CN116703300A - Fool-proof control system and method for replacing acid bucket for semiconductor manufacturing process - Google Patents
Fool-proof control system and method for replacing acid bucket for semiconductor manufacturing process Download PDFInfo
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- 238000007726 management method Methods 0.000 description 27
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- 235000012431 wafers Nutrition 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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Abstract
The invention relates to a fool-proof control system for replacing an acid bucket in a semiconductor manufacturing process, which comprises a management server, a handheld PDA code scanning data terminal and a Bluetooth module; the Bluetooth module is arranged on the chemical equipment, interacts data with the PLC of the chemical equipment and controls the door of the chemical equipment; the Bluetooth module is in communication connection with the handheld PDA code scanning data terminal, and the Bluetooth module sets the communication distance between the Bluetooth module and the handheld PDA code scanning data terminal, and if the communication distance exceeds the communication distance, the communication connection is disconnected; the management server is connected with the handheld PDA code scanning data terminal in real time through the information network and the wireless access point, updates and downloads management data to the handheld PDA code scanning data terminal in real time, and uploads a code scanning result, an operation record and a result photo of the handheld PDA code scanning data terminal to the management server in real time for data record; the invention strictly prescribes the authority and the operation flow, ensures the safety and the reliability of the replacement of the acid bucket, and avoids the occurrence of the error of the replacement of the acid bucket.
Description
[ technical field ]
The invention relates to the technical field of semiconductor manufacturing, in particular to a foolproof control system and method for replacing an acid bucket in the semiconductor manufacturing.
[ background Art ]
In semiconductor manufacturing processes, a large variety of chemicals are used, most of which are transported to a factory end using 200L acid drums as packaging materials and supplied to a process equipment end through Chemical Delivery System (CDS) equipment. Tens of chemical supply devices are arranged in the CDS system, the shapes and the sizes of acid barrels used by the devices are the same, and once wrong chemicals are supplied to the processing device by mistake, not only can pipeline pollution of the chemical devices be caused, wafers of product silicon wafers are scrapped, but also chemical reactions can occur among the chemicals, and serious safety accidents such as fire and even explosion can be caused.
Therefore, the chemical equipment must be provided with a mechanism to prevent the error of replacing the acid bucket. In the process of supplying chemical equipment in longitudinal view, when the chemicals in the acid barrels are used up, an operator is required to manually open an equipment door, take out the empty acid barrels from the equipment, take out the full new acid barrels from a warehouse, put the new acid barrels into the equipment, scan the attached chemical name bar codes on the acid barrels through a bar code scanner installed on the equipment, judge whether the chemical name bar codes are consistent with the equipment, if so, consider that the barrel replacement is successful, after the operator connects a pipeline, close the equipment door, and press a start button to inform the equipment that the barrel replacement is successful; if the acid barrels are inconsistent, the equipment alarms to remind operators of confirming whether the acid barrels are correct.
However, in the process, the technical guarantee of preventing the acid bucket from being replaced by mistake is to scan the code to judge whether the bar codes are consistent or not, and the bar codes are thinner and are more guaranteed by depending on a management system and the service proficiency of operators. In actual operation, a new operator will scan the bar code on the correct acid tank, but a major error will occur in loading additional acid tanks into the equipment.
[ summary of the invention ]
The invention aims to solve the defects and provide an acid bucket replacement fool-proof control system for a semiconductor manufacturing process, which strengthens the authentication of chemical equipment, operators and bar codes, strictly prescribes rights and operation flow, ensures the safety and reliability of acid bucket replacement and avoids the occurrence of acid bucket replacement errors.
The acid bucket replacement fool-proof control system for the semiconductor manufacturing process comprises a management server 1, an information network 2 based on the Ethernet, a wireless access point 3 based on the Ethernet, a handheld PDA code scanning data terminal 4 and a Bluetooth module 5; the Bluetooth module 5 is arranged on the chemical equipment 7, and the Bluetooth module 5 and the chemical equipment 7 interact data through a PLC and control a door lock of the chemical equipment 7; when the chemical equipment 7 changes the acid bucket, the Bluetooth module 5 is informed to open the door through the PLC; after the barrel is replaced, the Bluetooth module 5 informs the chemical equipment 7 of the completion of barrel replacement and closes the door; the Bluetooth module 5 is in communication connection with the handheld PDA code scanning data terminal 4, the handheld PDA code scanning data terminal 4 scans a bar code on the chemical raw material acid barrel 6, the Bluetooth module 5 sets a communication distance between the handheld PDA code scanning data terminal 4, if the communication distance exceeds the communication distance, the communication connection between the Bluetooth module 5 and the handheld PDA code scanning data terminal 4 is disconnected, and the handheld PDA code scanning data terminal 4 cannot perform scanning operation when no Bluetooth connection exists; the management server 1 is connected with the handheld PDA code scanning data terminal 4 in real time through the information network 2 and the wireless access point 3, updates and downloads management data to the handheld PDA code scanning data terminal 4 in real time, and uploads code scanning results, operation records and result photos of the handheld PDA code scanning data terminal 4 to the management server 1 in real time for data recording.
Further, a power adjusting knob is arranged on the bluetooth module 5, and the bluetooth module 5 sets the communication distance between the bluetooth module and the handheld PDA code scanning data terminal 4 by adjusting the power adjusting knob, so as to ensure that the scanning action of the handheld PDA code scanning data terminal 4 is completed at the current chemical equipment 7.
Further, the management server 1 authorizes qualified operators to replace acid barrels of the specified chemical equipment 7 through the authority management chemical equipment 7, the handheld PDA code scanning data terminal 4 and the operators, and scans bar codes on the chemical raw material acid barrels 6 by using the specified handheld PDA code scanning data terminal 4, so that authority regulation is enhanced, and operation safety is further improved.
Further, the management server 1 has a data report function, and the management server 1 queries and reports corresponding data through the data report function and displays all data through a report.
Further, the hand-held PDA code scanning data terminal 4 is developed with operation software, and the operation flow of replacing the acid bucket and the authority of the operator are regulated by the operation software to prevent the error of replacing the acid bucket.
Further, at least two bluetooth modules 5 are arranged in parallel, and each bluetooth module 5 is respectively installed on a corresponding chemical device 7 and is in communication connection with a corresponding handheld PDA code scanning data terminal 4.
The invention also provides a fool-proof method for replacing the fool-proof control system with the acid bucket for the semiconductor manufacturing process, which comprises the following steps:
step1, when the chemical equipment 7 detects that the chemical raw material acid barrel 6 is empty and the acid barrel needs to be replaced, notifying an operator and simultaneously sending a request to the Bluetooth module 5;
step2, an operator carries a handheld PDA code scanning data terminal 4 to reach the vicinity of the Bluetooth module 5, the handheld PDA code scanning data terminal 4 establishes and maintains Bluetooth connection with the Bluetooth module 5, and the operator uses the handheld PDA code scanning data terminal 4 to scan the own work number bar code so as to determine that the operator has the right to use the handheld PDA code scanning data terminal 4 and operate the Bluetooth module 5;
step3, an operator uses the handheld PDA code scanning data terminal 4 to send a command to the Bluetooth module 5 to open a door of the chemical equipment 7, and an empty acid bucket is taken out;
step4, an operator uses the handheld PDA code scanning data terminal 4 to scan a medicine name bar code attached to the new acid barrel, so that the acid barrel can be replaced after the correct and error-free operation is ensured;
step5, an operator uses the handheld PDA code scanning data terminal 4 to photograph and store the newly replaced acid barrel;
step6, the operator uses the handheld PDA code scanning data terminal 4 to send an instruction to the Bluetooth module 5 to close the door, and the Bluetooth module 5 informs the chemical equipment 7 that barrel replacement is completed, and the chemical equipment 7 continues to supply acid.
Further, step4 and Step5 further include the Step that an operator uses the handheld PDA code scanning data terminal 4 to scan other bar code information except the medicine name attached to the new acid bucket, so as to comprehensively verify the information.
Further, in the whole process from Step1 to Step6, the hand-held PDA code scanning data terminal 4 is connected with the bluetooth module 5, so as to ensure that the scanning action of the hand-held PDA code scanning data terminal 4 is completed at the current chemical device 7, the hand-held PDA code scanning data terminal 4 is connected with the management server 1 through the information network 2 and the wireless access point 3, and the operation record, the code scanning result and the reserved photo are saved in the database in real time.
Compared with the prior art, the invention has the following advantages:
(1) According to the invention, the permission and the operation flow are strictly regulated by the acid bucket replacement control system, so that the phenomenon of acid bucket replacement errors is avoided;
(2) The invention ensures that the operation must occur near the chemical equipment (within 2 m) by adjusting the bluetooth communication power to avoid the influence of similar acid barrels stored aside;
(3) The invention aims at the chemical acid bucket replacement process in the semiconductor manufacturing process, strengthens the authentication of chemical equipment, operators and bar codes, and ensures the safety and reliability of acid bucket replacement;
(4) The invention reserves the photo of the newly replaced acid bucket as data backtracking and evidence retention, so that the bucket replacing process can be traced, and all data can be displayed through a report.
[ description of the drawings ]
FIG. 1 is a schematic diagram of the control system of the present invention;
FIG. 2 is a schematic diagram of the connection of a Bluetooth module to a chemical device according to the present invention;
FIG. 3 is a schematic flow chart of the fool-proofing method of the present invention;
in the figure: 1. the system comprises a management server 2, an information network 3, a wireless access point 4, a handheld PDA code scanning data terminal 5, a Bluetooth module 6, a chemical raw material acid barrel 7 and chemical equipment.
Detailed description of the preferred embodiments
As shown in the attached drawings, the invention provides an acid bucket replacement fool-proof control system for a semiconductor manufacturing process, which comprises a management server 1, an information network 2 based on the ethernet, a wireless access point 3 based on the ethernet, a handheld PDA code scanning data terminal 4 and a Bluetooth module 5; the Bluetooth module 5 is arranged on the chemical equipment 7, and the Bluetooth module 5 and the chemical equipment 7 interact data through a PLC and control a door lock of the chemical equipment 7; when the chemical equipment 7 changes the acid bucket, the Bluetooth module 5 is informed to open the door through the PLC; after the barrel is replaced, the Bluetooth module 5 informs the chemical equipment 7 of the completion of barrel replacement and closes the door; the Bluetooth module 5 is in communication connection with the handheld PDA code scanning data terminal 4, the handheld PDA code scanning data terminal 4 scans the bar code on the chemical raw material acid barrel 6, the Bluetooth module 5 sets the communication distance between the handheld PDA code scanning data terminal 4, if the communication distance exceeds the communication distance, the communication connection between the Bluetooth module 5 and the handheld PDA code scanning data terminal 4 is disconnected, and the handheld PDA code scanning data terminal 4 cannot perform scanning operation when no Bluetooth connection exists; the management server 1 is connected with the handheld PDA code scanning data terminal 4 in real time through the information network 2 and the wireless access point 3, updates and downloads management data to the handheld PDA code scanning data terminal 4 in real time, and uploads code scanning results, operation records and result photos of the handheld PDA code scanning data terminal 4 to the management server 1 in real time for data records; the acid bucket replacement control system aims at the chemical raw material acid bucket replacement process, a set of control system based on bar code scanning is added outside the equipment control system, authentication of equipment, operators and bar codes is enhanced, and photos of newly replaced acid buckets are reserved as data backtracking and evidence retention.
The Bluetooth module 5 is provided with a power adjusting knob, and the Bluetooth module 5 sets the communication distance between the Bluetooth module 5 and the handheld PDA code scanning data terminal 4 by adjusting the power adjusting knob so as to ensure that the scanning action of the handheld PDA code scanning data terminal 4 is completed at the current chemical equipment 7; the Bluetooth modules 5 are provided with at least two Bluetooth modules 5 which are mutually connected in parallel, and each Bluetooth module 5 is respectively installed on the corresponding chemical equipment 7 and is in communication connection with the corresponding handheld PDA code scanning data terminal 4, so that the acid barrel replacement of the plurality of chemical equipment 7 can be controlled.
The management server 1 authorizes qualified operators to replace acid barrels for the appointed chemical equipment 7 through the authority management chemical equipment 7, the handheld PDA code scanning data terminal 4 and the operators, and scans bar codes on the chemical raw material acid barrels 6 by using the appointed handheld PDA code scanning data terminal 4; the management server 1 has a data report function, and the management server 1 queries and reports corresponding data through the data report function and displays all the data through a report.
The invention is further illustrated below in connection with specific examples:
in the acid bucket replacement control system, a Bluetooth module 5 is a core component of the system and is arranged on chemical equipment of the original system; the bluetooth module 5 is not only responsible for PLC interaction data with the chemical plant, but also takes over the control of the door of the chemical plant (as shown in fig. 2). When the chemical equipment needs to replace the acid bucket, the Bluetooth module 5 needs to be informed to open the door, but the door cannot be directly opened; after the barrel is replaced, the Bluetooth module 5 informs the chemical equipment of the completion of barrel replacement, and the Bluetooth module 5 closes the door; this mode prevents an operator from skipping the safety mechanism to open the door and replace the acid bucket by an improper operation method from the equipment side.
The bluetooth module 5 is also responsible for communicating with the handheld PDA code scanning data terminal 4, and by adjusting the power adjusting knob on the bluetooth module 5, the communication distance with the handheld PDA code scanning data terminal 4 can be set, and if the communication distance exceeds the communication distance, the connection between the bluetooth module 5 and the handheld PDA code scanning data terminal 4 can be disconnected, and the handheld PDA code scanning data terminal 4 cannot be operated when no bluetooth is connected. Because the bluetooth module 5 is installed in the chemical equipment, the distance is shortened to ensure that an operator must be near the inside or the outside (within 2 m) of the equipment when using the handheld PDA to scan codes and the like, so that the operator can be prevented from carrying the wrong acid bucket placed near the local machine into the equipment after scanning the acid bucket bar codes near other machines.
The management server 1 is a control core of the system, and the management server 1 manages all chemical equipment 7, operators and handheld PDA code scanning data terminals 4 through authorities; only authorized operators can replace the acid bucket for the designated chemical equipment 7 and must scan the bar code on the acid bucket using the designated hand-held PDA code scanning data terminal 4. The management server 1 is connected with the handheld PDA code scanning data terminal 4 in real time through the information network 2 and the wireless access point 3, updates and downloads management data of the management server 1 to the handheld PDA code scanning data terminal 4 in real time, and uploads code scanning results, operation records, result photos and the like of the handheld PDA code scanning data terminal 4 to the management server 1 in real time for data records. The management server 1 has a data report function, and can conveniently inquire and report corresponding data.
The hand-held PDA code scanning data terminal 4 is a main tool for system operation, and the error of replacing the acid barrel is prevented by developing operation software and strictly prescribing the operation flow of replacing the acid barrel and the authority of personnel. (as shown in FIG. 3)
The fool-proof method of the acid bucket replacement control system mainly comprises the following steps:
step1, when the chemical device 7 detects that the acid tank is empty and the acid tank needs to be replaced, the request is sent to the bluetooth module 5 while notifying the operator.
Step2, the operator carries the handheld PDA code scanning data terminal 4 to reach the vicinity of the device (Bluetooth module 5), bluetooth connection is established and maintained, the handheld PDA code scanning data terminal 4 is used for scanning the own work number bar code, and the operator is determined to have the right to use the handheld PDA code scanning data terminal 4 and operate the current device (Bluetooth module 5).
Step3, the operator uses the handheld PDA code-scanning data terminal 4 to send a command to the Bluetooth module 5 to open the door of the chemical device 7 and take out the empty acid bucket.
Step4, an operator uses the handheld PDA code scanning data terminal 4 to scan the medicine name bar code attached to the new acid barrel, and the acid barrel is replaced after the medicine name bar code is correctly replaced.
Step5, the operator uses the handheld PDA code scanning data terminal 4 to scan other bar code information (optional) attached to the new acid bucket, so as to comprehensively verify the information.
Step6, the operator uses the handheld PDA code scanning data terminal 4 to photograph and store the newly replaced acid bucket.
Step7, the operator uses the handheld PDA code scanning data terminal 4 to send an instruction to the Bluetooth module 5 to close the door, and the Bluetooth module 5 informs the chemical equipment 7 that barrel replacement is completed, and the chemical equipment 7 continues acid supply.
In the whole process, the hand-held PDA code-scanning data terminal 4 must be connected with the Bluetooth module 5 to ensure that all actions are completed at the current device; the hand-held PDA code scanning data terminal 4 is connected with the management server 1 through the information network 2 and the wireless access point 3, and stores operation records, code scanning results, reserved pictures and the like in a database in real time.
The details not described in detail in this specification belong to the prior art known to those skilled in the art, all standard parts used by the standard parts can be purchased from the market, the special-shaped parts can be customized according to the description of the specification and the drawings, the specific connection modes of all parts adopt conventional means such as mature bolts, rivets and welding in the prior art, the machinery, the parts and the equipment adopt conventional models in the prior art, and the circuit connection adopts conventional connection modes in the prior art, which are not described in detail.
The present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications that do not depart from the spirit and principles of the invention are intended to be equivalent substitutes and are included in the scope of the invention.
Claims (9)
1. A fool-proof control system for replacing an acid bucket for a semiconductor manufacturing process is characterized in that:
the system comprises a management server (1), an Ethernet-based information network (2), an Ethernet-based wireless access point (3), a handheld PDA code scanning data terminal (4) and a Bluetooth module (5);
the Bluetooth module (5) is arranged on the chemical equipment (7), and the Bluetooth module (5) and the chemical equipment (7) interact data through a PLC and control a door lock of the chemical equipment (7); when the chemical equipment (7) changes the acid bucket, the Bluetooth module (5) is informed to open the door through the PLC; after the barrel is replaced, the Bluetooth module (5) informs the chemical equipment (7) of the completion of barrel replacement, and the door is closed;
the Bluetooth module (5) is in communication connection with the handheld PDA code scanning data terminal (4), the handheld PDA code scanning data terminal (4) scans a bar code on the chemical raw material acid barrel (6), the Bluetooth module (5) sets a communication distance between the handheld PDA code scanning data terminal (4), if the communication distance exceeds the communication distance, the communication connection between the Bluetooth module (5) and the handheld PDA code scanning data terminal (4) is disconnected, and the handheld PDA code scanning data terminal (4) cannot perform scanning operation when no Bluetooth connection exists;
the management server (1) is connected with the handheld PDA code scanning data terminal (4) in real time through the information network (2) and the wireless access point (3), updates and downloads management data to the handheld PDA code scanning data terminal (4) in real time, and uploads a code scanning result, an operation record and a result photo of the handheld PDA code scanning data terminal (4) to the management server (1) in real time for data record.
2. The acid bucket replacement fool-proof control system for semiconductor manufacturing process according to claim 1, wherein: the Bluetooth module (5) is provided with a power adjusting knob, and the Bluetooth module (5) sets the communication distance between the Bluetooth module and the handheld PDA code scanning data terminal (4) by adjusting the power adjusting knob so as to ensure that the scanning action of the handheld PDA code scanning data terminal (4) is completed at the current chemical equipment (7).
3. The acid bucket replacement fool-proof control system for semiconductor manufacturing process according to claim 1, wherein: the management server (1) is used for managing the chemical equipment (7), the handheld PDA code scanning data terminal (4) and operators through authorities, and the management server (1) authorizes qualified operators to replace acid barrels for the specified chemical equipment (7) and uses the specified handheld PDA code scanning data terminal (4) to scan bar codes on the chemical raw material acid barrels (6).
4. The acid bucket replacement fool-proof control system for semiconductor manufacturing process according to claim 1, wherein: the management server (1) is provided with a data report function, and the management server (1) inquires and reports corresponding data through the data report function and displays all data through a report.
5. The acid bucket replacement fool-proof control system for semiconductor manufacturing process according to claim 1, wherein: the hand-held PDA code scanning data terminal (4) is developed with operation software, and the operation flow of replacing the acid bucket and the authority of an operator are regulated by the operation software so as to prevent the error of replacing the acid bucket.
6. The acid bucket replacement fool-proof control system for semiconductor manufacturing process according to claim 1, wherein: the Bluetooth modules (5) are provided with at least two, the at least two Bluetooth modules (5) are arranged in parallel, and each Bluetooth module (5) is respectively installed on corresponding chemical equipment (7) and is in communication connection with a corresponding handheld PDA code scanning data terminal (4).
7. A fool-proof method of the acid bucket replacement fool-proof control system for semiconductor processing according to any one of claims 1 to 6, comprising the steps of:
step1, when the chemical equipment (7) detects that the chemical raw material acid barrel (6) is empty and the acid barrel needs to be replaced, notifying an operator, and simultaneously sending a request to the Bluetooth module (5);
step2, an operator carries a handheld PDA code scanning data terminal (4) to reach the vicinity of the Bluetooth module (5), the handheld PDA code scanning data terminal (4) is connected with the Bluetooth module (5) in a Bluetooth mode, and the operator scans the own work number bar code by using the handheld PDA code scanning data terminal (4) so as to determine that the operator has the right to use the handheld PDA code scanning data terminal (4) and operate the Bluetooth module (5);
step3, an operator uses the handheld PDA code scanning data terminal (4) to send a command to the Bluetooth module (5) to open a door of the chemical equipment (7) and take out an empty acid bucket;
step4, an operator uses a handheld PDA code scanning data terminal (4) to scan a medicine name bar code attached to the new acid barrel, so that the acid barrel can be replaced after the acid barrel is correctly replaced;
step5, an operator uses a handheld PDA code scanning data terminal (4) to photograph and store the newly replaced acid barrel;
step6, an operator uses the handheld PDA code scanning data terminal (4) to send an instruction to the Bluetooth module (5) to close the door, the Bluetooth module (5) informs the chemical equipment (7) that barrel replacement is completed, and the chemical equipment (7) continues acid supply.
8. The method of claim 7, wherein: step4 and Step5 also include the following Step, the operator uses the hand-held PDA to sweep the data terminal (4) and scans other bar code information except medicine name that the new acid bucket is attached, in order to verify the information completely.
9. The method of claim 7, wherein: in the whole process from Step1 to Step6, the handheld PDA code scanning data terminal (4) is connected with the Bluetooth module (5) to ensure that the scanning action of the handheld PDA code scanning data terminal (4) is completed at the current chemical equipment (7), the handheld PDA code scanning data terminal (4) is connected with the management server (1) through the information network (2) and the wireless access point (3), and operation records, code scanning results and reserved photos are stored in a database in real time.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310710142.6A CN116703300A (en) | 2023-06-15 | 2023-06-15 | Fool-proof control system and method for replacing acid bucket for semiconductor manufacturing process |
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| CN202310710142.6A CN116703300A (en) | 2023-06-15 | 2023-06-15 | Fool-proof control system and method for replacing acid bucket for semiconductor manufacturing process |
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