CN116969625B - Waste water treatment equipment for recycling semiconductor ultrapure water - Google Patents
Waste water treatment equipment for recycling semiconductor ultrapure water Download PDFInfo
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- CN116969625B CN116969625B CN202310756540.1A CN202310756540A CN116969625B CN 116969625 B CN116969625 B CN 116969625B CN 202310756540 A CN202310756540 A CN 202310756540A CN 116969625 B CN116969625 B CN 116969625B
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- 238000004065 wastewater treatment Methods 0.000 title claims abstract description 55
- 229910021642 ultra pure water Inorganic materials 0.000 title claims abstract description 28
- 239000012498 ultrapure water Substances 0.000 title claims abstract description 28
- 239000004065 semiconductor Substances 0.000 title claims abstract description 27
- 238000004064 recycling Methods 0.000 title claims abstract description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 136
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 78
- 238000007789 sealing Methods 0.000 claims abstract description 42
- 230000006835 compression Effects 0.000 claims description 20
- 238000007906 compression Methods 0.000 claims description 20
- 238000004891 communication Methods 0.000 claims description 14
- 238000007872 degassing Methods 0.000 claims description 6
- 239000012528 membrane Substances 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 6
- 125000004122 cyclic group Chemical group 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 abstract description 46
- 238000001914 filtration Methods 0.000 abstract description 16
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000002351 wastewater Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/28—Treatment of water, waste water, or sewage by sorption
- C02F1/283—Treatment of water, waste water, or sewage by sorption using coal, charred products, or inorganic mixtures containing them
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/30—Treatment of water, waste water, or sewage by irradiation
- C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/441—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by reverse osmosis
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
- C02F2001/427—Treatment of water, waste water, or sewage by ion-exchange using mixed beds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2303/00—Specific treatment goals
- C02F2303/10—Energy recovery
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
- Y02A20/124—Water desalination
- Y02A20/131—Reverse-osmosis
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Water Treatment By Sorption (AREA)
Abstract
The invention belongs to the technical field of ultrapure water production, in particular to wastewater treatment equipment for recycling semiconductor ultrapure water, which comprises a wastewater treatment device, wherein the wastewater treatment device comprises annular active carbon, annular sealing elements, a water inlet pipe, sealing sheets, arc-shaped sealing elements and separating sheets, the annular sealing elements are fixedly connected to the circular edges of the two sides of the annular active carbon, the arc-shaped sealing elements which are in sliding sealing with the annular sealing elements are fixedly connected to the two sides of the tail end of the water inlet pipe, the sealing sheets which are in sliding sealing with the inner wall of the annular active carbon are fixedly connected to the other two sides of the tail end of the water inlet pipe, the annular active carbon is blocked, the position corresponding to the tail end of the water inlet pipe can be automatically switched, the traditional cylindrical active carbon filter core is changed into the annular active carbon, the middle of the annular active carbon is separated into a plurality of parts through the separating sheets, and the different parts of the annular active carbon can be subjected to filtering work through rotating the annular active carbon, so that the continuity of filtering is ensured.
Description
Technical Field
The invention belongs to the technical field of ultrapure water production, and particularly relates to wastewater treatment equipment for recycling semiconductor ultrapure water.
Background
In the semiconductor production work, ultrapure water is used in many links, the purity of water is higher, the quality of produced chips is better, for example, in the semiconductor production, for the grinding process, impurities contained in generated wastewater are more, a multi-medium filter and an activated carbon filter are used for primary filtration in the work of recycling ultrapure water, the use of the activated carbon filter is blocked along with the time, and the activated carbon filter core needs to be replaced, so that the filtration work cannot be continuous.
Disclosure of Invention
To solve the problems set forth in the background art. The invention provides wastewater treatment equipment for recycling semiconductor ultrapure water, which has the characteristics that a traditional cylindrical active carbon filter core is changed into annular active carbon, the middle of the annular active carbon is divided into a plurality of parts by a separation sheet, and different parts of the annular active carbon can be subjected to filtering work by rotating the annular active carbon, so that the filtering continuity is ensured.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a semiconductor ultrapure water cyclic utilization's effluent disposal plant, includes raw water pond, first heat exchanger, multi-media filter, preliminary treatment pond, active carbon filter, degasser, negative bed, demineralized water pond, ultraviolet sterilizer, cartridge filter, RO water tank, mixed bed, post filter, degassing membrane, DIW pure water tank, second heat exchanger, terminal filter, the raw water pond first heat exchanger the multi-media filter preliminary treatment pond active carbon filter the degasser, negative bed the demineralized water pond ultraviolet sterilizer, cartridge filter the RO water tank, mixed bed post filter the degassing membrane the DIW pure water tank, second heat exchanger the terminal filter connects gradually.
The utility model provides a waste water treatment equipment that ultrapure water of semiconductor recycling used, includes waste water treatment facilities, waste water treatment facilities includes annular active carbon, annular seal spare, inlet tube, sealing washer, arc seal spare and separation piece, the equal fixedly connected with in circular edge in both sides of annular active carbon annular seal spare, the terminal both sides fixedly connected with of inlet tube with annular seal spare sliding seal's arc seal spare, the terminal other both sides fixedly connected with of inlet tube with annular active carbon inner wall sliding seal's sealing washer, the inboard equidistant fixedly connected with of annular active carbon separation piece, annular active carbon take place to block up can the automatic switch with the terminal corresponding position of inlet tube.
As the wastewater treatment equipment for recycling the semiconductor ultrapure water, the wastewater treatment device also comprises an inclined plane ring, an inclined plane block, a sliding block, a first right-angle bracket and a second compression spring, wherein the inclined plane ring is fixedly connected to the outer side of one end of the annular sealing piece, the inclined plane block is connected to the inclined plane of one end of the inclined plane ring in a contact manner, the sliding block is sealed in a sliding manner on the inner side of one downward protruding end of the water inlet pipe, the second compression spring is fixedly connected between the lower side of one end of the sliding block and the inner side of one downward protruding end of the water inlet pipe, the first right-angle bracket is fixedly connected to the outer side of the bottom end of the sliding block, and the bottom of the first right-angle bracket can drive the inclined plane block to move.
As the wastewater treatment equipment for recycling the semiconductor ultrapure water, the wastewater treatment device also comprises a movable shell, a limiting block and a first compression spring, wherein the movable shell is connected to the outer side of one end of the first right-angle bracket in a sliding manner, the limiting block is connected to the inner side of one end of the movable shell in a sliding manner, one end of the limiting block is fixedly connected to the outer side of the bottom end of the first right-angle bracket, and the first compression spring is fixedly connected between the outer side of one end of the limiting block and the plane of the inclined surface block.
As the wastewater treatment equipment for recycling the semiconductor ultrapure water, the wastewater treatment device also comprises a second right-angle bracket, a central bracket and an arc-shaped piece, wherein the second right-angle bracket is fixedly connected to the outer side of one end of the water inlet pipe, the central bracket is fixedly connected to the upper side and the lower side of one end of the second right-angle bracket, the arc-shaped piece is fixedly connected to the two ends of the central bracket, and the outer side of one end of the arc-shaped piece is in sliding connection with one end of the annular sealing piece.
As the wastewater treatment equipment for recycling the semiconductor ultrapure water, the wastewater treatment device also comprises a ball bearing, a rotating shaft, a circular plate, a coil spring, an annular shell and an inner hexagonal hole, wherein one end of the central support is fixedly connected with the ball bearing, one end inner side of the ball bearing is fixedly connected with the rotating shaft, one end outer side of the central support is fixedly connected with the circular plate, one end outer side of the circular plate is fixedly connected with the coil spring, the tail end of the coil spring is fixedly connected with the annular shell, one end of the annular shell is fixedly connected with one end outer side of another annular sealing element, the other end of the annular shell is fixedly connected with one end outer side of the rotating shaft, and the inner hexagonal hole is formed in one end inner side of the rotating shaft.
As the wastewater treatment equipment for recycling the semiconductor ultrapure water, the wastewater treatment device also comprises a fixed ring and an annular groove, wherein the fixed ring is fixedly connected between the two central brackets, the fixed ring is sleeved outside the thickened part of the rotating shaft in a non-contact manner, and the annular groove is formed inside the thickened part of the rotating shaft.
As the wastewater treatment equipment for recycling the semiconductor ultrapure water, the wastewater treatment device also comprises an arc-shaped block, an arc-shaped shell and a counterweight, wherein the arc-shaped block and the arc-shaped shell are connected to the inner side of the annular groove in a sliding manner, the friction force between the arc-shaped block and the inner wall of the annular groove is larger than the friction force between the arc-shaped shell and the inner wall of the annular groove, and the counterweight is fixedly connected to the inner side of the arc-shaped shell.
As the wastewater treatment equipment for recycling the semiconductor ultrapure water, the invention is preferable, the inner side of the thickened part of the rotating shaft is also provided with the clamping components, the clamping components are symmetrically distributed at the inner sides of the two ends of the thickened part of the rotating shaft, the clamping components comprise the communication groove, the piston, the extension spring, the clamping strip and the clamping groove, the inner side of one end of the piston is fixedly connected with the clamping strip, the piston and the clamping strip are both in sliding connection with the inner side of the thickened part of the rotating shaft, the extension spring is fixedly connected between the outer side of one end of the piston and the inner side of the thickened part of the rotating shaft, one end of the communication groove is communicated with the annular groove, the other end of the communication groove is communicated with the movable space of the piston, and the inner side of the fixing ring is provided with a plurality of clamping grooves at equal intervals, and the clamping grooves can be in clamping connection with the clamping strip.
The wastewater treatment device for recycling the semiconductor ultrapure water preferably comprises a funnel and a drain pipe, wherein the funnel is arranged on the lower side of the annular active carbon in a non-contact mode, and the drain pipe is fixedly communicated with the inner side of the bottom end of the funnel.
Compared with the prior art, the invention has the beneficial effects that: through the wastewater treatment device who sets up, can carry out continuous filtration work for a longer time, improve work efficiency, change traditional cylindric active carbon filter core into annular active carbon, a plurality of parts are separated into through the separator in the middle of the annular active carbon, can make the different parts of annular active carbon carry out filtration work through rotatory annular active carbon, thereby guarantee filterable continuity, and through the separator that sets up, can make the different parts of annular active carbon each other not influence, and the rotatory switching of annular active carbon is through the hydraulic pressure control switching.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is a flow chart of a wastewater treatment process of the present invention;
FIG. 2 is a front view showing the construction of the wastewater treatment apparatus of the present invention;
FIG. 3 is an enlarged schematic view of the structure of FIG. 2A according to the present invention;
FIG. 4 is a three-dimensional view of the structure of the annular activated carbon of the present invention;
FIG. 5 is a right side view showing the construction of the wastewater treatment apparatus of the present invention;
FIG. 6 is an enlarged schematic view of the structure of FIG. 5B according to the present invention;
FIG. 7 is an enlarged schematic view of the structure of FIG. 5C in accordance with the present invention;
FIG. 8 is an enlarged schematic view of the structure of FIG. 5D according to the present invention;
FIG. 9 is a left side view of the open position of the annular groove of the present invention;
FIG. 10 is an enlarged schematic view of the structure of FIG. 9E according to the present invention;
in the figure:
2. A wastewater treatment device;
21. Annular activated carbon; 211. an annular seal; 212. a water inlet pipe; 213. a sealing sheet; 214. an arc-shaped seal; 215. a separator sheet;
22. A bevel ring; 221. a bevel block; 222. a movable housing; 223. a limiting block; 224. a first compression spring; 225. a first right angle bracket; 226. a sliding block; 227. a second compression spring;
23. A second right angle bracket; 231. a central support; 232. a ball bearing; 233. a rotating shaft; 234. a circular plate; 235. a coil spring; 236. an annular housing; 237. an inner hexagonal hole; 238. an arc-shaped member;
24. A fixing ring; 241. an annular groove; 242. an arc-shaped block; 243. an arc-shaped housing; 244. a weight member;
25. a communication groove; 251. a piston; 252. a tension spring; 253. clamping strips; 254. a clamping groove;
26. A funnel; 261. a drain pipe;
3. an inner ring space; 4. an outer annular space;
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1:
the utility model provides a waste water treatment facility of semiconductor ultrapure water cyclic utilization, including the raw water pond, a first heat exchanger, the multi-media filter, the preliminary treatment pond, the active carbon filter, the degasser, the negative bed, demineralized water pond, the ultraviolet sterilizer, the cartridge filter, RO water tank, mixed bed, post filter, the air release membrane, the DIW pure water tank, the second heat exchanger, the terminal filter, the raw water pond, a first heat exchanger, the multi-media filter, the preliminary treatment pond, the active carbon filter, the degasser, the negative bed, the demineralized water pond, the ultraviolet sterilizer, the cartridge filter, the RO water tank, mixed bed, post filter, the air release membrane, the DIW pure water tank, the second heat exchanger, the terminal filter connects gradually.
Further, the method comprises the steps of;
As shown in fig. 2-10:
the utility model provides a waste water treatment equipment that ultrapure water of semiconductor circulation used, including waste water treatment facilities 2, waste water treatment facilities 2 includes annular active carbon 21, annular seal 211, inlet tube 212, sealing piece 213, arc seal 214 and separating piece 215, the equal fixedly connected with annular seal 211 of both sides circular edge of annular active carbon 21, the terminal both sides fixedly connected with of inlet tube 212 and annular seal 211 sliding seal's arc seal 214, the terminal other both sides fixedly connected with of inlet tube 212 and annular active carbon 21 inner wall sliding seal's sealing piece 213, the inside equidistant fixedly connected with separating piece 215 of annular active carbon 21, annular active carbon 21 takes place to block up the position that can automatic switch corresponds with the inlet tube 212 end.
Further, the method comprises the steps of;
in an alternative embodiment, the wastewater treatment device 2 further includes a bevel ring 22, a bevel block 221, a sliding block 226, a first right-angle bracket 225 and a second compression spring 227, wherein the outer side of one end of one annular sealing member 211 is fixedly connected with the bevel ring 22, the bevel block 221 is connected at the bevel position of one end of the bevel ring 22 in a contact manner, the sliding block 226 is sealed at the inner side of one downward protruding end of the water inlet pipe 212 in a sliding manner, the second compression spring 227 is fixedly connected between the lower side of one end of the sliding block 226 and the inner side of one downward protruding end of the water inlet pipe 212, the first right-angle bracket 225 is fixedly connected at the outer side of the bottom end of the sliding block 226, and the bottom of the first right-angle bracket 225 can drive the bevel block 221 to move.
In an alternative embodiment, the wastewater treatment device 2 further includes a movable housing 222, a limiting block 223, and a first compression spring 224, wherein the outer side of one end of the first right-angle bracket 225 is slidably connected with the movable housing 222, the inner side of one end of the movable housing 222 is slidably connected with the limiting block 223, one end of the limiting block 223 is fixedly connected with the outer side of the bottom end of the first right-angle bracket 225, and the first compression spring 224 is fixedly connected between the outer side of one end of the limiting block 223 and the plane of the inclined block 221.
In an alternative embodiment, the wastewater treatment device 2 further includes a second right-angle bracket 23, a central bracket 231 and an arc-shaped member 238, wherein the outer side of one end of the water inlet pipe 212 is fixedly connected with the second right-angle bracket 23, the upper side and the lower side of one end of the second right-angle bracket 23 are fixedly connected with the central bracket 231, two ends of the central bracket 231 are fixedly connected with the arc-shaped member 238, and the outer side of one end of the arc-shaped member 238 is slidably connected with one end of the annular sealing member 211.
In an alternative embodiment, the wastewater treatment device 2 further includes a ball bearing 232, a rotating shaft 233, a circular plate 234, a coil spring 235, an annular housing 236 and an inner hexagonal hole 237, one end of the central support 231 is fixedly connected with the ball bearing 232, one end inner side of the ball bearing 232 is fixedly connected with the rotating shaft 233, one end outer side of the central support 231 is fixedly connected with the circular plate 234, one end outer side of the circular plate 234 is fixedly connected with the coil spring 235, the end of the coil spring 235 is fixedly connected with the annular housing 236, one end of the annular housing 236 is fixedly connected with one end outer side of the other annular sealing member 211, the other end of the annular housing 236 is fixedly connected with one end outer side of the rotating shaft 233, and the inner hexagonal hole 237 is formed in one end inner side of the rotating shaft 233.
In an alternative embodiment, the wastewater treatment device 2 further comprises a fixed ring 24 and an annular groove 241, the fixed ring 24 is fixedly connected between the two central brackets 231, the fixed ring 24 is sleeved outside the thickened portion of the rotating shaft 233 in a non-contact manner, and the annular groove 241 is formed inside the thickened portion of the rotating shaft 233.
In an alternative embodiment, the wastewater treatment device 2 further comprises an arc-shaped block 242, an arc-shaped shell 243 and a counterweight 244, wherein the arc-shaped block 242 and the arc-shaped shell 243 are slidably connected to the inner side of the annular groove 241, and the friction force between the arc-shaped block 242 and the inner wall of the annular groove 241 is greater than the friction force between the arc-shaped shell 243 and the inner wall of the annular groove 241, and the counterweight 244 is fixedly connected to the inner side of the arc-shaped shell 243.
In an alternative embodiment, the inner side of the thickened portion of the rotating shaft 233 is further provided with clamping components, the clamping components are symmetrically distributed on the inner sides of two ends of the thickened portion of the rotating shaft 233, each clamping component comprises a communication groove 25, a piston 251, a tension spring 252, a clamping strip 253 and a clamping groove 254, the inner side of one end of the piston 251 is fixedly connected with the clamping strip 253, the piston 251 and the clamping strip 253 are both slidably connected on the inner side of the thickened portion of the rotating shaft 233, the tension spring 252 is fixedly connected between the outer side of one end of the piston 251 and the inner side of the thickened portion of the rotating shaft 233, one end of the communication groove 25 is communicated with the annular groove 241, the other end of the communication groove 25 is communicated with the movable space of the piston 251, the inner side of the fixed ring 24 is provided with a plurality of clamping grooves 254 at equal intervals, and the clamping grooves 254 can be in clamping connection with the clamping strips 253.
In an alternative embodiment, the wastewater treatment device 2 further comprises a funnel 26 and a drain pipe 261, wherein the funnel 26 is arranged at the lower side of the annular activated carbon 21 in a non-contact manner, and the drain pipe 261 is fixedly communicated with the inner side of the bottom end of the funnel 26.
In this embodiment: in the semiconductor production work, ultrapure water is used in many links, the purity of water is higher, the quality of produced chips is better, for example, in the semiconductor production, for the grinding process, impurities contained in the produced wastewater are more, a multi-medium filter and an activated carbon filter are used for primary filtration in the work of recycling the ultrapure water, the use of the activated carbon filter is blocked with the passage of time, and the activated carbon filter core needs to be replaced, so that the filtration work cannot be continuous;
Through the wastewater treatment device 2, continuous filtration can be carried out for a longer time, the working efficiency is improved, the traditional cylindrical active carbon filter core is changed into the annular active carbon 21, the middle of the annular active carbon 21 is divided into a plurality of parts through the separation sheet 215, different parts of the annular active carbon 21 can be subjected to filtration by rotating the annular active carbon 21, so that the filtration continuity is ensured, and the different parts of the annular active carbon 21 are not affected by each other through the separation sheet 215, and the rotation of the annular active carbon 21 is switched by controlling the switching through water pressure;
The waste water generated by grinding the semiconductors is filtered by the multi-medium filter and then enters the inner side of the water inlet pipe 212, the waste water entering the inner side of the water inlet pipe 212 needs to have a certain water pressure, the water pressure is stable, the water pressure cannot be high and low, the waste water enters the water inlet pipe 212 and then contacts with the lower side of the annular activated carbon 21, so that the lower side of the annular activated carbon 21 filters the waste water, the filtered waste water is collected by the funnel 26, the waste water collected by the funnel 26 is conveyed to the next filtering device through the water outlet pipe 261, annular sealing pieces 211 are fixedly connected to the round edges of the two sides of the annular activated carbon 21, the annular sealing pieces 211 are in sliding sealing with arc-shaped sealing pieces 214 of the water inlet pipe 212, and the inner wall part of the annular activated carbon 21 is in sliding sealing with the water inlet pipe 212 through sealing pieces 213, so that the water flowing out of the water inlet pipe 212 can only contact with part of the annular activated carbon 21;
Embodiment one: when the part of the annular activated carbon 21 filtering the wastewater is blocked due to long-time filtration, the water pressure on the inner side of the water inlet pipe 212 is increased, the water pressure is increased continuously along with the continuous serious blocking, when the water pressure is increased enough to push the sliding block 226 to move against the elastic force of the second compression spring 227, the sliding block 226 moves downwards, the sliding block 226 drives the first right-angle bracket 225 to move downwards, the first right-angle bracket 225 drives the limiting block 223 to move downwards, the limiting block 223 and the movable shell 222 together drive the inclined block 221 to move downwards, and because the inclined block 221 is in a shape of being large and small downwards and the inclined surface of the inclined block 221 is contacted with the inclined surface of the inclined surface ring 22, if the inclined block 221 at the moment wants to continue to contact with the inclined surface ring 22 after the inclined block 221 moves downwards, the inclined block 221 must move leftwards under the influence of the elastic force of the first compression spring 224, the first compression spring 224 pushes the inclined surface block 221 to move to be always in contact with the inclined surface ring 22, but because the length of the first compression spring 224 is longer, the elasticity is weakened, the contact force between the inclined surface block 221 and the inclined surface ring 22 is reduced, the friction force between the inclined surface ring 22 and the inclined surface block 221 is reduced, the coil spring 235 can drive the annular shell 236 to slowly rotate, the annular shell 236 can drive the annular sealing element 211 to slowly rotate, the annular sealing element 211 can drive the annular activated carbon 21 to slowly rotate, after the annular activated carbon 21 rotates, the part of the annular activated carbon 21 blocked is not positioned at the lower side of the drainage position of the water inlet pipe 212 any more, but the unused part of the annular activated carbon 21 moves to the position at the lower side of the drainage position of the water inlet pipe 212, and because the unused part of the annular activated carbon 21 does not have the blocking condition, therefore, the waste water inside the water inlet pipe 212 can be rapidly filtered through the annular active carbon 21, so that the water pressure inside the water inlet pipe 212 is reduced, after the water pressure inside the water inlet pipe 212 is reduced, the second compression spring 227 can push the sliding block 226 to move upwards to return to the original position, the sliding block 226 can drive the first right-angle bracket 225 to indirectly drive the inclined surface block 221 to return to the original position, in the process that the inclined surface block 221 returns to the original position upwards, the inclined surface block 221 can move towards the direction of the first right-angle bracket 225 against the elastic force of the first compression spring 224, so that the friction force between the inclined surface block 221 and the inclined surface ring 22 at the moment is larger, and the friction force is larger than the driving force of the coil spring 235 to drive the annular sealing piece 211 to rotate, and the automatic switching of the annular active carbon 21 is realized;
Embodiment two: when the impurity in the wastewater suddenly increases to cause the ring-shaped activated carbon 21 to be suddenly blocked, according to the principle, the water pressure on the inner side of the water inlet pipe 212 increases to cause the inclined surface block 221 to move downwards so as to enable the ring-shaped activated carbon 21 to rotate, but when the water pressure on the inner side of the water inlet pipe 212 suddenly increases, the distance of the downward movement of the inclined surface block 221 is also more so as to enable the ring-shaped activated carbon 21 to suddenly rotate, and the rotation speed of the ring-shaped activated carbon 21 at the moment is faster, in order to avoid the overlarge rotation angle of the ring-shaped activated carbon 21, after the blocking part of the ring-shaped activated carbon 21 rotates away from the position on the lower side of the water drainage position of the water inlet pipe 212, The unplugged part of the annular activated carbon 21, which is close to the plugged part, also rotates beyond the position of the lower side of the water discharge position of the water inlet pipe 212, thereby causing waste of the annular activated carbon 21, when the annular activated carbon 21 suddenly rotates, firstly, the coil spring 235 drives the annular housing 236 to rotate, the annular housing 236 rotates to drive the annular activated carbon 21 to rotate, the rotating shaft 233 can be stably rotated on the inner side of the central support 231 through the ball bearing 232, and besides, the annular housing 236 rotates to drive the rotating shaft 233 to rotate, when the rotating shaft 233 suddenly rotates, namely, the rotating acceleration is faster, At this time, both the arc-shaped block 242 and the arc-shaped housing 243 inside the annular groove 241 of the rotating shaft 233 are rotated, but the difference is that, since the friction between the arc-shaped block 242 and the inside of the annular groove 241 is large and the friction between the arc-shaped housing 243 and the inside of the annular groove 241 is small, the arc-shaped housing 243 rotates more easily than the arc-shaped block 242 when the rotating shaft 233 suddenly rotates, and since the weight 244 is provided inside the arc-shaped housing 243, the weight 244 is much heavier than the arc-shaped block 242, so that when the rotating shaft 233 suddenly rotates, the weight 244 stays in the original position due to the influence of inertia, The arc block 242 rotates along with the rotation shaft 233, so that the distance between the arc block 242 and the arc housing 243 increases, the arc housing 243 contacts with the arc block 242 or is very close to the arc block 242 in the initial state, the space between the arc housing 243 and the arc block 242 which is very close to each other is the inner annular space 3 inside the annular groove 241, whereas the space between the arc housing 243 and the arc block 242 which is very far from each other is the outer annular space 4, as described above, as the distance between the arc block 242 and the arc housing 243 increases, the inner annular space 3 increases and the outer annular space 4 decreases accordingly, The increase of the inner annular space 3 can lead the air in the space to be in a negative pressure state, the decrease of the outer annular space 4 can lead the air pressure in the space to be increased, the increase of the air pressure in the outer annular space 4 can lead the part of air to enter the movable space of the piston 251 through the communication groove 25, the piston 251 can move against the elastic force of the extension spring 252, the piston 251 can drive the clamping strip 253 to move towards the clamping groove 254 until the clamping strip 253 is in clamping connection with the clamping groove 254, the number of the clamping grooves 254 is consistent with that of the separating sheets 215, thus when the annular activated carbon 21 rotates, an independent part of the annular activated carbon 21 (namely, an independent part of the annular activated carbon 21 separated by the separating sheets 215) can be taken as a rotation unit, It should be understood that when the rotating shaft 233 rotates with acceleration above a certain value, the rotating shaft 233 rotates to enable the clamping strip 253 to move, so that the clamping strip 253 enters the clamping groove 254, the clamping strip 253 moves rapidly, the clamping strip 253 can extend out of the rotating shaft 233 before an independent part of the annular active carbon 21 rotates completely, so that the clamping strip 253 is in sliding contact with the inner wall of the fixed ring 24, and when the clamping strip 253 can correspond to the position of the clamping groove 254 along with the continued rotation of the rotating shaft 233, the clamping strip 253 can be in clamping connection with the clamping groove 254, At this time, just when the rotation of one independent portion of the annular activated carbon 21 is completed, so that the annular activated carbon 21 can still rotate by an accurate angle even under a high acceleration, that is, the annular activated carbon 21 rotates by an angle of one independent portion, when the rotation of the rotation shaft 233 is stopped, that is, influenced by the snap connection of the snap strip 253 and the snap groove 254, the rotation shaft 233 cannot rotate, so that the rotation shaft 233 drives the annular sealing member 211 through the annular housing 236 and then drives the annular activated carbon 21 to stop rotating, after the rotation of the rotation shaft 233 stops, the gas pressure changes due to the increase of the inner annular space 3 and the decrease of the outer annular space 4, The arc block 242 is pushed to move by the large gas pressure in the outer ring space 4, and the arc block 242 is also moved by the gas in the inner ring space 3 in a negative pressure state, so that the arc block 242 is actively moved under the influence of the gas pressure, the arc block 242 gradually moves to be in contact with or very close to the arc shell 243, the gas pressure in the outer ring space 4 is normal at the moment, and the tension spring 252 can drive the piston 251 so as to drive the clamping strip 253 to move and be separated from the clamping groove 254 and then return to the original position;
The two sets of the locking assemblies are symmetrically arranged, so that the communication groove 25 in one of the locking assemblies is covered by the arc-shaped shell 243 or the arc-shaped block 242, and the other locking assembly can work normally when the communication groove 25 in one of the locking assemblies is located in the inner annular space 3. When the communication groove 25 in one of the clamping components is positioned in the inner annular space 3, the air at the position is negative pressure, so that the clamping strip 253 in the clamping component cannot actively move;
as in the first embodiment, in the case where the rotation shaft 233 rotates slowly, the weight 244 cannot move a long distance with respect to the arc block 242 due to inertia, so that the gas pressure in the inner annular space 3 or the outer annular space 4 is hardly changed, and thus the active movement of the clamping bar 253 is not caused.
Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present invention, and the present invention is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present invention has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. A waste water treatment equipment for recycling semiconductor ultrapure water is characterized in that: the device comprises a raw water tank, a first heat exchanger, a multi-medium filter, a pretreatment water tank, an activated carbon filter, a degassing tower, a negative bed, a demineralized water tank, an ultraviolet sterilizer, a cartridge filter, an RO water tank, a mixed bed, a post-filter, a degassing membrane, a DIW pure water tank, a second heat exchanger and a terminal filter, wherein the raw water tank, the first heat exchanger, the multi-medium filter, the pretreatment water tank, the activated carbon filter, the degassing tower, the negative bed, the demineralized water tank, the ultraviolet sterilizer, the cartridge filter, the RO water tank, the water tank, the mixed bed, the post filter, the degassing membrane, the DIW pure water tank, the second heat exchanger and the terminal filter are sequentially connected; comprises a wastewater treatment device (2), wherein the wastewater treatment device (2) comprises annular activated carbon (21), annular sealing elements (211), a water inlet pipe (212), sealing sheets (213), arc-shaped sealing elements (214) and separating sheets (215), the annular sealing elements (211) are fixedly connected to the round edges of the two sides of the annular activated carbon (21), the arc-shaped sealing elements (214) which are in sliding sealing with the annular sealing elements (211) are fixedly connected to the two sides of the tail end of the water inlet pipe (212), the sealing sheets (213) which are in sliding sealing with the inner wall of the annular activated carbon (21) are fixedly connected to the other two sides of the tail end of the water inlet pipe (212), the inner side of the annular activated carbon (21) is fixedly connected with the separation sheets (215) at equal intervals, and the annular activated carbon (21) is blocked and can automatically switch the position corresponding to the tail end of the water inlet pipe (212); The wastewater treatment device (2) further comprises an inclined plane ring (22), an inclined plane block (221), a sliding block (226), a first right-angle bracket (225) and a second compression spring (227), wherein one end outer side of the annular sealing piece (211) is fixedly connected with the inclined plane ring (22), one end inclined plane of the inclined plane ring (22) is in contact connection with the inclined plane block (221), one end inner side of the downward bulge of the water inlet pipe (212) is in sliding sealing with the sliding block (226), one end lower side of the sliding block (226) and one end inner side of the downward bulge of the water inlet pipe (212) are fixedly connected with the second compression spring (227), The outer side of the bottom end of the sliding block (226) is fixedly connected with the first right-angle bracket (225), and the bottom of the first right-angle bracket (225) can drive the inclined surface block (221) to move; The waste water treatment device (2) further comprises a movable shell (222), a limiting block (223) and a first compression spring (224), wherein the outer side of one end of the first right-angle bracket (225) is slidably connected with the movable shell (222), the inner side of one end of the movable shell (222) is slidably connected with the limiting block (223), one end of the limiting block (223) is fixedly connected with the outer side of the bottom end of the first right-angle bracket (225), and the first compression spring (224) is fixedly connected between the outer side of one end of the limiting block (223) and the plane of the inclined surface block (221);
The waste water treatment device (2) further comprises a second right-angle bracket (23), a central bracket (231) and an arc-shaped piece (238), wherein the outer side of one end of the water inlet pipe (212) is fixedly connected with the second right-angle bracket (23), the upper side and the lower side of one end of the second right-angle bracket (23) are fixedly connected with the central bracket (231), the two ends of the central bracket (231) are fixedly connected with the arc-shaped piece (238), and the outer side of one end of the arc-shaped piece (238) is in sliding connection with one end of the annular sealing piece (211);
The waste water treatment device (2) further comprises a ball bearing (232), a rotating shaft (233), a circular plate (234), a coil spring (235), an annular shell (236) and an inner hexagonal hole (237), one end of the central support (231) is fixedly connected with the ball bearing (232), one end inner side of the ball bearing (232) is fixedly connected with the rotating shaft (233), one end outer side of the central support (231) is fixedly connected with the circular plate (234), one end outer side of the circular plate (234) is fixedly connected with the coil spring (235), the tail end of the coil spring (235) is fixedly connected with the annular shell (236), one end of the annular shell (236) is fixedly connected with the other end outer side of the annular seal (211), the other end of the annular shell (236) is fixedly connected with one end outer side of the rotating shaft (233), and one end inner side of the rotating shaft (233) is provided with the inner hexagonal hole (237).
2. The wastewater treatment apparatus for recycling semiconductor ultrapure water according to claim 1, wherein: the waste water treatment device (2) further comprises a fixed ring (24) and an annular groove (241), the fixed ring (24) is fixedly connected between the two central supports (231), the fixed ring (24) is sleeved outside the thickened part of the rotating shaft (233) in a non-contact mode, and the annular groove (241) is formed in the inner side of the thickened part of the rotating shaft (233).
3. The wastewater treatment apparatus for recycling semiconductor ultrapure water according to claim 2, wherein: the waste water treatment device (2) further comprises an arc-shaped block (242), an arc-shaped shell (243) and a counterweight (244), wherein the arc-shaped block (242) and the arc-shaped shell (243) are connected to the inner side of the annular groove (241) in a sliding mode, the friction force between the arc-shaped block (242) and the inner wall of the annular groove (241) is larger than the friction force between the arc-shaped shell (243) and the inner wall of the annular groove (241), and the counterweight (244) is fixedly connected to the inner side of the arc-shaped shell (243).
4. A wastewater treatment apparatus for the cyclic use of semiconductor ultrapure water according to claim 3, wherein: the clamping assembly is symmetrically distributed on the inner sides of the thickened portion of the rotating shaft (233), the clamping assembly comprises a communication groove (25), a piston (251), a tension spring (252), clamping strips (253) and clamping grooves (254), the clamping strips (253) are fixedly connected on the inner sides of one ends of the piston (251), the piston (251) and the clamping strips (253) are both slidingly connected on the inner sides of the thickened portion of the rotating shaft (233), the tension spring (252) is fixedly connected between the outer sides of one ends of the piston (251) and the inner sides of the thickened portion of the rotating shaft (233), one ends of the communication groove (25) are communicated with the annular groove (241), the other ends of the communication groove (25) are communicated with the movable space of the piston (251), a plurality of clamping grooves (254) are formed in the inner sides of the fixing rings (24) at equal intervals, and the clamping grooves (254) can be connected with the clamping strips (253) in a clamping mode.
5. The wastewater treatment apparatus for recycling semiconductor ultrapure water according to claim 4, wherein: the wastewater treatment device (2) further comprises a funnel (26) and a drain pipe (261), wherein the funnel (26) is arranged on the lower side of the annular activated carbon (21) in a non-contact mode, and the drain pipe (261) is fixedly communicated with the inner side of the bottom end of the funnel (26).
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| JP2012210593A (en) * | 2011-03-31 | 2012-11-01 | Kurita Water Ind Ltd | Ultrapure water producing system and ultrapure water producing method |
| US8323490B1 (en) * | 2012-08-02 | 2012-12-04 | Instapure Brands, Inc. | Pressurized water filtration system |
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| CN201135804Y (en) * | 2007-12-21 | 2008-10-22 | 裴光泰 | Water purifying appliance filter |
| CN111252971A (en) * | 2020-03-26 | 2020-06-09 | 中国电子系统工程第二建设有限公司 | Ultrapure water manufacturing system and ultrapure water manufacturing method using same |
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