CN116745680A - 光扫描装置及微镜器件的驱动方法 - Google Patents

光扫描装置及微镜器件的驱动方法 Download PDF

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Publication number
CN116745680A
CN116745680A CN202280011413.2A CN202280011413A CN116745680A CN 116745680 A CN116745680 A CN 116745680A CN 202280011413 A CN202280011413 A CN 202280011413A CN 116745680 A CN116745680 A CN 116745680A
Authority
CN
China
Prior art keywords
axis
actuator
mirror portion
frequency
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280011413.2A
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English (en)
Chinese (zh)
Inventor
西浦洋辅
直野崇幸
青岛圭佑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Publication of CN116745680A publication Critical patent/CN116745680A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Optical Scanning Systems (AREA)
CN202280011413.2A 2021-01-27 2022-01-20 光扫描装置及微镜器件的驱动方法 Pending CN116745680A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021011351 2021-01-27
JP2021-011351 2021-01-27
PCT/JP2022/002053 WO2022163501A1 (ja) 2021-01-27 2022-01-20 光走査装置、及びマイクロミラーデバイスの駆動方法

Publications (1)

Publication Number Publication Date
CN116745680A true CN116745680A (zh) 2023-09-12

Family

ID=82654660

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280011413.2A Pending CN116745680A (zh) 2021-01-27 2022-01-20 光扫描装置及微镜器件的驱动方法

Country Status (5)

Country Link
US (1) US12517346B2 (https=)
EP (1) EP4286916A4 (https=)
JP (1) JP7707212B2 (https=)
CN (1) CN116745680A (https=)
WO (1) WO2022163501A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7612521B2 (ja) * 2021-06-01 2025-01-14 富士フイルム株式会社 光走査装置、光走査装置の駆動方法、及び画像描画システム

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102998795A (zh) * 2011-09-08 2013-03-27 富士胶片株式会社 反射镜驱动设备、驱动该反射镜驱动设备的方法和制造该反射镜驱动设备的方法
WO2019163754A1 (ja) * 2018-02-20 2019-08-29 パイオニア株式会社 ミラー装置、光走査装置、測距装置、ミラー装置の制御方法及びプログラム
CN110892306A (zh) * 2017-06-13 2020-03-17 三菱电机株式会社 光扫描装置以及光扫描装置的调整方法
CN111722238A (zh) * 2019-03-19 2020-09-29 中国科学院苏州纳米技术与纳米仿生研究所 基于双轴谐振式mems微镜的扫描控制系统及控制方法
CN111819486A (zh) * 2018-03-13 2020-10-23 三菱电机株式会社 光扫描装置及其控制方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009009093A (ja) * 2007-05-28 2009-01-15 Konica Minolta Opto Inc 画像表示装置
JP5414187B2 (ja) 2008-03-18 2014-02-12 スタンレー電気株式会社 光偏向器
JP5666955B2 (ja) 2011-03-24 2015-02-12 スタンレー電気株式会社 光偏向器
KR101916939B1 (ko) * 2017-03-29 2018-11-08 광주과학기술원 마이크로 스캐너, 및 마이크로 스캐너의 제조방법
JP7132481B2 (ja) 2018-02-23 2022-09-07 ミツミ電機株式会社 アクチュエータ及び光走査装置
US11029512B2 (en) * 2018-06-27 2021-06-08 Microsoft Technology Licensing, Llc Adjusting a resonant frequency of a scanning mirror
EP3872556A4 (en) * 2018-10-25 2021-12-08 FUJIFILM Corporation MICROMIRROR DEVICE AND METHOD FOR DRIVING A MICROMIRROR DEVICE
WO2020218585A1 (ja) * 2019-04-26 2020-10-29 富士フイルム株式会社 マイクロミラーデバイス

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102998795A (zh) * 2011-09-08 2013-03-27 富士胶片株式会社 反射镜驱动设备、驱动该反射镜驱动设备的方法和制造该反射镜驱动设备的方法
CN110892306A (zh) * 2017-06-13 2020-03-17 三菱电机株式会社 光扫描装置以及光扫描装置的调整方法
WO2019163754A1 (ja) * 2018-02-20 2019-08-29 パイオニア株式会社 ミラー装置、光走査装置、測距装置、ミラー装置の制御方法及びプログラム
CN111819486A (zh) * 2018-03-13 2020-10-23 三菱电机株式会社 光扫描装置及其控制方法
CN111722238A (zh) * 2019-03-19 2020-09-29 中国科学院苏州纳米技术与纳米仿生研究所 基于双轴谐振式mems微镜的扫描控制系统及控制方法

Also Published As

Publication number Publication date
JPWO2022163501A1 (https=) 2022-08-04
EP4286916A4 (en) 2024-08-14
JP7707212B2 (ja) 2025-07-14
EP4286916A1 (en) 2023-12-06
US20230350193A1 (en) 2023-11-02
WO2022163501A1 (ja) 2022-08-04
US12517346B2 (en) 2026-01-06

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