CN116818818A - Method for simultaneously observing two surfaces of film by scanning electron microscope - Google Patents

Abstract

The invention provides a method for simultaneously observing two surfaces of a film by a scanning electron microscope, which comprises the following steps: cutting a clean and flat plane out of the plastic culture dish; adhering the plane to a sample stage of a scanning electron microscope by using conductive adhesive; one side of the plane is stuck with conductive adhesive, and the conductive adhesive is stuck to the sample table at the same time; adhering a sample to be observed to conductive adhesive above a plastic plane, and hanging the part of the upper surface and the lower surface to be observed above the plastic plane; in a scanning electron microscope, focusing on a plastic plane below a sample; when the voltage beam drops, the incident electron beam with weak energy is bounced by the electrostatic field of the plastic plane and irradiates the lower surface of the sample, secondary electrons are generated on the lower surface, and the secondary electrons are captured by the instrument probe, so that a secondary electron image of the lower surface of the sample is formed. The invention applies the mirror effect of the scanning electron microscope to the characterization of the track etching film, and the method for simultaneously observing the track etching film on the two sides is fuzzed by utilizing the electronic mirror effect of the scanning electron microscope.

Description

Method for simultaneously observing two surfaces of film by scanning electron microscope

Technical Field

The invention relates to the technical field of track etching films, in particular to a method for simultaneously observing two surfaces of a film by a scanning electron microscope.

Background

The track etching membrane is a microporous filter membrane prepared by a track etching method. For example, polycarbonate membranes can form uniform, properly dense tracks on the membrane when ions penetrate the membrane under the irradiation of high energy particle streams (protons, neutrons, etc.), and then can produce porous membranes with very single pore sizes after etching with alkaline solution. Track etched membranes exhibit good capabilities in stimulus responsive ion channels, ion and molecule sensing, and energy conversion.

Scanning electron microscopy is a common means of characterizing track etched films. However, the scanning electron microscope usually only observes one side of the sample, but cannot observe both sides of the sample simultaneously, and if the sample is rotated to shoot, it is difficult to find the positions of the same back side, and observe both sides of the pore canal on the membrane simultaneously.

Scanning Electron Microscopy (SEM) is a powerful tool for observing the microscopic features of various samples. When the conductive sample is irradiated with electrons, the excess charge rapidly flows away. However, in a non-conductive sample, excess charge accumulates in the sample, creating a charging effect. When a non-conductive sample is first irradiated with an electron beam generated at a high acceleration voltage (15-30 kV), charge concentrations negatively charge the sample surface, and then the same location is imaged with an electron beam generated at a lower acceleration voltage (less than 5 kV), the sample surface may repel the incident electrons, creating an "electron specular effect". Therefore, it is necessary to develop a method of simultaneously observing the track etched film on both sides by using the "electron mirror effect" of the scanning electron microscope.

Disclosure of Invention

The invention aims to provide a method for simultaneously observing two surfaces of a film by a scanning electron microscope, which applies the mirror effect of the scanning electron microscope to the characterization of a track etched film and searches for a method for simultaneously observing the track etched film on two surfaces by using the electron mirror effect of the scanning electron microscope.

According to an object of the present invention, there is provided a method for simultaneously observing both sides of a film by a scanning electron microscope, comprising the steps of:

s1, cutting a clean and flat plane out of a plastic culture dish;

s2, adhering the plane to a scanning electron microscope sample stage by using conductive adhesive;

s3, adhering conductive adhesive to one side of the plane, and adhering the conductive adhesive to the sample table at the same time;

s4, adhering a sample to be observed to conductive adhesive above a plastic plane, hanging parts for observing the upper surface and the lower surface to be suspended above the plastic plane, and respectively performing ion sputtering metal spraying on the upper surface and the lower surface of the sample before adhering if the sample is non-conductive, so that the surfaces of the sample are conductive;

s5, placing the prepared sample stage into a scanning electron microscope;

s6, in a scanning electron microscope, focusing on a plastic plane below a sample, setting the voltage to be 30kV, and setting the beam current to be 20uA for 1 minute;

s7, reducing the voltage to 3kV and the beam current to 10uA;

s8, injecting a large amount of electrons into the plastic plane under the high-voltage and high-beam current just before, and forming an electrostatic field on the surface of the plastic sheet due to non-conduction; when the voltage beam drops, the incident electron beam with weak energy is bounced by the electrostatic field of the plastic plane and irradiates the lower surface of the sample, secondary electrons are generated on the lower surface, and the secondary electrons are captured by the instrument probe, so that a secondary electron image of the lower surface of the sample is formed.

Advantageous effects

The invention applies the mirror effect of the scanning electron microscope to the track etched film characterization, and the method for simultaneously observing the track etched film on the two sides is fuzzed by utilizing the electronic mirror effect of the scanning electron microscope, so as to realize the practical application of the sample characterization.

Detailed Description

The technical solutions of the present invention will be clearly and completely described in connection with the embodiments, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

In the description of the present invention, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," etc. are merely for convenience of description and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise. Furthermore, the terms "mounted," "connected," "coupled," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.

Example 1

A method for simultaneously observing two sides of a film by a scanning electron microscope, comprising the steps of:

1. cutting a plastic culture dish to obtain a clean and flat surface;

2. adhering the plane to a sample stage of a scanning electron microscope by using conductive adhesive;

3. one side of the plane is stuck with conductive adhesive, and the conductive adhesive is stuck to the sample table at the same time;

4. adhering a sample to be observed to conductive adhesive above a plastic plane, hanging parts for observing the upper surface and the lower surface of the sample to be observed above the plastic plane, and respectively performing ion sputtering metal spraying on the upper surface and the lower surface of the sample before adhering if the sample is non-conductive;

5. the prepared sample stage is put into a scanning electron microscope;

6. in a scanning electron microscope, focusing on a plastic plane below a sample, setting the voltage to be 30kV and the beam current to be 20uA for about 1 minute;

7. then the voltage drop is 3kV, and the beam current is 10uA;

8. the plastic plane is injected with a large amount of electrons under the high-voltage and high-beam current just before, and the plastic plane is non-conductive, so that an electrostatic field is formed on the surface of the plastic sheet; when the voltage beam drops, the incident electron beam with weak energy is bounced by the electrostatic field of the plastic plane and irradiates the lower surface of the sample, secondary electrons are generated on the lower surface, and the secondary electrons are captured by the instrument probe, so that a secondary electron image of the lower surface of the sample is formed.

The invention applies the mirror effect of the scanning electron microscope to the track etched film characterization, and the method for simultaneously observing the track etched film on the two sides is fuzzed by utilizing the electronic mirror effect of the scanning electron microscope, so as to realize the practical application of the sample characterization.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention.

Claims (1)

1. A method for simultaneously observing two surfaces of a film by a scanning electron microscope, comprising the steps of:

s1, cutting a clean and flat plane out of a plastic culture dish;

s2, adhering the plane to a scanning electron microscope sample stage by using conductive adhesive;

s3, adhering conductive adhesive to one side of the plane, and adhering the conductive adhesive to the sample table at the same time;

s4, adhering a sample to be observed to conductive adhesive above a plastic plane, hanging parts for observing the upper surface and the lower surface to be suspended above the plastic plane, and respectively performing ion sputtering metal spraying on the upper surface and the lower surface of the sample before adhering if the sample is non-conductive, so that the surfaces of the sample are conductive;

s5, placing the prepared sample stage into a scanning electron microscope;

s6, in a scanning electron microscope, focusing on a plastic plane below a sample, setting the voltage to be 30kV, and setting the beam current to be 20uA for 1 minute;

s7, reducing the voltage to 3kV and the beam current to 10uA;

s8, injecting a large amount of electrons into the plastic plane under the high-voltage and high-beam current just before, and forming an electrostatic field on the surface of the plastic sheet due to non-conduction; when the voltage beam drops, the incident electron beam with weak energy is bounced by the electrostatic field of the plastic plane and irradiates the lower surface of the sample, secondary electrons are generated on the lower surface, and the secondary electrons are captured by the instrument probe, so that a secondary electron image of the lower surface of the sample is formed.