CN116878386B - Calibration method and calibration device for up-down alignment visual device - Google Patents
Calibration method and calibration device for up-down alignment visual device Download PDFInfo
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- 230000000007 visual effect Effects 0.000 title claims abstract description 19
- 230000000149 penetrating effect Effects 0.000 claims description 9
- 239000000758 substrate Substances 0.000 abstract description 15
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000005259 measurement Methods 0.000 description 31
- 238000009434 installation Methods 0.000 description 13
- 230000003287 optical effect Effects 0.000 description 6
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/80—Analysis of captured images to determine intrinsic or extrinsic camera parameters, i.e. camera calibration
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
Abstract
The invention provides a calibration method and a calibration device for an up-down alignment vision device, and relates to the technical field of semiconductors. The calibration method comprises the following steps: the visual device to be calibrated is arranged between an upper calibration point and a lower calibration point of the calibration device, and a rotating seat provided with the upper calibration point and the lower calibration point is rotated for N times so that the rotating seat reaches N rotating positions; measuring the coordinates of an upper calibration point and the coordinates of a lower calibration point when the rotating seat is positioned at N rotating positions; the method comprises the steps of obtaining circle center coordinates of an upper track circle formed by rotation of an upper calibration point and circle center coordinates of a lower track circle formed by rotation of a lower calibration point, and taking upper and lower position deviations of the two circle center coordinates as errors to be calibrated of a vision device to be calibrated; and compensating the up-down alignment result of the visual device to be calibrated according to the acquired error to be calibrated, so as to obtain the up-down alignment result of the calibrated visual device. The calibration method can accurately calibrate the up-down alignment error of the vision device, thereby ensuring the accuracy of the vision device to up-down alignment of the chip and the substrate.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a calibration method and a calibration device for an up-down alignment vision device.
Background
In the semiconductor packaging technology, flip chip technology (flip chip) needs to flip a chip with a solder bump placed thereon and then connect the flip chip with a substrate to realize a pre-designed circuit function; in the process steps of the flip chip technology, in order to ensure the position correspondence accuracy of the bump on the flipped chip and the substrate, the prior art generally adopts an up-down alignment vision device to identify the pattern features of the connection surfaces of the chip above and the substrate below, and calculates the relative position error of the two, so as to assist the motion system of the equipment to complete the alignment of the chip and the substrate. However, in the existing up-down alignment vision device, due to the installation error of optical elements such as a prism, the installation error introduces a systematic error in the image of the chip and the substrate obtained by the camera, so that the calculated relative positions of the chip and the substrate deviate from the actual values, thereby influencing the up-down alignment accuracy of the up-down alignment vision device on the chip and the substrate, and further influencing the relative connection position accuracy and quality of the chip and the substrate.
Disclosure of Invention
The invention aims to provide a calibration method and a calibration device for an up-down alignment vision device, which are used for solving the technical problem of lower up-down alignment accuracy of the existing part of vision devices.
In order to solve the above problems, the present invention provides a calibration method for an up-down alignment vision device, comprising:
the visual device to be calibrated is arranged between an upper calibration point and a lower calibration point of the calibration device, a rotating seat provided with the upper calibration point and the lower calibration point is rotated for N times so that the rotating seat reaches N rotating positions, wherein N is more than or equal to 2, the upper calibration point corresponds to the lower calibration point up and down, and a rotating shaft of the rotating seat is vertically arranged;
measuring the coordinates (x) of the upper calibration point when the rotating seat is positioned at the N rotating positions by the vision device to be calibrated Tn ，y Tn ) And the coordinates (x Bn ，y Bn ）；
According to group N (x Tn ，y Tn ) And (x) Bn ，y Bn ) The center coordinates (X) of the upper track circle formed by the rotation of the upper standard point are obtained TO ,Y TO ) And the lower standard point rotates to form the center coordinates (X BO ,Y BO ) Will (X) TO -X BO ，Y TO -Y BO ) Error to be calibrated (delta) as the vision device to be calibrated X ，δ Y ）；
Based on the obtained error (delta) X ，δ Y ) For the up-down alignment result (x Tn -x Bn ，y Tn -y Bn ) Compensating to obtain the up-down alignment result (x Tn -x Bn -δ X ，y Tn -y Bn -δ Y ）。
Optionally, the N rotation positions are distributed along the circumferential direction of the rotation shaft; said method is based on N groups (x Tn ，y Tn ) And (x) Bn ，y Bn ) The center coordinates (X) of the upper track circle formed by the rotation of the upper standard point are obtained TO ,Y TO ) And the lower standard point rotates to form the center coordinates (X BO ,Y BO ) Comprises the following steps:
n groups (x) Tn ，y Tn ) Average value of (2)And N groups (x) Bn ，y Bn ) Mean value of>X is then TO =/>，Y TO =/>，X BO =/>，Y BO =/>Said error to be calibrated (delta X ，δ Y ) Is calculated as follows:
。
optionally, N is an even number, and one of the N rotational positions has another rotational position symmetrical to the axis of the rotating shaft.
Optionally, the N rotation positions are uniformly spaced along the axis of the rotation shaft.
The invention also provides a calibration device which is applied to the calibration method, the calibration device comprises a base and a rotating seat which is rotationally connected with the base through a rotating shaft, the rotating seat is provided with two calibration blocks which are arranged up and down, the bottom surface of one of the two calibration blocks positioned above is provided with an upper calibration point, the top surface of one of the two calibration blocks positioned below is provided with a lower calibration point, and the lower calibration point corresponds to the upper calibration point up and down; the rotating shaft is vertically arranged, and the base is provided with a driving component for driving the rotating seat to rotate.
Optionally, at least one of the two calibration blocks is used as an adjusting calibration block, the rotating seat is provided with a mounting hole and a locking piece, the adjusting calibration block is matched and slidingly connected with the mounting hole along the up-down direction, and the locking piece is provided with a locking position for locking the adjusting calibration block in the mounting hole and an adjusting position for allowing the adjusting calibration block to move up and down along the mounting hole.
Optionally, the adjusting calibration block is provided with a first waist-shaped hole extending along the up-down direction, and the hole depth direction of the first waist-shaped hole is a first horizontal direction; the locking piece comprises a locking screw, two opposite sides of the mounting hole are respectively communicated with a locking threaded hole and a penetrating through hole, the depth directions of the locking threaded hole and the penetrating through hole are consistent with the first horizontal direction, and a screw rod of the locking screw penetrates through the first waist-shaped hole to be connected with the locking threaded hole in a threaded mode, and a screw head is accommodated in the penetrating through hole and is abutted to the adjusting calibration block.
Optionally, in the first horizontal direction, the locking threaded hole is located downstream of the through hole; the width of the mounting hole along the first horizontal direction is in a necking shape.
Optionally, the rotating seat comprises an upper arm, a lower arm and a connecting arm connected between the upper arm and the lower arm, wherein one of the calibration blocks is used as an upper calibration block and arranged on the upper arm, the other calibration block is used as a lower calibration block and arranged on the lower arm, and at least the upper calibration block is used as an adjusting calibration block;
the rotating shaft is rotatably connected between the upper arm and the base, the bottom end of the rotating shaft is provided with a containing groove, and the top end of the containing groove is communicated with an adjusting threaded hole; the calibration device further comprises an adjusting screw, the screw thread of the adjusting screw is connected with the adjusting threaded hole, and the bottom end of the screw of the adjusting screw penetrates through the accommodating groove to be rotationally clamped with the upper calibration block.
Optionally, the base comprises a fixed seat body and a bearing seat body connected with the fixed seat body, and the rotating shaft is rotationally connected between the top of the rotating seat and the bearing seat body;
the calibration device further comprises a fixing screw, a second waist-shaped hole extending along the vertical direction is formed in the side wall of the bearing seat body, a screw rod of the fixing screw penetrates through the second waist-shaped hole to be connected with the side wall of the fixing seat body in a threaded mode, and a screw head is abutted to the outer end face of the second waist-shaped hole; the fixing seat body is in threaded connection with an upper propping screw and a lower propping screw, the bottom end of the screw rod of the upper propping screw is propped against the top surface of the bearing seat body, and the top end of the screw rod of the lower propping screw is propped against the bottom surface of the bearing seat body.
In the calibration method provided by the invention, the X-Y coordinates (X) of the upper calibration point before calibration of N groups of different directions are obtained by rotating the rotating seat Tn ，y Tn ) And the X-Y coordinates (X Bn ，y Bn ) Wherein the upper calibration point forms the center coordinates (X TO ,Y TO ) Can comprehensively characterize the comprehensive measurement error of the vision device to be calibrated on the upper calibration points positioned in N different directions, and the lower calibration points form the center coordinates (X) of the lower track circle BO ,Y BO ) The comprehensive measurement error of the vision device to be calibrated on the lower calibration points positioned in N different directions can be comprehensively characterizedX TO ,Y TO ) And (X) BO ,Y BO ) Upper and lower positional deviations (X) TO -X BO ，Y TO -Y BO ) The error to be calibrated (delta) of the vision device to be calibrated can be characterized X ，δ Y ) Thereby obtaining the error (delta) to be calibrated X ，δ Y ) And by the error (delta) to be calibrated X ，δ Y ) And compensating and calibrating the vision device to be calibrated, correspondingly improving the up-down alignment accuracy of the vision device, ensuring the up-down alignment accuracy of the vision device on the chip and the substrate to be measured, and ensuring the accuracy and quality of the connection position of the chip and the substrate. In addition, the vision device to be calibrated is adopted as a part of the calibration system, and only the calibration device is required to be additionally arranged, so that the device is simple in structure, convenient to operate and low in calibration cost.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic view of an optical path with small error or negligible error in the installation position of a prism of a vision device in a calibration method of an up-down alignment vision device according to an embodiment of the present invention;
fig. 2 is upper and lower patterns of the measurement object #1 and the measurement object #2 in fig. 1 imaged in a camera;
fig. 3 is a schematic view of an optical path when there is deflection in an installation position of a prism of a vision device in a calibration method of an up-down alignment vision device according to an embodiment of the present invention;
fig. 4 is upper and lower patterns of the measurement object #1 and the measurement object #2 in fig. 3 imaged in the camera;
FIG. 5 is a schematic diagram of a calibration system according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a calibration device according to an embodiment of the present invention;
FIG. 7 is an exploded view of the swivel mount, swivel shaft, upper and lower indexing blocks of FIG. 6;
FIG. 8 is a cross-sectional view of a rotating shaft in a calibration device according to an embodiment of the present invention;
FIG. 9 is an upper and lower trajectory circles of upper and lower calibration points imaged in a vision device to be calibrated in a calibration method according to an embodiment of the present invention;
FIG. 10 is a flow chart of a calibration method for an up-down alignment vision device according to an embodiment of the present invention;
FIG. 11 shows an error delta to be calibrated obtained by the calibration method of the up-down alignment vision device according to the embodiment of the present invention X 、δ Y The number of measurement positions of the rotating seat in one circle is 10, 40, 70 … …, 520, 550 and 580 respectively.
Reference numerals illustrate:
10-calibrating the device; 20-vision means; 21-a prism; 21 a-red light reflecting film layer; 21 b-blue light reflecting film layer; 22-lens; a 23-camera; 24-an upper computer; 31-measurement object #1; 32-measurement object #2; 100-base; 110-a fixed seat body; 111-upper adjustment ear; 112-lower adjustment ear; 113-up-pushing the screw; 114-lower abutment screw; 120-bearing seat body; 121-a connection; 121 a-a second waist-shaped aperture; 122-upper load beam; 123-lower load beam; 124-set screw; 125-slip joint groove; 200-rotating shaft; 210-a bearing; 220-snap springs; 230-accommodating grooves; 240-adjusting the threaded hole; 250-accommodating holes; 260-adjusting the screw; 300-rotating a seat; 310-upper arm; 320-connecting arms; 330-lower arm; 340-upper calibration block; 341-upper calibration point; 342-upper trace circle; 350-a lower calibration block; 351-lower calibration point; 352-lower trace circle; 361-mounting holes; 362-a through hole; 363-locking threaded hole; 364-first waist-shaped aperture; 370-locking screw; 400-drive assembly.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Fig. 1 and 3 show a specific form of a vision device 20, where the vision device 20 to be calibrated includes a prism 21, a lens 22, a camera 23, and a light source, and may further include moving parts for supporting focusing of the lens 22 and changing of the field of view of the camera 23. In the calibration method of the up-down alignment vision device provided in the embodiment of the present invention, the error of the installation position of the prism 21 of the vision device 20 is small and even the optical path diagram can be ignored, specifically, when in use, the prism 21 is located between the measurement object #131 and the measurement object #232, the light source emits two light beams with different wavelengths, such as red light and blue light, towards the prism 21, when passing through the prism 21, the light source reflects respectively at the red light reflection film layer 21a and the blue light reflection film layer 21b, and exits the prism 21 to the lens 22, and finally the exposure imaging is performed on the photosensitive chip of the camera 23, and the camera 23 transmits the image to the upper computer 24; as shown in fig. 2, the measurement patterns of the measurement object #131 and the measurement object #232 in fig. 1 are an upper pattern and a lower pattern imaged in the camera 23, wherein the imaging patterns of the two are overlapped in one-to-one correspondence; further, software operations such as image inversion, feature extraction, coordinate calculation, and the like are performed, so that the up-down alignment results of the measurement object #131 and the measurement object #232 are obtained.
Fig. 3 is a schematic view of an optical path when there is deflection of the installation position of the prism 21 in the vision device 20 in the calibration method of the up-down alignment vision device according to the embodiment of the invention, and when the prism 21 deflects by δ relative to the vertical direction due to the installation error of the prism 21 θ This will cause the vision device 20 to shift the measurement result of the measurement object #131 in the X direction by δ X (Y-direction shift is not shown in the figure) so that the mark points of the measurement object #131 and the measurement object #232 overlapping in the image obtained by the vision device 20 do not actually overlap in the horizontal direction, but there is a positional deviation, as shown in fig. 4, if the pitch of the measurement object #131 and the measurement object #232 is 50 mm and the installation error of the prism 21 in the vertical direction is 0.01 °, the up-down alignment error of the vision device 20 due to the above error is about 9 μm, which is significant for the micrometer-level alignment requirement. Similarly, for the vision device 20 adopting other different design structures, the installation error of the optical element of the prism 21 will also introduce the up-down alignment error, and the up-down alignment error is irrelevant to the factors such as the horizontal position of the measured object, the illumination condition, and the like, and can be regarded as the inherent systematic error of the vision device 20.
The embodiment provides a calibration method and a calibration device 10 for an up-down alignment vision device, as shown in fig. 1-11, wherein the calibration device 10 is applied to the calibration method, specifically, the calibration device 10 includes a base 100 and a rotating seat 300 rotatably connected to the base 100 through a rotating shaft 200, the rotating seat 300 is provided with two calibration blocks arranged up and down, the bottom surface of one of the two calibration blocks positioned above is provided with an upper calibration point 341, the top surface of one of the two calibration blocks positioned below is provided with a lower calibration point 351, and the lower calibration point 351 corresponds to the upper calibration point 341 up and down; the rotation shaft 200 is vertically disposed, and the base 100 is provided with a driving assembly 400 for driving the rotation seat 300 to rotate. Specifically, the calibration device 10, the vision device to be calibrated and the controller may form a calibration system, wherein the driving assembly 400 in the calibration device 10 and the vision device to be calibrated are all in communication connection with the controller to execute the calibration method.
Fig. 10 is a flowchart of a calibration method of the up-down alignment vision device 20 according to an embodiment of the present invention. As shown in fig. 10, the calibration method includes:
s1002, placing the vision device 20 to be calibrated between the upper calibration point 341 and the lower calibration point 351 of the calibration device 10, and rotating the rotating seat 300 provided with the upper calibration point 341 and the lower calibration point 351N times to enable the rotating seat 300 to reach N rotating positions; wherein N is greater than or equal to 2, the upper calibration point 341 corresponds to the lower calibration point 351 vertically, and the rotation shaft 200 of the rotation seat 300 is vertically arranged.
S1004, measuring the coordinates (x) of the upper calibration point when the rotating base 300 is positioned at the N rotating positions by the vision device to be calibrated Tn ，y Tn ) And the coordinates of the lower index point (x Bn ，y Bn ）。
N driving angles of the driving assembly 400 to the rotating base 300 are preset in the controller initially, so that the rotating base 300 drives the upper calibration point 341 and the lower calibration point 351 to rotate to N rotation positions around the rotating shaft 200; when the calibration device 10 is used for calibrating the up-down alignment result of the visual device to be calibrated, firstly, the visual device to be calibrated is placed between the upper calibration point 341 and the lower calibration point 351, the upper calibration point 341 and the lower calibration point 351 are both in the shooting range of the visual device to be calibrated, the position of the visual device to be calibrated is fixed, the driving assembly 400 drives the rotating seat 300 to rotate according to the first driving angle, the driving assembly 400 feeds back a stop signal to the controller after stopping driving, and the controller correspondingly controls the visual device to be calibrated to measure the first group of X-Y coordinates (X T1 ，y T1 ) And a first set of X-Y coordinates (X B1 ，y B1 ) And fed back to the controller.
Subsequently, the process, similarly,the controller controls the driving assembly 400 to drive the rotating base 300 to drive the upper calibration point 341 and the lower calibration point 351 to continue rotating by a second driving angle, and obtains a second set of X-Y coordinates (X) of the upper calibration point 341 T2 ，y T2 ) And a second set of X-Y coordinates (X B2 ，y B2 ) The method comprises the steps of carrying out a first treatment on the surface of the Repeating the operation, the rotating base 300 rotates to N different rotation positions under the driving of the driving assembly 400, and the controller correspondingly obtains the X-Y coordinates (X Tn ，y Tn ) And the X-Y coordinates (X Bn ，y Bn ) The method comprises the steps of carrying out a first treatment on the surface of the Wherein x is Tn 、x Bn 、y Tn 、y Bn M may be used in units of (a).
S1006 is based on N groups (x Tn ，y Tn ) And (x) Bn ，y Bn ) Acquiring the center coordinates (X) of the upper calibration point 341 rotated to form the upper locus circle 342 TO ,Y TO ) And the lower index point 351 rotate to form the center coordinates (X BO ,Y BO ) Will (X) TO -X BO ，Y TO -Y BO ) Error to be calibrated (delta) as vision device to be calibrated X ，δ Y ）。
In the calibration device 10, the upper calibration point 341 and the lower calibration point 351 are vertically corresponding, and the rotating shaft 200 is vertically arranged, so that when the rotating seat 300 is actually rotated to N different rotating positions, an upper track circle 342 formed by the rotation of the upper calibration point 341 along with the rotating seat 300 and a lower track circle 352 formed by the rotation of the lower calibration point 351 along with the rotating seat 300 are also vertically corresponding, correspondingly, the circle center of the upper track circle 342 and the circle center of the lower track circle 352 are also vertically corresponding, and the X-Y coordinates of the two are coincident; because of the systematic error of the vision device to be calibrated, the positions of the upper track circle 342 and the lower track circle 352 measured by the vision device to be calibrated deflect, the circle center of the upper track circle 342 and the circle center of the lower track circle 352 are not coincident in the image acquired by the vision device to be calibrated, resulting in (X TO ,Y TO ) And (X) BO ,Y BO ) Is not equal, and the center coordinates (X TO ,Y TO ) Can comprehensively characterize the positions of the vision device pairs to be calibrated in N different directionsAnd similarly, the center coordinates (X BO ,Y BO ) Can comprehensively characterize the comprehensive measurement error of the vision device to be calibrated on the lower calibration points positioned at N different directions, then (X) TO ,Y TO ) And (X) BO ,Y BO ) Upper and lower positional deviations (X) TO -X BO ，Y TO -Y BO ) The error to be calibrated (delta) of the vision device to be calibrated can be characterized X ，δ Y ) Wherein delta X =X TO -X BO ，δ Y =Y TO -Y BO 。
S1008, according to the acquired error (delta) to be calibrated X ，δ Y ) Up-down alignment results (x) of visual device to be calibrated Tn -x Bn ，y Tn -y Bn ) Compensating to obtain the up-down alignment result (x Tn -x Bn -δ X ，y Tn -y Bn -δ Y ）。
The result of the up-down alignment measured before the calibration of the vision device to be calibrated is (x) Tn -x Bn ，y Tn -y Bn ) The error to be calibrated existing in the vision device to be calibrated is obtained to be (delta) X ，δ Y ) The result of the up-down alignment of the vision device 20 after compensation is (x Tn -x Bn -δ X ，y Tn -y Bn -δ Y ）=（x Tn -x Bn -X TO +X BO ，y Tn -y Bn -Y TO +Y BO ) Thus completing the calibration of the vision apparatus 20.
In this calibration method, the X-Y coordinates (X) of the upper calibration points 341 before calibration in N sets of different orientations are obtained by rotating the rotating base 300 Tn ，y Tn ) And the X-Y coordinates (X Bn ，y Bn ) Wherein the upper calibration point 341 forms the center coordinates (X TO ,Y TO ) The comprehensive measurement errors of the vision device to be calibrated on the upper calibration points 341 positioned in N different directions can be comprehensively characterized, and the lower calibration points 351 form a lower track circle 352 center coordinates (X) BO ,Y BO ) Can comprehensively characterize the comprehensive measurement error of the vision device to be calibrated on the lower calibration points 351 positioned at N different orientations, then (X) TO ,Y TO ) And (X) BO ,Y BO ) Upper and lower positional deviations (X) TO -X BO ，Y TO -Y BO ) The error to be calibrated (delta) of the vision device to be calibrated can be characterized X ，δ Y ) Thereby obtaining the error (delta) to be calibrated X ，δ Y ) And by the error (delta) to be calibrated X ，δ Y ) And the vision device to be calibrated is compensated and calibrated, so that the up-down alignment accuracy of the vision device 20 is correspondingly improved, the up-down alignment accuracy of the vision device to the chip and the substrate to be measured is ensured, and the accuracy and quality of the connection position of the chip and the substrate are ensured. In addition, the vision device to be calibrated is adopted as a part of the calibration system, and only the calibration device is required to be additionally arranged, so that the device is simple in structure, convenient to operate and low in calibration cost.
Of course, in other embodiments, the adjustment of the rotatable seat may be performed manually, and the position of the rotatable seat is preferably locked after each adjustment.
Specifically, in the present embodiment, N rotation positions are distributed in a dispersed manner along the circumferential direction of the rotation shaft; s1006 is based on N groups (x Tn ，y Tn ) And (x) Bn ，y Bn ) Acquiring the center coordinates (X) of the upper calibration point 341 rotated to form the upper locus circle 342 TO ,Y TO ) And the lower index point 351 rotate to form the center coordinates (X BO ,Y BO ) Comprises the following steps: n groups (x) Tn ，y Tn ) Average value of (2)And N groups (x) Bn ，y Bn ) Mean value of>X is then TO =/>，Y TO =/>，X BO =/>，Y BO =/>To be calibrated for error (delta) X ，δ Y ) Is calculated as follows:
。
here, one specific form of the center coordinates of the upper track circle 342 and the center coordinates of the lower track circle 352 is solved, wherein N rotation positions are distributed along the circumferential direction of the rotation shaft 200, the distributed arrangement is specifically that N rotation position points of the upper track circle 342 (or the lower track circle 352) in the upper calibration point 341 (or the lower calibration point 351) are projected to any one diameter of the upper track circle 342 (or the lower track circle) to form N projection points, the diameter is located in two radiuses on two sides of the center, and the sum of the lengths of all projection points located in one radius from the center is approximately equal to the sum of the lengths of all projection points located in the other radius from the center; correspondingly, in the N projection points of the upper calibration point 341 towards the X axis, in the coordinate axes positioned at the two sides of the projection point of the X axis towards the center of the upper track circle 342, the sum of the lengths of all the projection points positioned on one coordinate axis from the projection point of the center of the circle is approximately equal to the sum of the lengths of all the projection points positioned on the other coordinate axis from the projection point of the center of the circle, and the Y axis is the same, so that the upper calibration point 341 is uniformly distributed at the two sides of the center of the upper track circle 342 in the X direction and the Y direction, and N X are solved Tn Average value of (2)Namely, the X coordinate value of the center of the upper track circle 342; similarly, solve for N y Tn Mean value of>That is, Y coordinate values of the center of the upper track circle 342, N x Bn Average value of (2)That is, the X coordinate value of the center of the lower track circle 351 is used to solve N y Bn Mean value of>That is, the Y coordinate value of the center of the lower trace circle 352, thereby obtaining (X TO ,Y TO ）=/>，（X BO ,Y BO ）=/>Correspondingly, the up-down alignment result after the visual device to be calibrated is (x) Tn -x Bn -/>+/>，y Tn -y Bn -/>+/>）。
Specifically, in the present embodiment, as shown in fig. 9, N is an even number, and one of the N rotational positions has another rotational position symmetrical to the axis of the rotational shaft 200. The rotation axis 200 is located on the plane where the upper track circle 342 (or the lower track circle 352) is located, and the axis center of the plane where the upper track circle 342 (or the lower track circle 352) is coincident with the circle center of the upper track circle 342 (or the lower track circle 352), then N rotation position points of the upper calibration point 341 (or the lower calibration point 351) are symmetrical with respect to the circle center two by two, correspondingly, projection points of the same group of two rotation position points to any diameter are also symmetrical with respect to the circle center, thus the N rotation positions meet the requirement of scattered arrangement through simple and regular rotation position limitation, correspondingly, the preset difficulty of the driving angle of the driving assembly is simplified on the basis of ensuring the accuracy of the rotation positions, the accuracy of obtaining the error to be calibrated according to the rotation positions is improved, and the calibration accuracy of the vision device to be calibrated is further improved. In addition, when the rotation shaft deflects, the deflection directions of the two symmetrical rotation position points are opposite to each other about the circle center, and the mutual compensation effect can be achieved on the measurement coordinate values, so that the calibration error caused by the inclination of the calibration block due to the deflection of the rotation shaft 200 is effectively reduced, and the calibration accuracy of the vision device to be calibrated is correspondingly further improved.
In addition to the above definition, in this embodiment, the N rotation positions may be arranged at equal intervals along the axis of the rotation shaft 200. The plurality of rotation positions of the rotation seat 300 are arranged along the circumferential direction at equal angles, the N rotation positions can meet the requirement of scattered arrangement by simply limiting, and on the basis of ensuring the accuracy of the rotation positions, the error introduced by the deflection of the rotation shaft of the calibration device can be reduced, so that the calibration accuracy of the vertical alignment error of the vision device to be calibrated is improved.
The calibration effect of the calibration method provided by the embodiment is simulated and calculated:
specifically, the distance between the upper calibration block 340 and the lower calibration block 350 is 50 mm, the upper calibration point 341 is arranged on the bottom surface of the upper calibration block 340, the lower calibration point 351 is arranged on the top surface of the lower calibration block 350, the random error of the coordinates of the upper calibration point 341 and the lower calibration point 351 calculated by the vision device 20 is not more than +/-0.5 μm, and the installation error of the upper calibration point 341 and the lower calibration point 351 in the horizontal direction is in the order of 0.1 mm. The step of executing the calibration method provided by the embodiment is to perform 20 times of measurement calibration, wherein the difference between 20 times of measurement is that the number of N rotation positions divided into a circle of rotation positions in the circumferential direction at equal intervals is sequentially increased by 30 based on 10, specifically 10, 40, 70 … … 520, 550 and 580 respectively, and other calibration steps are the same; repeating the calibration for 20 times to obtain the error delta to be calibrated X 、δ Y As shown in fig. 11, it can be seen from fig. 11 that as the number of measurements N increases, the error to be calibrated (δ X ，δ Y ) The resolution of (a) is gradually increased, in particular when the number of N exceeds 200, the error to be calibrated (delta X ，δ Y ) The resolving precision of the method is better than 0.1mm; when the number of N exceeds 500, the error to be calibrated (delta X ，δ Y ) The resolving precision of the method is better than 0.04mm, and compared with the precision level of the visual device under the condition of uncalibrated, the method has the advantage that the effectiveness of the calibrating method is verified.
The calibration device 10 provided in this embodiment is applied to the above calibration method, and can be matched with the vision device 20 to be calibrated to compensate and calibrate the vertical alignment error, so that the structure is simple, the accuracy of the vertical alignment result of the vision device 20 to be calibrated can be effectively improved, the vertical alignment accuracy of the vision device 20 to the chip and the substrate to be calibrated to the measurement object is correspondingly improved, and the accuracy and quality of the connection position of the chip and the substrate are ensured.
Alternatively, in this embodiment, as shown in fig. 5 to 7, at least one of the two calibration blocks is used as an adjustment calibration block, the rotating base 300 is provided with a mounting hole 361 and a locking member, the adjustment calibration block is matched and slides in the mounting hole 361 along the up-down direction, and the locking member is provided with a locking position for locking the adjustment calibration block in the mounting hole 361 and an adjustment position for allowing the adjustment calibration block to move up and down along the mounting hole 361. The two calibration blocks are arranged on the rotating seat 300 and are arranged at intervals up and down, when the vision device to be calibrated is placed between the two calibration blocks for calibration, the locking piece can be adjusted to the adjusting position, then the calibration blocks are adjusted by sliding up and down along the mounting holes 361 to adjust the up and down positions of the calibration blocks in a certain range, and the up and down positions of the vision device to be calibrated are adjusted at the same time, so that the up and down distance between the two calibration blocks and the up and down distance between the vision device to be calibrated and the upper calibration point 341 and the lower calibration point 351 are changed, so that the upper calibration point 341 and the lower calibration point 351 can be located at the focus point of the visual device to be calibrated, accordingly, definition of pictures of the upper calibration point 341 and the lower calibration point 351 obtained by shooting of the visual device to be calibrated is ensured, accurate identification of coordinates of the upper calibration point 341 and the lower calibration point 351 is ensured, and accuracy of compensating calibration of the visual device to be calibrated is obtained according to the coordinates of the upper calibration point 341 and the lower calibration point 351. After the position adjustment of the adjusting calibration block is completed, the adjusting locking piece is positioned at the locking position, so that the position stability of the adjusting calibration block connected to the rotating seat 300 is ensured, and the situations that the quality of a shot picture and the accuracy of a measured coordinate are influenced by the looseness of the adjusting calibration block in the measuring process are reduced.
Preferably, the two calibration blocks are both adjustment calibration blocks, so as to improve the adjustment range of the vertical relative distance between the two calibration blocks, and the vertical positions of the two calibration blocks are adjustable, so that the adjustment requirement of the vertical movement of the vision device 20 to be calibrated can be reduced.
Specifically, in this embodiment, as shown in fig. 7, the adjustment calibration block is provided with a first waist-shaped hole 364 extending in the up-down direction, and the hole depth direction of the first waist-shaped hole 364 is a first horizontal direction; the locking piece comprises a locking screw 370, two opposite sides of the mounting hole 361 are respectively communicated with a locking threaded hole 363 and a penetrating through hole 362, the hole depth directions of the locking threaded hole 363 and the penetrating through hole 362 are consistent with the first horizontal direction, and a screw rod of the locking screw 370 penetrates through the first waist-shaped hole 364 to be connected with the locking threaded hole 363 in a threaded mode, and a screw head is accommodated in the penetrating through hole 362 and is abutted to the adjusting calibration block. In this particular form of the locking member, when the adjustment calibration block needs to be adjusted up and down, the locking screw 370 can be unscrewed outwards so that the screw head of the locking screw 370 does not press the adjustment calibration block any more to reach the adjustment position, and at this time, the screw rod of the locking screw 370 can pass through the first waist-shaped hole 364 and can also be completely separated from the first waist-shaped hole 364, and then the adjustment calibration block can be slid up and down along the mounting hole 361 to adjust the up and down position thereof; after the adjustment is performed, the screw rod of the locking screw 370 passes through the first waist-shaped hole 364 and the locking screw 370 is reversely screwed so that the screw head of the locking screw 370 compresses the adjustment calibration block, and the adjustment calibration block after the adjustment of the position is locked on the rotating seat 300 when the locking position is reached. By adopting the locking piece in the above form, on the basis of realizing locking and adjusting the adjusting calibration block, the structure is simple, and when in locking position, the whole locking screw 370 is positioned in the through hole 362, the mounting hole 361 and the locking threaded hole 363, and does not protrude out of the rotating seat 300, so that the appearance uniformity of the rotating seat 300 is improved, the collision interference caused by the protruding of the locking screw 370 to other parts or vision devices to be calibrated in the rotating process of the rotating seat 300 is reduced, and the normal calibration is correspondingly ensured.
Of course, in other embodiments, only one side of the mounting hole 361 may be communicated with a through locking threaded hole 363, and the locking screw 370 may be screwed to the locking threaded hole 363 and the end of the screw rod of the locking screw abuts against the adjusting calibration block, so that the adjusting calibration block is limited in the locking position; when the adjustment is needed, the locking screw 370 is unscrewed, so that the end of the screw rod can reach the adjustment position to adjust the adjustment calibration block up and down by loosening the adjustment calibration block.
In the present embodiment, the locking screw hole 363 is located downstream of the through hole 362 in the first horizontal direction; the mounting hole 361 has a width in the first horizontal direction in a tapered shape. The shape of the adjusting calibration block is matched with the shape of the mounting hole 361 to form a trapezoid block, as shown in fig. 7, the top surface of the adjusting calibration block is trapezoid, the right side of the adjusting calibration block is the upper bottom of the trapezoid, the left side of the adjusting calibration block is the lower bottom of the trapezoid, the front side and the rear side of the adjusting calibration block are waists, and the two waists are gradually close to each other along the first horizontal direction from left to right; in the process that the locking screw 370 is rotated to the locking position by the adjusting position, the adjusting calibration block gradually extrudes towards one side of the shrinkage mouth of the mounting hole 361 along with the pushing of the screw head of the locking screw 370 towards the first horizontal direction, and then the side walls corresponding to the two waists of the adjusting calibration block continuously extrude the wall of the corresponding two sides of the mounting hole 361 until the screw head of the locking screw 370 abuts against the side wall corresponding to the lower bottom of the adjusting calibration block, and the adjusting calibration block is locked in the mounting hole 361, so that the locking stability of the adjusting calibration block when the locking screw 370 is positioned at the locking position is improved.
Alternatively, in this embodiment, as shown in fig. 5-8, the rotating base 300 includes an upper arm 310, a lower arm 330, and a connecting arm 320 connected therebetween, wherein one calibration block is provided as an upper calibration block 340 on the upper arm 310, the other calibration block is provided as a lower calibration block 350 on the lower arm 330, and at least the upper calibration block 340 is provided as an adjustment calibration block; the rotating shaft 200 is rotatably connected between the upper arm 310 and the base 100, and the bottom end of the rotating shaft 200 is provided with a containing groove 230, and the top end of the containing groove 230 is communicated with an adjusting threaded hole 240; the calibration device 10 further comprises an adjusting screw 260, a screw rod of the adjusting screw 260 is in threaded connection with the adjusting threaded hole 240, and the bottom end of the screw rod of the adjusting screw 260 passes through the accommodating groove 230 to be rotationally clamped with the upper calibration block 340. The bottom end of the rotating shaft 200 is connected with the rotating seat 300, the top end is connected with the base 100, and at least one end is in rotating connection so as to rotationally connect the rotating seat 300 with the base 100; the upper arm 310, the connecting arm 320 and the lower arm 330 of the rotating seat 300 are sequentially connected to form a U-shaped seat with an opening facing to one side horizontally, wherein a containing space is formed between the bottom surface of the upper arm 310 and the top surface of the lower arm 330 for the vision device 20 to be calibrated to extend in, a containing groove 230 is formed at the bottom of the rotating shaft 200 corresponding to the mounting hole 361, so that the adjusting space above the upper calibration block 340 and the upward adjusting range of the upper calibration block 340 are enlarged, when the upper calibration block 340 needs to be adjusted up and down, an adjusting locking piece is located at an adjusting position, then the adjusting screw 260 is rotated, the adjusting screw 260 is rotated under the limiting effect of the adjusting threaded hole 240 and drives the upper calibration block 340 to move up and down along the axial direction of the adjusting threaded hole 240, and accordingly the large-stroke rotating motion of the adjusting screw 260 is converted into the small-stroke up-down motion of the upper calibration block 340, the accurate stepless adjustment of the upper calibration block 340 is correspondingly realized, and the position adjusting accuracy of the upper calibration block 340 is improved. After the adjustment is completed, the locking piece is adjusted to the locking position.
Preferably, as shown in fig. 7 and 8, the top of the adjusting screw hole 240 penetrates through the top of the rotating shaft 200 through the accommodating hole 250, and when the screw of the adjusting screw 260 is connected to the adjusting screw hole 240, the screw head thereof is accommodated in the accommodating hole 250, thereby reducing interference of the upward protrusion of the adjusting screw 260 to other components.
In this embodiment, as shown in fig. 5 and 6, the base 100 includes a fixed base 110 and a bearing base 120 connected to the fixed base 110, and the rotating shaft 200 is rotatably connected between the top of the rotating seat 300 and the bearing base 120; the calibration device 10 further comprises a fixing screw 124, a second waist-shaped hole 121a extending along the vertical direction is arranged on the side wall of the bearing seat body 120, a screw rod of the fixing screw 124 penetrates through the second waist-shaped hole 121a to be connected with the side wall of the fixing seat body 110 in a threaded manner, and a screw head is abutted against the outer end face of the second waist-shaped hole 121 a; the fixing base 110 is screwed with an upper propping screw 113 and a lower propping screw 114, the bottom end of the upper propping screw 113 is propped against the top surface of the bearing base 120, and the top end of the lower propping screw 114 is propped against the bottom surface of the bearing base 120.
When the bearing seat body 120 is installed, the position of the bearing seat body 120 relative to the fixed seat body 110 can be roughly positioned, the fixing screw 124 is used to pass through the second waist-shaped hole 121a and is connected with the fixed seat body 110 in a threaded manner, the screw head of the fixing screw 124 is in a state of locking the bearing seat body 120 but not locking the same, and then the upper propping screw 113 and the lower propping screw 114 can be rotated, so that the propping bearing seat body 120 can move up and down to realize the up and down position adjustment of the bearing seat body 120, the position accuracy of the bearing seat body 120 connected with the fixed seat body 110 is correspondingly improved, the installation accuracy of the rotating seat 300 is further improved, the error introduced in the measurement process is reduced, and the calibration accuracy of the calibrating device 10 to the vision device 20 to be calibrated is improved; after the adjustment is completed, the fixing screw 124 is screwed to lock the bearing seat 120 to the fixing seat 110.
Specifically, as shown in fig. 5 and 6, the number of the upper propping screws 113 and the lower propping screws 114 may be two, and the two upper propping screws 113 and the two lower propping screws 114 are arranged at intervals along the width direction of the bearing seat 120; the second waist-shaped holes 121a may be two rows, and the two rows of second waist-shaped holes 121a are arranged at intervals along the width direction of the bearing seat 120, and the fixing screws 124 are in one-to-one correspondence with the second waist-shaped holes 121 a. In the process of installing the bearing seat body 120, besides the above-mentioned adjustment of the up-down position of the bearing seat body 120 by the up-propping screw 113 and the down-propping screw 114, the two groups of the up-propping screw 113 and the down-propping screw 114 are arranged to not only tightly prop up and limit the up-down position of the bearing seat body 120 at different positions, thereby improving the stability of the connection of the bearing seat body 120 to the fixed seat body 110, and correspondingly improving the stability of the rotating seat 300 in the measuring process; the heights of the bearing seat 120 at different propping positions in the width direction can be adjusted through the two groups of upper propping screws 113 and lower propping screws 114, so that the rotation angle of the bearing seat 120 around the fixing screws 124 is adjusted in a small range, the azimuth angles and the levelness of the bearing seat 120 and the rotating seat 300 are correspondingly adjusted, the installation azimuth accuracy of the rotating seat 300 is further improved, the error of the calibrating device 10 introduced in the measuring process is correspondingly further reduced, and the calibrating accuracy of the calibrating device 10 to the vision device 20 to be calibrated is further improved.
Specifically, as shown in fig. 5 and 6, an upper adjusting lug 111 and a lower adjusting lug 112 may be provided on the fixed seat 110, an upper supporting screw 113 is screwed to the upper adjusting lug 111, and a lower supporting screw 114 is screwed to the lower adjusting lug 112.
Alternatively, in the present embodiment, as shown in fig. 5, a sliding groove 125 extending in the up-down direction is provided on one side of the bearing seat 120, and the fixing seat 110 is elongated and is matched with the sliding groove 125. The fixing base body 110 and the bearing base body 120 are matched and slidably connected through the sliding connection groove 125, and connection between the two can be pre-positioned, so that the installation and positioning convenience of the two and the matching compactness of the two are improved.
Specifically, as shown in fig. 5, the bearing seat 120 may include a connection portion 121, and an upper bearing beam 122 and a lower bearing beam 123 connected to the connection portion 121, where the top end of the rotating shaft 200 may be rotatably connected to a pivot hole provided in the upper bearing beam 122 through a bearing 210, and the axial position of the rotating shaft 200 is limited by a snap spring 220; the driving assembly 400 includes a driving motor mounted to the lower carrier beam 123, and a driving end of the driving motor is connected to the lower arm 330. On the one hand, the rotor output end of the driving motor is used as a driving end to drive the lower arm 330 and drive the rotating seat 300 to rotate, and a rotary encoder in the driving motor can detect the revolution number of the rotor and convert the revolution number into the rotation angle of the rotating seat 300 through the controller, so that the driving motor is controlled to drive the rotating position of the rotating seat 300; on the other hand, the driving motor is mounted on the lower bearing beam 123 of the bearing seat body 120, and can limit the lower arm 330 of the rotating seat 300, so that the upper and lower parts of the rotating seat 300 are respectively limited by the rotating shaft 200 and the driving motor, the stability and the position accuracy of the circumferential rotation of the rotating seat 300 are improved, the occurrence of the condition that the top of the rotating seat 300 is easily deviated in the process of limited rotation of the rotating shaft 200 is reduced, and the calibration accuracy of the calibrating device 10 to the calibrating visual device 20 is correspondingly further improved.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention.
Claims (8)
1. A method for calibrating a vertically aligned vision device, comprising:
the visual device to be calibrated is arranged between an upper calibration point and a lower calibration point of the calibration device, and a rotating seat provided with the upper calibration point and the lower calibration point is rotated for N times, so that the rotating seat drives the upper calibration point and the lower calibration point to rotate to N rotating positions around a rotating shaft, wherein N is more than or equal to 2, N is an even number, and one of the N rotating positions is provided with another rotating position which is symmetrical to the other rotating position with respect to the axis of the rotating shaft; or, the N rotation positions are uniformly distributed at intervals along the axis of the rotation shaft; the upper calibration point corresponds to the lower calibration point up and down, and the rotating shaft of the rotating seat is vertically arranged;
Measuring the coordinates (x) of the upper calibration point when the rotating seat is positioned at the N rotating positions by the vision device to be calibrated Tn ，y Tn ) And the coordinates (x Bn ，y Bn ）；
According to group N (x Tn ，y Tn ) And (x) Bn ，y Bn ) The center coordinates (X) of the upper track circle formed by the rotation of the upper standard point are obtained TO ,Y TO ) And the lower standard point rotates to form the center coordinates (X BO ,Y BO ) Will (X) TO -X BO ，Y TO -Y BO ) Error to be calibrated (delta) as the vision device to be calibrated X ，δ Y ）；
Based on the obtained error (delta) X ，δ Y ) For the up-down alignment result (x Tn -x Bn ，y Tn -y Bn ) Compensating to obtain the up-down alignment result (x Tn -x Bn -δ X ，y Tn -y Bn -δ Y ）。
2. The calibration method according to claim 1, wherein N rotational positions are distributed in a dispersed manner along a circumferential direction of the rotational shaft; said method is based on N groups (x Tn ，y Tn ) And (x) Bn ，y Bn ) The center coordinates (X) of the upper track circle formed by the rotation of the upper standard point are obtained TO ,Y TO ) And the lower standard point rotates to form the center coordinates (X BO ,Y BO ) Comprises the following steps:
n groups (x) Tn ，y Tn ) Average value of (2)And N groups (x) Bn ，y Bn ) Mean value of>X is then TO =/>，Y TO =/>，X BO =/>，Y BO =/>Said error to be calibrated (delta X ，δ Y ) Is calculated as follows:
。
3. the calibration device is characterized in that the device is applied to the calibration method of claim 1 or 2, the calibration device (10) comprises a base (100) and a rotating seat (300) rotatably connected to the base (100) through a rotating shaft (200), the rotating seat (300) is provided with two calibration blocks which are arranged up and down, the bottom surface of one of the two calibration blocks positioned above is provided with an upper calibration point (341), the top surface of one of the calibration blocks positioned below is provided with a lower calibration point (351), and the lower calibration point (351) corresponds to the upper calibration point (341) up and down; the rotating shaft (200) is vertically arranged, and the base (100) is provided with a driving assembly (400) for driving the rotating seat (300) to rotate.
4. A calibration device according to claim 3, wherein at least one of the two calibration blocks is used as an adjusting calibration block, the rotating base (300) is provided with a mounting hole (361) and a locking member, the adjusting calibration block is matched and slidingly connected with the mounting hole (361) along the up-down direction, and the locking member is provided with a locking position for locking the adjusting calibration block to the mounting hole (361) and an adjusting position for allowing the adjusting calibration block to move up and down along the mounting hole (361).
5. The calibration device according to claim 4, wherein the adjustment calibration block is provided with a first waist-shaped hole (364) extending in the up-down direction, and the hole depth direction of the first waist-shaped hole (364) is a first horizontal direction; the locking piece comprises a locking screw (370), two opposite sides of the mounting hole (361) are respectively communicated with a locking threaded hole (363) and a penetrating through hole (362), the depth directions of the locking threaded hole (363) and the penetrating through hole (362) are consistent with the first horizontal direction, and a screw rod of the locking screw (370) penetrates through the first waist-shaped hole (364) to be in threaded connection with the locking threaded hole (363), and a screw head is accommodated in the penetrating through hole (362) and is abutted to the adjusting calibration block.
6. The calibration device according to claim 5, characterized in that, in the first horizontal direction, the locking threaded hole (363) is located downstream of the through hole (362); the width of the mounting hole (361) along the first horizontal direction is in a necking shape.
7. The calibration device according to claim 4, wherein the rotating seat (300) comprises an upper arm (310), a lower arm (330) and a connecting arm (320) connected therebetween, wherein one of the calibration blocks is provided as an upper calibration block (340) to the upper arm (310), the other calibration block is provided as a lower calibration block (350) to the lower arm (330), and at least the upper calibration block (340) is provided as an adjustment calibration block;
the rotating shaft (200) is rotatably connected between the upper arm (310) and the base (100), the bottom end of the rotating shaft (200) is provided with a containing groove (230), and the top end of the containing groove (230) is communicated with an adjusting threaded hole (240); the calibration device (10) further comprises an adjusting screw (260), a screw rod of the adjusting screw (260) is in threaded connection with the adjusting threaded hole (240), and the bottom end of the screw rod of the adjusting screw (260) penetrates through the accommodating groove (230) to be rotationally clamped with the upper calibration block (340).
8. The calibration device according to claim 4, wherein the base (100) comprises a fixed seat body (110) and a bearing seat body (120) connected to the fixed seat body (110), and the rotating shaft (200) is rotatably connected between the top of the rotating seat (300) and the bearing seat body (120);
the calibration device (10) further comprises a fixing screw (124), a second waist-shaped hole (121 a) extending along the vertical direction is formed in the side wall of the bearing seat body (120), a screw rod of the fixing screw (124) penetrates through the second waist-shaped hole (121 a) to be connected with the side wall of the fixed seat body (110) in a threaded mode, and a screw head is abutted to the outer end face of the second waist-shaped hole (121 a); the fixing seat body (110) is in threaded connection with an upper propping screw (113) and a lower propping screw (114), the bottom end of a screw rod of the upper propping screw (113) is propped against the top surface of the bearing seat body (120), and the top end of a screw rod of the lower propping screw (114) is propped against the bottom surface of the bearing seat body (120).
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| CN105216437A (en) * | 2015-11-05 | 2016-01-06 | 东莞市科隆威自动化设备有限公司 | Alignment light source image deviation adjustment self-calibration method |
| CN108155124A (en) * | 2017-12-25 | 2018-06-12 | 北京中电科电子装备有限公司 | A kind of chip attachment device and method |
| CN109141295A (en) * | 2018-09-29 | 2019-01-04 | 中国地震局第监测中心 | A kind of measuring device and its measurement method of Multi-stage rotary body coaxiality error |
| CN109950191A (en) * | 2019-03-20 | 2019-06-28 | 纳研科技(上海)有限公司 | A kind of vision system and alignment methods of double-sided alignment |
| WO2022062464A1 (en) * | 2020-09-27 | 2022-03-31 | 平安科技（深圳）有限公司 | Computer vision-based hand-eye calibration method and apparatus, and storage medium |
| CN115519533A (en) * | 2021-06-24 | 2022-12-27 | 广东博智林机器人有限公司 | Robot eye calibration method and device, robot and storage medium |
| CN113804128A (en) * | 2021-09-07 | 2021-12-17 | 西安交通大学 | Double-bearing-hole coaxiality error visual measurement device and measurement method |
| CN116313885A (en) * | 2022-12-07 | 2023-06-23 | 智慧星空(上海)工程技术有限公司 | Bonding device and double-sided alignment method |
| CN115799146A (en) * | 2023-01-30 | 2023-03-14 | 北京青禾晶元半导体科技有限责任公司 | Optical alignment system |
| CN116385551A (en) * | 2023-02-07 | 2023-07-04 | 北京华卓精科科技股份有限公司 | Vision system capable of in-situ calibration, recognition control method and device |
| CN116615020A (en) * | 2023-07-19 | 2023-08-18 | 合肥安迅精密技术有限公司 | Suction nozzle pose error calibration and compensation method and system based on machine vision |
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