CN116713628A - Welding device and welding process for preparing semiconductor gas valve - Google Patents
Welding device and welding process for preparing semiconductor gas valve Download PDFInfo
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- CN116713628A CN116713628A CN202310960135.1A CN202310960135A CN116713628A CN 116713628 A CN116713628 A CN 116713628A CN 202310960135 A CN202310960135 A CN 202310960135A CN 116713628 A CN116713628 A CN 116713628A
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- gas valve
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- 238000003466 welding Methods 0.000 title claims abstract description 132
- 239000004065 semiconductor Substances 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 230000001681 protective effect Effects 0.000 claims abstract description 68
- 239000004744 fabric Substances 0.000 claims abstract description 10
- 230000007246 mechanism Effects 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 11
- 230000000712 assembly Effects 0.000 claims description 6
- 238000000429 assembly Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims 6
- 238000002360 preparation method Methods 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 29
- 230000000694 effects Effects 0.000 description 7
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
- B23K31/02—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to soldering or welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/0426—Fixtures for other work
- B23K37/0435—Clamps
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Valve Housings (AREA)
Abstract
The invention discloses a welding device and a welding process for preparing a semiconductor gas valve, which belong to the technical field of gas valve preparation and comprise a welding platform, wherein an L-shaped supporting plate is fixed on the upper surface of the welding platform, a cylinder is arranged on the L-shaped supporting plate, a piston rod of the cylinder is connected with a connecting component, the bottom of the connecting component is connected with a protective cover with an open bottom, a welding head is arranged in the protective cover, one side wall of the protective cover is provided with an observation window, two side walls of the protective cover are provided with operation holes, two side walls of the protective cover are provided with cloth curtains, the cloth curtains shield the operation holes, arc-shaped corrugated pipes are arranged on the inner walls of the two sides of the protective cover, and the corrugated pipes are communicated with the operation holes; the invention has simple operation, can conveniently adjust the position of the valve component, does not need to move and disassemble the protective cover, is beneficial to welding and simultaneously avoids leakage of harmful gas.
Description
Technical Field
The invention relates to the technical field of gas valve preparation, in particular to a welding device and a welding process for preparing a semiconductor gas valve.
Background
Semiconductor gas valves are valves specifically designed to control the flow of gas during semiconductor manufacturing. They have highly accurate flow control and excellent gas tightness to meet the stringent requirements of semiconductor processes on pure gases, semiconductor gas valves often require welding to ensure their proper operation and tightness.
The patent with the publication number of CN215393306U is found through retrieval, relates to the technical field of valve production, and discloses a high-efficiency welding device for valve production, which comprises a bottom plate, wherein vertical plates are bolted to two sides of the top of the bottom plate, a top plate is bolted to the top of the vertical plates, and a welding mechanism is arranged at the bottom of the top plate; according to the welding device, the valve is placed at the top of the fixing seat, the rotating rod drives the clamping plate to fix the valve, the air cylinder is opened again, the welding head is driven to weld the valve, so that welding errors are avoided, production efficiency is improved, harmful gas generated during welding enters the purifying box from the air inlet hopper by opening the fan, and is discharged from the air outlet hole after being purified through the purifying filter element in the purifying box, so that the harmful gas generated during welding is treated, harm to the body of workers is avoided, and the working environment is protected;
however, the above patents still have some disadvantages: in the above patent, as can be seen from the specification and the accompanying drawings, a structure similar to a box body is formed by using a vertical plate and a top plate, welding is performed internally, and then harmful gas is absorbed through the cooperation of a fan and a purifying box, but the welding process is completely in a closed state, and often the welding process is not completed once, multiple times of welding are needed, if the position of a welding piece is needed to be adjusted, the top plate is needed to be detached, the top plate is bolted on the vertical plate, the first detaching step is time-consuming and labor-consuming, and the second detaching step still causes leakage of the harmful gas after the top plate is opened if the inside harmful air is not completely absorbed.
Disclosure of Invention
The invention aims to provide a welding device and a welding process for preparing a semiconductor gas valve, which solve the following technical problems: the existing valve welding device cannot easily adjust the position of a welding piece, the top plate needs to be detached, time and labor are wasted, and harmful gas leakage can be caused.
The technical scheme of the invention is as follows: the utility model provides a welding set and welding process for semiconductor gas valve preparation, includes the welding platform, the last fixed surface of welding platform has L type backup pad, install the cylinder in the L type backup pad, the piston rod of cylinder is connected with coupling assembling, open protection casing has been seted up to coupling assembling's bottom, be provided with the soldered connection in the protection casing, the observation window has been seted up on one lateral wall of protection casing, the operation hole has all been seted up on the protection casing both sides wall, all be provided with the cloth curtain on the both sides wall of protection casing, the cloth curtain shelters from the operation hole, all be provided with curved bellows on the both sides inner wall of protection casing, just the bellows is linked together with the operation hole, two the one end opening that the bellows is close to mutually is towards the roof of protection casing, install the suction fan on one side wall of protection casing, and the gas outlet of suction fan is connected with the purifying box.
Preferably, the coupling assembling includes cross arm and two stands, the output shaft fixed connection of cross arm and cylinder, the bottom mounting of cross arm has the removal post, the roof of protection casing is run through to the bottom of removal post and is fixed with the mounting panel, the welding head is installed in the below of mounting panel, two the stand is fixed on the roof of protection casing, and two one side that the stand is close to mutually all is provided with the recess, be provided with vertical guide bar in the recess, the both ends of cross arm are located two recesses respectively, just the both ends and the guide bar sliding connection of cross arm.
Preferably, the both sides inner wall of protection casing is last all to be provided with the shutoff subassembly for with the opening shutoff of bellows, the shutoff subassembly includes the mounting bracket, rotate on the mounting bracket and install the shutoff board, be connected with the spring on the lateral wall of shutoff board, the one end of spring is connected on the inner wall of protection casing, the both sides of mounting panel lower surface all are fixed with the push rod, and two the push rod is "eight" style of calligraphy and distributes, two the one end of push rod respectively with two shutoff boards contact.
Preferably, two groups of traction mechanisms are arranged in the protective cover and used for adjusting the opening direction of the corrugated pipe, each traction mechanism comprises a first guide wheel, a second guide wheel, a third guide wheel and a traction rope, the first guide wheels, the second guide wheels and the third guide wheels are all arranged on the inner wall of the protective cover, the second guide wheels and the third guide wheels are located on the same vertical axis, one end of each traction rope is connected to the mounting plate, and the other end of each traction rope sequentially penetrates through the first guide wheels, the second guide wheels and the third guide wheels to be connected with the corrugated pipe.
Preferably, the welding platform is provided with a plurality of fixed components for fixing the position of welding piece, fixed component includes the fixed block, the fixed block is fixed on the welding platform, threaded connection has the screw rod on the fixed block, the one end of screw rod is provided with the latch segment.
Preferably, the welding platform is provided with a protective frame, and the protective frame is positioned outside the fixing assembly.
Preferably, a plurality of positioning blocks are fixed on the welding platform, and the positioning blocks are positioned around the protective frame.
A welding process of a welding device for preparing a semiconductor gas valve, comprising the following steps:
s1: placing a valve component to be welded on a welding platform, pushing the protective cover to descend through an air cylinder, and positioning the valve component in the protective cover;
s2: the height of the welding head can be adjusted by utilizing the air cylinder, the internal condition is observed through the observation window, and when the height of the welding head is proper, the welding can be performed;
s3: when the welding position needs to be adjusted, the welding head is driven to ascend by the air cylinder, and an operator stretches the arm into the protective cover through the operation hole to adjust;
s4: and after welding is finished, the protective cover is driven to reset by the air cylinder.
Compared with the prior art, the invention has the following beneficial technical effects:
according to the invention, the cylinder, the connecting component and the protective cover are arranged, the welding work is performed in the protective cover, so that the influence of harmful gas on staff and the environment is avoided, if the position of the valve to be welded is required to be adjusted in the welding process, the hand is only required to be stretched into the protective cover through the operation hole, the stretching of the arm is not influenced by the cloth curtain, the leakage of the harmful gas is effectively avoided, and the corrugated pipe can protect the arm of an operator, so that the welding machine is simple, convenient and practical;
according to the invention, the plugging component is arranged, so that the leakage of harmful gas is further avoided, the welding head is driven to descend by the air cylinder to be close to the welding piece during welding, the push rod can push the plugging plate to rotate at the moment, the opening of the corrugated pipe is plugged by the plugging plate, the corrugated pipe has a telescopic function, and the plugging is not influenced even if the descending width of the welding head is large;
according to the invention, the traction mechanism is arranged, so that the opening at one end of the corrugated pipe faces to the top of the protective cover in a natural state for facilitating plugging, and thus the arm of a worker needs to be adjusted by himself after stretching in, and the traction mechanism can change the opening direction of the corrugated pipe for facilitating stretching in of the arm, so that the opening of the corrugated pipe is downward when the position of a welding piece is adjusted, and the convenience of adjustment is improved;
according to the invention, the valve components to be welded can be fixed during welding by arranging the fixing component, so that the welding accuracy and stability are improved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a cross-sectional view of the present invention;
FIG. 3 is a schematic view of the mounting plate of FIG. 2 after it has been raised;
FIG. 4 is a schematic view of the internal structure of the column of the present invention;
FIG. 5 is a schematic view of the internal structure of the shield of the present invention;
FIG. 6 is a schematic perspective view of a welder platform of the present invention.
Reference numerals: 1. a welding platform; 2. an L-shaped support plate; 3. a cylinder; 4. a connection assembly; 401. a cross arm; 402. a moving column; 403. a mounting plate; 404. a welding head; 405. a column; 406. a guide rod; 5. a protective cover; 6. an observation window; 7. an operation hole; 8. a cloth curtain; 9. a suction fan; 10. a fixing assembly; 1001. a fixed block; 1002. a screw; 1003. a locking block; 11. a protective frame; 12. a positioning block; 13. a plugging assembly; 1301. a mounting frame; 1302. a plugging plate; 1303. a spring; 1304. a push rod; 14. a traction mechanism; 1401. a first guide wheel; 1402. a second guide wheel; 1403. a third guide wheel; 1404. a traction rope; 15. a bellows.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-2, the invention discloses a welding device and a welding process for preparing a semiconductor gas valve, which comprises a welding platform 1, wherein an L-shaped supporting plate 2 is fixed on the upper surface of the welding platform 1, a cylinder 3 is installed on the L-shaped supporting plate 2, a piston rod of the cylinder 3 is connected with a connecting component 4, the bottom of the connecting component 4 is connected with a protective cover 5 with an open bottom, a welding head 404 is arranged in the protective cover 5, an observation window 6 is arranged on one side wall of the protective cover 5, operation holes 7 are arranged on two side walls of the protective cover 5, cloth curtains 8 are arranged on two side walls of the protective cover 5, the cloth curtains 8 shield the operation holes 7, arc-shaped corrugated pipes 15 are arranged on two inner walls of the protective cover 5, the corrugated pipes 15 are communicated with the operation holes 7, one end, close to the corrugated pipes 15, faces the top wall of the protective cover 5, a suction fan 9 is installed on one side wall of the protective cover, and the air outlet of the suction fan 9 is connected with a purifying box; the valve component to be welded is arranged on the welding platform 1, the air cylinder 3 is utilized to drive the protective cover 5 to descend, the welding process is carried out in the protective cover 5, the welding head 404 is utilized to weld the valve component, the suction fan 9 is started simultaneously, harmful gas is washed out and purified through the purifying box (not shown), the welding condition can be observed through the observation window 6, after a part of welding is completed, an operator wears gloves or other protective equipment, an arm stretches into the protective cover 5 through the operation hole 7, the position of the valve component can be adjusted, the bellows 15 can protect the arm of the operator, the arm is prevented from being scratched by internal equipment or influenced by high temperature, the arm is retracted after the adjustment is completed, the curtain 8 shields the operation hole 7, and the harmful gas can be prevented from leaking outwards.
Referring to fig. 2 and 4, the connecting component 4 comprises a cross arm 401 and two upright posts 405, the cross arm 401 is fixedly connected with an output shaft of the air cylinder 3, a movable column 402 is fixed at the bottom end of the cross arm 401, the bottom end of the movable column 402 penetrates through the top wall of the protective cover 5 and is fixedly provided with a mounting plate 403, a welding head 404 is arranged below the mounting plate 403, the two upright posts 405 are fixed on the top wall of the protective cover 5, grooves are formed in one side, close to the two upright posts 405, of each upright post 405, a vertical guide rod 406 is arranged in each groove, two ends of the cross arm 401 are respectively positioned in the two grooves, and two ends of the cross arm 401 are in sliding connection with the guide rods 406; through setting up coupling assembling 4, when lifting protection casing 5, the piston rod shrink of cylinder 3, protection casing 5 can not remove this moment, and mounting panel 403 and soldered connection 404 rise, when cross arm 401 moved the top of recess, can drive stand 405 and protection casing 5 and rise, the same reason can be obtained, when cylinder 3 drove protection casing 5 and descends, after protection casing 5 contact welding platform 1, the height of soldered connection 404 still can descend to adjust the distance between soldered connection 404 and the valve part, the welding of being convenient for goes on.
Referring to fig. 2, 3 and 5, the inner walls of two sides of the protective cover 5 are respectively provided with a plugging component 13 for plugging the opening of the corrugated pipe 15, the plugging component 13 comprises a mounting frame 1301, a plugging plate 1302 is rotatably installed on the mounting frame 1301, the side wall of the plugging plate 1302 is connected with a spring 1303, one end of the spring 1303 is connected to the inner wall of the protective cover 5, two sides of the lower surface of the mounting plate 403 are respectively fixed with push rods 1304, the two push rods 1304 are distributed in an eight shape, and one ends of the two push rods 1304 are respectively contacted with the two plugging plates 1302; in order to further avoid leakage of harmful gas, because during welding, the mounting plate 403 and the welding head 404 will descend to be close to the valve component, at this time, the pushing rod 1304 will push the plugging plate 1302 to rotate to a side close to the corrugated pipe 15, the opening of the corrugated pipe 15 is upwards, the plugging plate 1302 is attached to the opening of the corrugated pipe 15, the possibility that harmful gas is discharged from the operation hole 7 is eliminated, the corrugated pipe 15 has a telescopic function, even if the descending width of the welding head 404 is larger, damage to the corrugated pipe 15 will not be caused, and the opening of the corrugated pipe 15 is attached to the plugging plate 1302 more tightly.
Referring to fig. 2, 3 and 5, two sets of traction mechanisms 14 are arranged in the protective cover 5 and used for adjusting the opening direction of the corrugated pipe 15, the traction mechanisms 14 comprise a first guide wheel 1401, a second guide wheel 1402, a third guide wheel 1403 and a traction rope 1404, the first guide wheel 1401, the second guide wheel 1402 and the third guide wheel 1403 are all arranged on the inner wall of the protective cover 5, the second guide wheel 1402 and the third guide wheel 1403 are positioned on the same vertical axis, one end of the traction rope 1404 is connected to the mounting plate 403, and the other end of the traction rope 1404 sequentially penetrates through the first guide wheel 1401, the second guide wheel 1402 and the third guide wheel 1403 to be connected with the corrugated pipe 15; because for convenient shutoff go on, the one end opening of bellows 15 is towards the top of protection casing 5 under the natural state, namely upwards, the staff's arm stretches into the back and need adjust by oneself like this, in order to make things convenient for stretching into of arm, and through setting up traction mechanism 14, when the position of valve part is adjusted to needs, drive mounting panel 403 and soldered connection 404 through cylinder 3 earlier and rise and keep away from the valve part, when mounting panel 403 risees, the shutoff board 1302 resets under the effect of spring 1303, and under the effect of haulage rope 1404, pull down the one end of bellows 15, make the orientation of bellows 15 change, thereby the stretching into of staff's arm is convenient, when welding once more, mounting panel 403 descends, bellows 15 adopts the rubber material, reset under the effect of bellows 15 self elasticity.
Referring to fig. 6, a plurality of fixing assemblies 10 are provided on the welding platform 1 for fixing the positions of the welding members, the fixing assemblies 10 include fixing blocks 1001, the fixing blocks 1001 are fixed on the welding platform 1, screw rods 1002 are connected to the fixing blocks 1001 in a threaded manner, and locking blocks 1003 are provided at one ends of the screw rods 1002; in order to improve the stability and the precision of welding, a plurality of fixing assemblies 10 are provided, in this embodiment, taking four as an example, the valve component is placed between the four fixing assemblies 10, and the locking block 1003 is made to be close to the valve component by rotating the screw 1002, so that the position of the valve component can be fixed, and the position of the valve component can be conveniently adjusted, thereby meeting the welding requirement.
Referring to fig. 6, a protective frame 11 is disposed on the welding platform 1, and the protective frame 11 is located outside the fixing assembly 10; the splash generated during welding, such as part of metal and oxide thereof, can be collected by arranging the protective frame 11, and the splash falls into the protective frame 11 by matching with the inclined plugging plate 1302, so that centralized treatment is convenient.
Referring to fig. 6, a plurality of positioning blocks 12 are fixed on the welding platform 1, and the plurality of positioning blocks 12 are located around the protective frame 11; the positioning block 12 is used for fixing the position of the protective frame 11.
A welding process of a welding device for preparing a semiconductor gas valve, comprising the following steps:
s1: placing a valve component to be welded on the welding platform 1, pushing the protective cover 5 to descend through the air cylinder 3, and positioning the valve component in the protective cover 5;
s2: the height of the welding head 404 can be adjusted by using the air cylinder 3, the internal condition is observed through the observation window 6, and when the welding head 404 is proper in height, welding can be performed;
s3: when the welding position needs to be adjusted, the welding head 404 is driven to ascend by the air cylinder 3, and an operator stretches an arm into the protective cover 5 through the operation hole 7 to adjust;
s4: after the welding is finished, the cylinder 3 is used for driving the protective cover 5 to reset.
The working principle of the invention is as follows: the valve component to be welded is arranged on the welding platform 1, the valve component to be welded is fixed by utilizing the fixing component 10, then the protective cover 5 is driven to descend by utilizing the air cylinder 3, when the protective cover 5 is driven to descend by the air cylinder 3, after the protective cover 5 contacts the welding platform 1, the cross arm 401 can descend, that is, the height of the welding head 404 can still descend, the welding head 404 is close to the valve component, the welding distance is met, at the moment, the push rod 1304 can push the plugging plate 1302 to rotate towards one side close to the corrugated pipe 15, the opening direction of the corrugated pipe 15 is upward, the plugging plate 1302 is attached to the opening of the corrugated pipe 15, the possibility that harmful gas is discharged from the operation hole 7 is eliminated, the corrugated pipe 15 has a telescopic function, even if the descending amplitude of the welding head 404 is large, the corrugated pipe 15 is not damaged, the opening of the corrugated pipe 15 is attached to the plugging plate 1302 is tighter, then the welding head 404 is utilized for welding, the welding process is carried out in the protective cover 5, and meanwhile the suction fan 9 is started, and the harmful gas is washed out and purified by a purifying box (not shown);
can observe the welding condition through observation window 6, need adjust the position of valve part after the welding of a part spare is accomplished, drive mounting panel 403 through cylinder 3 and soldered connection 404 rise earlier and keep away from the valve part, when mounting panel 403 risees, the shutoff board 1302 resets under the effect of spring 1303, and under the effect of haulage rope 1404, pull down the one end of bellows 15 for the orientation of bellows 15 changes, thereby the staff's arm stretches into is convenient, the staff wears gloves or other protective equipment, stretch into the protection casing 5 with the arm through operating hole 7 in, can adjust the position of valve part, bellows 15 can protect the staff's arm, avoid the arm to be scratched or high temperature influence by internal equipment, with the arm withdraw after the adjustment can, when the welding once more, mounting panel 403 descends, bellows 15 adopts the rubber material, reset under the effect of bellows 15 self elasticity, shutoff board 1302 seals bellows 15 once more, can weld, whole process easy operation, the adjustment is convenient, also avoided harmful gas's leakage.
The foregoing describes one embodiment of the present invention in detail, but the description is only a preferred embodiment of the present invention and should not be construed as limiting the scope of the invention. All equivalent changes and modifications within the scope of the present invention are intended to be covered by the present invention.
Claims (8)
1. Welding device for preparing semiconductor gas valve, comprising a welding platform (1), characterized in that: the utility model discloses a welding platform, including welding platform (1), welding platform (5), shield (5), operation hole (7) have all been seted up on one lateral wall of shield (5), all be provided with cloth curtain (8) on the both sides wall of shield (5), cloth curtain (8) shelter from operation hole (7), all be provided with curved bellows (15) on the both sides inner wall of shield (5), just bellows (15) are linked together with operation hole (7), two one end openings that bellows (15) are close to are towards the roof of shield (5), suction fan (9) are installed to one side wall of shield (5), and suction fan (9) are connected with purifying box.
2. The welding device for preparing the semiconductor gas valve according to claim 1, wherein the connecting assembly (4) comprises a cross arm (401) and two upright posts (405), the cross arm (401) is fixedly connected with an output shaft of the air cylinder (3), a movable column (402) is fixed at the bottom end of the cross arm (401), the bottom end of the movable column (402) penetrates through the top wall of the protective cover (5) and is fixedly provided with a mounting plate (403), the welding head (404) is mounted below the mounting plate (403), the two upright posts (405) are fixed on the top wall of the protective cover (5), grooves are formed in the side, close to the two upright posts (405), of the two upright posts (405), vertical guide rods (406) are arranged in the grooves, two ends of the cross arm (401) are respectively located in the two grooves, and two ends of the cross arm (401) are in sliding connection with the guide rods (406).
3. The welding device for preparing the semiconductor gas valve according to claim 2, wherein the sealing components (13) are arranged on the inner walls of two sides of the protective cover (5) and used for sealing openings of the corrugated pipe (15), the sealing components (13) comprise a mounting frame (1301), sealing plates (1302) are rotatably arranged on the mounting frame (1301), springs (1303) are connected to the side walls of the sealing plates (1302), one ends of the springs (1303) are connected to the inner walls of the protective cover (5), push rods (1304) are fixed on two sides of the lower surface of the mounting plate (403), the two push rods (1304) are distributed in an eight-shaped mode, and one ends of the two push rods (1304) are respectively contacted with the two sealing plates (1302).
4. A welding device for preparing a semiconductor gas valve according to claim 3, wherein two sets of traction mechanisms (14) are arranged in the protective cover (5) and used for adjusting the opening direction of the corrugated pipe (15), the traction mechanisms (14) comprise a first guide wheel (1401), a second guide wheel (1402) and a third guide wheel (1403) and a traction rope (1404), the first guide wheel (1401), the second guide wheel (1402) and the third guide wheel (1403) are all arranged on the inner wall of the protective cover (5), the second guide wheel (1402) and the third guide wheel (1403) are located on the same vertical axis, one end of the traction rope (1404) is connected on the mounting plate (403), and the other end of the traction rope (1404) sequentially penetrates through the first guide wheel (1401), the second guide wheel (1402) and the third guide wheel (1403) to be connected with the corrugated pipe (15).
5. The welding device for preparing the semiconductor gas valve according to claim 1, wherein a plurality of fixing assemblies (10) are arranged on the welding platform (1) and used for fixing positions of welding pieces, the fixing assemblies (10) comprise fixing blocks (1001), the fixing blocks (1001) are fixed on the welding platform (1), screw rods (1002) are connected to the fixing blocks (1001) in a threaded mode, and locking blocks (1003) are arranged at one ends of the screw rods (1002).
6. Welding device for semiconductor gas valve production according to claim 5, characterized in that a protective frame (11) is provided on the welding platform (1), and that the protective frame (11) is located outside the fixing assembly (10).
7. The welding device for preparing the semiconductor gas valve according to claim 6, wherein a plurality of positioning blocks (12) are fixed on the welding platform (1), and the plurality of positioning blocks (12) are positioned around the protective frame (11).
8. A welding process for a welding device for semiconductor gas valve fabrication according to claims 1-7, comprising the steps of:
s1: the valve component to be welded is placed on a welding platform (1), and then the protective cover (5) is pushed to descend through the air cylinder (3), and the valve component is positioned in the protective cover (5);
s2: the height of the welding head (404) can be adjusted by using the air cylinder (3), the internal condition is observed through the observation window (6), and when the height of the welding head (404) is proper, the welding can be performed;
s3: when the welding position is required to be adjusted, the welding head (404) is driven to ascend by the air cylinder (3), and an operator stretches an arm into the protective cover (5) through the operation hole (7) to adjust;
s4: after the welding is finished, the cylinder (3) is used for driving the protective cover (5) to reset.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310960135.1A CN116713628B (en) | 2023-08-02 | 2023-08-02 | Welding device and welding process for preparing semiconductor gas valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310960135.1A CN116713628B (en) | 2023-08-02 | 2023-08-02 | Welding device and welding process for preparing semiconductor gas valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116713628A true CN116713628A (en) | 2023-09-08 |
| CN116713628B CN116713628B (en) | 2023-10-24 |
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| CN202310960135.1A Active CN116713628B (en) | 2023-08-02 | 2023-08-02 | Welding device and welding process for preparing semiconductor gas valve |
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Citations (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4015895C1 (en) * | 1990-05-17 | 1991-12-12 | Krupp Medizintechnik Gmbh, 4300 Essen, De | Appts. for welding of small titanium (alloy) parts e.g. jewellery - comprises enclosure which can be sealed gas-tight and which contains gas inlet for welding torch |
| JPH0619976U (en) * | 1992-08-13 | 1994-03-15 | 日本酸素株式会社 | Welding shield casing |
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| CN116713628B (en) | 2023-10-24 |
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