CN117073539A - Piezoelectric ceramic bit output characteristic testing device and method - Google Patents
Piezoelectric ceramic bit output characteristic testing device and method Download PDFInfo
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Abstract
Description
技术领域Technical field
本发明涉及压电陶瓷特性测量领域,尤其涉及一种压电陶瓷力位输出特性测试装置及方法。The invention relates to the field of piezoelectric ceramic characteristic measurement, and in particular to a piezoelectric ceramic force position output characteristic testing device and method.
背景技术Background technique
动稳定性导数是飞行器稳定性和可控性分析与设计的关键参数,对飞行器的控制系统设计和飞行品质有着重要影响。随着飞行器系统向高速化、精确化方向的不断发展,对飞行器设计的性能要求也不断提高,其中,飞行器在超高速、大幅度机动下产生的阻尼导数、交叉导数、交叉耦合导数在内的动导数对飞行器外形分析与设计起着至关重要的指导作用,例如:飞行器大攻角下纵向运动产生的交叉耦合导数,显著影响飞行器的稳定性。由于传统的强迫振动试验中,纯旋转速率和平动加速度的影响无法分开,给出的是组合动导数。通常情况下,一些数学模型使用组合动导数,给出的预测飞行特性与实际情况有较合理的一致性。然而这种近似不是任何情况下都适用,例如:使用旋转强迫振荡数据来代表由纯旋转角速率产生的导数在大攻角情况下可产生无法忽略的偏差。因此,需要确定俯仰、偏航及滚转各方向的动导数及其耦合作用,来改善飞机飞行特性的预测效果。The dynamic stability derivative is a key parameter in the analysis and design of aircraft stability and controllability, and has an important impact on the design of the aircraft's control system and flight quality. As aircraft systems continue to develop in the direction of high speed and precision, the performance requirements for aircraft design are also constantly increasing. Among them, the damping derivatives, cross derivatives, and cross coupling derivatives generated by the aircraft under ultra-high speed and large-scale maneuvers include Dynamic derivatives play a vital guiding role in aircraft shape analysis and design. For example, the cross-coupling derivatives generated by the longitudinal motion of the aircraft under large angles of attack significantly affect the stability of the aircraft. Since the effects of pure rotational rate and translational acceleration cannot be separated in traditional forced vibration tests, the combined dynamic derivative is given. Usually, some mathematical models use combined dynamic derivatives to give predicted flight characteristics that are reasonably consistent with the actual situation. However, this approximation is not applicable in all cases. For example, using rotationally forced oscillation data to represent the derivatives produced by pure rotational angular rates can produce non-negligible deviations at large angles of attack. Therefore, it is necessary to determine the dynamic derivatives and their coupling effects in each direction of pitch, yaw and roll to improve the prediction of aircraft flight characteristics.
高速风洞内的飞行器多自由度动导数实验,面临如下几个难点:首先,驱动元件需要在有限空间内带动模型完成多维复合激振运动,其次,驱动元件需要在复杂流场环境下抵抗瞬变多维负载,输出精密运动;最后,多种动导数的测算任务工况不同,为增强试验机构的适配度,驱动元件需具备高承载,高刚度,宽频响应等能力,常规动导数试验机构已不再适用。叠堆式压电陶瓷驱动器在结构上将压电陶瓷片串联排列,在电路上压电陶瓷片之间采用并联连接,具有响应速度快、结构紧凑等特点,且压电陶瓷体积小、驱动力与能耗比大,可高效的将电能转换为机械能,作为动导数试验装置作动器能够达到较好的驱动效果。然而,压电材料本身的物理特性使其具有迟滞、蠕变等非线性特性,且其各向负载极限不等,轴向负载能力远大于切向,需保证压电陶瓷轴向受力以增强装置可靠性。在受力时压电陶瓷输出位移会相对减小,呈现出刚度时变非线性特征,严重影响压电陶瓷作动器在实际应用中的控制精度。这就需要对压电陶瓷在不同驱动电压及负载状态下的受力极限与输出位移特性开展测试研究。目前常用的压电陶瓷位移测量装置及测量方法没有考虑压电陶瓷的负载特性同输出位移特性的耦合作用关系。The multi-degree-of-freedom dynamic derivative experiment of an aircraft in a high-speed wind tunnel faces the following difficulties: first, the driving element needs to drive the model to complete multi-dimensional composite excitation motion in a limited space; second, the driving element needs to resist instantaneous vibration in a complex flow field environment. Variable multi-dimensional loads and output precision motion; finally, the measurement tasks of various dynamic derivatives are different. In order to enhance the adaptability of the test mechanism, the driving components need to have high load-bearing, high stiffness, wide-band response and other capabilities. Conventional dynamic derivative testing mechanisms No longer applicable. The stacked piezoelectric ceramic actuator arranges piezoelectric ceramic sheets in series in structure, and the piezoelectric ceramic sheets are connected in parallel on the circuit. It has the characteristics of fast response speed, compact structure, etc., and the piezoelectric ceramics are small in size and have high driving force. It has a large ratio to energy consumption and can efficiently convert electrical energy into mechanical energy. As an actuator for dynamic derivative test equipment, it can achieve better driving effects. However, the physical properties of the piezoelectric material itself cause it to have nonlinear characteristics such as hysteresis and creep, and its load limits are different in all directions. The axial load capacity is much greater than the tangential direction. It is necessary to ensure that the piezoelectric ceramics are stressed in the axial direction to strengthen the Device reliability. The output displacement of piezoelectric ceramics will relatively decrease when force is applied, showing a time-varying nonlinear stiffness characteristic, which seriously affects the control accuracy of piezoelectric ceramic actuators in practical applications. This requires testing and research on the stress limit and output displacement characteristics of piezoelectric ceramics under different driving voltages and load conditions. Currently commonly used piezoelectric ceramic displacement measurement devices and measurement methods do not consider the coupling relationship between the load characteristics of piezoelectric ceramics and the output displacement characteristics.
陈胜华等人的专利《压电陶瓷驱动器位移测量装置》,专利号为CN202121375877.0中公开了一种压电陶瓷驱动器位移测量装置。该装置利用压电陶瓷驱动器推动薄弱部产生变形,高精度应变片粘贴于外框的薄弱部处,对位移进行测量,可以大大提高压电陶瓷驱动器本身的抗扭强度。裴世鑫等人的专利《一种压电材料电压-位移特性测量实验仪》,专利号为CN201820915686.0中公开了一种基于迈克尔逊干涉原理的压电陶瓷驱动器位移测量装置。其通过改变压电材料工作电压控制平面反射镜移动,而后测量干涉条纹的移动数得到压电材料位移量与加载电压之间的关系。但以上装置未考虑外力对陶瓷输出的影响,只能表征压电陶瓷空载时的输出。The patent "Piezoelectric Ceramic Actuator Displacement Measuring Device" by Chen Shenghua and others, with patent number CN202121375877.0, discloses a piezoelectric ceramic actuator displacement measuring device. This device uses a piezoelectric ceramic actuator to push the weak part to deform. High-precision strain gauges are pasted on the weak part of the outer frame to measure the displacement, which can greatly improve the torsional strength of the piezoelectric ceramic actuator itself. The patent "An Experimental Instrument for Measuring Voltage-Displacement Characteristics of Piezoelectric Materials" by Pei Shixin and others, with patent number CN201820915686.0, discloses a piezoelectric ceramic actuator displacement measurement device based on the Michelson interference principle. It controls the movement of the plane mirror by changing the operating voltage of the piezoelectric material, and then measures the movement number of the interference fringes to obtain the relationship between the displacement of the piezoelectric material and the loading voltage. However, the above device does not consider the impact of external force on the ceramic output, and can only characterize the output of the piezoelectric ceramic when it is no-load.
荣伟彬等人的专利《一种主动式压电陶瓷最大输出力测量装置》,专利号为CN201610891447.1中公开了一种主动式压电陶瓷最大输出力测量装置。该装置具有大刚度,可实现压电陶瓷力输出时位移输出为零,能够准确测量标定出不同位移输出时的力输出值。但该装置利用大刚度结构固定压电陶瓷位移,忽略了外力对压电陶瓷的影响,仅能测量出陶瓷在某一位移量时的最大输出力,不能得到不同外力作用下压电陶瓷力位移对应关系。The patent "An Active Piezoelectric Ceramic Maximum Output Force Measuring Device" by Rong Weibin et al., patent number CN201610891447.1 discloses an active piezoelectric ceramic maximum output force measuring device. The device has high stiffness, can achieve zero displacement output when the piezoelectric ceramic force is output, and can accurately measure and calibrate the force output values at different displacement outputs. However, this device uses a large stiffness structure to fix the displacement of the piezoelectric ceramics and ignores the influence of external forces on the piezoelectric ceramics. It can only measure the maximum output force of the ceramics at a certain displacement and cannot obtain the force displacement of the piezoelectric ceramics under the action of different external forces. Correspondence.
发明内容Contents of the invention
本发明主要解决的技术难题是克服现有技术的不足,发明一种压电陶瓷力位输出特性测试装置及方法,实现对压电陶瓷在不同驱动电压及不同受力状态下的输出位移测量。The main technical problem solved by the present invention is to overcome the shortcomings of the existing technology and invent a piezoelectric ceramic force position output characteristic testing device and method to realize the output displacement measurement of piezoelectric ceramics under different driving voltages and different stress states.
本发明的技术方案如下:一种压电陶瓷力位输出特性测试装置,包括平行块1、主体2、弹簧4、前端承压板5、激光位移传感器7、传感器定位板8、悬臂9、后端承压板11、压力传感器13、压电陶瓷14、移动基座15、主体基座18、圆柱盖19、可调节支撑块20和力传导螺柱22;主体基座18呈L型,其一侧边固定连接主体2一端,另一侧边通过可调节支撑块20固定主体2一侧;主体2底部开梯形槽,可调节支撑块20一端于梯形槽内,支撑主体2;主体2内部开有3个不同大小的圆柱槽,第一圆柱槽内安装弹簧4和前端承压板5,第一圆柱槽底部开有横槽;前端承压板5一端连接平行块1,平行块1于横槽内移动;前端承压板5一侧为凸起,弹簧4套于所述凸起上,且两端分别与第一圆柱槽内壁、前端承压板5接触;第二圆柱槽内安装压电陶瓷14;第三圆柱槽内安装后端承压板11;压电陶瓷14两端通过移动基座分别接触前端承压板5和后端承压板11;后端承压板11一端通过力传导螺柱22与压力传感器13连接;压力传感器13固定于主体基座18一侧上;后端承压板11另一端连接悬臂9一端;悬臂9另一端连接传感器定位板8;传感器定位板8上安装激光位移传感器7;主体2上安装圆柱盖19。The technical solution of the present invention is as follows: a piezoelectric ceramic force position output characteristic testing device, including a parallel block 1, a main body 2, a spring 4, a front pressure plate 5, a laser displacement sensor 7, a sensor positioning plate 8, a cantilever 9, a rear End pressure plate 11, pressure sensor 13, piezoelectric ceramics 14, movable base 15, main base 18, cylindrical cover 19, adjustable support block 20 and force conduction stud 22; the main base 18 is L-shaped, with One side is fixedly connected to one end of the main body 2, and the other side is fixed to one side of the main body 2 through an adjustable support block 20; a trapezoidal groove is opened at the bottom of the main body 2, and one end of the adjustable support block 20 is in the trapezoidal groove to support the main body 2; inside the main body 2 There are 3 cylindrical grooves of different sizes. The spring 4 and the front pressure-bearing plate 5 are installed in the first cylindrical groove. There is a transverse groove at the bottom of the first cylindrical groove; one end of the front-end pressure plate 5 is connected to the parallel block 1, and the parallel block 1 is at Move in the transverse groove; one side of the front end pressure-bearing plate 5 is a protrusion, the spring 4 is set on the protrusion, and both ends are in contact with the inner wall of the first cylindrical groove and the front end pressure-bearing plate 5 respectively; installed in the second cylindrical groove Piezoelectric ceramics 14; the rear pressure-bearing plate 11 is installed in the third cylindrical groove; both ends of the piezoelectric ceramics 14 contact the front pressure-bearing plate 5 and the rear pressure-bearing plate 11 respectively through the moving base; one end of the rear pressure-bearing plate 11 The pressure sensor 13 is connected to the pressure sensor 13 through the force transmission stud 22; the pressure sensor 13 is fixed on one side of the main body base 18; the other end of the rear end pressure plate 11 is connected to one end of the cantilever 9; the other end of the cantilever 9 is connected to the sensor positioning plate 8; the sensor is positioned The laser displacement sensor 7 is installed on the plate 8; the cylindrical cover 19 is installed on the main body 2.
一种压电陶瓷力位输出特性测试方法,基于所述的压电陶瓷力位输出特性测试装置,测量压电陶瓷在不同驱动电压及不同受力状态下的输出位移;具体步骤如下:A piezoelectric ceramic force position output characteristic testing method, based on the piezoelectric ceramic force position output characteristic testing device, measuring the output displacement of the piezoelectric ceramic under different driving voltages and different force states; the specific steps are as follows:
第一步:组装压电陶瓷力位输出特性测试装置;激光位移传感器7、压力传感器13连接数据采集模块;数据采集模块依次连接上位机、实时控制器和功率放大器;将压电陶瓷14安装至压电陶瓷力位输出特性测试装置上,并对压电陶瓷14施加一预紧力;功率放大器连接压电陶瓷14;The first step: Assemble the piezoelectric ceramic force position output characteristic testing device; the laser displacement sensor 7 and the pressure sensor 13 are connected to the data acquisition module; the data acquisition module is connected to the host computer, real-time controller and power amplifier in turn; install the piezoelectric ceramic 14 to On the piezoelectric ceramic force position output characteristic testing device, a preload force is applied to the piezoelectric ceramic 14; the power amplifier is connected to the piezoelectric ceramic 14;
第二步:对压电陶瓷14施加不同大小、不同频率及不同波形的输入信号,完成压电陶瓷预设实验;Step 2: Apply input signals of different sizes, frequencies and waveforms to the piezoelectric ceramic 14 to complete the piezoelectric ceramic preset experiment;
第三步:通过上位机采集激光位移传感器7、压力传感器13输出数据,处理数据后得到不同电压下压电陶瓷14位移值及其对应的所受压力值。Step 3: Collect the output data of the laser displacement sensor 7 and the pressure sensor 13 through the host computer. After processing the data, the displacement values of the piezoelectric ceramic 14 under different voltages and the corresponding pressure values are obtained.
所述压电陶瓷14位移值及其对应的所受压力值具体如下:The displacement value of the piezoelectric ceramic 14 and its corresponding pressure value are as follows:
激光位移传感器7包括激光器、CCD相机以及光敏元件;由激光器发射的激光与物体表面法线成一定角度入射到被测物体表面,反射光和散射光经O处的透镜汇聚成像,最后被光敏元件采集;The laser displacement sensor 7 includes a laser, a CCD camera and a photosensitive element; the laser emitted by the laser is incident on the surface of the object being measured at a certain angle with the normal line of the object surface, and the reflected light and scattered light are condensed and imaged by the lens at O, and are finally captured by the photosensitive element collection;
入射光AB与基线AC的夹角为α,AO为激光器中心与CCD相机中心的距离,OE为透镜的焦距f,D为被测物体距离基线无穷远处时反射光线在光敏元件上成像的极限位置;DF为光斑在光敏单元上偏离极限位置的位移,记为x;△ABO∽△DOF,则有边长关系:The angle between the incident light AB and the baseline AC is α, AO is the distance between the center of the laser and the center of the CCD camera, OE is the focal length f of the lens, and D is the limit of the reflected light imaging on the photosensitive element when the measured object is infinitely far away from the baseline. position; DF is the displacement of the light spot from the limit position on the photosensitive unit, recorded as x; △ABO∽△DOF, then there is a side length relationship:
当被测表面与基线AO产生相对位移时,x改变为x’,由以上条件得压电陶瓷14的位移值y为:When the measured surface is relatively displaced from the baseline AO, x changes to x’. From the above conditions, the displacement value y of the piezoelectric ceramic 14 is:
在压力传感器13中,应变片布置为惠斯通电桥,当施加压力时应变片发生偏转;In the pressure sensor 13, the strain gauges are arranged as a Wheatstone bridge and deflect when pressure is applied;
压电陶瓷14两端受力大小由公式(5)给出:The force at both ends of the piezoelectric ceramic 14 is given by formula (5):
其中,ΔL表示压电陶瓷14的位移值,E代表压电陶瓷14的弹性模量,S代表压电陶瓷14的截面面积,L为压电陶瓷14的长度。Among them, ΔL represents the displacement value of the piezoelectric ceramic 14 , E represents the elastic modulus of the piezoelectric ceramic 14 , S represents the cross-sectional area of the piezoelectric ceramic 14 , and L is the length of the piezoelectric ceramic 14 .
本发明的有益效果:提出一种压电陶瓷力位输出特性测试装置及方法,实现压电陶瓷在不同驱动电压及不同受力状态下的输出位移测量。压电陶瓷力位输出特性测试装置内置压力传感器可实时获取压电陶瓷所受压力,前端的高刚度弹簧可在施加压力的同时为压电陶瓷伸缩提供余量,保证陶瓷在稳定负载下自由伸缩,压电陶瓷位移可由激光位移传感器测量,可为压电陶瓷动力学建模等提供高精度的数据。Beneficial effects of the present invention: a piezoelectric ceramic force position output characteristic testing device and method are proposed to realize the output displacement measurement of piezoelectric ceramics under different driving voltages and different stress states. The piezoelectric ceramic force position output characteristic testing device has a built-in pressure sensor that can obtain the pressure on the piezoelectric ceramic in real time. The high-stiffness spring at the front end can provide margin for the expansion and contraction of the piezoelectric ceramic while applying pressure, ensuring that the ceramic can expand and contract freely under a stable load. , the displacement of piezoelectric ceramics can be measured by a laser displacement sensor, which can provide high-precision data for piezoelectric ceramic dynamic modeling and so on.
附图说明Description of the drawings
图1为本发明的压电陶瓷力位输出特性测试装置连接示意图;Figure 1 is a schematic connection diagram of the piezoelectric ceramic force position output characteristic testing device of the present invention;
图2为本发明的压电陶瓷力位输出特性测试方法流程图;Figure 2 is a flow chart of the piezoelectric ceramic force position output characteristic testing method of the present invention;
图3为本发明压电陶瓷力位输出特性测试装置结构图;Figure 3 is a structural diagram of the piezoelectric ceramic force position output characteristic testing device of the present invention;
图4为压电陶瓷与压力传感器中心截面剖视图;Figure 4 is a cross-sectional view of the center of the piezoelectric ceramics and pressure sensor;
图5为主体底部结构图;Figure 5 is a structural diagram of the bottom of the main body;
图6为激光位移传感器工作原理图;Figure 6 shows the working principle diagram of the laser displacement sensor;
图7为压力传感器工作原理图。Figure 7 shows the working principle diagram of the pressure sensor.
图中:1-平行块、2-主体、3-圆柱盖紧定螺钉、4-弹簧、5-前端承压板、6-激光位移传感器紧定螺钉、7-激光位移传感器、8-传感器定位板、9-悬臂、10-定位板紧定螺钉、11-后端承压板、12-悬臂紧定螺钉、13-压力传感器、14-压电陶瓷、15-移动基座、16-定位销、17-主体紧定螺钉、18-主体基座、19-圆柱盖、20-可调节支撑块、21-力传感器紧定螺钉、22-力传导螺柱。In the picture: 1-parallel block, 2-main body, 3-cylindrical cover set screw, 4-spring, 5-front pressure plate, 6-laser displacement sensor set screw, 7-laser displacement sensor, 8-sensor positioning Plate, 9-cantilever, 10-positioning plate set screw, 11-rear end pressure plate, 12-cantilever set screw, 13-pressure sensor, 14-piezoelectric ceramics, 15-moving base, 16-positioning pin , 17-main body set screw, 18-main base, 19-cylindrical cover, 20-adjustable support block, 21-force sensor set screw, 22-force conduction stud.
具体实施方式Detailed ways
以下结合技术方案和附图详细说明本发明的实施过程。The implementation process of the present invention will be described in detail below with reference to the technical solutions and drawings.
该压电陶瓷力位输出特性测试装置内置压力传感器13,可实时获取压电陶瓷14所受外力,前端弹簧4可在施加压力的同时为压电陶瓷伸缩提供余量,避免压电陶瓷14损坏,压电陶瓷14位移可由激光位移传感器7测量。激光位移传感器7采用浮动式设计,避免结构件的变形影响,保证测量首末端与压电陶瓷伸长位移量相吻合。为保证压电陶瓷受力对中性,压电陶瓷力位输出特性测试装置采用球面配合结构预紧。螺栓预紧,弹簧施力的方式能够保证陶瓷在伸长作动中受到大小稳定的定向负载。整体测试方法可保证力位同步精准测量,具有结构紧凑、控制简便等特点。The piezoelectric ceramic force position output characteristic testing device has a built-in pressure sensor 13, which can obtain the external force exerted by the piezoelectric ceramic 14 in real time. The front spring 4 can provide margin for the expansion and contraction of the piezoelectric ceramic while applying pressure to avoid damage to the piezoelectric ceramic 14. , the displacement of the piezoelectric ceramic 14 can be measured by the laser displacement sensor 7 . The laser displacement sensor 7 adopts a floating design to avoid the influence of deformation of structural parts and ensure that the measurement head and end are consistent with the elongation displacement of the piezoelectric ceramic. In order to ensure the force neutrality of piezoelectric ceramics, the piezoelectric ceramic force position output characteristic testing device adopts a spherical matching structure to preload. The bolt pre-tightening and spring force application can ensure that the ceramic is subjected to a stable directional load during the elongation action. The overall testing method can ensure synchronous and accurate measurement of force and position, and has the characteristics of compact structure and simple control.
本方法采用的技术方案如下:The technical solutions adopted in this method are as follows:
第一步:组装压电陶瓷力位输出特性测试装置;将压电陶瓷14安装至压电陶瓷力位输出特性测试装置上,并对压电陶瓷14施加一预紧力;The first step: Assemble the piezoelectric ceramic force position output characteristic testing device; install the piezoelectric ceramic 14 on the piezoelectric ceramic force position output characteristic testing device, and apply a preload force to the piezoelectric ceramic 14;
如图1所示,压电陶瓷力位输出特性测试装置与功率放大器、实时控制器、数据采集装置、上位机等组成压电陶数据采集硬件系统。测试装置结构如图3、4、5所示,平行块1通过螺纹连接将前端承压板5固定在主体2前端,保证前端承压板5与主体2的垂直度;后端承压板11与主体2的槽配合,确定垂直度;压电陶瓷14两端的移动基座15分别与前端承压板5和后端承压板11中间的凹槽配合,以保证压力传感器13测量得到的陶瓷输出为轴向输出;主体2底部开梯形槽,通过定位销16和可调节支撑块20与主体基座18配合定位及支撑,使主体保持为水平状态;主体2通过主体紧定螺钉17与主体基座18连接,可通过主体紧定螺钉17实现对压电陶瓷14施加不同的初始预紧力;压力传感器13通过压力传感器紧定螺钉21与主体基座18连接;后端承压板11通过力传导螺柱22与压力传感器13连接,可将压电陶瓷14受力实时传输到压力传感器,同时可确定后端承压板11的位置;悬臂9通过悬臂紧定螺钉12与后端承压板11连接;传感器定位板8通过定位板紧定螺钉10与悬臂9连接;激光位移传感器7通过激光位移传感器紧定螺钉6与传感器定位板8连接,激光位移传感器7固定,通过测量其与前端承压板5的相对距离得到压电陶瓷14的输出位移;圆柱盖19通过圆柱盖紧定螺钉3与主体2连接,可防止主体内部部件脱出。As shown in Figure 1, the piezoelectric ceramic force position output characteristic testing device, power amplifier, real-time controller, data acquisition device, host computer, etc. form a piezoelectric ceramic data acquisition hardware system. The structure of the test device is shown in Figures 3, 4, and 5. The parallel block 1 fixes the front pressure plate 5 to the front end of the main body 2 through a threaded connection to ensure the verticality of the front pressure plate 5 and the main body 2; the rear pressure plate 11 Cooperate with the groove of the main body 2 to determine the verticality; the movable bases 15 at both ends of the piezoelectric ceramic 14 cooperate with the grooves in the middle of the front pressure-bearing plate 5 and the rear pressure-bearing plate 11 to ensure that the ceramic pressure measured by the pressure sensor 13 The output is axial output; a trapezoidal groove is opened at the bottom of the main body 2, and the positioning pin 16 and the adjustable support block 20 cooperate with the main body base 18 to position and support the main body to maintain a horizontal state; the main body 2 is connected to the main body through the main body tightening screw 17 The base 18 is connected, and different initial pre-tightening forces can be applied to the piezoelectric ceramics 14 through the main body set screw 17; the pressure sensor 13 is connected to the main body base 18 through the pressure sensor set screw 21; the rear end pressure plate 11 is connected through The force transmission stud 22 is connected to the pressure sensor 13, which can transmit the force of the piezoelectric ceramic 14 to the pressure sensor in real time, and at the same time determine the position of the rear end pressure plate 11; the cantilever 9 is connected to the rear end pressure through the cantilever set screw 12 The plate 11 is connected; the sensor positioning plate 8 is connected to the cantilever 9 through the positioning plate set screw 10; the laser displacement sensor 7 is connected to the sensor positioning plate 8 through the laser displacement sensor set screw 6, the laser displacement sensor 7 is fixed, and it is connected to the front end by measuring The relative distance of the pressure-bearing plate 5 obtains the output displacement of the piezoelectric ceramic 14; the cylindrical cover 19 is connected to the main body 2 through the cylindrical cover set screw 3, which can prevent the internal components of the main body from coming out.
第二步:对压电陶瓷14施加不同大小、不同频率及不同波形的输入信号,完成压电陶瓷预设实验;Step 2: Apply input signals of different sizes, frequencies and waveforms to the piezoelectric ceramic 14 to complete the piezoelectric ceramic preset experiment;
第三步:通过上位机采集激光位移传感器7、压力传感器13输出数据,处理数据后得到不同电压下压电陶瓷14位移值及其对应的所受压力值。Step 3: Collect the output data of the laser displacement sensor 7 and the pressure sensor 13 through the host computer. After processing the data, the displacement values of the piezoelectric ceramic 14 under different voltages and the corresponding pressure values are obtained.
综上,通过压电陶瓷测试系统得到压电陶瓷14的力位输出特性数据。In summary, the force position output characteristic data of the piezoelectric ceramic 14 is obtained through the piezoelectric ceramic testing system.
在激光位移传感器7中,激光器、CCD相机以及光敏元件为激光位移传感器的主要组成部分。如图6所示光路图,由激光器发射的激光与物体表面法线成一定角度入射到被测物体表面,反射光和散射光经O处的透镜汇聚成像,最后被光敏元件采集;In the laser displacement sensor 7, the laser, CCD camera and photosensitive element are the main components of the laser displacement sensor. As shown in the optical path diagram in Figure 6, the laser emitted by the laser is incident on the surface of the measured object at a certain angle with the normal line of the object surface. The reflected light and scattered light are condensed and imaged through the lens at O, and finally collected by the photosensitive element;
入射光AB与基线AC的夹角为α,AO为激光器中心与CCD相机中心的距离,OE为透镜的焦距f,D为被测物体距离基线无穷远处时反射光线在光敏元件上成像的极限位置;DF为光斑在光敏单元上偏离极限位置的位移,记为x;△ABO∽△DOF,则有边长关系:The angle between the incident light AB and the baseline AC is α, AO is the distance between the center of the laser and the center of the CCD camera, OE is the focal length f of the lens, and D is the limit of the reflected light imaging on the photosensitive element when the measured object is infinitely far away from the baseline. position; DF is the displacement of the light spot from the limit position on the photosensitive unit, recorded as x; △ABO∽△DOF, then there is a side length relationship:
当被测表面与基线AO产生相对位移时,x改变为x’,由以上条件得压电陶瓷14的位移值y为:When the measured surface is relatively displaced from the baseline AO, x changes to x’. From the above conditions, the displacement value y of the piezoelectric ceramic 14 is:
在压力传感器13中,应变片布置为惠斯通电桥,当施加压力时应变片发生偏转;In the pressure sensor 13, the strain gauges are arranged as a Wheatstone bridge and deflect when pressure is applied;
压电陶瓷14两端受力大小由公式(5)给出:The force at both ends of the piezoelectric ceramic 14 is given by formula (5):
其中,ΔL表示压电陶瓷的位移值,E代表压电陶瓷的弹性模量,S代表压电陶瓷的截面面积,L为压电陶瓷的长度。Among them, ΔL represents the displacement value of the piezoelectric ceramic, E represents the elastic modulus of the piezoelectric ceramic, S represents the cross-sectional area of the piezoelectric ceramic, and L is the length of the piezoelectric ceramic.
本发明的压电陶瓷力位输出特性测试装置,能够实现对压电陶瓷在不同驱动电压及不同受力状态下的输出位移测量。装置结构紧凑、控制简便,可为压电陶瓷动力学建模等提供高精度的数据,弥补了现有技术领域的空缺,应用潜力大。The piezoelectric ceramic force position output characteristic testing device of the present invention can measure the output displacement of the piezoelectric ceramic under different driving voltages and different stress states. The device has a compact structure and easy control, and can provide high-precision data for piezoelectric ceramic dynamics modeling, etc., filling the gaps in the existing technical field and having great application potential.
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