing nanosecond infrared laser on the lower surface of quartz glass, the scanning speed is low, heat energy is accumulated, so that a spatially non-uniform temperature field is generated on the quartz glass, thermally induced stress is formed, the strength of the quartz glass is reduced, and the difficulty of ablating micro channels in the quartz glass is reduced.
Further, the low scanning speed is 1-60 mm/s, and the amount of accumulated heat energy is 1-5 joules.
Further, setting different scanning speeds, and focusing nanosecond infrared laser on the lower surface of the quartz glass for scanning a set distance, so as to obtain a micro-channel which extends from the lower surface of the quartz glass to the upper surface of the quartz glass and has an adjustable inclination angle, wherein the micro-channel specifically means: the damaged area ablated by the laser continuously absorbs laser energy to generate plasma which moves against the propagation direction of the laser beam, the sub-speed of the plasma along the scanning direction is changed by changing the scanning speed, the combined speed of the plasma is further changed, and micro-channels with different inclination angles are ablated; the distance set by scanning refers to the length of the micro-channel to be formed projected on the lower surface of the quartz glass.
Further, the relation between the inclination angle and the scanning speed is as follows:
y＝-0.0067x 2 -0.6600x+89.0670
where y is the tilt angle and x is the scan speed.
Further, the scanning speed of the nanosecond infrared laser is 1-100 mm/s.
Further, the average laser power of the nanosecond infrared laser is greater than 16W.
Further, the laser repetition frequency of the nanosecond infrared laser is greater than 20kHz.
Further, placing the quartz glass means that the quartz glass is raised by a spacer.
Compared with the prior art, the technical scheme has the following principle and advantages:
1. compared with the femtosecond laser micro-processing technology, the technical scheme utilizes nanosecond infrared laser to prepare the micro-channel in the quartz glass, thereby greatly reducing the preparation cost, having high processing speed and direct writing speed of 100mm/s and being suitable for industrial application.
2. Compared with the technologies of photoetching, imprinting, rubbing and the like, the technical scheme does not need to design a special photoetching template, does not need other parts to cooperate, and has high preparation efficiency and lower realization requirement.
3. By controlling the scanning speed of the nanosecond infrared laser, micro-channels with different inclination angles can be obtained according to the requirements.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the services required in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the figures in the following description are only some embodiments of the present invention, and that other figures can be obtained according to these figures without inventive effort to a person skilled in the art.
FIG. 1 is a schematic flow chart of a method for preparing a micro-channel with adjustable inclination angle in quartz glass according to the invention;
FIG. 2 is a schematic diagram of processing quartz glass using nanosecond infrared laser (A is nanosecond infrared laser, B is quartz glass, C is a shim, and D is a workbench);
fig. 3 is a schematic view (E is a plasma) in which a nanosecond infrared laser focus is disposed on the lower surface of quartz glass and a plasma is generated in a damaged region;
FIG. 4 is a schematic diagram of a process of scanning nanosecond infrared laser focusing on the lower surface of quartz glass (scanning speed is 1 mm/s);
FIG. 5 is a schematic view of nanosecond infrared laser focusing on the lower surface of quartz glass for scanning (scanning speed is 3 mm/s);
fig. 6 and 7 are partial topography of a microchannel under a scanning electron microscope.
Detailed Description
The invention is further illustrated by the following examples:
as shown in fig. 1, a method for preparing a micro-channel with an adjustable inclination angle in quartz glass according to the embodiment includes the following steps:
s1, raising quartz glass with the size of 20mm multiplied by 50mm multiplied by 5mm by a gasket so that the upper surface and the lower surface of the quartz glass are in contact with air, and eliminating the influence of a workbench, as shown in FIG. 2;
s2, enabling nanosecond infrared laser to be perpendicular to the upper surface of the quartz glass and enabling a laser focus of the nanosecond infrared laser to be arranged on the lower surface of the quartz glass through a focusing lens;
wherein, the average laser power and the laser repetition frequency of the nanosecond infrared laser are respectively set to 20W and 40kHz;
s3, setting different scanning speeds, specifically 1-100 mm/S, and focusing nanosecond infrared laser on the lower surface of the quartz glass to scan a set distance (namely the length of a micro-channel to be formed projected on the lower surface of the quartz glass), so as to obtain the micro-channel which extends from the lower surface of the quartz glass to the upper surface of the quartz glass and has an adjustable inclination angle.
In the above, nanosecond infrared laser scans at a low speed of 1mm/s, heat energy is continuously accumulated, and when the amount of heat accumulation reaches 3 joules, a spatially non-uniform temperature field is generated on quartz glass, so that the thermal expansion amounts of all areas are different, and thermal stress is formed. The damaged area ablated by the laser continuously absorbs laser energy and a plasma is continuously generated as shown in fig. 3. On the one hand, the strength of the quartz glass is reduced by the thermally induced stress, so that the difficulty of ablating micro channels in the quartz glass is reduced; on the other hand, due to the low scanning speed, the plasma in the glass has enough time to continuously accumulate and continuously absorb laser energy, and finally the high-temperature high-pressure plasma burns quartz glass out of the micro-channel.
As shown in fig. 4, fig. 4 (b) to (d) show processes of forming micro channels in quartz glass after plasma formation; in fig. 4 (b), the plasma is formed, continuously absorbing the laser energy, with a partial velocity Vt against the laser beam propagation direction and Vs' due to the laser scanning velocity Vs, and in fig. 4 (c), both the nanosecond infrared laser beam and the plasma move a distance, the plasma moves through the path to form a microchannel, and in fig. 4 (d), the plasma is about to be flushed out from the upper surface of the quartz glass to form a microchannel.
Specifically, after the formation of plasma in quartz glass, the plasma absorbs laser energy and itself moves against the direction of propagation of the laser beam, and at this time, there is a velocity Vt in the thickness direction of the quartz glass. Since the laser beam is scanned in a moving manner, the plasma also has a partial velocity along the scanning direction of the laser beam.
In order to control the angle of the quartz glass micro-channel, the sub-speed of the plasma along the scanning direction can be changed by changing the scanning speed: so that the combined speed of the plasmas is changed, and micro-channels with different inclination angles are ablated. As shown in fig. 5, the nanosecond infrared laser scans at a speed of 3mm/s, giving the plasma a greater sub-speed Vs', and the resulting micro-channel is tilted at a greater angle than in fig. 4.
The relation between the inclination angle and the scanning speed is as follows:
y＝-0.0067x 2 -0.6600x+89.0670
where y is the tilt angle and x is the scan speed.
Fig. 6 and 7 are partial topography of a microchannel under a scanning electron microscope.
In addition, the micro-channel with adjustable inclination angle can be prepared by adjusting different laser powers, laser pulse widths, repetition frequencies and scanning speeds to be suitable for the interior of quartz glass with different thicknesses. For example, longer microchannels may be processed in a thicker transparent material by increasing laser power or pulse width, etc.
The above embodiments are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention, so variations in shape and principles of the present invention should be covered.
Claims (9)
1. A method for preparing a micro-channel with an adjustable inclination angle inside quartz glass, comprising:
placing the quartz glass such that both the upper surface and the lower surface of the quartz glass are in contact with air;
the nanosecond infrared laser is incident perpendicular to the upper surface of the quartz glass, and the laser focus of the nanosecond infrared laser is arranged on the lower surface of the quartz glass through a focusing lens;
different scanning speeds are set, so that nanosecond infrared laser is focused on the lower surface of the quartz glass for scanning a set distance, and a micro-channel which extends from the lower surface of the quartz glass to the upper surface of the quartz glass and is adjustable in inclination angle is obtained.
2. The method for preparing micro-channel with adjustable inclination angle in quartz glass according to claim 1, wherein the nanosecond infrared laser is focused on the lower surface of quartz glass to scan, and the low scanning speed is adopted first to accumulate heat energy, so that a spatially non-uniform temperature field is generated on the quartz glass, and the thermally induced stress for reducing the strength of the quartz glass is formed.
3. The method for preparing a micro channel with an adjustable inclination angle inside a quartz glass according to claim 2, wherein the low scanning speed is 1-60 mm/s, and the accumulated heat energy is 1-5 joules.
4. The method for preparing micro-channels with adjustable inclination angles in quartz glass according to claim 2, wherein different scanning speeds are set, so that nanosecond infrared laser is focused on the lower surface of the quartz glass to scan a set distance, and the micro-channels which extend from the lower surface of the quartz glass to the upper surface of the quartz glass and have adjustable inclination angles are obtained specifically: the damaged area ablated by the laser continuously absorbs laser energy to generate plasma which moves against the propagation direction of the laser beam, the sub-speed of the plasma along the scanning direction is changed by changing the scanning speed, the combined speed of the plasma is further changed, and micro-channels with different inclination angles are ablated; the distance set by scanning refers to the length of the micro-channel to be formed projected on the lower surface of the quartz glass.
5. The method for preparing a micro channel with an adjustable inclination angle in a quartz glass according to claim 4, wherein the relation between the inclination angle and the scanning speed is as follows:
y＝-0.0067x2-0.6600x+89.0670
where y is the tilt angle and x is the scan speed.
6. The method for preparing a micro channel with an adjustable inclination angle in quartz glass according to claim 1, wherein the scanning speed of nanosecond infrared laser is 1-100 mm/s.
7. A method for producing micro-channels with adjustable tilt angle in quartz glass according to any of claims 1-5, characterized in that the average laser power of nanosecond infrared laser is more than 16W.
8. A method for producing micro-channels with adjustable tilt angle in quartz glass according to any of claims 1-5, characterized in that the laser repetition rate of nanosecond infrared laser is more than 20kHz.
9. A method of producing micro-channels with adjustable tilt angle in a silica glass according to claim 1, wherein placing the silica glass is by raising the silica glass with a spacer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311075598.6A CN117161585A (en) | 2023-08-24 | 2023-08-24 | Method for preparing micro-channel with adjustable inclination angle in quartz glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311075598.6A CN117161585A (en) | 2023-08-24 | 2023-08-24 | Method for preparing micro-channel with adjustable inclination angle in quartz glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117161585A true CN117161585A (en) | 2023-12-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311075598.6A Pending CN117161585A (en) | 2023-08-24 | 2023-08-24 | Method for preparing micro-channel with adjustable inclination angle in quartz glass |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117161585A (en) |
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2023
- 2023-08-24 CN CN202311075598.6A patent/CN117161585A/en active Pending
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