CN114501267A - Pixel sounding unit, manufacturing method thereof, digital sounding chip and electronic terminal - Google Patents
Pixel sounding unit, manufacturing method thereof, digital sounding chip and electronic terminal Download PDFInfo
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- CN114501267A CN114501267A CN202210082221.2A CN202210082221A CN114501267A CN 114501267 A CN114501267 A CN 114501267A CN 202210082221 A CN202210082221 A CN 202210082221A CN 114501267 A CN114501267 A CN 114501267A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 79
- 239000007787 solid Substances 0.000 claims description 12
- 125000006850 spacer group Chemical group 0.000 claims description 12
- 238000002955 isolation Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 10
- 238000013016 damping Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 13
- 238000005192 partition Methods 0.000 description 11
- 230000009286 beneficial effect Effects 0.000 description 7
- 238000009826 distribution Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/01—Electrostatic transducers characterised by the use of electrets
- H04R19/013—Electrostatic transducers characterised by the use of electrets for loudspeakers
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
- H04R31/003—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
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Abstract
The invention discloses a pixel sounding unit, a manufacturing method thereof, a digital sounding chip and an electronic terminal, which are applied to the technical field of digital sounding chips and are used for solving the problems of complex structure and inconvenient installation of a loudspeaker. The pixel sound production unit includes the vibration board, sets up on the vibration board to enclose and establishes two at least cut-off grooves of arranging, in two adjacent cut-off grooves, the tip of one of them and another tip set gradually along the ray direction of the outside extension of central point by the vibration board to enclose and establish the direction of arranging and form the overlap, form vibrating diaphragm cantilever structure between the cut-off groove of overlap, and vibrating diaphragm, fixed part and vibrating diaphragm cantilever structure be the integral structure. The digital sound production chip comprises the pixel sound production unit provided by the scheme. The electronic terminal comprises the digital sound chip provided by the scheme. The pixel sound production unit provided by the scheme is manufactured by the manufacturing method of the pixel sound production unit, and the pixel sound production unit provided by the invention is used for converting an electric signal into an acoustic signal.
Description
Technical Field
The invention relates to the technical field of digital sound production chips, in particular to a pixel sound production unit and a manufacturing method thereof, a digital sound production chip and an electronic terminal.
Background
A loudspeaker is a transducer device that can convert an electrical signal into an acoustic signal. Loudspeakers are the basis for the production of sound, acoustically active noise reduction devices etc. and therefore the performance of loudspeakers has a critical impact on the production of acoustic devices. MEMS speakers (Micro Electro Mechanical System), which are Micro electromechanical System speakers, have advantages of good consistency, low power consumption, small size, low price, etc. compared with conventional voice coil speakers.
At present, MEMS speaker commonly used all promotes air through the diaphragm motion and realizes the simulation sound production, and usually, MEMS speaker includes diaphragm and the spring of control diaphragm reciprocating motion, and when adopting this kind of structure, the diaphragm can vibrate and realize the transmission of sound under the effect of spring, but, this kind of MEMS speaker structure is complicated, the installation is inconvenient.
Disclosure of Invention
The invention aims to provide a pixel sounding unit, a manufacturing method thereof, a digital sounding chip and an electronic terminal, which are used for simplifying the structure of the pixel sounding unit and enabling the pixel sounding unit to be more convenient to mount.
In order to achieve the above purpose, the invention provides the following technical scheme:
a pixel sounding unit comprises a vibrating plate, wherein at least two dividing grooves which are arranged in an enclosing mode are formed in the vibrating plate, in every two adjacent dividing grooves, the end portion of one dividing groove and the end portion of the other dividing groove are sequentially arranged in the direction of a ray extending outwards from the center point of the vibrating plate, so that overlapping is formed in the direction of the arrangement in the enclosing mode, a vibrating diaphragm cantilever structure is formed between the overlapped dividing grooves, and the vibrating plate is divided into a vibrating diaphragm located in the enclosing area of the dividing grooves and a fixing portion located outside the enclosing area of the dividing grooves by the dividing grooves; the vibrating diaphragm and the fixing part are elastically connected through a vibrating diaphragm cantilever structure, and the vibrating diaphragm, the fixing part and the vibrating diaphragm cantilever structure are of an integrated structure.
Compared with the prior art, in the pixel sound production unit provided by the invention, the vibrating diaphragm is connected with the fixed part through the vibrating diaphragm cantilever structure, so that the vibrating diaphragm can reciprocate under the elastic action of the vibrating diaphragm cantilever structure; when two adjacent segmentation slots form the overlap, can increase the length that is located the vibrating diaphragm cantilever structure between two adjacent segmentation slots for the vibration range of vibrating diaphragm is bigger, guarantees that the vibrating diaphragm can be followed the direction of perpendicular to its surface and gone up elastic vibration.
Optionally, in the above pixel sound generating unit, a rear cavity and a substrate are further included, the vibrating plate is disposed at one side of the rear cavity, and the rear cavity is at least partially formed in the substrate. So set up, the vibrating diaphragm can move and promote air in order to realize the simulation sound production.
Optionally, the pixel sound generating unit further includes an electrode plate and a spacer, and the substrate, the electrode plate, the spacer and the vibrating plate are sequentially stacked; a gap is formed between the electrode plate and the vibrating plate at intervals through a spacer, the base is provided with an opening, and a rear cavity is formed by a structure from one side of the vibrating diaphragm facing the electrode plate to the bottom of the opening; the position of the electrode plate corresponding to the rear cavity is provided with through holes distributed in an array manner, so that air can flow into the space between the electrode plate and the vibrating plate through the through holes to form air damping. So set up, electrode plate and vibration board form plate capacitor for the vibrating diaphragm can vibrate under the effect of electrode plate and the electric field that the vibration board formed.
Optionally, in the pixel sound generating unit, at least two dividing grooves form an annular structure, and one end of one dividing groove is located on the inner side of the adjacent dividing groove before the dividing groove, and the other end of the dividing groove is located on the outer side of the adjacent dividing groove after the dividing groove; or at least four dividing grooves are arranged in the dividing groove, the at least four dividing grooves form an annular structure, and one dividing groove is positioned on the inner side or the outer side of the front adjacent dividing groove and the rear adjacent dividing groove. So set up, optimize the shape of cutting apart the groove for can form the vibrating diaphragm cantilever structure that accords with the design requirement.
Optionally, in the pixel sound generating unit, the number of the diaphragm cantilever structures is at least two, and the diaphragm cantilever structures are symmetrically distributed. So set up, can make the vibrating diaphragm atress more even, the vibration is more stable controllable, guarantees that pixel sound generating unit has good acoustic performance.
Optionally, in the pixel sound generating unit, an arc-shaped groove structure for reducing stress concentration is arranged at an end of the dividing groove. So set up, can increase the intensity of vibrating diaphragm cantilever structure tip, prevent vibrating diaphragm cantilever structure's tip fracture.
Optionally, in the pixel sound generating unit, the through hole of the electrode plate includes a circular hole, a long hole or a square hole. So set up, be convenient for air to form air damping through the through-hole inflow between electrode plate and the vibration board.
Optionally, in the pixel sound generating unit, the span of the diaphragm is 50 μm to 5000 μm, and/or the width of the cantilever structure of the diaphragm is greater than 1 μm. So set up for the vibrating diaphragm has great vibration range and has good rigidity.
Optionally, in the pixel sound generating unit, the cross section of the diaphragm includes a circle, a rectangle or a regular polygon. So set up, optimize the shape of vibrating diaphragm for the structure of vibrating diaphragm is more even.
The invention also provides a digital sound production chip which comprises a plurality of pixel sound production units in the scheme, wherein the pixel sound production units are distributed in an array or a linear shape.
Compared with the prior art, the digital sound chip provided by the invention has the same beneficial effects as the pixel sound generating unit in the technical scheme, and the description is omitted here.
Optionally, in the digital sound chip, the plurality of pixel sound generating units are distributed in a rectangular array or a circular array. So set up, can realize unanimous sound energy pulse output through a plurality of pixel sound production units, improve digital sound production chip's acoustic performance.
The invention also provides an electronic terminal which comprises a terminal body and the digital sound production chip, wherein the digital sound production chip is arranged on the terminal body.
Compared with the prior art, the electronic terminal provided by the invention has the same beneficial effects as the digital sounding chip in the technical scheme, and the detailed description is omitted here.
The invention also provides a manufacturing method of the pixel sound production unit, and the manufacturing method of the pixel sound production unit comprises the steps of designing the size of the dividing groove according to the sound isolation requirement of the dividing groove on the vibrating plate in the pixel sound production unit; designing the sizes of the vibrating diaphragm cantilever structure and the vibrating diaphragm according to the rigidity requirement of the vibrating diaphragm cantilever structure on the vibrating diaphragm and the resonance frequency requirement of the pixel sounding unit; etching the partition groove on the vibrating plate according to the sizes of the partition groove, the vibrating diaphragm cantilever structure and the vibrating diaphragm to form the vibrating diaphragm positioned on the inner side of the partition groove, the fixing part positioned on the outer side of the partition groove and at least two vibrating diaphragm cantilever structures connecting the vibrating diaphragm and the fixing part; an electrode plate and a vibrating plate of the pixel sounding unit are mounted on a base, and the electrode plate and the vibrating plate are electrified to form a gap between the electrode plate and the vibrating plate.
Compared with the prior art, the manufacturing method of the pixel sound production unit provided by the invention has the same beneficial effects as the pixel sound production unit in the technical scheme, and the details are not repeated here.
Optionally, in the manufacturing method of the pixel sound generating unit, the size of the dividing groove is designed according to the sound isolation requirement of the dividing groove on the vibrating plate in the pixel sound generating unit; designing the dimensions of the vibrating diaphragm cantilever structure and the vibrating diaphragm according to the rigidity requirement of the vibrating diaphragm cantilever structure on the vibrating diaphragm and the resonance frequency requirement of the pixel sounding unit, specifically, establishing a flow-solid viscous boundary layer thickness model and a thermal boundary layer thickness model when air flows through the dividing groove, designing the dimensions of the dividing groove according to the flow-solid viscous boundary layer thickness model and the thermal boundary layer thickness model, and ensuring that the width of the dividing groove is smaller than the thickness of the flow-solid viscous boundary layer so as to realize sound isolation; obtaining structural parameters and material parameters of the vibrating diaphragm cantilever structure, and establishing a rigidity model of the vibrating diaphragm cantilever structure; obtaining structural parameters of a rear cavity of the pixel sound production unit, and establishing a rear cavity air rigidity model of the pixel sound production unit; obtaining structural parameters of a vibrating diaphragm of the pixel sounding unit, calculating the area of the vibrating diaphragm and establishing a quality model of the vibrating diaphragm; and establishing a resonance frequency estimation model of the pixel sound production unit according to the rigidity model of the vibrating diaphragm cantilever structure and the mass model of the vibrating diaphragm, and designing the sizes of the vibrating diaphragm cantilever structure and the vibrating diaphragm according to the resonance frequency estimation model.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:
fig. 1 is a schematic diagram of a pixel sound generating unit when a diaphragm is a circular diaphragm in the embodiment of the present invention;
FIG. 2 is an exploded schematic view of a pixel sound-generating unit when the diaphragm is a circular diaphragm according to an embodiment of the present invention;
FIG. 3 is a first schematic diagram of a circular diaphragm according to an embodiment of the present disclosure;
FIG. 4 is a second schematic diagram of a circular diaphragm according to an embodiment of the present disclosure;
FIG. 5 is a third schematic diagram of a circular diaphragm in an embodiment of the present disclosure;
FIG. 6 is a fourth schematic diagram of a circular diaphragm in an embodiment of the present disclosure;
FIG. 7 is a schematic diagram of an electrode plate in a pixel sound generating unit when the diaphragm is a circular diaphragm according to an embodiment of the present invention;
fig. 8 is a schematic view of a pixel sound generating unit when the diaphragm is a square diaphragm according to an embodiment of the present invention;
fig. 9 is an exploded schematic view of a pixel sound-producing unit when the diaphragm is a square diaphragm according to an embodiment of the present invention;
FIG. 10 is a first schematic diagram of a square diaphragm according to an embodiment of the present disclosure;
FIG. 11 is a second schematic diagram of a square diaphragm according to an embodiment of the present disclosure;
FIG. 12 is a third schematic view of a square diaphragm in an embodiment of the invention;
fig. 13 is a schematic diagram of an electrode plate in the pixel sound generating unit when the diaphragm is a square diaphragm in the embodiment of the present invention;
fig. 14 is a schematic diagram of a pixel sound generating unit when the diaphragm is a regular hexagonal diaphragm according to an embodiment of the present invention;
FIG. 15 is an exploded schematic view of a pixel sound generating unit when the diaphragm is a regular hexagonal diaphragm according to an embodiment of the present invention;
FIG. 16 is a first schematic diagram of a regular hexagonal diaphragm according to an embodiment of the present invention;
FIG. 17 is a second schematic diagram of a regular hexagonal diaphragm according to an embodiment of the present invention;
FIG. 18 is a schematic view of a regular hexagonal electrode plate in an embodiment of the present invention;
fig. 19 is a schematic diagram of a digital sound chip according to an embodiment of the present invention.
Reference numerals:
1-substrate, 2-electrode plate, 21-round hole, 22-long hole, 3-spacer, 4-vibrating plate, 41-dividing groove, 411-arc groove, 42-vibrating diaphragm, 43-fixing part and 44-vibrating diaphragm cantilever structure.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Referring to fig. 1 to 18, a pixel sound generating unit according to an embodiment of the present invention includes a vibration plate 4, the vibration plate 4 is provided with at least two dividing grooves 41 arranged in an enclosing manner, an end of one of the dividing grooves 41 and an end of the other dividing groove are sequentially arranged along a radial direction extending from a central point of the vibration plate 4, so as to form an overlap in the enclosing direction, a vibration diaphragm cantilever structure 44 is formed between the overlapping dividing grooves 41, and the dividing grooves 41 divide the vibration plate 4 into a vibration diaphragm 42 located in an enclosing region of the dividing groove 41 and a fixing portion 43 located outside the enclosing region of the dividing groove 41; the diaphragm 42 and the fixing portion 43 are elastically connected by a diaphragm cantilever structure 44, and the diaphragm 42, the fixing portion 43 and the diaphragm cantilever structure 44 are of an integrated structure. In this embodiment, the substrate 1 is preferably a silicon substrate 1, the vibrating plate 4 is preferably made of silicon, and the pixel sound generating unit is preferably an MEMS speaker (Micro Electro Mechanical System), i.e., a Micro electromechanical System speaker, which has advantages of good consistency, low power consumption, small size, low price, and the like, compared with a conventional voice coil speaker.
According to the structure and the specific implementation process of the pixel sound production unit, the vibrating diaphragm 42 is connected with the fixing part 43 through the vibrating diaphragm cantilever structure 44, so that the vibrating diaphragm 42 can reciprocate under the elastic action of the vibrating diaphragm cantilever structure 44, by adopting the structure, the vibrating diaphragm 42, the fixing part 43 and the vibrating diaphragm cantilever structure 44 are of an integrated structure, the pixel sound production unit is simple in structure and convenient to install, and the vibrating diaphragm cantilever structure 44 and the vibrating diaphragm 42 are formed by processing the dividing groove 41 on the vibrating plate 4, so that the vibrating diaphragm cantilever structure 44 and the vibrating diaphragm 42 are more convenient to produce and process, and further the pixel sound production unit is more convenient to produce and process; when two adjacent dividing grooves 41 are overlapped, the length of the vibrating diaphragm cantilever structure 44 positioned between the two adjacent dividing grooves 41 can be increased, so that the vibrating range of the vibrating diaphragm 42 is larger, the vibrating diaphragm 42 can elastically vibrate in the direction perpendicular to the outer surface of the vibrating diaphragm 42, in addition, the vibrating diaphragm cantilever structure 44 can also inhibit the motion of the vibrating diaphragm 42 in the horizontal direction, the vibration stability of the vibrating diaphragm 42 is ensured, meanwhile, the effect of sound isolation can be achieved, and the acoustic performance of the pixel sound production unit is improved; the dividing groove 41 can also circulate air on both sides of the vibrating plate 4 to balance air pressure on both sides of the vibrating plate 4, thereby ensuring the stability of the vibration of the vibrating diaphragm 42.
It should be understood that at least two dividing grooves 41 divide the vibration plate 4 into a vibration film 42 located in the enclosure area of the dividing groove 41, a fixing portion 43 located outside the enclosure area of the dividing groove 41, and a vibration film cantilever structure 44 connecting the vibration film 42 and the fixing portion 43, that is, both sides of the dividing groove 41 in the direction perpendicular to the outer surface of the vibration plate 4 are open to divide the vibration film 42 separated from the fixing portion 43 on the vibration plate 4, and the dividing groove 41 divides the vibration plate 4 into three parts of the vibration film 42, the vibration film cantilever structure 44, and the fixing portion 43, and the vibration film 42 is connected to the fixing portion 43 through the vibration film cantilever structure 44; the at least two dividing grooves 41 are arranged in a surrounding manner, that is, the at least two dividing grooves 41 are arranged around the diaphragm 42 and surround the diaphragm 42.
As a possible implementation, the pixel sound generating unit further comprises a back cavity and a substrate 1, the vibration plate 4 being arranged at one side of the back cavity, the back cavity being at least partially formed in the substrate 1. With this structure, the diaphragm 42 can move to push air to realize analog sound.
In some embodiments, the pixel sound generating unit further includes an electrode plate 2 and a spacer 3, and the base 1, the electrode plate 2, the spacer 3, and the vibrating plate 4 are sequentially stacked; a gap is formed between the electrode plate 2 and the vibrating plate 4 at intervals through the spacer 3, the base 1 is provided with an opening, and a back cavity is formed by a structure from one side of the vibrating diaphragm 42 facing the electrode plate 2 to the bottom of the opening; the electrode plate 2 is provided with through holes distributed in an array corresponding to the rear cavity, so that air flows into the space between the electrode plate 2 and the vibrating plate 4 through the through holes to form air damping. With this structure, the electrode plate 2 and the vibrating plate 4 form a plate capacitor, so that the vibrating diaphragm 42 can vibrate under the action of the electric field formed by the electrode plate 2 and the vibrating plate 4.
The electrode plate 2 of this embodiment includes a circular hole 21, a long hole 22, or a square hole, so that air flows into between the electrode plate 2 and the vibrating plate 4 through the circular hole 21, the long hole 22, or the square hole to form air damping, and an electric field for controlling vibration of the vibrating diaphragm 42 can be formed between the electrode plate 2 and the vibrating plate 4, for example, the structure of the electrode plate 2 when the vibrating diaphragm is a circular vibrating diaphragm shown in fig. 7, the structure of the electrode plate 2 when the vibrating diaphragm is a square vibrating diaphragm shown in fig. 13, and the structure of the electrode plate 2 when the vibrating diaphragm is a regular hexagonal vibrating diaphragm shown in fig. 18; in this embodiment, the thickness of the electrode plate 2 is greater than 1 μm, which ensures that the electrode plate 2 can be perforated, preferably about 6 μm, when the electrode plate 2 is provided with the circular holes 21, the diameter of the circular holes 21 is less than 10 μm, which ensures that air can circulate and the circular holes 21 can be spaced apart, preferably about 4 μm, when the electrode plate 2 is provided with the long holes 22, the width of the long holes 22 is less than 10 μm, which ensures that air can circulate and the long holes 22 can be spaced apart, preferably about 4 μm.
The shape of the through hole of the electrode plate 2 of the present embodiment is not limited to the circular hole 21, the long hole 22, and the square hole, and may be a through hole of another shape. The spacer 3 is used to provide a gap between the electrode plate 2 and the vibration plate 4 to form air damping, and the spacer 3 is preferably a spacer plate of a ring structure provided at circumferential edge positions of the electrode plate 2 and the vibration plate 4. The pixel sound generating unit is provided with a substrate 1, an electrode plate 2, a partition plate and a vibrating plate 4 in sequence in a laminated manner.
During the use, electrode plate 2 and vibration board 4 circular telegram produce the electric field, vibrating diaphragm 42 can vibrate for fixed part 43 under the effect of electric field, realize the transmission of sound, make pixel sound production unit can normally work, pixel sound production unit in this embodiment is the capacitive loudspeaker that comprises electrode plate 2 and vibration board 4, for the moving coil loudspeaker among the prior art, this embodiment pixel sound production unit simple structure, tone quality is high and the audio is good, vibrating diaphragm 42 area is big and resonant frequency is high, the acoustic performance of pixel sound production unit has been promoted, there is the clearance between electrode plate 2 and the vibration board 4 and enables to form air damping between electrode plate 2 and the vibration board 4, guarantee that electrode plate 2 and vibration board 4 can form the plate capacitor in order to control vibrating diaphragm 42 motion.
Of course, the pixel sound generating unit may not be provided with the electrode plate 2, and the vibration of the vibrating plate may be realized by implementing piezoelectric driving.
As shown in fig. 1 to 18, in this embodiment, the cross section of the diaphragm 42 includes a circular shape, a rectangular shape, or a regular polygon shape, at this time, the diaphragm 42 has a symmetrical structure, and the shape of the diaphragm 42 is more uniform, so that the vibration of the diaphragm 42 is more stable and controllable, and the acoustic performance of the pixel sound generating unit is improved.
As a possible implementation manner, in this embodiment, at least two dividing grooves 41 form an annular structure, and one end of one dividing groove 41 is located inside a front adjacent dividing groove 41, and the other end is located outside a rear adjacent dividing groove 41, the at least two dividing grooves 41 form an annular structure, that is, at least two dividing grooves 41 are sequentially arranged in the circumferential direction and are connected end to end, the front adjacent dividing groove 41 is at least two dividing grooves 41 of the annular structure, the front adjacent dividing groove 41 is the front dividing groove 41 of one dividing groove 41, the rear adjacent dividing groove 41 is at least two dividing grooves 41 of the annular structure, the rear dividing groove 41 is the rear dividing groove 41 of one dividing groove 41, the inner side of the dividing groove 41 is the inner side of the enclosure region formed by at least two dividing grooves 41, that is, the side close to the diaphragm 42, the outer side of the dividing groove 41 is the outer side of the enclosure region formed by at least two dividing grooves 41, namely, the side close to the fixing portion 43, with such a structure, an annular structure meeting the requirements can be formed by the smaller number of dividing grooves 41, that is, the vibration plate 4 is divided into the vibration film 42 located in the surrounding area of the dividing groove 41, the fixing portion 43 located outside the surrounding area of the dividing groove 41, and the vibration film cantilever structure 44 connecting the vibration film 42 and the fixing portion 43, so that the structure of the vibration film 42 is simpler and the processing is more convenient.
For example, fig. 3, 5, and 6 show the structure of the diaphragm 42 when it is a circular diaphragm 42, fig. 5 shows the structure of the circular diaphragm 42 having two dividing grooves 41, fig. 6 shows the structure of the circular diaphragm 42 having three dividing grooves 41, and fig. 3 shows the structure of the circular diaphragm 42 having four dividing grooves 41; for example, fig. 10 shows a structure in which the diaphragm 42 is a square diaphragm 42; fig. 16 shows a structure in which the diaphragm 42 is a regular hexagonal diaphragm 42, for example.
As another possible implementation manner, in the present embodiment, at least four dividing grooves 41 are provided, at least four dividing grooves 41 form an annular structure, and one dividing groove 41 is located at the inner side or the outer side of the adjacent dividing groove 41, the at least four dividing grooves 41 form an annular structure, that is, at least four dividing grooves 41 are sequentially arranged in the circumferential direction and connected end to end, the adjacent dividing groove 41 is located in the at least four dividing grooves 41, the previous dividing groove 41 of one dividing groove 41 is located in the annular structure, the adjacent dividing groove 41 is located in the at least four dividing grooves 41, the next dividing groove 41 of one dividing groove 41 is located in the annular structure, the inner side of the dividing groove 41 is located in the enclosure region formed by the at least four dividing grooves 41, that is, the side close to the diaphragm 42, the outer side of the dividing groove 41 is located in the enclosure region formed by the at least four dividing grooves 41, that is, the side close to the fixing portion 43, with this structure, it is possible to form a satisfactory annular structure by the plurality of dividing grooves 41, that is, to divide the vibration plate 4 into the vibration film 42 located in the enclosure region of the dividing groove 41, the fixing portion 43 located outside the enclosure region of the dividing groove 41, and the vibration film cantilever structure 44 connecting the vibration film 42 and the fixing portion 43, so that the vibration film 42 can vibrate under the elastic action of the vibration film cantilever structure 44. For example, fig. 4 shows a structure when the diaphragm 42 is a circular diaphragm 42, for example, fig. 11 and 12 show a structure when the diaphragm 42 is a square diaphragm 42, and for example, 17 shows a structure when the diaphragm 42 is a regular hexagonal diaphragm 42.
In some embodiments, the number of diaphragm cantilever structures 44 is at least two, and the diaphragm cantilever structures are symmetrically distributed. By adopting the structure, the vibrating diaphragm 42 is supported by the vibrating diaphragm cantilever structures 44 which are symmetrically arranged, so that the vibrating diaphragm 42 is stressed more uniformly and vibrates more stably and controllably, the pixel sound production unit is ensured to have good acoustic performance, and meanwhile, the motion of the vibrating diaphragm 42 along the horizontal direction is inhibited, and the stability of the vibrating diaphragm 42 is ensured; in this embodiment, the at least two diaphragm cantilever structures 44 are symmetrically distributed, that is, the at least two dividing grooves 41 are symmetrically distributed, including rotational symmetry, axial symmetry, and central symmetry, and preferably are rotationally symmetric structures.
In order to prevent the end of the dividing groove 41 from being broken, the end of the dividing groove 41 is preferably provided with an arc-shaped groove 411 for reducing stress concentration, and the diaphragm 42 is likely to break due to high-frequency vibration during operation, and the embodiment can reduce the local stress level at the end of the dividing groove 41 through the arc-shaped groove 411, increase the strength of the end of the diaphragm cantilever structure 44, and reduce the risk of breaking and failure of the end of the diaphragm cantilever structure 44.
In an optional mode, the span of the diaphragm 42 is 50 μm to 5000 μm, and the span of the diaphragm 42 refers to the cross-sectional length of the diaphragm 42, that is, when the diaphragm 42 is circular, the span of the diaphragm 42 is the diameter of the diaphragm, and when the diaphragm 42 is square, the span of the diaphragm 42 is the side length of the diaphragm. In an optional manner, the width of the diaphragm cantilever structure 44 is greater than 1 μm, and the width of the dividing groove 41 is less than 10 μm, so as to ensure that the diaphragm cantilever structure 44 has good elastic performance and the pixel sound production unit has good acoustic performance, the width of the diaphragm cantilever structure 44 is preferably about 6 μm, the number of the diaphragm cantilever structures 44 is preferably 4-8, and the width of the dividing groove 41 is preferably about 1 μm.
Based on the technical problems of poor sound quality and small sound pressure level of the conventional loudspeaker in the prior art, the embodiment of the invention further provides a digital sound generating chip, as shown in fig. 19, the digital sound generating chip comprises a plurality of pixel sound generating units, the pixel sound generating units are distributed in an array or linear manner, each pixel sound generating unit can independently control audio and volume, and the digital control of sound can be realized by mutually matching the plurality of pixel sound generating units.
Compared with the prior art, the digital sound production chip provided by the embodiment of the invention has the beneficial effects that besides the beneficial effects of the pixel sound production units provided by the embodiment, consistent sound energy pulse output can be realized through a plurality of pixel sound production units distributed in an array or in a linear manner, the sound pressure level of the digital sound production chip is improved, and meanwhile, the performances of the digital sound production chip such as acoustic distortion and the like are obviously optimized.
As a possible implementation manner, the plurality of pixel sound generating units of the embodiment are distributed in a rectangular array or a circular array. Preferably, the plurality of pixel sound generating units are distributed in an array of 32 x 32. Of course, other numbers and array layouts may be used depending on the configuration requirements. By adopting the structure, consistent acoustic energy pulse output can be realized through the plurality of pixel sounding units, the acoustic performance of the digital sounding chip is improved, the array distribution structure of the plurality of pixel sounding units is not limited to rectangular array distribution and circular array distribution, and other array distribution structures can be adopted.
The embodiment of the invention also provides an electronic terminal which comprises a terminal body and the digital sound chip of any embodiment, wherein the digital sound chip is arranged on the terminal body.
Compared with the prior art, the electronic terminal provided by the embodiment of the invention has the same beneficial effects as the digital sounding chip provided by the embodiment, and the details are not repeated herein.
Illustratively, the electronic terminal may be a headset, a mobile phone, glasses, a tablet, a watch, and the like. The array distribution of the pixel sounding units in the adopted digital sounding chip is different according to the shapes of different electronic terminals. For example, for an in-ear headphone, due to the small size, the pixel sound generating units in the digital sound generating chip may be distributed in a circular array; for the glasses with the loudspeaker function, the digital sound production chip can be arranged on the glasses legs, and the pixel sound production units in the digital sound production chip can be distributed in a linear array; for electronic terminals such as mobile phones, flat panels, watches and the like, the pixel sounding units in the digital sounding chips are distributed in a rectangular array or a linear array according to the set positions.
The embodiment of the invention also provides a manufacturing method of the pixel sound production unit, and the manufacturing method of the pixel sound production unit comprises the steps of designing the size of the dividing groove according to the sound isolation requirement of the dividing groove on the vibrating plate in the pixel sound production unit; designing the sizes of the vibrating diaphragm cantilever structure and the vibrating diaphragm according to the rigidity requirement of the vibrating diaphragm cantilever structure on the vibrating diaphragm and the resonance frequency requirement of the pixel sounding unit; etching the partition groove on the vibrating plate according to the sizes of the partition groove, the vibrating diaphragm cantilever structure and the vibrating diaphragm to form the vibrating diaphragm positioned on the inner side of the partition groove, the fixing part positioned on the outer side of the partition groove and at least two vibrating diaphragm cantilever structures connecting the vibrating diaphragm and the fixing part; an electrode plate and a vibrating plate of the pixel sounding unit are mounted on a base, and the electrode plate and the vibrating plate are electrified to form a gap between the electrode plate and the vibrating plate.
Compared with the prior art, the manufacturing method of the pixel sound generating unit provided by the embodiment of the invention has the same beneficial effects as the pixel sound generating unit described in the embodiment, and the details are not repeated herein.
As a possible implementation manner, the present embodiment designs the size of the dividing groove according to the acoustic isolation requirement of the dividing groove on the vibrating plate in the pixel sound generating unit; designing the dimensions of the vibrating diaphragm cantilever structure and the vibrating diaphragm according to the rigidity requirement of the vibrating diaphragm cantilever structure on the vibrating diaphragm and the resonance frequency requirement of the pixel sounding unit, specifically, establishing a flow-solid viscous boundary layer thickness model and a thermal boundary layer thickness model when air flows through the dividing groove, designing the dimensions of the dividing groove according to the flow-solid viscous boundary layer thickness model and the thermal boundary layer thickness model, and ensuring that the width of the dividing groove is smaller than the thickness of the flow-solid viscous boundary layer so as to realize sound isolation; obtaining structural parameters and material parameters of the vibrating diaphragm cantilever structure, and establishing a rigidity model of the vibrating diaphragm cantilever structure; obtaining structural parameters of a rear cavity of the pixel sound production unit, and establishing a rear cavity air rigidity model of the pixel sound production unit; obtaining structural parameters of a vibrating diaphragm of the pixel sounding unit, calculating the area of the vibrating diaphragm and establishing a quality model of the vibrating diaphragm; establishing a resonance frequency estimation model of the pixel sounding unit according to the rigidity model of the vibrating diaphragm cantilever structure and the mass model of the vibrating diaphragm, and designing the sizes of the vibrating diaphragm cantilever structure and the vibrating diaphragm according to the resonance frequency estimation model.
Wherein the flow-solid viscous boundary layer thickness model is:
the thermal boundary layer thickness model is:
where ω is the angular frequency, ρ0Is fluid density, mu is hydrodynamic viscosity, k is thermal conductivity, CpIs the specific heat capacity;
the rigidity model of the vibrating diaphragm cantilever structure is as follows:
wherein, KmThe total support stiffness of the vibrating diaphragm cantilever structure is shown, N is the number of the vibrating diaphragm cantilever structures, E is the material modulus of the vibrating diaphragm cantilever structure, l is the length of the vibrating diaphragm cantilever structure, t is the thickness of the vibrating diaphragm cantilever structure, and b is the width of the vibrating diaphragm cantilever structure;
the mass model of the diaphragm is:
M＝ρSt
s is the area of the vibrating diaphragm, rho is the density of the vibrating diaphragm, t is the thickness of the vibrating diaphragm, and the thickness of the vibrating diaphragm is equal to that of the cantilever structure of the vibrating diaphragm;
the rear cavity air stiffness model is:
wherein, the effective area of the diaphragm of the pixel sound generating unit is Sd, the approximate Sd is S, and the back cavity volume V of the pixel sound generating unitair，C0Is the speed of sound in air, ρ0Is the air density;
the resonant frequency estimation model is:
wherein, fsFor the resonant frequency of the pixel sound-generating unit, C0Is the speed of sound in air, ρ0Is the density of air, VairIs the back volume of the pixel sound generating unit.
Based on the above method, firstly, in order to realize the acoustic isolation of the partition groove, ensure that the diaphragm cantilever structure can isolate the fluid pressure before and after the diaphragm, and simultaneously prevent the diaphragm cantilever structure from being attached by dust and losing efficacy, the width of the partition groove needs to be much smaller than the thickness of the flow-solid viscous boundary layer, in the environment of 100kHz, 20 ℃ and 1atm, the boundary layer of the pixel sound generating unit is:
δvisco＝7um；δtherm＝8um
therefore, the width of the dividing groove needs to be far less than 7 μm, preferably 1 μm; while the diameter of the circular hole and the width of the elongated hole of the electrode plate need to be smaller than the thickness of the flow-solid viscous boundary layer, preferably 4 μm.
Next, the resonant frequency of the pixel sound generating unit is:
wherein K is the total rigidity of the pixel sounding unit, and M is the mass of the diaphragm;
the total stiffness of the pixel sound generating unit is: k ═ Km+KairWherein, K ismFor diaphragm cantilever structural rigidity, KairIs the air stiffness;
because the pixel sound production unit is small in size, the additional air quality can be ignored, and therefore the resonant frequency estimation model of the pixel sound production unit is obtained as follows:
based on the method, the resonance frequency of the pixel sound production unit can be calculated according to the resonance frequency estimation model, whether the size of the designed vibrating diaphragm cantilever structure and the vibrating diaphragm meets the requirement or not is judged by comparing the difference value between the estimated resonance frequency and the resonance frequency of the design requirement, when the size of the vibrating diaphragm cantilever structure and the vibrating diaphragm does not meet the requirement, the resonance frequency of the pixel sound production unit is calculated again and compared with the resonance frequency of the design requirement, and the step is repeated to design the size of the vibrating diaphragm cantilever structure and the vibrating diaphragm meeting the requirement.
In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.
Claims (14)
1. A pixel sound generating unit comprises a vibrating plate, and is characterized in that:
the vibrating plate is provided with at least two dividing grooves which are arranged in an enclosing mode, the end portion of one of the two adjacent dividing grooves and the end portion of the other one of the two adjacent dividing grooves are sequentially arranged along the direction of a ray which extends outwards from the center point of the vibrating plate, so that overlapping is formed in the direction of the arrangement in the enclosing mode, and a vibrating diaphragm cantilever structure is formed between the overlapped dividing grooves; the dividing groove divides the vibrating plate into a vibrating diaphragm positioned in the surrounding area of the dividing groove and a fixing part positioned outside the surrounding area of the dividing groove; the vibrating diaphragm with the fixed part passes through vibrating diaphragm cantilever structure elastic connection, just the vibrating diaphragm, the fixed part with vibrating diaphragm cantilever structure is the integral structure.
2. The pixel sound generation unit of claim 1, further comprising a back cavity and a base, the vibration plate being disposed on one side of the back cavity, the back cavity being at least partially formed in the base.
3. The pixel sound generating unit according to claim 2, further comprising an electrode plate and a spacer, wherein the base, the electrode plate, the spacer and the vibrating plate are sequentially stacked;
a gap is formed between the electrode plate and the vibrating plate through the interval of the spacer, the base is provided with an opening, and the structure between one side of the vibrating diaphragm facing the electrode plate and the bottom of the opening forms the rear cavity;
the electrode plate is provided with through holes distributed in an array mode at the position corresponding to the rear cavity, so that air can flow into the space between the electrode plate and the vibrating plate through the through holes to form air damping.
4. The pixel sound generating unit according to claim 1, wherein at least two of the dividing grooves are formed in a ring structure, and one end of one of the dividing grooves is located inside its front adjacent dividing groove, and the other end thereof is located outside its rear adjacent dividing groove;
or at least four dividing grooves are arranged on the dividing groove, the at least four dividing grooves form an annular structure, and one dividing groove is positioned on the inner side or the outer side of the front adjacent dividing groove and the rear adjacent dividing groove.
5. The pixel sound generating unit according to any one of claims 1 to 4, wherein the number of the diaphragm cantilever structures is at least two, and the diaphragm cantilever structures are symmetrically distributed.
6. The pixel sound generating unit according to any one of claims 1 to 4, wherein the ends of the dividing grooves are provided with an arc-shaped groove structure for reducing stress concentration.
7. The pixel sound generating unit according to claim 3, wherein the through-holes of the electrode plate comprise round, elongated or square holes.
8. The pixel sound generating unit according to any one of claims 1 to 4, wherein the diaphragm has a span of 50 μm to 5000 μm and/or the width of the diaphragm cantilever structure is greater than 1 μm.
9. The pixel sound generating unit according to any one of claims 1 to 4, wherein a cross section of the diaphragm comprises a circle, a rectangle, or a regular polygon.
10. A digital sound-generating chip, comprising the pixel sound-generating unit according to any one of claims 1 to 9, wherein the number of the pixel sound-generating units is plural, and the pixel sound-generating units are distributed in an array or a line.
11. The digital sound production chip of claim 10, wherein the plurality of pixel sound production units are distributed in a rectangular array or a circular array.
12. An electronic terminal, characterized in that it comprises a terminal body and a digital sound chip according to claim 10 or 11, said digital sound chip being arranged on said terminal body.
13. A method of manufacturing a pixel sound emission unit, characterized in that manufacturing a pixel sound emission unit according to any one of claims 1 to 9, comprises:
designing the size of the dividing groove according to the sound isolation requirement of the dividing groove on the vibrating plate in the pixel sound production unit;
designing the sizes of the vibrating diaphragm cantilever structure and the vibrating diaphragm according to the rigidity requirement of the vibrating diaphragm cantilever structure on the vibrating diaphragm and the resonance frequency requirement of the pixel sounding unit;
etching the dividing groove on the vibrating plate according to the sizes of the dividing groove, the vibrating diaphragm cantilever structure and the vibrating diaphragm to form the vibrating diaphragm positioned in the surrounding area of the dividing groove, the fixing part positioned outside the surrounding area of the dividing groove and the vibrating diaphragm cantilever structure connecting the vibrating diaphragm and the fixing part;
and mounting an electrode plate and a vibrating plate of the pixel sounding unit on a substrate, and electrifying the electrode plate and the vibrating plate to form a gap between the electrode plate and the vibrating plate.
14. The method of manufacturing a pixel sound emission unit according to claim 13, wherein the size of the dividing groove is designed in accordance with a requirement of acoustic isolation of the dividing groove on the diaphragm in the pixel sound emission unit; according to the rigidity requirement of vibrating diaphragm cantilever structure on the vibration board and the resonant frequency requirement of pixel sound production unit, design the size of vibrating diaphragm cantilever structure and vibrating diaphragm specifically is:
establishing a flow-solid viscous boundary layer thickness model and a thermal boundary layer thickness model when air flows through the dividing groove, designing the size of the dividing groove according to the flow-solid viscous boundary layer thickness model and the thermal boundary layer thickness model, and ensuring that the width of the dividing groove is smaller than the thickness of the flow-solid viscous boundary layer to realize sound isolation;
obtaining the structural parameters and the material parameters of the vibrating diaphragm cantilever structure, and establishing a rigidity model of the vibrating diaphragm cantilever structure;
obtaining structural parameters of a rear cavity of the pixel sound production unit, and establishing a rear cavity air rigidity model of the pixel sound production unit;
obtaining structural parameters of a vibrating diaphragm of the pixel sounding unit, calculating the area of the vibrating diaphragm and establishing a quality model of the vibrating diaphragm;
establishing a resonance frequency estimation model of the pixel sound production unit according to the rigidity model of the vibrating diaphragm cantilever structure, the back cavity air rigidity model and the mass model of the vibrating diaphragm, and designing the sizes of the vibrating diaphragm cantilever structure and the vibrating diaphragm according to the resonance frequency estimation model.
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