CN117066822A - Manufacturing method of ultrathin-wall vacuum chamber with reinforcing rib structure - Google Patents
Manufacturing method of ultrathin-wall vacuum chamber with reinforcing rib structure Download PDFInfo
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- CN117066822A CN117066822A CN202311003702.0A CN202311003702A CN117066822A CN 117066822 A CN117066822 A CN 117066822A CN 202311003702 A CN202311003702 A CN 202311003702A CN 117066822 A CN117066822 A CN 117066822A
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- 230000003014 reinforcing effect Effects 0.000 title claims abstract description 76
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 47
- 239000010935 stainless steel Substances 0.000 claims abstract description 29
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 29
- 238000005219 brazing Methods 0.000 claims abstract description 16
- 229910001069 Ti alloy Inorganic materials 0.000 claims abstract description 8
- 229910000679 solder Inorganic materials 0.000 claims abstract description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 14
- 238000005476 soldering Methods 0.000 claims description 14
- 238000004140 cleaning Methods 0.000 claims description 13
- 238000005498 polishing Methods 0.000 claims description 13
- 238000012545 processing Methods 0.000 claims description 12
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 11
- 239000008367 deionised water Substances 0.000 claims description 9
- 229910021641 deionized water Inorganic materials 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 238000003466 welding Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 229910052759 nickel Inorganic materials 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 239000003795 chemical substances by application Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 6
- 239000001307 helium Substances 0.000 claims description 6
- 229910052734 helium Inorganic materials 0.000 claims description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 238000005507 spraying Methods 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 244000137852 Petrea volubilis Species 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 238000000861 blow drying Methods 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000007872 degassing Methods 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 238000011010 flushing procedure Methods 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 238000003698 laser cutting Methods 0.000 claims description 3
- 239000003351 stiffener Substances 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract description 5
- 238000012423 maintenance Methods 0.000 abstract description 4
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 abstract description 4
- 238000001816 cooling Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 101100334009 Caenorhabditis elegans rib-2 gene Proteins 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/14—Vacuum chambers
- H05H7/18—Cavities; Resonators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mechanical Engineering (AREA)
- Particle Accelerators (AREA)
Abstract
The invention relates to a manufacturing method of an ultrathin-wall vacuum chamber with a reinforcing rib structure, which is characterized in that the whole size of the vacuum chamber is greatly reduced on the basis of meeting the requirements of accelerator physics on good field areas through a stainless steel vacuum thin-wall tube and an extremely high vacuum chamber with titanium alloy reinforcing ribs, so that the air gap of a magnet is greatly reduced, and the manufacturing cost and the power supply operation and maintenance cost of the accelerator are reduced; therefore, the problems that the magnet air gap cannot be obviously reduced, the manufacturing cost is too high and the like caused by silver-palladium brazing solder in the thin-wall reinforcing rib vacuum chamber manufactured by the traditional technology are solved.
Description
Technical Field
The invention relates to the technical field of vacuum chamber manufacturing by adopting a brazing method, in particular to a manufacturing method of an ultrathin-wall vacuum chamber with a reinforcing rib structure.
Background
A new generation of high current Heavy Ion Accelerators (HIAF) can provide pulsed heavy ion beam currents of up to 4.25 GeV/u. In order to ensure smooth implementation of this index, the HIAF puts higher demands on the design of each system, as the beam lifetime is related to the residual gas volume in the vacuum chamber, eddy current effects, impedance, etc. In order to reduce the eddy current effect of the rapidly changing magnetic field on the corresponding vacuum chamber, the wall thickness of the vacuum chamber must be further reduced. If the wall thickness is 0.3mm, the vacuum degree in the vacuum chamber is extremely high (10 -9 Pa), the difference between the pressure difference between the inside and the outside of the vacuum chamber is 15 orders of magnitude, and the 0.3mm ultrathin wall vacuum chamber can generate longitudinal and transverse deformation under the action of atmospheric pressure due to poor structural rigidity. In order to counteract such deformation, in the technical field, a manner of adding reinforcing ribs to the outer wall is generally adopted.
However, the materials of the ribs of the thin-wall reinforced vacuum chamber manufactured by the conventional technology are consistent with those of the thin-wall materials, generally 316L stainless steel, and the manufacturing method of the thin-wall reinforced vacuum chamber tends to be mature, but the vacuum chamber manufactured by the conventional technology has no obvious effect on reducing the air gap of the magnet. For the HIAF magnet vacuum chamber, if the thickness of the stainless steel thin wall is 0.3mm, the height of the stainless steel reinforcing ribs is about 10mm, and the manufacturing and operation and maintenance costs of the magnet and the power supply are still high. Meanwhile, the price of silver-palladium solder used for brazing among stainless steel is high, so that the manufacturing cost is increased.
Disclosure of Invention
The invention aims to provide a manufacturing method of an ultrathin-wall vacuum chamber with a reinforcing rib structure, which aims to solve the problems that a magnet air gap cannot be remarkably reduced in a thin-wall reinforced vacuum chamber manufactured by the prior art, manufacturing cost is too high caused by silver-palladium brazing solder and the like.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the invention relates to a manufacturing method of an ultrathin-wall vacuum chamber with a reinforcing rib structure, which comprises the following steps:
manufacturing a vacuum thin-wall pipe and a reinforcing rib;
polishing the manufactured and molded vacuum thin-wall tube and the manufactured reinforcing ribs, and performing ultrasonic cleaning after the treatment is completed;
placing the internal stay die tooling into the polished and cleaned stainless steel vacuum thin-wall tube to prevent the stainless steel vacuum thin-wall tube from deforming when the external reinforcing ribs are sleeved; sleeving the processed reinforcing ribs on the vacuum thin-wall tube one by one according to a preset interval size, and sleeving the limiting deformation tool on the reinforcing ribs through clamping grooves after the processing is completed;
driving nickel-based soldering paste between the vacuum thin-wall tube and the reinforcing rib, enabling the soldering paste to be uniform and not to have a snake-shaped shape, enabling the diameter of the soldering paste to be 4-5 mm, standing for a preset time, and then placing the soldering paste, the inner support die tooling and the limiting deformation tooling into a vacuum brazing furnace;
after entering a vacuum brazing furnace, the vacuum degree value in the furnace is less than 8 multiplied by 10 -2 During Pa, the temperature is regulated so as to weld the reinforcing ribs on the vacuum thin-wall tube;
flanges are welded at two ends of the brazed stainless steel vacuum thin-wall pipe respectively through argon arc welding, after welding is finished, vacuum leakage detection is carried out on the vacuum chamber by spraying helium gas, and the leakage detection background leakage rate is smaller than 1 multiplied by 10 -8 Pa·l/s·cm -2 And (5) spraying helium gas, and finishing the preparation when no reaction exists.
In the manufacturing method, preferably, the manufacturing of the vacuum thin-wall tube is performed by the following steps:
and (3) laser welding the thin-wall stainless steel plate into a cylinder, stamping and forming by adopting an internal stay die tool, wherein the section of the formed vacuum thin-wall tube is in a runway shape.
In the above manufacturing method, preferably, the manufacturing of the reinforcing ribs is performed by:
carrying out laser cutting on the reinforcing rib according to the size which is matched with the section outline of the vacuum thin-wall pipe, wherein in the cutting process, the processing allowance of 0.2mm is reserved on the inner outline of the reinforcing rib;
and (3) carrying out vacuum high-temperature degassing for 0.5 hour at 950 ℃ on the reinforcing rib with the processing allowance, and further eliminating internal residual stress brought in the processing process.
The production method is preferably that the vacuum degree value in the furnace is less than 8 multiplied by 10 -2 During Pa, the temperature is regulated so as to weld the reinforcing ribs on the vacuum thin-wall tube, and the concrete operation is as follows:
vacuum degree value in furnace after furnace feeding is less than 8 multiplied by 10 -2 And (3) during Pa, heating, wherein the heating rate is 5 ℃/min, heating to 510 ℃, preserving heat for 30 minutes, then continuously heating to 810 ℃, preserving heat for 20 minutes, heating to 1000 ℃, preserving heat for 10 minutes, heating to 1040-1070 ℃, preserving heat for 3 hours, then starting cooling, wherein the cooling rate is 0.6 ℃/min, preserving heat for 10 minutes when cooling to 600 ℃, and then continuously cooling to 110 ℃, so that the furnace can be discharged.
In the above manufacturing method, preferably, the internal support mold tool includes:
half internal bracing die, two half internal bracing die are parallel to each other;
and the two inner support die fixing plates are respectively arranged at two ends of the half inner support die, and the two ends of the two half inner support dies are respectively connected with the corresponding inner support die fixing plates through screws so that the two ends of the two half inner support dies are connected into a whole.
In the above manufacturing method, preferably, the limiting deformation tool includes:
the first limiting deformation tooling side plates are longitudinally arranged above and below the vacuum thin-wall tube with the reinforcing ribs and are respectively clamped with the top and the bottom of the reinforcing ribs;
the second limiting deformation tooling side plates are respectively and horizontally arranged at two sides of the vacuum thin-wall tube with the reinforcing ribs and are respectively clamped with two sides of the plurality of reinforcing ribs;
the limiting deformation tooling end plate is of an L-shaped structure, a first end of the limiting deformation tooling end plate is connected with a first limiting deformation tooling side plate, a second end of the limiting deformation tooling end plate is connected with a second limiting deformation tooling side plate, and the limiting deformation tooling end plates of the four L-shaped structures form an annular structure;
the first limiting deformation tooling side plates are connected with the second limiting deformation tooling side plates through a plurality of locating pins.
In the manufacturing method, preferably, the vacuum thin-wall tube is made of 316L stainless steel, and the wall thickness is 0.3+/-0.05 mm;
the reinforcing rib is made of titanium alloy TC4, and the thickness is 4mm.
In the manufacturing method, preferably, polishing is performed on the manufactured and molded vacuum thin-wall tube and the manufactured reinforcing rib, and ultrasonic cleaning is performed after the polishing is completed, wherein the specific operation is as follows:
polishing a stainless steel vacuum thin-wall pipe and a reinforcing rib by adopting sand paper with 220 meshes, after polishing, firstly adopting an alkaline oil-removing agent to be mixed with deionized water for ultrasonic cleaning, wherein the proportion of the alkaline oil-removing agent to the deionized water is 1:10, the cleaning time is 30min, then adopting alcohol for ultrasonic cleaning, the cleaning time is 15min, then repeatedly flushing with the deionized water, taking out a cleaning piece after cleaning is completed, and drying N 2 And (5) blow-drying.
In the manufacturing method, preferably, the nickel-based solder paste comprises the following components in percentage by weight: 4.4 to 5.5 percent of Cr, 5.5 to 7 percent of Si, 4 to 5.5 percent of B, 4 to 6 percent of Fe and the balance of Ni.
Due to the adoption of the technical scheme, the invention has the following advantages:
(1) Because the TC4 material has the yield strength which is approximately 4 times that of a 316L stainless steel material and has smaller density, compared with a 0.3mm thin-wall reinforced vacuum chamber manufactured by the traditional technology, the stainless steel thin-wall titanium alloy reinforced rib extremely high vacuum chamber greatly reduces the overall size of the vacuum chamber on the basis of meeting the requirements of the accelerator physical alignment on a good field, thereby greatly reducing the magnet air gap and reducing the manufacturing and power supply operation and maintenance cost of the accelerator;
(2) The titanium alloy reinforcing ribs and the stainless steel cylinder body are welded by adopting low-cost nickel-based soldering paste, so that expensive silver target soldering flux is replaced. The process of the invention ensures that the mobility and interface wettability of the brazing paste in the brazing seam are good, the area of the obtained brazing seam is large, the compactness is high, and no defect is generated;
(3) In the processing process, an internal support die, a limiting deformation tool and the like are adopted to ensure that the dimensional form and position tolerance of the extremely high vacuum chamber of the stainless steel thin-wall titanium alloy reinforcing rib is controlled within +/-0.2 mm.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Like parts are designated with like reference numerals throughout the drawings. In the drawings:
FIG. 1 is a schematic view of an ultra-thin wall vacuum chamber with reinforcing ribs of the present invention;
FIG. 2 is a general assembly schematic of an inner stay mold tooling, a limit deformation tooling and an ultra-thin wall vacuum chamber prior to brazing;
FIG. 3 is a schematic structural view of an internal stay tooling;
FIG. 4 is an enlarged schematic view of a side plate of the limiting deformation tooling;
fig. 5 is an enlarged schematic view of the end plate of the limit deformation tool.
The various references in the drawings are as follows:
1-a vacuum thin-wall tube; 2-reinforcing ribs; 3-flanges; 4-half internal support mold; 5-an inner support die fixing plate; 6-a screw; 7-a first limiting deformation tooling side plate; 8-a second limiting deformation tooling side plate; 9-limiting the deformation tooling end plate; 10-bolts; 11-a nut; 12-locating pins.
Detailed Description
Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
The invention provides a manufacturing method of an ultrathin-wall vacuum chamber with a reinforcing rib structure, which greatly reduces the overall size of the vacuum chamber on the basis of meeting the requirements of accelerator physics on good field areas in the extremely high vacuum chamber with a stainless steel vacuum thin-wall tube and titanium alloy reinforcing ribs, thereby greatly reducing the magnet air gap and reducing the manufacturing and power supply operation and maintenance cost of the accelerator; therefore, the problems that the magnet air gap cannot be obviously reduced, the manufacturing cost is too high and the like caused by silver-palladium brazing solder in the thin-wall reinforcing rib vacuum chamber manufactured by the traditional technology are solved.
The invention provides a manufacturing method of an ultrathin-wall vacuum chamber with a reinforcing rib structure, which comprises the following steps:
(1) Manufacturing a vacuum thin-wall pipe 1 and a reinforcing rib 2;
(2) Polishing the manufactured and molded vacuum thin-wall tube 1 and the manufactured reinforcing ribs 2, and cleaning by ultrasonic waves after the treatment is completed;
(3) Placing the internal stay die tooling into the polished and cleaned stainless steel vacuum thin-wall tube to prevent the stainless steel vacuum thin-wall tube from deforming when the external reinforcing ribs are sleeved; sleeving the processed reinforcing ribs on the vacuum thin-wall tube one by one according to a preset interval size, and sleeving a limiting deformation tool on the reinforcing ribs through clamping grooves after finishing, so as to prevent the mutual dislocation of the reinforcing ribs and ensure the dimensional and form tolerance of the stainless steel vacuum thin-wall tube in the brazing process;
(4) Driving nickel-based soldering paste between the vacuum thin-wall tube and the reinforcing rib, enabling the soldering paste to be uniform and not to have a snake-shaped, enabling the diameter of the soldering paste to be 4-5 mm, standing for 20 minutes, and then placing the soldering paste, the inner support die tooling and the limiting deformation tooling into a vacuum brazing furnace;
(5) After entering a vacuum brazing furnace, the vacuum degree value in the furnace is less than 8 multiplied by 10 -2 During Pa, the temperature is regulated so as to weld the reinforcing ribs on the vacuum thin-wall tube;
(6) CF200 flanges 3 are welded at two ends of the brazed stainless steel vacuum thin-wall pipe respectively through argon arc welding, and after welding is finished, vacuum leakage detection is carried out on a vacuum chamber by spraying helium gas, and the leakage detection background leakage rate is less than 1 multiplied by 10 -8 Pa·l/s·cm -2 And (5) spraying helium gas, and finishing the preparation when no reaction exists. The ultra-thin wall vacuum chamber of the stiffener structure is shown in figure 1.
In the above embodiment, preferably, the manufacturing of the vacuum thin-walled tube is performed by:
and (3) laser welding a 0.3mm thin-wall stainless steel plate into a cylinder, and stamping and forming by adopting an internal stay die tool, wherein the section of the formed vacuum thin-wall tube is in a runway shape.
In the above embodiment, preferably, the manufacturing stiffener is manufactured by:
carrying out laser cutting on the reinforcing rib according to the size which is matched with the section outline of the vacuum thin-wall pipe, wherein in the cutting process, the processing allowance of 0.2mm is reserved on the inner outline of the reinforcing rib; and (3) carrying out vacuum high-temperature degassing for 0.5 hour at 950 ℃ on the reinforcing rib with the processing allowance, and further eliminating internal residual stress brought in the processing process.
In the above embodiment, it is preferable that the vacuum degree value in the furnace is less than 8×10 -2 During Pa, the temperature is regulated so as to weld the reinforcing ribs on the vacuum thin-wall tube, and the concrete operation is as follows:
vacuum degree value in furnace after furnace feeding is less than 8 multiplied by 10 -2 And (3) during Pa, heating, wherein the heating rate is 5 ℃/min, heating to 510 ℃, preserving heat for 30 minutes, then continuously heating to 810 ℃, preserving heat for 20 minutes, heating to 1000 ℃, preserving heat for 10 minutes, heating to 1040-1070 ℃, preserving heat for 3 hours, then starting cooling, wherein the cooling rate is 0.6 ℃/min, preserving heat for 10 minutes when cooling to 600 ℃, and then continuously cooling to 110 ℃, so that the furnace can be discharged.
In the foregoing embodiment, preferably, as shown in fig. 2 and 3, the internal support mold tooling includes:
half internal bracing dies 4, wherein two half internal bracing dies 4 are arranged in parallel;
the two inner support die fixing plates 5 are respectively arranged at two ends of the half inner support die 4, and two ends of the two half inner support dies 4 are respectively connected with the corresponding inner support die fixing plates 5 through M17 screw rods 6, so that two ends of the two half inner support dies 4 are connected into a whole.
In the foregoing embodiment, preferably, as shown in fig. 2, fig. 4 and fig. 5, the limit deformation tool includes:
the first limiting deformation tooling side plates 7 are respectively and longitudinally arranged above and below the vacuum thin-wall tube with the reinforcing ribs, and are respectively clamped with the top and the bottom of the plurality of reinforcing ribs 2; specifically, a plurality of clamping grooves are formed in one side edge of the first limiting deformation tooling side plate 7, and the clamping grooves are clamped with the reinforcing ribs 2.
The second limiting deformation tooling side plates 8 are respectively and horizontally arranged at two sides of the vacuum thin-wall tube with the reinforcing ribs, and are respectively clamped with two sides of the plurality of reinforcing ribs 2; specifically, a plurality of clamping grooves are formed in one side edge of the second limiting deformation tooling side plate 8, and the clamping grooves are clamped with the reinforcing ribs 2.
The limiting deformation tooling end plate 9 is of an L-shaped structure, a first end of the limiting deformation tooling end plate is connected with the first limiting deformation tooling side plate 7 through a bolt and a nut, a second end of the limiting deformation tooling end plate is connected with the second limiting deformation tooling side plate 8, and the limiting deformation tooling end plates of the four L-shaped structures form an annular structure;
the first limiting deformation tooling side plate 7 is connected with the second limiting deformation tooling side plate 8 through a plurality of positioning pins 12.
In the above embodiment, preferably, the material of the vacuum thin-wall tube 1 is 316L stainless steel material, and the wall thickness is 0.3±0.05mm; the reinforcing rib 2 is made of titanium alloy TC4, and the thickness is 4mm.
In the foregoing embodiment, preferably, the polishing treatment is performed on the vacuum thin-wall tube after the manufacturing and the reinforcing rib after the manufacturing, and the ultrasonic cleaning is performed after the treatment is completed, which specifically comprises the following operations:
polishing a stainless steel vacuum thin-wall pipe and a reinforcing rib by adopting sand paper with 220 meshes, after polishing, firstly adopting an alkaline oil-removing agent to be mixed with deionized water for ultrasonic cleaning, wherein the proportion of the alkaline oil-removing agent to the deionized water is 1:10, the cleaning time is 30min, then adopting alcohol for ultrasonic cleaning, the cleaning time is 15min, then repeatedly flushing with the deionized water, taking out a cleaning piece after cleaning is completed, and drying N 2 And (5) blow-drying.
In the above embodiment, preferably, the nickel-based solder paste is composed of the following components in percentage by weight: 4.4 to 5.5 percent of Cr, 5.5 to 7 percent of Si, 4 to 5.5 percent of B, 4 to 6 percent of Fe and the balance of Ni.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (9)
1. The manufacturing method of the ultrathin-wall vacuum chamber with the reinforcing rib structure is characterized by comprising the following steps of:
manufacturing a vacuum thin-wall pipe and a reinforcing rib;
polishing the manufactured and molded vacuum thin-wall tube and the manufactured reinforcing ribs, and performing ultrasonic cleaning after the treatment is completed;
placing the internal stay die tooling into the polished and cleaned stainless steel vacuum thin-wall tube to prevent the stainless steel vacuum thin-wall tube from deforming when the external reinforcing ribs are sleeved; sleeving the processed reinforcing ribs on the vacuum thin-wall tube one by one according to a preset interval size, and sleeving the limiting deformation tool on the reinforcing ribs through clamping grooves after the processing is completed;
driving nickel-based soldering paste between the vacuum thin-wall tube and the reinforcing rib, enabling the soldering paste to be uniform and not to have a snake-shaped shape, enabling the diameter of the soldering paste to be 4-5 mm, standing for a preset time, and then placing the soldering paste, the inner support die tooling and the limiting deformation tooling into a vacuum brazing furnace;
after entering a vacuum brazing furnace, when the vacuum degree value in the furnace is smaller than a set value, the temperature is regulated so as to weld the reinforcing ribs on the vacuum thin-wall pipe;
flanges are welded at two ends of the brazed stainless steel vacuum thin-wall pipe respectively through argon arc welding, vacuum leakage detection is carried out on the vacuum chamber by spraying helium after the welding is finished, and when the leakage rate of the leakage detection background is smaller than a set value, the manufacturing is finished when the spraying helium does not react.
2. The method of manufacturing according to claim 1, wherein the manufacturing of the vacuum thin-walled tube is performed by:
and (3) laser welding the thin-wall stainless steel plate into a cylinder, stamping and forming by adopting an internal stay die tool, wherein the section of the formed vacuum thin-wall tube is in a runway shape.
3. The method of manufacturing according to claim 1, wherein the manufacturing stiffener is manufactured by:
carrying out laser cutting on the reinforcing rib according to the size which is matched with the section outline of the vacuum thin-wall pipe, wherein in the cutting process, the processing allowance of 0.2mm is reserved on the inner outline of the reinforcing rib;
and (3) carrying out vacuum high-temperature degassing for 0.5 hour at 950 ℃ on the reinforcing rib with the processing allowance, and further eliminating internal residual stress brought in the processing process.
4. The method according to claim 1, wherein the vacuum degree value in the furnace is less than 8 x 10 -2 During Pa, the temperature is regulated so as to weld the reinforcing ribs on the vacuum thin-wall tube, and the concrete operation is as follows:
vacuum degree value in furnace after furnace feeding is less than 8 multiplied by 10 -2 At Pa, heating to 510 deg.C at a heating rate of 5 deg.C/minAnd then the temperature is kept for 30 minutes, the temperature is kept for 20 minutes, the temperature is kept at 1000 ℃ for 10 minutes, the temperature is kept at 1040-1070 ℃ for 3 hours, the temperature is started to be reduced, the temperature reduction rate is 0.6 ℃/min, the temperature is kept for 10 minutes when the temperature is reduced to 600 ℃, and the temperature is kept at 110 ℃ continuously, so that the furnace can be taken out.
5. The method of manufacturing according to claim 1, wherein the internal stay mold tooling comprises:
half internal bracing die, two half internal bracing die are parallel to each other;
and the two inner support die fixing plates are respectively arranged at two ends of the half inner support die, and the two ends of the two half inner support dies are respectively connected with the corresponding inner support die fixing plates through screws so that the two ends of the two half inner support dies are connected into a whole.
6. The method according to claim 5, wherein the limiting deformation tool comprises:
the first limiting deformation tooling side plates are longitudinally arranged above and below the vacuum thin-wall tube with the reinforcing ribs and are respectively clamped with the top and the bottom of the reinforcing ribs;
the second limiting deformation tooling side plates are respectively and horizontally arranged at two sides of the vacuum thin-wall tube with the reinforcing ribs and are respectively clamped with two sides of the plurality of reinforcing ribs;
the limiting deformation tooling end plate is of an L-shaped structure, a first end of the limiting deformation tooling end plate is connected with a first limiting deformation tooling side plate, a second end of the limiting deformation tooling end plate is connected with a second limiting deformation tooling side plate, and the limiting deformation tooling end plates of the four L-shaped structures form an annular structure;
the first limiting deformation tooling side plates are connected with the second limiting deformation tooling side plates through a plurality of locating pins.
7. The manufacturing method according to claim 1, wherein the vacuum thin-wall tube is made of 316L stainless steel material, and the wall thickness is 0.3+/-0.05 mm;
the reinforcing rib is made of titanium alloy TC4, and the thickness is 4mm.
8. The manufacturing method according to claim 1, wherein the polishing treatment is performed on the vacuum thin-wall tube after the manufacturing and the reinforcing rib after the manufacturing, and the ultrasonic cleaning is performed after the treatment is completed, and the specific operations are as follows:
polishing a stainless steel vacuum thin-wall pipe and a reinforcing rib by adopting sand paper with 220 meshes, after polishing, firstly adopting an alkaline oil-removing agent to be mixed with deionized water for ultrasonic cleaning, wherein the proportion of the alkaline oil-removing agent to the deionized water is 1:10, the cleaning time is 30min, then adopting alcohol for ultrasonic cleaning, the cleaning time is 15min, then repeatedly flushing with the deionized water, taking out a cleaning piece after cleaning is completed, and drying N 2 And (5) blow-drying.
9. The manufacturing method of claim 1, wherein the nickel-based solder paste is composed of the following components in percentage by weight: 4.4 to 5.5 percent of Cr, 5.5 to 7 percent of Si, 4 to 5.5 percent of B, 4 to 6 percent of Fe and the balance of Ni.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311003702.0A CN117066822B (en) | 2023-08-10 | 2023-08-10 | Manufacturing method of ultrathin-wall vacuum chamber with reinforcing rib structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311003702.0A CN117066822B (en) | 2023-08-10 | 2023-08-10 | Manufacturing method of ultrathin-wall vacuum chamber with reinforcing rib structure |
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| Publication Number | Publication Date |
|---|---|
| CN117066822A true CN117066822A (en) | 2023-11-17 |
| CN117066822B CN117066822B (en) | 2024-04-09 |
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| CN202311003702.0A Active CN117066822B (en) | 2023-08-10 | 2023-08-10 | Manufacturing method of ultrathin-wall vacuum chamber with reinforcing rib structure |
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