CN116839728A - Facula analysis system - Google Patents

Facula analysis system Download PDF

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Publication number
CN116839728A
CN116839728A CN202310815095.1A CN202310815095A CN116839728A CN 116839728 A CN116839728 A CN 116839728A CN 202310815095 A CN202310815095 A CN 202310815095A CN 116839728 A CN116839728 A CN 116839728A
Authority
CN
China
Prior art keywords
analysis system
analysis
absorber
wedge
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310815095.1A
Other languages
Chinese (zh)
Inventor
董岱
杨军
张贤俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhuhai Donghui Semiconductor Equipment Co ltd
Original Assignee
Zhuhai Donghui Semiconductor Equipment Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhuhai Donghui Semiconductor Equipment Co ltd filed Critical Zhuhai Donghui Semiconductor Equipment Co ltd
Priority to CN202310815095.1A priority Critical patent/CN116839728A/en
Publication of CN116839728A publication Critical patent/CN116839728A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0271—Housings; Attachments or accessories for photometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0411—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0477—Prisms, wedges

Abstract

The application relates to a light spot analysis system, which comprises a shell and an analysis component, wherein the shell is provided with an opening and is arranged in the shell for light spot analysis, the analysis component comprises a collimating lens and a wedge-shaped prism for decomposing laser into a reflected light beam and a transmitted light beam, a measuring camera for measuring the reflected light beam and a tail light absorber for absorbing the transmitted light beam, the collimating lens is arranged at the opening, the wedge-shaped prism is arranged between the collimating lens and the measuring camera, one analysis component is provided with a focusing lens, and the focusing lens is arranged between the wedge-shaped prism and the measuring camera. The application can be applied to high-power laser measurement analysis of different wavelengths, and simultaneously realizes cost reduction.

Description

Facula analysis system
Technical Field
The application relates to a light spot analysis system, and belongs to the technical field of lasers.
Background
In the laser application process, according to actual use requirements, beam quality analysis is carried out on the light spot of the laser, wherein the beam quality analysis comprises laser energy distribution analysis, laser light spot roundness analysis and the like. And the light spot analysis in the light path can be realized by using a common measuring camera. However, when the laser focused on the focus is subjected to spot analysis, the laser energy of the focus is generally very large, so that the problem of damaging a measurement camera is very easy to occur, and the measurement is difficult to realize by a common measurement camera. The price of the special focus measurement camera is very high, and the use cost is greatly increased.
Disclosure of Invention
The application provides a light spot analysis system, which aims to at least solve one of the technical problems in the prior art. Therefore, the application provides a light spot analysis system which is beneficial to avoiding the damage of a focused light spot to a measuring camera by adjusting a light path.
The technical scheme of the application relates to a light spot analysis system, which comprises the following steps:
a housing provided with an opening;
the analysis component is arranged in the shell and is used for analyzing light spots; the analysis assembly comprises a collimating lens and a wedge prism for decomposing laser into a reflected light beam and a transmitted light beam, and a measuring camera for measuring the reflected light beam and a tail light absorber for absorbing the transmitted light beam; the collimating lens is arranged at the opening, and the wedge-shaped prism is arranged between the collimating lens and the measuring camera; one of the analysis assemblies is provided with a focusing lens, which is arranged between the wedge prism and the measuring camera.
Further, the analysis assembly comprises two groups, and the two groups of analysis assemblies are symmetrically arranged on the shell.
Further, the reflected beam forms a right angle with the incident beam of the laser light, and the transmitted beam forms an obtuse angle with the incident beam of the laser light.
Further, the tail light absorber comprises a plurality of conical absorbing members, and one bottom edge of two adjacent conical absorbing members is coincident.
Further, the tail light absorber comprises a plurality of tapered absorbers, the plurality of tapered prisms are arranged in a plurality, and the tapered absorbers are arranged in an arc shape and are arranged around the peripheries of the tapered prisms.
Further, the conical absorbent member is a quadrangular pyramid.
Further, the surface of the conical absorbent member is coated with an absorbent material.
Further, the ratio of the cavity length of the tapered absorber to the bottom side length of the tapered absorber is set between 3 and 5.
Further, laser light that is not absorbed by one of the tapered absorbers is reflected to the other tapered absorber.
Further, the measurement camera is a CCD camera.
The beneficial effects of the application are as follows.
The light spot analysis system can be applied to light spot analysis of different light paths, is particularly suitable for high-power laser measurement analysis of different wavelengths, and simultaneously realizes cost reduction. The wedge prism is adopted to extract a small amount of laser to measure the condensing light spots, so that the energy of the laser entering the measuring camera can meet the damage threshold requirement of the camera, and the device can measure different light paths, in particular to focused laser measurement of lasers with different wavelengths. Meanwhile, the incident light path of the laser is vertically arranged, and the reflection light path of the wedge-shaped prism is horizontally arranged, so that the distance from the laser focus to the collimating prism is adjusted by adjusting the incident angle of the wedge-shaped prism, the laser energy entering the measuring camera can be adjusted, and the adjustment is convenient and easy to operate. Meanwhile, two groups of analysis components and a second analysis component are arranged, so that the analysis requirement of the device on the multi-wavelength laser focusing light spot can be met. By improving the structure of the tail light absorber, the refractive beam absorption efficiency is improved, and the cost is reduced.
Drawings
Fig. 1 is a schematic diagram of a front structure of a spot analysis system according to an embodiment of the present application.
Fig. 2 is a schematic diagram of a plan view structure of a spot analysis system according to an embodiment of the present application.
Fig. 3 is a schematic diagram of the optical path principle of the spot analysis system according to the embodiment of the application.
Fig. 4 is a schematic diagram of the structure of a tail absorber of the spot analysis system according to an embodiment of the present application.
Fig. 5 is a schematic view of the optical path principle of a wedge prism of the spot analysis system according to an embodiment of the present application.
Fig. 6 is a schematic view of a plurality of wedge prisms and a plurality of tapered absorbers according to an embodiment of the present application.
Reference numerals:
reference numerals Name of the name Reference numerals Name of the name
100 Shell body 230 Wedge prism
110 Containing cavity 240 Measuring camera
200 Analysis assembly 250 Tail light absorber
210 Collimating lens 251 Cone-shaped absorbing piece
220 Focusing lens 300 Laser focus
Detailed Description
The conception, specific structure, and technical effects produced by the present application will be clearly and completely described below with reference to the embodiments and the drawings to fully understand the objects, aspects, and effects of the present application. It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other.
It should be noted that, unless otherwise specified, when a feature is referred to as being "fixed" or "connected" to another feature, it may be directly or indirectly fixed or connected to the other feature. Further, the descriptions of the upper, lower, left, right, top, bottom, etc. used in the present application are merely with respect to the mutual positional relationship of the respective constituent elements of the present application in the drawings.
Furthermore, unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used in the description presented herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and/or" as used herein includes any combination of one or more of the associated listed items.
It should be understood that although terms, third, etc. may be used in this disclosure to describe various elements, these elements should not be limited to these terms. These terms are only used to distinguish one element of the same type from another. For example, an element may be termed an element, and, similarly, an element may be termed an element, without departing from the scope of the present disclosure.
Referring to fig. 1 to 6, the spot analysis system according to the present application includes a housing 100 and an analysis assembly 200, and the housing 100 is provided with an opening. The analysis assembly 200 is disposed within the housing 100 for spot analysis. The analysis assembly 200 includes a collimating lens 210 and a wedge prism 230 for splitting the laser light into a reflected beam and a transmitted beam, and a measuring camera 240 for measuring the reflected beam and a tail light absorber 250 for absorbing the transmitted beam, the laser focus 300 being disposed at the opening. The collimating lens 210 is disposed at the opening, and the wedge prism 230 is disposed between the collimating lens 210 and the measuring camera 240. One of the analysis assemblies 200 is provided with a focusing lens 220, the focusing lens 220 being arranged between a wedge prism 230 and a measurement camera 240.
The spot analysis device provided by the embodiment of the application can be applied to spot analysis of different light paths, is particularly suitable for measuring and analyzing high-power laser focusing spots with different wavelengths, and simultaneously realizes cost reduction. The spot analysis device extracts a small amount of laser to perform spot focusing measurement by adopting the wedge prism 230, which is beneficial to ensuring that the energy of the laser entering the measurement camera 240 meets the requirement of a camera damage threshold, thereby being beneficial to realizing the measurement of different light paths of the device, in particular to the focused laser measurement of lasers with different wavelengths. Meanwhile, the incident light path of the laser is vertically arranged and the reflection light path of the wedge prism 230 is horizontally arranged, so that the laser energy entering the measuring camera 240 can be adjusted by adjusting the incident angle of the wedge prism 230 and the distance from the laser focus 300 to the collimating prism, and the adjustment is convenient and easy to operate. Meanwhile, two groups of analysis assemblies 200 are arranged, so that the analysis requirement of the device on the multi-wavelength laser focusing light spots can be met. Specifically, one of the analysis assemblies 200 of the present application is not provided with a focusing lens 220, and can be used for measuring violet laser light and green laser light, while the other analysis assembly 200 provided with a focusing lens 220 can be used for measuring carbon dioxide laser light spots.
In an embodiment, referring to fig. 1 to 3, two analysis assemblies 200 are provided in the embodiment of the present application, and the two analysis assemblies 200 are symmetrically disposed on the housing 100, so as to realize the analysis requirement of the device on the multi-wavelength laser focusing light spot. Referring to fig. 2, the housing 100 is provided with two chambers 110 which are independent of each other and are symmetrically disposed, and an upper wall of the chamber 110 is provided with an opening. The analysis assembly 200 includes a mirror housing, a collimating lens 210, a focusing lens 220, and a wedge prism 230 for decomposing laser light into a reflected beam and a transmitted beam, and a measurement camera 240 for measuring the reflected beam and a tail light absorber 250 for absorbing the transmitted beam; the mirror shell is worn to locate the opening part, the mirror shell is provided with the entrance that is laser focus 300, collimating lens 210 sets up in the below of entrance, wedge prism 230 slope sets up in the mirror shell and set up between collimating lens 210 and focusing lens 220, focusing lens 220 and measurement camera 240 all set up in holding chamber 110, the central line of focusing lens 220 and the lens central line of measurement camera 240 are on same horizontal line, tail light absorber 250 sets up in wedge prism 230 one side of being directed away from the entrance, wherein, the reflectivity of two wedge prisms 230 is unequal.
Referring to fig. 1 and 2, an upper wall plate of the housing 100 is provided with an opening, a mirror housing of the analysis assembly 200 is inserted into the opening and fixed to an upper side of the housing 100, a lower side of the mirror housing is disposed in the cavity 110 of the housing 100, the upper side of the mirror housing protrudes from the housing 100 through the opening, and the upper side of the mirror housing serves as an entrance of the laser focus 300. The wedge prism 230 is disposed in the content of the mirror housing, and the wedge prism 230 is disposed obliquely to reflect the laser light. The mirror housing is provided with an exit opening, the exit opening is arranged in the cavity 110 of the housing 100, and the center line of the exit opening is horizontally arranged. The focusing lens 220 and the measuring camera 240 are both arranged in the cavity 110 of the housing 100, and the center line of the outlet, the center line of the focusing lens 220 and the center line of the lens of the measuring camera 240 are all arranged on the same horizontal line. Specifically, the incident beam of laser light vertically enters the inner cavity of the mirror housing through the entrance opening and reaches the wedge prism 230, the laser light is divided into a reflected beam and a transmitted beam by the wedge prism 230, the reflected beam horizontally exits from the exit opening of the mirror housing and passes through the focusing lens 220, and then reaches the measuring camera 240, and the transmitted beam reaches the tail light absorber 250 and is absorbed. Further, the reflected beam is at right angles to the incident beam of the laser light, and the transmitted beam is at an obtuse angle to the incident beam of the laser light, thereby simplifying the optical path design, and the adjustment of the laser energy entering the measuring camera 240 can be achieved by adjusting the reflectivity of the wedge prism 230 and/or the distance from the entrance opening to the collimating lens 210.
In an application embodiment, referring to fig. 5, without considering the influence of polarization, and regarding the laser to be measured as natural light approximately for energy analysis, the reflectivity of the wedge prism 230 according to the embodiment of the present application is obtained according to the following formula:
where k represents the reflectivity of the wedge prism 230; a, a 1 Representing the angle of incidence, a, of the wedge prism 230 2 Representing the angle of reflection of the wedge prism 230.
In one embodiment, one of the analysis modules 200 is used for focused spot analysis of ultraviolet and green lasers, wherein the reflectivity of the wedge prism 230 corresponding to the analysis module 200 is set to be less than 1.5% when the analysis module is used for measurement of ultraviolet and green lasers. While another analysis assembly 200 is applied to focused spot analysis of carbon dioxide laser light, wherein the reflectance of the wedge prism 230 corresponding to the analysis assembly 200 is less than 1% when applied to measurement of carbon dioxide laser light. The multi-wavelength laser focusing light spot analysis device provided by the embodiment of the application is provided with two groups of analysis components 200 which are respectively applied to the focusing light spot analysis of ultraviolet laser, green laser and carbon dioxide laser, and can realize the measurement and analysis of high-power lasers with different wavelengths.
In an application embodiment, the distance from the entrance opening to the collimating lens 210 is about 14.5mm, and preferably, when the analysis assembly 200 is applied to the focused spot analysis of the ultraviolet laser light and the green laser light, the distance from the entrance opening to the collimating lens 210 is set to 14.5415mm, and when the analysis assembly 200 is applied to the focused spot analysis of the carbon dioxide laser light, the distance from the entrance opening to the collimating lens 210 is set to 14.5542mm.
In one embodiment, referring to fig. 4, the tail light absorber 250 includes a plurality of tapered absorbers 251, and the plurality of tapered absorbers 251 are arranged in a reflected light path of the tail light absorber 250. Referring to fig. 3, the tapered absorber 251 has a quadrangular pyramid shape, one bottom edge of two adjacent tapered absorbers 251 is overlapped, and the surface of the tapered absorber 251 is coated with an absorbing material, so that when the transmitted beam of the wedge prism 230 reaches one of the tapered absorbers 251, part of the laser light is absorbed, and the laser light which is not absorbed is reflected and reaches the other tapered absorber 251, and is further absorbed by the other tapered absorber 251, thereby advantageously preventing the laser light from damaging the human body. Further, the ratio of the cavity length L of the tapered absorber 251 to the bottom side length d of the tapered absorber 251 is set between 3 and 5, so that a better absorption effect can be achieved. The tail light absorber 250 of the embodiment of the application can repeatedly absorb the laser transmitted by multiple reflections by improving the structure of the conical absorbing piece 251 on the basis of absorbing only by the coating material, thereby improving the absorption efficiency of the laser and reducing the cost of the device.
In an application embodiment, the absorption of the tail light absorber 250 of an embodiment of the present application is obtained according to the following formula:
where h represents the absorptivity of the tail light absorber 250, ε represents the absorptivity of the coated absorbing material, S represents the aperture area of the tail light absorber 250, S 1 Representing the inner surface area of the tail light absorber 250; s is S 2 Representing the surface area of the body in the direction of the aperture normal of the tail light absorber 250 at the same depth as the cavity.
In an application embodiment, referring to fig. 6, the wedge prisms 230 of the embodiment of the present application are provided in plurality, and the plurality of tapered absorbers 251 are arranged in an arc shape and are disposed around the outer circumferences of the plurality of wedge prisms 230. Referring to fig. 4, the reflective surface and the transmissive surface of the wedge prism 230 are respectively disposed at opposite sides of the wedge prism 230, the reflective surface of one wedge prism 230 faces the other wedge prism 230, and the transmissive surface thereof faces the tapered absorber 251 disposed at the outer circumference. The outer circumferences of the plurality of wedge prisms 230 are surrounded by the arc-shaped absorption wall surrounded by the plurality of wedge prisms 230, thereby being beneficial to preventing the transmitted light beam from injuring the body.
Further, the wedge prisms 230 of the embodiment of the present application are provided in plurality, and after being reflected by the plurality of wedge prisms 230, the laser beam can be emitted from a direction parallel to the incident laser beam or from a direction perpendicular to the incident laser beam. Further, the distance between the adjacent wedge prisms 230 is reasonably set, so that the laser emitted from the rear surface of the previous wedge prism 230 cannot enter the block wedge prism 230, thereby being beneficial to ensuring that the test beam cannot be polluted by other stray light.
In an embodiment, the measurement camera 240 adopts a CCD camera, and after the laser is reflected by the wedge prism 230 and converged by the focusing lens 220, the laser reaches the CCD surface of the focal plane of the lens, and the size of the light spot is obtained by measurement of the CCD, so that the collection of the size of the light spot from visible light to near infrared band can be realized.
The present application is not limited to the above embodiments, but can be modified, equivalent, improved, etc. by the same means to achieve the technical effects of the present application, which are included in the spirit and principle of the present disclosure. Are intended to fall within the scope of the present application. Various modifications and variations are possible in the technical solution and/or in the embodiments within the scope of the application.

Claims (10)

1. A spot analysis system, comprising:
a housing (100), the housing (100) being provided with an opening;
an analysis assembly (200) disposed within the housing (100) for spot analysis; the analysis assembly (200) comprises a collimating lens (210) and a wedge prism (230) for splitting the laser light into a reflected beam and a transmitted beam, as well as a measuring camera (240) for measuring the reflected beam and a tail light absorber (250) for absorbing the transmitted beam; the collimating lens (210) is arranged at the opening, and the wedge-shaped prism (230) is arranged between the collimating lens (210) and the measuring camera (240); one of the analysis assemblies (200) is provided with a focusing lens (220), the focusing lens (220) being arranged between the wedge prism (230) and the measurement camera (240).
2. The spot analysis system according to claim 1, wherein the analysis assembly (200) comprises two groups, and the two groups of analysis assemblies (200) are symmetrically disposed on the housing (100).
3. The spot analysis system according to claim 1, wherein the reflected beam forms a right angle with the incident beam of laser light and the transmitted beam forms an obtuse angle with the incident beam of laser light.
4. The spot analysis system according to claim 1, wherein the tail absorber (250) comprises a plurality of tapered absorbers (251), one bottom edge of two adjacent tapered absorbers (251) being coincident.
5. The spot analysis system according to claim 4, wherein the wedge prism (230) is provided in plurality, and the plurality of tapered absorbers (251) are arranged in an arc shape and are disposed around the outer circumferences of the plurality of wedge prisms (230).
6. The spot analysis system according to claim 4, wherein the conical absorber (251) is a quadrangular pyramid.
7. The spot analysis system according to claim 6, wherein a surface of the conical absorber (251) is coated with an absorbing material.
8. The spot analysis system according to claim 6, wherein the ratio of the cavity length of the conical absorber (251) to the bottom side length of the conical absorber (251) is set between 3 and 5.
9. The spot analysis system according to claim 8, wherein laser light not absorbed by one of the conical absorbing members (251) is reflected to the other conical absorbing member (251).
10. The spot analysis system according to claim 1, characterized in that the measurement camera (240) is a CCD camera.
CN202310815095.1A 2023-07-05 2023-07-05 Facula analysis system Pending CN116839728A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310815095.1A CN116839728A (en) 2023-07-05 2023-07-05 Facula analysis system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310815095.1A CN116839728A (en) 2023-07-05 2023-07-05 Facula analysis system

Publications (1)

Publication Number Publication Date
CN116839728A true CN116839728A (en) 2023-10-03

Family

ID=88161256

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310815095.1A Pending CN116839728A (en) 2023-07-05 2023-07-05 Facula analysis system

Country Status (1)

Country Link
CN (1) CN116839728A (en)

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