CN116703352B - Clean room intelligent operation and maintenance system and method based on digital twin - Google Patents

Clean room intelligent operation and maintenance system and method based on digital twin Download PDF

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CN116703352B
CN116703352B CN202310404657.3A CN202310404657A CN116703352B CN 116703352 B CN116703352 B CN 116703352B CN 202310404657 A CN202310404657 A CN 202310404657A CN 116703352 B CN116703352 B CN 116703352B
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clean room
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data
digital twin
maintenance
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CN116703352A (en
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毛海军
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Elco Engineering Technology Co ltd
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Elco Engineering Technology Co ltd
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Abstract

The invention provides a digital twin-based clean room intelligent operation and maintenance system and method, which are characterized in that a perception interaction module, a clean room digital twin module and an operation and maintenance system display application module, a measurement perception sub-module in the clean room intelligent operation and maintenance system can dynamically acquire clean room operation and maintenance data in real time, display the operation state and environmental parameters of the clean room in real time, the operation data acquired by the clean room can be stored in a database for a long time, can be traced back, is convenient for factory management, is displayed by combining the operation data with maintenance time points in a virtual three-dimensional model of the clean room by utilizing a digital twin technology, is visual and vivid in data display, can automatically prompt equipment maintenance time, predicts and analyzes the operation state and the maintenance time of equipment according to a digital twin model prediction algorithm, can be maintained in a time-sharing manner in a factory, avoids traditional plan maintenance, saves cost and labor cost, and can be checked on remote equipment such as a mobile phone, a computer, and the like in time, and is convenient and quick.

Description

Clean room intelligent operation and maintenance system and method based on digital twin
Technical Field
The invention relates to the technical field of clean room operation and maintenance, in particular to a clean room intelligent operation and maintenance system and method based on digital twinning.
Background
The clean room is also called as a dust-free room or a clean room, is a special environment which requires the space temperature and humidity, the cleanliness, the indoor pressure, the air flow speed and the air flow distribution, the noise vibration, the illumination, the static electricity and the like to be maintained in a required range, integrates various professional technologies such as building, air conditioning purification, pure water and pure gas, electric control and the like, and is commonly used in the industries of semiconductors, biochemistry, pharmacy, medical appliances, precise instruments and the like.
In cleanroom operation and use, monitoring and ongoing maintenance are of major importance to cleanroom ongoing operation and safety, however, current cleanroom monitoring and operation maintenance is still dominated by traditional manual means. The manual data collection monitoring not only brings extra personnel burden to the clean room, but also makes the sampling point and the sampling time difficult to fix, so that certain errors exist in the data, the data analysis is delayed, and the problems are difficult to find in time. In maintenance, the 'planned maintenance' mode is also taken as the main mode, the problems of insufficient maintenance mechanism basis, unscientific maintenance period, poor data utilization, non-visual data and fault feedback, low maintenance effect and the like exist, and the operation and maintenance cost is higher and higher in the full life cycle cost, so that a more efficient, more economical and more scientific operation and maintenance mode is sought to become a common target of a clean room.
Digital twinning is a model of digital replication of real physical entities, processes and systems. The digital twin model acquires and analyzes the real-time information of the physical model through multiple means such as actual measurement of a sensing device, model simulation, intelligent algorithm calculation and the like, and presents various elements in the physical model and real-time dynamic running conditions in the whole life cycle, so that the functions of simulating, monitoring operation and maintenance, process and system optimization, event prediction and the like of the system are realized. The application of the digital twin technology in the aspect of intelligent operation and maintenance of the clean room promotes the transformation of the traditional planning operation and maintenance mode of the clean room into a digitalized, networked and intelligent operation and maintenance mode.
Disclosure of Invention
In view of the above, the invention provides a clean room intelligent operation and maintenance system and method based on digital twinning, which can dynamically collect clean room operation and maintenance data in real time by a measurement perception sub-module in the clean room intelligent operation and maintenance system, display the clean room operation and maintenance data in real time, display the clean room operation state and environmental parameters in real time, solve the problems that the traditional manual detection and detection data are lagged and the data cannot be obtained in real time, the clean room collected operation data can be stored in a database for a long time and can be traced back, facilitate factory management, solve the problems that the manual error and the data cannot be stored for a long time, utilize the digital twinning technology, fuse the operation data and maintenance time point display in a virtual three-dimensional model of the clean room, realize visual data display, and automatically prompt equipment maintenance time according to a digital twinning model prediction algorithm, predict the operation state and maintenance time of analysis equipment, save the traditional manual detection and detection data, save the cost, save the related personnel, save the cost, save the intelligent mobile phone, and the system can be more convenient for checking the clean room, and the system is more convenient in time, and the system is more convenient to read in real time.
A clean room intelligent operation and maintenance system based on digital twinning technology, comprising: perception interaction module, toilet digital twin module, fortune dimension system display application module, its characterized in that: the perception interaction module is in communication connection with the clean room digital twin module; the clean room digital twin module is connected with the operation and maintenance system display application module, a measurement sensing module and an interaction feedback module are arranged in the sensing interaction module, and a measurement sensing submodule of the sensing interaction module is used for collecting operation data, state data and environment data in the clean room operation system; the interactive feedback submodule is used for executing commands, result feedback and state identification, the clean room digital twin module is internally provided with a clean room three-dimensional model submodule and a data calculation and analysis submodule, the clean room three-dimensional model submodule is used for establishing a clean room building main body and an equipment three-dimensional virtual model and synchronizing and managing the clean room building main body and the equipment three-dimensional virtual model, and the data calculation and analysis submodule is used for analyzing and calculating clean room operation data and generating information required by operation and maintenance.
The clean room digital twin module is used for fusing and constructing a clean room digital twin body according to a virtual three-dimensional model of the clean room system and data results of classification, storage, analysis and calculation after collection, the clean room digital twin body module operates at a server end, and the operation and maintenance system display application module is used for displaying the digital twin three-dimensional model and the data results and interacting operators.
In the use process, a measurement perception submodule in the perception interaction module collects operation data of the clean room in real time, then the clean room digital twin module is sent, a data calculation and analysis submodule in the clean room digital twin module collects, classifies, identifies and analyzes and predicts data, a result is fused with a clean room three-dimensional model submodule to form a digital twin body, and the digital twin body is sent to a display application module to realize information interaction, display and sharing. Furthermore, the communication connection mode of the perception interaction module and the clean room digital twin module comprises wired communication connection and wireless communication connection.
Furthermore, the clean room digital twin module is connected with the operation and maintenance system display application module through a mobile communication network or the Internet or a wired communication connection.
Further, the clean room digital twin module is located on a local server or on a cloud platform.
Further, the intelligent operation and maintenance display application model can be run on intelligent devices such as mobile phones, computers, tablets and the like, but not limited to the intelligent devices.
The measurement sensing submodule comprises a sensor detection module, wherein the sensor detection module comprises, but is not limited to, an air pressure detection sensor, a noise detection sensor, an air cleanliness detection unit, an air conditioning equipment operation detection unit, a flow detection unit, a clean room inlet and outlet detection unit and an illuminance detection sensor.
Further, the air cleanliness detecting unit includes, but is not limited to, a dust particle sensor for detecting the number of dust particles contained in the air, a temperature detecting sensor, and a humidity detecting sensor; the temperature detection sensor is used for detecting the temperature of indoor air; the humidity sensor is used for detecting the humidity of indoor air.
Further, dust particle sensors, temperature sensors, humidity sensors are disposed at a plurality of sampling positions designated in the room, respectively.
As a preferred scheme, the air conditioning equipment operation detection unit comprises, but is not limited to, a current detection sensor, a voltage detection sensor, an air inlet and outlet temperature detection sensor and a working time record, wherein the current detection sensor is used for detecting the current of the air conditioning equipment during operation; the voltage sensor is used for detecting the voltage of the air conditioning equipment when in operation; the air inlet and outlet temperature detection sensor is used for detecting the temperature of an air outlet and an air inlet when the air conditioning equipment operates; the working time record is used for recording the working time of the air conditioning equipment.
As a preferred scheme, the flow detection unit comprises, but is not limited to, a fan rotating speed sensor, a wind pressure detection sensor and a wind speed detection sensor, wherein the current detection sensor is used for detecting the current of the air conditioning equipment when in operation; the voltage sensor is used for detecting the voltage of the air conditioning equipment when in operation; the air inlet and outlet temperature detection sensor is used for detecting the temperature of an air outlet and an air inlet when the air conditioning equipment operates.
As a preferred scheme, the measurement perception sub-module further comprises a video acquisition module, such as a camera, and the video acquisition device is in communication connection with the clean room digital twin module; the video acquisition module is arranged at a designated position in the clean room; and video image acquisition and monitoring are carried out on the appointed space.
As a preferred scheme, the interactive feedback submodule comprises, but is not limited to, a command receiving device, a control switch and an alarm device, wherein the command receiving device is used for receiving and executing a command sent by a user or a controller, and the control switch is used for controlling the power on and off of the equipment; the alarm device mainly gives out alarm prompts such as sound, flashing light and the like.
As a preferred scheme, in the clean room digital twin module, the clean room three-dimensional model submodule comprises a clean room three-dimensional model, an equipment three-dimensional model, a model synchronization module and a clean room scene management module, wherein the clean room three-dimensional model comprises but is not limited to a clean room wall body, doors and windows, a ground surface, a roof and other building main bodies; the three-dimensional model of the equipment comprises, but is not limited to, three-dimensional models of air conditioning equipment, fans, lighting and production equipment; the scene management module mainly organizes and manages three-dimensional models such as clean rooms, equipment and the like in the virtual three-dimensional scene, and reflects consistency and vivid effects of illumination and shadow display. The model synchronization module mainly realizes the consistency and synchronization of the display and the operation of the dynamic model.
In the clean room digital twin module, a data calculation and analysis submodule is provided with a data storage module, a data analysis module, a clean room equipment running state identification algorithm, an air flow field analysis algorithm and a prediction evaluation algorithm; the digital twin module is in communication connection with the perception interaction module, the data acquired and operated by the measurement perception submodule of the perception interaction module is input to the data analysis and analysis submodule, the data storage module stores the acquired operation data into a corresponding database, the data analysis module filters, digs and fuses the operation data and further analyzes the operation data to obtain a clean room movement state, and the flow field analysis analyzes an air flow field in the clean room or an air duct according to the acquired data to obtain an air flow state in the clean room; the prediction evaluation module calculates, infers and analyzes the equipment operation data based on the collected data by using a big data change prediction algorithm and a maintenance prediction algorithm, and predicts and evaluates the operation state and maintenance time of the next stage of the equipment.
As a preferred scheme, the application layer of the operation and maintenance system display application module as the intelligent operation and maintenance system comprises, but is not limited to, a man-machine interaction module, an operation and maintenance data management module, a clean room digital display module and a user management module, wherein the man-machine interaction module establishes information interaction between the system and a user in a mode of an interface, a menu and the like, and the operation and maintenance data management module is used for managing data of the operation and maintenance system, including, but not limited to, browsing, tracing, deleting and sharing data results; the clean room digital display module is used for mainly displaying a three-dimensional model and a data result of the clean room; the user management module is used for managing the information and the use permission of the user. The operation and maintenance system displays the application module as a cross-platform application program which can run, but is not limited to, intelligent devices such as mobile phones, computers, tablets and the like
The invention also provides a clean room intelligent operation and maintenance method based on the digital twin technology, which is applied to the clean room intelligent operation and maintenance system based on the digital twin technology provided by any one of the technical schemes, and specifically comprises the following steps:
s1: according to the building structure, running equipment and facilities of the clean room, a three-dimensional model of the clean room system is established;
s2: sensors such as temperature, humidity, air granularity, wind speed, voltage, current and the like are arranged at designated positions in the clean room, operation data of the data clean room are collected in real time, and then the operation data are sent to a data calculation and analysis module through communication;
s3: acquiring acquired data, invoking an operation state identification algorithm, an air flow field analysis algorithm and a prediction evaluation algorithm to perform prediction and evaluation operation, and constructing a clean room digital twin body by combining a clean room three-dimensional model;
s4: the digital twin body sends the operation analysis result, the state identification result and the prediction evaluation result to the system display application module, and interacts with a user through an interface, data operation and three-dimensional model display are carried out.
The invention has the beneficial effects that:
1) The measurement perception submodule in the intelligent operation and maintenance system of the clean room can dynamically acquire operation and maintenance data of the clean room in real time and display operation states and environmental parameters of the clean room in real time, and the problem that data cannot be acquired in real time due to lag of traditional manual detection and detection data is solved.
2) The operation data collected by the clean room can be stored in the database for a long time, can be traced back, is convenient for factory management, and solves the problems that the manual transcription is wrong and the data cannot be stored for a long time.
3) The digital twin technology is utilized to fuse the operation data and the maintenance time point display in the virtual three-dimensional model of the clean room, the data display is visual and image, and the equipment maintenance time can be automatically prompted.
4) According to the digital twin model prediction algorithm, the running state and the maintenance time of the equipment are predicted and analyzed, the factory can be maintained in a time-sharing mode, the traditional planned maintenance is avoided, the cost and the labor cost are saved, and the longer service life and the higher safety of related equipment in a clean room are ensured.
5) The intelligent running system of the clean room can be checked on remote equipment such as a mobile phone, a computer and the like in time, and is convenient and rapid.
Drawings
Fig. 1 is a schematic structural diagram of a digital twin-based clean room intelligent operation and maintenance system of the present invention.
FIG. 2 is a flow chart of the digital twinning-based clean room intelligent operation and maintenance system of the present invention.
FIG. 3 is a flow chart of a method of the digital twinning-based clean room intelligent operation and maintenance system of the present invention.
Description of the main reference signs
The invention will be further described in the following detailed description in conjunction with the above-described figures.
Detailed Description
FIG. 1 is a schematic diagram of a digital twinning-based clean room intelligent operation and maintenance system according to the present invention; FIG. 2 is a flow chart of the digital twinning-based clean room intelligent operation and maintenance system of the invention; FIG. 3 is a flow chart of a method of the digital twin-based clean room intelligent operation and maintenance system of the present invention.
Example 1:
fig. 1 is a schematic structural diagram of a digital twin-based intelligent operation and maintenance system for a clean room.
The intelligent operation and maintenance system for the clean room based on the digital twin technology comprises a perception interaction module, a clean room digital twin module, a mobile communication network and an operation and maintenance system display application module, wherein the clean room is in communication connection with the perception interaction module; the sensing interaction module is provided with a measurement sensing sub-module and an interaction feedback sub-module, the clean room digital twin module comprises a clean room three-dimensional model sub-module and a data calculation and analysis sub-module, the clean room three-dimensional model sub-module is provided with a building three-dimensional model, an equipment three-dimensional model, scene management, model synchronization and other functional modules, and the data calculation and analysis sub-module presets an operation state recognition algorithm, an air flow field analysis algorithm and a prediction evaluation algorithm; the digital twin module is connected with the operation and maintenance system display application module through the mobile communication network/Internet.
In this embodiment, the measurement sensing sub-module is configured to collect operation data of the clean room system, and then perform data transmission with the digital twin module through multiple wireless communication modes such as ZigBee, wi-Fi, 5G, etc.; the interactive feedback submodule is used for receiving various instructions of a user and decomposing and executing the instructions; the digital twin module performs preprocessing such as storage, filtration, fusion and excavation on the operation data obtained by the measurement sensing module, and performs analysis and prediction of clean room operation and maintenance by using a data analysis, cluster analysis and operation state identification algorithm, an air flow field analysis algorithm and a prediction evaluation algorithm; the method comprises the steps of establishing a three-dimensional model of a building, a three-dimensional model of equipment, a rule model and a flow field simulation model which are consistent with an actual physical model of a clean room by using a digital twin technology, constructing a three-dimensional digital twin body together with a data result, displaying the obtained digital twin model by using a display application model of an intelligent operation and maintenance system, displaying the actual running state of the clean room system, visualizing and operating running data, issuing interactive operations such as running and maintenance prompts, control commands and the like.
In this embodiment, the measurement sensing submodule includes an air pressure detection sensor, a noise detection sensor, an air cleanliness detection unit, an air conditioning equipment operation detection unit, a flow monitoring unit, a clean room entrance and exit detection unit, an illuminance detection sensor, and the like, and the measurement sensing submodule collects these parameters.
Further, the air cleanliness detecting unit includes, but is not limited to, a dust particle sensor for detecting the number of dust particles contained in the air, a temperature detecting sensor, and a humidity detecting sensor; the temperature detection sensor is used for detecting the temperature of indoor air; the humidity sensor is used for detecting the humidity of indoor air.
Further, dust particle sensors, temperature sensors, humidity sensors are disposed at a plurality of sampling positions designated in the room, respectively.
In this embodiment, the air conditioning equipment operation detection unit includes, but is not limited to, a current detection sensor, a voltage detection sensor, an air inlet and outlet temperature detection sensor, and a working time record, where the current detection sensor is used to detect the current when the air conditioning equipment is operated; the voltage sensor is used for detecting the voltage of the air conditioning equipment when in operation; the air inlet and outlet temperature detection sensor is used for detecting the temperature of an air outlet and an air inlet when the air conditioning equipment operates; the working time record is used for recording the working time of the air conditioning equipment.
In this embodiment, the flow detection unit includes, but is not limited to, a fan rotation speed sensor, a wind pressure detection sensor, a wind speed detection sensor, and a current detection sensor for detecting a current when the air conditioning apparatus is operated; the voltage sensor is used for detecting the voltage of the air conditioning equipment when in operation; the air inlet and outlet temperature detection sensor is used for detecting the temperature of an air outlet and an air inlet when the air conditioning equipment operates.
In this embodiment, the measurement sensing sub-module further includes a video acquisition module, such as a camera, and the video acquisition device is in communication connection with the clean room digital twin module; the video acquisition module is arranged at a designated position in the clean room; and video image acquisition and monitoring are carried out on the appointed space.
In this embodiment, the interactive feedback submodule includes, but is not limited to, a command receiving device, a control switch, and an alarm device, where the command receiving device is used to receive and execute an instruction sent by a user or a controller, and the control switch is used for on and off control of power of the device; the alarm device mainly gives out alarm prompts such as sound, flashing light and the like.
In this embodiment, in the clean room digital twin module, the clean room three-dimensional model submodule includes a clean room three-dimensional model, an equipment three-dimensional model, a model synchronization module and a clean room scene management module, where the clean room three-dimensional model includes but is not limited to a clean room wall, a door, a window, a ground, a roof and other building bodies; the three-dimensional model of the equipment comprises, but is not limited to, three-dimensional models of air conditioning equipment, fans, lighting and production equipment; the scene management module mainly organizes and manages three-dimensional models such as clean rooms, equipment and the like in the virtual three-dimensional scene, and reflects consistency and vivid effects of illumination and shadow display. The model synchronization module mainly realizes the consistency and synchronization of the display and the operation of the dynamic model.
In the embodiment, in the clean room digital twin module, a data calculation and analysis submodule is provided with a data storage module, a data analysis module, a clean room equipment running state identification algorithm, an air flow field analysis algorithm and a prediction evaluation algorithm; the digital twin module is in communication connection with the perception interaction module, the data acquired and operated by the measurement perception submodule of the perception interaction module is input to the data analysis and analysis submodule, the data storage module stores the acquired operation data into a corresponding database, the data analysis module filters, digs and fuses the operation data and further analyzes the operation data to obtain a clean room movement state, and the flow field analysis analyzes an air flow field in the clean room or an air duct according to the acquired data to obtain an air flow state in the clean room; the prediction evaluation module performs algorithm reasoning analysis on the equipment operation data based on the collected data by using a big data change prediction algorithm and a maintenance prediction algorithm, and predicts and evaluates the operation state and maintenance time of the next stage of the equipment.
In this embodiment, the application layer of the operation and maintenance system display application module as the intelligent operation and maintenance system includes, but is not limited to, a man-machine interaction module, an operation and maintenance data management module, a clean room digital display module, and a user management module, where the man-machine interaction module establishes information interaction between the system and the user by using an interface, a menu, etc., and the operation and maintenance data management module is used for managing data of the operation and maintenance system including, but not limited to, browsing, tracing, deleting, and sharing data results; the clean room digital display module is used for mainly displaying a three-dimensional model and a data result of the clean room; the user management module is used for managing the information and the use permission of the user. The operation and maintenance system displays the application module as a cross-platform application program which can run, but is not limited to, intelligent devices such as mobile phones, computers, tablets and the like
FIG. 2 is a flow chart of the digital twinning-based clean room intelligent operation and maintenance system of the present invention.
The clean room includes: the system comprises a building main body, a fresh air conditioning system, a process exhaust system, a lighting system, an in-out management system, a safety alarm system and the like, wherein a measurement sensing module in a sensing and interaction module comprises a dust particle sensor, a temperature sensor, a humidity sensor, a current sensor, a voltage sensor and other sensors which are arranged at key positions and equipment in a clean room, and the measurement sensing module acquires cleanliness, temperature and humidity, air pressure, noise, air supply wind speed and other operation parameters in the operation of the clean room. And then the data is sent to a data processing function module in a data calculation and analysis module in a wired or wireless communication mode, the data processing function module carries out pretreatment such as storage, filtration, fusion and excavation on the data, the data is sent to an intelligent analysis and prediction function module, the intelligent analysis and prediction function module carries out data analysis and cluster analysis, an equipment operation model, a depth algorithm and other algorithms are used for carrying out analysis and prediction of operation and maintenance states, and a result is fused with a clean room three-dimensional model sub-module to form a clean room digital twin body, wherein the clean room three-dimensional model sub-module comprises a building main body three-dimensional model, an equipment three-dimensional model, a digital twin rule model, a flow field simulation model, a scene management and other modules. The digital twin body of the clean room sends the digital model to the display application module of the operation and maintenance system for interaction and display, wherein a user can check operation and maintenance prompts, statistics, classification, filtration and other operations of operation data, intuitively check the operation state of equipment, and send control instructions to control the clean room according to requirements.
Example 2:
FIG. 3 is a flow chart of a method of the digital twin-based clean room intelligent operation and maintenance system of the present invention.
The invention also provides a clean room intelligent operation and maintenance method based on the digital twin technology, which is applied to the clean room intelligent operation and maintenance system based on the digital twin technology provided by any one of the technical schemes, and specifically comprises the following steps:
s1: according to the building structure, running equipment and facilities of the clean room, a three-dimensional model of the clean room system is established;
s2: sensors such as temperature, humidity, air granularity, wind speed, voltage, current and the like are arranged at designated positions in the clean room, operation data of the data clean room are collected in real time, and then the operation data are sent to a data calculation and analysis module through communication;
s3: acquiring acquired data, invoking an operation state identification algorithm, an air flow field analysis algorithm and a prediction evaluation algorithm to perform prediction and evaluation operation, and constructing a clean room digital twin body by combining a clean room three-dimensional model;
s4: the digital twin body sends the operation analysis result, the state identification result and the prediction evaluation result to the system display application module, and interacts with a user through an interface, data operation and three-dimensional model display are carried out.
The foregoing examples illustrate only a few embodiments of the invention and are described in detail herein without thereby limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.

Claims (6)

1. A digital twinning-based clean room intelligent operation and maintenance system, comprising: perception interaction module, toilet digital twin module, fortune dimension system display application module, its characterized in that: the perception interaction module is in communication connection with the clean room digital twin module; the clean room digital twin module is connected with the operation and maintenance system display application module, a measurement sensing module and an interaction feedback module are arranged in the sensing interaction module, and a measurement sensing submodule of the sensing interaction module is used for collecting operation data, state data and environment data in the clean room operation system; the interactive feedback submodule is used for executing commands, result feedback and state identification, a clean room three-dimensional model submodule and a data calculation and analysis submodule are arranged in the clean room digital twin module, the clean room three-dimensional model submodule is used for establishing a clean room building main body and an equipment three-dimensional virtual model and synchronizing and managing the clean room building main body and the equipment three-dimensional virtual model, the data calculation and analysis submodule is used for analyzing and calculating clean room operation data and generating information required by operation and maintenance, the measurement perception submodule comprises a sensor detection module, the sensor detection module comprises an air pressure detection sensor, a noise detection sensor, an air cleanliness detection unit, an air conditioning equipment operation detection unit, a flow detection unit, a clean room inlet and outlet detection unit and an illuminance detection sensor, and the air cleanliness detection unit comprises a dust particle sensor, a temperature detection sensor and a humidity detection sensor, wherein the dust particle sensor is used for detecting the number of dust particles contained in air; the temperature detection sensor is used for detecting the temperature of indoor air; the humidity sensor is used for detecting the humidity of indoor air, and in the clean room digital twin module, the clean room three-dimensional model submodule comprises a clean room three-dimensional model, an equipment three-dimensional model, a model synchronization module and a clean room scene management module, wherein the clean room three-dimensional model comprises a clean room wall body, doors and windows, a ground surface and a roof; the equipment three-dimensional model comprises three-dimensional models of air conditioning equipment, fans, illumination and production equipment; the scene management module mainly organizes and manages three-dimensional models of clean rooms and equipment in a virtual three-dimensional scene, the model synchronization module mainly realizes the consistency and synchronization of the display and operation of dynamic models, and in the clean room digital twin module, the data calculation and analysis submodule is provided with a data storage module, a data analysis module, a clean room equipment operation state identification algorithm, an air flow field analysis algorithm and a prediction evaluation algorithm; the digital twin module is in communication connection with the perception interaction module, the data acquired and operated by the measurement perception submodule of the perception interaction module is input to the data analysis and analysis submodule, the data storage module stores the acquired operation data into a corresponding database, the data analysis module filters, digs and fuses the operation data and further analyzes the operation data to obtain a clean room movement state, and the flow field analysis analyzes an air flow field in the clean room or an air duct according to the acquired data to obtain an air flow state in the clean room; the prediction evaluation module performs algorithm reasoning analysis on the equipment operation data based on the collected data by using a big data change prediction algorithm and a maintenance prediction algorithm, and predicts and evaluates the operation state and maintenance time of the next stage of the equipment.
2. The digital twinning-based clean room intelligent operation and maintenance system of claim 1, wherein: the air conditioning equipment operation detection unit comprises a current detection sensor, a voltage detection sensor, an air inlet and outlet temperature detection sensor and a working time record, wherein the current detection sensor is used for detecting the current of the air conditioning equipment during operation; the voltage sensor is used for detecting the voltage of the air conditioning equipment when in operation; the air inlet and outlet temperature detection sensor is used for detecting the temperatures of an air outlet and an air inlet of air conditioning equipment; the working time record is used for recording the working time of the air conditioning equipment.
3. The digital twinning-based clean room intelligent operation and maintenance system of claim 1, wherein: the flow detection unit comprises a fan rotating speed sensor, a wind pressure detection sensor and a wind speed detection sensor, and the current detection sensor is used for detecting current when the air conditioning equipment operates; the voltage sensor is used for detecting the voltage of the air conditioning equipment when in operation; the air inlet and outlet temperature detection sensor is used for detecting the temperature of an air outlet and an air inlet of air conditioning equipment.
4. The digital twinning-based clean room intelligent operation and maintenance system of claim 1, wherein: the measurement perception sub-module further comprises a video acquisition module, and the video acquisition device is in communication connection with the clean room digital twin module; the video acquisition module is arranged at a designated position in the clean room; and video image acquisition and monitoring are carried out on the appointed space.
5. The digital twinning-based clean room intelligent operation and maintenance system of claim 1, wherein: the interactive feedback sub-module comprises a command receiving device, a control switch and an alarm device, wherein the command receiving device is used for receiving and executing a command sent by a user or a controller, and the control switch is used for controlling the power on and off of equipment; the alarm device mainly gives out alarm prompts such as sound, flashing light and the like.
6. A digital twin-based clean room intelligent operation and maintenance method applied to the digital twin-based clean room intelligent operation and maintenance system as set forth in any one of the claims 1-5, which specifically comprises the following steps:
s1: according to the building structure, running equipment and facilities of the clean room, a three-dimensional model of the clean room system is established;
s2: sensors including temperature, humidity, air granularity, wind speed, voltage, current and the like are arranged at designated positions in the clean room, operation data of the data clean room are collected in real time, and then the operation data are sent to a data calculation and analysis module through communication;
s3: acquiring acquired data, invoking an operation state identification algorithm, an air flow field analysis algorithm and a prediction evaluation algorithm to perform prediction and evaluation operation, and constructing a clean room digital twin body by combining a clean room three-dimensional model;
s4: the digital twin body sends the operation analysis result, the state identification result and the prediction evaluation result to the system display application module, and interacts with a user through an interface, data operation and three-dimensional model display are carried out.
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