CN117066822A - Manufacturing method of ultrathin-wall vacuum chamber with reinforcing rib structure - Google Patents
Manufacturing method of ultrathin-wall vacuum chamber with reinforcing rib structure Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 39
- 230000003014 reinforcing effect Effects 0.000 title claims description 42
- 239000010935 stainless steel Substances 0.000 claims abstract description 29
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 29
- 229910000679 solder Inorganic materials 0.000 claims abstract description 23
- 238000005219 brazing Methods 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 10
- 229910001069 Ti alloy Inorganic materials 0.000 claims abstract description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 15
- 238000004140 cleaning Methods 0.000 claims description 15
- 238000012545 processing Methods 0.000 claims description 12
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 12
- 230000002787 reinforcement Effects 0.000 claims description 10
- 239000003351 stiffener Substances 0.000 claims description 10
- 239000008367 deionised water Substances 0.000 claims description 9
- 229910021641 deionized water Inorganic materials 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 238000005237 degreasing agent Methods 0.000 claims description 6
- 239000013527 degreasing agent Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 6
- 239000001307 helium Substances 0.000 claims description 6
- 229910052734 helium Inorganic materials 0.000 claims description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 6
- 238000003466 welding Methods 0.000 claims description 6
- 238000003754 machining Methods 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 241000270295 Serpentes Species 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 6
- 238000012423 maintenance Methods 0.000 abstract description 4
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 abstract description 4
- 239000000243 solution Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 101100334009 Caenorhabditis elegans rib-2 gene Proteins 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/14—Vacuum chambers
- H05H7/18—Cavities; Resonators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
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- Spectroscopy & Molecular Physics (AREA)
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Abstract
本发明涉及一种加强筋结构的超薄壁真空腔室的制作方法，通过不锈钢真空薄壁管和钛合金加强筋的极高真空室在满足加速器物理对好场区要求的基础上，大大减小了真空室的整体尺寸，进而大幅减小磁铁气隙，降低加速器制造及电源运维成本；从而解决了传统技术制作的薄壁加强筋真空腔室无法显著减小磁铁气隙及由银钯钎焊焊料而导致的制作成本过高等问题。
The invention relates to a method for manufacturing an ultra-thin-walled vacuum chamber with a reinforced rib structure. The ultra-high vacuum chamber, which uses stainless steel vacuum thin-walled tubes and titanium alloy reinforced ribs, greatly reduces the cost of the accelerator on the basis of meeting the physical requirements of the accelerator for a good field area. The overall size of the vacuum chamber is reduced, thereby significantly reducing the magnet air gap, reducing accelerator manufacturing and power supply operation and maintenance costs; thereby solving the problem that thin-walled stiffened vacuum chambers made with traditional technology cannot significantly reduce the magnet air gap and are made of silver-palladium Problems such as excessive production costs caused by brazing solder.
Description
技术领域Technical field
本发明涉及采用钎焊法制作真空腔室技术领域，具体是关于一种加强筋结构的超薄壁真空腔室的制作方法。The present invention relates to the technical field of manufacturing vacuum chambers using brazing methods, and specifically relates to a method for manufacturing an ultra-thin-walled vacuum chamber with a reinforced rib structure.
背景技术Background technique
新一代强流重离子加速器(HIAF)可以提供高达4.25GeV/u的脉冲重离子束流。为了保证这一指标的顺利实现，HIAF对各系统的设计提出了更高的要求，因束流寿命与真空腔室中的残余气体量、涡流效应及阻抗等相关。为了降低快速变化的磁场在对应真空腔室上产生的涡流效应，须对真空室的壁厚进一步降低。壁厚若为0.3mm，且真空腔室内真空度极高(10-9Pa)时，真空腔室内外压差相差15个量级，0.3mm超薄壁真空腔室由于其较差的结构刚性，会在大气压的作用下产生纵向及横向形变。为了抵消这种形变，从技术领域来讲，一般采用外壁增加加强筋的方式。The new generation of high-intensity heavy ion accelerator (HIAF) can provide pulsed heavy ion beams up to 4.25GeV/u. In order to ensure the smooth realization of this indicator, HIAF has put forward higher requirements for the design of each system, because the beam life is related to the residual gas amount, eddy current effect and impedance in the vacuum chamber. In order to reduce the eddy current effect produced by the rapidly changing magnetic field on the corresponding vacuum chamber, the wall thickness of the vacuum chamber must be further reduced. If the wall thickness is 0.3mm and the vacuum degree in the vacuum chamber is extremely high (10 -9 Pa), the pressure difference between the inside and outside of the vacuum chamber is 15 orders of magnitude. The 0.3mm ultra-thin wall vacuum chamber has poor structural rigidity. , which will produce longitudinal and transverse deformation under the action of atmospheric pressure. In order to offset this deformation, from a technical perspective, it is generally used to add reinforcement ribs to the outer wall.
然而，传统技术制作的薄壁加筋真空腔室其筋的材料与薄壁材料一致，一般为316L不锈钢，在制作方法上已趋向成熟，但传统技术制作出的真空腔室在减小磁铁气隙方面并无显著的作用。对于HIAF磁铁真空室，若不锈钢薄壁壁厚为0.3mm时，不锈钢加强筋高约为10mm，磁铁、电源的制作及运维成本依然很高。与此同时，用于不锈钢之间钎焊的银钯焊料价格涨幅迅猛，使得制作成本增加。However, the thin-walled reinforced vacuum chamber made by traditional technology has the same rib material as the thin-walled material, usually 316L stainless steel. The manufacturing method has become mature, but the vacuum chamber made by traditional technology has the problem of reducing the magnet gas. There is no significant effect on the gap. For the HIAF magnet vacuum chamber, if the thickness of the stainless steel thin wall is 0.3mm, the height of the stainless steel reinforcement rib is about 10mm, and the manufacturing and operation and maintenance costs of the magnet and power supply are still very high. At the same time, the price of silver palladium solder used for brazing stainless steel has increased rapidly, increasing production costs.
发明内容Contents of the invention
针对上述问题，本发明的目的是提供一种加强筋结构的超薄壁真空腔室的制作方法，以解决传统技术制作的薄壁加筋真空腔室无法显著减小磁铁气隙及由银钯钎焊焊料而导致的制作成本过高等问题。In view of the above problems, the purpose of the present invention is to provide a method for manufacturing an ultra-thin-walled vacuum chamber with a reinforced rib structure, so as to solve the problem that the thin-walled reinforced vacuum chamber made by traditional technology cannot significantly reduce the magnet air gap and is made of silver-palladium. Problems such as excessive production costs caused by brazing solder.
为实现上述目的，本发明采取以下技术方案：In order to achieve the above objects, the present invention adopts the following technical solutions:
本发明所述的加强筋结构的超薄壁真空腔室的制作方法，包括如下步骤：The manufacturing method of an ultra-thin-walled vacuum chamber with a reinforced rib structure according to the present invention includes the following steps:
制作真空薄壁管和加强筋；Making vacuum thin-walled tubes and stiffeners;
对制作成型后的真空薄壁管和制作完成后的加强筋进行抛光处理，处理完成后进行超声波清洗；Polish the formed vacuum thin-walled tube and the finished reinforcing ribs, and conduct ultrasonic cleaning after the processing is completed;
将内撑模具工装放入抛光和清洗后的不锈钢真空薄壁管内，以防止套设外部加强筋时不锈钢真空薄壁管变形；将加工好后的加强筋一个一个按照预设间距尺寸套在真空薄壁管上，完成后，将限位变形工装通过卡槽套在加强筋上；Place the inner support mold tooling into the polished and cleaned stainless steel vacuum thin-walled tube to prevent the stainless steel vacuum thin-walled tube from deforming when the external reinforcing ribs are set; place the processed reinforcing ribs one by one in the vacuum according to the preset spacing size On the thin-walled pipe, after completion, put the limiting deformation tooling on the reinforcing rib through the slot;
在真空薄壁管与加强筋之间，打入镍基焊膏，并使焊膏均匀且不能有蛇弯形状，焊膏直径为4～5mm，静置预设时间后，连同内撑模具工装及限位变形工装一起放入真空钎焊炉；Pour nickel-based solder paste between the vacuum thin-walled tube and the reinforcing ribs, and make the solder paste uniform and without any snake shape. The diameter of the solder paste is 4 to 5 mm. After leaving it for a preset time, the solder paste together with the inner support mold tooling Put it into the vacuum brazing furnace together with the limiting deformation tooling;
进入真空钎焊炉后，在炉内真空度值小于8×10-2Pa时，通过调节温度，以将加强筋焊接到真空薄壁管上；After entering the vacuum brazing furnace, when the vacuum degree in the furnace is less than 8×10 -2 Pa, adjust the temperature to weld the reinforcing ribs to the vacuum thin-walled tube;
钎焊好的不锈钢真空薄壁管的两端通过氩弧焊分别焊接有法兰，焊接完成后对真空腔室采用喷氦气进行真空检漏，检漏本底漏率应小于1×10-8Pa·l/s·cm-2,喷氦气无反应时制作完成。The two ends of the brazed stainless steel vacuum thin-walled tube are respectively welded with flanges through argon arc welding. After the welding is completed, the vacuum chamber is sprayed with helium for vacuum leak detection. The background leak rate of the leak detection should be less than 1×10 - 8 Pa·l/s·cm -2 , the production is completed when there is no reaction after spraying helium.
所述的制作方法，优选地，所述制作真空薄壁管是通过以下方式进行制作的：According to the manufacturing method, preferably, the vacuum thin-walled tube is manufactured in the following manner:
将薄壁不锈钢板激光焊接成圆筒体，并采用内撑模具工装冲压成型，成型后的真空薄壁管的截面呈跑道形。The thin-walled stainless steel plate is laser welded into a cylinder and stamped using an internal support mold tooling. The formed vacuum thin-walled tube has a racetrack-shaped cross-section.
所述的制作方法，优选地，所述制作加强筋是通过以下方式进行制作的：According to the manufacturing method, preferably, the ribs are manufactured in the following manner:
对加强筋按照与真空薄壁管截面轮廓相适应的尺寸，进行激光切割，在切割过程中，加强筋内部轮廓留有0.2mm的加工余量；The reinforcing ribs are laser cut to a size that is compatible with the cross-sectional profile of the vacuum thin-walled tube. During the cutting process, a 0.2mm processing allowance is left for the internal contour of the reinforcing ribs;
将留有加工余量的加强筋，进行950℃×0.5小时的真空高温除气，进一步消除加工过程中带来的内部残余应力。The reinforcing ribs with machining allowance will be degassed in a vacuum at 950°C x 0.5 hours to further eliminate the internal residual stress caused by the machining process.
所述的制作方法，优选地，在炉内真空度值小于8×10-2Pa时，通过调节温度，以将加强筋焊接到真空薄壁管上，具体操作为：According to the manufacturing method, preferably, when the vacuum value in the furnace is less than 8×10 -2 Pa, the temperature is adjusted to weld the reinforcing ribs to the vacuum thin-walled tube. The specific operations are as follows:
进炉后炉内真空度值小于8×10-2Pa时，开始升温，升温速率为5℃/min，升温至510℃时，保温30分钟，然后再继续升温至810℃，保温20分钟，再升温至1000℃，保温10分钟，再升温至1040℃～1070℃，保温3小时，然后开始降温，降温速率0.6℃/min，当降温至600℃时，保温10分钟，然后继续降温至110℃时，可以出炉。After entering the furnace, when the vacuum value in the furnace is less than 8×10 -2 Pa, the temperature begins to rise at a heating rate of 5°C/min. When the temperature rises to 510°C, keep it warm for 30 minutes, and then continue to raise the temperature to 810°C and keep it warm for 20 minutes. Then raise the temperature to 1000°C, keep it warm for 10 minutes, then raise the temperature to 1040°C ~ 1070°C, keep it warm for 3 hours, and then start to cool down at a cooling rate of 0.6°C/min. When the temperature drops to 600°C, keep it warm for 10 minutes, and then continue to cool down to 110°C. ℃, it can be taken out of the oven.
所述的制作方法，优选地，所述内撑模具工装包括：According to the manufacturing method, preferably, the inner support mold tooling includes:
半内撑模具，两个半内撑模具平行设置；Half inner support mold, two half inner support molds are arranged in parallel;
内撑模具固定板，两个内撑模具固定板分别设置于所述半内撑模具的两端，且两个半内撑模具的两端分别与对应的内撑模具固定板通过螺杆连接，以使两个半内撑模具的两端连接为一体。Inner support mold fixing plates, two inner support mold fixing plates are respectively provided at both ends of the half inner support mold, and the two ends of the two half inner support molds are respectively connected with the corresponding inner support mold fixing plates through screws, so as to Connect the two ends of the two half inner support molds into one body.
所述的制作方法，优选地，所述限位变形工装包括：According to the manufacturing method, preferably, the limiting deformation tooling includes:
第一限位变形工装侧板，两个第一限位变形工装侧板分别纵向设置于带有加强筋的真空薄壁管的上方和下方，且分别与若干个加强筋的顶部和底部卡接；The first limit deformation tooling side plate, the two first limit deformation tooling side plates are respectively arranged longitudinally above and below the vacuum thin-walled tube with stiffeners, and are respectively engaged with the tops and bottoms of several stiffeners. ;
第二限位变形工装侧板，两个第二限位变形工装侧板分别水平设置于带有加强筋的真空薄壁管的两侧，且分别与若干个加强筋的两侧卡接；The second limit deformation tooling side plates, the two second limit deformation tooling side plates are respectively horizontally arranged on both sides of the vacuum thin-walled tube with reinforcement ribs, and are respectively engaged with both sides of several reinforcement ribs;
限位变形工装端板，为L形结构，其第一端与第一限位变形工装侧板连接，其第二端与第二限位变形工装侧板连接，四个L形结构的限位变形工装端板形成环状结构；The limit deformation tool end plate is an L-shaped structure. Its first end is connected to the first limit deformation tool side plate, and its second end is connected to the second limit deformation tool side plate. The four L-shaped structure limiters The deformed tooling end plate forms a ring structure;
其中，所述第一限位变形工装侧板和所述第二限位变形工装侧板之间通过若干个定位销连接。Wherein, the first limit deformation tool side plate and the second limit deformation tool side plate are connected by a plurality of positioning pins.
所述的制作方法，优选地，所述真空薄壁管的材料为316L不锈钢材料，壁厚为0.3±0.05mm；According to the manufacturing method, preferably, the material of the vacuum thin-walled tube is 316L stainless steel, and the wall thickness is 0.3±0.05mm;
加强筋材料为钛合金TC4，厚度为4mm。The reinforcing rib material is titanium alloy TC4, with a thickness of 4mm.
所述的制作方法，优选地，所述对制作成型后的真空薄壁管和制作完成后的加强筋进行抛光处理，处理完成后进行超声波清洗，具体操作如下：The manufacturing method preferably includes polishing the formed vacuum thin-walled tube and the reinforced ribs, and performing ultrasonic cleaning after the processing is completed. The specific operations are as follows:
采用220目以上的砂纸进行不锈钢真空薄壁管和加强筋进行打磨抛光，抛光完成后，先采用碱性消油剂掺入去离子水进行超声波清洗，碱性消油剂和去离子水的比例为1:10，清洗时间30min，再用酒精进行超声波清洗，清洗时间15min，然后用去离子水反复冲洗，清洗完成后，取出清洗件，用干燥N2吹干。Use 220-grit or above sandpaper to grind and polish the stainless steel vacuum thin-walled tubes and reinforcing ribs. After polishing, first use an alkaline degreasing agent mixed with deionized water for ultrasonic cleaning. The ratio of alkaline degreasing agent to deionized water The cleaning time is 1:10, and the cleaning time is 30 minutes. Then use alcohol for ultrasonic cleaning, the cleaning time is 15 minutes, and then rinse repeatedly with deionized water. After cleaning is completed, take out the cleaning parts and blow dry with dry N2 .
所述的制作方法，优选地，所述镍基焊膏由以下重量百分比的组分组成：Cr4.4～5.5％，Si5.5～7％，B4～5.5％，Fe4～6％，余量为Ni。According to the production method, preferably, the nickel-based solder paste is composed of the following components by weight: Cr4.4~5.5%, Si5.5~7%, B4~5.5%, Fe4~6%, and the balance. For you.
本发明由于采取以上技术方案，其具有以下优点：Since the present invention adopts the above technical solutions, it has the following advantages:
(1)由于TC4材料屈服强度是316L不锈钢材料近4倍，且密度更小，与传统技术制作的0.3mm薄壁加筋真空腔室相比，不锈钢薄壁钛合金加强筋极高真空室在满足加速器物理对好场区要求的基础上，大大减小了真空室的整体尺寸，进而大幅减小磁铁气隙，降低加速器制造及电源运维成本；(1) Since the yield strength of TC4 material is nearly 4 times that of 316L stainless steel material and its density is smaller, compared with the 0.3mm thin-walled reinforced vacuum chamber made by traditional technology, the stainless steel thin-walled titanium alloy reinforced ultra-high vacuum chamber is On the basis of meeting the accelerator physical requirements for a good field area, the overall size of the vacuum chamber is greatly reduced, thereby greatly reducing the magnet air gap and reducing accelerator manufacturing and power supply operation and maintenance costs;
(2)钛合金加强筋与不锈钢筒体采用价格低廉的镍基焊膏进行焊接，取代了价格昂贵的银靶钎焊焊料。通过本发明工艺使得钎膏在钎焊缝内的流动性以及界面润湿性均较好，所得钎焊缝面积较大，致密性高，且无任何缺陷产生；(2) The titanium alloy reinforcement ribs and the stainless steel cylinder are welded with inexpensive nickel-based solder paste, replacing the expensive silver target brazing solder. Through the process of the present invention, the fluidity and interface wettability of the solder paste in the brazing seam are both good, and the resulting brazing seam has a large area, high density, and no defects;
(3)在加工过程中，采用内撑模具，限位变形工装等确保了不锈钢薄壁钛合金加强筋极高真空室尺寸形位公差控制在±0.2mm以内。(3) During the processing, internal support molds, limited deformation tooling, etc. are used to ensure that the size and shape tolerance of the ultra-high vacuum chamber with stainless steel thin-walled titanium alloy reinforcements is controlled within ±0.2mm.
附图说明Description of the drawings
通过阅读下文优选实施方式的详细描述，各种其他的优点和益处对于本领域普通技术人员将变得清楚明了。附图仅用于示出优选实施方式的目的，而并不认为是对本发明的限制。在整个附图中，用相同的附图标记表示相同的部件。在附图中：Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are for the purpose of illustrating preferred embodiments only and are not to be construed as limiting the invention. Throughout the drawings, the same reference numbers refer to the same parts. In the attached picture:
图1是本发明的带有加强筋的超薄壁真空腔室结构示意图；Figure 1 is a schematic structural diagram of the ultra-thin-walled vacuum chamber with reinforced ribs of the present invention;
图2是钎焊前，内撑模具工装、限位变形工装与超薄壁真空腔室的总体装配示意图；Figure 2 is a schematic diagram of the overall assembly of the inner support mold tooling, limiting deformation tooling and ultra-thin wall vacuum chamber before brazing;
图3是内撑模具工装的结构示意图；Figure 3 is a schematic structural diagram of the inner support mold tooling;
图4是限位变形工装侧板放大示意图；Figure 4 is an enlarged schematic diagram of the side plate of the limited deformation tooling;
图5是限位变形工装端板放大示意图。Figure 5 is an enlarged schematic diagram of the end plate of the limiting deformation tooling.
附图中各标记表示如下：The symbols in the drawings are as follows:
1-真空薄壁管；2-加强筋；3-法兰；4-半内撑模具；5-内撑模具固定板；6-螺杆；7-第一限位变形工装侧板；8-第二限位变形工装侧板；9-限位变形工装端板；10-螺栓；11-螺母；12-定位销。1-vacuum thin-walled tube; 2-reinforcement rib; 3-flange; 4-half inner support mold; 5-inner support mold fixing plate; 6-screw; 7-first limit deformation tooling side plate; 8-No. 2. Limiting deformation tooling side plate; 9-limiting deformation tooling end plate; 10-bolt; 11-nut; 12-positioning pin.
具体实施方式Detailed ways
下面将参照附图更详细地描述本发明的示例性实施方式。虽然附图中显示了本发明的示例性实施方式，然而应当理解，可以以各种形式实现本发明而不应被这里阐述的实施方式所限制。相反，提供这些实施方式是为了能够更透彻地理解本发明，并且能够将本发明的范围完整的传达给本领域的技术人员。Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a thorough understanding of the invention, and to fully convey the scope of the invention to those skilled in the art.
本发明提供一种加强筋结构的超薄壁真空腔室的制作方法，不锈钢真空薄壁管和钛合金加强筋的极高真空室在满足加速器物理对好场区要求的基础上，大大减小了真空室的整体尺寸，进而大幅减小磁铁气隙，降低加速器制造及电源运维成本；从而解决了传统技术制作的薄壁加强筋真空腔室无法显著减小磁铁气隙及由银钯钎焊焊料而导致的制作成本过高等问题。The invention provides a method for manufacturing an ultra-thin-walled vacuum chamber with a reinforced rib structure. The ultra-high vacuum chamber of stainless steel vacuum thin-walled tubes and titanium alloy reinforced ribs can greatly reduce the size of the ultra-thin-walled vacuum chamber on the basis of meeting the physical requirements of the accelerator for a good field area. The overall size of the vacuum chamber is reduced, thereby significantly reducing the magnet air gap, reducing accelerator manufacturing and power supply operation and maintenance costs; thereby solving the problem that the thin-walled stiffened vacuum chamber made by traditional technology cannot significantly reduce the magnet air gap and is made of silver-palladium solder. Problems such as excessive production costs caused by soldering solder.
本发明提供的加强筋结构的超薄壁真空腔室的制作方法，包括如下步骤：The method for manufacturing an ultra-thin-walled vacuum chamber with a reinforced rib structure provided by the present invention includes the following steps:
(1)制作真空薄壁管1和加强筋2；(1) Make vacuum thin-walled tube 1 and reinforcement rib 2;
(2)对制作成型后的真空薄壁管1和制作完成后的加强筋2进行抛光处理，处理完成后进行超声波清洗；(2) Polish the formed vacuum thin-walled tube 1 and the completed reinforcing ribs 2, and perform ultrasonic cleaning after the processing is completed;
(3)将内撑模具工装放入抛光和清洗后的不锈钢真空薄壁管内，以防止套设外部加强筋时不锈钢真空薄壁管变形；将加工好后的加强筋一个一个按照预设间距尺寸套在真空薄壁管上，完成后，将限位变形工装通过卡槽套在加强筋上，以防止在钎焊过程中加强筋相互错位及确保不锈钢真空薄壁管的尺寸形位公差；(3) Place the inner support mold tooling into the polished and cleaned stainless steel vacuum thin-walled tube to prevent the stainless steel vacuum thin-walled tube from deforming when the external stiffeners are installed; place the processed stiffeners one by one according to the preset spacing size Put it on the vacuum thin-walled tube. After completion, put the limiting deformation tooling on the reinforcing rib through the slot to prevent the reinforcing ribs from being misaligned with each other during the brazing process and ensure the dimensional and geometric tolerance of the stainless steel vacuum thin-walled tube;
(4)在真空薄壁管与加强筋之间，打入镍基焊膏，并使焊膏均匀且不能有蛇弯形状，焊膏直径为4～5mm，静置20分钟后，连同内撑模具工装及限位变形工装一起放入真空钎焊炉；(4) Pour nickel-based solder paste between the vacuum thin-walled tube and the reinforcing ribs, and make the solder paste uniform and without a snake shape. The diameter of the solder paste is 4 to 5 mm. After leaving it for 20 minutes, add the inner support together with the solder paste. The mold tooling and limiting deformation tooling are put into the vacuum brazing furnace together;
(5)进入真空钎焊炉后，在炉内真空度值小于8×10-2Pa时，通过调节温度，以将加强筋焊接到真空薄壁管上；(5) After entering the vacuum brazing furnace, when the vacuum value in the furnace is less than 8×10 -2 Pa, adjust the temperature to weld the reinforcing ribs to the vacuum thin-walled tube;
(6)钎焊好的不锈钢真空薄壁管的两端通过氩弧焊分别焊接有CF200法兰3，焊接完成后对真空腔室采用喷氦气进行真空检漏，检漏本底漏率应小于1×10-8Pa·l/s·cm-2,喷氦气无反应时制作完成。其加强筋结构的超薄壁真空腔室如图1所示。(6) The two ends of the brazed stainless steel vacuum thin-walled tube are respectively welded with CF200 flanges 3 through argon arc welding. After the welding is completed, the vacuum chamber is sprayed with helium for vacuum leak detection. The background leakage rate of the leak detection should be Less than 1×10 -8 Pa·l/s·cm -2 , the production is completed when there is no reaction from the helium injection. The ultra-thin-walled vacuum chamber with reinforced rib structure is shown in Figure 1.
在上述实施例中，优选地，所述制作真空薄壁管是通过以下方式进行制作的：In the above embodiment, preferably, the vacuum thin-walled tube is produced in the following manner:
将0.3mm薄壁不锈钢板激光焊接成圆筒体，并采用内撑模具工装冲压成型，成型后的真空薄壁管的截面呈跑道形。The 0.3mm thin-walled stainless steel plate is laser welded into a cylinder and stamped using an internal support mold tooling. The formed vacuum thin-walled tube has a racetrack-shaped cross-section.
在上述实施例中，优选地，所述制作加强筋是通过以下方式进行制作的：In the above embodiment, preferably, the reinforcement is produced in the following manner:
对加强筋按照与真空薄壁管截面轮廓相适应的尺寸，进行激光切割，在切割过程中，加强筋内部轮廓留有0.2mm的加工余量；将留有加工余量的加强筋，进行950℃×0.5小时的真空高温除气，进一步消除加工过程中带来的内部残余应力。The reinforcing ribs are laser cut according to the size suitable for the cross-sectional profile of the vacuum thin-walled tube. During the cutting process, a 0.2mm processing allowance is left on the inner contour of the reinforcing ribs; the reinforcing ribs with the processing allowance are processed for 950 °C × 0.5 hours of vacuum high-temperature degassing to further eliminate internal residual stress caused during the processing.
在上述实施例中，优选地，在炉内真空度值小于8×10-2Pa时，通过调节温度，以将加强筋焊接到真空薄壁管上，具体操作为：In the above embodiment, preferably, when the vacuum value in the furnace is less than 8×10 -2 Pa, the temperature is adjusted to weld the reinforcing ribs to the vacuum thin-walled tube. The specific operations are as follows:
进炉后炉内真空度值小于8×10-2Pa时，开始升温，升温速率为5℃/min，升温至510℃时，保温30分钟，然后再继续升温至810℃，保温20分钟，再升温至1000℃，保温10分钟，再升温至1040℃～1070℃，保温3小时，然后开始降温，降温速率0.6℃/min，当降温至600℃时，保温10分钟，然后继续降温至110℃时，可以出炉。After entering the furnace, when the vacuum value in the furnace is less than 8×10 -2 Pa, the temperature begins to rise at a heating rate of 5°C/min. When the temperature rises to 510°C, keep it warm for 30 minutes, and then continue to raise the temperature to 810°C and keep it warm for 20 minutes. Then raise the temperature to 1000°C, keep it warm for 10 minutes, then raise the temperature to 1040°C ~ 1070°C, keep it warm for 3 hours, and then start to cool down at a cooling rate of 0.6°C/min. When the temperature drops to 600°C, keep it warm for 10 minutes, and then continue to cool down to 110°C. ℃, it can be taken out of the oven.
在上述实施例中，优选地，如图2和图3所示，所述内撑模具工装包括：In the above embodiment, preferably, as shown in Figures 2 and 3, the inner support mold tooling includes:
半内撑模具4，两个半内撑模具4平行设置；Half inner support mold 4, two half inner support molds 4 are arranged in parallel;
内撑模具固定板5，两个内撑模具固定板5分别设置于半内撑模具4的两端，且两个半内撑模具4的两端分别与对应的内撑模具固定板5通过M17螺杆6连接，以使两个半内撑模具4的两端连接为一体。The inner support mold fixing plate 5, the two inner support mold fixing plates 5 are respectively arranged at both ends of the half inner support mold 4, and the two ends of the two half inner support molds 4 are respectively connected to the corresponding inner support mold fixing plates 5 through M17 The screw rod 6 is connected so that the two ends of the two half inner support molds 4 are connected into one body.
在上述实施例中，优选地，如图2、图4和图5所示，所述限位变形工装包括：In the above embodiment, preferably, as shown in Figures 2, 4 and 5, the limiting deformation tooling includes:
第一限位变形工装侧板7，两个第一限位变形工装侧板7分别纵向设置于带有加强筋的真空薄壁管的上方和下方，且分别与若干个加强筋2的顶部和底部卡接；具体地，在第一限位变形工装侧板7的一侧边设置有若干个卡槽，卡槽与加强筋2卡接。The first limit deformation tooling side plate 7 and the two first limit deformation tooling side plates 7 are longitudinally disposed above and below the vacuum thin-walled tube with stiffeners, and are respectively connected with the tops and bottoms of several stiffeners 2 The bottom is clamped; specifically, several clamping grooves are provided on one side of the first limiting deformation tooling side plate 7, and the clamping slots are clamped with the reinforcing ribs 2.
第二限位变形工装侧板8，两个第二限位变形工装侧板8分别水平设置于带有加强筋的真空薄壁管的两侧，且分别与若干个加强筋2的两侧卡接；具体地，也在第二限位变形工装侧板8的一侧边设置有若干个卡槽，卡槽与加强筋2卡接。The second limit deformation tooling side plates 8 are horizontally disposed on both sides of the vacuum thin-walled tube with reinforced ribs, and are respectively clamped with the two sides of several reinforcing ribs 2. Specifically, a number of clamping grooves are also provided on one side of the second limiting deformation tooling side plate 8 , and the clamping slots are engaged with the reinforcing ribs 2 .
限位变形工装端板9，为L形结构，其第一端与第一限位变形工装侧板7通过螺栓和螺母连接，其第二端与第二限位变形工装侧板8连接，四个L形结构的限位变形工装端板形成环状结构；The limit deformation tool end plate 9 is an L-shaped structure. Its first end is connected to the first limit deformation tool side plate 7 through bolts and nuts, and its second end is connected to the second limit deformation tool side plate 8. Four An L-shaped structure of the limit deformation tooling end plate forms a ring structure;
其中，第一限位变形工装侧板7和所述第二限位变形工装侧板8之间通过若干个定位销12连接。Among them, the first limit deformation tool side plate 7 and the second limit deformation tool side plate 8 are connected by a plurality of positioning pins 12 .
在上述实施例中，优选地，所述真空薄壁管1的材料为316L不锈钢材料，壁厚为0.3±0.05mm；加强筋2材料为钛合金TC4，厚度为4mm。In the above embodiment, preferably, the material of the vacuum thin-walled tube 1 is 316L stainless steel with a wall thickness of 0.3±0.05mm; the reinforcing rib 2 is made of titanium alloy TC4 with a thickness of 4mm.
在上述实施例中，优选地，所述对制作成型后的真空薄壁管和制作完成后的加强筋进行抛光处理，处理完成后进行超声波清洗，具体操作如下：In the above embodiment, preferably, the formed vacuum thin-walled tube and the completed reinforcing ribs are polished, and ultrasonic cleaning is performed after the processing is completed. The specific operations are as follows:
采用220目以上的砂纸进行不锈钢真空薄壁管和加强筋进行打磨抛光，抛光完成后，先采用碱性消油剂掺入去离子水进行超声波清洗，碱性消油剂和去离子水的比例为1:10，清洗时间30min，再用酒精进行超声波清洗，清洗时间15min，然后用去离子水反复冲洗，清洗完成后，取出清洗件，用干燥N2吹干。Use 220-grit or above sandpaper to grind and polish the stainless steel vacuum thin-walled tubes and reinforcing ribs. After polishing, first use an alkaline degreasing agent mixed with deionized water for ultrasonic cleaning. The ratio of alkaline degreasing agent to deionized water The cleaning time is 1:10, and the cleaning time is 30 minutes. Then use alcohol for ultrasonic cleaning, the cleaning time is 15 minutes, and then rinse repeatedly with deionized water. After cleaning is completed, take out the cleaning parts and blow dry with dry N2 .
在上述实施例中，优选地，所述镍基焊膏由以下重量百分比的组分组成：Cr4.4～5.5％，Si5.5～7％，B4～5.5％，Fe4～6％，余量为Ni。In the above embodiment, preferably, the nickel-based solder paste is composed of the following components by weight: Cr4.4~5.5%, Si5.5~7%, B4~5.5%, Fe4~6%, the balance For you.
最后应说明的是：以上实施例仅用以说明本发明的技术方案，而非对其限制；尽管参照前述实施例对本发明进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that it can still be used Modifications are made to the technical solutions described in the foregoing embodiments, or equivalent substitutions are made to some of the technical features; however, these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.
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