CN116970916A

CN116970916A - Coating tool and process

Info

Publication number: CN116970916A
Application number: CN202311228351.3A
Authority: CN
Inventors: 请求不公布姓名
Original assignee: New Meguiar Suzhou Semiconductor Technology Co ltd
Current assignee: New Meguiar Suzhou Semiconductor Technology Co ltd
Priority date: 2023-09-22
Filing date: 2023-09-22
Publication date: 2023-10-31
Anticipated expiration: 2043-09-22
Also published as: CN116970916B

Abstract

The application belongs to the technical field of vapor deposition, and relates to a coating tool and a process, wherein the coating tool comprises: the carrier is provided with a flange surrounding a coating area in a product to be coated, and the flange is used for placing the product; a gasket at least partially between the flange and the product; at least one pressing structure for applying a pressing force to the gasket toward the product. According to the coating tool and the process provided by the application, the gasket of the carrier and the pressurizing structure of the gasket are arranged, so that the gap between the product and the tool is controllable, the coating edge is improved, the quality of the product is improved, and the defect of relatively low effective coating area under the traditional treatment scheme is overcome.

Description

Coating tool and process

Technical Field

The application relates to the technical field of semiconductors, in particular to a coating tool and a coating process.

Background

The vapor plating is a process for protecting and improving the surface performance, improving the optical mechanical weather resistance and the like of a product by plating one or more layers of materials with specific thickness on the surface of the product. In the prior art, a vapor deposition method from bottom to top is generally adopted. The product is placed in the carrier, and the holes of the carrier leak out of the coating area of the product. After evaporation, a coating line (boundary between a coating area and an uncoated area) is usually generated at the edge of the carrier, and in an ideal state, the coating line should have regular outline and relatively uniform thickness, but in the prior art, the coating boundary after evaporation is finished has different coating line widths, even has signs of local edge stripping, and influences the product quality. Especially for large-size plating parts, such as plasma-resistant plating parts applied to plasma etching equipment, the product size is large, the precision is high, the corresponding jig size is larger, and higher requirements are put on the manufacturing precision of the jig.

In order to avoid the above problems in the prior art, two schemes are generally adopted:

1. the size of the product is enlarged, so that the coating line is outside the functional area of the product, but the effective area of the product coating is equivalent to lower;

2. cutting the plated product to obtain a plated area for effective use, wherein the problem of edge breakage is easy to occur;

3. the gasket is made of high-temperature-resistant high-molecular materials, but is affected by high temperature, and the long-term use effect is unstable.

It can be seen that the prior art lacks a solution for improving the coating edge, and the treatment solution for avoiding the problems has disadvantages.

Disclosure of Invention

Therefore, in order to solve the problem of irregular coating lines in the evaporation process in the background technology, the embodiment of the application provides a coating tool and a coating process.

In a first aspect, an embodiment of the present application provides a coating tool, including:

the carrier is provided with a flange surrounding a product to be coated, and the flange is used for bearing the product;

the gasket is at least partially positioned between the flange and the product, and the gasket is hollowed out corresponding to the part to be plated of the product;

at least one pressing structure for applying a pressing force to the gasket toward the product.

When the gasket is used, the gasket is extruded through the pressurizing structure, so that gaps between the product and the gasket are controllable, coating edges are improved, and the quality of the product is improved.

With reference to the first aspect of the present application, in an alternative embodiment, the pressing structure includes:

a pressing plate;

a platen adjustment structure;

the pressing plate can be in at least two states under the drive of the pressing plate adjusting structure:

a first state in which the platen is not in contact with the shim;

and in a second state, the pressing plate presses the gasket.

The gasket is convenient to apply pressure, and the state of the pressing plate is convenient to change by adopting the pressing plate adjusting structure.

With reference to the first aspect of the present application, in an alternative embodiment, the pressing structure further includes: the connecting seat is fixed on the carrier and is connected with the pressing plate through a rotating shaft;

one end of the pressing plate adjusting structure is in threaded connection with the carrier, and the other end of the pressing plate adjusting structure is in abutting connection with the pressing plate; or one end of the pressing plate adjusting structure is in threaded connection with the pressing plate, and the other end of the pressing plate adjusting structure is in abutting connection with the carrier;

the pressing plate adjusting structure is connected with the first end of the pressing plate, and the second ends of the pressing plates for extruding the gaskets are respectively positioned on two opposite sides of the rotating shaft; wherein the second end is an opposite end of the first end;

the platen is capable of changing between the first state and the second state when rotated about the axis of rotation.

Through set up the connecting seat on the carrier, make clamp plate and clamp plate adjust the structure and can connect on the carrier, the regulation of the clamp plate of being convenient for. Secondly, the rotating shaft is used as a fulcrum, one of two sides of the fulcrum is provided with the pressing plate adjusting structure, the other side of the fulcrum is used for pressing the gasket, and the pressing structure in the lever form can facilitate the application of pressure from one end of the pressing plate.

With reference to the first aspect of the present application, in an alternative embodiment, the spacer is made of a metal material, and has a thickness of 2mm to 4mm. The gasket adopts the metal material, and thickness is thinner, has utilized the deformation of pressurization structure compensation thin gasket simultaneously, can use repeatedly under high temperature, practices thrift the cost.

In combination with the first aspect of the present application, in an alternative embodiment, the platen adjustment structure is a screw. Low cost and high practicability.

In combination with the first aspect of the present application, in an alternative embodiment, the platen is provided with a through hole for the platen adjusting structure to pass through, and the platen adjusting structure passes through the through hole and is in threaded connection with the carrier.

In combination with the first aspect of the present application, in an alternative embodiment, the screw is arranged perpendicular to the pressure plate in the first state. This arrangement maximizes the distance the screw moves and translates into the angle at which the platen rotates.

In combination with the first aspect of the present application, in an alternative embodiment, the pressing plate is used for pressing one end of the gasket to have a bump protruding toward the gasket. The structure of the lug can enable the contact surface of the pressing plate, which is contacted with the gasket, to be relatively reduced, so that the pressure of the pressing plate on the gasket is concentrated at the position of the lug, namely, the position with the largest deformation when the gasket is deformed is generated at the position close to the lug.

In combination with the first aspect of the present application, in an alternative embodiment, an inner edge of the spacer protrudes toward an inner peripheral surface of the flange, and the step is used for shielding a gap between the flange and the spacer to prevent harmful gas from flowing out of the gap and mixing into the plating material.

In a second aspect, an embodiment of the present application provides a plating process, where the process includes:

using a flange of a carrier to bear a product to be coated, and cushioning a gasket between the flange and the product;

measuring gaps between the inner side edges of the gaskets and the products, and finding one or more defect positions of which the gaps are larger than a preset gap value;

rotating the shim to align the defect location with the pressing structure;

and extruding the gasket by using the pressurizing structure to enable the gasket to be attached to the product.

The method enables the gap between the product and the tool to be controllable, improves the coating side line and improves the quality of the product.

In combination with the second aspect of the present application, in an alternative embodiment, the pressing the gasket using the pressing structure includes:

according to the preset corresponding relation between the gap and the extrusion force, the extrusion force required to be applied by the compression structure is determined, and the extrusion force information required to be applied can be rapidly obtained by the method, so that repeated experiments are avoided.

With reference to the second aspect of the present application, in an alternative embodiment, the pressing structure includes:

a pressing plate;

a platen adjustment structure;

a first state in which the platen is not in contact with the shim;

a second state in which the pressing plate presses the gasket;

the screw is adopted as a pressing plate adjusting structure, the corresponding relation between the extrusion force and the torque required by the screw is obtained according to the preset corresponding relation between the gap and the extrusion force, and then the preset corresponding relation between the gap and the torque of the screw is obtained.

In combination with the second aspect of the application, in an alternative embodiment, the measurement is marked or recorded after the first measurement of the gap between the inside edge of the gasket and the product. The scheme can reduce the measurement times and avoid the time waste caused by repeated measurement.

According to the coating tool and the process provided by the embodiment of the application, the gasket matched with the carrier and the pressurizing structure of the gasket are arranged, so that the gap between the product and the tool is controllable, the coating edge is improved, the quality of the product is improved, and the defect of relatively low effective coating area under the traditional treatment scheme is overcome.

Additional aspects and advantages of the application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the application.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute a limitation on the application. In the drawings:

FIG. 1 is a schematic cross-sectional view of a coating tool according to embodiment 1 of the present application;

FIG. 2 is a schematic view of a platen structure according to embodiment 1 of the present application;

FIG. 3 is a schematic cross-sectional view of a coating tool according to embodiment 2 of the present application;

FIG. 4 is a schematic view showing the effect of blocking the evaporated plating material of the gasket of example 1 of the present application;

FIG. 5 is a schematic view showing the effect of blocking the evaporated plating material of the gasket of example 2 of the present application;

FIG. 6 is a flow chart of a coating process provided in embodiment 1 of the present application;

fig. 7 is a schematic diagram of measurement results of step S3 provided in embodiment 1 of the present application;

FIG. 8 is a photograph of the coating line according to example 1 of the present application under ultraviolet irradiation;

FIG. 9 is a photograph of a coating line under the conventional scheme under ultraviolet irradiation.

The reference numerals in the figures are:

1. a carrier;

2. a gasket;

3. a pressurizing structure;

4. a product;

11. a flange;

21. a step;

31. a pressing plate;

32. a platen adjustment structure;

33. a connecting seat;

311. a bump;

312. a shaft mounting hole;

313. and (5) sinking the holes.

Detailed Description

Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the application are shown in the drawings, it should be understood that the application may be embodied in various forms and should not be limited to the specific embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present application. It will be apparent, however, to one skilled in the art that the application may be practiced without one or more of these details. In other instances, well-known features have not been described in detail so as not to obscure the application; that is, not all features of an actual implementation are described in detail herein, and well-known functions and constructions are not described in detail.

In the drawings, the size of layers, regions, elements and their relative sizes may be exaggerated for clarity. Like numbers refer to like elements throughout.

Spatially relative terms, such as "under … …," "under … …," "below," "under … …," "above … …," "above," and the like, may be used herein for ease of description to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use and operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements or features described as "under" or "beneath" other elements would then be oriented "on" the other elements or features. Thus, the exemplary terms "under … …" and "under … …" may include both an upper and a lower orientation. The device may be otherwise oriented (rotated 90 degrees or other orientations) and the spatially relative descriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of the associated listed items.

In order to provide a thorough understanding of the present application, detailed steps and detailed structures will be presented in the following description in order to explain the technical solution of the present application. Preferred embodiments of the present application are described in detail below, however, the present application may have other embodiments in addition to these detailed descriptions.

Example 1

The embodiment provides a coating fixture, as shown in fig. 1, including:

the carrier 1, the carrier 1 is provided with a flange 11 surrounding the product to be coated, and the flange 11 is used for bearing the product 4;

the gasket 2 is at least partially positioned between the flange 11 and the product 4 (comprising the situation that the edge of the gasket 2 coincides with the edge of the flange 11), and the part of the gasket 2 corresponding to the product to be plated is hollowed out;

at least one pressing structure 3, the pressing structure 3 being adapted to apply a pressing force to the gasket 2 towards the product.

According to the coating tool, the working principle is that the carrier 1, the gasket 2 and the pressurizing structure 3 of the gasket are arranged, so that gaps between a product and the tool are controllable, coating side lines are improved, the quality of the product is improved, and the defect that the effective area of a coating film is relatively low in a traditional treatment scheme is overcome. Meanwhile, the precision requirements on the processing of parts such as gaskets, carriers and the like are reduced, and the qualification rate of workpieces is greatly improved. The center of the gasket 2 should be provided with a through hole corresponding to the product to-be-plated area for the evaporated plating material to pass through, so the gasket 2 is generally a gasket, and the specific shape should be referred to the product to-be-plated area, and the gasket can be deformed under the action of pressure due to the application in a high-temperature environment, so a thinner metal gasket is used. In practical production, when there is a high demand for precision, whether the flange 11 is used to directly carry the product or the gasket 2 is additionally arranged to carry the product, the gap between the flange 11 or the gasket 2 and the contact surface of the product is difficult to control in an ideal range. Taking a round product with a dimension of 600mm as an example, after placing the gasket 2, as shown in fig. 7, the maximum gap of the product circumference is about 0.08mm without intervention, which is difficult to avoid by improving the machining accuracy due to the dimensional structure problem. In the embodiment, the pressing structure 3 presses the gasket 2 to deform the gasket 2, so that the excessive gap between the gasket 2 and the product 4 can be reduced to a desired range. For practical situations, there may be a case where there are too many gaps between one gasket 2 and the product 4, so that the number of the pressing structures 3 needs to be increased according to the practical production situation. As an illustration, as shown in fig. 1, which schematically illustrates a state of the coating tool of the present embodiment before use, wherein the pressing structure 3 does not press the gasket 2, and at this time, a gap exists between the gasket 2 and the product 4 due to a problem of the dimension (flatness) of the gasket 2, and the gap is a major factor causing irregular coating lines (secondary factors are product type, material, carrier type, etc.) through analysis by an experimenter; as shown in fig. 4, the coating tool of this embodiment is schematically shown in a state after use, in which the pressing structure 3 presses the gasket 2 to make the gasket 2 adhere to the product 4, and the gap between the gasket 2 and the product 4 has been significantly reduced, and as shown in fig. 4, it can be seen that the evaporated coating material has hardly re-entered between the gasket 2 and the product 4, so that the deformed gasket 2 can greatly improve the profile of the coating line. In fig. 8, the outline of the coating line of the coating tool of the present embodiment after use is shown, and it can be seen that the coating line is uniform in thickness, and the boundaries of the coating area and the non-coating area are clear; in fig. 9, the film coating line of the product without using the film coating tool of the embodiment is shown, and it can be seen that the film coating line (arc line) in the figure has different thickness, and the film coating area and the film coating-free area boundary cannot be distinguished obviously. (FIGS. 8 and 9 are both taken under ultraviolet irradiation.)

Alternatively, in the present embodiment, the pressing structure 3 includes:

a pressing plate 31;

a platen adjustment structure 32;

the pressing plate 31 can be driven by the pressing plate adjusting structure 32 to be in at least two states:

in the first state, as shown in fig. 1, the pressing plate 31 is not in contact with the gasket 2;

in the second state, the pressing plate 31 presses the gasket 2, and as shown in fig. 4, the pressed gasket 2 is bent and deformed toward the product 4 side.

In this alternative, the pressing structure 3 adopts the structure of the pressing plate 31, so that the gasket 2 is pressed conveniently, and the state of the pressing plate 31 is changed conveniently by adopting the pressing plate adjusting structure 32. The platen adjustment mechanism 32 may be manually adjustable, such as screws, jackscrews, etc., or mechanically actuated, such as cams, air cylinders, etc.

Optionally, as shown in fig. 1, the pressing structure 3 of the plating tool of this embodiment further includes: the connecting seat 33, the connecting seat 33 is fixed on the carrier 1 and is connected with the pressing plate 31 through a rotating shaft;

one end of the pressing plate adjusting structure 32 is in threaded connection with the carrier 1, and the other end of the pressing plate adjusting structure 32 is in abutting connection with the pressing plate 31; or, one end of the pressing plate adjusting structure 32 is in threaded connection with the pressing plate 31, and the other end of the pressing plate adjusting structure 32 is abutted with the carrier 1;

the first end of the pressing plate adjusting structure 32 connected with the pressing plate 31, and the second end of the pressing plate 31 for pressing the gasket 2 are respectively positioned at two opposite sides of the rotating shaft; wherein the second end is the opposite end of the first end;

the platen 31 is capable of changing between a first state and a second state when rotated about a rotational axis.

In this alternative, the platen 31 and the platen adjusting structure 32 can be connected to the carrier by providing the connecting base 33 on the carrier 1, so that the adjustment of the platen 31 is facilitated. Secondly, the rotating shaft is provided as a fulcrum, and one of both sides of the fulcrum is provided with a pressing plate adjusting structure 32, and the other side is used for pressing the gasket 2, and the pressing structure in the form of a lever can facilitate the application of pressure from one end of the pressing plate 31.

Optionally, in the film plating tool of this embodiment, as shown in fig. 1, the platen adjusting structure 32 is a screw. The screw is simple in structure, low in price and high in practicability, and can extend or retract on the carrier 1 by rotating the screw clockwise or anticlockwise, so that the first end of the pressing plate 31 can be ejected or not ejected, and the second end of the corresponding pressing plate 31 can be extruded or not extruded on the gasket 2. And the screw can be rotated and adjusted by only a screwdriver, so that the operation is simple and convenient.

Alternatively, as shown in fig. 1, the screws are disposed perpendicular to the pressing plate 31 in the first state, and this arrangement can maximize the distance moved by the screws into the rotation angle of the pressing plate 31, and it is understood that when the screws are disposed not perpendicular to the pressing plate 31 in the first state, the distance moved by the screws needs to be decomposed into a direction along which the pressing plate 31 extends and a direction perpendicular to the pressing plate 31, and the distance moved along the direction along which the pressing plate 31 extends cannot provide an effect for the rotation of the pressing plate 31.

Alternatively, as shown in fig. 1, one end (the second end) of the pressing plate 31 for pressing the gasket 2 has a bump 311 protruding toward the gasket 2. The structure of the bump 311 can reduce the contact surface of the pressing plate 31 contacting the gasket 2, so that the pressing force of the pressing plate 31 on the gasket 2 is concentrated at the bump 311, that is, the position with the largest deformation when the gasket 2 is deformed is generated at the position close to the bump 311, and in order to reduce the gap between the gasket 2 and the product 4, most importantly, the gap between the gasket 2 and the product 4 is reduced at the position close to the inner side of the product 4, so that the preferred position of the bump 311 is the position aligned with the gasket 2 close to the inner side of the product 4. The improvement of the gap is obviously better than the whole pressurization or equal force pressurization of the gasket 2 through the actual measurement on the local pressurization of the gasket 2.

Optionally, as shown in fig. 4, in the coating tool of this embodiment, the inner edge of the gasket 2 protrudes toward the inner peripheral surface of the flange 11, and during vapor deposition, the step 21 is used for shielding a gap between the flange 11 and the gasket 2, so as to prevent harmful gas from flowing out of the gap and mixing into the plating material. As shown in fig. 4, besides a gap exists between the gasket 2 and the product 4, a certain gap exists between the gasket 2 and the flange 11, which may cause harmful gas to flow out of the gap and mix into the plating material to affect the product, and the step 21 shields the gap between the flange 11 and the gasket 2, so that the problem that the harmful gas may cause product defects at the position is eliminated, wherein the source of the harmful gas may be a high-temperature adhesive tape, a carrier or the like, and the objects such as the high-temperature adhesive tape, the carrier or the like release absorptive harmful gas under the vacuum high-temperature environment and are adsorbed on the film layer. In contrast, as shown in fig. 5, when the gasket 2 is not provided with the step 21, harmful gas may enter from the gap between the flange 11 and the gasket 2, leaving marks on the edge of the product, causing defects in the product. In a second aspect, the presence of the step 21 also serves to facilitate positioning during mounting of the gasket 2, since the step 21 can be inserted into the inner periphery of the flange 11, thus limiting the movement of the gasket 2 with respect to the centre of the carrier 1, i.e. ensuring a high degree of coaxiality between the gasket 2 and the carrier 1.

Optionally, as shown in fig. 2, in the film plating tool of this embodiment, a shaft mounting hole 312 through which the shaft passes is provided in the middle of the pressing plate 31, a countersunk hole 313 is provided on a surface of one side, the head of the screw is inserted to enhance the stability of the screw abutting against the pressing plate 31, and the other side of the countersunk hole 313 is through, so that the screwdriver can conveniently pass through to connect the screw. The countersunk holes 313 can be specifically waist-shaped holes, U-shaped holes and other holes, so that the limit of the screw is facilitated.

The present embodiment provides a film plating process, as shown in fig. 6, including:

s1, using a flange 11 of a carrier 1 to bear a product to be coated, and padding a gasket 2 between the flange 11 and the product;

s2, measuring gaps between the edges of the inner side of the gasket 2 and the product, and finding one or more defect positions of which the gaps are larger than a preset gap value;

s3, rotating the gasket 2 to align the defect position with the pressurizing structure 3;

s4, the gasket 2 is pressed by the pressing structure 3, so that the gasket 2 is attached to a product.

Preferably, after S4, the gap between the inner edge of the gasket 2 and the product is also retested. So as to ensure that the gap after the gasket 2 is extruded reaches the acceptable range, and vapor deposition can be performed.

Specifically, the tool used in the process for measuring the gap between the inner edge of the gasket 2 and the product is a plug gauge, and the measuring method can be used for measuring and recording the gap between the gasket 2 and the product 4 by a clock positioning method along the circumferential direction of the gasket 2 as shown in fig. 7, in this embodiment, the gap smaller than 0.02mm is used as a qualified standard, for example, the gasket 12 is equally divided along the circumferential direction as shown in fig. 7, for convenience of description, the gasket 2 is equally divided according to a clock and marked on the gasket 2, the gap between the gasket 2 and the product 4 is seen to be maximum about 10 o 'clock, and the gap is 0.08mm, so that the defect position about 10 o' clock is required to be extruded. It can also be seen that the gap in the 12 o 'clock direction also reaches 0.06mm, so that if the extrusion is performed at the defect position in the 12 o' clock direction at the same time, the reduction of the gap is more effective. In addition to the case shown in fig. 7, there are cases where the maximum slit is not located at the measurement position, and it is necessary to estimate the maximum slit, and to estimate in which direction the maximum slit is located by comparing the positions where two or 3 slits are larger. For example, when the 2 o ' clock and 3 o ' clock position measurements are relatively close, the gap maximum should be close to the two o ' clock half position. The existing test data show that the gap and the gasket 2 have obvious corresponding relation, namely, the gap position can be adjusted by rotating the gasket 2, the gasket 2 is rotated to enable the position with larger gap to be aligned with the pressurizing structure 3, then the extrusion force of the pressurizing structure 3 is adjusted, and after all the pressurizing structures 3 are adjusted, vapor deposition can be started. Of course, in other embodiments, the number of aliquots may be increased or decreased by any number, such as 6 aliquots, 10 aliquots, 15 aliquots, etc., depending on the diameter of the shim and coating quality requirements.

Alternatively, the plating process of the present embodiment, which presses the gasket 2 using the pressing structure 3, includes:

the pressing force to be applied by the pressing structure 3 is determined according to a preset correspondence of the slit and the pressing force. If a screw is used as the platen adjustment structure 32, a corresponding relationship between the pressing force and the torque force required by the screw can be obtained, and a preset corresponding relationship between the slit and the torque force of the screw can be obtained.

The preset correspondence table of a gap and screw torque in this embodiment is provided as follows, and is applicable to a product size of 600mm, a product weight of 30kg, a spacer made of aluminum (other metals with similar physical properties may be used) and a thickness of 3mm, and the screw as the platen adjusting structure 32 is regarded as unchanged in length.

When the reference table is not available in the earlier stage, the corresponding relation between the gap and the torsion can be obtained by repeatedly measuring the gap, and after the reference table is manufactured, the adjustment of the pressing plate adjusting structure 32 can be completed by directly setting a torsion to the electric screwdriver after the gap is measured. The torque is set according to the data of the gap torque comparison table to meet the gap requirement, but if the pad has large defect, the torque at the unqualified part may need to be adjusted. For the new gasket 2, after the first measurement, the measurement result is marked or recorded, and the subsequent measurement can be carried out according to the first calibrated position, and the measurement is not needed to be carried out again every time of feeding; since the gasket is deformed after several uses, it can be re-measured and recorded at intervals of several uses, for example, 3 times, 4 times, etc., which are determined according to the deformation conditions generated by the actual use.

Example 2

The embodiment provides a film plating tool, as shown in fig. 3, a through hole for passing through a pressing plate adjusting structure 32 is formed on a pressing plate 31, and the pressing plate adjusting structure 32 passes through the through hole and is in threaded connection with a carrier 1. Specifically, the platen adjusting structure 32 is a screw, and the screw passes through the through hole and is in threaded connection with the carrier 1, and the inner diameter of the through hole is the same as the outer diameter of the head end of the screw.

Unlike embodiment 1, the connection seat 33 is not required in this solution, since the screw can play both an adjusting role and a supporting role of the pressing plate 31, but the solution of embodiment 1 is advantageous in terms of stability.

Alternatively, as shown in fig. 3, the pressing plate 31 of the present embodiment has a projection 311 projecting toward the gasket 2 at one end near the inside of the gasket 2. The structure of the bump 311 can reduce the contact surface of the pressing plate 31 contacting the gasket 2, so that the pressing force of the pressing plate 31 on the gasket 2 is concentrated at the bump 311, that is, the position with the largest deformation when the gasket 2 is deformed is generated at the position close to the bump 311, and in order to reduce the gap between the gasket 2 and the product 4, most importantly, the gap between the gasket 2 and the product 4 is reduced at the position close to the inner side of the product 4, so that the preferred position of the bump 311 is the position aligned with the gasket 2 close to the inner side of the product 4. In addition, in the solution of the present embodiment, because the structural design is different from that of embodiment 1, the distance between the pressing plate 31 and the spacer 2 is further, so the bump 311 is provided to facilitate the pressing plate 31 to contact the spacer 2.

It should be understood that the above examples are illustrative and are not intended to encompass all possible implementations encompassed by the claims. Various modifications and changes may be made in the above embodiments without departing from the scope of the disclosure. Likewise, the individual features of the above embodiments can also be combined arbitrarily to form further embodiments of the application which may not be explicitly described. Therefore, the above examples merely represent several embodiments of the present application and do not limit the scope of protection of the patent of the present application.

Claims

1. Coating frock, its characterized in that includes:

the device comprises a carrier (1), wherein the carrier (1) is provided with a flange (11) surrounding a product to be coated, and the flange (11) is used for bearing the product;

the gasket (2) is at least partially positioned between the flange (11) and the product, and the gasket (2) is hollowed out corresponding to the part to be plated of the product;

at least one pressing structure (3), said pressing structure (3) being adapted to apply a pressing force to said gasket (2) towards said product.

2. The coating tool according to claim 1, wherein the pressing structure (3) comprises:

a pressing plate (31);

a platen adjustment structure (32);

the pressing plate (31) can be driven by the pressing plate adjusting structure (32) to be in at least two states:

a first state in which the platen (31) is not in contact with the gasket (2);

in a second state, the pressing plate (31) presses the gasket (2).

3. The coating tool according to claim 2, wherein the pressing structure (3) further comprises: the connecting seat (33), the connecting seat (33) is fixed on the carrier (1) and is connected with the pressing plate (31) through a rotating shaft;

one end of the pressing plate adjusting structure (32) is in threaded connection with the carrier (1), and the other end of the pressing plate adjusting structure (32) is in abutting connection with the pressing plate (31); or, one end of the pressing plate adjusting structure (32) is in threaded connection with the pressing plate (31), and the other end of the pressing plate adjusting structure (32) is abutted to the carrier (1);

the first end of the pressing plate adjusting structure (32) is connected with the pressing plate (31), and the second end of the pressing plate (31) for extruding the gasket (2) is respectively positioned at two opposite sides of the rotating shaft; wherein the second end is an opposite end of the first end;

the pressure plate (31) is capable of changing between the first state and the second state when rotating around the rotating shaft.

4. A coating tool according to any one of claims 1-3, wherein the gasket (2) is made of a metal material and has a thickness of 2 mm-4 mm.

5. A coating tool according to any one of claims 2-3, characterized in that the press plate (31) is adapted to press one end of the gasket (2) with a projection (311) projecting towards the gasket (2).

6. A coating tool according to any one of claims 1-3, wherein a step (21) protrudes from the inner edge of the gasket (2) towards the inner circumferential surface of the flange (11), and the step (21) is used for shielding a gap between the flange (11) and the gasket (2).

7. A coating process, comprising:

the flange (11) of the carrier (1) is used for bearing a product to be coated, and the gasket (2) is padded between the flange (11) and the product;

measuring gaps between the inner side edges of the gaskets (2) and the products, and finding one or more defect positions of which the gaps are larger than a preset gap value;

rotating the shim (2) to align the defect location with the pressing structure (3);

and extruding the gasket (2) by using the pressurizing structure (3) to enable the gasket (2) to be attached to a product.

8. The coating process according to claim 7, characterized in that said pressing of said gasket (2) with said pressing structure (3) comprises:

and determining the extrusion force required to be applied by the pressurizing structure (3) according to the preset corresponding relation between the gap and the extrusion force.

9. Coating process according to claim 8, characterized in that the pressing structure (3) comprises:

a pressing plate (31);

a platen adjustment structure (32);

a first state in which the platen (31) is not in contact with the gasket (2);

a second state in which the pressing plate (31) presses the gasket (2);

and adopting a screw as a pressing plate adjusting structure (32), obtaining the corresponding relation between the extrusion force and the torque force required by the screw according to the preset corresponding relation between the gap and the extrusion force, and then obtaining the preset corresponding relation between the gap and the torque force of the screw.

10. Coating process according to any one of claims 7 to 9, characterized in that the measurement is marked or recorded after the first measurement of the gap between the inner edge of the gasket (2) and the product.