CN116724668A - Ozone generating device and ozone generating method - Google Patents
Ozone generating device and ozone generating method Download PDFInfo
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- CN116724668A CN116724668A CN202180069759.3A CN202180069759A CN116724668A CN 116724668 A CN116724668 A CN 116724668A CN 202180069759 A CN202180069759 A CN 202180069759A CN 116724668 A CN116724668 A CN 116724668A
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- ozone
- discharge space
- ozone generating
- discharge
- gas
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- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 187
- 238000000034 method Methods 0.000 title claims abstract description 13
- 239000007789 gas Substances 0.000 claims abstract description 95
- 239000001301 oxygen Substances 0.000 claims abstract description 55
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 55
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 34
- 238000000354 decomposition reaction Methods 0.000 claims abstract description 25
- 238000007599 discharging Methods 0.000 claims abstract description 8
- 238000006243 chemical reaction Methods 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 claims description 4
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims 1
- 230000007704 transition Effects 0.000 claims 1
- 230000007423 decrease Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010494 dissociation reaction Methods 0.000 description 2
- 230000005593 dissociations Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005949 ozonolysis reaction Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Abstract
The present application relates to an ozone generating device and an ozone generating method. An ozone generating device generates ozone by using an oxygen-containing gas introduced in the direction of the gas flow. The ozone generating device (10) is provided with: a discharge space portion (52) that generates electron collisions for the gas by discharging; a lead-out part for leading out ozone which is generated by converting oxygen contained in the gas by electron collision of the discharge space part; and a decomposition reaction suppressing means for suppressing a decomposition reaction in which ozone generated is decomposed by electron collision.
Description
Technical Field
The present application relates to an ozone generating device and an ozone generating method.
Background
An ozone generating device that generates ozone using a discharge generated in a discharge space between a high-voltage electrode and a ground electrode is known (for example, patent document 1). The ozone generating device is used for oxygen (O) 2 ) Generating electron collision in the discharge space, generating ozone (O) 3 )。
In the above ozone generating device, the oxygen (O 2 ) Oxygen radicals (O) are formed by dissociation 2 +e→o+o+e, e represents an electron). The generated oxygen radicals combine with oxygen existing in the periphery to generate ozone (O 3 )(O+O 2 +M→O 3 +m, M represents the third volume).
Prior art literature
Patent literature
Patent document 1: japanese patent laid-open No. 62-132706
Disclosure of Invention
Problems to be solved by the application
However, when electron collision further occurs in the same discharge space with respect to the generated ozone, the decomposition reaction (O 3 +e→O+O 2 +e) may also be performed. In the case where the ozonolysis reaction proceeds with respect to the generated ozone, the ozone generation efficiency by the ozone generating device may be lowered.
The present application has been made in view of the above-described circumstances, and an object of the present application is to provide an ozone generating device and method capable of suppressing a decrease in ozone generating efficiency.
Means for solving the problems
An ozone generating device according to an aspect of the present application is an ozone generating device for generating ozone using an oxygen-containing gas introduced in a gas flow direction, comprising: a discharge space portion that generates electron collisions with respect to the gas by discharge; a lead-out part that leads out ozone that is generated by converting oxygen contained in the gas by electron collision at the discharge space part; and a decomposition reaction suppressing means for suppressing a decomposition reaction in which ozone generated is decomposed by electron collision.
An ozone generating method according to an aspect of the present application is an ozone generating method for generating ozone using an oxygen-containing gas introduced in a gas flow direction, comprising: a discharge step of generating electron collisions by discharging the gas at the discharge space portions; a lead-out step of leading out ozone, which is generated by converting oxygen contained in the gas by electron collision at the discharge space portion, from a lead-out portion; and a decomposition reaction suppressing step of suppressing a decomposition reaction in which ozone generated is decomposed by electron collision using a decomposition reaction suppressing mechanism.
ADVANTAGEOUS EFFECTS OF INVENTION
In one aspect of the present application, an ozone generating apparatus and method that can suppress a decrease in ozone generating efficiency can be provided.
Drawings
Fig. 1 is a schematic diagram showing the structure of an ozone generating device according to embodiment 1.
Fig. 2 is a graph showing a relationship between a change in gas pressure P and a conversion time τ from oxygen radicals to ozone.
Fig. 3 is a schematic diagram showing the structure of an ozone generating device according to embodiment 2.
Fig. 4 is an explanatory diagram showing a relationship between a waveform of a power supply output and discharge power in embodiment 2.
Detailed Description
Embodiments of an ozone generating apparatus and method according to the present disclosure will be described in detail below with reference to the accompanying drawings. The embodiments described below are examples, and these embodiments do not limit the present application.
Embodiment 1.
Fig. 1 is a schematic diagram showing the structure of an ozone generating device according to embodiment 1. As shown in fig. 1, the ozone generating device 10 includes a high-frequency power supply 1, a high-voltage electrode 2, a ground electrode 3, a high-voltage side dielectric 4, and a ground side dielectric 5. The ozone generating device 10 introduces an oxygen-containing gas, which is a raw material for ozone generation, from left to right in the plane of the paper of fig. 1, that is, in a gas introduction direction 54 indicated by an arrow, and introduces the oxygen-containing gas in a gas extraction direction 55 indicated by an arrow.
The high-frequency power source 1 is connected to the high-voltage electrode 2 and the ground electrode 3, and a high-frequency voltage is applied between the high-voltage electrode 2 and the ground electrode 3. The high-voltage electrode 2 and the ground electrode 3 are made of metal, for example. The high-voltage side dielectric 4 and the ground side dielectric 5 are made of, for example, an alumina ceramic plate.
As shown in fig. 1, the high-voltage electrode 2 is an electrode member having a width Ld along the gas introduction direction 54 of the oxygen-containing gas and extending at right angles to the gas introduction direction 54 toward the back of the paper surface of fig. 1 by a length Lw. As shown in fig. 1, the high-voltage electrode 2 is connected to a high-voltage side dielectric 4 described later below in fig. 1.
As shown in fig. 1, the ground electrode 3 is an electrode member having a width Ld along the gas introduction direction 54 of the oxygen-containing gas and extending at right angles to the gas introduction direction 54 toward the rear of the paper surface of fig. 1 by a length Lw. The ground electrode 3 has one end grounded, and is disposed so as to face the high-voltage electrode 2 with an interval in the up-down direction with respect to the paper surface of fig. 1. As shown in fig. 1, the ground electrode 3 is connected to a ground side dielectric 5 described later above in fig. 1, and is disposed so as to face the high-voltage electrode 2 in the same direction as the width Ld and the length Lw.
The high-voltage side dielectric 4 and the ground side dielectric 5 are arranged to be spaced apart from each other by a distance d in the vertical direction with respect to the paper surface of fig. 1. The space between the high-voltage side dielectric 4 and the ground side dielectric 5 functions as a discharge space portion described later. That is, the high voltage side dielectric 4 is provided with a part of the high voltage electrode 2 of the discharge electrode and the grounding side dielectric 5 is provided with a part of the grounding side dielectric 5 of the discharge electrode, so that the high voltage side dielectric 4 and the grounding side dielectric 5 of the other surface of the opposite arrangement, composed of ozone generating unit 11.
The high-voltage side dielectric 4 and the ground side dielectric 5 include: a reduced portion 51 which reduces the flow of the gas introduced into the discharge space portion 52 from a value larger than d in the vertical direction with respect to the paper surface of fig. 1 toward d by a distance smaller than d in the gas introduction direction 54; a discharge space portion 52 having a length of continuous Ld along a gas introduction direction 54 and spaced apart from the paper surface of fig. 1 by a distance d in the up-down direction; and an enlarged portion 53 which is formed by enlarging the vertical distance from d to a value larger than d in the gas discharge direction 55 with respect to the paper surface of fig. 1, and enlarging the flow of the gas flowing out from the discharge space portion 52. The reduced portion 51 has a reduced angle of 45 degrees, for example. The enlarged portion 53 has an enlarged angle of 10 degrees, for example. The reduced portion 51 functions as an example of an introduction portion for introducing gas, and the enlarged portion 53 functions as an example of an introduction portion for introducing ozone.
In other words, the ozone generating device 10 of the present embodiment includes: an ozone generating unit 11 in which a pair of discharge electrodes each having a metal electrode provided on a part of one surface of a dielectric are disposed so as to face each other between the other surfaces of the dielectric, and a high-frequency power supply 1 for applying a voltage to the metal electrodes. In the ozone generating unit 11, a gas flow path through which the oxygen-containing gas flows is formed between the pair of discharge electrodes, and the metal electrode is disposed at the narrowest point in the space between the other surfaces of the dielectric, and widens toward the upstream side and the downstream side of the gas flow path.
The discharge space portion 52 is a space in which discharge plasma is generated when a high voltage is applied to the high-voltage electrode 2 and the ground electrode 3 by the high-frequency power supply 1. The discharge space portion 52 is a space having a longitudinal direction, a lateral direction, and a height formed by Ld, lw, and d described later. The high-voltage electrode 2 is disposed so that the wide Ld portion of the high-voltage electrode 2 faces the wide Ld portion of the high-voltage side dielectric 4 constituting the discharge space portion 52. The ground electrode 3 is disposed so that the wide Ld portion of the ground electrode 3 faces the wide Ld portion of the ground side dielectric 5 constituting the discharge space portion 52. Accordingly, the ozone generating device 10 according to the present embodiment is configured as follows: electron collision due to discharge occurs in the discharge space portion 52 among the reduced portion 51, the discharge space portion 52, and the enlarged portion 53, which are the spaces formed by the high-voltage side dielectric 4 and the ground side dielectric 5.
The ozone generating device 10 according to the present embodiment is configured as follows: the length Ld of the gas introduction direction 54 is smaller than the length Lw of the high-voltage side dielectric 4 and the ground side dielectric 5 in the extending direction perpendicular to the gas introduction direction 54. Preferably, it is constituted in the following manner: the length Ld of the gas introduction direction 54 is 1/10 or less of the length Lw of the direction of extension perpendicular to the gas introduction direction 54. In addition, the ozone generating device 10 according to the present embodiment makes the distance d between the high-voltage side dielectric 4 and the ground side dielectric 5 0.2mm or less. With such a configuration, the ozone generating device 10 according to the present embodiment can reduce the time for which the generated ozone stays in the discharge space portion 52, as will be described later, and can suppress the decrease in ozone generating efficiency with a relatively simple configuration. Therefore, such a configuration including the high-voltage side dielectric 4 and the ground side dielectric 5 functions as an example of a decomposition reaction suppressing mechanism that suppresses a decomposition reaction in which ozone generated is decomposed by electron collision.
In the ozone generating device 10 according to the present embodiment, when a high voltage is applied to the high-voltage electrode 2 and the ground electrode 3 by the high-frequency power supply 1, discharge plasma is generated in the discharge space portion 52 formed by the lengths Ld, lw, and d via the high-voltage side dielectric 4. At this time, the oxygen-containing gas introduced into the discharge space portion 52 in the direction of the gas introduction direction 54 indicated by the arrow in fig. 1 is introduced from the discharge space portion 52 to the expanded portion 53 which is the outside and downstream of the expanded portion 53 in the direction of the gas introduction direction 55 indicated by the arrow, and reacts with the generated discharge plasma.
When oxygen introduced into the discharge space portion 52 reacts with discharge plasma generated in the discharge space portion 52, the oxygen is dissociated by electron collision to generate oxygen radicals (O) (O 2 +e→o+o+e: e represents an electron). When the generated oxygen radicals (O) react with oxygen, the ozone generating device 10 generates ozone (o+o) in the discharge space portion 52 2 +M→O 3 + M, M represents the third body). However, in the case of electron collision with the generated ozone, the generated ozone can be decomposed into oxygen radicals and oxygen (O 3 +e→O+O 2 +e). In the case where decomposition of the generated ozone occurs, a decrease in the efficiency of generating ozone discharged from the ozone generating device may occur.
Here, the conversion rate from oxygen radicals to ozone was studied. The process of reducing oxygen radicals by conversion into ozone is represented by the following formula (1). [ O]、[O 2 ]Represents oxygen radicals (O) and oxygen (O) 2 ) Particle density (particle/cm) 3 ). k represents the reaction rateConstant (cm) 6 /s). However, assuming that the supplied gas is oxygen, M as the third body is oxygen (O 2 ). It is reported that when the gas temperature (K) is T, K is 6.45X10 -35 exp(663/T)。
d[O]/dt＝-k×[O]×[O 2 ] 2 ···(1)
In the above formula (1), the oxygen radical (O) is converted into ozone (O) 3 ) The conversion time τ of the conversion of (2) is obtained as shown in the expression (2).
τ＝1/(k×[O 2 ] 2 )···(2)
Fig. 2 is a graph showing the relationship between the change in the gas pressure P and the conversion time τ of oxygen radicals into ozone. Considering the above formula (2), the oxygen radical (O) to ozone (O) when the gas pressure P (kPa) is changed 3 ) Switching time τ (sec). In the graph, the gas temperatures are 300K, 500K, and 1000K. As can be seen from the equation (2) and fig. 2, the conversion time τ to ozone is inversely proportional to the square of the gas pressure. The gas temperature was 300K, and was 0.29msec at 10kPa and 2.9 musec at 100 kPa. As is clear from fig. 2, the conversion time τ to ozone increases when the gas temperature increases. Taking this explanation into consideration, by realizing the discharge space portion 52 of high temperature and low gas pressure, the flow of oxygen radicals (O) to ozone (O) 3 ) Switching time τ (sec).
At the same time, oxygen radical (O) is converted into ozone (O) 3 ) When the time τg (sec) for which the oxygen gas remains in the discharge space portion 52 of the gas is shorter than the switching time τ, the oxygen gas that reacts with the oxygen radicals in the discharge space portion 52 is converted into ozone from the discharge space portion 52 to the expansion portion 53 that is the outside and downstream of the expansion portion 53. In the ozone generating device 10 according to the present embodiment, the means for intentionally generating the discharge plasma is not provided at the enlarged portion 53 for converting the ozone into the ozone, and the means for intentionally generating the discharge plasma is not provided downstream of the enlarged portion 53. In addition, for the high-voltage side dielectric 4 constituting the discharge space portion 52 causing electron collisionAnd a ground side dielectric 5 configured such that a length Ld of the gas introduction direction 54 is smaller than a length Lw of the gas introduction direction 54 in the extending direction perpendicular to the gas introduction direction 54. With such a configuration, compared with a configuration in which the length Ld of the gas introduction direction 54 is larger than the length Lw of the gas introduction direction 54 in the extending direction perpendicular to the gas introduction direction 54, the same discharge area is ensured, and the time for which the gas stays in the discharge space portion 52 is shortened. Therefore, the generated ozone can be suppressed from being decomposed due to electron collision. In the case of using Q (m 3 And/s) represents the volume of the discharge space portion 52 by V (m) 3 ) In the case shown, the time τg (sec) for which the gas stays in the discharge space portion 52 becomes V/Q. When the discharge length Ld in the gas flow direction, the discharge space length Lw of the discharge space portion 52 in the direction perpendicular to the gas flow, and the distance d that is the discharge space length are used, and the gas flow rate in the discharge space is vg, the time τg (sec) for which the gas stays in the discharge space portion 52 is expressed by the following expression (3).
τg＝Ld×Lw×d/Q＝Ld/vg · · · (3)
The ozone generating device 10 according to the present embodiment changes the oxygen radical (O) to ozone (O) with a time (τg) for which the gas stays in the discharge space portion 52 3 ) The conversion time (τ) of the conversion. By configuring such that τg < τ, the ozone generating device 10 generates O radicals in the discharge space portion 52, starts the reaction with the O radicals in the discharge space portion 52, and oxygen that promotes the start of the reaction is converted into ozone (O 3 ) Is a reaction of (a). Therefore, the ozone generating device 10 according to the present embodiment can be configured to suppress ozone decomposition due to electron impact in the discharge space portion 52 with respect to the generated ozone, and can obtain high ozone generation efficiency with a relatively simple configuration.
In the ozone generator 10 of the present embodiment, the length Ld in the air flow direction of the electrode surface of the discharge space portion 52 formed by the high-voltage side dielectric 4 and the ground side dielectric 5 is made shorter than the length Lw in the direction perpendicular to the air flow direction, and is preferably made 1/10 or less (Ld/Lw < 0.1). In the ozone generating device 10 of the present embodiment, the gas flows from the longer side of Lw to the shorter side of the discharge surface made up of ld×lw, whereby the formula Ld of (3) is reduced, and the retention time of the discharge space portion 52 can be set to be small. In addition, in the present embodiment of the ozone generating device 10, by making the length of the discharge gap of the distance d below 0.2mm, the gas velocity is increased, and further by having a reduced portion 51 and an expanded portion 53, the gas velocity is increased, whereby the expression (3) vg is increased, and expression (3) Ld/vg is reduced, so that the discharge space portion 52 residence time can be set to be small. Therefore, the ozone generating device 10 according to the present embodiment can be configured to suppress ozone decomposition due to electron impact in the discharge space portion 52 with respect to the generated ozone, and can obtain high ozone generation efficiency with a relatively simple configuration. That is, the above-described configuration including the reduced portion 51, the discharge space portion 52, and the enlarged portion 53 functions as an example of the decomposition reaction suppressing mechanism of the present application that suppresses the decomposition reaction in which ozone is decomposed by electron collision.
In the ozone generating device 10 of the present embodiment, an open space having dimensions ld×lw×d is secured as the discharge space portion 52 into which oxygen is introduced. In the open space, a flow inhibitor that inhibits the flow of the introduced oxygen is not intentionally disposed. Therefore, the ozone generating device can move the shorter Ld portion of the discharge surface as quickly as possible by the oxygen introduced from the side of the longer Lw of the discharge surface, and can provide an ozone generating device and method with high ozone generating efficiency with a relatively simple structure. In other words, in this ozone generator, by moving the short Ld portion of the discharge surface as quickly as possible by the oxygen gas introduced from the side of the long Lw of the discharge surface, the oxygen gas is discharged from the discharge space portion 52 before the oxygen radicals are converted into ozone, and ozone is generated outside the discharge space portion 52, so that electron collision to the generated ozone in the discharge space portion 52 can be suppressed, and an ozone generator and a method with high ozone generation efficiency can be provided with a relatively simple configuration.
The operation of the ozone generating device 10 according to the present embodiment will be described. In this ozone generator, an oxygen-containing gas, which is a raw material for ozone generation, is introduced from left to right in the plane of the paper of fig. 1, that is, in a gas introduction direction 54 indicated by an arrow in fig. 1. In this ozone generating device, the introduced gas is accelerated by the narrowed portion 51 whose distance is narrowed in the flow direction. In this ozone generator, the gas pressure in the discharge space portion 52 is reduced by the increase in the velocity of the gas caused by acceleration. In the case where the gas pressure in the discharge space portion 52 is reduced, as shown in fig. 2, oxygen radicals (O) are turned into ozone (O 3 ) The switching time τ (sec) is prolonged. In this ozone generating device, the gas passing through the discharge space portion 52 is decelerated by the enlarged portion 53 in which the distance is enlarged in the flow direction. In this ozone generator, the gas returning to the static pressure is led out in the downstream direction by the decrease in the velocity of the gas due to the deceleration. With this configuration, the ozone generating device 10 according to the present embodiment can lengthen the time τ for converting ozone into ozone in the discharge space portion 52, accelerate the gas flow rate in the discharge space portion 52, and shorten the time τg for the gas to stay in the discharge space portion 52. That is, the step of discharging using the discharge space portion 52 functions as an example of a discharge step of generating electron impact with respect to the gas by discharge, the step of discharging the gas from the expansion portion 53 functions as an example of a discharge step of discharging ozone from the discharge portion, and the above-described steps performed using the reduction portion 51, the discharge space portion 52, and the expansion portion 53 function as an example of a decomposition reaction suppression step of the present application of suppressing decomposition reaction in which the generated ozone is decomposed by the electron impact.
Embodiment 2.
Fig. 3 is a schematic diagram showing the structure of an ozone generating device according to embodiment 2. In the ozone generating device of the present embodiment, a plurality of ozone generating units are connected in parallel to 1 high-frequency power supply.
As shown in fig. 3, the high-frequency power supply 1 of the ozone generating device 10 of the present embodiment is constituted by a single-phase inverter circuit 12 and a frequency control circuit 13. The frequency control circuit 13 includes a drive circuit of the single-phase inverter circuit 12, and controls the power supply frequency output from the single-phase inverter circuit 12. A plurality of ozone generating units 11 are connected in parallel to the output terminal of the single-phase inverter circuit 12. A reactor 14 is connected between the high-voltage electrode 2 of each ozone generating unit 11 and the output terminal of the single-phase inverter circuit 12. The ground electrodes 3 of the ozone generating units 11 are all set to the ground potential. In the present embodiment, the following description will be made of an ozone generating device in which 5 ozone generating units are connected in parallel.
In each ozone generating unit 11, an ac discharge (barrier discharge) is generated between the high-voltage electrode 2 and the ground electrode 3 via the high-voltage side dielectric 4 and the ground side dielectric 5. The ground side dielectric 5 is not necessarily required, and may be just the ground electrode 3. In each ozone generating unit 11, pulse-shaped energy is injected into the discharge space portion by resonance between the capacity component (C) between the high-voltage electrode 2 and the ground electrode 3 and the inductance component (L) of the reactor 14. The capacity component between the high-voltage electrode 2 and the ground electrode 3 is mainly determined by the capacity component of the high-voltage side dielectric 4 and the capacity component of the ground side dielectric 5.
That is, when the power supply frequency f of the high-frequency power supply 1 satisfies the following expression (4), pulse-like energy is injected into the discharge space portion.
f＝1/2π√(L×C) ··· (4)
In the ozone generating device 10 of the present embodiment, when the inductances of the reactors 14 connected to the 5 ozone generating units 11 are L1, L2, L3, L4, and L5, respectively, the inductance is set so as to be L1 > L2 > L3 > L4 > L5. The capacity component (C) between the high-voltage electrode 2 and the ground electrode 3 in the 5 ozone generating units 11 was set to be substantially the same.
In the ozone generating device 10 having such a configuration, when the resonance frequencies of the ozone generating units 11, each of which has an inductance connected to the reactor 14 of L1, L2, L3, L4, and L5, are f1, f2, f3, f4, and f5, f1 < f2 < f3 < f4 < f5.
Fig. 4 is an explanatory diagram showing a relationship between a waveform of a power supply output of the high-frequency power supply 1 and discharge power injected into each of the 5 ozone generating cells 11 in the present embodiment. The waveform 15 shown in the upper part of fig. 4 is a waveform of the power supply output of the high-frequency power supply. The lower graph in fig. 4 shows waveforms of discharge power injected into each of the 5 ozone generating cells. When the number of ozone generating units 11 connected in parallel is n, the time of 1 cycle of the power output indicated by the waveform 15 is set to be n×τd, which is obtained by multiplying n by the time τd of the discharge generated in a pulse shape in each ozone generating unit 11. The time τd is shorter than the time τg for which the gas stays in the discharge space portion, and is set to be equal to the time period represented by the formula (2) from oxygen radicals (O) to ozone (O) 3 ) The switching time τ of the switching of (a) is the same extent. The time n×τd of 1 cycle of the power supply output is set to be equal to τg. The time of 1 cycle of the power supply output and the amount of change in the power supply frequency during 1 cycle are set so as to satisfy τd and n×τd.
As for the power supply output of the high-frequency power supply, as shown by a waveform 15 of fig. 4, control is performed by the frequency control circuit 13 so that the frequency varies during 1 cycle. As the power supply frequency changes, the electric power outputted from the power supply is concentrated and injected into the ozone generating units 11 whose power supply frequency coincides with the resonance frequency within the 5 ozone generating units 11. As for the power supply output, as shown in waveform 15 of fig. 4, control is performed such that the frequency increases during 1 cycle. Then, the power supply frequency and the resonance frequency are sequentially identical from the ozone generating unit having a low resonance frequency. Among the 5 ozone generating units 11, the ozone generating units having a low resonance frequency are called a unit 1, a unit 2, a unit 3, a unit 4, and a unit 5 in this order. As shown in fig. 4, during 1 cycle of the waveform 15 of the power supply output, electric power is initially injected into the cell 1 whose resonance frequency is low, and only during the time τd, discharge occurs in the cell 1. As the power supply frequency increases, discharge is generated in the order of cell 2, cell 3, cell 4, and cell 5. At the end of 1 cycle of power output, in the next cycle, discharge is again generated in the order of cell 1, cell 2, cell 3, cell 4, cell 5. In this way, sequential discharge of the 5 ozone generating units 11 occurs periodically.
In 1 ozone generating unit 11, when the power supply frequency and the resonance frequency are identical, discharge occurs during time τd, during which generation of oxygen radicals by dissociation of oxygen molecules occurs. Then, during the period when the discharge is stopped, ozone is generated from the oxygen radicals, and the gas is discharged to the outside of the discharge space portion by the gas flow. As shown in fig. 4, in 1 ozone generating unit 11, after a time of 5×τd, the next discharge occurs.
In the ozone generating device configured in this way, a plurality of ozone generating units are connected in parallel to 1 high-frequency power supply, and electric power is supplied in a pulse form to each ozone generating unit. Therefore, since there is no period in which the power supply itself is stopped, the power supply capacity can be always used up, and the ozone generating device can be configured by a low-cost power supply system.
In the ozone generating device of the present embodiment, 5 reactors having different inductances are connected to 5 ozone generating units 11, respectively. As another configuration, a reactor having the smallest inductance L5 may be connected in series to the output terminal of the single-phase inverter circuit 12, and a reactor having an inductance different from the difference between L5 may be connected to each ozone generating unit 11. With this configuration, the inductance of each reactor can be reduced, and thus the ozone generator can be made compact.
In the ozone generating device of the present embodiment, 5 ozone generating units are connected in parallel. The number of ozone generating units connected in parallel may be 2 or more. When the number of ozone generating units connected in parallel is n, the time of 1 cycle of the power output of the high-frequency power supply is set to n×τd.
In the ozone generating device of the present embodiment, the power supply output is controlled so that the frequency increases during 1 cycle. The power supply output may also be controlled such that the frequency decreases during 1 cycle. In the case of controlling the power supply output so that the period frequency of 1 cycle is reduced, only the order of the ozone generating units in which the power supply frequency coincides with the resonance frequency is reversed.
The present application has been described in terms of various illustrative embodiments and examples, and the features, modes and functions described in 1 or more embodiments are not limited to the application of the specific embodiments and can be applied to the embodiments alone or in various combinations.
Accordingly, a large number of modifications not illustrated are conceivable within the technical scope disclosed in the present specification. For example, the case where at least 1 component is deformed, added or omitted, and the case where at least 1 component is extracted and combined with the components of the other embodiments is included.
Description of the reference numerals
1 high-frequency power supply, 2 high-voltage electrode, 3 ground electrode, 4 high-voltage side dielectric, 5 ground side dielectric, 10 ozone generator, 11 ozone generator unit, 12 single-phase inverter circuit, 13 frequency control circuit, 14 reactor, 15 waveform, 51 reduced part, 52 discharge space part, 53 enlarged part, 54 gas introducing direction, 55 gas discharging direction.
Claims (10)
1. An ozone generating device for generating ozone by using an oxygen-containing gas introduced in a gas flow direction, comprising:
a discharge space portion that generates electron collisions by discharging the gas;
a lead-out portion that leads out ozone that is converted and generated by the oxygen contained in the gas by the electron collision at the discharge space portion; and
and a decomposition reaction suppressing means for suppressing a decomposition reaction that occurs in which the ozone is decomposed by the electron collision.
2. The ozone generating apparatus according to claim 1, wherein the decomposition reaction suppressing means is constituted by: the residence time for the gas to stay in the discharge space is shorter than the conversion time for converting the oxygen into the ozone by the electron collision of the discharge space.
3. The ozone generating device according to claim 1 or 2, wherein the decomposition reaction suppressing means comprises:
a high-voltage side dielectric and a ground side dielectric which are arranged at intervals and form the discharge space part; and
a high-voltage electrode connected to the high-voltage side dielectric applied between the discharge space portions and a ground electrode connected to the ground side dielectric,
the width Ld of the high-voltage electrode and the ground electrode in the air flow direction is shorter than the length Lw of the high-voltage electrode and the ground electrode in a direction perpendicular to the air flow direction.
4. The ozone generator according to claim 3, wherein the discharge space portion is formed as a gap between the high-voltage side dielectric and the ground side dielectric.
5. The ozone generator according to claim 4, wherein the ozone generator includes, between the high-voltage side dielectric and the ground side dielectric:
the high-voltage side dielectric is spaced from the ground side dielectric by a distance d, and the discharge space portions are continuous in a direction perpendicular to the air flow direction by the length Lw;
a reduced portion located on an upstream side of the discharge space portion in the air flow direction, the distance being reduced toward the separation distance d along the air flow direction; and
an expansion portion located on the downstream side of the discharge space portion in the air flow direction, the distance expanding from the spacing distance d along the air flow direction.
6. The ozone generating device as claimed in claim 5, characterized in that,
the shrinking angle of the shrinking part is 45 degrees,
the expansion angle of the expansion part is 10 degrees.
7. The ozone generator according to claim 2, wherein the decomposition reaction suppressing means is constituted by: the discharge in the discharge space portion is made to be a pulse-like discharge having a discharge stop time longer than the transition time.
8. An ozone generating device is provided with: an ozone generating device comprising a plurality of ozone generating units each having a pair of discharge electrodes and a power source whose power source frequency is periodically changed, characterized in that,
the plurality of ozone generating units are connected in parallel to the power supply, and reactors having different inductances are connected between the plurality of ozone generating units and the power supply, respectively.
9. The ozone generator according to claim 8, wherein the discharge electrode has a dielectric and a metal electrode provided on a part of one surface of the dielectric, a pair of the discharge electrodes are disposed so as to face each other between the other surface of the dielectric, a gas flow path through which an oxygen-containing gas flows is provided between the pair of the discharge electrodes, and a portion of the dielectric between the other surface of the dielectric, at which the metal electrode is provided, is narrowest and widens toward upstream and downstream sides of the gas flow path.
10. An ozone generating method for generating ozone by using an oxygen-containing gas introduced in a gas flow direction, comprising:
a discharge step of generating electron collisions by discharging the gas at a discharge space portion;
a lead-out step of leading out ozone from a lead-out portion, the ozone being generated by converting the oxygen contained in the gas by the electron collision at the discharge space portion; and
and a decomposition reaction suppressing step of suppressing a decomposition reaction of the generated ozone decomposed by the electron collision by using a decomposition reaction suppressing mechanism.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/005421 WO2022172426A1 (en) | 2021-02-15 | 2021-02-15 | Ozone generator and ozone generation method |
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| Publication Number | Publication Date |
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| CN116724668A true CN116724668A (en) | 2023-09-08 |
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| CN202180069759.3A Pending CN116724668A (en) | 2021-02-15 | 2021-02-15 | Ozone generating device and ozone generating method |
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| JP (1) | JP7019872B1 (en) |
| CN (1) | CN116724668A (en) |
| WO (1) | WO2022172426A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2002026622A1 (en) * | 2000-09-29 | 2002-04-04 | Smartultoms Co., Ltd. | Ozone generator |
| WO2006035506A1 (en) * | 2004-09-29 | 2006-04-06 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | N-phase ozone generator apparatus |
| WO2008053940A1 (en) * | 2006-10-31 | 2008-05-08 | Kyocera Corporation | Plasma generating body and apparatus and method for manufacturing plasma generating body |
| JP2015064966A (en) * | 2013-09-24 | 2015-04-09 | 日本碍子株式会社 | Structure and electrode structure |
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- 2021-02-15 JP JP2021531711A patent/JP7019872B1/en active Active
- 2021-02-15 CN CN202180069759.3A patent/CN116724668A/en active Pending
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| JPWO2022172426A1 (en) | 2022-08-18 |
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