CN116766158A - Transport and erection structure and detection device - Google Patents

Abstract

The application relates to the technical field of semiconductor detection, and provides a carrying and erecting structure and a detection device. The carrying and erecting structure comprises an erecting guide rail, a plurality of erecting cross beams and a plurality of mechanical arms; each erection beam is arranged at an angle with the erection guide rail, is arranged at intervals along the length direction of the erection guide rail, and is respectively and slidably connected with the erection guide rail; wherein, each erection beam is connected with a manipulator in a sliding way; or at least part of the erection beams are connected with at least two manipulators in a sliding manner, and the manipulators are arranged at intervals along the length direction of the erection beams; the erection beams do not interfere with each other, and the manipulators do not interfere with each other. This transport erects structure with a plurality of manipulators integration in one erects the guide rail, avoids every manipulator to correspond a large amount of material wastage when erecting the guide rail, reduces the guide rail quantity that need carry out the precision debugging to reduce assembly time, use manpower sparingly, material resources.

Description

Transport and erection structure and detection device

Technical Field

The application relates to the technical field of semiconductor detection, in particular to a carrying and erecting structure and a detection device.

Background

The semiconductor chip is usually carried among the stations by using carrying manipulators in detection, and each manipulator needs to be provided with a guide rail in the same direction along the moving direction during carrying. At present, the number of manipulators used for carrying semiconductor chips is very large, so that the number of guide rails correspondingly assembled is also very large; meanwhile, the debugging precision of each guide rail in the assembly process is very troublesome, and the adjustment precision of all guide rails is difficult to ensure to be uniform; and, more rails means higher cost.

Disclosure of Invention

Based on this, it is necessary to provide a carrying and erecting structure which reduces the number of guide rails and reduces the cost while satisfying the assembly of a plurality of manipulators.

A carrying and erecting structure comprises an erecting guide rail, a plurality of erecting beams and a plurality of manipulators; each erection cross beam is arranged at an angle with the erection guide rail, is arranged at intervals along the length direction of the erection guide rail, and is respectively connected with the erection guide rail in a sliding manner; wherein each erection beam is connected with one manipulator in a sliding way; or at least part of the erection beams are connected with at least two manipulators in a sliding manner, and the manipulators are arranged at intervals along the length direction of the corresponding erection beam; the erection beams do not interfere with each other, and the manipulators do not interfere with each other.

It will be appreciated that by arranging a plurality of erection beams at intervals along the length of the erection rail, each erection beam can be moved along the length of the erection rail; thus, the plurality of manipulators share one erection rail, and have the same movement reference along the length direction of the erection rail. That is, when assembling a plurality of manipulators, it only needs to assemble the erection guide rail for integrating a plurality of manipulators, avoids a large amount of material waste when each manipulator corresponds to one erection guide rail, saves the quantity of erection guide rail, and then avoids the precision debugging of a large amount of erection guide rails in the assembly and assembly process, thereby shortening the assembly time, saving manpower and material resources.

In some of these embodiments, the erection rail comprises at least two monorail bodies spaced apart along the length of the erection beam; the erection cross beam is positioned between any two adjacent monorail bodies, or at least one end of the erection cross beam along the length direction of the erection cross beam protrudes out of the monorail bodies on the same side.

In some of these embodiments, the handling structure further comprises a support substrate; along the thickness direction of the support substrate, a first installation space is formed in the upper surface of the support substrate, a second installation space is formed in the lower surface of the support substrate, and the erection guide rail, the erection cross beam and the manipulator are all installed in the second installation space and connected with the support substrate.

In some embodiments, the handling structure further comprises a drive assembly mounted within the first mounting space; the support base plate is provided with a long hole along the thickness direction of the support base plate, and part of the transmission assembly can extend to the second installation space through the long hole and is connected with the erection cross beam; the transmission assembly is used for driving the erection cross beam to reciprocate along the length direction of the erection guide rail, and the part of the transmission assembly positioned in the long hole can move in the long hole; and each erection beam is correspondingly connected with a group of transmission assemblies.

In some embodiments, the transmission assemblies corresponding to any adjacent erection beams are staggered along the length direction of the erection guide rail.

In some embodiments, a limiting member is disposed between any two adjacent erection beams along the length direction of the erection guide rail; and/or a limiting piece is arranged between any two adjacent manipulators along the length direction of the erection cross beam.

In some of these embodiments, the stop includes at least a sensor configured to emit a detection signal in response to occlusion by the manipulator; and/or the limiting piece at least comprises a limiting block, wherein the limiting block is arranged at the edge of the long hole along the length direction of the long hole and is used for being abutted with the erection cross beam so as to limit the travel of the erection cross beam.

The application also provides a detection device which is used for detecting the semiconductor element and has lower cost.

The detection device comprises the carrying and erecting structure and a working machine table, wherein the working machine table is provided with a feeding area, a conversion area and a circulation area which are arranged at intervals, and the carrying and erecting structure is arranged above the working machine table; and part of the manipulator flows in the carrying and erecting structure are transferred to the feeding area and the conversion area, and the other part of the manipulator flows in the conversion area and the transfer area.

In some embodiments, the workbench further comprises a recycling area, and the recycling area is arranged at intervals relative to the feeding area, the conversion area and the circulation area; the other part of the manipulator in the carrying and erecting structure can also flow to the flow-turning area and the recovery area.

In some embodiments, each of the robots includes a plurality of pickups spaced apart along a first direction and a second direction; the first direction is arranged at an angle to the second direction; when part of the manipulator flows from the feeding area to the conversion area, the distance between the plurality of pick-up pieces along the first direction can be increased to a first distance; when another part of the manipulator rotates from the conversion area to the circulation area, the distance between the plurality of pick-up pieces along the second direction can be increased to a second distance.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments or the conventional techniques of the present application, the drawings required for the descriptions of the embodiments or the conventional techniques will be briefly described below, and it is apparent that the drawings in the following descriptions are only some embodiments of the present application, and other drawings may be obtained according to the drawings without inventive effort for those skilled in the art.

FIG. 1 is a first simplified illustration of a carrying and erecting structure provided by the present application;

FIG. 2 is a second simplified illustration of a handling structure according to the present application;

FIG. 3 is a third simplified illustration of a handling structure according to the present application;

FIG. 4 is a schematic view of a carrying and erecting structure according to the present application;

fig. 5 is a simplified flow chart of the detection device provided by the application.

Reference numerals: 10. a manipulator; 20. erecting a guide rail; 21. a monorail body; 30. erecting a cross beam; 40. a support substrate; 50. a transmission assembly; 61. a limiting block; 62. a sensor; 100. a carrying and erecting structure; 101. a travel range; 201. an assembly space; 201a, left side assembly space; 201b, a middle assembly space; 201c, right side assembly space; 210. a feeding area; 220. a transition region; 230. a circulation zone; 240. a recovery zone; 401. a first installation space; 402. a second installation space; 403. a long hole.

Detailed Description

In order that the above objects, features and advantages of the application will be readily understood, a more particular description of the application will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. The present application may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the application, whereby the application is not limited to the specific embodiments disclosed below.

It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When a component is considered to be "connected" to another component, it can be directly connected to the other component or intervening components may also be present. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and the like are used in the description of the present application for the purpose of illustration only and do not represent the only embodiment.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present application, unless expressly stated or limited otherwise, a first feature "up" or "down" on a second feature may be that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through intermedial media. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely under the second feature, or simply indicating that the first feature is less level than the second feature.

Unless defined otherwise, all technical and scientific terms used in the specification of the present application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and/or" as used in the description of the present application includes any and all combinations of one or more of the associated listed items.

As shown in fig. 1 and 2, an embodiment of the present application provides a handling and erecting structure 100, including an erecting guide 20, a plurality of erecting beams 30 and a plurality of manipulators 10. Each of the erection beams 30 is disposed at an angle to the erection rail 20, and each of the erection beams 30 is disposed at intervals along the length direction of the erection rail 20 and is slidably connected to the erection rail 20. Wherein, each erection beam 30 is slidingly connected with one manipulator 10, and each erection beam 30 is not interfered with each other, and each manipulator 10 is not interfered with each other.

That is, by arranging a plurality of erection beams 30 at intervals along the length direction of the erection rail 20, each erection beam 30 can move along the length direction of the erection rail 20; in this way, the plurality of robots 10 share one mounting rail 20, and have the same movement reference along the longitudinal direction of the mounting rail 20. That is, when assembling the plurality of manipulators 10, only the erection guide rails 20 for integrating the plurality of manipulators 10 need to be assembled, so that a great amount of material waste is avoided when each manipulator 10 corresponds to one erection guide rail 20, the number of erection guide rails 20 is saved, and further, the precision debugging of a great amount of erection guide rails 20 in the assembling and assembling process is avoided, thereby shortening the assembling time and saving manpower and material resources. In addition, since the plurality of manipulators 10 can be integrated on the same erection rail 20, the stroke of the single manipulator 10 is reduced, and the stability of each manipulator 10 in the circulation process is improved.

In an alternative embodiment, as shown in fig. 2, at least part of the erection beams 30 are slidably connected with at least two manipulators 10, where each manipulator 10 is arranged at intervals along the length direction of the corresponding erection beam 30, and there is no interference between the erection beams 30 and between the manipulators 10. This arrangement corresponds to an increase in the number of robots 10 that can be integrally assembled on a single erection beam 30, thereby shortening the stroke of the single robot 10 in the length direction of the erection beam 30 and further improving the movement stability.

In one specific embodiment, as shown in fig. 2, three erection beams 30 are arranged on the erection rail 20 at intervals, wherein one erection beam 30 is slidably connected with one manipulator 10, and the other erection beam 30 is slidably connected with three manipulators 10, and the other erection beam 30 is slidably connected with two manipulators 10. Of course, in other embodiments, three robots 10 may be provided on each of the three erection beams 30.

It should be noted that the specific arrangement of the erection beam 30 relative to the erection rail 20 and the distribution of the manipulator 10 are all related to the actual requirement of the circulation condition. This is by way of example only and is not limiting in number.

Referring to fig. 1 and 2, in some embodiments, the erection rail 20 includes at least two monorail bodies 21 spaced apart along the length of the erection beam 30, and at least three assembly spaces 201 are partitioned by the at least two monorail bodies 21. As shown in fig. 1 and 2, a description will be given specifically by taking as an example the case of having two monorail bodies 21. Taking the placement in fig. 2 as an example, the two monorail bodies 21 are arranged at intervals in the left-right direction, respectively, a first monorail body and a second monorail body, a left fitting space 201a is defined at the left side of the first monorail body, a middle fitting space 201b is defined between the first monorail body and the second monorail body, and a right fitting space 201c is defined at the right side of the second monorail body. In this way, three assembly spaces 201 can be separated by two monorail bodies 21. Of course, the number of the monorail bodies 21 may be three, four or even more, and the number of the divided assembly spaces 201 is n+1 when the number of the monorail bodies 21 is N.

In actual use, if each of the erection beams 30 is slidably connected with one of the manipulators 10, each of the manipulators 10 may be located in the middle assembly space 201b, and the corresponding travel range 101 is also located in the middle assembly space 201 b. Of course, it is also possible that part of the manipulator 10 is located in the middle assembly space 201, and the other part is located in the left assembly space 201a or the right assembly space 201c, and the stroke range 101 of the manipulator 10 may be in the corresponding assembly space 201, or two assembly spaces 201, or span three assembly spaces 201. The specific travel range 101 needs to be adjusted adaptively according to actual requirements. If the erecting beam 30 is slidably connected with more than two manipulators 10, the arrangement is similar, and thus, the description thereof will not be repeated.

As shown in fig. 1 and 2, the erection beam 30 is exemplarily located between any adjacent two of the monorail bodies 21, that is, the two ends of the erection beam 30 along the length direction thereof do not protrude from the monorail bodies 21 on the same side, so as to avoid interference of the erection beam 30 with other structures. In this case, the erecting beam 30 is typically slidably connected to a manipulator 10, and the travel range 101 of the manipulator 10 is within the middle assembly space 201a between the two monorail bodies 21. In some embodiments, at least one end of the erecting beam 30 along the length direction thereof protrudes from the monorail body 21 on the same side, which is equivalent to that the erecting beam 30 spans at least two assembly spaces 201 along the length direction thereof, and the number of the installed robots 10 can be increased, or the travel range of a single robot 10 can be increased.

Taking the example of having two monorail bodies 21, the arrangement of the manipulator 10 with respect to the assembly space 201 is described by way of example.

As shown in fig. 1, in one embodiment, when one manipulator 10 is slidably connected to each of the erection beams 30 of the erection rail 20, both ends of each erection beam 30 in the longitudinal direction thereof may not protrude from the erection rail 20. At this time: the left side fitting space 201a and the right side fitting space 201c are both dead spaces, and only the middle fitting space 201b is an effective conveyance space. Such an arrangement saves costs while satisfying transportation, and reduces interference between the erection beam 30 and other structures.

With continued reference to fig. 2, as another embodiment, three erection beams 30 are taken as an example: two ends of one erection beam 30 do not protrude from the two monorail bodies 21 and are connected with one manipulator 10; two ends of the other erection beam 30 protrude from the two monorail bodies 21 to extend into the left side assembling space 201a and the right side assembling space 201c, and are connected with three manipulators 10, and the left side assembling space 201a, the middle side assembling space 201b and the right side assembling space 201c respectively correspond to one manipulator 10; wherein both ends of the further erecting beam 30 are protruded from the two monorail bodies 21, but are smaller than the length of the previous erecting beam 30, and are connected with two manipulators 10, the middle assembly space 201b is divided into two parts, one part is used as a part of the travel range 101 of the left manipulator 10, and the other part is used as a part of the travel range 101 of the right manipulator 10. At this time, the above three assembly spaces 201 are all effective conveyance spaces.

In an alternative embodiment, two monorail bodies 21, three bridging beams 30 are exemplified. Two ends of the three erection beams 30 along the length direction of the three erection beams can respectively protrude out of the two monorail bodies 21, and at the moment, each erection beam 30 can be connected with two manipulators 10 or three manipulators 10 in a sliding manner. Of course, one of the erection beams 30 may be located between the two monorail bodies 21 and connected with one manipulator 10, two ends of the other two erection beams 30 protrude from the two monorail bodies 21 respectively, and each erection beam 30 is connected with two manipulators 10; of course, it is also possible to connect one manipulator 10, and the stroke range 101 of the manipulator 10 may span three assembly spaces 201.

It should be noted that the specific arrangement is adjusted according to the actual requirement, and this is only illustrated here.

As shown in fig. 3 and 4, in some embodiments, the handling and erecting structure 100 further includes a support substrate 40, a first installation space 401 is located on the upper surface of the support substrate 40 along the thickness direction of the support substrate 40, a second installation space 402 is located on the lower surface of the support substrate 40, the erecting rail 20, the erecting beam 30 and the manipulator 10 are all installed in the second installation space 402, and the erecting rail 20 is connected to the support substrate 40.

On the one hand, the arrangement of the plate body structure of the supporting substrate 40 occupies a wider space, so that the open area existing during square pipe bearing is compensated; on the other hand, the supporting substrate 40 has a larger supporting area, i.e. two mounting spaces can be formed on two sides of the supporting substrate 40 along the thickness direction of the supporting substrate, so that the positions for assembling the bearing components are formed on the upper and lower sides of the supporting substrate 40, and the practical bearing area is increased. Thus, the structure required for carrying can be installed in a space, partially above the support substrate 40, and partially below the support substrate 40, such as the above-described erection rail 20, erection beam 30, and robot 10, so as to reduce the installation interference between the components; in addition, components that need to be integrated on the manipulator 10 may also be mounted above the support substrate 40, such as a vacuum device and an air path assembly, so as to reduce the load of the manipulator 10 and improve the conveying stability. In addition, because the thickness of the supporting substrate 40 is smaller than that of the square tube, even if the vacuum device is arranged on the upper surface of the supporting substrate 40, the distance between the vacuum device and the manipulator 10 can be reduced, the length of the air path is reduced, the vacuum response is convenient in time, and the adsorption stability is improved.

With continued reference to fig. 4, in an alternative embodiment, the carrying and erecting structure 100 further includes a transmission assembly 50, and the transmission assembly 50 is installed in the first installation space 401. The support base plate 40 is configured with a long hole 403 in its thickness direction, and a portion of the transmission assembly 50 can extend into the second installation space 402 through the long hole 403 and be connected to the bridge beam 30. The transmission assembly 50 is used for driving the erection beam 30 to reciprocate along the length direction of the erection guide 20, and the part of the transmission assembly 50 located in the long hole 403 can move in the long hole 403. A set of drive assemblies 50 are correspondingly connected to each of the cross members 30.

It will be appreciated that the drive of the erecting beam 30 is facilitated by the arrangement of the transmission assembly 50; in addition, since the transmission assembly 50 is installed in the first installation space 401, installation interference between the transmission assembly 50 and the manipulator 10, the erection beam 30 and the erection guide rail 20 can be reduced, so as to improve the circulation stability of the manipulator 10. Meanwhile, by means of the long holes 403, when the transmission assembly 50 is connected with the erection beam 30 to realize circulation driving, the long holes 403 can also play a role in moving and guiding, so that circulation stability is improved. In addition, set up independent drive assembly 50 to each erects crossbeam 30, be convenient for control each and erect the removal of crossbeam 30 respectively, and reduce drive assembly 50's load, further improve the circulation stability.

With continued reference to fig. 4, in some embodiments, the drive assembly 50 may be belt driven to carry a relatively large load. For example, the transmission assembly 50 includes a driving wheel, a driven wheel, and a transmission belt stretched therebetween, to which an engagement arm is connected, the engagement arm being connected to the erection beam 30 through the long hole 403 to achieve driving of the erection beam 30. In order to improve the driving stability and the connection reliability of the erecting beam 30, the driving wheel, the driven wheel and the driving belt are provided with at least two groups which are arranged at intervals along the length direction of the erecting beam 30, the two groups are in transmission connection through a transmission shaft, and each group corresponds to a long hole 403 and a connecting arm; in this way, the transmission assembly 50 can be promoted to form a U-shape, and the motor can be arranged in the space defined by the U-shape, so that the occupied space is reduced.

With continued reference to fig. 4, the transmission assemblies 50 corresponding to any adjacent cross-frame members 30 are illustratively staggered along the length of the cross-frame rails 20. In practical use, the parts of the driving belt connected with the driving wheel and the driven wheel do not belong to the circulation range of the erection beam 30 in consideration of the movement interference between the driving wheel and the driven wheel relative to the connecting arms. Therefore, any two adjacent sets of transmission assemblies 50 are staggered, which is equivalent to overlapping the above-mentioned partial structures not belonging to the circulation range of the erection beam 30 in the longitudinal direction of the erection rail 20, so as to reduce the space occupied by all the erection beams 30 corresponding to the transmission assemblies 50 along the longitudinal direction of the erection rail 20.

It should be noted that the above-mentioned spaces overlap, and it is not to say that the driving wheel or the driven wheel is shared between any two adjacent erecting beams 30, but the axes of the driving wheels or the driven wheels corresponding to each other are coaxial, or the driving wheels or the driven wheels corresponding to each other are located in the space defined by the U-shape formed by each other.

As shown in fig. 3 and 4, in an alternative embodiment, a limiting member is provided between any adjacent two of the erection beams 30 along the length direction of the erection rail 20; meanwhile, a limiting member is provided between any two adjacent manipulators 10 along the length direction of the erection beam 30. That is, by providing the stopper, interference, such as collision, between any two adjacent manipulators 10 along the length direction of the erection rail 20 is avoided. Wherein, limit parts are arranged at critical positions of the two manipulators 10 corresponding to the stroke ranges 101 respectively.

Wherein the stop comprises at least a sensor 62, the sensor 62 being configured to emit a detection signal in response to occlusion by the manipulator 10. The provision of the sensor 62 ensures feedback timeliness so that deviations in movement of the robot 10 are found in time to adjust the settling period. Specifically, the number of the sensors 62 is plural, and the sensors 62 are arranged at intervals along the length direction of the erection rail 20, and an erection beam 30 is slidingly connected between any two adjacent sensors 62. When a certain manipulator 10 moves within the detection range of the sensor 62, the sensor 62 is triggered to send a detection signal to the control unit, so as to control the manipulator 10 to return to the safety range in time.

Further, the limiting member at least includes a limiting block 61, and the limiting block 61 is mounted on an edge of the long hole 403 along the length direction thereof. The stopper 61 can abut against an engagement arm connected to the erection beam 30 to restrict the stroke of the erection beam 30. Specifically, at both ends of the long hole 403 in the length direction, stoppers 61 are respectively protruded on the support substrate 40, and the distance between the driven wheel and the driving wheel is larger than the length of the long hole 403. The stopper 61 serves as a hard stopper, and can cooperate with the sensor 62 (serving as a soft stopper) to satisfy the stopper of the girder 30. For example, when the sensor 62 fails, the stopper 61 may also function as an auxiliary stopper. In this way, collisions between any adjacent erection beams 30 or robots 10 can be reduced.

Referring to fig. 1-3, in some embodiments, the stop member includes a sensor 62 and a stop block 61. The setting of the limiting block 61 is the same as that described above, and thus will not be described again. For the arrangement of the sensors 62, a plurality of sensors 62 are arranged between the plurality of erection beams 30 at intervals along the length direction of the erection rail 20; meanwhile, between the plurality of manipulators 10 on each of the erection beams 30, a plurality of sensors 62 are arranged at intervals along the length direction of the erection beam 30. Of course, the sensor 62 may be mounted on the robot 10, so that the distance between any two adjacent robots 10 may be measured by the sensor 62 to perform the limiting. When the distance reaches a critical value, an alarm can be prompted.

The sensor 62 may be any sensor that can satisfy the stroke limitation between any two adjacent manipulators 10.

As shown in fig. 5, a further embodiment of the present application provides a detection apparatus, which includes a working platform and the above-mentioned carrying and erecting structure 100, and the carrying and erecting structure 100 is installed above the working platform. The working platform is provided with a feeding area 210, a conversion area 220 and a circulation area 230 which are arranged at intervals, part of the manipulators 10 in the carrying and erecting structure 100 circulate in the feeding area 210 and the conversion area 220, and the other part of the manipulators 10 circulate in the conversion area 220 and the circulation area 230.

Specifically, by arranging different manipulators 10 between different areas, the transfer efficiency is improved while the transfer of semiconductor elements is satisfied, the transfer distance of each manipulator 10 is reduced, and the transfer stability is improved. The loading area 210, the converting area 220 and the transferring area 230 may be arranged at intervals along the length direction of the erection rail 20, so that each manipulator 10 may be integrally assembled on the same erection rail 20, and the same transferring direction and reference are ensured. The conversion area 220 may also be used as a temporary storage area, and the circulation area 230 is a carrying area for testing semiconductor devices. In practical use, two loading areas 210 may be correspondingly disposed, and spaced along the length direction of the erection beam 30, and respectively correspond to one manipulator 10.

Further, in the process of inspecting the semiconductor device, the working machine further has a recycling area 240, and the recycling area 240 is spaced apart from the feeding area 210, the converting area 220 and the circulating area 230. Another part of the robot 10 in the handling frame mechanism can flow to the transfer zone 230 and the recovery zone 240.

When testing is performed, a problem may occur in the testing cavity, the collected information is used for indicating that part of pits in the circulation disk belong to testing abnormality, and the information is fed back to the upper computer module. Therefore, the upper computer module can adjust the material taking area of the manipulator 10 to avoid the problem of pit opening. Meanwhile, the semiconductor device corresponding to the problem pit is also transported to the recycling area 240 by the robot 10. By the arrangement, the shutdown condition of the whole test system can be effectively avoided, and the problem is solved while the normal operation of the test is ensured.

The first manipulator is disposed between the feeding area 210 and the converting area 220, and the second manipulator is disposed between the converting area 220 and the circulating area 230. The loading area 210 houses a loading tray, the transition area 220 houses a transition tray, the circulation area 230 houses a flow carousel, and the recovery area 240 houses a recovery tray. The first manipulator sucks the semiconductor element from the feeding disc and conveys the semiconductor element to the conversion disc; and then the second manipulator sucks the semiconductor element of the conversion plate and conveys the semiconductor element to the circulation plate. In the process, if a problem occurs in the previous round of detection, for example, a problem occurs in some test stations, carrying the semiconductor elements which are not detected by the feeding in the flow turntable and have problems to a recovery disk through a second mechanical arm; meanwhile, the first manipulator detects the position of the second manipulator in the carrying process when carrying the semiconductor element of the loading tray, so as to avoid interference collision of the first manipulator and the second manipulator.

The first and second robots are only exemplified here, and are not limited in number. Two or three robots 10 may be provided between the loading area 210 and the transfer area 220, and two or three robots 10, or even four robots 10 may be provided between the transfer area 220 and the transfer area 230.

With continued reference to fig. 5, each of the manipulators 10 includes a plurality of picking members spaced apart along the first and second directions; the first direction is arranged at an angle to the second direction; when part of the manipulator 10 flows from the feeding area 210 to the conversion area 220, the spacing between the plurality of pick-up pieces along the first direction can be increased to a first spacing; when another part of the manipulator 10 rotates from the converting area 220 to the rotating area 230, the pitch of the plurality of pick-up members along the second direction can be increased to the second pitch.

That is, it is used in the flow region 230 where the semiconductor device is tested, and the pitch of each pit on the flow carousel is different from that of each pit on the loading tray. In this case, the pitch between the semiconductor elements needs to be adjusted during the handling process to be suitable for the flow turntable. The pitch between the semiconductors includes an X-direction (first direction) pitch and a Y-direction (second direction) pitch, so that two pitch adjustments are required. Specifically, when the first manipulator sucks the semiconductor element from the feeding disc and conveys the semiconductor element to the conversion disc, the first manipulator performs X-direction distance change, namely increases to a first distance; then, when the second manipulator sucks the semiconductor element of the conversion tray and conveys the semiconductor element to the transfer tray, the Y-direction pitch change is performed, namely, the pitch is increased to a second pitch. Therefore, the conversion region 220 is not only used for temporary storage of the semiconductor device, but also used for temporary storage of the primary pitch change so as to facilitate secondary pitch change.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of the application should be determined from the following claims.

Claims (10)

1. A carrying and erecting structure, characterized in that the carrying and erecting structure (100) comprises an erecting guide rail (20), a plurality of erecting beams (30) and a plurality of manipulators (10);

each erection cross beam (30) is arranged at an angle with the erection guide rail (20), and each erection cross beam (30) is arranged at intervals along the length direction of the erection guide rail (20) and is respectively connected with the erection guide rail (20) in a sliding manner;

wherein each erection beam (30) is connected with one manipulator (10) in a sliding way; or, at least part of the erection beams (30), each erection beam (30) is slidably connected with at least two manipulators (10), and each manipulator (10) is arranged at intervals along the length direction corresponding to the erection beam (30);

the erection beams (30) do not interfere with each other, and the manipulators (10) do not interfere with each other.

2. Handling and erecting structure according to claim 1, characterized in that said erecting guide (20) comprises at least two monorail bodies (21) arranged at intervals along the length of said erecting cross beam (30); the erection cross beam (30) is positioned between any two adjacent monorail bodies (21), or at least one end of the erection cross beam (30) along the length direction protrudes out of the monorail bodies (21) on the same side.

3. The handling structure according to claim 1, wherein the handling structure (100) further comprises a support substrate (40);

along the thickness direction of supporting base plate (40), be located supporting base plate (40) upper surface be first installation space (401), be located supporting base plate (40) lower surface be second installation space (402), erect guide rail (20), erect crossbeam (30) and manipulator (10) all install in second installation space (402), just erect guide rail (20) connect in supporting base plate (40).

4. A handling structure according to claim 3, wherein the handling structure (100) further comprises a transmission assembly (50), the transmission assembly (50) being mounted in the first mounting space (401);

the support base plate (40) is provided with a long hole (403) along the thickness direction thereof, and a part of the transmission assembly (50) can extend to the second installation space (402) through the long hole (403) and is connected with the erection cross beam (30);

the transmission assembly (50) is used for driving the erection beam (30) to reciprocate along the length direction of the erection guide rail (20), and the part of the transmission assembly (50) positioned in the long hole (403) can move in the long hole (403);

each erection beam (30) is correspondingly connected with a group of transmission assemblies (50).

5. The carrying and erecting structure according to claim 4, wherein said transmission assemblies (50) corresponding to any adjacent erecting beams (30) are staggered along the length direction of said erecting guide rails (20).

6. The carrying and erecting structure according to claim 4, characterized in that a limiting member is provided between any adjacent two of said erecting beams (30) along the length direction of said erecting guide rail (20); and/or

And a limiting piece is arranged between any two adjacent manipulators (10) along the length direction of the erection cross beam (30).

7. The carrying and erecting structure according to claim 6, wherein said limiter comprises at least a sensor (62), said sensor (62) being configured to emit a detection signal in response to shielding of said manipulator (10); and/or

The limiting piece at least comprises a limiting block (61), wherein the limiting block (61) is arranged at the edge of the long hole (403) along the length direction of the long hole (403) and is used for abutting against the erection beam (30) to limit the travel of the erection beam (30).

8. A detection device, characterized in that the detection device comprises;

the working machine is provided with a feeding area (210), a conversion area (220) and a circulation area (230) which are arranged at intervals;

the carrying and erecting structure according to any one of claims 1 to 7, said carrying and erecting structure (100) being mounted above said work machine;

wherein, part of the manipulator (10) of the carrying and erecting structure (100) flows to the feeding area (210) and the conversion area (220), and the other part of the manipulator (10) flows to the conversion area (220) and the circulation area (230).

9. The detection device according to claim 8, wherein the working machine further has a recovery zone (240), the recovery zone (240) being spaced apart from the loading zone (210), the conversion zone (220) and the circulation zone (230);

the other part of the manipulator (10) in the carrying and erecting structure (100) can also flow to the flow zone (230) and the recovery zone (240).

10. The detection device according to claim 9, wherein each of the manipulators (10) comprises a plurality of pick-up members arranged at intervals along the first direction and the second direction; the first direction is arranged at an angle to the second direction;

when part of the manipulator (10) flows from the feeding area (210) to the conversion area (220), the distance between the plurality of pick-up pieces along the first direction can be increased to a first distance;

when another part of the manipulator (10) flows from the conversion area (220) to the circulation area (230), the distance between the plurality of pick-up pieces along the second direction can be increased to a second distance.