CN116852265A - Sand filtering equipment in wafer grinding production - Google Patents
Sand filtering equipment in wafer grinding production Download PDFInfo
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- CN116852265A CN116852265A CN202311089533.7A CN202311089533A CN116852265A CN 116852265 A CN116852265 A CN 116852265A CN 202311089533 A CN202311089533 A CN 202311089533A CN 116852265 A CN116852265 A CN 116852265A
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- Prior art keywords
- sand
- sealed cabin
- grinding
- filtering
- filter screen
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- 239000004576 sand Substances 0.000 title claims abstract description 150
- 238000000227 grinding Methods 0.000 title claims abstract description 97
- 238000001914 filtration Methods 0.000 title claims abstract description 68
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 26
- 239000012535 impurity Substances 0.000 claims abstract description 32
- 238000004140 cleaning Methods 0.000 claims abstract description 28
- 238000011084 recovery Methods 0.000 claims abstract description 18
- 238000004064 recycling Methods 0.000 claims abstract description 12
- 108010066057 cabin-1 Proteins 0.000 claims description 26
- 230000001360 synchronised effect Effects 0.000 claims description 26
- 239000007921 spray Substances 0.000 claims description 22
- 230000003014 reinforcing effect Effects 0.000 claims description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- 239000007788 liquid Substances 0.000 claims description 8
- 239000002775 capsule Substances 0.000 claims description 5
- 238000005498 polishing Methods 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000007711 solidification Methods 0.000 abstract description 3
- 230000008023 solidification Effects 0.000 abstract description 3
- 230000000903 blocking effect Effects 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 17
- 239000000758 substrate Substances 0.000 description 4
- 239000002699 waste material Substances 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/04—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of solid grinding, polishing or lapping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Filtration Of Liquid (AREA)
Abstract
The application relates to sand filtering equipment in wafer grinding production, which comprises the following components: the top of the sealed cabin is provided with a grinding sand input port; the sand filtering mechanism is arranged in the sealed cabin and is positioned below the grinding sand input port, and the driving mechanism drives the sand filtering mechanism to rotate so as to efficiently filter the input grinding sand; the grinding sand recycling mechanism is arranged in the sealed cabin and positioned in the middle of the sand filtering mechanism and is used for receiving the grinding sand filtered by the sand filtering mechanism; and the cleaning mechanism is arranged in the sealed cabin and is used for cleaning the sand filtering mechanism. The application can realize the recovery of the grinding sand, prevent the solidification of the grinding sand, filter the discharge of impurities, and wash the filter screen to prevent the filter screen from blocking holes.
Description
Technical Field
The application relates to the technical field of semiconductor substrate production and manufacturing, in particular to sand filtering equipment in wafer grinding production.
Background
With the rapid development of the semiconductor industry, the domestic demand for wafers is continuously increasing; the wafer is an integral part of the substrate of the semiconductor. One of the most important rings in wafer fabrication processes is the polishing process, and the media currently used in polishing processes are mainly polishing sand, which is mainly dependent on importation. With the rapid development of the electronic industry, the integrated level of an Integrated Circuit (IC) taking monocrystalline silicon as a substrate is higher and higher, the grinding of the monocrystalline silicon (wafer) is a basis for ensuring the parallelism and the flatness of the substrate, the performance of grinding sand in the grinding is a basis for ensuring the quality and the efficiency of the wafer, and the research on the grinding performance at home and abroad is receiving more and more attention.
The ordering period of the existing grinding sand is prolonged, the price is always increased, and the cost and the productivity of the domestic wafer manufacturing enterprises are greatly influenced. And the production and manufacturing process of the grinding sand is complex, the difficulty is high, the productivity is low, and few manufacturers related to the research, development and production of the grinding sand are involved in China at present. The grinding sand after each grinding in the conventional wafer grinding adopts direct discharge and waste treatment, so that great waste is caused.
Disclosure of Invention
In view of the above problems, an object of the present application is to provide a sand filtering apparatus in wafer grinding production, which can realize recovery of grinding sand, prevent solidification of the grinding sand, filter discharge of impurities, and flush a filter screen to prevent clogging of the filter screen.
In order to achieve the above purpose, the present application adopts the following technical scheme: a sand filtering apparatus in wafer grinding production, comprising: the top of the sealed cabin is provided with a grinding sand input port; the sand filtering mechanism is arranged in the sealed cabin and is positioned below the grinding sand input port, and the driving mechanism drives the sand filtering mechanism to rotate so as to efficiently filter the input grinding sand; the grinding sand recycling mechanism is arranged in the sealed cabin and positioned in the middle of the sand filtering mechanism and is used for receiving the grinding sand filtered by the sand filtering mechanism; and the cleaning mechanism is arranged in the sealed cabin and is used for cleaning the sand filtering mechanism.
Further, a top cabin cover is arranged at the top of the sealed cabin, and the top cabin cover is in sealing connection with the top of the sealed cabin; the grinding sand input port is arranged on the top cabin cover. A liquid level meter is also arranged at the top of the sealed cabin.
Further, reinforcing plates are arranged on two sides of the sealed cabin respectively and used for installing a grinding sand recovery mechanism, a driving mechanism and a cleaning mechanism.
Further, the sand filtering mechanism comprises a driving shaft, a driven shaft, a synchronous belt and a filter screen;
the driving shaft and the two driven shafts are arranged in the sealed cabin in a penetrating way, the end parts of the driving shaft and the driven shafts are arranged on the reinforcing plates on the two sides of the sealed cabin in a penetrating way, and the driving shaft and the two driven shafts are arranged in a triangular way on the reinforcing plates; the two ends of the driving shaft are respectively and coaxially provided with a driving wheel, the two ends of each driven shaft are respectively and coaxially provided with a driven wheel, and the driving wheel and the driven wheels are both positioned on the inner side wall of the reinforcing plate; synchronous belts are arranged on the driving wheel and the two driven wheels of each side reinforcing plate, and synchronous transmission connection is carried out by the synchronous belts; a filter screen is arranged between the synchronous belts at two sides, and rotates along with the synchronous belts to filter the falling grinding sand.
Further, the driving shaft is located below the driven shafts, and the two driven shafts are located on the same horizontal line, so that the filter screen moving to the top is always in a horizontal plane, and the horizontal plane is located right below the grinding sand input port.
Further, the grinding sand recycling mechanism comprises a sloping cam plate and a filtering grinding sand discharge outlet; the swash plate is arranged in the sealed cabin, and two ends of the swash plate are positioned in a triangular space formed by the synchronous belt and fixed on the side wall of the sealed cabin; the sloping cam plate is located under the filter screen, and is used for receiving the grinding sand filtered by the top filter screen; and a filtering abrasive sand outlet communicated with the swash plate is arranged on one side wall of the sealed cabin, and abrasive sand in the swash plate flows out to the outside through the filtering abrasive sand outlet.
Further, the cross section of the swash plate is inclined from the side of the capsule to the side where the filtering abrasive sand discharge port is provided, in a V-shaped structure.
Further, the cleaning mechanism comprises a spray pipe and a spray water inlet for cleaning the filter screen; the spray pipe is arranged in the sealed cabin, and two ends of the spray pipe are positioned in a triangular space formed by the synchronous belt and fixed on the side wall of the sealed cabin; the shower is located the below of sloping cam plate, and the one end of shower and the washing filter screen spray water input port intercommunication that sets up on sealed cabin 1 lateral wall.
Further, the device also comprises an impurity recovery mechanism, wherein the impurity recovery mechanism comprises an impurity discharge port and a recovery barrel; the impurity outlet is arranged at the bottom of the sealed cabin, and the recycling bin is positioned at the bottom of the impurity outlet.
Further, a support frame is arranged below the sealed cabin.
Due to the adoption of the technical scheme, the application has the following advantages:
1. the grinding sand after filtering and grinding can be reused after being proportioned for the second time, so that the cost of wafer grinding production is reduced, and the grinding efficiency is improved.
2. The application can effectively reduce the pollution discharge amount and effectively filter impurities for centralized treatment.
Drawings
FIG. 1 is a schematic diagram of a sand filtering apparatus in wafer polishing production according to an embodiment of the present application;
FIG. 2 is a schematic diagram showing an exploded structure of a sand filtering apparatus in wafer polishing in accordance with an embodiment of the present application;
reference numerals:
1. sealing the cabin; 2, grinding sand input port; 3. a roof hatch; 4. a liquid level gauge; 5. a reinforcing plate; 6. a driving shaft; 7. a driven shaft; 8. a synchronous belt; 9. a speed regulating motor; 10. a swash plate; 11. a filtering abrasive sand outlet; 12. a shower pipe; 13. cleaning a spray water inlet of a filter screen; 14. an impurity discharge port; 15. an equipment frame; 16. fu Ma Lun.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present application. It will be apparent that the described embodiments are some, but not all, embodiments of the application. All other embodiments, which are obtained by a person skilled in the art based on the described embodiments of the application, fall within the scope of protection of the application.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
In order to solve the problem of great waste caused by direct discharge and waste treatment of grinding sand after each grinding in the conventional wafer grinding, the application provides sand filtering equipment in wafer grinding production, which comprises: the top of the sealed cabin is provided with a grinding sand input port; the sand filtering mechanism is arranged in the sealed cabin and is positioned below the grinding sand input port, and the driving mechanism drives the sand filtering mechanism to rotate so as to efficiently filter the input grinding sand; the grinding sand recycling mechanism is arranged in the sealed cabin and positioned in the middle of the sand filtering mechanism and is used for receiving the grinding sand filtered by the sand filtering mechanism; and the cleaning mechanism is arranged in the sealed cabin and is used for cleaning the sand filtering mechanism. The application can realize the recovery of the grinding sand, prevent the solidification of the grinding sand, filter the discharge of impurities, and wash the filter screen to prevent the filter screen from blocking holes.
In one embodiment of the application, a sand filtering apparatus in wafer polishing production is provided. In this embodiment, as shown in fig. 1 and 2, the sand filtering apparatus includes:
the sealed cabin 1 is made of transparent materials, and the top of the sealed cabin is provided with a grinding sand input port 2 for inputting the grinding sand after use (namely after grinding) into the sealed cabin 1;
the sand filtering mechanism is arranged in the sealed cabin 1, is positioned below the grinding sand input port 2, and is driven by the driving mechanism to rotate so as to efficiently filter the input grinding sand;
the grinding sand recycling mechanism is arranged in the sealed cabin 1 and positioned in the middle of the sand filtering mechanism and is used for receiving the grinding sand filtered by the sand filtering mechanism;
and the cleaning mechanism is arranged in the sealed cabin 1 and is used for cleaning the sand filtering mechanism, and the sand filtering mechanism is blocked by impurities.
When the sand filter is used, the ground sand enters the sealed cabin 1 from the grinding sand input port 2, falls into the sand filter mechanism, and is efficiently filtered by the sand filter mechanism and is recovered by the grinding sand recovery mechanism; when the sand filtering mechanism filters, the cleaning mechanism cleans the sand filtering mechanism in real time, so that the sand filtering mechanism is effectively prevented from being blocked by impurities in the ground grinding sand, and the grinding sand can be prevented from being solidified.
In the above embodiment, the top of the sealed cabin 1 is provided with the top cabin cover 3, and the top cabin cover 3 is in sealing connection with the top of the sealed cabin 1; the grinding sand input port 2 is provided on the top cover 3.
In the above embodiment, the two sides of the sealed cabin 1 are further provided with the reinforcing plates 5, respectively, for installing the abrasive sand recovery mechanism, the driving mechanism and the cleaning mechanism, and the bearing capacity and the stability of the sealed cabin 1 can be effectively enhanced through the reinforcing plates 5.
In the above embodiment, the sand filtering mechanism comprises a driving shaft 6, a driven shaft 7, a synchronous belt 8 and a filter screen. In this embodiment, two driven shafts 7 are adopted, the driving shaft 6 and the two driven shafts 7 are penetrated in the sealed cabin 1, the ends of the driving shaft 6 and the driven shafts 7 are penetrated on the reinforcing plates 5 on two sides of the sealed cabin 1, and the driving shaft 6 and the two driven shafts 7 are arranged in a triangle on the reinforcing plates 5. The two ends of the driving shaft 6 are respectively and coaxially provided with a driving wheel, the two ends of each driven shaft 7 are respectively and coaxially provided with driven wheels, and the driving wheel and the driven wheels are both positioned on the inner side wall of the reinforcing plate 5; and the driving wheel and the two driven wheels of each side reinforcing plate 5 are provided with synchronous belts 8, and the synchronous belts 8 are connected in a synchronous transmission way. A filter screen is arranged between the synchronous belts 8 positioned at two sides, and the filter screen rotates along with the synchronous belts 8, so that the falling grinding sand is filtered.
In this embodiment, the driving shaft 6 is located below, the two driven shafts 7 are located above, and the two driven shafts 7 are located on the same horizontal line, so as to ensure that the filter screen moving to the top is always a horizontal plane, and the horizontal plane is located under the abrasive sand input port 2, so as to ensure that all the entered abrasive sand is received and filtered with high efficiency.
In this embodiment, the filter screen is a 600 mesh thin filter screen, so as to effectively filter out impurities in the abrasive sand.
In the above embodiment, the driving mechanism may adopt a speed-adjusting motor 9, which is disposed outside the sealed cabin 1 and is fixed outside the reinforcing plate 5 through a motor base. An output shaft of the speed regulating motor 9 is coaxially connected with one end of the driving shaft 6 so as to drive the driving shaft 6 to rotate.
In the above embodiment, the abrasive sand recovery mechanism includes the swash plate 10 and the filtered abrasive sand discharge port 11. The swash plate 10 is arranged in the sealed cabin 1, and two ends of the swash plate 10 are positioned in a triangular space formed by the synchronous belt 8 and fixed on the side wall of the sealed cabin 1. The sloping cam plate 10 is located under the filter screen, and is used for receiving the grinding sand filtered by the top filter screen; a filtering grinding sand outlet 11 communicated with the swash plate 10 is arranged on one side wall of the sealed cabin 1, and grinding sand in the swash plate 10 flows out to an external stirring sand receiving barrel through the filtering grinding sand outlet 11 so as to be reused after secondary proportioning.
In the present embodiment, the cross section of the swash plate 10 is inclined from the side of the capsule 1 to the side where the filtering abrasive sand discharge port 11 is provided, in a V-shaped structure.
Wherein the inclination angle of the swash plate 10 is 8 to 12. In the present embodiment, the inclination angle of the swash plate 10 is preferably 10 °.
In the above embodiment, the top of the sealed cabin 1 is also provided with a liquid level meter 4; when the device is used, when the filter grinding sand discharge port 11 is blocked due to too many impurities, the cleaning mechanism is always in a spray cleaning working state, so that more and more cleaning liquid is sprayed in the sealed cabin 1, the liquid level meter 4 is used for detecting the amount of the cleaning liquid output by the cleaning mechanism in the sealed cabin 1, and if the amount exceeds a preset liquid level line, alarm processing is needed.
In the above embodiment, the cleaning mechanism includes the shower pipe 12 and the cleaning screen shower water input port 13. The spray pipe 12 is arranged in the sealed cabin 1, and two ends of the spray pipe 12 are positioned in a triangular space formed by the synchronous belt 8 and fixed on the side wall of the sealed cabin 1. The shower 12 is located the below of sloping cam plate 10, and the one end of shower 12 communicates with the washing filter screen spray water input port 13 that sets up on sealed cabin 1 lateral wall, and spray water gets into shower 12 through washing filter screen spray water input port 13 in, and then washs the filter screen by shower 12, avoids the filter screen to be blocked by impurity.
In this embodiment, the shower pipe 12 is provided with a plurality of dense small holes to spray shower water onto the filter screen for cleaning.
In the above embodiment, the sand filtering device of the present application further includes an impurity recovery mechanism; the impurity recovery mechanism includes an impurity discharge port 14 and a recovery tank. The impurity outlet 14 is arranged at the bottom of the sealed cabin 1, the recycling bin is arranged at the bottom of the impurity outlet 14, impurities filtered by the filter screen fall into the bottom of the sealed cabin 1, and then the impurities are discharged into the recycling bin through the impurity outlet 14.
In the above embodiment, a support frame 15 is further provided below the capsule 1. The bottom of the capsule 1 is fixed to the support frame 15 and the recovery tank can be placed in the support frame 15.
In this embodiment, in order to facilitate movement of the apparatus, the fuma wheels 16 are provided at the bottom four corners of the support frame 15.
In summary, when the application is used, the sand discharge port of the grinder is in butt joint with the sand input port 2; abutting the spray water with a spray water inlet 13 of the cleaning filter screen; abutting the stirring sand receiving barrel with the filtering grinding sand discharge port 11; the recycling bin is interfaced with the impurity outlet 14 through a drain. The equipment is electrified and started, a speed regulating motor 9 drives a synchronous belt 8 and a filter screen to rotate through a driving shaft 6 and a driven shaft 7, ground grinding sand enters from a grinding sand input port 2 and falls into the filter screen, the grinding sand falls onto a sloping cam plate 10 after being filtered by the filter screen, flows out through a filtering grinding sand discharge port 11 communicated with the sloping cam plate 10, enters a stirring sand receiving barrel to wait for secondary proportioning, is equipped after the filtering grinding sand reaches the proportioning amount, and puts the proportioned and mixed grinding sand into subsequent production; the filter screen continues to rotate, impurities filtered by the filter screen fall into the impurity outlet 14, and the spray pipe 12 always sprays clear water to the filter screen during the rotation of the filter screen to clean the impurities remained on the filter screen.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present application, and are not limiting; although the application has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present application.
Claims (10)
1. Sand filtering equipment in wafer grinding production, characterized by comprising:
the top of the sealed cabin is provided with a grinding sand input port;
the sand filtering mechanism is arranged in the sealed cabin and is positioned below the grinding sand input port, and the driving mechanism drives the sand filtering mechanism to rotate so as to efficiently filter the input grinding sand;
the grinding sand recycling mechanism is arranged in the sealed cabin and positioned in the middle of the sand filtering mechanism and is used for receiving the grinding sand filtered by the sand filtering mechanism;
and the cleaning mechanism is arranged in the sealed cabin and is used for cleaning the sand filtering mechanism.
2. The sand filtering device in the wafer grinding production of claim 1, wherein a top cabin cover is arranged at the top of the sealed cabin, and the top cabin cover is in sealing connection with the top of the sealed cabin; the grinding sand input port is arranged on the top cabin cover. A liquid level meter is also arranged at the top of the sealed cabin.
3. The sand filtering device in the wafer grinding production according to claim 2, wherein the two sides of the sealed cabin are respectively provided with a reinforcing plate for installing a grinding sand recovery mechanism, a driving mechanism and a cleaning mechanism.
4. The sand filtering device in the wafer grinding production of claim 1, wherein the sand filtering mechanism comprises a driving shaft, a driven shaft, a synchronous belt and a filter screen;
the driving shaft and the two driven shafts are arranged in the sealed cabin in a penetrating way, the end parts of the driving shaft and the driven shafts are arranged on the reinforcing plates on the two sides of the sealed cabin in a penetrating way, and the driving shaft and the two driven shafts are arranged in a triangular way on the reinforcing plates; the two ends of the driving shaft are respectively and coaxially provided with a driving wheel, the two ends of each driven shaft are respectively and coaxially provided with a driven wheel, and the driving wheel and the driven wheels are both positioned on the inner side wall of the reinforcing plate; synchronous belts are arranged on the driving wheel and the two driven wheels of each side reinforcing plate, and synchronous transmission connection is carried out by the synchronous belts; a filter screen is arranged between the synchronous belts at two sides, and rotates along with the synchronous belts to filter the falling grinding sand.
5. The apparatus of claim 4, wherein the driving shaft is located below the driven shafts and the two driven shafts are located on the same horizontal line to ensure that the screen moving to the top is always in a horizontal plane directly below the sand input.
6. The sand filtering device in the wafer grinding production of claim 4, wherein the grinding sand recycling mechanism comprises a swash plate and a filtering grinding sand discharge port; the swash plate is arranged in the sealed cabin, and two ends of the swash plate are positioned in a triangular space formed by the synchronous belt and fixed on the side wall of the sealed cabin; the sloping cam plate is located under the filter screen, and is used for receiving the grinding sand filtered by the top filter screen; and a filtering abrasive sand outlet communicated with the swash plate is arranged on one side wall of the sealed cabin, and abrasive sand in the swash plate flows out to the outside through the filtering abrasive sand outlet.
7. The apparatus for filtering sand in wafer polishing as set forth in claim 6, wherein the cross section of the swash plate is inclined from the side of the capsule to the side where the filtering sand discharge port is provided.
8. The sand filtering device in the wafer grinding production of claim 4, wherein the cleaning mechanism comprises a spray pipe and a spray water inlet of a cleaning filter screen; the spray pipe is arranged in the sealed cabin, and two ends of the spray pipe are positioned in a triangular space formed by the synchronous belt and fixed on the side wall of the sealed cabin; the shower is located the below of sloping cam plate, and the one end of shower and the washing filter screen spray water input port intercommunication that sets up on sealed cabin 1 lateral wall.
9. The sand filtering device in the wafer grinding production of claim 1, further comprising an impurity recovery mechanism, wherein the impurity recovery mechanism comprises an impurity discharge port and a recovery barrel; the impurity outlet is arranged at the bottom of the sealed cabin, and the recycling bin is positioned at the bottom of the impurity outlet.
10. The sand filtering device in wafer grinding production of claim 1, wherein a supporting frame is arranged below the sealed cabin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311089533.7A CN116852265A (en) | 2023-08-28 | 2023-08-28 | Sand filtering equipment in wafer grinding production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311089533.7A CN116852265A (en) | 2023-08-28 | 2023-08-28 | Sand filtering equipment in wafer grinding production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116852265A true CN116852265A (en) | 2023-10-10 |
Family
ID=88219535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311089533.7A Pending CN116852265A (en) | 2023-08-28 | 2023-08-28 | Sand filtering equipment in wafer grinding production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116852265A (en) |
-
2023
- 2023-08-28 CN CN202311089533.7A patent/CN116852265A/en active Pending
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