CN116953460A - Method for measuring circular dichroism photocurrent microscopic imaging of micro-nano device - Google Patents
Method for measuring circular dichroism photocurrent microscopic imaging of micro-nano device Download PDFInfo
- Publication number
- CN116953460A CN116953460A CN202310343507.6A CN202310343507A CN116953460A CN 116953460 A CN116953460 A CN 116953460A CN 202310343507 A CN202310343507 A CN 202310343507A CN 116953460 A CN116953460 A CN 116953460A
- Authority
- CN
- China
- Prior art keywords
- photocurrent
- light
- wave plate
- micro
- polarized light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002983 circular dichroism Methods 0.000 title claims abstract description 34
- 238000003384 imaging method Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000013519 translation Methods 0.000 claims abstract description 17
- 239000013078 crystal Substances 0.000 claims abstract description 10
- 238000005286 illumination Methods 0.000 claims abstract description 8
- 238000004590 computer program Methods 0.000 claims description 7
- 238000002267 linear dichroism spectroscopy Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims description 3
- 230000010287 polarization Effects 0.000 claims description 3
- 230000008676 import Effects 0.000 claims description 2
- 239000011159 matrix material Substances 0.000 claims description 2
- 238000012360 testing method Methods 0.000 abstract description 7
- 238000010998 test method Methods 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 5
- 230000006399 behavior Effects 0.000 description 4
- 239000000969 carrier Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 241000219307 Atriplex rosea Species 0.000 description 1
- 230000005678 Seebeck effect Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000005350 ferromagnetic resonance Effects 0.000 description 1
- 238000004401 flow injection analysis Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 230000005291 magnetic effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- -1 transition metal sulfides Chemical class 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/19—Dichroism
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The application provides a method for measuring circular dichroism photocurrent microscopic imaging of a micro-nano device, which comprises the following steps: step 1, an experimental system is established, wherein the experimental system comprises a 532nm laser, two reflectors, a chopper, a small-hole spatial filter, a lens, a polarizer, a quarter wave plate, a stepping motor, an illumination white light LED, a semi-reflection semi-transparent flat plate, a light-splitting crystal, a charge coupled device CCD, a microscope objective, a two-dimensional micro-nano translation stage, a current amplifier and a phase-locked amplifier; and 2, measuring circular dichroism photocurrent microscopic imaging of the micro-nano device through an experimental system. The light path and the test method used by the application are simple to construct and easy to operate. And the price is low compared with the existing test equipment.
Description
Technical Field
The application relates to the fields of semiconductor optoelectronics and spintronics, in particular to a method for measuring circular dichroism photocurrent microscopic imaging of a micro-nano device.
Background
In spintronics, spin is used as a carrier for information storage and transmission, and therefore, generating, manipulating, and detecting spin currents is always the most fundamental and critical scientific problem in implementing spintronics devices. With extensive researches, various techniques for generating a self-rotational flow, such as a non-local electric injection spin flow technique, a spin flow injection technique based on a spin pumping effect of ferromagnetic resonance, a spin flow technique based on a spin Seebeck effect, a circularly polarized light injection spin flow technique, and the like, have been developed. Circular dichroism photocurrent technology, in which circularly polarized light is injected into a self-swirling flow and the difference between photocurrents excited by left and right circularly polarized light is detected, is widely focused due to the advantages of simple experiment, realization at room temperature, and the like.
However, as the size of the device is gradually reduced, the boundary effect of the device is gradually developed, the traditional circular dichroism photocurrent adopts millimeter-level light spots, the obtained photocurrent signal reflects the whole information of the device, the local photogenerated carrier distribution of the device cannot be detected and analyzed, and as the size of the device is reduced, the electrode and the boundary symmetry defect of the micro-nano device can influence the generation of the circular dichroism photocurrent and the transportation of spin carriers, and the current testing system is used for deeply researching the action mechanism.
Disclosure of Invention
The application aims to: aiming at the defects of the prior art, the application provides a method for measuring circular dichroism photocurrent microscopic imaging of a micro-nano device, which comprises the following steps:
step 1, an experimental system is established, wherein the experimental system comprises a 532nm laser, two reflectors, a chopper, a small-hole spatial filter, a lens, a polarizer, a quarter wave plate, a stepping motor, an illumination white light LED, a semi-reflection semi-transparent flat plate, a light-splitting crystal, a charge coupled device CCD, a microscope objective, a two-dimensional micro-nano translation stage, a current amplifier and a phase-locked amplifier;
and 2, measuring circular dichroism photocurrent microscopic imaging of the micro-nano device through an experimental system.
In the step 1, the 532nm laser emits a beam of laser, the laser is incident into the chopper through two reflectors and is modulated by periodic frequency, the laser passing through the chopper is changed into a parallel beam after passing through a parallel beam system consisting of a small-hole spatial filter and a lens, the parallel beam is changed into linearly polarized light entering obliquely at 45 degrees through a polarizer placed at 45 degrees, then the linearly polarized light enters obliquely at 45 degrees through a quarter wave plate, the quarter wave plate is placed in a rotatable stepping motor, the quarter wave plate rotates for one circle, and the beam is modulated into linearly polarized light, left circularly polarized light and right circularly polarized light periodically; and then the light beam is incident into the microscope objective through the semi-reflection semi-transparent flat plate and the light splitting crystal, and a micron-level light spot is formed at the focal point position through the convergence of the microscope objective.
In the step 1, a sample is placed on a two-dimensional micro-nano translation stage, and the sample realizes two-dimensional movement with a minimum step length of 0.5 um.
In step 1, the white light LED and the lens form a white light illumination system, white light is made to enter the microscope objective and the sample through the semi-reflective semi-transparent flat plate and the light splitting crystal through the white light LED and the lens, and then the white light path is reflected into the charge coupled device CCD through the sample, so that real-time monitoring of the position of the sample is realized.
In step 2, the device is connected to a sample card, and then the sample card is placed on a two-dimensional micro-nano translation stage.
In the step 2, after the light spot modulated by the polarization of the quarter wave plate is focused by the microscope objective, the light spot is changed into 1um, the light spot irradiates the sample area, the photocurrent is primarily amplified by the current amplifier and then is input into the phase-locked amplifier, the reference frequency signal of the phase-locked amplifier is the frequency of the chopper, and finally, the signal of the phase-locked amplifier is acquired by the computer.
The step 2 specifically comprises the following steps:
step 2-1, rotating a quarter wave plate by using a stepping motor, and periodically generating linearly polarized light, left circularly polarized light and right circularly polarized light after rotating for one circle; setting the scanning step length of the two-dimensional micro-nano translation stage to be 1um, and collecting the wave plate rotation angle and photocurrent signals of each point through a current amplifier and a phase-locked amplifier when each point is moved, and rotating a quarter wave plate for one circle;
and 2-2, fitting photocurrent data obtained by rotating the wave plate at each point for one circle by using a formula (1):
j＝a*sin2θ+b*cos4θ+c*sin4θ+d (1)
where j is the photocurrent, a is the circular dichroism photocurrent coefficient, b and c are the linear dichroism photocurrent coefficients, d is the background photocurrent coefficient (for micro-nano devices, for example, a hall bar device composed of two-dimensional transition metal sulfides, where a is on the order of pA, b and c are on the order of 100pA, and d is on the order of nA; θ is the angle between the linearly polarized light after passing through the 45 ° polarizer and the principal axis of the quarter wave plate;
step 2-3, realizing two-dimensional scanning of the sample by using a two-dimensional micro-nano translation stage, wherein each scanning point and the quarter wave plate rotate for one circle, and acquiring data of the rotation angle and the photocurrent of the quarter wave plate of each point by using a phase-locked amplifier and a computer;
and 2-4, utilizing MATLAB programming to import photocurrent data of all the scanning points in space in batches, utilizing a formula (1) to fit values of a and d, and filling the values into a matrix of the corresponding space scanning points, so as to obtain a two-dimensional distribution image of a and d.
The application also provides a storage medium storing a computer program or instructions which, when executed, implement the method for measuring circular dichroism photocurrent microscopic imaging of a micro-nano device.
Conventional circularly polarized light current or circular dichromatic photocurrent testing systems typically employ light spots of millimeter or centimeter size, which are suitable for measuring bulk samples. However, the common micro-nano device sample is usually in a micron-sized scale, and light spots in a millimeter level can only obtain the photocurrent of the whole device and cannot obtain the local circular dichroism photocurrent distribution and carrier transport characteristics of the device.
According to the application, by rotating the wave plate, left circularly polarized light and right circularly polarized light are periodically generated, a microscopic imaging technology is combined, a light spot is focused to a micron level, and the device is placed on a two-dimensional micro-nano translation stage, so that micro-resolution circular dichroism photocurrent microscopic imaging of the micro-nano device is realized, and the transport behavior of local photogenerated carriers of the device can be discussed. And the testing method is simple and the cost is low.
The application combines the circular dichroism photocurrent testing technology and the microscopic imaging technology to build a high-resolution circular dichroism photocurrent microscopic imaging system, and can analyze the transport behavior of the circular dichroism excited photo-generated carriers in the local area of the device.
The application has the following beneficial effects:
1. according to the application, by designing the circular dichroism photocurrent microscopic imaging system, the circular dichroism photocurrent of the micro-nano device can be obtained, and the photogenerated carrier transport behavior can be analyzed.
2. The traditional macroscopic circular dichroism photocurrent testing system has low resolution and is not suitable for micro-nano device samples. The circular dichroism photocurrent microscopic imaging of the micro-nano device can be obtained by combining the microscopic imaging technology. The scheme can obtain the spatial image of the circular dichroism photocurrent with micron resolution.
3. The light path and the test method used by the application are simple to construct and easy to operate. And the price is low compared with the existing test equipment.
Drawings
The foregoing and/or other advantages of the application will become more apparent from the following detailed description of the application when taken in conjunction with the accompanying drawings and detailed description.
Fig. 1 is a light path diagram of a circular dichroism microscopy imaging system.
Fig. 2 is a less layer WTe 2 Two-electrode micro-nano device photomicrographs (red scale bar 15um in the figure).
Fig. 3 is a schematic diagram of background photoelectric two-dimensional space imaging.
Fig. 4 is a schematic diagram of two-dimensional spatial imaging of circular dichroism photocurrent.
Detailed Description
Examples
The embodiment provides a method for measuring circular dichroism photocurrent microscopic imaging of a micro-nano device, which comprises the following steps:
step 1, an experimental system is established, wherein the experimental system comprises a 532nm laser, two reflectors, a chopper, a small-hole spatial filter, a lens, a polarizer, a quarter wave plate, a stepping motor, an illumination white light LED, a semi-reflection semi-transparent flat plate, a light-splitting crystal, a charge coupled device CCD, a microscope objective, a two-dimensional micro-nano translation stage, a current amplifier and a phase-locked amplifier;
and 2, measuring circular dichroism photocurrent microscopic imaging of the micro-nano device through an experimental system.
The specific light path design is shown in fig. 1. In step 1, a 532nm laser emits a beam of laser light, the beam of laser light is incident into a chopper through two reflectors and is modulated by periodic frequency, the chopping frequency of the chopper is 200Hz, and the model is SR540 of Steady instruments company. The laser passing through the chopper is changed into a parallel beam after passing through a parallel beam system consisting of a small-hole space filter and a lens. The parallel light beam is changed into linear polarized light with 45 degrees obliquely incident through a 45-degree arranged gram taylor prism (polarizer), then the linear polarized light is changed into linear polarized light, left circular polarized light and right circular polarized light through a quarter wave plate, the quarter wave plate is arranged in a rotatable stepping motor, the quarter wave plate rotates for one circle, and the light beam is periodically modulated into the linear polarized light, the left circular polarized light and the right circular polarized light. Then the light beam is incident into a microscope objective of 100 times through a half-reflection half-transmission flat plate and a light splitting crystal, and a micron-level light spot is formed at the focal position of the light beam through the convergence of the microscope objective.
And placing the sample on a two-dimensional micro-nano translation table, and realizing two-dimensional movement of the sample with a minimum step length of 0.5 um. In addition, a set of white light illumination system is added in the light path, white light is enabled to be incident into the microscope objective and the sample through the semi-reflective semi-transparent flat plate and the light splitting crystal through an illumination white light LED and a lens, and then the white light path is reflected into the CCD through the sample, so that real-time monitoring of the position of the sample is realized.
The embodiment uses less layer WTE 2 The material is used as an example to prepare a micro-nano device sample, a microscopic photograph of the device is shown in fig. 2, wherein a yellow area is a metal electrode of the device, and 50nmti and 100nmau are respectively evaporated from bottom to top. The middle white area of the two yellow electrodes is a sample area, the red line segment is a scale, and the size is 15um.
In the experimental process, the device is connected to the sample card by using gold wire ball welding, and then the sample card is placed on a two-dimensional micro-nano translation table.
After the light spot modulated by the quarter wave plate polarization is focused by the microscope objective, the light spot is changed into 1um, the light spot irradiates the sample area, and the photocurrents collected by the two metal electrodes are primarily amplified by the current amplifier and then input into the lock-in amplifier. The reference frequency signal of the lock-in amplifier is the frequency of the chopper. The signals are finally acquired by a computer (as shown in fig. 1).
The specific experimental steps are as follows:
1. the quarter wave plate is rotated by the stepping motor, and linearly polarized light, left circularly polarized light and right circularly polarized light can be periodically generated after the quarter wave plate rotates for one circle. The scanning step length of the two-dimensional micro-nano translation stage is set to be 1um, and each time a point is moved, the quarter wave plate rotates for one circle, and the wave plate rotation angle and the photocurrent signals of each point are collected through the current amplifier and the phase-locked amplifier.
2. The photocurrent data obtained by one rotation of the wave plate at each point is fitted by using the formula (1):
i＝a*sin2θ+b*cos4θ+c*sin4θ+d (1)
in the formula (1), j is a photocurrent, a is a circular dichroism photocurrent coefficient, b and c are linear dichroism photocurrent coefficients, and d is a background photocurrent coefficient.
3. And (3) realizing two-dimensional scanning of the sample by using a two-dimensional micro-nano translation stage, fitting a photocurrent signal obtained by each point-to-wave plate by using a formula (1), extracting the value of a in the formula (1), filling the value into a point corresponding to a space position, and obtaining the two-dimensional imaging of the circular dichroism photocurrent size and the space position of the device and the two-dimensional imaging of the common photocurrent size and the space position by using program processing and drawing software.
FIGS. 3 and 4 are each WTE of FIG. 2 2 Compared with the common photocurrent and circular dichroism photocurrent, the sensitivity and resolution of the edge of the micro-nano device are higher, and the method is favorable for researching the transport behavior of the photon-generated carriers at the boundary of the micro-nano device.
In a specific implementation, the application provides a computer storage medium and a corresponding data processing unit, wherein the computer storage medium can store a computer program, and the computer program can run the application content and part or all of the steps in each embodiment of the method for measuring circular dichroism photocurrent microscopic imaging of a micro-nano device when the computer program is executed by the data processing unit. The storage medium may be a magnetic disk, an optical disk, a read-only memory (ROM), a random-access memory (random access memory, RAM), or the like.
It will be apparent to those skilled in the art that the technical solutions in the embodiments of the present application may be implemented by means of a computer program and its corresponding general hardware platform. Based on such understanding, the technical solutions in the embodiments of the present application may be embodied essentially or in the form of a computer program, i.e. a software product, which may be stored in a storage medium, and include several instructions to cause a device (which may be a personal computer, a server, a single-chip microcomputer MUU or a network device, etc.) including a data processing unit to perform the methods described in the embodiments or some parts of the embodiments of the present application.
The application provides a method for measuring circular dichroism photocurrent microscopic imaging of a micro-nano device, and the method and the way for realizing the technical scheme are numerous, the above description is only a preferred embodiment of the application, and it should be noted that, for a person skilled in the art, several improvements and modifications can be made, and the improvements and modifications should be regarded as the protection scope of the application. The components not explicitly described in this embodiment can be implemented by using the prior art.
Claims (8)
1. A method for measuring circular dichroism photocurrent microscopic imaging of a micro-nano device, which is characterized by comprising the following steps:
step 1, an experimental system is established, wherein the experimental system comprises a 532nm laser, two reflectors, a chopper, a small-hole spatial filter, a lens, a polarizer, a quarter wave plate, a stepping motor, an illumination white light LED, a semi-reflection semi-transparent flat plate, a light-splitting crystal, a charge coupled device CCD, a microscope objective, a two-dimensional micro-nano translation stage, a current amplifier and a phase-locked amplifier;
and 2, measuring circular dichroism photocurrent microscopic imaging of the micro-nano device through an experimental system.
2. The method according to claim 1, wherein in step 1, the 532nm laser emits a beam of laser light, the beam of laser light is incident into the chopper through two reflectors and is modulated by periodic frequency, the laser light passing through the chopper is changed into a parallel beam after passing through a parallel beam system consisting of a small hole space filter and a lens, the parallel beam is changed into linear polarized light with 45 degrees oblique incidence through a polarizer placed at 45 degrees, and then the linear polarized light is changed into linear polarized light, left circular polarized light and right circular polarized light after passing through a quarter wave plate, the quarter wave plate is placed in a rotatable stepper motor, the quarter wave plate rotates for one circle, and the beam of laser light is modulated into linear polarized light, left circular polarized light and right circular polarized light periodically; and then the light beam is incident into the microscope objective through the semi-reflection semi-transparent flat plate and the light splitting crystal, and a micron-level light spot is formed at the focal point position through the convergence of the microscope objective.
3. The method of claim 2, wherein in step 1, the sample is placed on a two-dimensional micro-nano translation stage, the sample achieving a minimum step size of 0.5um in two dimensions.
4. The method according to claim 3, wherein in step 1, the white light LED and the lens form a white light illumination system, the white light is made to enter the microscope objective and the sample through the half-reflecting half-transmitting flat plate and the light splitting crystal by illuminating the white light LED and the lens, and then the white light path is reflected to the charge coupled device CCD through the sample, so that the real-time monitoring of the sample position is realized.
5. The method of claim 4, wherein in step 2, the device is attached to a sample card, and the sample card is then placed on a two-dimensional micro-nano translation stage.
6. The method according to claim 5, wherein in step 2, after the quarter-wave plate polarization modulated light spot is focused by the microscope objective lens, the light spot is changed into 1um, the light spot irradiates the sample area, the photocurrent is initially amplified by the current amplifier and then is input to the lock-in amplifier, the reference frequency signal of the lock-in amplifier is the frequency of the chopper, and finally, the signal of the lock-in amplifier is collected by the computer.
7. The method according to claim 6, wherein step 2 specifically comprises:
step 2-1, rotating a quarter wave plate by using a stepping motor, and periodically generating linearly polarized light, left circularly polarized light and right circularly polarized light after rotating for one circle; setting the scanning step length of the two-dimensional micro-nano translation stage to be 1um, and collecting the wave plate rotation angle and photocurrent signals of each point through a current amplifier and a phase-locked amplifier when each point is moved, and rotating a quarter wave plate for one circle;
and 2-2, fitting photocurrent data obtained by rotating the wave plate at each point for one circle by using a formula (1):
j＝a*sin2θ+b*cos4θ+c*sin4θ+d (1)
where j is the photocurrent, a is the circular dichroism photocurrent coefficient, b and c are the linear dichroism photocurrent coefficients, and d is the background photocurrent coefficient; θ is the angle between the linearly polarized light after passing through the 45 ° polarizer and the principal axis of the quarter wave plate;
step 2-3, realizing two-dimensional scanning of the sample by using a two-dimensional micro-nano translation stage, wherein each scanning point and the quarter wave plate rotate for one circle, and acquiring data of the rotation angle and the photocurrent of the quarter wave plate of each point by using a phase-locked amplifier and a computer;
and 2-4, utilizing MATLAB programming to import photocurrent data of all the scanning points in space in batches, utilizing a formula (1) to fit values of a and d, and filling the values into a matrix of the corresponding space scanning points, so as to obtain a two-dimensional distribution image of a and d.
8. A storage medium storing a computer program or instructions which, when executed, implement the method of any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310343507.6A CN116953460A (en) | 2023-04-03 | 2023-04-03 | Method for measuring circular dichroism photocurrent microscopic imaging of micro-nano device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310343507.6A CN116953460A (en) | 2023-04-03 | 2023-04-03 | Method for measuring circular dichroism photocurrent microscopic imaging of micro-nano device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116953460A true CN116953460A (en) | 2023-10-27 |
Family
ID=88451733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310343507.6A Pending CN116953460A (en) | 2023-04-03 | 2023-04-03 | Method for measuring circular dichroism photocurrent microscopic imaging of micro-nano device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116953460A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118465351A (en) * | 2024-07-09 | 2024-08-09 | 国科大杭州高等研究院 | Micro-region global collaborative characterization photocurrent mapping test system and method |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204439544U (en) * | 2015-03-05 | 2015-07-01 | 北京大学 | A kind of detection system of faint light electric current |
| CN108151931A (en) * | 2017-12-23 | 2018-06-12 | 福州大学 | A kind of method for the spin cross force that linearly polarized light generates in estimation bismuth selenide |
| CN110132939A (en) * | 2019-06-12 | 2019-08-16 | 江苏省特种设备安全监督检验研究院 | A kind of confocal-photoelectric current test macro |
| CN110718608A (en) * | 2019-10-18 | 2020-01-21 | 福州大学 | Method for regulating and controlling circular polarization related photocurrent of tellurium antimonide film |
| CN113433074A (en) * | 2021-06-24 | 2021-09-24 | 哈尔滨工业大学 | Circular dichroism microscopic imaging system based on discrete modulation |
| CN114199782A (en) * | 2021-12-17 | 2022-03-18 | 福州大学 | Sb2Te3Circularly polarized light current regulation and control method for topological surface state |
| CN115046933A (en) * | 2022-07-13 | 2022-09-13 | 首都师范大学 | Micro-area circular dichroism and circular polarization luminescence testing device |
| CN115327456A (en) * | 2022-09-01 | 2022-11-11 | 中国矿业大学 | Method for measuring spin Hall angle of n-type gallium arsenide-doped semiconductor at room temperature |
| CN115436364A (en) * | 2022-08-10 | 2022-12-06 | 南京航空航天大学 | Nondestructive imaging system and imaging method for spin and energy valley polarization signals |
| CN115855930A (en) * | 2021-09-23 | 2023-03-28 | 中国科学院大连化学物理研究所 | Novel method for solar cell photocurrent imaging |
-
2023
- 2023-04-03 CN CN202310343507.6A patent/CN116953460A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204439544U (en) * | 2015-03-05 | 2015-07-01 | 北京大学 | A kind of detection system of faint light electric current |
| CN108151931A (en) * | 2017-12-23 | 2018-06-12 | 福州大学 | A kind of method for the spin cross force that linearly polarized light generates in estimation bismuth selenide |
| CN110132939A (en) * | 2019-06-12 | 2019-08-16 | 江苏省特种设备安全监督检验研究院 | A kind of confocal-photoelectric current test macro |
| CN110718608A (en) * | 2019-10-18 | 2020-01-21 | 福州大学 | Method for regulating and controlling circular polarization related photocurrent of tellurium antimonide film |
| CN113433074A (en) * | 2021-06-24 | 2021-09-24 | 哈尔滨工业大学 | Circular dichroism microscopic imaging system based on discrete modulation |
| CN115855930A (en) * | 2021-09-23 | 2023-03-28 | 中国科学院大连化学物理研究所 | Novel method for solar cell photocurrent imaging |
| CN114199782A (en) * | 2021-12-17 | 2022-03-18 | 福州大学 | Sb2Te3Circularly polarized light current regulation and control method for topological surface state |
| CN115046933A (en) * | 2022-07-13 | 2022-09-13 | 首都师范大学 | Micro-area circular dichroism and circular polarization luminescence testing device |
| CN115436364A (en) * | 2022-08-10 | 2022-12-06 | 南京航空航天大学 | Nondestructive imaging system and imaging method for spin and energy valley polarization signals |
| CN115327456A (en) * | 2022-09-01 | 2022-11-11 | 中国矿业大学 | Method for measuring spin Hall angle of n-type gallium arsenide-doped semiconductor at room temperature |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118465351A (en) * | 2024-07-09 | 2024-08-09 | 国科大杭州高等研究院 | Micro-region global collaborative characterization photocurrent mapping test system and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4223769B2 (en) | measuring device | |
| CN116953460A (en) | Method for measuring circular dichroism photocurrent microscopic imaging of micro-nano device | |
| CN103674926B (en) | Optical devices | |
| US20220374756A1 (en) | Quantum information processing device, assembly, arrangement, system and sensor | |
| CN108645831B (en) | Multifunctional surface plasma coupled emission fluorescence and Raman detector and detection method thereof | |
| Hunsche et al. | New dimensions in T-ray imaging | |
| WO2009064102A1 (en) | Single-polarizer focused-beam ellipsometer | |
| Wang et al. | High frame-rate fluorescence confocal angle-resolved linear dichroism microscopy | |
| Xu et al. | High-efficiency fluorescence collection for NV-center ensembles in diamond | |
| EP0033703A1 (en) | High homogeneity magnet without magnetic circuit, especially for nuclear magnetic resonance imaging | |
| CN107589278B (en) | Reflective polarization modulation near-field scanning optical microscope system based on optical fiber probe | |
| Lange et al. | A high-resolution combined scanning laser and widefield polarizing microscope for imaging at temperatures from 4 K to 300 K | |
| CN108254340B (en) | Scanning microscope based on linear polarization modulation | |
| WO2024087614A1 (en) | Ratiometric fluorescence emission super-resolution imaging method | |
| CN113639883A (en) | Alkali metal atom magnetometer spin polarizability spatial distribution in-situ measurement system and method | |
| Bu et al. | Configurable circular-polarization-dependent optoelectronic silent state for ultrahigh light ellipticity discrimination | |
| WO2023239294A1 (en) | Photodetector pixel, photodetector and methods of forming the same | |
| Reuschel et al. | Vector magnetometry based on polarimetric optically detected magnetic resonance | |
| CN102095689B (en) | Polarization resolution differential reflection spectrum measuring system | |
| CN109387481A (en) | A kind of apparatus and method detecting circular dichroism | |
| CN207181294U (en) | Total-reflection type oblique incident ray difference in reflection scanned imagery device | |
| Steinbach et al. | Imaging fluorescence detected linear dichroism of plant cell walls in laser scanning confocal microscope | |
| CN115436364A (en) | Nondestructive imaging system and imaging method for spin and energy valley polarization signals | |
| CN116519142A (en) | Method for detecting polarization by using three-dimensional topological insulator film | |
| Stiewe et al. | Magnetic domain scanning imaging using phase-sensitive THz-pulse detection |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Chen Lingxiu Inventor after: Zhang Yang Inventor after: Xue Xiaolan Inventor after: Nie Yue Inventor after: Hu Baoxin Inventor after: Zhang Zhihao Inventor after: Wang Jiale Inventor after: Shi Liwei Inventor before: Zhang Yang Inventor before: Xue Xiaolan Inventor before: Nie Yue Inventor before: Hu Baoxin Inventor before: Zhang Zhihao Inventor before: Wang Jiale Inventor before: Chen Lingxiu Inventor before: Shi Liwei |