CN116774002B - HAST test box for detecting chip packaging reliability - Google Patents
HAST test box for detecting chip packaging reliability Download PDFInfo
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- CN116774002B CN116774002B CN202310278573.XA CN202310278573A CN116774002B CN 116774002 B CN116774002 B CN 116774002B CN 202310278573 A CN202310278573 A CN 202310278573A CN 116774002 B CN116774002 B CN 116774002B
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- hast test
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- 238000012360 testing method Methods 0.000 title claims abstract description 43
- 238000004806 packaging method and process Methods 0.000 title claims abstract description 10
- 238000007789 sealing Methods 0.000 claims abstract description 56
- 230000007246 mechanism Effects 0.000 claims abstract description 12
- 238000001514 detection method Methods 0.000 claims abstract description 8
- 238000001125 extrusion Methods 0.000 claims description 5
- 230000003014 reinforcing effect Effects 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- 208000010543 22q11.2 deletion syndrome Diseases 0.000 description 9
- 230000032683 aging Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000013011 mating Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2862—Chambers or ovens; Tanks
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- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The invention discloses a HAST test box for detecting the packaging reliability of a chip, which comprises a box body, wherein two sides of the bottom of the box body are symmetrically provided with sealed placing cabins, a storage cavity is arranged between the two sealed placing cabins, a storage rack is arranged in the middle of the storage cavity, two working cavities are vertically arranged at the top of the box body, a detection placing mechanism is arranged in the two working cavities, one side of the box body is connected with a sealing door through a hinge, and a plurality of closed locks are arranged between the sealing door and the box body for locking; the first pinion rack that places is slowly driven through starting rotation motor and rotates, and the pinion rack is placed to first placing pinion rack drive second and is placed the pinion rack rotation, and then places the pinion rack through first placing pinion rack and second and rotate further increase product and external environment contact's area and shorten abundant contact time, and then improve experimental efficiency.
Description
Technical Field
The invention relates to the technical field of chip test equipment, in particular to a HAST test box for detecting the reliability of chip packaging.
Background
The HAST test box is used for improving the environment adaptability of the HAST and comprises a microcomputer control device and a test frame, a HAST product is placed above the double-layer test frame and is adjusted to the optimal height, the related working data of the test box are adjusted through the microcomputer control device, the more the test data are, the more accurate the test result is, however, the HAST test box in the prior art is only provided with a single station and cannot conduct ageing tests on a plurality of products at the same time, therefore, if a plurality of groups of test data are needed to be obtained, multiple ageing tests are needed, a large amount of time is wasted in the process, the working efficiency is extremely low, the ageing test time is long, the efficiency is low, and the sealing performance of the box is greatly affected by the outside.
Disclosure of Invention
In order to overcome the technical problems, the invention aims to provide a HAST test box for detecting the packaging reliability of chips, which is sealed by arranging a plurality of closed locks, meanwhile, the closed locks are mechanical locks, the mechanical locks can be stably kept sealed and are little influenced by external environment, a rotating motor is arranged to slowly drive a first placing toothed plate to rotate, the first placing toothed plate drives a second placing toothed plate to rotate, the contact area of a product and the external environment is further increased and the sufficient contact time is shortened by rotating the first placing toothed plate and the second placing toothed plate, the test efficiency is further improved, a plurality of stations are arranged by arranging the first placing toothed plate and the second placing toothed plate, and meanwhile, the test is carried out on a plurality of products, and the work efficiency is improved.
The aim of the invention can be achieved by the following technical scheme:
the HAST test box for detecting the packaging reliability of the chip comprises a box body, wherein two sides of the bottom of the box body are symmetrically provided with sealed placing bins, a storage cavity is arranged between the two sealed placing bins, a storage rack is arranged in the middle of the storage cavity, two working cavities are vertically arranged at the top of the box body, a detection placing mechanism is arranged in each of the two working cavities, one side of the box body is connected with a sealing door through a hinge, and a plurality of closed locks are arranged between the sealing door and the box body for locking;
wherein detect and place the mechanism and include sealing panel, sealing panel bottom fixedly connected with places the board, install rotating electrical machines in the sealing panel, rotating electrical machines's output runs through and places the board and be connected with the driving gear, place the board middle part and rotate and be provided with first pinion rack of placing, place the board and rotate and be provided with two sets of auxiliary gears in keeping away from driving gear one side, auxiliary gear and driving gear all with first pinion rack engagement of placing, first pinion rack top surface of placing is connected with adjusting screw, threaded connection has the second to place the pinion rack on the adjusting screw, first pinion rack of placing and second are placed the pinion rack top surface and all are provided with a plurality of standing groove.
As a further scheme of the invention: the top of working chamber is arc chamber top, and working chamber bottom both ends symmetry is provided with the support slide rail, and two working chambers all are through supporting slide rail installation detection placement machine constructs.
As a further scheme of the invention: the closing lock comprises a lock catch seat and a clamping seat, wherein a mechanical lock catch is slidably arranged on the lock catch seat, a clamping cavity is formed in the clamping seat, sliding seats are arranged on the upper side and the lower side of the clamping cavity, two sliding seats are connected with release buttons in a matched mode, first springs are connected to the inner side faces of the two sliding seats, a sliding cavity is formed in the sliding seats, a guide pillar is fixedly connected to the bottom of the sliding cavity, a fixing pin is sleeved at one end of the guide pillar, and a second spring is sleeved at the other end of the guide pillar.
As a further scheme of the invention: the extrusion inclined plane has been seted up to fixed pin one side, and the joint straight face has been seted up to the opposite side, has all seted up the draw-in groove on two lock posts of mechanical lock catch, and the fixed pin corresponds the setting with the draw-in groove, fixed pin and draw-in groove joint.
As a further scheme of the invention: handles are symmetrically arranged on two sides of the surface of the sealing panel, and the two handles are embedded.
As a further scheme of the invention: the connection part of the placing plate and the sealing panel is provided with a plurality of reinforcing ribs.
As a further scheme of the invention: a motor mounting groove and a clearance groove are formed in the sealing panel, a rotating motor is mounted in the motor mounting groove, and a driving gear is arranged in the motor mounting groove.
As a further scheme of the invention: the adjusting screw top is provided with spacing lid for restriction adjustment range.
The invention has the beneficial effects that:
when the sealing door is closed, the sealing rubber strip is matched with the sealing groove to seal the working cavity, and the sealing door is provided with the observation window for observing the internal test condition, so that the working cavity is convenient to process in time;
the invention is provided with a plurality of closing locks between the sealing door and the closing end of the box body, the closing locks are mechanical locks, the mechanical locks can keep sealing stably and are little influenced by external environment, wherein the mechanical locks squeeze the extrusion inclined plane of the fixed pin, so that the fixed pin is retracted until the fixed pin is clamped with the clamping groove, and then the closing locks are opened, namely the release button is pressed to drive the sliding seat to move, so that the fixed pin and two locking columns of the mechanical locks are deviated, and the mechanical locks are taken out to realize the opening of the closing locks.
According to the invention, the first placing toothed plate is slowly driven to rotate by starting the rotating motor, and the first placing toothed plate drives the second placing toothed plate to rotate, so that the contact area of a product and the external environment is further increased and the full contact time is shortened by rotating the first placing toothed plate and the second placing toothed plate, and the test efficiency is further improved.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of the working chamber structure of the present invention;
FIG. 3 is a schematic view of a closure lock structure in the present invention;
FIG. 4 is an enlarged schematic view of the structure of FIG. 3 at A;
FIG. 5 is a schematic view of the internal structure of the socket according to the present invention;
FIG. 6 is an enlarged schematic view of the structure of FIG. 5 at B;
FIG. 7 is a schematic diagram of the overall structure of the detection and placement mechanism according to the present invention;
FIG. 8 is a schematic top view of the test placement mechanism of the present invention.
In the figure: 1. a case; 11. sealing and placing the bin; 12. a storage cavity; 121. a commodity shelf; 13. a working chamber; 131. an arc-shaped cavity top; 132. supporting the slide rail; 14. sealing the door; 15. sealing grooves; 16. a sealing rubber strip; 17. an observation window; 2. closing the lock; 21. a latch base; 22. mechanical locking; 221. a clamping groove; 23. a clamping seat; 231. a clamping cavity; 24. a sliding seat; 241. a sliding chamber; 25. releasing the button; 26. a first spring; 27. a fixing pin; 271. extruding the inclined plane; 272. clamping the straight surface; 28. a guide post; 29. a second spring; 3. detecting a placing mechanism; 31. a sealing panel; 311. a handle; 312. a transparent window; 32. placing a plate; 33. reinforcing ribs; 34. a rotating motor; 35. a drive gear; 36. a first placing toothed plate; 37. an auxiliary gear; 38. adjusting a screw; 39. a second placing toothed plate; 310. a limit cover; 313. and (5) placing a groove.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1-8, the HAST test box for detecting the packaging reliability of a chip comprises a box body 1, wherein the whole box body 1 is divided into an upper part and a lower part, the lower part is a placement area, two sides of the placement area are symmetrically provided with seal placement bins 11 for placing products to be stored in a sealing way, a storage rack 121 is arranged between the two seal placement bins 11, a plurality of test tools and sundries are mainly placed on the storage rack 121, the upper part is a working area, two working cavities 13 are arranged in the working area, the tops of the two working cavities 13 are arc-shaped cavity tops 131 for preventing high-temperature steam from directly impacting the products, water drops after steam condensation directly prevent the water drops from affecting the test on the products, the two working cavities 13 are vertically distributed, meanwhile, two ends of the bottoms of the working cavities 13 are symmetrically provided with support sliding rails 132, the two working cavities 13 are provided with a detection placement mechanism 3 through the support sliding rails 132, the two working cavities 13 are arranged on the two sides of the two sealing placement mechanisms, a sealing joint strip is arranged on the two sides of the two working cavities 13, the two working cavities are arranged on the two sides of the two working cavities 13, a sealing joint strip is arranged on the two sealing joint strips, the two sealing joint strips are arranged on the two sealing joint strips 14, the two sealing joint strips are arranged on the sealing joint strips, and the sealing joint strips are arranged on the sealing joint strips and are completely in a sealing joint positions and are arranged on the sealing joint strips and are completely in a sealing joint positions and sealed state and are arranged on the sealing joint positions and sealed layers and are arranged in the sealing surfaces and sealed layers and sealed.
As further shown in fig. 1-6, a plurality of closing locks 2 are arranged between the sealing door 14 and the closing end of the box body 1, and the closing locks 2 are mechanical locks, the mechanical locks can keep sealing stability and are very little influenced by external environment, wherein in detail as shown in fig. 3-6, the closing locks 2 comprise a lock catch seat 21, the lock catch seat 21 is fixedly arranged on the opening and closing side of the sealing door 14, and a mechanical lock catch 22 is slidingly arranged on the lock catch seat 21, wherein the mechanical lock catch 22 is semi-I-shaped, two lock posts at one end penetrate through the lock catch seat 21 to be slidingly arranged, the closing locks 2 also comprise a clamping seat 23, a clamping cavity 231 is arranged in the clamping seat 23, sliding seats 24 are arranged on the upper side and the lower side of the clamping cavity 231, sliding grooves are arranged on the surfaces contacted with the sliding seats 24, and sliding projections are arranged on the sliding seats 24, the sliding seat 24 can slide stably through the cooperation between the sliding convex blocks and the sliding grooves, the outer side surfaces of the two sliding seats 24 are connected with the release button 25 in a matched manner, the inner side surfaces of the two sliding seats 24 are connected with the first spring 26, the other end of the first spring 26 is connected with the bottom surface of the clamping cavity 231, the release button 25 is pressed to drive the two sliding seats 24 to move inwards to realize the function of releasing the mechanical lock catch 22, further as shown in fig. 5-6, the sliding cavity 241 is arranged in the sliding seat 24, the guide pillar 28 is fixedly connected with the bottom of the sliding cavity 241, the top of the guide pillar 28 is sleeved with the fixed pin 27, the outer side axial surface of the fixed pin 27 is in sliding contact with the sliding cavity 241, the guide pillar 28 is sleeved with the second spring 29, the bottom of the second spring 29 is connected with the sliding cavity 241, the top of the second spring 29 is connected with the bottom of the fixed pin 27, the fixing pin 27 is further slid on the guide post 28 by pressing the fixing pin 27 and thus the spring;
further, an extrusion inclined plane 271 is formed on one side of the fixing pin 27 close to the mechanical lock catch 22, a clamping straight plane 272 is formed on one side of the fixing pin 27 far away from the mechanical lock catch 22, clamping grooves 221 are formed on two lock posts of the mechanical lock catch 22, the two lock posts are symmetrically arranged about a central line, the setting position of the fixing pin 27 corresponds to the opening position of the clamping groove 221, the fixing pin 27 is clamped with the clamping groove 221, the extrusion inclined plane 271 of the fixing pin 27 is extruded through the mechanical lock catch 22, the fixing pin 27 is retracted until the fixing pin 27 is clamped with the clamping groove 221, then, if the closing lock 2 is to be opened, namely, the release button 25 is pressed, the sliding seat 24 is driven to move, the fixing pin 27 and the two lock posts of the mechanical lock catch 22 are offset, and the mechanical lock catch 22 is taken out, so that the closing lock 2 is opened.
As further shown in fig. 1 and 7-8, the above-mentioned detecting and placing mechanism 3 includes a sealing panel 31, a mating groove is provided on one side of the front face of the working chamber 13 of the case 1, the mating groove is adapted to the shape of the sealing panel 31, further sealing is performed, two handles 311 are symmetrically provided on both sides of the surface of the sealing panel 31, and two handles 311 are embedded, a transparent window 312 is provided in the middle of the surface of the sealing panel 31, the matching observation window 17 is used for observing the internal test conditions, the bottom end of the inner side of the sealing panel 31 is fixedly connected with a placing plate 32, and a plurality of reinforcing ribs 33 are provided at the joint of the placing plate 32 and the sealing panel 31, the reinforcing ribs 33 are further provided only at the bottom of the joint, and a motor mounting groove is provided in the sealing panel 31, a rotating motor 34 is fixedly mounted in the motor mounting groove, the output end of the rotating motor 34 penetrates through the placing plate 32 to be connected with the driving gear 35, and the sealing panel 31 is provided with a clearance groove to avoid interference with the driving gear 35, meanwhile, the middle part of the placing plate 32 is rotationally provided with a first placing toothed plate 36 meshed with the driving gear 35, the placing plate 32 is rotationally provided with two groups of auxiliary gears 37 at one side far away from the driving gear 35, the two groups of auxiliary gears 37 are symmetrically distributed about the transverse central line of the first placing toothed plate 36, simultaneously, the two groups of auxiliary gears 37 are both meshed with the first placing toothed plate 36, the center of the top surface of the first placing toothed plate 36 is fixedly connected with an adjusting screw 38, the adjusting screw 38 is in threaded connection with a second placing toothed plate 39, and a limiting cover 310 is also arranged at the top of the adjusting screw 38 to limit the adjusting range, and a plurality of placing grooves 313 are arranged on the top surfaces of the first placing toothed plate 36 and the second placing toothed plate 39, the device is used for placing test detection products, when the test detection is carried out, the rotating motor 34 is started to slowly drive the first placing toothed plate 36 to rotate, the first placing toothed plate 36 drives the second placing toothed plate 39 to rotate, the contact area of the products and the external environment is further increased through the rotation of the first placing toothed plate 36 and the second placing toothed plate 39, the sufficient contact time is shortened, and the test efficiency is further improved.
The temperature sensor, the temperature controller, the humidity sensor and the humidity controller are arranged at the positions corresponding to the two working cavities 13 on one side of the back of the box body 1, the temperature of the two working cavities 13 is detected through the temperature sensor, the temperature is further controlled through the temperature controller, the humidity of the two working cavities 13 is detected through the humidity sensor, the humidity is controlled through the humidity controller, the water tank is arranged at the bottom of the back, the water level regulating valve is arranged in the water tank, the water level in the water tank is controlled, the heating pipe is further arranged on the back of the box body, the water in the water tank is heated, then the water vapor obtained by heating is injected into the two working cavities 13 through the water vapor communicating pipe for testing, the front of the sealing door 14 of the box body 1 is further provided with the PLC controller, the PLC controller is controlled and is electrically connected with the temperature sensor, the temperature controller, the humidity sensor, the humidity controller, the heating pipe and the rotating motor 34, the PLC controller is controlled to flexibly control, the environmental requirements of the test are met, and the warning lamp is arranged at the top of the box body 1 for warning and the warning effect is electrically connected with the PLC controller.
In the description of the present invention, it should be understood that the terms "upper," "lower," "left," "right," and the like indicate an orientation or a positional relationship based on that shown in the drawings, and are merely for convenience of description and for simplifying the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, as well as a specific orientation configuration and operation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
The foregoing describes one embodiment of the present invention in detail, but the description is only a preferred embodiment of the present invention and should not be construed as limiting the scope of the invention. All equivalent changes and modifications within the scope of the present invention are intended to be covered by the present invention.
Claims (8)
1. The HAST test box for detecting the packaging reliability of chips comprises a box body (1), wherein two sides of the bottom of the box body (1) are symmetrically provided with sealed placing cabins (11), a storage cavity (12) is arranged between the two sealed placing cabins (11), a storage rack (121) is arranged in the middle of the storage cavity (12), and two working cavities (13) are vertically arranged at the top of the box body (1), and the HAST test box is characterized in that a detection placing mechanism (3) is arranged in the two working cavities (13), one side of the box body (1) is connected with a sealing door (14) through a hinge, and a plurality of closing locks (2) are arranged between the sealing door (14) and the box body (1) for locking;
wherein detect and place mechanism (3) including sealed panel (31), sealed panel (31) bottom fixedly connected with places board (32), install rotation motor (34) in sealed panel (31), the output of rotation motor (34) runs through and places board (32) and be connected with driving gear (35), it is provided with first pinion rack (36) to place board (32) middle part rotation, it is provided with two sets of pinion rack (37) to place board (32) in keeping away from driving gear (35) one side rotation, pinion rack (37) and pinion rack (35) all mesh with first pinion rack (36) of placing, first pinion rack (36) top surface is connected with adjusting screw (38), threaded connection has the second to place pinion rack (39) on adjusting screw (38), first pinion rack (36) and second are placed pinion rack (39) top surface and all are provided with a plurality of standing groove (313).
2. The HAST test box for detecting the packaging reliability of chips according to claim 1, wherein the top of the working cavity (13) is an arc-shaped cavity top (131), two ends of the bottom of the working cavity (13) are symmetrically provided with supporting sliding rails (132), and the two working cavities (13) are provided with a detecting and placing mechanism (3) through the supporting sliding rails (132).
3. The HAST test box for detecting the packaging reliability of chips according to claim 1, wherein the closing lock (2) comprises a lock catch seat (21) and a clamping seat (23), a mechanical lock catch (22) is slidably arranged on the lock catch seat (21), a clamping cavity (231) is formed in the clamping seat (23), sliding seats (24) are respectively arranged on the upper side and the lower side of the clamping cavity (231), release buttons (25) are cooperatively connected with the two sliding seats (24), a first spring (26) is respectively connected with the inner side surfaces of the two sliding seats (24), a sliding cavity (241) is formed in the sliding seat (24), a guide pillar (28) is fixedly connected with the bottom of the sliding cavity (241), a fixing pin (27) is sleeved at one end of the guide pillar (28), and a second spring (29) is sleeved at the other end of the guide pillar (28); the release button (25) is pressed to drive the sliding seat (24) to move, so that the fixed pin (27) and two lock posts of the mechanical lock catch (22) are offset, the mechanical lock catch (22) is taken out, and the closing lock (2) is opened.
4. A HAST test box for testing the reliability of chip package according to claim 3, wherein an extrusion inclined plane (271) is provided on one side of the fixing pin (27), a clamping straight plane (272) is provided on the other side, clamping grooves (221) are provided on both locking posts of the mechanical lock catch (22), the fixing pin (27) is arranged corresponding to the clamping grooves (221), and the fixing pin (27) is clamped with the clamping grooves (221).
5. The HAST test box for detecting the package reliability of chips according to claim 1, wherein the handles (311) are symmetrically arranged on two sides of the surface of the sealing panel (31), and the two handles (311) are embedded.
6. HAST test chamber for testing the reliability of a chip package according to claim 1, characterized in that a plurality of reinforcing ribs (33) are provided at the connection of the placement plate (32) and the sealing panel (31).
7. HAST test box for detecting the reliability of chip package according to claim 1, characterized in that the sealing panel (31) is provided with a motor mounting groove and a clearance groove, the rotating motor (34) is mounted in the motor mounting groove, and the driving gear (35) is arranged in the motor mounting groove.
8. HAST test chamber for detecting the reliability of chip packages according to claim 1, characterized in that the top of the adjusting screw (38) is provided with a limit cap (310) for limiting the adjusting range.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310278573.XA CN116774002B (en) | 2023-03-21 | 2023-03-21 | HAST test box for detecting chip packaging reliability |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310278573.XA CN116774002B (en) | 2023-03-21 | 2023-03-21 | HAST test box for detecting chip packaging reliability |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116774002A CN116774002A (en) | 2023-09-19 |
| CN116774002B true CN116774002B (en) | 2023-12-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310278573.XA Active CN116774002B (en) | 2023-03-21 | 2023-03-21 | HAST test box for detecting chip packaging reliability |
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| CN (1) | CN116774002B (en) |
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