JP7019872B1 - Ozone generator - Google Patents

Abstract

The present application relates to an ozone generator and an ozone generation method. It is an ozone generator that generates ozone using a gas containing oxygen introduced in the gas flow direction. The ozone generator (10) derives the ozone generated by the discharge space portion (52) that causes an electron collision with the gas by discharge and the discharge space portion that undergoes electron collision and is converted from oxygen contained in the gas. It is equipped with a derivation site and a decomposition reaction suppression mechanism that suppresses the decomposition reaction in which the generated ozone is decomposed by electron collision.

Description

The present application relates to an ozone generator.

An ozone generator that generates ozone by using a discharge generated in a discharge space between a high-voltage electrode and a ground electrode is known (for example, Patent Document 1). This ozone generator causes an electron collision with oxygen gas (O ₂ ) in the discharge space to generate ozone (O ₃ ).

In the above-mentioned ozone generator, oxygen radicals (O) are generated by dissociation from oxygen gas (O ₂ ) in which electron collision occurs (O ₂ + e → O + O + e, e indicate electrons). The generated oxygen radicals combine with oxygen gas existing in the vicinity to generate ozone (O ₃ ) (O + O ₂ + M → O ₃ + M, M indicates a third body).

Japanese Unexamined Patent Publication No. 62-132706

However, if further electron collisions occur in the same discharge space with respect to the generated ozone, the ozone decomposition reaction (O ₃ + e → O + O ₂ + e) can also proceed. When the ozone decomposition reaction proceeds with respect to the generated ozone, the ozone generation efficiency generated by the ozone generator may decrease.

The present application has been made in view of the above circumstances, and an object of the present application is to provide an ozone generator capable of suppressing a decrease in ozone generation efficiency.

The ozone generator according to one aspect of the present application is an ozone generator that generates ozone by using a gas containing oxygen introduced in the gas flow direction, and is a discharge space portion that causes an electron collision with the gas by discharge. And the derivation part where the discharge space part undergoes electron collision and is converted from the oxygen contained in the gas to derive the generated ozone, and the decomposition reaction suppression mechanism that suppresses the decomposition reaction in which the generated ozone is decomposed by the electron collision. The decomposition reaction suppression mechanism is provided with a high-pressure electrode and ground contact connected to the separated high-pressure side dielectrics and ground-side dielectrics constituting the discharge space portion and the high-pressure side dielectrics to be applied between the discharge space portions. A ground electrode connected to a side dielectric is provided, and the width Ld of the high-pressure electrode and the ground electrode in the gas flow direction is shorter than the length Lw of the high-pressure electrode and the ground electrode in the direction perpendicular to the gas flow direction. The discharge space portion is configured as a gap between the high-pressure side dielectric and the ground-side dielectric, and the separation between the high-pressure side dielectric and the ground-side dielectric is separated from the high-pressure side dielectric and the ground-side dielectric. The distance is the separation distance d, which is located on the upstream side of the discharge space portion in the direction perpendicular to the gas flow direction and the length Lw, and the discharge space portion in the gas flow direction, and the distance is separated along the gas flow direction. It has a reduction part that shrinks to the distance d and an expansion part that is located downstream in the gas flow direction of the discharge space part and the distance increases from the separation distance d along the gas flow direction. It is 45 degrees, and the enlargement angle of the enlarged portion is 10 degrees .

In one aspect of the present application, it is possible to provide an ozone generator capable of suppressing a decrease in ozone generation efficiency.

It is a schematic diagram which shows the structure of the ozone generator which concerns on Embodiment 1. FIG. It is a figure of the graph which shows the relationship between the change of a gas pressure P, and the conversion time τ from an oxygen radical to ozone. It is a schematic diagram which shows the structure of the ozone generator which concerns on Embodiment 2. It is explanatory drawing which showed the relationship between the waveform of power-source output and discharge power in Embodiment 2. FIG.

Hereinafter, embodiments of the ozone generator and method disclosed in the present application will be described in detail with reference to the accompanying drawings. The embodiments shown below are examples, and the present application is not limited to these embodiments.

Embodiment 1.
FIG. 1 is a schematic diagram showing the configuration of the ozone generator according to the first embodiment. As shown in FIG. 1, the ozone generator 10 includes a high-frequency power supply 1, a high-voltage electrode 2, a ground electrode 3, a high-voltage side dielectric 4, and a ground-side dielectric 5. Further, the ozone generator 10 introduces a gas containing oxygen gas, which is a raw material for ozone generation, from left to right toward the paper surface of FIG. 1, that is, in the gas introduction direction 54 indicated by the arrow, and the gas indicated by the arrow. Derived in the derivation direction 55.

The high frequency power supply 1 is connected to the high voltage electrode 2 and the ground electrode 3, and a high frequency voltage is applied between the high voltage electrode 2 and the ground electrode 3. The high voltage electrode 2 and the ground electrode 3 are made of, for example, metal. Further, the high-voltage side dielectric 4 and the ground-side dielectric 5 are made of, for example, an alumina ceramic plate.

As shown in FIG. 1, the high-voltage electrode 2 has a width of Ld along the gas introduction direction 54 of the gas containing oxygen gas, and is directed toward the depth of the paper surface of FIG. 1 perpendicular to the gas introduction direction 54. It is an electrode member extending at a length Lw. Further, as shown in FIG. 1, the high-voltage electrode 2 is connected to the high-voltage side dielectric 4 described later in the lower part of FIG.

As shown in FIG. 1, the ground electrode 3 has a width of Ld along the gas introduction direction 54 of the gas containing oxygen gas, and is directed toward the depth of the paper surface of FIG. 1 perpendicular to the gas introduction direction 54. It is an electrode member extending at a length Lw. Further, the ground electrode 3 has one end grounded and is arranged so as to face the high voltage electrode 2 at a distance in the vertical direction with respect to the paper surface of FIG. Further, as shown in FIG. 1, the ground electrode 3 is connected to the ground side dielectric 5 described later in the upper part of FIG. 1, and the direction of the width Ld and the length Lw is the same as that of the high voltage electrode 2. They are arranged so as to face each other.

The high-voltage side dielectric 4 and the ground-side dielectric 5 are arranged so as to be separated from each other with respect to the paper surface of FIG. 1 by a separation distance d. The space between the high-voltage side dielectric 4 and the ground-side dielectric 5 functions as a discharge space portion described later. That is, the discharge electrode in which the high-voltage electrode 2 is provided on a part of one surface of the high-voltage side dielectric 4 and the discharge electrode in which the ground electrode 3 is provided on a part of one surface of the ground-side dielectric 5. The ozone generation unit 11 is configured by arranging the other surfaces of the high-voltage side dielectric 4 and the ground-side dielectric 5 so as to face each other.

The high-pressure side dielectric 4 and the ground-side dielectric 5 are separated from the paper surface in FIG. 1 in the vertical direction from a value larger than d to d in the gas introduction direction 54, and the discharge space portion. A reduced portion 51 for reducing the flow of gas introduced into 52, a discharge space portion 52 having a vertical separation distance d of Ld along the gas introduction direction 54 with respect to the paper surface of FIG. 1, and a discharge space portion 52 of FIG. The separation distance in the vertical direction with respect to the paper surface expands from d toward the gas derivation direction 55 to a value larger than d, and the expansion portion 53 that expands and derives the flow of gas flowing out from the discharge space portion 52. To prepare for. The reduced portion 51 has, for example, a reduced angle of 45 degrees. The enlargement site 53 has, for example, an enlargement angle of 10 degrees. The contraction site 51 functions as an example of an introduction site for introducing gas, and the expansion site 53 functions as an example of a derivation site for deriving ozone.

In other words, in the ozone generator 10 of the present embodiment, a pair of discharge electrodes having a metal electrode provided on a part of one surface of the dielectric are arranged so that the other surfaces of the dielectric face each other. It has a generation unit 11 and a high frequency power supply 1 that applies a voltage to a metal electrode. The ozone generation unit 11 has a gas flow path between the pair of discharge electrodes through which a gas containing oxygen flows, and the distance between the other surfaces of the dielectric is the most at the portion where the metal electrode is provided. It is narrow and widens toward the upstream and downstream sides of the gas flow path.

The discharge space portion 52 is a space in which discharge plasma is generated when the high frequency power supply 1 applies a high voltage to the high voltage electrode 2 and the ground electrode 3. Further, the discharge space portion 52 is a space whose length, width and height are composed of Ld, Lw and d, which will be described later. The high-voltage electrode 2 is arranged so that the width Ld portion of the high-voltage electrode 2 faces the width Ld portion constituting the discharge space portion 52 of the high-voltage side dielectric 4. The ground electrode 3 is arranged so that the width Ld portion of the ground electrode 3 faces the width Ld portion constituting the discharge space portion 52 of the ground side dielectric 5. Therefore, the ozone generator 10 according to the present embodiment is a discharge space among the reduction portion 51, the discharge space portion 52, and the expansion portion 53, which is a space composed of the high-voltage side dielectric 4 and the ground-side dielectric 5. The portion 52 is configured to generate an electron collision due to electric discharge.

In the ozone generator 10 according to the present embodiment, for the high-pressure side dielectric 4 and the ground-side dielectric 5, the length Ld of the gas introduction direction 54 is equal to the length Lw of the extension direction perpendicular to the gas introduction direction 54. Is also configured to be small. Preferably, the length Ld in the gas introduction direction 54 is configured to be 1/10 or less of the length Lw in the extension direction perpendicular to the gas introduction direction 54. Further, in the ozone generator 10 according to the present embodiment, the separation distance d between the high-voltage side dielectric 4 and the ground-side dielectric 5 is set to 0.2 mm or less. By adopting such a configuration, the ozone generator 10 according to the present embodiment can shorten the time for the generated ozone to stay in the discharge space portion 52, as will be described later, and has a relatively simple configuration. It is a device that can suppress the decrease in ozone generation efficiency. Therefore, such a configuration including the high-voltage side dielectric 4 and the ground-side dielectric 5 functions as an example of a decomposition reaction suppressing mechanism that suppresses a decomposition reaction in which generated ozone is decomposed by electron collision.

The ozone generator 10 according to the present embodiment is composed of lengths Ld, Lw and d via the high-voltage side dielectric 4 when the high-voltage power supply 1 applies a high voltage to the high-voltage electrode 2 and the ground electrode 3. A discharge plasma is generated in the discharge space portion 52. At that time, the gas containing the oxygen gas introduced into the discharge space portion 52 in the direction of the gas introduction direction 54 indicated by the arrow in FIG. 1 reacts with the generated discharge plasma, and the enlarged portion outside the discharge space portion 52. 53, the gas is discharged downstream from the enlarged portion 53 in the direction of the gas discharge direction 55 indicated by the arrow.

When the oxygen gas introduced into the discharge space portion 52 and the discharge plasma generated in the discharge space portion 52 react with each other, the oxygen gas is dissociated by electron collision and oxygen radicals (O) are generated (O ₂ + e → O + O + e: e indicates an electron). When the generated oxygen radical (O) reacts with oxygen gas, the ozone generator 10 generates ozone in the discharge space portion 52 (O + O ₂ + M → O ₃ + M, M indicates a third body). However, when electron collision occurs with the generated ozone, the generated ozone can be decomposed into oxygen radicals and oxygen gas (O ₃ + e → O + O ₂ + e). When decomposition of the generated ozone occurs, the efficiency of ozone generated from the ozone generator may decrease.

Here, the conversion rate of oxygen radicals to ozone will be examined. The process of reducing oxygen radicals by converting them to ozone is expressed by the following equation (1). [O] and [O ₂ ] indicate the particle densities (particles / cm ³ ) of oxygen radicals (O) and oxygen gas (O ₂ ). k indicates the reaction rate constant (cm ⁶ / s). However, assuming that the supply gas is oxygen gas, M, which is the third body, is regarded as oxygen gas (O ₂ ). It is reported that when the gas temperature (K) is T, k is 6.45 × ^10-35 exp (663 / T).
d [O] / dt = -k x [O] x [O ₂ ] ² ... (1)

With respect to the above equation (1), the conversion time τ for the conversion of oxygen radicals (O) to ozone (O ₃ ) can be obtained as in equation (2).
τ = 1 / (k × [O ₂ ] ² ) ・ ・ ・ (2)

FIG. 2 is a graph showing the relationship between the change in gas pressure P and the conversion time τ from oxygen radicals to ozone. In consideration of the above-mentioned equation (2), the conversion time τ (sec) from the oxygen radical (O) to ozone (O ₃ ) when the gas pressure P (kPa) changes is shown. Further, the graph shows the case where the gas temperature is 300K, 500K, 1000K. As is clear from Eq. (2) and FIG. 2, the conversion time τ to ozone is inversely proportional to the square of the gas pressure. When the gas temperature is 300 K, it is 0.29 msec at 10 kPa and 2.9 μsec at 100 kPa. Further, as is clear from FIG. 2, it can be interpreted that the conversion time τ to ozone becomes longer when the gas temperature becomes higher. Considering this interpretation, it is possible to lengthen the conversion time τ (sec) from oxygen radicals ₍ O) to ozone (O3) by realizing the discharge space portion 52 with high temperature and low gas pressure. It becomes.

When the time τg (sec) staying in the discharge space portion 52 of the gas is shorter than the conversion time τ in which the oxygen radical (O) is converted to ozone (O ₃ ), it reacts with the oxygen radical in the discharge space portion 52. The oxygen gas generated is converted into ozone downstream from the expansion portion 53 and the expansion portion 53, which are external to the discharge space portion 52. The ozone generator 10 according to the present embodiment does not have a mechanism for intentionally generating discharge plasma at the expansion portion 53 converted into ozone, and intends discharge plasma downstream of the expansion portion 53. It does not have a mechanism to generate plasma. Further, with respect to the high-pressure side dielectric 4 and the ground-side dielectric 5 for forming the discharge space portion 52 that causes electron collision, the length Ld of the gas introduction direction 54 is the length in the extension direction perpendicular to the gas introduction direction 54. It is configured to be smaller than Lw. With such a configuration, compared with a configuration in which the length Ld of the gas introduction direction 54 is larger than the length Lw of the extension direction perpendicular to the gas introduction direction 54, the gas discharge space while ensuring the same discharge area. The time to stay at the site 52 is shortened. Therefore, it is possible to suppress the influence of the generated ozone being decomposed by electron collision. When the amount of gas to be supplied is represented by Q (m ³ / s) and the volume of the discharge space portion 52 is represented by V (m ³ ), the time τg (sec) during which the gas stays in the discharge space portion 52 is V / Q. .. Further, when the discharge length Ld in the gas flow direction, the discharge space length Lw of the discharge space portion 52 in the direction perpendicular to the gas flow, and the separation distance d which is the discharge gap length are used and the gas flow velocity in the discharge space is vg, the gas is generated. The time τg (sec) staying in the discharge space portion 52 is expressed by the following equation (3).
τg = Ld × Lw × d / Q = Ld / vg ・ ・ ・ (3)

The ozone generator 10 according to the present embodiment is configured such that the time (τg) for the gas staying in the discharge space portion 52 <the conversion time (τ) for the conversion of oxygen radicals (O) to ozone ₍ O3). It has been done. By configuring τg <τ, the ozone generator 10 generates an O radical in the discharge space portion 52 and starts a reaction with the O radical in the discharge space portion 52, but the oxygen gas that has started the reaction. Will be converted to ozone ₍ O3) outside the discharge space portion 52. Therefore, the ozone generator 10 according to the present embodiment suppresses ozone decomposition due to electron collision in the discharge space portion 52 with respect to the generated ozone, and has a relatively simple configuration and high ozone generation efficiency. obtain.

In the ozone generator 10 of the present embodiment, the length Ld of the electrode surface of the discharge space portion 52 composed of the high-pressure side dielectric 4 and the ground-side dielectric 5 in the gas flow direction is perpendicular to the gas flow direction. It is configured to be shorter than the length Lw of, and is preferably configured to have a length of 1/10 or less (Ld / Lw <0.1). Further, in the ozone generator 10 of the present embodiment, gas is flowed from the side of the longer Lw to the side of the shorter Ld on the discharge surface configured by Ld × Lw (3). The Ld of the equation (3) becomes small, the Ld / vg of the equation (3) becomes small, and the residence time of the discharge space portion 52 can be set small. Further, the ozone generator 10 of the present embodiment is further provided with a reduction portion 51 and an expansion portion 53 by increasing the gas flow velocity by setting the separation distance d, which is the discharge gap length, to 0.2 mm or less. By increasing the gas flow velocity, the vg of the equation (3) becomes large, the Ld / vg of the equation (3) becomes small, and the residence time of the discharge space portion 52 can be set small. Therefore, the ozone generator 10 according to the present embodiment suppresses ozone decomposition due to electron collision in the discharge space portion 52 with respect to the generated ozone, and has a relatively simple configuration and high ozone generation efficiency. obtain. That is, the above-described configuration including the reduced portion 51, the discharge space portion 52, and the expanded portion 53 functions as an example of the decomposition reaction suppressing mechanism of the present application that suppresses the decomposition reaction in which the generated ozone is decomposed by electron collision.

In the ozone generator 10 of the present embodiment, an open space having dimensions of Ld × Lw × d is secured as the discharge space portion 52 into which oxygen gas is introduced. A flow-suppressing substance that suppresses the flow of introduced oxygen gas is not intentionally placed in this open space. Therefore, this ozone generator can move the oxygen gas introduced from the side of the longer Lw on the discharge surface as quickly as possible by the shorter Ld on the discharge surface, and ozone can be used with a relatively simple configuration. It becomes possible to provide an ozone generator and a method having high production efficiency. In other words, the ozone generator converts oxygen radicals into ozone by moving the oxygen gas introduced from the side of the longer Lw on the discharge surface as quickly as possible by the shorter Ld on the discharge surface. Ozone is generated outside the discharge space portion 52 by being discharged from the discharge space portion 52 before, and electron collision with the generated ozone in the discharge space portion 52 can be suppressed, which is relatively easy. It is possible to provide an ozone generator and a method having a high ozone generation efficiency with such a configuration.

The operation of the ozone generator 10 according to the present embodiment will be described. The ozone generator introduces a gas containing oxygen gas, which is a raw material for ozone generation, from left to right toward the paper in FIG. 1, that is, in the gas introduction direction 54 indicated by the arrow in FIG. The ozone generator accelerates the introduced gas by a reduction portion 51 in which the separation distance narrows in the flow direction. The ozone generator uses an increase in gas velocity due to acceleration to reduce the gas pressure at the discharge space portion 52. When the gas pressure in the discharge space portion 52 decreases, as shown in FIG. 2, the conversion time τ (sec) from the oxygen radical (O) to ozone (O ₃ ) becomes long. The ozone generator decelerates the gas that has passed through the discharge space portion 52 by the expansion portion 53 whose separation distance expands in the flow direction. This ozone generator uses the decrease in gas velocity due to deceleration to derive the gas whose static pressure has been restored in the downstream direction. With such a configuration, the ozone generator 10 according to the present embodiment increases the gas flow velocity of the discharge space portion 52 while increasing the conversion time τ to ozone in the discharge space portion 52, so that the gas is discharged. It is possible to shorten the time τg of staying in the space portion 52. That is, the step of discharging using the discharge space portion 52 functions as an example of the discharge step of causing an electron collision with the gas by the discharge, and the step of deriving the gas from the enlarged portion 53 leads out the ozone from the deriving unit. The above-mentioned step, which functions as an example of the step and is performed using the shrinking portion 51, the discharge space portion 52, and the expanding portion 53, suppresses the decomposition reaction in which the generated ozone is decomposed by electron collision. It functions as an example of the suppression process.

Embodiment 2.
FIG. 3 is a schematic diagram showing the configuration of the ozone generator according to the second embodiment. In the ozone generator of the present embodiment, a plurality of ozone generating units are connected in parallel to one high frequency power source.

As shown in FIG. 3, the high-frequency power supply 1 of the ozone generator 10 of the present embodiment includes a single-phase inverter circuit 12 and a frequency control circuit 13. The frequency control circuit 13 includes a drive circuit of the single-phase inverter circuit 12, and controls the power supply frequency output from the single-phase inverter circuit 12. A plurality of ozone generation units 11 are connected in parallel to the output terminals of the single-phase inverter circuit 12. A reactor 14 is connected between the high-voltage electrode 2 of each ozone generation unit 11 and the output terminal of the single-phase inverter circuit 12. The potentials of the ground electrodes 3 of each ozone generation unit 11 are all set to the ground potential. In the present embodiment, an ozone generator in which five ozone generator units are connected in parallel will be described below.

In each ozone generation unit 11, AC discharge (barrier discharge) is generated between the high-voltage electrode 2 and the ground electrode 3 via the high-voltage side dielectric 4 and the ground-side dielectric 5. The ground side dielectric 5 is not always necessary, and only the ground electrode 3 may be used. In each ozone generation unit 11, pulsed energy is injected into the discharge space portion by resonance between the capacitance component (C) between the high voltage electrode 2 and the ground electrode 3 and the inductance component (L) of the reactor 14. The capacitance component between the high-voltage electrode 2 and the ground electrode 3 is mainly determined by the capacitance component of the high-voltage side dielectric 4 and the capacitance component of the ground-side dielectric 5.

That is, when the power frequency f of the high frequency power supply 1 satisfies the following equation (4), pulsed energy is injected into the discharge space portion.
f = 1 / 2π√ (L × C) ・ ・ ・ (4)

In the ozone generator 10 of the present embodiment, assuming that the inductances of the reactors 14 connected to the five ozone generator units 11 are L1, L2, L3, L4, and L5, respectively, L1> L2> L3> L4> L5. It is set to be. The capacitive components (C) between the high-voltage electrode 2 and the ground electrode 3 in the five ozone generation units 11 are set to be substantially the same.

In the ozone generator 10 configured in this way, the resonance frequencies of the ozone generator units 11 connected to the reactor 14 having inductances L1, L2, L3, L4, and L5 are f1, f2, f3, f4, and f5, respectively. Then, f1 <f2 <f3 <f4 <f5.

FIG. 4 is an explanatory diagram showing the relationship between the waveform of the power output of the high frequency power supply 1 and the discharge power injected into each of the five ozone generation units 11 in the present embodiment. The waveform 15 shown in the upper part of FIG. 4 is a waveform of the power output of the high frequency power supply. The figure shown at the bottom of FIG. 4 is a waveform of the discharge power injected into each of the five ozone generation units. Here, for the time of one cycle of the power supply output shown by the waveform 15, assuming that the number of ozone generation units 11 connected in parallel is n, the discharge time τd generated in a pulse shape in each ozone generation unit 11 is set to n. The multiplied time is set to n × τd. This time τd is shorter than the time τg in which the gas stays in the discharge space portion, and is set to be about the same as the conversion time τ of the conversion of the oxygen radical (O) to ozone (O ₃ ) shown in Eq. (2). ing. Further, the time n × τd of one cycle of the power output is set to be about the same as τg. The time of one cycle of the power output and the amount of change in the power frequency during one cycle are set so as to satisfy τd≈τ and n × τd≈τg.

As shown in the waveform 15 of FIG. 4, the power output of the high-frequency power supply is controlled by the frequency control circuit 13 so that the frequency changes during one cycle. As the power supply frequency changes, the power of the power supply output is concentrated and injected into the ozone generation unit 11 in which the power supply frequency and the resonance frequency match among the five ozone generation units 11. The power output is controlled so that the frequency increases during one cycle, as shown in the waveform 15 of FIG. Then, the power supply frequency and the resonance frequency match in order from the ozone generation unit having the lowest resonance frequency. Here, in the five ozone generation units 11, they are referred to as unit 1, unit 2, unit 3, unit 4, and unit 5 in order from the ozone generation unit having the lowest resonance frequency. As shown in FIG. 4, during one cycle of the waveform 15 of the power supply output, power is first injected into the unit 1 having a low resonance frequency, and discharge is generated in this unit 1 only during the time τd. As the power frequency increases, discharge occurs in the order of unit 2, unit 3, unit 4, and unit 5. When one cycle of the power output is completed, discharge is generated again in the order of unit 1, unit 2, unit 3, unit 4, and unit 5 in the next cycle. In this way, sequential discharge of the five ozone generation units 11 is periodically generated.

In one ozone generation unit 11, when the power supply frequency and the resonance frequency match, a discharge is generated for the time τd, during which the generation of oxygen radicals due to the dissociation of oxygen molecules occurs. After that, ozone is generated from oxygen radicals while the discharge is stopped, and at the same time, the gas is discharged to the outside of the discharge space portion by the gas flow. As shown in FIG. 4, in one ozone generation unit 11, the next discharge is generated after 5 × τd time has elapsed.

In the ozone generator configured in this way, a plurality of ozone generating units are connected in parallel to one high frequency power source, and power is supplied to each ozone generating unit in a pulse shape. Therefore, since the power supply itself does not have a period of inactivity, the power supply capacity can be used up at all times, and the ozone generator can be configured with an inexpensive power supply system.

In the ozone generator of the present embodiment, five reactors having different inductances are connected to each of the five ozone generation units 11. As another configuration, a reactor having the smallest inductance L5 may be connected in series to the output terminal of the single-phase inverter circuit 12, and a reactor having an inductance different from that of L5 may be connected to each ozone generation unit 11. .. With this configuration, the inductance of each reactor can be reduced, so that the ozone generator can be made smaller.

In the ozone generator of this embodiment, five ozone generator units are connected in parallel. The number of ozone generating units connected in parallel may be 2 or more. Assuming that the number of ozone generating units connected in parallel is n, the time of one cycle of the power output of the high frequency power supply is set to n × τd.

In the ozone generator of the present embodiment, the power output is controlled so that the frequency increases in one cycle. The power output may be controlled so that the frequency decreases during one cycle. When the power output is controlled so that the frequency decreases during one cycle, the order of the ozone generating units in which the power frequency and the resonance frequency match is only reversed.

Although the present application describes various exemplary embodiments and examples, the various features, embodiments, and functions described in one or more embodiments are applications of a particular embodiment. It is not limited to, but can be applied to embodiments alone or in various combinations.
Therefore, innumerable variations not exemplified are envisioned within the scope of the techniques disclosed herein. For example, it is assumed that at least one component is modified, added or omitted, and further, at least one component is extracted and combined with the components of other embodiments.

1 High-voltage power supply, 2 High-voltage electrode, 3 Ground electrode, 4 High-voltage side dielectric, 5 Ground side dielectric, 10 Ozone generator, 11 Ozone generator unit, 12 Single-phase inverter circuit, 13 Frequency control circuit, 14 Reactor, 15 Waveform , 51 reduction part, 52 discharge space part, 53 expansion part, 54 gas introduction direction, 55 gas derivation direction.

Claims (1)

In an ozone generator that generates ozone using a gas containing oxygen introduced in the gas flow direction.
A discharge space portion that causes an electron collision with the gas by discharge,
A derivation site where the discharge space portion performs the electron collision and is converted from the oxygen contained in the gas to derive the generated ozone.
It is equipped with a decomposition reaction suppression mechanism that suppresses the decomposition reaction in which the generated ozone is decomposed by the electron collision.
The decomposition reaction suppressing mechanism is
Separately arranged high-voltage side dielectrics and ground side dielectrics constituting the discharge space portion,
A high-voltage electrode connected to the high-voltage side dielectric and a ground electrode connected to the ground-side dielectric to be applied between the discharge space portions are provided.
The width Ld of the high-voltage electrode and the ground electrode in the gas flow direction is shorter than the length Lw of the high-voltage electrode and the ground electrode in the direction perpendicular to the gas flow direction.
The discharge space portion is configured as a gap between the high-voltage side dielectric and the ground-side dielectric.
Between the high-voltage side dielectric and the ground side dielectric,
The discharge space portion where the distance between the high-pressure side dielectric and the ground-side dielectric is the separation distance d and continues in the direction perpendicular to the gas flow direction with the length Lw.
A reduced portion located upstream of the discharge space portion in the gas flow direction and whose distance is reduced to the separation distance d along the gas flow direction.
It is located on the downstream side of the discharge space portion in the gas flow direction, and includes an expansion portion in which the distance extends from the separation distance d along the gas flow direction.
The reduction angle of the reduction portion is 45 degrees, and the reduction angle is 45 degrees.
An ozone generator characterized in that the enlargement angle of the enlarged portion is 10 degrees.

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