CN117006105A - Damping structure and molecular pump with same - Google Patents

Abstract

The invention relates to the technical field of molecular pumps, in particular to a damping structure and a molecular pump with the damping structure. The damping structure includes: a bearing sleeve; the vibration reduction ring is arranged at intervals along the radial direction of the bearing sleeve; the rubber ring is arranged between the outer peripheral wall of the bearing sleeve and the inner peripheral wall of the vibration damping ring, and is suitable for flexibly and/or elastically connecting the bearing sleeve and the vibration damping ring; the elastic collision bead is made of a heat-conducting material, the elastic collision bead is arranged in the rubber ring in the radial direction, one end of the elastic collision bead in the axial direction of the elastic collision bead is abutted to the inner peripheral wall of the vibration reduction ring, and the other end of the elastic collision bead is elastically abutted to the outer peripheral wall of the bearing sleeve. The damping structure provided by the invention can not only absorb shock and reduce noise, but also conduct heat conduction and heat dissipation in time.

Description

Damping structure and molecular pump with same

Technical Field

The invention relates to the technical field of molecular pumps, in particular to a damping structure and a molecular pump with the damping structure.

Background

Vibration and noise generated by the operation of the molecular pump not only pollute the environment, but also influence the operation precision of the molecular pump and the quality of products, accelerate the fatigue damage of a mechanical structure and shorten the service life of the machine. Damping structures are an important ring of molecular pump structures, which are critical to the operation and life of the molecular pump.

In the existing molecular pump damping structure, a damping rubber ring is usually used at the outer side of a bearing, and kinetic energy is converted into heat energy in the mechanical vibration process by utilizing the special viscoelastic property of rubber, so that the purpose of reducing amplitude is achieved.

However, a large amount of heat generated by high-speed running of the bearing cannot be dissipated, and the shock-absorbing rubber ring can isolate vibration but has insufficient heat conduction performance, so that a large amount of heat is accumulated and cannot be dissipated in time, and the service life of the bearing is influenced.

Disclosure of Invention

Therefore, the technical problem to be solved by the invention is to overcome the defects that the existing damping structure of the molecular pump in the prior art is insufficient in heat conduction performance, a large amount of heat is easily accumulated and cannot be timely dissipated, and the service life of a bearing is influenced, so that the damping structure capable of absorbing shock and noise and timely conducting heat and dissipating heat and the molecular pump with the damping structure are provided.

In order to solve the above technical problems, the damping structure provided by the present invention includes:

a bearing sleeve;

the vibration reduction ring is arranged at intervals along the radial direction of the bearing sleeve;

the rubber ring is arranged between the outer peripheral wall of the bearing sleeve and the inner peripheral wall of the vibration damping ring, and is suitable for flexibly and/or elastically connecting the bearing sleeve and the vibration damping ring;

the elastic collision bead is made of a heat-conducting material, the elastic collision bead is arranged in the rubber ring in the radial direction, one end of the elastic collision bead in the axial direction of the elastic collision bead is abutted to the inner peripheral wall of the vibration reduction ring, and the other end of the elastic collision bead is elastically abutted to the outer peripheral wall of the bearing sleeve.

Optionally, a first limit groove is arranged on one side of the bearing sleeve, which is close to the rubber ring in the radial direction, and the first limit groove is suitable for being clamped with one side of the rubber ring in the radial direction;

a second limit groove is formed in one side, close to the rubber ring, of the vibration reduction ring in the radial direction, and the second limit groove is suitable for being clamped with the other side, in the radial direction, of the rubber ring;

the first limit groove and the second limit groove are suitable for limiting the rubber ring.

Optionally, the inner wall of the first limit groove and the inner wall of the second limit groove are both attached to the rubber ring.

Optionally, the elastic bumping bead includes:

a housing having one axial end thereof abutting against an inner peripheral wall of the damper ring; the shell is hollow, one end of the shell along the axial direction of the shell is closed and forms an abutting part, and the other end of the shell is provided with a mounting groove;

the ball is arranged in the mounting groove and is suitable for being abutted against the outer peripheral wall of the bearing sleeve;

and a spring disposed in the housing, wherein one end of the spring is in contact with the contact portion, and the other end is in contact with the ball.

Optionally, the ball is floatingly arranged in the mounting groove under the pushing action of the spring.

Optionally, a third limit groove coaxially arranged with the shell is formed in the inner peripheral wall of the vibration reduction ring, and the third limit groove is suitable for limiting the shell;

and a fourth limiting groove corresponding to the ball is formed in the outer peripheral wall of the bearing sleeve, and the fourth limiting groove is suitable for limiting the ball.

Optionally, the inner wall of the fourth limit groove is a smooth cambered surface and/or a spherical surface, and the inner wall of the fourth limit groove is in surface contact with the outer wall of the ball.

Optionally, the inner peripheral wall of the vibration reduction ring is bonded with the outer peripheral wall of the shell through heat-conducting glue;

the outer peripheral wall of the bearing sleeve is connected with the outer peripheral wall of the ball through heat-conducting glue in a bonding mode.

Optionally, the number of the elastic collision beads is N, the N elastic collision beads are uniformly arranged on the periphery of the rubber ring, and the value range of N is more than or equal to 4 and less than or equal to 6.

The present invention provides a molecular pump comprising: a molecular pump body, and a damping structure as described above.

The technical scheme of the invention has the following advantages:

1. according to the damping structure provided by the invention, the rubber ring is arranged between the outer peripheral wall of the bearing sleeve and the inner peripheral wall of the damping ring so as to flexibly connect and/or elastically connect the bearing sleeve and the damping ring, the rubber ring is made of rubber, and in the mechanical vibration process, the damping and noise reduction effects are remarkably improved by utilizing the special viscoelastic characteristics of rubber; through set up elasticity in the rubber ring and hit the pearl, on the one hand with the high-speed a large amount of heats that produce of bearing and the heat energy that the rubber ring produced in time transfer dissipation away, showing the enhancement the heat conduction effect of damping structure, on the other hand can be in further alleviate mechanical shock and reduce mechanical noise on the basis of rubber ring, improve work efficiency, improve product quality.

2. According to the damping structure provided by the invention, the first limiting groove is clamped with one radial side of the rubber ring, and the second limiting groove is clamped with the other radial side of the rubber ring, so that the rubber ring is axially and/or radially limited, and the rubber ring can float in a space formed by the first limiting groove and the second limiting groove in a surrounding manner in the deformation process, so that the rubber ring is prevented from being separated from the bearing sleeve and the damping ring; the inner wall of the first limit groove and the inner wall of the second limit groove are both attached to the rubber ring, so that the rubber ring and the inner wall of the first limit groove and the inner wall of the second limit groove can be fixed by utilizing the special friction force of the rubber ring, and the relative positions of the rubber ring and the bearing sleeve can be maintained.

3. The invention provides a damping structure, wherein an elastic collision bead comprises a shell, a ball and a spring, wherein the shell, the ball and the spring are made of metal materials; the shell is hollow, one end of the shell along the axial direction of the shell is closed and forms an abutting part, the other end of the shell is provided with a mounting groove, the ball is movably arranged in the mounting groove along the radial direction, the spring is arranged in the shell, one end of the spring is abutted against the abutting part, and the other end of the spring is abutted against the ball, so that the ball is pushed to float radially in the mounting groove, the ball is abutted against the outer peripheral wall of the bearing sleeve, the shell is abutted against the inner peripheral wall of the damping ring 20, so that a metal damping link of 'bearing-bearing sleeve-ball-spring-shell-damping ring-' is formed, a large amount of heat generated by high-speed running of the bearing and heat generated by the rubber ring can be timely transferred and dissipated, and mechanical vibration and mechanical noise can be further reduced on the basis of the rubber ring.

4. According to the damping structure provided by the invention, the inner side peripheral wall of the vibration reduction ring is provided with the third limiting groove which is coaxially arranged with the shell, and the third limiting groove can circumferentially limit the shell so as to prevent the shell from circumferentially shifting relative to the vibration reduction ring; a fourth limit groove corresponding to the ball is formed in the outer peripheral wall of the bearing sleeve, and the fourth limit groove can limit the ball in the circumferential direction so as to prevent the ball from being offset in the circumferential direction relative to the bearing sleeve, and further ensure that the elastic collision bead floats in the radial direction; meanwhile, the elastic collision beads are arranged in the mounting holes of the rubber ring in the radial direction, so that the elastic collision beads and the rubber ring are positioned at the same time, and further the centering between the rubber ring and the vibration reduction ring and the bearing sleeve is ensured.

5. According to the damping structure provided by the invention, the value range of the number N of the elastic collision beads is more than or equal to 4 and less than or equal to 6, so that the damping structure can be ensured to have sufficient damping effect, can bear transient impact peak values of a mechanical system, can avoid hard support from being formed between the bearing sleeve and the damping ring, and can ensure the efficient mechanical damping effect of the damping structure.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of an exploded view of a damping structure of the present invention;

FIG. 2 is a schematic cross-sectional view of a damping structure according to the present invention;

FIG. 3 is a schematic view of the overall structure of a bearing housing of the damping structure of the present invention;

FIG. 4 is a schematic view of the overall structure of a vibration damping ring of the damping structure of the present invention;

FIG. 5 is a schematic view of the overall structure of a rubber ring of the damping structure of the present invention;

FIG. 6 is a schematic cross-sectional view of an elastic bump ball of the damping structure of the present invention.

Reference numerals illustrate:

10. a bearing sleeve; 11. a first limit groove; 12. a fourth limit groove;

20. a vibration damping ring; 21. the second limit groove; 22. a third limit groove;

30. a rubber ring; 31. a mounting hole;

40. elastic bead collision; 41. a housing; 411. an abutting portion; 412. a mounting groove; 42. a ball; 43. and (3) a spring.

Detailed Description

The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.

Example 1

Referring to fig. 1 to 6, the damping structure provided in this embodiment includes:

a bearing housing 10;

a vibration damping ring 20 disposed at a radial interval from the bearing housing 10;

a rubber ring 30 disposed between an outer circumferential wall of the bearing housing 10 and an inner circumferential wall of the damper ring 20, the rubber ring 30 being adapted to flexibly and/or elastically connect the bearing housing 10 and the damper ring 20;

the elastic collision bead 40 is made of a heat-conducting material, the elastic collision bead 40 is radially arranged in the rubber ring 30, one end of the elastic collision bead 40 along the axial direction of the elastic collision bead is abutted against the inner peripheral wall of the vibration reduction ring 20, and the other end of the elastic collision bead is elastically abutted against the outer peripheral wall of the bearing sleeve 10.

It should be noted that, referring to fig. 1 and 2, the bearing sleeve 10 and the vibration-damping ring 20 are disposed at radial intervals, the rubber ring 30 is disposed between the outer circumferential wall of the bearing sleeve 10 and the inner circumferential wall of the vibration-damping ring 20, the rubber ring 30 is made of rubber material, and in the process of mechanical vibration, kinetic energy is converted into heat energy by utilizing the special viscoelastic property of rubber, so as to achieve the purpose of reducing amplitude; the specific working principle of the rubber ring 30 is as follows: when the damping structure is subjected to vibration, since the movement of the macromolecules overcomes the internal friction resistance between the chain segments and requires a certain time, the deformation of the rubber ring 30 tends to lag behind the change of stress, which is quite obvious at a certain temperature and frequency, and the lag of the deformation of the rubber means that energy consumption is required, which exactly reduces the kinetic energy of the vibration body, thereby achieving the purpose of shock absorption. In this embodiment, the rubber ring 30 is provided to flexibly and/or elastically connect the bearing housing 10 and the vibration-damping ring 20, so as to form a rubber damping link of "bearing-bearing housing-rubber ring-vibration-damping ring-", which can achieve significant mechanical vibration-damping and mechanical noise-reducing effects. Referring to fig. 1 and 5, the rubber ring 30 may be provided with a plurality of mounting holes 31 along a radial direction, and the elastic impact beads 40 are disposed in the mounting holes 31; the elastic bump bead 40 may be made of metal, as shown in fig. 2, one end of the elastic bump bead 40 along its own axis is abutted against the inner circumferential wall of the vibration-damping ring 20, and the other end is elastically abutted against the outer circumferential wall of the bearing sleeve 10, so that on one hand, by utilizing the heat conduction property of metal, a high-efficiency heat conduction bridge link of "bearing-bearing sleeve-elastic bump bead-vibration-damping ring-" is formed, so that a large amount of heat generated by high-speed running of the bearing and heat generated by the rubber ring 30 are timely transferred and dissipated, the heat conduction effect of the damping structure is remarkably enhanced, on the other hand, by utilizing the elastic structure of the elastic bump bead 40 itself, a metal damping link of "bearing-bearing sleeve-elastic bump bead-vibration-damping ring-" is formed, and at the same time, the elastic bump bead 40 is arranged in the rubber ring 30, so that the above-mentioned rubber damping link, the heat conduction bridge link and the metal damping link can be organically combined, thereby further reducing mechanical vibration and reducing mechanical noise on the basis of the rubber ring 30, and further reducing mechanical noise and heat conduction and heat dissipation efficiency and improving the working quality.

In this embodiment, a rubber ring 30 is disposed between the outer circumferential wall of the bearing housing 10 and the inner circumferential wall of the vibration-damping ring 20, so as to flexibly connect and/or elastically connect the bearing housing 10 and the vibration-damping ring 20, the rubber ring 30 is made of rubber material, and in the process of mechanical vibration, vibration and noise reduction are performed by utilizing the specific viscoelastic properties of rubber, so that the mechanical vibration and noise reduction effects are significantly improved; through set up elasticity in the rubber ring 30 and hit the pearl 40, on the one hand with the high-speed a large amount of heats that produce of bearing and the heat energy that produces of rubber ring 30 in time transfer dissipation away, showing strengthened the heat conduction effect of damping structure, on the other hand can be in further alleviate mechanical shock and reduce mechanical noise on the basis of rubber ring 30, improve work efficiency, improve product quality.

Specifically, a first limit groove 11 is arranged on one side of the bearing sleeve 10, which is close to the rubber ring 30 in the radial direction, and the first limit groove 11 is suitable for being clamped with one side of the rubber ring 30 in the radial direction;

a second limit groove 21 is formed in one side, close to the rubber ring 30 in the radial direction, of the vibration reduction ring 20, and the second limit groove 21 is suitable for being clamped with the other side, in the radial direction, of the rubber ring 30;

the first limit groove 11 and the second limit groove 21 are adapted to limit the rubber ring 30.

Specifically, the inner walls of the first limiting groove 11 and the second limiting groove 21 are both attached to the rubber ring 30.

It should be noted that, as shown in fig. 3, a first limiting groove 11 is formed on a side of the bearing sleeve 10, which is radially close to the rubber ring 30, and the first limiting groove 11 has a U-shaped structure, and as shown in fig. 4, a second limiting groove 21 is formed on a side of the damping ring 20, which is radially close to the rubber ring 30, and the second limiting groove 21 has a U-shaped structure; the first limiting groove 11 is clamped with one radial side of the rubber ring 30, the second limiting groove 21 is clamped with the other radial side of the rubber ring 30, so that the rubber ring 30 is axially and/or radially limited, the rubber ring 30 can float in a space formed by the first limiting groove 11 and the second limiting groove 21 in a surrounding manner in the deformation process, and the rubber ring 30 is prevented from being separated from the bearing sleeve 10 and the vibration reduction ring 20; the inner walls of the first limit groove 11 and the second limit groove 21 are respectively attached to the rubber ring 30, so that the rubber ring 30, the inner wall of the first limit groove 11 and the inner wall of the second limit groove 21 can be fixed by utilizing the special friction force of the rubber ring 30, and the relative positions of the rubber ring 30, the rubber ring 30 and the bearing sleeve 10 can be maintained.

Specifically, the elastic striking bead 40 includes:

a case 41 having one axial end abutting against the inner peripheral wall of the damper ring 20; the inside of the shell 41 is hollow, one end of the shell 41 along the axial direction of the shell is closed and forms an abutting part 411, and the other end is provided with a mounting groove 412;

a ball 42 provided in the mounting groove 412, the ball 42 being adapted to abut against an outer peripheral wall of the bearing housing 10;

and a spring 43 provided in the housing 41, wherein one end of the spring 43 abuts against the abutting portion 411, and the other end abuts against the ball 42.

Specifically, the balls 42 are floatingly disposed in the mounting groove 412 under the urging action of the springs 43.

It should be noted that, referring to fig. 2 and 6, the elastic bump ball 40 includes a housing 41, a ball 42, and a spring 43, and the housing 41, the ball 42, and the spring 43 may be made of metal materials; the inside of the shell 41 is hollow, one end of the shell 41 along the axial direction is closed and forms an abutting part 411, the other end is provided with a mounting groove 412, the ball 42 is movably arranged in the mounting groove 412 along the radial direction, the spring 43 is arranged in the shell 41, one end of the spring 43 abuts against the abutting part 411, the other end abuts against the ball 42, so that the ball 42 is pushed to float radially in the mounting groove 412, the ball 42 abuts against the outer peripheral wall of the bearing sleeve 10, and the shell 41 abuts against the inner peripheral wall of the vibration-damping ring 20, so that a metal damping link of 'bearing-bearing sleeve-ball-spring-shell-vibration-damping ring' is formed, a large amount of heat generated by high-speed operation of the bearing and heat energy generated by the rubber ring 30 can be timely transferred and dissipated, and mechanical vibration and mechanical noise can be further reduced on the basis of the rubber ring 30.

Specifically, a third limiting groove 22 coaxially disposed with the housing 41 is formed on the inner peripheral wall of the vibration-damping ring 20, and the third limiting groove 22 is adapted to limit the housing 41;

the outer peripheral wall of the bearing sleeve 10 is provided with a fourth limit groove 12 corresponding to the ball 42, and the fourth limit groove 12 is adapted to limit the ball 42.

It should be noted that, referring to fig. 4, a third limiting groove 22 coaxially disposed with the housing 41 is formed on the inner circumferential wall of the vibration-damping ring 20, and the third limiting groove 22 can circumferentially limit the housing 41 to avoid circumferential offset of the housing 41 relative to the vibration-damping ring 20; referring to fig. 3, a fourth limiting groove 12 corresponding to the ball 42 is formed in the outer circumferential wall of the bearing sleeve 10, and the fourth limiting groove 12 can circumferentially limit the ball 42 to prevent the ball 42 from being circumferentially offset relative to the bearing sleeve 10, so as to ensure that the elastic collision bead 40 floats in the radial direction; at the same time, the elastic striking bead 40 is radially inwardly disposed in the mounting hole 31 of the rubber ring 30, so that the elastic striking bead 40 and the rubber ring 30 are simultaneously positioned, thereby ensuring the centering between the rubber ring 30 and the vibration-damping ring 20 and the bearing housing 10.

Specifically, the inner wall of the fourth limiting groove 12 is a smooth arc surface and/or a spherical surface, and the inner wall of the fourth limiting groove 12 is in surface contact with the outer wall of the ball 42.

In this embodiment, the inner wall of the fourth limiting groove 12 is a smooth arc surface and/or a spherical surface, and the inner wall of the fourth limiting groove 12 is in surface contact with the outer wall of the ball 42, so that the contact area between the ball 42 and the inner wall of the fourth limiting groove 12 is increased, the heat conduction area between the ball 42 and the inner wall of the fourth limiting groove 12 can be increased, and the stress concentration between the ball 42 and the inner wall of the fourth limiting groove 12 can be avoided.

Specifically, the inner peripheral wall of the vibration-damping ring 20 and the outer peripheral wall of the housing 41 are bonded and connected by heat-conducting glue;

the outer peripheral wall of the bearing sleeve 10 is bonded with the outer peripheral wall of the ball 42 by heat-conducting glue.

In this embodiment, during the actual assembly and/or installation process, the heat-conducting glue may be applied between the inner circumferential wall of the vibration-damping ring 20 and the outer circumferential wall of the housing 41, and the heat-conducting glue may be applied between the outer circumferential wall of the bearing housing 10 and the outer circumferential wall of the ball 42, so as to enhance the heat dissipation effect.

Specifically, the number of the elastic impact beads 40 is N, and the N elastic impact beads 40 are uniformly arranged on the circumference of the rubber ring 30, where the value range of N is 4-6.

It should be noted that, in this embodiment, the number N of the elastic impact beads 40 needs to satisfy N being greater than or equal to 4, otherwise, insufficient damping effect is easily caused, and it is difficult to bear the transient impact peak value of the mechanical system; the number N of the elastic collision beads 40 also needs to satisfy N less than or equal to 6, otherwise, the elastic force is easily superimposed too much, so that the balls 42 cannot be pushed during mechanical vibration, a hard support is formed between the bearing sleeve 10 and the vibration reduction ring 20, and the mechanical vibration reduction effect of the damping structure is weakened; therefore, the number N of the elastic collision beads 40 is 4-6, so that the damping structure can have sufficient damping effect, can bear transient impact peak values of a mechanical system, can avoid hard support between the bearing sleeve 10 and the damping ring 20, and can ensure efficient mechanical damping effect of the damping structure.

Optionally, the number of the elastic impact beads 40 is six, and six elastic impact beads 40 are uniformly arranged on the rubber ring 30 around the circumference.

It should be noted that, when the number N of the elastic impact balls 40 is equal to or greater than 4 and equal to or less than 6, the inner diameter D of the bearing sleeve 10 is equal to or greater than 16mm and equal to or less than 20mm, the radius r of the ball 42 is equal to or greater than 2mm and equal to or less than 3mm, and in the specific implementation process, the number of the elastic impact balls 40 and the radius of the ball 42 can be adjusted according to the actual specifications of the bearing, which is not limited to the case described in the embodiment.

Example two

The present embodiment provides a molecular pump including: a molecular pump body, and a damping structure as described above.

Optionally, the damping structure is mounted at a lower bearing damping position of the molecular pump body.

It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.

Claims (10)

1. A damping structure, comprising:

a bearing sleeve (10);

a vibration damping ring (20) arranged at radial intervals with the bearing sleeve (10);

a rubber ring (30) arranged between the outer peripheral wall of the bearing sleeve (10) and the inner peripheral wall of the vibration damping ring (20), wherein the rubber ring (30) is suitable for flexibly and/or elastically connecting the bearing sleeve (10) and the vibration damping ring (20);

the elastic collision bead (40) is made of a heat-conducting material, the elastic collision bead (40) is arranged in the rubber ring (30) along the radial direction, one end of the elastic collision bead (40) along the axial direction of the elastic collision bead is abutted against the inner peripheral wall of the vibration reduction ring (20), and the other end of the elastic collision bead is elastically abutted against the outer peripheral wall of the bearing sleeve (10).

2. Damping structure according to claim 1, characterized in that the bearing bush (10) is provided with a first limit groove (11) on the side radially adjacent to the rubber ring (30), the first limit groove (11) being adapted to be snapped with the radial side of the rubber ring (30);

a second limit groove (21) is formed in one side, close to the rubber ring (30), of the vibration reduction ring (20) in the radial direction, and the second limit groove (21) is suitable for being clamped with the other side, in the radial direction, of the rubber ring (30);

the first limit groove (11) and the second limit groove (21) are suitable for limiting the rubber ring (30).

3. Damping structure according to claim 2, characterized in that the inner wall of the first limit groove (11) and the inner wall of the second limit groove (21) are both arranged in a fitting manner with the rubber ring (30).

4. Damping structure according to claim 1, characterized in that said elastic bump bead (40) comprises:

a housing (41) having one axial end thereof in contact with the inner peripheral wall of the damper ring (20); the shell (41) is hollow, one end of the shell (41) is closed along the axial direction of the shell and forms an abutting part (411), and the other end of the shell is provided with a mounting groove (412);

a ball (42) provided in the mounting groove (412), the ball (42) being adapted to abut against an outer peripheral wall of the bearing housing (10);

and a spring (43) provided in the housing (41), wherein one end of the spring (43) is in contact with the contact portion (411), and the other end is in contact with the ball (42).

5. The damping structure according to claim 4, characterized in that the balls (42) are floatingly arranged in the mounting groove (412) under the urging action of the spring (43).

6. Damping structure according to claim 4, characterized in that a third limit groove (22) coaxially arranged with the housing (41) is provided on the inner peripheral wall of the vibration-damping ring (20), the third limit groove (22) being adapted to limit the housing (41);

a fourth limiting groove (12) corresponding to the ball (42) is formed in the outer peripheral wall of the bearing sleeve (10), and the fourth limiting groove (12) is suitable for limiting the ball (42).

7. Damping structure according to claim 6, characterized in that the inner wall of the fourth limit groove (12) is a smooth cambered surface and/or a spherical surface, and the inner wall of the fourth limit groove (12) is in surface contact with the outer wall of the ball (42).

8. Damping structure according to claim 4, characterized in that the inner peripheral wall of the vibration-damping ring (20) is adhesively connected to the outer peripheral wall of the housing (41) by means of a heat-conducting glue;

the outer peripheral wall of the bearing sleeve (10) is bonded and connected with the outer peripheral wall of the ball (42) through heat-conducting glue.

9. The damping structure according to any one of claims 4 to 8, wherein the number of the elastic collision beads (40) is N, and the N elastic collision beads (40) are uniformly arranged on the circumference of the rubber ring (30), and the value range of N is equal to or greater than 4 and equal to or less than 6.

10. A molecular pump, comprising: molecular pump body, and damping structure according to any of the preceding claims 1-9.