CN116996821B - Pixel sounding unit and digital loudspeaker - Google Patents
Pixel sounding unit and digital loudspeaker Download PDFInfo
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- CN116996821B CN116996821B CN202311249277.3A CN202311249277A CN116996821B CN 116996821 B CN116996821 B CN 116996821B CN 202311249277 A CN202311249277 A CN 202311249277A CN 116996821 B CN116996821 B CN 116996821B
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- sounding unit
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- 239000000758 substrate Substances 0.000 claims abstract description 44
- 238000009413 insulation Methods 0.000 claims description 14
- 230000000694 effects Effects 0.000 abstract description 18
- 238000004519 manufacturing process Methods 0.000 description 12
- 230000009471 action Effects 0.000 description 8
- 230000005684 electric field Effects 0.000 description 8
- 238000013016 damping Methods 0.000 description 6
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000008093 supporting effect Effects 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000005411 Van der Waals force Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
- H04R9/06—Loudspeakers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
- H04R9/02—Details
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2400/00—Loudspeakers
- H04R2400/11—Aspects regarding the frame of loudspeaker transducers
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
The invention discloses a pixel sounding unit and a digital loudspeaker, relates to the technical field of digital sounding chips, and aims to solve the problems of low sound pressure and poor sounding effect of the loudspeaker caused by small vibration amplitude of a vibrating diaphragm. The pixel sounding unit comprises a substrate, a vibrating diaphragm and a driving plate, and a concave cavity is formed in the substrate; the vibrating diaphragm is fixedly arranged above the substrate, the first side edge of the vibrating diaphragm is fixedly connected with the substrate, and cantilever gaps are formed between the other side edges of the vibrating diaphragm and the inner wall of the substrate; the driving plate is fixedly arranged in the concave cavity of the substrate, an air rear cavity is formed between the driving plate and the substrate, a vibration gap exists between the driving plate and the vibrating diaphragm, and the air rear cavity is communicated. The digital loudspeaker comprises the pixel sounding unit. The pixel sounding unit and the digital loudspeaker are used for increasing the vibration amplitude of the vibrating diaphragm, improving the sound pressure level of pulse sound waves emitted by the pixel sounding unit and guaranteeing the sounding effect.
Description
Technical Field
The invention relates to the technical field of digital sounding chips, in particular to a pixel sounding unit and a digital loudspeaker.
Background
A speaker is a transducer device capable of converting an electrical signal into an acoustic signal. The speaker is the basis for making sound, acoustically active noise reduction devices, etc., and therefore, the performance of the speaker has a critical impact on the fabrication of acoustic devices. The MEMS speaker (Micro Electro Mechanical System), i.e., the MEMS speaker, has advantages of good consistency, low power consumption, small size, low price, etc., over conventional voice coil speakers.
At present, the MEMS loudspeaker commonly used is used for realizing simulated sound production by pushing air through the movement of the vibrating diaphragm, in general, the vibrating diaphragm in the MEMS loudspeaker is of a whole membrane structure, the periphery of the vibrating diaphragm is fixedly connected with a base or an insulating medium, and sound production is realized through deformation of the vibrating diaphragm, but the base or the insulating medium fixedly connected with the periphery of the vibrating diaphragm can generate supporting force on the vibrating diaphragm, so that the deformation of the vibrating diaphragm is limited, the vibration amplitude of the vibrating diaphragm is small, the compression effect on the air is weak, the sound pressure of the loudspeaker is low, and the sound production effect is poor.
Disclosure of Invention
The invention aims to provide a pixel sounding unit and a digital loudspeaker, which are used for increasing the amplitude of a vibrating diaphragm, improving the sound pressure level of pulse sound waves emitted by the pixel sounding unit and ensuring the sounding effect.
In order to achieve the above object, the present invention provides a pixel sounding unit including:
a substrate, on which a concave cavity is arranged;
the vibrating diaphragm is fixedly arranged above the substrate, the first side edge of the vibrating diaphragm is fixedly connected with the substrate, and cantilever gaps are formed between the other side edges of the vibrating diaphragm and the inner wall of the substrate;
the driving plate is fixedly arranged in the concave cavity of the substrate, an air rear cavity is formed between the driving plate and the substrate, a vibration gap is formed between the driving plate and the vibrating diaphragm, and the vibration gap is communicated with the air rear cavity.
Compared with the prior art, the vibrating diaphragm of the pixel sounding unit provided by the invention has the advantages that only the first side edge is fixedly connected with the substrate, the cantilever gaps are formed between the other side edges of the vibrating diaphragm and the inner wall of the substrate, when the vibrating diaphragm generates acting force towards the driving plate under the action of an electric field, the substrate only limits the first side edge of the vibrating diaphragm and has no supporting effect on the other side edges of the vibrating diaphragm, so that the deformation amplitude of the part, away from the first side edge, of the vibrating diaphragm is larger, and the amplitude can be further increased. Compared with the mode that the periphery of the vibrating diaphragm is fixedly connected with the substrate in the prior art, the vibrating diaphragm of the pixel sounding unit is the cantilever type vibrating diaphragm, only the first side edge is fixedly connected with the substrate, the other side edges are free ends, the substrate is not directly connected with the free ends, movement deformation of the free ends is not limited, further, the free ends of the vibrating diaphragm can generate larger displacement under the action of an electric field to drive the vibrating diaphragm to generate larger amplitude deformation, further, the amplitude of the vibrating diaphragm can be increased, the deformation area of the vibrating diaphragm can be increased, under the condition that the whole sizes of the substrate, the driving plate and the vibrating diaphragm are the same as other parameters, the compression effect on air in a vibration gap can be enhanced, the sound pressure level of pulse sound waves emitted by the pixel sounding unit is improved, the sounding effect is ensured, and the cantilever gap is formed between the other side edges of the vibrating diaphragm and the inner wall of the substrate.
Optionally, in the pixel sounding unit, a width of the cantilever gap is 0.1 μm to 10 μm.
Optionally, in the pixel sounding unit, at least one side edge of the driving plate is fixedly connected with an inner wall of the substrate, and a circulation gap is formed between the at least one side edge and the inner wall of the substrate, and is used for communicating the vibration gap and the air rear cavity.
Optionally, in the pixel sounding unit, at least one through hole is disposed on the driving board.
Optionally, in the pixel sounding unit, the aperture of the through hole is 1 μm to 10 μm.
Optionally, in the pixel sounding unit, at least one first insulation convex structure is disposed on a side of the driving plate, which is close to the diaphragm;
and/or one side of the vibrating diaphragm, which is close to the driving plate, is provided with at least one second insulation convex structure.
Optionally, in the pixel sounding unit, the first insulating convex structure is at least disposed in a region, close to the cantilever gap, of the orthographic projection of the diaphragm on the driving plate.
Optionally, in the pixel sounding unit, the second insulating convex structure is at least disposed in a region of the orthographic projection of the driving plate on the diaphragm, which is close to the cantilever slit.
Optionally, in the pixel sounding unit, a distance between the driving plate and the diaphragm is 0.5 μm to 50 μm.
The invention also provides a digital loudspeaker which comprises a plurality of pixel sounding units, wherein the pixel sounding units are distributed in an array or in a linear shape.
Compared with the prior art, the vibrating diaphragm of each pixel sounding unit of the digital loudspeaker provided by the invention has the advantages that only the first side edge is fixedly connected with the substrate, the other side edges are free ends, the vibrating diaphragm can be deformed to a large extent, the amplitude of the vibrating diaphragm can be further increased, the area of the vibrating diaphragm subjected to deformation can be further increased, the sound pressure level of pulse sound waves emitted by the pixel sounding units is further improved, and after the pixel sounding units are distributed in an array or in a linear distribution, the volume of the digital loudspeaker can be improved, and the sounding effect is further improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and do not constitute a limitation on the invention. In the drawings:
fig. 1 is a schematic structural diagram of a pixel sounding unit according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of another pixel sounding unit according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a pixel sounding unit according to another embodiment of the present invention;
fig. 4 is a schematic structural diagram of a digital speaker according to an embodiment of the present invention.
Reference numerals:
1-a pixel sounding unit; 11-a substrate; 12-vibrating diaphragm; 121-a first side; 13-cantilever slits; 14-a drive plate; 141-a through hole; 15-an air rear cavity; 16-flow gap; 17-first insulating convex structure.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise. The meaning of "a number" is one or more than one unless specifically defined otherwise.
In the description of the present invention, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "front", "rear", "left", "right", etc., are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
A speaker is a transducer device capable of converting an electrical signal into an acoustic signal. The speaker is the basis for making sound, acoustically active noise reduction devices, etc., and therefore, the performance of the speaker has a critical impact on the fabrication of acoustic devices. The MEMS speaker (Micro Electro Mechanical System), i.e., the MEMS speaker, has advantages of good consistency, low power consumption, small size, low price, etc., over conventional voice coil speakers. At present, the MEMS loudspeaker commonly used is used for realizing simulated sound production by pushing air through the movement of the vibrating diaphragm, in general, the vibrating diaphragm in the MEMS loudspeaker is of a whole membrane structure, the periphery of the vibrating diaphragm is fixedly connected with a base or an insulating medium, and sound production is realized through deformation of the vibrating diaphragm, but the base or the insulating medium fixedly connected with the periphery of the vibrating diaphragm can generate supporting force on the vibrating diaphragm, so that the deformation of the vibrating diaphragm is limited, the vibration amplitude of the vibrating diaphragm is small, the compression effect on the air is weak, the sound pressure of the loudspeaker is low, and the sound production effect is poor.
In order to solve the above problems, as shown in fig. 1, 2 and 3, an embodiment of the present invention provides a pixel sounding unit 1, including a substrate 11, a diaphragm 12 and a driving plate 14, where a cavity is provided on the substrate 11; the vibrating diaphragm 12 is fixedly arranged above the substrate 11, a first side 121 of the vibrating diaphragm 12 is fixedly connected with the substrate 11, and cantilever gaps 13 are formed between other sides of the vibrating diaphragm 12 and the inner wall of the substrate 11; the driving plate 14 is fixedly arranged in the concave cavity of the base 11, an air rear cavity 15 is formed between the driving plate 14 and the base 11, a vibration gap exists between the driving plate 14 and the vibrating diaphragm 12, and the air rear cavity 15 is communicated.
In a specific working process, an electric field is generated after the diaphragm 12 and the driving plate 14 are electrified, under the action of the electric field, the diaphragm 12 generates acting force towards the driving plate 14 to enable the diaphragm 12 to deform towards the driving plate 14, after the electrification is stopped, the diaphragm 12 rebounds to restore to the original position, the electrification and the stoppage are repeatedly conducted, the diaphragm 12 vibrates, and then the vibration gap and the air in the air rear cavity 15 are pushed to finish sounding.
As can be seen from the structure and implementation process of the pixel sounding unit 1, only the first side 121 of the diaphragm 12 of the pixel sounding unit 1 provided by the embodiment of the invention is fixedly connected with the substrate 11, the cantilever gaps 13 are formed between the other sides of the diaphragm 12 and the inner wall of the substrate 11, and when the diaphragm 12 generates a force towards the driving plate 14 under the action of an electric field, the substrate 11 only limits the first side 121 of the diaphragm 12 and has no supporting effect on the other sides of the diaphragm 12, so that the deformation amplitude of the part of the diaphragm 12 away from the first side 121 is larger, and the amplitude can be further increased. Compared with the mode that the periphery of the vibrating diaphragm 12 is fixedly connected with the substrate 11 in the prior art, the vibrating diaphragm 12 of the pixel sounding unit 1 provided by the embodiment of the invention is a cantilever type vibrating diaphragm, only the first side edge 121 is fixedly connected with the substrate 11, the other side edges are free ends, the substrate 11 is not directly connected with the free ends, the movement deformation of the free ends is not limited, the free ends of the vibrating diaphragm 12 can be further enabled to generate larger displacement under the action of an electric field, the vibrating diaphragm 12 is driven to generate larger deformation, the amplitude of the vibrating diaphragm 12 can be further increased, the area of the vibrating diaphragm 12 for deformation can be increased, the compression effect on air in a vibration gap can be enhanced under the condition that the overall dimensions and other parameters of the substrate 11, the driving plate 14 and the vibrating diaphragm 12 are the same, the sound pressure level of pulse sound waves emitted by the pixel sounding unit 1 is further improved, the sounding effect is ensured, and the cantilever gap 13 is formed between the other side edges of the vibrating diaphragm 12 and the inner wall of the substrate 11.
Specifically, in the pixel sounding unit 1, the width of the cantilever slit 13 is 0.1 μm to 10 μm; illustratively, the cantilever slit 13 has a width of 0.1 μm, 1 μm, 2 μm, 4 μm, 6 μm, 8 μm, 10 μm, etc. So set up, guarantee that cavity 15 and vibration clearance pass through cantilever gap 13 under the condition of external atmosphere intercommunication behind the air, avoid the excessive follow cantilever gap of pressure in cavity 15 to reveal away behind the air, improve the sound production effect of pixel sound production unit 1.
As a possible implementation manner, as shown in fig. 1 and 3, in the above-mentioned pixel sounding unit 1, at least one side edge of the driving plate 14 is fixedly connected to the inner wall of the base 11, and a circulation gap 16 is formed between at least one side edge and the inner wall of the base 11, and the circulation gap 16 is used for communicating the vibration gap and the air rear cavity 15. So set up, guarantee that cavity 15 can communicate through circulation clearance 16 and vibration clearance behind the air, guarantee the sound production effect of pixel sound production unit 1.
Further, as shown in fig. 2, in the above-mentioned pixel sounding unit 1, at least one through hole 141 is provided on the driving board 14. By utilizing the characteristics of the hot-tack boundary layer of air, when the extruded air flows through the through holes 141, the hole wall generates damping action against the air, and when the number of the through holes 141 is small and the diameter is large, the damping is small, and the vibration damping characteristics of the pixel sounding unit 1 are adjusted by changing the number and the diameter of the through holes 141 arranged on the driving plate 14.
Further, in the pixel sounding unit 1, the aperture of the through hole 141 is 1 μm to 10 μm. Illustratively, the aperture of the via 141 is 1 μm, 2 μm, 4 μm, 6 μm, 8 μm, 10 μm, etc. When the aperture of the through hole 141 is 1 μm to 10 μm, the air can generate damping after passing through the wall surface of the through hole 141, thereby realizing the damping effect of the vibration system and improving the sounding effect of the pixel sounding unit 1.
As a possible implementation manner, as shown in fig. 3, in the pixel sounding unit 1, at least one first insulation convex structure 17 is disposed on a side of the driving plate 14 near the diaphragm 12; and/or at least one second insulating projection structure is provided on the side of diaphragm 12 adjacent to drive plate 14. Illustratively, the drive plate 14 is provided with at least one first insulating projection 17 on a side thereof adjacent to the diaphragm 12; alternatively, at least one second insulating convex structure is arranged on one side of the diaphragm 12, which is close to the driving plate 14; alternatively, the driving plate 14 is provided with at least one first insulation convex structure 17 on a side close to the diaphragm 12, and at least one second insulation convex structure is provided on a side close to the driving plate 14 of the diaphragm 12. When the vibrating diaphragm 12 and the driving plate 14 are close to each other, the first insulation convex structure 17 or the second insulation convex structure can prevent the vibrating diaphragm 12 and the driving plate 14 from being in direct contact, so that the vibrating diaphragm 12 and the driving plate 14 are prevented from being conducted, and the sounding effect is prevented from being influenced; in addition, diaphragm 12 and drive plate 14 are prevented from bonding due to surface van der Waals forces.
Further, in the pixel sounding unit 1, the first insulation convex structure 17 is at least disposed in a region of the front projection of the diaphragm 12 on the driving plate 14, which is close to the cantilever slit 13. The side of the vibrating diaphragm 12, which is close to the cantilever gap 13, is a free end, deformation under the action of an electric field is large, the vibrating diaphragm is easy to be abutted against the driving plate 14, and a first insulation convex structure 17 is arranged in the area, close to the cantilever gap 13, of orthographic projection of the vibrating diaphragm 12 on the driving plate 14, so that the vibrating diaphragm 12 can be ensured not to be in direct contact with the driving plate 14.
Further, in the pixel sounding unit 1, the second insulation convex structure is at least disposed in a region close to the cantilever gap 13 of the orthographic projection of the driving plate 14 on the diaphragm 12. The side of the vibrating diaphragm 12, which is close to the cantilever gap 13, is a free end, deformation under the action of an electric field is large, the vibrating diaphragm is easy to be abutted against the driving plate 14, and a second insulating convex structure is arranged in the area, close to the cantilever gap 13, of orthographic projection of the driving plate 14 on the vibrating diaphragm 12, so that the vibrating diaphragm 12 can be ensured not to be in direct contact with the driving plate 14.
In some embodiments, in the pixel sounding unit 1, the distance between the driving plate 14 and the diaphragm 12 is 0.5 μm to 50 μm; illustratively, the spacing between the drive plate 14 and the diaphragm 12 is 0.5 μm, 10 μm, 20 μm, 30 μm, 40 μm, 50 μm, etc. By the arrangement, the distance between the driving plate 14 and the vibrating diaphragm 12 can be determined according to a mechanical vibration equation, a resonance frequency equation and a damping equation, so that the amplitude and the vibration frequency of the vibrating diaphragm 12 are ensured.
As shown in fig. 4, the embodiment of the present invention further provides a digital speaker, which includes a plurality of the pixel sounding units 1, where the plurality of pixel sounding units 1 are distributed in an array or in a linear shape.
Compared with the prior art, the vibrating diaphragm 12 of each pixel sounding unit 1 of the digital loudspeaker provided by the embodiment of the invention has only the first side 121 fixedly connected with the substrate 11, the other sides are free ends, and can generate larger deformation, so that the amplitude of the vibrating diaphragm 12 can be increased, the area of the vibrating diaphragm 12 subjected to deformation can be increased, the sound pressure level of pulse sound waves emitted by the pixel sounding units 1 can be further increased, and after the pixel sounding units 1 are distributed in an array or in a linear distribution, the volume of the digital loudspeaker can be increased, and the sounding effect can be further improved.
In the description of the above embodiments, particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (6)
1. A pixel sounding unit, comprising:
the base is provided with a concave cavity;
the vibrating diaphragm is fixedly arranged above the substrate, the first side edge of the vibrating diaphragm is fixedly connected with the substrate, cantilever gaps are formed between the other side edges of the vibrating diaphragm and the inner wall of the substrate, and one side, close to the driving plate, of the vibrating diaphragm is provided with at least one second insulation convex structure;
the driving plate is fixedly arranged in the concave cavity of the substrate, an air rear cavity is formed between the driving plate and the substrate, a vibration gap is formed between the driving plate and the vibrating diaphragm, the vibration gap is communicated with the air rear cavity, and one side, close to the vibrating diaphragm, of the driving plate is provided with at least one first insulation convex structure; the first insulation convex structure is at least arranged in a region, close to the cantilever gap, of orthographic projection of the vibrating diaphragm on the driving plate; the second insulation convex structure is at least arranged in a region, close to the cantilever gap, of orthographic projection of the driving plate on the vibrating diaphragm.
2. The pixel sounding unit of claim 1, wherein the cantilever gap has a width of 0.1 μm to 10 μm.
3. The pixel sounding unit of claim 1, wherein at least one side of the driving plate is fixedly connected to the inner wall of the base, and a circulation gap is formed between the at least one side and the inner wall of the base, and the circulation gap is used for communicating the vibration gap and the air rear cavity.
4. The pixel sounding unit of claim 1, wherein the driving board is provided with at least one through hole.
5. The pixel sounding unit of claim 4, wherein the aperture of the through hole is 1 μm to 10 μm.
6. A digital speaker comprising a plurality of pixel sound emitting units according to any one of claims 1 to 5, wherein the plurality of pixel sound emitting units are distributed in an array or in a line.
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