CN116875954A - Equipment and method for preparing lithium battery composite current collector - Google Patents
Equipment and method for preparing lithium battery composite current collector Download PDFInfo
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- CN116875954A CN116875954A CN202311148622.4A CN202311148622A CN116875954A CN 116875954 A CN116875954 A CN 116875954A CN 202311148622 A CN202311148622 A CN 202311148622A CN 116875954 A CN116875954 A CN 116875954A
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- 239000002131 composite material Substances 0.000 title claims abstract description 33
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 title claims abstract description 29
- 229910052744 lithium Inorganic materials 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 44
- 238000000576 coating method Methods 0.000 claims abstract description 39
- 239000011248 coating agent Substances 0.000 claims abstract description 38
- 239000013077 target material Substances 0.000 claims abstract description 29
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 18
- 238000000151 deposition Methods 0.000 claims abstract description 16
- 238000005057 refrigeration Methods 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 38
- 238000001914 filtration Methods 0.000 claims description 36
- 238000005452 bending Methods 0.000 claims description 15
- 238000004804 winding Methods 0.000 claims description 13
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 6
- 238000007747 plating Methods 0.000 claims description 6
- 239000000498 cooling water Substances 0.000 claims description 5
- 238000003860 storage Methods 0.000 claims description 5
- 238000011049 filling Methods 0.000 claims description 3
- 238000011068 loading method Methods 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 230000009467 reduction Effects 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000002360 preparation method Methods 0.000 abstract description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 13
- 239000010949 copper Substances 0.000 description 11
- 229910052802 copper Inorganic materials 0.000 description 11
- 229910052782 aluminium Inorganic materials 0.000 description 10
- 238000001816 cooling Methods 0.000 description 9
- 230000017525 heat dissipation Effects 0.000 description 9
- 230000009471 action Effects 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 239000007888 film coating Substances 0.000 description 7
- 238000009501 film coating Methods 0.000 description 7
- 239000011149 active material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000005020 polyethylene terephthalate Substances 0.000 description 6
- 229920000139 polyethylene terephthalate Polymers 0.000 description 6
- 239000004743 Polypropylene Substances 0.000 description 4
- 239000011889 copper foil Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000007711 solidification Methods 0.000 description 3
- 230000008023 solidification Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 239000007773 negative electrode material Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000008093 supporting effect Effects 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses equipment and a method for preparing a lithium battery composite current collector, which relate to the field of lithium battery composite current collectors and comprise a vacuum cavity, a conveying component, a coating component and a refrigerating component, wherein the coating component comprises a crucible arranged at the inner bottom side of the vacuum cavity and an electron gun arranged corresponding to the crucible, and the conveying component is used for realizing the corresponding arrangement of a conveying base material and the crucible; the coating assembly further comprises a magnetron sputtering device, the magnetron sputtering device is used for ionizing and depositing the target material on the surface of the base material before the base material corresponds to the crucible, and the refrigerating assembly is used for reducing the temperature in the vacuum cavity. The invention aims to provide equipment and a method for preparing a lithium battery composite current collector, which have the advantages of strong temperature control, high product quality and high preparation speed.
Description
Technical Field
The invention belongs to the field of lithium battery composite current collectors, and particularly relates to equipment and a method for preparing a lithium battery composite current collector.
Background
The new energy power battery industry develops rapidly, and the copper foil serving as the negative electrode material of the power battery has great demand. For safety, the current copper foil manufacturing process has been developed to use PET composite copper foil, which can improve the energy density, safety and service life of the battery compared with conventional copper foil.
The composite current collector is of a sandwich structure, the inner layer is a polymer high molecular layer (such as PET, PP or PI), the two sides are metal conductive layers (such as Al or Cu), 4.5um OPP (polypropylene) is adopted as a base material in the composite current collector in industrial mass production, 50nm copper layers are firstly subjected to magnetron sputtering on the two sides of the base material, then water electroplating is carried out on the surfaces of the copper layers, and the copper layers are thickened to about 1um. And the composite aluminum foil generally adopts PET (polyethylene terephthalate) with 6um as a base material, and then each 1um aluminum layer is evaporated on two sides of the base material.
The prior art is named as composite current collector, manufacturing method, pole piece and lithium battery, and the publication number of the patent is WO2023103292A1. The invention comprises a first porous conductive sheet, a base material sheet and a second porous conductive sheet which are sequentially laminated and arranged, wherein the holes on the first porous conductive sheet and the second porous conductive sheet are micropores and uniformly distributed, the base material sheet is made of a high polymer insulating material, and the first porous conductive sheet and the second porous conductive sheet are conducted in a tab area. Micropores are formed on the surfaces of the first porous conducting plate and the second porous conducting plate, so that good adsorption acting force can be provided for the active materials. Secondly, as the micropores of the first porous conductive sheet and the second porous conductive sheet are uniformly distributed, on one hand, active materials can be uniformly distributed on the active materials when the active materials are attached to the active materials, and the formation of lithium crystal branches is well avoided; on the other hand, the composite current collector has a better buffering effect. Finally, the base material plate adopts a high-molecular insulating material, so that a good supporting effect can be provided to prevent deformation of the base material plate and also can insulate the active material. The invention has lower efficiency in preparation and insufficient temperature control.
Disclosure of Invention
The invention aims to provide equipment and a method for preparing a lithium battery composite current collector, which have the advantages of strong temperature control, high product quality and high preparation speed.
The technical scheme adopted by the invention for achieving the purpose is as follows:
the equipment for preparing the lithium battery composite current collector comprises a vacuum cavity, a conveying assembly, a coating assembly and a refrigerating assembly, wherein the coating assembly comprises a crucible arranged at the inner bottom side of the vacuum cavity and an electron gun arranged corresponding to the crucible, and the conveying assembly is used for realizing the corresponding arrangement of a conveying base material and the crucible;
the coating assembly further comprises a magnetron sputtering device, the magnetron sputtering device is used for ionizing and depositing the target material on the surface of the base material before the base material corresponds to the crucible, and the refrigerating assembly is used for reducing the temperature in the vacuum cavity.
The integrated device is used for preparing the lithium battery composite current collector, and the target material layers are coated on the surfaces of the two sides of the substrate. The electron gun arranged corresponding to the crucible can generate a large amount of electrons in the working process, the electron beams are gathered under the action of the magnetic lens, the spot beams with the length of about 1cm are focused on the surface of the crucible, a large amount of electrons bombard the target material in the crucible, the target material can be melted under certain energy, after reaching a certain evaporation point, the solid target material is melted to become liquid, and then the solid target material is changed to be gaseous to volatilize; the conveying assembly is used for realizing the corresponding arrangement of the conveying base material and the crucible, so that the gaseous volatilized target material can be solidified and deposited on the side surface of the base material in the conveying process of the base material, and then the required target material layer formed on the surface of the base film by solidification and deposition is realized, coating is realized, and the deposition efficiency can be greatly improved by the arrangement of the coating assembly. Through magnetron sputtering device, realize that the target ionization deposits on the substrate surface before substrate corresponds with the crucible, form certain structure and component and have high temperature resistant membrane and low stress film, improve substrate temperature resistance, reduce material stress simultaneously, promote to have ductility and have the temperature resistance simultaneously, when the follow-up high-power electron beam deposition target of reuse, the substrate can not receive too high heating and lead to the fold, can improve follow-up efficiency in the coating film in-process, improve the yields of whole device. The refrigeration assembly is used for realizing temperature reduction in the vacuum cavity.
The vacuum cavity is also provided with a molecular pump, before the whole device works, the vacuum cavity is required to be vacuumized by the molecular pump, so that after the vacuum degree in the vacuum cavity reaches the required pressure of 1E-3Pa, the magnetron sputtering device is started, ar gas is introduced, the vacuum degree is maintained to be 0.5Pa, after an electron gun is started, the working pressure of 5E-2Pa is met, the power of the power supply of the electron gun is set to 40kw, and at the moment, a large amount of energy generated by the electron gun is accumulated in a crucible, the copper or aluminum of an inner target is heated, and the copper or aluminum is evaporated on the surface of a temperature-resistant layer, and the thickness of the copper or aluminum is 1um. Under the condition of low pressure, the temperature transmission of gas can also be reduced, the temperature of the vacuum cavity can be prevented from rising too fast under the starting of the film coating component, and the situation that the efficiency is too low due to insufficient thickness of a target layer realized by solidifying and depositing a target material volatilized in a gaseous state on the side surface of a substrate is prevented.
According to one embodiment of the invention, a serpentine refrigeration pipeline is arranged in a top plate of the vacuum cavity, a refrigeration component is arranged on one side of the vacuum cavity, and the refrigeration component is connected with the refrigeration pipeline through a connecting pipeline;
the connecting pipeline is provided with a filtering component near the refrigerating pipeline.
Through the design, the snakelike refrigerating pipeline is arranged in the top plate body of the vacuum cavity and is connected with the refrigerating assembly, so that the overall temperature in the vacuum cavity is reduced and kept constant, the possibility of base material wrinkling is avoided or reduced, the thickness of the target layer realized by solidifying and depositing the gaseous volatilized target material on the side surface of the base material is improved, the solidifying and depositing speed of the target layer is high, and the coating efficiency and the coating quality of the overall device are improved. The filtering component is arranged at the position, close to the refrigerating pipeline, of the connecting pipeline, so that when the refrigerating medium enters the refrigerating pipeline, the situation that the refrigerating pipeline is blocked due to impurities contained in the refrigerating medium is prevented, and further the refrigerating efficiency is prevented from being reduced; in addition, the condition that impurities flow back to the compressor to cause compression damage can be prevented, so that purity of a refrigerating medium is guaranteed, a refrigerating effect is improved, and idle work of the compressor is reduced.
According to one embodiment of the invention, a bending connecting pipe is arranged between the connecting pipe and the refrigerating pipe, and the filtering component is rotatably arranged at one side of the bending connecting pipe close to the refrigerating pipe;
the filter assembly comprises a filter pipe, a filter hole is arranged on the filter pipe, a plurality of inclined rotating plates are arranged on one side, close to the refrigerating pipeline, of the filter pipe in a surrounding mode, and an extension auxiliary plate is arranged on one side of the rotating plates in an extending mode.
Through the design of the filter assembly, the filter assembly is rotatably arranged with the bending connecting pipe through the rotating plate, and a rotating groove or a bearing can be arranged at the connecting position of the bending connecting pipe and the filter assembly rotating plate to realize the rotation of the filter assembly; when the refrigerating medium passes through the refrigerating component and comes in the process of entering the refrigerating pipeline through the bending connecting pipe, the refrigerating medium can flow through and impact the filtering component, as the filtering component is rotatably arranged on one side of the bending connecting pipe close to the refrigerating pipeline, the refrigerating medium can enter the filtering pipe from the densely distributed filtering holes on the filtering pipe, the filtering and the flow distribution of the refrigerating medium can be realized, the rotating plate and the extension auxiliary plate can drive the filtering component to rotate when the refrigerating medium impacts, the flow distribution and the rotation of the refrigerating medium are realized, and the refrigerating medium can finally enter the refrigerating pipeline.
The filtering component can realize the filtration of the filtering medium, and the diversion of the filtering medium is realized through the filtering holes and the rotating plate, so that the diversion of the refrigerating medium can be realized to promote the heat exchange in the vacuum cavity, and meanwhile, the flow speed of the refrigerating medium in the pipeline can be reduced, and the heat exchange efficiency is further improved; the rotary plate and the extension auxiliary plate can realize the overshoot of the impact of the refrigeration medium, the filter assembly is driven to rotate, the vortex or turbulent flow of the refrigeration medium can be further promoted in the rotation process of the filter assembly, the refrigeration medium attached to the inner wall surface of the refrigeration pipeline can be driven under the driving of the vortex, the flow of the refrigeration medium can be further improved, and the heat exchange efficiency of the refrigeration medium in the refrigeration pipeline and the vacuum cavity is further realized.
According to one embodiment of the invention, one side of the filter tube is provided with a plurality of springs, and the other ends of the springs are connected with the bent connecting tube.
Through the design, when the refrigerating medium enters the filter pipe from the densely distributed filter holes on the filter pipe, impact force can be applied to the filter pipe, and the impact force can be relieved through the spring, so that the damage of the filter pipe is prevented; meanwhile, the limitation of the rotation amplitude of the filter assembly can be achieved through the arrangement of the springs, namely, when the filter assembly rotates to the limit position, the filter assembly returns under the action of the springs, the rotation amplitude flow speed is disturbed when the refrigerating medium flows to the filter assembly, and meanwhile, the rotation of the filter assembly can promote the deformation of the inner wall of the pipe body of the cooling pipeline, so that the flow track and the heat exchange area of the refrigerating medium are changed.
According to one embodiment of the invention, one side of the filter hole is provided with a filter plate in an extending and tilting mode, and the filter plate extends towards the inside of the filter pipe;
the filter plate and the extension auxiliary plate face the same direction.
Through the design, the filter plate can realize the filtration and the water conservancy diversion of the refrigerating medium that gets into from the filtration pore, and the water conservancy diversion can realize further improving filter assembly's rotation force, and the filter plate is the same with extension subplate orientation, can further improve the size to filter assembly's rotation force. Under the action of no spring, the turbulence or rotational flow degree of the subsequent refrigeration medium can be improved, and the subsequent heat exchange efficiency is improved; under the action of the spring, the rotation amplitude flow velocity is disturbed when the refrigerating medium flows to the filtering component, and meanwhile, the rotation of the filtering component can promote the deformation of the inner wall of the pipe body of the cooling pipeline, so that the flow track and the heat exchange area of the refrigerating medium are changed.
According to the embodiment of the invention, the refrigerating assembly comprises a mounting substrate, a compressor and a condensing assembly are arranged on the mounting substrate, the condensing assembly comprises radiating fins, a first fan is arranged on one side of each radiating fin, a connecting pipeline is arranged in a serpentine manner penetrating through the radiating fins for a plurality of times, the connecting pipeline is connected with the compressor, and a liquid storage dryer and an expansion valve are arranged on the connecting pipeline between the condensing assembly and the refrigerating pipeline;
the mounting substrate comprises a first plate body and a second plate body which are arranged at intervals, the first plate body is connected with the second plate body through a plurality of parallel connecting rods, at least one second fan is arranged on each connecting rod, and the second fans are arranged corresponding to the radiating fins.
Through the design, the refrigerating assembly is used for refrigerating the refrigerating medium in the refrigerating pipeline, so that the temperature of the vacuum cavity is reduced and is constant, the compressor in the refrigerating assembly is used for compressing the refrigerating medium, the radiating fins are used for radiating the refrigerating medium compressed by the compressor, and the radiating fins can be radiated by the first fan arranged on one side of the radiating fins; and a liquid storage dryer and an expansion valve are arranged on a connecting pipeline between the condensing assembly and the refrigerating pipeline, so that refrigeration of a refrigerating medium in the refrigerating pipeline can be realized, and the refrigerating medium in the refrigerating pipeline can return to the compressor again to realize circulation.
The second fan that is provided with on the connecting rod, and second fan and fin correspond the setting, and the direction of second fan sets up perpendicularly with the direction of first fan, can realize multi-direction heat dissipation, improves fin radiating rate, and the second fan can be realized upwards blowing from fin bottom simultaneously, and can strengthen fin and the dirt particle on the connecting pipe and break away from the effect, can prevent that the dust on fin and connecting pipe from leading to the circumstances emergence that heat exchange efficiency descends.
According to an embodiment of the invention, the conveying assembly comprises a cold drum, a winding assembly and an unreeling assembly, wherein the winding assembly comprises an unreeling roller which is connected with an output shaft of a first driving motor, the winding assembly is provided with a winding roller which is connected with an output shaft of a second driving motor, and cooling water is filled in the cold drum.
Through the design, the substrate is unreeled through the unreeling roller, guided by the cold roller and finally reeled by the reeling roller. The bottom side of the cold drum is correspondingly provided with the crucible, cooling water is filled in the cold drum, the temperature of the base material can be kept at a lower temperature, when the gaseous volatilized target material is attached to the base material, the thickness of the target material layer is uniform, meanwhile, the solidification and deposition speed of the target material layer is high, and the film coating efficiency and the film coating quality of the whole device are improved.
Further, a plurality of tension rollers are disposed on the transport path of the base material. The substrate is unreeled by the unreeling roller, and is finally reeled by the reeling roller after being redirected by a plurality of guide rollers and the guide of the cold roller. By the arrangement of the tension roller, the tension roller can provide tension for the base material, keep the initial state of the base material and avoid wave-shaped or curve-shaped deformation caused by the self gravity of the base material or other factors.
Furthermore, two cold drums are symmetrically arranged in the vacuum cavity, two crucibles and a film plating assembly which are arranged corresponding to the cold drums are arranged in the vacuum cavity, and the substrate is redirected through a plurality of tension rollers and the guiding of the two cold rollers, so that the film plating treatment on the upper surface and the lower surface of the substrate can be realized.
According to the embodiment of the invention, the side, close to the crucible, of the cold drum is symmetrically attached with guide plates, and the guide plates are used for limiting the coating range of the coating assembly.
Through the design, in the overshoot of the upward flow of the gaseous volatilizing target in the crucible direction, the gaseous volatilizing target is collected near the cold roller and limited at the inner sides of the two opposite drainage plates, so that the reaction effect of the gaseous volatilizing target on the cold roller can be increased, and the gaseous volatilizing target can be prevented from being diffused to other spaces.
According to an embodiment of the invention, the guide plate comprises an inner plate and an outer plate, which are connected by means of a hinge.
According to the design, the drainage plate is arranged as the inner plate and the outer plate, namely, the inner plate and the outer plate are separated by the interval distance, so that the temperature difference between the inner plate and the outer plate can be realized, the inner plate is relatively close to the cold roller, the adhesion of a gaseous volatilized target between the inner plate and the cold roller to a substrate is reduced, the outer plate is in a high-temperature environment and is not suitable for excessive low temperature, and the gaseous volatilized target is contacted with the surface of the low-temperature outer plate and is adhered to the surface of the outer plate at the low temperature; at the same time, the inner plate can be moved relative to the outer plate by means of the hinge, so that the gaseous volatilized target condenses particles or the like on the inner plate, which help to fall back down the inner plate into the crucible.
The invention also provides a method for preparing the lithium battery composite current collector, which comprises the following steps:
s1: loading the substrate into a conveying assembly and fixing the film to be plated according to the conveying sequence;
s2: filling a target material in the coating assembly;
s3: after the vacuum degree in the vacuum cavity reaches the required pressure;
s4: starting a magnetron sputtering device;
s5: the conveying assembly operates;
s6: starting a coating component;
s7: stopping the coating assembly after coating, and stopping the operation of the conveying assembly;
s8: and (5) removing the substrate and finishing coating.
Drawings
FIG. 1 is a schematic cross-sectional view of an apparatus for preparing a lithium battery composite current collector;
FIG. 2 is a schematic perspective cross-sectional view of a top plate body;
FIG. 3 is a schematic front half-section view of the top plate body;
FIG. 4 is a schematic cross-sectional view of a bent connection tube;
FIG. 5 is a schematic perspective view of a filter assembly;
FIG. 6 is another angular perspective view of the filter assembly;
FIG. 7 is a schematic perspective view of a refrigeration assembly;
FIG. 8 is a schematic front view of a refrigeration assembly;
fig. 9 is a schematic diagram of an apparatus for preparing a lithium battery composite current collector in example 2;
fig. 10 is a schematic diagram of a guide plate in embodiment 2.
Reference numerals: the vacuum chamber 1, the top plate 11, the refrigeration line 12, the refrigeration unit 2, the connection line 21, the bent connection pipe 211, the mounting substrate 22, the first plate 221, the second plate 222, the connection rod 223, the second fan 224, the compressor 23, the condensation unit 24, the heat dissipation fins 241, the first fan 242, the crucible 31, the electron gun 32, the magnetron sputtering device 33, the filter unit 4, the filter tube 41, the filter hole 42, the rotation plate 43, the extension sub-plate 44, the spring 45, the filter plate 46, the cooling drum 51, the unreeling roller 52, the wind-up roller 53, the guide plate 6, the inner plate 61, the outer plate 62, and the hinge 63.
Detailed Description
The technical scheme of the invention is further described in detail below with reference to the specific embodiments and the attached drawings:
example 1:
as shown in fig. 1-8, an apparatus for preparing a lithium battery composite current collector comprises a vacuum cavity 1, a transmission assembly and a coating assembly, wherein the coating assembly comprises a crucible 31 arranged at the inner bottom side of the vacuum cavity 1 and an electron gun 32 arranged corresponding to the crucible 31, and the transmission assembly is used for realizing that a transmission substrate is arranged corresponding to the crucible 31;
the coating assembly further includes a magnetron sputtering device 33, wherein the magnetron sputtering device 33 is used for realizing ionization and deposition of the target material on the surface of the substrate before the substrate corresponds to the crucible 31.
Through setting up to whole device, be used for preparing lithium cell composite current collector, realize the substrate both sides surface coating have target layer, the substrate usually selects polymer layer such as PET, PP or PI, and the target layer is usually metal conductive layer such as Al or Cu. The electron gun 32 which is arranged corresponding to the crucible 31 adopts a large-power electron gun 32 with about 100KW, a large amount of electrons can be generated in the working process, under the action of a magnetic lens, the electron beams are gathered, a spot beam with about 1cm is focused on the surface of the crucible 31, a large amount of electrons bombard a target material in the crucible 31, copper or metal aluminum is usually placed in the crucible 31, the target material can be melted under certain energy, and after reaching a certain evaporation point, the solid target material is melted to become liquid, and then becomes gaseous to volatilize; the conveying assembly is used for realizing the corresponding arrangement of the conveying base material and the crucible 31, so that the gaseous volatilized target material can be solidified and deposited on the side surface of the base material in the conveying process, and then the required target material layer, usually a copper film or an aluminum film of 1um, is formed on the surface of the base film in a solidifying and depositing manner, and the deposition efficiency can be greatly improved through the arrangement of the film coating assembly. Through the magnetron sputtering device 33, the target is ionized and deposited on the surface of the base material before the base material corresponds to the crucible 31, a certain structure and components are formed, the high-temperature-resistant film and the low-stress film are formed, the temperature resistance of the base material is improved, meanwhile, the stress of the material is reduced, the ductility is promoted, meanwhile, the temperature resistance of the PET base film is improved by 80-100 ℃, when the target is deposited by using a high-power electron beam subsequently, the base material is not heated too high to cause wrinkles, the efficiency of the subsequent coating process can be improved, and the yield of the whole device is improved.
The vacuum cavity 1 is also provided with a molecular pump, the molecular pump comprises a mechanical pump, a Roots pump and a cryopump at the back and is used for maintaining the pressure required by film plating in the cavity, before the whole device works, the vacuum cavity 1 needs to be vacuumized by the molecular pump, so that after the vacuum degree in the vacuum cavity 1 reaches the required pressure of 1E-3Pa, a magnetron sputtering device 33 is started, ar gas is introduced, the vacuum degree is maintained at 0.5Pa, after an electron gun 32 is started, the working pressure of 5E-2Pa is met, the power supply of the electron gun 32 is set at 40kw, and at the moment, a large amount of energy is generated by the electron gun 32 and accumulated in a crucible 31, copper or aluminum serving as an inner target is heated and evaporated on the surface of a temperature resistant layer, and the thickness is 1um. Under the condition of low pressure, the temperature transmission of gas can also be reduced, the temperature of the vacuum cavity 1 can be prevented from rising too fast under the starting of a film coating component, and the situation that the efficiency is too low due to insufficient thickness of a target layer realized by solidifying and depositing a target material volatilized in a gaseous state on the side surface of a substrate is prevented.
A serpentine refrigeration pipeline 12 is arranged in the top plate 11 of the vacuum cavity 1, a refrigeration component 2 is arranged on one side of the vacuum cavity 1, and the refrigeration component 2 is connected with the refrigeration pipeline 12 through a connecting pipeline 21;
the connecting line 21 is provided with a filter assembly 4 adjacent to the refrigeration line 12.
Through the design, the serpentine refrigeration pipeline 12 is arranged in the top plate body 11 of the vacuum cavity 1 and is connected with the refrigeration component 2, so that the overall temperature in the vacuum cavity 1 is reduced and kept constant, the possibility of wrinkling of a base material is avoided or reduced, the thickness of a target layer realized by solidifying and depositing a target material volatilized in a gaseous state on the side surface of the base material is improved to be uniform, the solidifying and depositing speed of the target layer is high, and the film plating efficiency and the film plating quality of the overall device are improved. The filter assembly 4 is arranged at the position, close to the refrigerating pipeline 12, of the connecting pipeline 21, so that when a refrigerating medium enters the refrigerating pipeline 12, the condition that a refrigerating pipeline is blocked due to impurities contained in the refrigerating medium can be prevented, and further the refrigerating efficiency can be prevented from being reduced; in addition, the condition that impurities flow back to the compressor 23 to cause compression damage can be prevented, so that the purity of a refrigerating medium is guaranteed, the refrigerating effect is improved, and the compressor 23 does idle work.
A bending connecting pipe 211 is arranged between the connecting pipe 21 and the refrigerating pipe 12, and the filter assembly 4 is rotatably arranged at one side of the bending connecting pipe 211 close to the refrigerating pipe 12;
the filter assembly 4 comprises a filter pipe 41, wherein a filter hole 42 is arranged on the filter pipe 41, a plurality of inclined rotating plates 43 are circumferentially arranged on one side of the filter pipe 41 close to the refrigeration pipeline 12 in an extending mode, and an extension auxiliary plate 44 is arranged on one side of the rotating plates 43 in an extending mode.
Through the design of the filter assembly 4, the filter assembly 4 is rotatably arranged with the bending connecting pipe 211 through the rotating plate 43, and a rotating groove or a bearing can be arranged at the interconnection part of the bending connecting pipe 211 and the filter assembly 4 rotating plate 43 to realize the rotation of the filter assembly 4; when the refrigerating medium is transferred through the refrigerating assembly 2, the refrigerating medium can flow through and impact the filtering assembly 4 in the process of entering the refrigerating pipeline 12 through the bending connecting pipe 211, and the filtering assembly 4 is rotatably arranged on one side of the bending connecting pipe 211 close to the refrigerating pipeline 12, so that the refrigerating medium can enter the filtering pipe 41 from the densely distributed filtering holes 42 on the filtering pipe 41, the filtering and the flow distribution of the refrigerating medium can be realized, the rotating plate 43 and the extension auxiliary plate 44 can drive the filtering assembly 4 to rotate when the refrigerating medium is impacted, the flow distribution and the rotation of the refrigerating medium are realized, and the refrigerating medium can finally enter the refrigerating pipeline 12.
The filtering component 4 can realize the filtration of the filtering media, and the diversion of the filtering media is realized through the filtering holes 42 and the rotating plate 43, so that the diversion of the refrigerating media can be realized to promote the heat exchange in the vacuum cavity 1, and meanwhile, the flow speed of the refrigerating media in the pipeline can be reduced, and the heat exchange efficiency is further improved; the rotating plate 43 and the extension auxiliary plate 44 can realize that the filter assembly 4 is driven to rotate in the overshoot of the impact of the refrigerating medium, the vortex or turbulent flow of the refrigerating medium can be further promoted in the rotating process of the filter assembly 4, the refrigerating medium attached to the inner wall surface of the refrigerating pipeline 12 can be driven under the driving of the vortex, the flowing of the refrigerating medium can be further improved, and the heat exchange efficiency of the refrigerating medium in the refrigerating pipeline 12 and the vacuum cavity 1 is further realized.
A plurality of springs 45 are arranged on one side of the filter tube 41, and the other ends of the springs 45 are connected with the bending connecting tube 211.
Through the design, when the refrigerating medium enters the filter tube 41 from the densely distributed filter holes 42 on the filter tube 41, an impact force is applied to the filter tube 41, and the impact force can be relieved through the spring 45, so that the filter tube 41 is prevented from being damaged; meanwhile, the limitation of the rotation amplitude of the filter assembly 4 can be achieved through the arrangement of the springs 45, namely, when the filter assembly 4 rotates to the limit position, the filter assembly returns under the action of the springs 45, the rotation amplitude and the flow speed are disturbed when the refrigerating medium flows to the filter assembly 4, and meanwhile, the rotation of the filter assembly 4 can promote the deformation of the inner wall of the pipe body of the cooling pipeline, so that the flow track and the heat exchange area of the refrigerating medium are changed.
A filter plate 46 is obliquely arranged on one side of the filter hole 42 in an extending way, and the filter plate 46 extends towards the inside of the filter tube 41;
the filter sheet 46 is oriented the same as the extension sub-sheet 44.
Through the design, the filter plate 46 can realize the filtration and the diversion of the refrigerating medium entering from the filter holes 42, the diversion can realize the further improvement of the rotation force of the filter assembly 4, the filter plate 46 and the extension auxiliary plate 44 face the same direction, and the rotation force of the filter assembly 4 can be further improved. Under the action of the spring 45, the turbulence or rotational flow degree of the subsequent refrigeration medium can be improved, and the efficiency of the subsequent heat exchange is improved; under the action of the spring 45, the rotation amplitude flow speed is disturbed when the refrigerating medium flows to the filtering component 4, and meanwhile, the rotation of the filtering component 4 can promote the deformation of the inner wall of the pipe body of the cooling pipeline, so that the flow track and the heat exchange area of the refrigerating medium are changed.
The refrigerating assembly 2 comprises a mounting substrate 22, a compressor 23 and a condensing assembly 24 are arranged on the mounting substrate 22, the condensing assembly 24 comprises a radiating fin 241, a first fan 242 is arranged on one side of the radiating fin 241, a connecting pipeline 21 is arranged in a serpentine manner penetrating through the radiating fin 241 for many times, the connecting pipeline 21 is connected with the compressor 23, and a liquid storage dryer and an expansion valve are arranged on the connecting pipeline 21 between the condensing assembly 24 and the refrigerating pipeline 12;
the mounting substrate 22 includes a first plate 221 and a second plate 222 disposed at intervals, the first plate 221 and the second plate 222 are connected by a plurality of parallel connecting rods 223, at least one second fan 224 is disposed on the connecting rods 223, and the second fan 224 is disposed corresponding to the heat dissipation fins 241.
Through the design, the refrigeration component 2 is used for refrigerating the refrigeration medium in the refrigeration pipeline 12, so that the temperature of the vacuum cavity 1 is reduced and is constant, the compressor 23 in the refrigeration component 2 is used for compressing the refrigeration medium, the heat dissipation fins 241 are used for heat dissipation treatment of the refrigeration medium compressed by the compressor 23, and the heat dissipation treatment of the heat dissipation fins 241 can be realized by the first fans 242 arranged on one sides of the heat dissipation fins 241; and a liquid storage dryer and an expansion valve are arranged on a connecting pipeline 21 between the condensing assembly 24 and the refrigerating pipeline 12, so that refrigeration of a refrigerating medium in the refrigerating pipeline 12 can be realized, and the refrigerating medium in the refrigerating pipeline 12 can flow back to the compressor 23 again to realize circulation.
The second fan 224 that is provided with on the connecting rod 223, and second fan 224 corresponds the setting with radiating fin 241, and the direction of second fan 224 sets up perpendicularly with the direction of first fan 242, can realize multi-direction heat dissipation, improves radiating fin 241 radiating rate, and the second fan 224 can realize upwards blowing from radiating fin 241 bottom simultaneously, and can strengthen the dust particle separation effect on radiating fin 241 and the connecting line 21, can prevent that the dust on radiating fin 241 and connecting line 21 from leading to the condition emergence that heat transfer efficiency descends.
The conveying assembly comprises a cold drum 51, a winding assembly and an unreeling assembly, the winding assembly comprises an unreeling roller 52 which is connected with an output shaft of a first driving motor, the winding assembly is provided with a winding roller 53 which is connected with an output shaft of a second driving motor, and cooling water is filled in the cold drum 51.
With the above design, the substrate is unwound by the unwinding roller 52, guided by the cooling roller, and finally wound up by the winding roller 53. The bottom side of the cold drum 51 is correspondingly arranged with the crucible 31, cooling water is filled in the cold drum 51, the temperature of the base material can be kept at a lower temperature, the thickness of the target material layer which is volatilized in the gas state can be uniform when the target material is attached to the base material, the solidification and deposition speed of the target material layer is high, and the film coating efficiency and the film coating quality of the whole device are improved.
Further, a plurality of tension rollers are disposed on the transport path of the base material. The substrate is unwound by the unwinding roller 52, redirected by a plurality of guide rollers and a chill roll, and finally wound up by the winding roller 53. By the arrangement of the tension roller, the tension roller can provide tension for the base material, keep the initial state of the base material and avoid wave-shaped or curve-shaped deformation caused by the self gravity of the base material or other factors.
Furthermore, two cooling drums 51 are symmetrically arranged in the vacuum cavity 1, two crucibles 31 and coating components corresponding to the cooling drums 51 are arranged, and the substrate is redirected by a plurality of tension rollers and two cooling rollers, so that the coating treatment on the upper surface and the lower surface of the substrate can be realized.
The cold drum 51 is close to crucible 31 one side symmetry laminating and is equipped with guide board 6, and guide board 6 is used for limiting the coating film scope of coating film subassembly.
Through the design, in the overshoot of the upward flow of the gaseous volatilizing target in the direction of the crucible 31 can be realized by the guide plate, the gaseous volatilizing target is collected near the cold roller and is limited at the inner sides of the two opposite flow guiding plates, so that the reaction effect of the gaseous volatilizing target on the cold roller can be increased, and meanwhile, the gaseous volatilizing target can be prevented from being diffused to other spaces.
The invention also provides a method for preparing the lithium battery composite current collector, which comprises the following steps:
s1: loading the substrate into a conveying assembly and fixing the film to be plated according to the conveying sequence;
s2: filling a target material in the coating assembly;
s3: after the vacuum degree in the vacuum cavity 1 reaches the required pressure;
s4: starting the magnetron sputtering device 33;
s5: the conveying assembly operates;
s6: starting a coating component;
s7: stopping the coating assembly after coating, and stopping the operation of the conveying assembly;
s8: and (5) removing the substrate and finishing coating.
Example 2:
as shown in fig. 9 and 10, an apparatus for manufacturing a lithium battery composite current collector according to another embodiment of the present invention is different from example 1 in that a guide plate 6 includes an inner plate 61 and an outer plate 62, and the inner plate 61 and the outer plate 62 are connected by a hinge 63.
According to the design, the drainage plate is set as the inner plate 61 and the outer plate 62, namely, the inner plate 61 and the outer plate 62 have a spacing distance, so that the temperature difference between the inner plate 61 and the outer plate 62 can be realized, the inner plate 61 is relatively close to the cold roller, the adhesion of the gaseous volatilized target between the inner plate 61 and the cold roller to the substrate is reduced, the outer plate 62 is in a high-temperature environment and is not suitable for excessive low temperature, and the gaseous volatilized target is contacted with the surface of the low-temperature outer plate 62 at low temperature and is adhered to the surface of the outer plate 62; at the same time, the inner plate 61 can be moved relative to the outer plate 62 by the hinge 63, so that the particles or the like of the target material evaporated in the gas condensed on the inner plate 61 help to fall back down the inner plate 61 to the crucible 31.
While the foregoing embodiments have been described in detail in connection with the embodiments of the invention, it should be understood that the foregoing embodiments are merely illustrative of the invention and are not intended to limit the invention, and any modifications, additions, substitutions and the like made within the principles of the invention are intended to be included within the scope of the invention.
Claims (10)
1. The equipment for preparing the lithium battery composite current collector comprises a vacuum cavity (1), a conveying assembly, a coating assembly and a refrigerating assembly (2), wherein the coating assembly comprises a crucible (31) arranged at the inner bottom side of the vacuum cavity (1) and an electron gun (32) arranged corresponding to the crucible (31), and the conveying assembly is used for realizing the corresponding arrangement of a conveying base material and the crucible (31);
the vacuum sputtering device is characterized in that the film plating assembly further comprises a magnetron sputtering device (33), the magnetron sputtering device (33) is used for realizing ionization and deposition of a target on the surface of the base material before the base material corresponds to the crucible (31), and the refrigerating assembly (2) is used for realizing temperature reduction in the vacuum cavity (1).
2. The device for preparing the lithium battery composite current collector according to claim 1, wherein a serpentine refrigeration pipeline (12) is arranged in a top plate body (11) of the vacuum cavity (1), a refrigeration component (2) is arranged on one side of the vacuum cavity (1), and the refrigeration component (2) is connected with the refrigeration pipeline (12) through a connecting pipeline (21);
the connecting pipeline (21) is provided with a filtering component (4) close to the refrigerating pipeline (12).
3. The device for preparing the lithium battery composite current collector according to claim 2, wherein a bending connecting pipe (211) is arranged between the connecting pipe (21) and the refrigerating pipe (12), and the filtering component (4) is rotatably arranged at one side of the bending connecting pipe (211) close to the refrigerating pipe (12);
the filter assembly (4) comprises a filter pipe (41), a filter hole (42) is formed in the filter pipe (41), a plurality of inclined rotating plates (43) are arranged on one side, close to the refrigerating pipeline (12), of the filter pipe (41) in a surrounding mode, and extension auxiliary plates (44) are arranged on one side of the rotating plates (43) in an extending mode.
4. A device for preparing a lithium battery composite current collector according to claim 3, wherein a plurality of springs (45) are arranged on one side of the filter tube (41), and the other ends of the springs (45) are connected with a bent connecting tube (211).
5. The device for preparing the lithium battery composite current collector according to claim 3 or 4, wherein a filter plate (46) is obliquely arranged at one side of the filter hole (42), and the filter plate (46) is arranged in a manner of extending towards the filter tube (41);
the filter plate (46) is oriented in the same direction as the extension sub-plate (44).
6. The equipment for preparing the lithium battery composite current collector according to claim 2, wherein the refrigerating assembly (2) comprises a mounting substrate (22), a compressor (23) and a condensing assembly (24) are arranged on the mounting substrate (22), the condensing assembly (24) comprises a radiating fin (241), a first fan (242) is arranged on one side of the radiating fin (241), the connecting pipeline (21) is arranged in a serpentine manner penetrating through the radiating fin (241) for a plurality of times, the connecting pipeline (21) is connected with the compressor (23), and a liquid storage drier and an expansion valve are arranged on the connecting pipeline (21) between the condensing assembly (24) and the refrigerating pipeline (12);
the mounting substrate (22) comprises a first plate body (221) and a second plate body (222) which are arranged at intervals, wherein the first plate body (221) and the second plate body (222) are connected through a plurality of connecting rods (223) which are arranged in parallel, at least one second fan (224) is arranged on each connecting rod (223), and the second fans (224) are arranged corresponding to the radiating fins (241).
7. The equipment for preparing the lithium battery composite current collector according to claim 1, wherein the conveying assembly comprises a cold drum (51), a winding assembly and an unwinding assembly, the unwinding assembly comprises an unwinding roller (52) connected with an output shaft of a first driving motor, the winding assembly is provided with a winding roller (53) connected with an output shaft of a second driving motor, and cooling water is filled in the cold drum (51).
8. The device for preparing the lithium battery composite current collector according to claim 7, wherein guide plates (6) are symmetrically attached to one side of the cold drum (51) close to the crucible (31).
9. The equipment for preparing a lithium battery composite current collector according to claim 8, characterized in that the guide plate (6) comprises an inner plate (61) and an outer plate (62), the inner plate (61) and the outer plate (62) being connected by a hinge (63).
10. A method for preparing a lithium battery composite current collector, comprising the steps of:
s1: loading the substrate into a conveying assembly and fixing the film to be plated according to the conveying sequence;
s2: filling a target material in the coating assembly;
s3: after the vacuum degree in the vacuum cavity (1) reaches a set pressure value;
s4: starting a magnetron sputtering device (33);
s5: the conveying assembly operates;
s6: starting a coating component;
s7: stopping the coating assembly, stopping the magnetron sputtering device (33), and stopping the transmission assembly after coating;
s8: and (5) removing the substrate and finishing coating.
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| CN202311148622.4A CN116875954A (en) | 2023-09-07 | 2023-09-07 | Equipment and method for preparing lithium battery composite current collector |
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| CN202311148622.4A CN116875954A (en) | 2023-09-07 | 2023-09-07 | Equipment and method for preparing lithium battery composite current collector |
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