CN116741694A - Chuck replacing device - Google Patents

Chuck replacing device Download PDF

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Publication number
CN116741694A
CN116741694A CN202310254585.9A CN202310254585A CN116741694A CN 116741694 A CN116741694 A CN 116741694A CN 202310254585 A CN202310254585 A CN 202310254585A CN 116741694 A CN116741694 A CN 116741694A
Authority
CN
China
Prior art keywords
stacker
collet
supply
pickup head
supply stacker
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310254585.9A
Other languages
Chinese (zh)
Inventor
沈俊熙
郑炳浩
朴俊宣
李源培
李龙贤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semes Co Ltd
Original Assignee
Semes Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semes Co Ltd filed Critical Semes Co Ltd
Publication of CN116741694A publication Critical patent/CN116741694A/en
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws

Abstract

The technical idea of the present invention provides a cartridge changing device comprising: a supply stacker that accommodates a collet to be mounted on the pickup head; a recovery stacker that accommodates the cartridges separated from the pickup head; and a stage on which the supply stacker and the recovery stacker are disposed, being moved in at least one of a horizontal direction, a vertical direction, and a rotational direction.

Description

Chuck replacing device
Technical Field
The technical idea of the present invention relates to a collet exchange device, and more particularly, to a collet exchange device for exchanging a collet of a pick-up head for fixing and transporting a semiconductor device.
Background
The process of processing the semiconductor device may include: a pickup process of separating and picking up semiconductor devices from a sheet in a state where a wafer divided into a plurality of semiconductor devices is adhered to the sheet; an inspection process of inspecting the picked-up semiconductor device; and a packaging process for packaging the semiconductor device with the carrier tape and the cover tape.
In the above process, the semiconductor device may be transported by a pick-up unit. The pickup unit may include: a chuck for picking up the semiconductor device by vacuum; a pick-up head coupled to the chuck; and a driving part for moving the pickup head.
The chuck may need to be replaced due to wear over time or in order to adsorb semiconductor devices of different sizes. The replacement of the chuck is performed by a chuck replacing device. The cartridge changing device is required to have reliability and ease of process.
Disclosure of Invention
Technical problem to be solved
The invention provides a chuck replacing device capable of easily replacing a chuck.
Means for solving the problems
In order to solve the above-described problems, the present invention provides a cartridge replacement device comprising: a supply stacker that accommodates a collet to be mounted on the pickup head; a recovery stacker that accommodates the cartridges separated from the pickup head; and a stage on which the supply stacker and the recovery stacker are disposed, being moved in at least one of a horizontal direction, a vertical direction, and a rotational direction.
In some embodiments of the invention, further comprising a first supply stacker and a second supply stacker that receive the cartridge, a major edge of the first supply stacker and a major edge of the second supply stacker may not be parallel.
In some embodiments of the invention, the major edge of the first supply stacker and the major edge of the second supply stacker may form an angle of 90 °.
In some embodiments of the invention, at least one of the supply stacker and the recovery stacker includes a receiving permanent magnet for holding the collet.
In some embodiments of the invention, the pickup head further includes a head permanent magnet for holding the collet, the head permanent magnet having a larger magnetic force than the receiving permanent magnet.
In some embodiments of the present invention, a horizontal inspection jig for inspecting a horizontal state of the pickup head is further included, an upper surface of the horizontal inspection jig including one or more reference pins protruding in a vertical direction.
In some embodiments of the invention, the reclaimer stacker includes a catch member for separating the collet from the pick head.
In some embodiments of the present invention, the carrier may be a wafer expander (wafer expander).
Drawings
FIG. 1 is a perspective view showing a cartridge changing apparatus according to an embodiment of the present invention;
fig. 2 is a sectional view showing a pickup unit according to an embodiment of the present invention;
fig. 3 is a bottom view of a pickup head of a pickup unit showing an embodiment of the present invention;
FIG. 4 is a cross-sectional view of a supply stacker illustrating an embodiment of the present invention;
FIG. 5 is a cross-sectional view showing a recycling stacker in accordance with an embodiment of the present invention;
FIG. 6 is a plan view showing a cartridge changing apparatus according to an embodiment of the present invention;
FIG. 7 is a perspective view showing a cartridge changing apparatus according to an embodiment of the present invention;
fig. 8 and 9 are diagrams showing a method of inspecting the level of the pickup unit according to an embodiment of the present invention.
Detailed Description
The terms used in the present embodiment select general terms widely used at present as much as possible while considering functions in the present embodiment, but this may be different according to the intention or case of a person skilled in the art, the appearance of new technology, and the like. In addition, in particular cases, there are terms arbitrarily selected by the applicant, and in such cases, the meaning will be described in detail in the corresponding sections. Therefore, the term used in the present embodiment is not a simple term name, but should be defined based on the meaning of the term and the overall content of the present embodiment.
The present embodiment is capable of many modifications and various forms, and therefore some embodiments will be exemplified and described in detail in the accompanying drawings. However, the present embodiment is not limited to the specific disclosed form, but should be understood to include all modifications, equivalents, or alternatives falling within the spirit and technical scope of the present embodiment. The terminology used in the description is for the purpose of describing the embodiments only and is not intended to be limiting of the embodiments.
Unless defined otherwise, terms used in the present embodiment have the same meaning as commonly understood by one of ordinary skill in the art to which the present embodiment belongs. Terms defined in a dictionary generally used should be interpreted as conforming to the meaning in the context of the related art and should not be interpreted as ideal or excessively formal meanings unless explicitly defined in the present embodiment.
Additionally, the connecting lines or connecting members between the components shown in the figures merely illustrate functional connections and/or physical or circuit connections. In an actual device, the connections between the components may be made through various functional, physical, or circuit connections that may be substituted or added.
Fig. 1 is a perspective view showing a cartridge changing apparatus 100 according to an embodiment of the present invention, fig. 2 is a sectional view showing a pickup unit 10 according to an embodiment of the present invention, and fig. 3 is a bottom view showing a pickup head 30 of the pickup unit 10 according to an embodiment of the present invention.
Referring to fig. 1 to 3, the cartridge changing apparatus 100 may include a supply stacker 110 and a recovery stacker 120. The collet exchange apparatus 100 can exchange the collet 20 in the pick-up unit 10 that transfers the semiconductor device. The cartridge changer 100 may be disposed on the stage 200.
The pick-up unit 10 may move in a vertical direction (Z direction) and may convey the semiconductor device to perform bonding, inspection, packaging, and the like of the semiconductor device. The pickup unit 10 may include a pickup head 30 and the collet 20 attached to the pickup head 30, and a first actuator (not shown) moving the pickup unit 10, and the collet 20 may be mounted on the pickup head 30 using magnetic force. In particular, the chucking head 20 may be provided therein with a plurality of suction holes 22 for sucking the semiconductor device, and the pickup head 30 may be provided with an air pressure pipe 32 for supplying vacuum to the suction holes 22. In addition, the first actuator may move the pickup unit 10 in the vertical direction (Z direction).
In the present specification, the horizontal direction (X direction and/or Y direction) may refer to a direction parallel to the extending direction of the main surface of the stage 200, and the vertical direction (Z direction) may refer to a direction perpendicular to the horizontal direction (X direction and/or Y direction).
The collet 20 may have a generally quadrilateral shape and may include a hard upper pad 24 and a soft lower pad 26. The adsorption holes 22 for adsorbing the semiconductor device may be provided through the upper pad 24 and the lower pad 26.
According to an embodiment of the present invention, the pickup head 30 may have a substantially quadrangular shape so as to mount the collet 20, and may include a shaft (not shown) connected with a first actuator for conveying the pickup unit 10. The shaft may use a hollow shaft, and the shaft may be used as the air pressure pipe 32. However, the shapes of the pickup head 30 and the chuck 20 are not limited to quadrangles, and various shapes such as a circle may be used according to circumstances, and thus the scope of the present invention is not limited thereto.
On the other hand, the pickup head 30 and the chuck 20 may be coupled to each other by a magnetic force. For example, in order to provide the magnetic force to the pickup head 30, a head permanent magnet 34 may be provided, and the upper pad 24 of the collet 20 may include a magnetic material. In addition, a guide member 36 for guiding the mounting position of the collet 20 may be provided at the lower surface edge portion of the pickup head 30. The pick-up unit 10 may be provided with a plurality of pick-up units. Accordingly, the pick-up unit 10 can convey a plurality of semiconductor devices.
The carrier 200 may support the cartridge changing apparatus 100. The stage 200 is connected to a second actuator (not shown) movable in a horizontal direction, a vertical direction (X direction, Y direction, and/or Z direction), and/or a T direction (rotation direction). For example, the carrier 200 may be a wafer expander (wafer expander). The wafer film expander may support the semiconductor chip. According to an embodiment of the present invention, the cartridge changing apparatus 100 may be disposed at one side of the stage 200.
The second actuator is provided to be movable in a horizontal direction and a vertical direction. For example, the second actuator may move along an X-axis, a Y-axis, a Z-axis, and/or a T-axis. The second actuator may be moved in the horizontal direction to a position where the collet 20 is replaced, then lifted in the vertical direction, separate the collet 20 from the pickup head 30, or mount the collet 20 on the pickup head 30. In addition, the second actuator may be moved above the recovery stacker 120 and the supply stacker 110 in the horizontal direction and then lifted in the vertical direction, transferring the replaced collet 20 to the recovery stacker 120, or receiving the collet 20 from the supply stacker 110.
The general cartridge changing apparatus further includes a gripper device for fixing the cartridge, thereby changing the cartridge. If the clamper is not used, it is difficult to control the movement of the pickup head, and thus it is not easy to replace the clamper.
In contrast, the cartridge changing apparatus 100 of the present embodiment does not include a clamper, and the cartridge changing apparatus 100 is provided on the stage 200 connected to the second actuator, so that the cartridge can be changed without an additional apparatus.
Fig. 4 is a sectional view showing a supply stacker 110 according to an embodiment of the present invention, and fig. 5 is a sectional view showing a recovery stacker 120 according to an embodiment of the present invention.
Referring to fig. 4 and 5, the cartridge 20 may be replaced with a supply stacker 110 that loads the cartridge 20 to be mounted on the pickup head 30 and a recovery stacker 120 that loads the cartridge 20 separated from the pickup head 30. In addition, the cartridge supply stacker 110 accommodates the supply stacker 110, and the cartridge recovery stacker 120 may accommodate the recovery stacker 120. The cartridge supply stacker 110 may have a slot for securing the supply stacker 110.
The supply stacker 110 may include a main body 112, a support member 114, and a permanent magnet 117. As described above, the main body 112 can accommodate the cartridge 20 in a state in which the cartridge 20 is loaded therein. The body 112 may have a generally cylindrical shape. The support member 114 is provided at an inner bottom surface of the main body 112, and may elastically support the collet 20 accommodated in the main body 112. The support member 114 may include a plate 115 and the coil spring 116. The plate 115 may be disposed in a horizontal state inside the main body 112. The coil spring 116 is disposed between the bottom surface of the main body 112 and the plate 115, and may elastically support the plate 115.
The plate 115 supports the collet 20 received in the body 112. Thus, the plate 115 is in contact with the lower pad 26 of the lowermost cartridge 20. Thus, the plate 115 may be composed of a substance having a low friction coefficient. Examples of the substance may be PEEK resin, teflon resin, or the like. Because of the low coefficient of friction of the plate 115, damage to the lower pad 26 may be prevented.
The coil spring 116 may cushion an impact applied to the collet 20 when the collet 20 descends and contacts the plate 115. Therefore, damage to the collet 20 can be prevented. In addition, the plate 115 is lifted up due to the restoring force of the coil spring 116, and thus the plate 115 can lift up and down the collet 20 accommodated in the body 112.
A permanent magnet 117 for fixing the collet 20 may be provided at an upper end of the body 112. For example, when the collet 20 has a quadrangular shape, the permanent magnets 117 may be disposed on both facing sides of the inside of the body 112, or may be disposed on four sides of the inside of the body 112. The permanent magnet 117 may fix the upper pad (24 in fig. 2) of the collet 20 as a magnetic material by a magnetic force. By the elastic force of the support member 114, a groove or a claw for fixing the slot 111 of the cartridge supply stacker 110 is formed. The permanent magnet 117 can fix the uppermost collet 20 even if the collet 20 inside the body 112 is pushed up. Accordingly, the collet 20 can be prevented from being separated from the body 112 due to the elastic force of the support member 114. The permanent magnet 117 may be referred to as a housing permanent magnet.
On the other hand, in a state where the supply stacker 110 is located at a lower portion of the pickup head 30, the pickup head 30 may be moved downward or the supply stacker 110 may be moved upward, and the uppermost clip 20 may be mounted on a lower surface of the pickup head 30. At this time, the upper surface of the new collet 20 may be guided to the lower surface of the pickup head 30 by a guide member 36 disposed at an edge portion of the pickup head 30, and the head permanent magnet 34 may have a magnetic force greater than that of the permanent magnet 117 in order to easily mount the new collet 20.
The recycling stacker 120 may include a main body 122 and a locking member 124. The body 122 may accommodate the plurality of cartridges 20 in a state in which the plurality of cartridges 20 are loaded therein. The body 122 may have a generally cylindrical shape. The locking members 124 may be disposed at both sides of the upper end of the main body 122. The locking member 124 allows the up-and-down movement of the pickup head 30, but restricts upward movement of the collet 20, so that the collet 20 can be separated from the pickup head 30 when the pickup head 30 moves upward.
Specifically, the pickup head 30 and the collet 20 may be moved downward toward the inside of the stacker 120 to remove the collet 20, and then may be moved upward again. At this time, the locking members 124 may be provided at both sides of the vertical moving path of the pickup head 30. In particular, the locking member 124 may allow the pickup head 30 to move downward and upward, but may allow the collet 20 to move downward while restricting upward movement. As a result, the locking member 124 can separate the collet 20 from the pickup head 30 when the pickup head 30 moves upward from the inside of the stacker 120.
For example, a spring (not shown) may be attached to the inner surfaces of both sides of the opening of the main body 122, and for example, a locking member 124 may be rotated downward by a coil spring or a torsion spring. The locking member 124 may be rotated downward to allow the collet 20 to move downward, but may be returned to an initial position by the spring after the collet 20 passes downward, thereby restricting the collet 20 from moving upward. According to another embodiment of the present invention, the locking member 124 may be provided to advance and retreat from the inner side surface of the stacker 120 using a spring. As a result, when the pickup head 30 moves upward from the inside of the stacker 120, the clip 20 is caught by the catching member 124, so that it can be separated from the pickup head 30. At this time, as shown in fig. 3, recesses 38 may be provided on both side surfaces of the pickup head 30, and the recesses 38 may prevent the vertical movement of the pickup head 30 from interfering with the locking members 124.
That is, by the movement of the first and second actuators, the collet 20 is separated from the pickup head 30 and transferred to the reclaimer stacker 120, and the collet 20 can be transported from the supply stacker 110 and mounted on the pickup head 30.
As described above, the second actuator is provided so as to be movable in a horizontal direction and a vertical direction. For example, the second actuator may move along an X-axis, a Y-axis, a Z-axis, and/or a T-axis. The second actuator may be moved in the horizontal direction to a position where the collet 20 is replaced, then lifted in the vertical direction, separate the collet 20 from the pickup head 30, or mount the collet 20 on the pickup head 30. In addition, the second actuator may be moved above the recovery stacker 120 and the supply stacker 110 in the horizontal direction and then lifted in the vertical direction, transferring the replaced collet 20 to the recovery stacker 120, or receiving the collet 20 from the supply stacker 110.
Fig. 6 is a plan view showing a cartridge changer 100a according to an embodiment of the present invention.
Referring to fig. 4 to 6, as described above, the cartridge changing apparatus 100a may include a first supply stacker 110a and a second supply stacker 110b. The first supply stacker 110a and the second supply stacker 110b may be configured to form an angle of 0 ° to 180 °. The angle formed by the first supply stacker 110a and the second supply stacker 110b may be defined as an angle formed by a main edge of the first supply stacker 110a and a main edge of the second supply stacker 110b. Since the horizontal cross-section of the collet 20 is nearly rectangular, the longer of the plurality of horizontal edges of the rectangular horizontal cross-section may be referred to as the primary edge and the shorter edge may be referred to as the secondary edge. That is, the main edge of the first supply stacker 110a and the main edge of the second supply stacker 110b may not be parallel.
Fig. 7 illustrates that the first supply stacker 110a and the second supply stacker 110b form an angle of 90 °, but the angle formed by the first supply stacker 110a and the second supply stacker 110b is not limited thereto, and various modifications may be made. For example, the first supply stacker 110a and the second supply stacker 110b may be aligned to be inclined (skewed) with respect to each other.
According to an embodiment of the present invention, when the first supply stacker 110a and the second supply stacker 110b form an angle of 90 °, the collet 20 disposed at the first supply stacker 110a may be configured such that a first direction (X-direction) length of the collet 20 is longer than a second direction (Y-direction) length. The cartridge 20 disposed in the second supply stacker 110b may be configured such that the length of the cartridge 20 in the second direction (Y direction) is longer than the length of the cartridge in the first direction (X direction).
When the first supply stacker 110a and the second supply stacker 110b are configured to form an angle, the pickup head 30 may receive the cartridges 20 aligned at different angles according to a process. Therefore, the convenience of the process can be increased.
In addition, fig. 7 illustrates the inclusion of two supply stackers 110, but the number of supply stackers 110 that one cartridge changing apparatus 100a may include is not limited to this. For example, one cartridge changer 100a may include more than three supply stackers 110.
Fig. 7 is a perspective view showing a cartridge changing apparatus 100b according to an embodiment of the present invention, and fig. 8 and 9 are views showing a horizontal inspection method of a cartridge 20 combined with a pickup unit 10 according to an embodiment of the present invention.
Referring to fig. 7 to 9, the cartridge changing apparatus 100b may include an encoder 60, a horizontal inspection jig 70, a reference pin 72, a supply stacker 110, a recovery stacker 120, and a jig receiving groove 130. Since the supply stacker 110 and the recovery stacker 120 of the cartridge changing apparatus 100b are substantially the same as the supply stacker 110 and the recovery stacker 120 of the cartridge changing apparatus 100 of fig. 1, only the encoder 60, the horizontal inspection jig 70, the reference pin 72, and the jig receiving groove 130 will be described herein.
The horizontal inspection jig 70 may inspect the horizontal state of the collet 20 combined with the pickup unit 10, and the surface thereof may include more than one reference pin 72. The reference pin 72 may protrude in a vertical direction (Z direction) on the horizontal inspection jig 70.
The inspection of the horizontal state of the collet 20 combined with the pickup unit 10 may be performed in a state where the collet 20 is mounted on the pickup head 30. For example, when the collet 20 needs to be replaced due to abrasion of the collet 20 or the like, a horizontal state check may be performed, and then a new collet 20 may be mounted on the pickup head 30.
The horizontal inspection jig 70 may be disposed in the jig receiving groove 130. The first actuator may lower the pickup head 30 so that the chuck 20 coupled with the pickup head 30 is brought into close contact with the horizontal inspection jig 70.
A reference pin 72 having a fixed height may be disposed at an upper surface of the horizontal inspection jig 70. The reference pin 72 may be used to check the horizontal state of the collet 20 combined with the pickup unit 10. According to another embodiment of the present invention, the reference pin 72 may also be disposed on the cartridge changer 100 b.
Next, the first actuator may lower the pickup unit 10 to be displaced in a first vertical direction in a state where the reference pin 72 is in close contact with the first point of the collet 20. At this time, the first displacement may be measured by the encoder 60.
The first actuator may then lower the pick-up unit 10 to a second displacement in the vertical direction relative to a second point of the collet 20, and the second displacement may be measured by the encoder 60.
For example, the first and second points may be corners of the collet 20, and the first actuator may move the pick-up unit 10 after the first point measures the first displacement, with the reference pin 72 below the second point, and then lower the pick-up unit 10.
As described above, after measuring the first displacement and the second displacement, the horizontal state of the chuck 20 can be checked by comparing the first displacement and the second displacement. For example, the first displacement and the second displacement may be compared with predetermined values to confirm whether the difference is within the error range. In addition, it is possible to confirm whether the difference thereof is within the error range by comparing the first displacement and the second displacement.
According to an embodiment of the present invention, in order to more accurately confirm the horizontal state of the pickup unit 10, the third displacement and the fourth displacement may be measured for the third point and the fourth point of the quadrangular shape including the first point and the second point, and the first displacement to the fourth displacement may be compared, thereby confirming the horizontal state of the collet 20 combined with the pickup unit 10. For example, the first to fourth points may correspond to corners of the collet 20, respectively.
As described above, after confirming the horizontal state of the collet 20 combined with the pickup unit 10, when the horizontal state of the collet 20 combined with the pickup unit 10 is normal, the semiconductor process may be performed in a state where the collet 20 is mounted. In addition, when the horizontal state of the collet 20 combined with the pickup unit 10 is abnormal, the collet 20 may be removed and a new collet 20 may be mounted on the pickup head 30. For example, the second actuator may move the cartridge changing device 100b such that one of the cartridges 20 received in the supply stacker 110 is positioned below the pickup head 30.
According to the embodiment of the present invention as described above, since the horizontal state of the collet 20 combined with the pickup unit 10 can be confirmed using the horizontal inspection jig 70 and the reference pin 72, inspection reliability can be greatly improved as compared with the manual inspection method of the operator of the related art.

Claims (8)

1. A cartridge changing apparatus, comprising:
a supply stacker that accommodates a collet to be mounted on the pickup head;
a recovery stacker that accommodates the cartridges separated from the pickup head; and
a stage that moves the supply stacker and the recovery stacker in at least one of a horizontal direction, a vertical direction, and a rotational direction,
the supply stacker and the recovery stacker are arranged on the stage.
2. The cartridge changer of claim 1, wherein,
further comprising a first supply stacker and a second supply stacker receiving the cartridges,
the major edges of the first supply stacker and the second supply stacker are not parallel.
3. The cartridge changer of claim 2, wherein,
the main edge of the first supply stacker and the main edge of the second supply stacker form an angle of 90 °.
4. The cartridge changer of claim 1, wherein,
at least one of the supply stacker and the recovery stacker includes a permanent magnet for housing for holding the collet.
5. The cartridge changer of claim 4, wherein,
the pickup head further includes a head permanent magnet for holding the collet, the head permanent magnet having a larger magnetic force than the housing permanent magnet.
6. The cartridge changer of claim 1, wherein,
and a horizontal inspection jig for inspecting the horizontal state of the pickup head,
the upper surface of the horizontal inspection jig includes one or more reference pins protruding in the vertical direction.
7. The cartridge changer of claim 1, wherein,
the reclaim stacker includes a catch member for separating the collet from the pick-up head.
8. The cartridge changer of claim 1, wherein,
the carrying platform is a wafer film expander.
CN202310254585.9A 2022-03-08 2023-03-07 Chuck replacing device Pending CN116741694A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2022-0029585 2022-03-08
KR1020220029585A KR20230132274A (en) 2022-03-08 2022-03-08 Collet exchange apparatus

Publications (1)

Publication Number Publication Date
CN116741694A true CN116741694A (en) 2023-09-12

Family

ID=87913966

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310254585.9A Pending CN116741694A (en) 2022-03-08 2023-03-07 Chuck replacing device

Country Status (2)

Country Link
KR (1) KR20230132274A (en)
CN (1) CN116741694A (en)

Also Published As

Publication number Publication date
KR20230132274A (en) 2023-09-15

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