CN116845139A - Solar cell etching equipment and production line - Google Patents

Solar cell etching equipment and production line Download PDF

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Publication number
CN116845139A
CN116845139A CN202310947412.5A CN202310947412A CN116845139A CN 116845139 A CN116845139 A CN 116845139A CN 202310947412 A CN202310947412 A CN 202310947412A CN 116845139 A CN116845139 A CN 116845139A
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CN
China
Prior art keywords
plates
plate
fixedly connected
rack
solar cell
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Granted
Application number
CN202310947412.5A
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Chinese (zh)
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CN116845139B (en
Inventor
樊选胜
宛正
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Anhui Meidalun Photovoltaic Technology Co ltd
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Anhui Meidalun Photovoltaic Technology Co ltd
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Priority to CN202310947412.5A priority Critical patent/CN116845139B/en
Publication of CN116845139A publication Critical patent/CN116845139A/en
Application granted granted Critical
Publication of CN116845139B publication Critical patent/CN116845139B/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67063Apparatus for fluid treatment for etching
    • H01L21/67075Apparatus for fluid treatment for etching for wet etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742Mechanical parts of transfer devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68764Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/202Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Robotics (AREA)
  • Photovoltaic Devices (AREA)

Abstract

The application discloses solar cell etching equipment and a production line, which relate to the technical field of cell etching and comprise a feeding mechanism, wherein the feeding mechanism comprises: a frame; the material rack is internally stacked with a plurality of battery pieces from top to bottom; the two blanking plates are symmetrically connected to the two sides of the material rack in a rotating way respectively, and each blanking plate is provided with an upper retaining plate and a lower retaining plate; the driving mechanism is arranged on the material rack and used for driving the two blanking plates to synchronously and oppositely rotate; the pushing piece mechanism is arranged on the rack and used for pushing the battery piece at the lowest part on the material rack away from the material rack; and the linkage mechanism is arranged on the frame and used for transmitting the power of the driving mechanism to the pushing piece mechanism. Through rotating on the work or material rest and being connected with the flitch down, can take off the battery piece of work or material rest below, support each battery piece of remaining in the work or material rest simultaneously, make the battery piece of waiting taking out keep certain interval with the battery piece of remaining in the work or material rest between, avoid the battery piece fish tail in taking out the in-process.

Description

Solar cell etching equipment and production line
Technical Field
The application relates to the technical field of cell etching, in particular to solar cell etching equipment and a production line.
Background
The solar cell is classified into crystalline silicon type and amorphous silicon type, wherein the crystalline silicon type cell can be classified into a single crystal cell and a polycrystalline cell; the efficiency of monocrystalline silicon is also different from that of polycrystalline silicon, and the peripheral edges of the solar cell are rounded or not rounded.
Etching, which is a very important step in semiconductor manufacturing processes, microelectronic IC manufacturing processes, and micro-nano manufacturing processes. Is a main process of patterning associated with lithography; etching is a process of selectively removing unwanted materials from the surface of a silicon wafer by chemical or physical means, the basic goal of which is to properly replicate a mask pattern on a glued silicon wafer; with the development of micro-fabrication technology, etching is broadly a generic term for stripping and removing materials by solution, reactive ions or other mechanical means, and is a popular term for micro-fabrication.
The publication number is: CN218580064U, publication date: 2023, 3 and 7 days, named: the etching device comprises a device body, wherein a transmission assembly for transmitting a panel along the horizontal direction and a spraying assembly for spraying towards the panel are arranged in the device body, the spraying assembly is located above the transmission assembly, two sides of the device body are respectively provided with a feeding automatic door and a discharging automatic door, the feeding automatic door and the discharging automatic door can be used for enabling the panel to enter and exit, the etching device further comprises a first nozzle and a cover body, the first nozzle is located below the transmission assembly, the first nozzle sprays liquid medicine towards the discharging automatic door, the cover body is arranged on the outer side of the device body, the outer side of the discharging automatic door is used for shielding the liquid medicine, splashed out by the discharging automatic door, of the first nozzle and the spraying assembly, a collecting box connected with the outer side of the device body is arranged below the cover body, and the collecting box is used for receiving the liquid medicine falling from the cover body. The etching device can wash the liquid medicine attached on the automatic discharging door and shield the liquid medicine splashed out of the etching device, so that the cleaning frequency of cleaning liquid medicine precipitate by operators is reduced.
In the prior art including the above patent, the solution used for etching is usually sprayed on the solar cell by using a spray head, or an etching tank filled with the solution is arranged in the etching equipment, and during etching, the solar cell is conveyed by a conveying mechanism so that the solar cell moves in the etching tank, and the solution in the etching tank etches the solar cell; the plurality of solar cells are generally stacked in the material rack from top to bottom, and when feeding, the lowest solar cell is taken out each time and conveyed by the conveying mechanism; however, in the process of taking out the lowermost solar cell, the solar cell needs to bear the gravity of all the cells above, and a certain gap cannot be formed between the solar cell and each cell above, so that the lowermost solar cell is scratched in the process of taking out the solar cell.
Disclosure of Invention
The application aims to provide solar cell etching equipment and a production line, which are used for solving the defects in the prior art.
In order to achieve the above object, the present application provides the following technical solutions: a solar wafer etching apparatus comprising a feed mechanism comprising:
a frame;
the material rack is arranged on the rack, and a plurality of battery pieces are stacked in the material rack from top to bottom;
the two blanking plates are respectively and symmetrically connected to two sides of the material frame in a rotating way, each blanking plate is provided with an upper retaining plate and a lower retaining plate, the two blanking plates rotate on the material frame along a first direction and have a first stroke, the lowest battery piece in the material frame is put down in the first stroke, and the two upper retaining plates support the rest battery pieces in the material frame; the two blanking plates rotate in the direction opposite to the first direction after the first stroke is finished to have a second stroke, and all the remaining battery pieces in the second stroke material frame are jacked by the two upper retaining plates, then move upwards for a certain distance and fall on the two lower retaining plates; the two blanking plates rotate along the first direction after the second stroke is finished to have a third stroke, and the third stroke clamps the lowest battery piece remained in the material rack;
the driving mechanism is arranged on the material rack and used for driving the two blanking plates to synchronously and oppositely rotate;
the pushing piece mechanism is arranged on the rack and used for pushing the battery piece at the lowest part on the material rack away from the material rack;
and the linkage mechanism is arranged on the frame and used for transmitting the power of the driving mechanism to the pushing piece mechanism.
Further, actuating mechanism includes the motor of fixed connection in the frame, still including rotating the two-way lead screw of connection in the work or material rest, the output and the coaxial fixed connection of two-way lead screw of motor, be symmetrical horizontal sliding connection has two connecting blocks on the work or material rest, two connecting blocks all with two-way lead screw spiro union, the bottom of two connecting blocks is all fixedly connected with rack, rotate on the work or material rest and be connected with respectively with two rack engagement's gear, the both sides of work or material rest are all rotated and are connected with the dwang, respectively fixedly connected with flitch down on two dwang, all fixedly connected with upset board on two dwang, two upset boards respectively one-to-one with two gear butt cooperation, gear pivoted in-process, order about upset board reverse rotation.
Further, limit grooves are symmetrically formed in the overturning plate, the gear is fixedly connected with limit plates, the limit plates are respectively in sliding butt fit with the two limit grooves, the gear is fixedly connected with a butt rod, the overturning plate is provided with butt grooves, and the butt rod is in sliding butt fit with the butt grooves.
Further, the pushing plate mechanism comprises a rotating shaft which is rotationally connected to the frame, a rotating disc is coaxially and fixedly connected to the rotating shaft, a free travel groove is formed in the rotating disc, a sliding rod is connected to the free travel groove in a sliding mode, a connecting rod is rotationally connected to the sliding rod, one end of the connecting rod is rotationally connected with a pushing plate, and the pushing plate is slidingly connected to the bottom of the material rack.
Further, the linkage mechanism comprises a first belt wheel fixedly connected to the bidirectional screw rod and a second belt wheel fixedly connected to the rotating shaft, and a belt is arranged between the first belt wheel and the second belt wheel.
Further, the material rack comprises four vertical plates, the bottoms of the four vertical plates are fixedly connected with a bottom plate, and the two vertical plates positioned on the same side are provided with notches for the battery pieces to be pushed away from the material rack.
The production line comprises solar cell etching equipment, wherein the solar cell etching equipment is the solar cell etching equipment.
In the above technical scheme, the application provides a solar cell etching device:
1. through rotating on the work or material rest and being connected with the flitch down, can take off the battery piece of work or material rest below, support each battery piece of remaining in the work or material rest simultaneously, make the battery piece of waiting taking out keep certain interval with the battery piece of remaining in the work or material rest between, avoid the battery piece fish tail in taking out the in-process.
2. Through the linkage subassembly, can give the pushing plate subassembly with drive assembly's power transmission for after the battery piece of lowermost is taken off, push away the work or material rest with this battery piece by pushing plate subassembly, in order to carry out etching operation.
3. Through offer the idle stroke groove on the carousel, can make drive assembly continue to work, make the ejector pad board have one do idle stroke simultaneously for the position of ejector pad board does not change.
4. Because the solar cell etching device has the technical effects, the production line comprising the solar cell etching device should have the corresponding technical effects.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments described in the present application, and other drawings may be obtained according to these drawings for a person having ordinary skill in the art.
FIG. 1 is a schematic diagram of an overall structure according to an embodiment of the present application;
FIG. 2 is a schematic view of an overall structure of another angle according to an embodiment of the present application;
FIG. 3 is a schematic diagram of a side view of an embodiment of the present application;
fig. 4 is a schematic structural diagram of a driving assembly, a linkage assembly, and a pushing piece assembly according to an embodiment of the present application;
FIG. 5 is a schematic view of a driving assembly according to an embodiment of the present application;
FIG. 6 is a schematic view illustrating a partial structure separation of a driving assembly according to an embodiment of the present application;
fig. 7 is a schematic view of a material rack structure according to an embodiment of the present application;
FIG. 8 is a schematic diagram of a blanking plate structure according to an embodiment of the present application;
FIG. 9 is a schematic view of a first stroke structure of a blanking plate according to an embodiment of the present application;
fig. 10 is a schematic diagram of a second stroke structure of a blanking plate according to an embodiment of the present application;
fig. 11 is a schematic diagram of a third stroke structure of a blanking plate according to an embodiment of the present application.
Reference numerals illustrate:
1. a material rack; 11. a vertical plate; 111. a notch; 12. a bottom plate; 2. a blanking plate; 21. an upper abutment plate; 22. a lower retaining plate; 3. a drive assembly; 31. a two-way screw rod; 32. a connecting block; 33. a rack; 34. a gear; 35. a limiting plate; 36. a rotating lever; 37. a turnover plate; 371. a limit groove; 372. an abutment groove; 38. a butt joint rod; 4. a linkage assembly; 41. a first pulley; 42. a second pulley; 43. a belt; 5. a pusher assembly; 51. a rotating shaft; 52. a turntable; 521. an idle stroke groove; 53. a slide bar; 54. a connecting rod; 55. and a pushing plate.
Detailed Description
In order to make the technical scheme of the present application better understood by those skilled in the art, the present application will be further described in detail with reference to the accompanying drawings.
Referring to fig. 1 to 11, a solar cell etching apparatus provided in an embodiment of the present application includes a feeding mechanism, where the feeding mechanism includes: a frame; the material rack 1 is arranged on the rack, and a plurality of battery pieces are stacked in the material rack 1 from top to bottom; specifically, the material rack 1 comprises four vertical plates 11, and the bottoms of the four vertical plates 11 are fixedly connected with a bottom plate 12; still more particularly, the bottom plate 12 is " -shaped"; the two vertical plates 11 positioned on the same side are provided with notches 111 for pushing the battery piece away from the material frame 1, and the battery piece is pushed away from the material frame 1 by the pushing piece assembly 5 through the notches 111.
In the embodiment of the application, the battery pack also comprises two blanking plates 2, wherein the two blanking plates 2 are respectively and symmetrically connected to two sides of the material frame 1 in a rotating way, each blanking plate 2 is provided with an upper retaining plate 21 and a lower retaining plate 22, the two blanking plates 2 rotate on the material frame 1 along a first direction and have a first stroke, the lowest battery piece in the material frame 1 is put down in the first stroke, and the two upper retaining plates 21 support each battery piece remained in the material frame 1; the two blanking plates 2 rotate in the direction opposite to the first direction after the first stroke is finished to have a second stroke, and each battery piece remained in the second stroke material frame 1 is jacked up by the two upper retaining plates 21, moves up by a certain distance and falls on the two lower retaining plates 22; the two blanking plates 2 rotate along the first direction after the second stroke is finished to have a third stroke, and the third stroke clamps the lowest battery piece remained in the material frame 1;
in an embodiment of the application: and the driving assembly 3 is arranged on the material rack 1 and is used for driving the two blanking plates 2 to synchronously and oppositely rotate.
Specifically: the driving assembly 3 comprises a motor fixedly connected to the rack and a bidirectional screw rod 31 rotatably connected to the material rack 1, wherein the bidirectional screw rod 31 is in the prior art, the bidirectional screw rod 31 is provided with a middle point in the length direction of the bidirectional screw rod 31, and two sections of threads with opposite threads are respectively formed at two ends; the output end of the motor is fixedly connected with the bidirectional screw rod 31 coaxially, two connecting blocks 32 are symmetrically and transversely connected to the material frame 1 in a sliding manner, the two connecting blocks 32 are in threaded connection with the bidirectional screw rod 31, racks 33 are fixedly connected to the bottoms of the two connecting blocks 32, gears 34 meshed with the two racks 33 respectively are rotatably connected to the material frame 1, rotating rods 36 are rotatably connected to two sides of the material frame 1, and blanking plates 2 are fixedly connected to the two rotating rods 36 respectively; preferably, each rotating rod 36 is fixedly connected with two blanking plates 2, so that the blanking can be more stable; the two rotating rods 36 are fixedly connected with turnover plates 37, the two turnover plates 37 are respectively in butt fit with the two gears 34 in a one-to-one correspondence manner, in the process of rotating the gears 34, the turnover plates 37 are driven to reversely rotate, the rotating rods 36 are driven to synchronously rotate through the turnover plates 37, so that the blanking plate 2 on the rotating rods 36 follows rotation, and the angle is turned.
Specifically, the manner in which the flipping plate 37 is in abutting engagement with the gear 34 is: the overturning plate 37 is symmetrically provided with limit grooves 371, and specifically, the limit grooves 371 are U-shaped; the gear 34 is fixedly connected with a limiting plate 35, and the limiting plate 35 is crescent; the limiting plates 35 are respectively matched with the two limiting grooves 371 in a sliding abutting mode, the gear 34 is fixedly connected with the abutting rods 38, the overturning plate 37 is provided with abutting grooves 372, and the abutting rods 38 are matched with the abutting grooves 372 in a sliding abutting mode; during the rotation of the gear 34, the abutting rod 38 is driven to rotate synchronously, and the overturning plate 37 rotates reversely through the sliding abutting fit of the abutting rod 38 and the abutting groove 372; meanwhile, with the rotation of the gear 34, when the abutting rod 38 is separated from the abutting groove 372, the limiting plate 35 is in sliding abutting engagement with one of the limiting grooves 371, and the existing rotation angle of the turnover plate 37 is maintained through sliding abutting engagement of the limiting plate 35 and the limiting groove 371.
In the embodiment of the application, the battery pack also comprises a pushing piece assembly 5 which is arranged on the rack and is used for pushing the battery piece at the lowest part on the material rack 1 away from the material rack 1; the pushing piece assembly 5 comprises a rotating shaft 51 which is rotatably connected to the frame, a rotating disc 52 is coaxially and fixedly connected to the rotating shaft 51, a free travel groove 521 is formed in the rotating disc 52, a sliding rod 53 is connected to the free travel groove 521 in a sliding mode, a connecting rod 54 is rotatably connected to the sliding rod 53, one end of the connecting rod 54 is rotatably connected to a pushing piece plate 55, and the pushing piece plate 55 is slidably connected to the bottom of the material frame 1.
The idle stroke groove 521 has the following functions: the rotation of the turntable 52 enables the idle stroke groove 521 to be in sliding fit with the sliding rod 53, so that the pushing plate 55 does not slide on the material rack 1 to push the battery piece, and the pushing piece assembly 5 pauses the pushing piece work; simultaneously, carousel 52 and two-way lead screw 31 are linked by linkage assembly 4, and two-way lead screw 31 is in rotatory operating condition all the time, through the rotation of two-way lead screw 31, makes blanking plate 2 be in continuous unloading state.
Specifically, please refer to fig. 1 or fig. 2, fig. 9, fig. 10, fig. 11; in the initial state of operation, as shown in fig. 1 or 2 and fig. 10, the blanking plate 2 is in a state of jacking up each battery piece in the material frame 1, the pushing plate 55 is in a pushing state, the bidirectional screw rod 31 and the rotary table 52 are driven to rotate through forward rotation of the motor, the rotation of the bidirectional screw rod 31 drives the two racks 33 to be far away, the racks 33 and the gears 34 are meshed, the gears 34 are in abutting fit with the overturning plate 37, the blanking plate 2 is driven to rotate, and the state shown in fig. 11 is reached, so that the battery piece at the lowest part in the material frame 1 is clamped; at the same time, the rotation of the turntable 52 drives the sliding rod 53 to slide from one end of the idle stroke groove 521 to the other end of the idle stroke groove 521 to perform an idle stroke, and the position of the pusher plate 55 is not changed.
As the motor rotates, the blanking plate 2 continues to be driven to rotate to the state of fig. 9, so as to put down a clamped battery piece, and at the same time, the turntable 52 continues to rotate, at this time, the sliding rod 53 abuts against one end side wall of the idle stroke groove 521, so that the sliding rod 54 drives the pushing plate 55 to slide on the material frame 1, and slide to one side of the material frame 1, which is close to the turntable 52, and abuts against one side of the put-down battery piece.
Next, the motor rotates reversely to rotate the blanking plate 2 from fig. 9 to the state shown in fig. 10, and at the same time, the turntable 52 rotates reversely to firstly slide one end of the sliding rod 53 in the idle stroke groove 521 to the other end of the idle stroke groove 521, and secondly, the side wall of the idle stroke groove 521 is abutted with the sliding rod 53, and the connecting rod 54 drives the pushing plate 55 to slide on the material frame 1, so that the pushing plate 55 pushes out the dropped battery piece in the sliding process.
Referring to fig. 3, after the pushing plate 55 pushes out the battery, a conveying mechanism is disposed on one side of the material rack 1, and the conveying mechanism is a prior art, and the structure of the conveying mechanism may be a conveyor belt structure, which is not repeated herein.
A linkage assembly 4, which is arranged on the frame and is used for transmitting the power of the driving assembly 3 to the pushing piece assembly 5; specifically, the linkage assembly 4 includes a first pulley 41 fixedly connected to the bidirectional screw rod 31, and a second pulley 42 fixedly connected to the rotation shaft 51, with a belt 43 provided between the first pulley 41 and the second pulley 42.
In an embodiment of the application, a production line is further provided, which comprises the solar cell etching equipment; the production line is used for etching the solar cell and also used for producing the solar cell.
In an embodiment of the present application, the solar cell etching device further comprises a feeding assembly (not shown in the figure) for conveying the solar cell to be etched into the material rack 1.
Working principle: when the battery pack clamping device is used, the motor is started to rotate to drive the bidirectional screw rod 31 and the turntable 52 to rotate, the rotation of the bidirectional screw rod 31 drives the two racks 33 to be away from each other, and the racks 33 and the gears 34 are meshed and the gears 34 are in abutting fit with the overturning plate 37 to drive the blanking plate 2 to rotate to reach the state shown in fig. 11 so as to clamp the battery pack at the lowest part in the material frame 1; at the same time, the rotation of the turntable 52 drives the sliding rod 53 to slide from one end of the idle stroke groove 521 to the other end of the idle stroke groove 521 to perform an idle stroke, and the position of the pusher plate 55 is not changed.
As the motor rotates, the blanking plate 2 continues to be driven to rotate to the state of fig. 9, so as to put down a clamped battery piece, and at the same time, the turntable 52 continues to rotate, at this time, the sliding rod 53 abuts against one end side wall of the idle stroke groove 521, so that the sliding rod 54 drives the pushing plate 55 to slide on the material frame 1, and slide to one side of the material frame 1, which is close to the turntable 52, and abuts against one side of the put-down battery piece.
Next, the motor rotates reversely to rotate the blanking plate 2 from fig. 9 to the state shown in fig. 10, and at the same time, the turntable 52 rotates reversely to firstly slide one end of the sliding rod 53 in the idle stroke groove 521 to the other end of the idle stroke groove 521, and secondly, the side wall of the idle stroke groove 521 is abutted with the sliding rod 53, and the connecting rod 54 drives the pushing plate 55 to slide on the material frame 1, so that the pushing plate 55 pushes out the dropped battery piece in the sliding process.
While certain exemplary embodiments of the present application have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that modifications may be made to the described embodiments in various different ways without departing from the spirit and scope of the application. Accordingly, the drawings and description are to be regarded as illustrative in nature and not as restrictive of the scope of the application, which is defined by the appended claims.

Claims (7)

1. The solar cell etching equipment is characterized by comprising a feeding mechanism, wherein the feeding mechanism comprises:
a frame;
the material rack (1) is arranged on the rack, and a plurality of battery pieces are stacked in the material rack (1) from top to bottom;
the two blanking plates (2) are respectively and symmetrically connected to two sides of the material frame (1) in a rotating way, each blanking plate (2) is provided with an upper retaining plate (21) and a lower retaining plate (22), the two blanking plates (2) rotate on the material frame (1) along a first direction and have a first stroke, the lowest battery piece in the material frame (1) is put down in the first stroke, and the two upper retaining plates (21) support the rest battery pieces in the material frame (1); the two blanking plates (2) rotate in the direction opposite to the first direction after the first stroke is finished to have a second stroke, and each remaining battery piece in the second stroke work rest (1) is jacked up by the two upper retaining plates (21) and then moves upwards for a certain distance and falls on the two lower retaining plates (22); the two blanking plates (2) rotate along the first direction after the second stroke is finished to have a third stroke, and the third stroke clamps the lowest battery piece remained in the material frame (1);
the driving assembly (3) is arranged on the material rack (1) and is used for driving the two blanking plates (2) to synchronously and oppositely rotate;
the pushing piece assembly (5) is arranged on the rack and is used for pushing the battery piece at the lowest part on the material rack (1) away from the material rack (1);
and the linkage assembly (4) is arranged on the frame and used for transmitting the power of the driving assembly (3) to the pushing piece assembly (5).
2. The solar cell etching device according to claim 1, wherein the driving assembly (3) comprises a motor fixedly connected to the frame, and further comprises a bidirectional screw rod (31) rotatably connected to the material frame (1), an output end of the motor is fixedly connected to the bidirectional screw rod (31) coaxially, two connecting blocks (32) are symmetrically and transversely connected to the material frame (1) in a sliding manner, the two connecting blocks (32) are in threaded connection with the bidirectional screw rod (31), racks (33) are fixedly connected to bottoms of the two connecting blocks (32), gears (34) meshed with the two racks (33) are respectively connected to the material frame (1) in a rotating manner, rotating rods (36) are respectively connected to two sides of the material frame (1) in a rotating manner, a blanking plate (2) is respectively fixedly connected to the two rotating rods (36), and overturning plates (37) are respectively in butt fit with the two gears (34) in a one-to-one correspondence manner, and in the rotating process of the gears (34), the overturning plates (37) are driven to rotate reversely.
3. The solar cell etching apparatus according to claim 2, wherein the turning plate (37) is symmetrically provided with limit grooves (371), the gear (34) is fixedly connected with limit plates (35), the limit plates (35) are respectively in sliding abutting fit with the two limit grooves (371), the gear (34) is fixedly connected with an abutting rod (38), the turning plate (37) is provided with an abutting groove (372), and the abutting rod (38) is in sliding abutting fit with the abutting groove (372).
4. The solar cell etching device according to claim 2, wherein the pushing piece assembly (5) comprises a rotating shaft (51) rotatably connected to the frame, a turntable (52) is coaxially and fixedly connected to the rotating shaft (51), a free travel groove (521) is formed in the turntable (52), a sliding rod (53) is slidably connected to the free travel groove (521), a connecting rod (54) is rotatably connected to the sliding rod (53), a pushing piece plate (55) is rotatably connected to one end of the connecting rod (54), and the pushing piece plate (55) is slidably connected to the bottom of the material rack (1).
5. A solar wafer etching apparatus according to claim 4, characterized in that the linkage assembly (4) comprises a first pulley (41) fixedly connected to the bi-directional screw (31) and a second pulley (42) fixedly connected to the rotating shaft (51), a belt (43) being arranged between the first pulley (41) and the second pulley (42).
6. The solar cell etching device according to claim 1, wherein the material frame (1) comprises four vertical plates (11), the bottoms of the four vertical plates (11) are fixedly connected with a bottom plate (12), and the two vertical plates (11) positioned on the same side are provided with notches (111) for pushing the cell away from the material frame (1).
7. A production line, characterized in that it comprises a solar cell etching apparatus according to any one of claims 1-6.
CN202310947412.5A 2023-07-31 2023-07-31 Solar cell etching equipment and production line Active CN116845139B (en)

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Application Number Priority Date Filing Date Title
CN202310947412.5A CN116845139B (en) 2023-07-31 2023-07-31 Solar cell etching equipment and production line

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CN116845139B CN116845139B (en) 2023-12-15

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014106800A1 (en) * 2014-02-26 2015-08-27 Eisenwerk Wittigsthal Gmbh Stand arrangement for a solar panel
CN108695205A (en) * 2017-03-31 2018-10-23 株式会社荏原制作所 Substrate board treatment and base plate processing system including substrate board treatment
CN212392257U (en) * 2020-08-05 2021-01-22 苏州市赛立鸿智能制造有限公司 Etching clamp for solar cell
CN113471106A (en) * 2021-06-29 2021-10-01 中环艾能(高邮)能源科技有限公司 Accurate PERC battery piece production sculpture machine fixes a position
CN114267752A (en) * 2021-12-22 2022-04-01 安徽舟港新能源科技有限公司 Intelligent processing equipment for producing dephosphorized silicon glass by solar cell
KR20230094042A (en) * 2021-12-20 2023-06-27 주식회사 한화 Substrate Supporting Apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014106800A1 (en) * 2014-02-26 2015-08-27 Eisenwerk Wittigsthal Gmbh Stand arrangement for a solar panel
CN108695205A (en) * 2017-03-31 2018-10-23 株式会社荏原制作所 Substrate board treatment and base plate processing system including substrate board treatment
CN212392257U (en) * 2020-08-05 2021-01-22 苏州市赛立鸿智能制造有限公司 Etching clamp for solar cell
CN113471106A (en) * 2021-06-29 2021-10-01 中环艾能(高邮)能源科技有限公司 Accurate PERC battery piece production sculpture machine fixes a position
KR20230094042A (en) * 2021-12-20 2023-06-27 주식회사 한화 Substrate Supporting Apparatus
CN114267752A (en) * 2021-12-22 2022-04-01 安徽舟港新能源科技有限公司 Intelligent processing equipment for producing dephosphorized silicon glass by solar cell

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